KR100727680B1 - Injector grid for high current ion beam having improved cooling circuit and fabrication method thereof - Google Patents

Abstract

An injector grid for a high current ion beam having an improved cooling circuit and a manufacturing method thereof are provided to improve work efficiency and to reduce manufacturing cost by improving a cooling circuit and a quality of an injected ion beam. An injector grid for a high current ion beam having an improved cooling circuit includes a single body flat plate, a cooling water distribution tube(120), a pair of installation units, a cooling line connection unit, and a plurality of cooling pipes(122). The single body flat plate has a plurality of beam injection holes penetrated along a thickness direction. The cooling water distribution tube(120) are formed on both ends of the flat plate. The pair of installation units are coupled to the flat plate. The cooling line connection unit provides cooling water to the cooling water distribution tube(120). The plurality of cooling pipes(122) is formed between columns of the beam injection holes between the cooling water distribution tubes(120) along a lengthwise direction of the flat plate.

Description

High current ion beam drawing electrode with improved cooling circuit and manufacturing method therein {INJECTOR GRID FOR HIGH CURRENT ION BEAM HAVING IMPROVED COOLING CIRCUIT AND FABRICATION METHOD THEREOF}

1 is a block diagram schematically showing a beam incidence device.

FIG. 2A is a plan view illustrating the beam lead-out electrode unit of FIG. 1.

FIG. 2B is a perspective view showing in detail one of the beam lead-out electrodes of FIG. 2A.

FIG. 2C is a cross-sectional view taken along the line 2c-2c of FIG. 2B.

3 is a perspective view of the beam lead-out electrode according to the present invention.

4 is a front view of the beam lead-out electrode of FIG. 3.

FIG. 5 is a plan view of the beam lead-out electrode of FIG. 3.

FIG. 6 is a cross-sectional view taken along line 6-6 of FIG. 5.

FIG. 7 is a cross-sectional view taken along line 7-7 of FIG. 5.

8 is a cross-sectional view taken along line 8-8 of FIGS. 4 and 5.

9A to 9F are perspective views illustrating a method of manufacturing a beam lead-out electrode according to the present invention.

<Explanation of symbols of main parts in drawings>

10: beam extraction electrode unit 20: ion source

30: target 100: beam lead-out electrode unit

110: drawer 114: shoulder

116: outlet 118: cooling tube

120: cooling water distribution pipe 122: cooling pipe

150: bridge 156: cooling line connector

170: screw

The present invention relates to an ion beam extraction electrode used in a large current ion beam injector, and more particularly, a large current ion having an improved cooling circuit so as to improve the quality of the extracted ion beam and increase operating time by improving the cooling circuit. A beam drawing electrode and its manufacturing method are related.

The high current ion beam incidence device is composed of various components to effectively transport the beam made from the ion source to the plasma center surrounded by the strong magnetic field. An example of such an ion beam incidence apparatus is shown in FIG.

The beam incidence apparatus shown in FIG. 1 is composed of an ion source 20 for generating ions and a beam extraction electrode unit 10, and the ion beam B generated from the ion source is an electrode of the beam extraction electrode unit 10 ( Through 100, it is directed to the plasma center, i.e., the target 30, called tokamak.

As shown in FIG. 2A, the beam lead-out electrode unit 10 holds four beam lead-out electrodes 100A-100D, and ends of the support 200, the coolant line 202, and the support 200 supporting them. It consists of an insulator 206 connecting the support holder 204 and the support holder 204. On the other hand, the beam lead-out electrode is also referred to as the plasma grid 100A, the gradient grid 100B, the deceleration grid 100C and the ground grid 100D, respectively, and each has a unique function, but the basic configuration is the same.

Each beam extraction electrode 100A-100D of the ion beam extraction electrode unit 10 is made of oxygen-free copper as a vacuum and high voltage component, and has a configuration as shown in FIGS. 2B and 2C. .

The beam lead-out electrode 100A-100D includes a flat lead-out unit 110 and a pair of legs 150 extending downward from both ends of the lead-out unit 110, and an ion beam B is provided at the lead-out unit 110. Nozzles, that is, the outlet port 116, are formed. Leg 150 is a mounting portion for mounting the beam extraction electrode (100A-100D) to the above-described support (200).

As described above, the ion beam B generated in the ion source 20 is accelerated through the outlet 116 of the lead electrode 100A-100D and guided to the target 30. The outlet 116 requires precise dimensions to perform this function.

On the other hand, a portion of the ion beam (B) during operation is collided with the outlet 110 around the outlet 116 while passing through the outlet 116. Although the amount of collisions is small, the ion beam B has a large power (for example, a voltage of 120 kV and a current of 65 A), thereby transferring large energy to the lead-out unit 110. The high energy drawer 110 is thus expanded and the material is changed, thereby changing the shape and dimensions of the outlet 116, which requires precise dimensions.

In this case, the lead-out port 116 is inferior in accuracy, and the focus shifts, and the ion beam B cannot be guided precisely to the target 30. That is, the entire ion beam extraction electrode unit 10, such as deterioration of the ion beam B guided to the target 30, cannot perform its function. In addition, when such a phenomenon progresses, the beam lead-out electrode 100A-100D including the lead unit 110 may be damaged.

In order to prevent such a problem, the beam lead-out electrode 100A-100D, particularly the lead part 110, should be maintained at a constant temperature.

To this end, as shown in FIGS. 2B and 2C, a plurality of minute cooling tubes 122 (for convenience, only one dotted line in FIG. 2B) is installed between the outlets 116 in the outlet 110, and the legs 150 are disposed on the legs 150. Cooling water inlet 156a and outlet 156b are provided to cool the lead-out unit 110.

That is, the coolant flowing into the coolant inlet 156a flows along the cooling tube 122 through the manifold or the coolant distribution pipe 120, and then flows out to the outlet 156b on the opposite side, whereby the outlet 110, particularly the outlet 116, is discharged. ) The periphery is cooled to allow the beam lead-out electrodes 100A-100D to perform their functions.

On the other hand, the cooling tube 122 is formed in the lead portion 110 in the following process. That is, after preparing the upper plate 112a and the lower plate 112b each having a groove to be the cooling tube 122 separately, as shown in FIGS. 2B and 2C, the upper plate 112a and the lower plate 112b are mutually provided. The lead-out part 110 in which the cooling pipe 122 was formed is manufactured by overlapping and forming the junction part 112c.

However, withdrawal 0) of the prior art prepared as described above has the following disadvantages. First, in order to combine the upper plate 112a and the lower plate 112b, a plurality of narrow surface portions between the grooves serving as the cooling tubes 122 must be precisely and stably bonded to each other, so this operation is very difficult and expensive. . For example, the cooling tube 122 may not be precisely formed even if only slightly shifted, and the cooling water may leak through the junction portion 112c of the upper plate 112a and the lower plate 112b if a stable bonding is not achieved. In addition, the cooling tube 122 may be clogged due to fragments or protruded portions that are separated during the bonding process.

On the other hand, there is also a method of processing a groove in the lead portion 110 and joining the cooling tube along the groove by brazing or the like. However, since the brazing makes the surface of the lead portion 110 rough, it is not suitable for the lead portion 110 that requires a precise surface. That is, there is a problem that it is difficult to maintain a high voltage and sparks and the like occur.

In addition, brazing weakens the material and thus adversely affects the lead portion 110 exposed to high voltage and high temperature. Therefore, the area around the outlet 116 of the outlet 110 should be avoided as much as possible.

Therefore, the present invention has been made to solve the above-mentioned problems of the prior art, an object of the present invention is to improve the cooling circuit to improve the quality of the extracted ion beam and to improve the operation time of the large current ion improved cooling circuit A beam drawing electrode and a method of manufacturing the same are provided.

Another object of the present invention is to provide a method for manufacturing a high current ion beam extraction electrode which can facilitate the operation and reduce the manufacturing cost by manufacturing the high current ion beam extraction electrode based on mechanical processing.

In order to achieve the above object of the present invention, the present invention provides an ion beam extraction electrode used in a high current ion beam incidence apparatus. The ion beam extraction electrode of the present invention comprises a monolithic plate having a plurality of beam outlets formed in rows in the thickness direction; Cooling water distribution pipes formed at both ends of the plate; And a pair of mounting portions coupled to both ends of the plate, wherein each of the mounting portions has a cooling line connector for supplying cooling water to the cooling water distribution pipe, and the length of the plate between the cooling water distribution pipes inside the flat plate. A plurality of cooling tubes are formed between the rows of the beam outlet along the direction.

The coolant distribution pipe may include a coolant distribution pipe lower section formed at both ends of the plate; A coolant distribution pipe upper section mounted on the lower section of the coolant distribution pipe; And a stopper for closing both ends of the upper and lower sections, wherein the upper and lower sections and the stopper are preferably joined to each other by an electron beam weld.

At this time, the plate is preferably made of oxygen-free copper.

In addition, the mounting portion is preferably coupled to the plate by screwing and soldering.

Furthermore, in order to achieve the above object of the present invention, the present invention provides a method for producing an ion beam extraction electrode used in a high current ion beam incidence apparatus. This electrode manufacturing method

(A) preparing a metal plate of a predetermined dimension;

(B) forming a plurality of minute passages extending in the longitudinal direction of the metal plate inside the metal plate;

(C) forming grooves at both ends of the metal plate in the width direction of the metal plate;

(D) providing a pair of upper sections having grooves of a shape corresponding to the width direction grooves, and coupling to both ends of the metal plate to form distribution pipes;

(E) cutting the lower part of the metal plate leaving only both ends thereof; And

(F) forming a plurality of holes in the thickness direction in the region between the both ends of the metal plate in a thickness direction.

The present invention also provides another manufacturing method for producing an ion beam extraction electrode for use in a high current ion beam incidence apparatus. This electrode manufacturing method

(a) preparing a metal plate of predetermined dimensions;

(b) cutting the lower part of the metal plate with only two edges to form shoulders at both ends;

(c) forming a plurality of holes in a thickness direction in a region between the shoulders of the metal plate;

(d) processing an upper portion of the shoulder to form a groove in the width direction of the metal plate and drilling one or more holes in the shoulder to be connected to the shoulder groove from a side of the shoulder;

(e) forming a plurality of minute passages extending between the shoulder grooves in a length direction of the metal plate inside the metal plate; And

(f) coupling the upper section with the groove corresponding to the shoulder groove to the shoulder and engaging the stopper at both ends of the shoulder groove and the upper section to form a distribution tube.

In this case, the forming of the fine passage of (b) or (e) may be performed by drilling a fine hole by a super drill operation, and trimming the fine hole by a wire operation after the super drill operation.

Here, the step (d) forming the distribution pipe may include coupling the stopper to both ends of the width direction groove and the upper section.

In addition, the electrode manufacturing method may further include coupling a pair of mounting portions formed with a cooling line connector connected to the hole of the shoulder to the shoulder. Here, the mounting portion coupling step may be made by soldering, the soldering is low temperature soldering. On the other hand, the mounting portion coupling step may be made by screwing.

Preferably, the step of forming the distribution tube of (d) or (f) may be performed by electron beam welding.

In addition, the flat plate is preferably made of oxygen-free copper.

Hereinafter, preferred embodiments of the present invention will be described in more detail with reference to the accompanying drawings.

3 is a perspective view of a beam drawing electrode according to the present invention, FIG. 4 is a front view of the beam drawing electrode of FIG. 3, FIG. 5 is a plan view of the beam drawing electrode of FIG. 3, and FIG. 6 is a line 6-6 of FIG. 5. 7 is a cross-sectional view taken along line 7-7 of FIG. 5, and FIG. 8 is a cross-sectional view taken along line 8-8 of FIGS. 4 and 5.

The beam lead-out electrode of the present invention shown in these figures is used in the beam incidence apparatus of FIG. 1 and the beam lead-out electrode unit 10 of FIG. 2A, and is made of oxygen-free copper, and has a flat lead-out portion 110 which is largely flat. It consists of a pair of legs 150 extending downward from both ends of the lead portion (110). Leg 150 is a mounting portion for mounting the beam extraction electrode (100A-100D) to the above-described support (200).

The lead portion 110 is composed of one flat plate 112 and a pair of shoulders 114 respectively connected to the legs 150 at both ends of the flat plate 112. A plurality of outlets 116 are formed in rows in the flat plate 112 in the thickness direction, and a plurality of cooling pipes 122 are drilled between the rows of the outlet ports 116 in the longitudinal direction of the flat plate 112.

Meanwhile, the leg 150 includes a vertical portion 152 connected to the shoulder 114 of the lead portion 110 and a horizontal portion 154 that is bent from the vertical portion 152 and coupled to the support 200 of FIG. 2. It consists of. A cooling line connector 156 is formed on the outer side of the vertical portion 152 to be connected to the cooling line 202 of FIG. 2, and the cooling water passage connected to the cooling line connector 156 is formed inside the leg 150. 158 is formed.

The cooling water path 158 is connected to the manifold or the cooling water distribution pipe 120 extending in the width direction of the drawing part 110 inside the shoulder 114 of the drawing part 110. The cooling water distribution pipe 120 is connected to the plurality of cooling pipes 122. In this configuration, the cooling water supplied from the cooling line 202 through the connector 156 is introduced into the cooling water distribution pipe 120 through the cooling water path 158 and then distributed to the plurality of cooling pipes 122.

At this time, as can be seen in Figure 6, by forming a distribution pipe 120 having a larger diameter than the cooling pipe 122, the coolant fills the distribution pipe 120 and then to each cooling pipe 122 at a constant pressure Can be introduced. Thus, the distribution pipe 120 of this configuration allows the cooling water to be distributed to the cooling pipe 122 at a uniform pressure regardless of whether the cooling pipe 122 is close to or far from the cooling water passage 158.

In this configuration, the cooling water flowing from the cooling line 202 (see FIG. 2) through the cooling line connector 156 flows through the cooling pipe 122 through the cooling water passage 158 and the cooling water distribution pipe 120. Cooled out the lead-out unit 110 by. The coolant then joins at the opposite coolant distribution pipe 120 and then exits to the cooling line 202 via the cooling water passage 158 and the cooling line connector 156.

Such a beam lead-out electrode according to the present invention has a basic configuration and appearance similar to that of FIG. 2B. However, while the lead portion 110 of the conventional beam lead-out electrode is composed of the upper plate 112a and the lower plate 112b and bonded to each other, as shown in FIG. 2C, the lead unit 110 of the present invention is shown in FIG. 7. As can be seen clearly in the single member.

That is, a fine hole is drilled in a position corresponding to the cooling tube 122 through a super-drilling process on the flat plate 112 made of oxygen-free copper, and the cooling tube 122 is completed by trimming these holes through a wire operation. . Therefore, the cooling tube 122 of the present invention is free from the problems of the prior art described above. That is, even if only slightly shifted, the cooling tube may not be precisely formed, and there is no problem that the cooling water may leak through the joint of the upper plate and the lower plate unless a stable bonding is made. In addition, it is also possible to prevent problems such as clogging of the cooling tube due to fragments, parts pushed out, and the like, which are separated in the bonding process. In addition, it is possible to prevent problems due to soldering or brazing observed in other prior arts.

Meanwhile, referring to FIG. 8, the coupling state between the lead unit 110 and the leg 150 will be described. The bottom surface of the lead shoulder 114 and the top surface of the leg 150 are joined to each other by brazing. In addition, a screw hole 130 is formed in the shoulder 114 of the lead portion 110, and screw holes 160 and 162 corresponding thereto are formed in the leg 150. Accordingly, the screw 170 is filled in the screw hole 130 of the lead portion and the screw hole 162 of the leg 150 to couple the lead portion 110 and the leg 150. In this case, the lead portion 110 and the leg 150 are firmly coupled to each other by brazing and screwing.

In addition, a protrusion 164 is formed on the upper surface of the leg 150 to be fitted to the shoulder 114 to serve as a guide for coupling between the lead portion 110 and the leg 150, and at the same time they may be more firmly coupled. To make it possible.

On the other hand, the upper cooling water passage 118 that connects the cooling water distribution pipe 120 and the cooling water passage 158 of the leg 150 is formed. Therefore, when the shoulder 114 and the leg 150 are coupled as described above, the upper cooling water passage 118 passes the cooling water introduced through the cooling water passage 158 of the leg 150 to the upper cooling water distribution pipe 120. Let's do it.

On the other hand, the leg 150 may be coupled in the longitudinal direction of the plate 112, not perpendicular to the plate 112. This is the case of the first ion beam extracting electrode 100A, that is, the plasma grid 100A of FIG. 2. In this case, the shape and arrangement of the shoulder 114 and the leg 150 is slightly changed, but the basic concept and configuration are the same as described above.

Hereinafter, a method of manufacturing a beam lead-out electrode according to an exemplary embodiment of the present invention will be described with reference to FIGS. 9A to 9F.

First, a metal plate 110A as shown in FIG. 9A is prepared. This metal plate 110A is preferably comprised of oxygen-free copper, and its dimension corresponds to the lead-out part 110 of FIG. That is, the width and length are the same as those of the lead portion 110 and the thickness is the same as the height of the shoulder 114 of the lead portion 110.

This metal plate 110A is processed to form an intermediate metal plate 110B as shown in Fig. 9B. That is, a plurality of pipes 122 are formed in the metal plate 110B in the longitudinal direction. This operation first forms a fine hole 122 corresponding to the cooling tube in the metal plate 110B through the super drill operation.

Subsequently, as shown in FIG. 9C, the cooling pipe 122 is obtained through a wire operation in which the wires W are inserted and trimmed in these holes 122. Therefore, the fine holes obtained by the super drill operation is preferably formed with a smaller diameter than the cooling tube 122. In addition, it is preferable for efficiency that a super drill operation is made toward the center from the both ends of the flat plate 112. FIG. On the other hand, the wire operation makes the hole inner diameter uniform while trimming the minute hole formed by the super drill operation.

Then, electron beam welding is performed to close both ends of the cooling tube 122. On the other hand, this step may be omitted by taking other appropriate measures.

Subsequently, half cylindrical grooves, i.e., lower sections 120A, having a shape as shown in Fig. 9D are formed at both ends of the metal plate 110B to obtain the metal plate 110C.

Moreover, the upper cooling water path 118 which penetrates the both ends of the metal plate 110C up and down through drill operation etc. is formed. Of course, this step may be performed before step 9b.

Then, as shown in FIG. 9E, an upper section 120B and a stopper 120C having a shape corresponding to the lower section 120A are prepared and coupled to the lower section 120A. That is, these portions 120A, 120B, and 120C are joined to each other through E-beam welding. When combined in this way, they constitute the cooling water distribution pipe 120 shown in FIG.

Meanwhile, FIG. 9F illustrates a structure in which the cooling water distribution pipe 120 is assembled, that is, the cooling water distribution pipe upper section 120B, the stopper 120C, and the cooling water distribution pipe lower section 120A. These joined parts have a neat appearance and the interface between them is not visually observed. However, in the enlarged part (part indicated by the circle of dashed line) in the A part, the boundary between them is shown as a line to show the coupling state between them. Electron beam welding has the advantage that it is possible to fundamentally prevent the possibility of remaining in the coolant distribution pipe 120, such as a beautiful appearance as well as pieces that may occur in welding or soldering.

On the other hand, part A of FIG. 9F indicates a boundary between them to emphasize the combined state of the distribution pipe upper section 120B, the stopper 120C, and the coolant distribution pipe lower section 120A.

Subsequently, the lower region between both ends of the metal plate 110D of FIG. 9H is removed by cutting or the like, and a plurality of phosphorus outlets 116 are formed in the thickness direction in the plate 110C through a drill operation or a punching operation, as shown in FIG. 9G. The ion beam lead-out unit 110 as described above is obtained.

Next, referring to FIG. 9H, an operation of coupling the leg 150, the coolant distribution pipe upper section 120B, and the stopper 120C to the ion beam extraction unit 110 will be described.

First, a pair of legs 150 having a structure as shown in FIGS. 6 and 8 are prepared, and these legs 150 are integrally formed with the shoulder 114 of the lead-out unit 110 through low temperature brazing and screwing. To combine. That is, the bottom surface of the shoulder 114 and the top surface of the leg 150 are joined to each other by low temperature brazing, and the screw 170 tightly binds the shoulder 114 and the leg 150 to each other. On the other hand, the screw 170 has a thread 172 is formed on the upper portion and the lower portion 174 may be smoothly formed to facilitate the screw fastening operation. Accordingly, the thread 172 is engaged with the screw hole 130 of the shoulder 114 and the screw hole 162 of the leg 150, as shown in FIG. 8, to securely bind the leg 150 to the shoulder 114. do. In addition, the protrusion 164 of the leg 150 is inserted into the shoulder 114 to guide the joining operation between the leg 150 and the shoulder 114 while improving the bonding strength therebetween.

FIG. 9I shows the beam drawing electrode coupled through the operation of FIG. 9H. Leg 150 is integrally coupled to shoulder 114 to obtain the ion beam drawing electrode of the present invention.

As such, by manufacturing a high current ion beam drawing electrode based on mechanical processing such as a super drill operation and a wire operation, the operation can be facilitated and the manufacturing cost can be reduced.

Hereinafter, a method of manufacturing a beam lead-out electrode according to a second embodiment of the present invention will be described with reference to FIGS. 9A and 9I, which precede FIGS. 10A to 10D.

First, a metal plate 110A as shown in FIG. 9A is prepared. This step has been described above with reference to FIG. 9A and will not be repeated.

This metal plate 110A is processed to form a lead-out disk 110B as shown in Fig. 10A. That is, the region between the shoulders 114 is removed by cutting, and the upper portion of the shoulder 114 is formed with a distribution pipe lower section 120A to form the cooling water distribution pipe 120. In addition, the upper cooling water passage 118 is formed through a drill operation or the like. Then, a plurality of outlets 116 are formed in the thickness direction in the flat plate 112 through a drilling operation or a punching operation. Although the above order is preferable for the plurality of work steps described in FIG. 10A, the order may be changed according to the working conditions.

Next, as shown in FIG. 10B, a plurality of pipes 122 are formed in the flat plate 112 between the outlets 116 in the longitudinal direction. This operation first obtains the cooling tube 122 through a wire operation to form a fine hole corresponding to the cooling tube in the flat plate 112 through the super-drilling operation, and to insert the wire (W) in the hole to trim the fine hole. . Therefore, the fine holes obtained by the super drill operation is preferably formed with a smaller diameter than the cooling tube 122. In addition, it is preferable for efficiency that a super drill operation is made toward the center from the both ends of the flat plate 112. FIG. On the other hand, the wire operation makes the hole inner diameter uniform while trimming the minute hole formed by the super drill operation.

Next, referring to FIG. 10C, the operation of coupling the leg 150, the coolant distribution pipe upper section 120B, and the stopper 120C to the lead-out unit 110 will be described.

First, a pair of legs 150 having a structure as shown in FIGS. 6 and 8 are prepared, and these legs 150 are integrally formed with the shoulder 114 of the lead-out unit 110 through low temperature brazing and screwing. To combine. That is, the bottom surface of the shoulder 114 and the top surface of the leg 150 are joined to each other by low temperature brazing, and the screw 170 tightly binds the shoulder 114 and the leg 150 to each other. On the other hand, the screw 170 has a thread 172 is formed on the upper portion and the lower portion 174 may be smoothly formed to facilitate the screw fastening operation. Accordingly, the thread 172 is engaged with the screw hole 130 of the shoulder 114 and the screw hole 162 of the leg 150, as shown in FIG. 8, to securely bind the leg 150 to the shoulder 114. do. In addition, the protrusion 164 of the leg 150 is inserted into the shoulder 114 to guide the joining operation between the leg 150 and the shoulder 114 while improving the bonding strength therebetween.

Meanwhile, the coolant distribution pipe upper section 120B and the stopper 120C are prepared and coupled to the coolant distribution pipe lower section 120A. When combined in this way, they constitute the aforementioned coolant distribution pipe 120.

FIG. 10D shows the beam leading electrode coupled through the operation of FIG. 10C. Leg 150 is integrally coupled to the shoulder 114, the portion corresponding to A of Figure 10c is also integrally coupled to form a coolant distribution pipe 120.

On the other hand, FIG. 10D shows only a configuration in which the components of the coolant distribution pipe 120, that is, the coolant distribution pipe upper section 120B, the stopper 120C, and the coolant distribution pipe lower section 120A are assembled with each other. That is, these portions 120A, 120B, and 120C are joined to each other through E-beam welding. Therefore, the bonded parts have a neat appearance as shown in FIG. 9H.

Accordingly, the same ion beam extraction electrode may be manufactured using the manufacturing method according to another exemplary embodiment of the present invention.

As described above, the high current ion beam extraction electrode according to the present invention can improve the quality of the ion beam drawn out and improve the operating time by improving the cooling circuit. In addition, the manufacturing method according to the present invention can easily avoid the various adverse effects that may be caused on the lead portion while easily forming a fine cooling tube. This not only improves the stability of the outlet and extends its life, but also improves the efficiency of the work and reduces the manufacturing cost.

Although the above has been described with reference to the preferred embodiments of the present invention, those skilled in the art may vary the present invention without departing from the spirit and scope of the present invention as set forth in the claims below. It will be understood that modifications and variations can be made.

Claims (15)

In the ion beam extraction electrode used for a high current ion beam incidence apparatus, A monolithic plate having a plurality of beam outlets formed in rows in the thickness direction; Cooling water distribution pipes formed at both ends of the plate; And A pair of mounting portions coupled to both ends of the plate, Each said mounting portion has a cooling line connector for supplying cooling water to said cooling water distribution pipe, And a plurality of cooling tubes formed in the flat plate between rows of the beam outlet ports along the longitudinal direction of the flat plate between the cooling water distribution pipes. According to claim 1, wherein the cooling water distribution pipe, Coolant distribution pipe lower sections formed at both ends of the plate; A coolant distribution pipe upper section mounted on the coolant distribution pipe lower section; And A stopper for closing both ends of the upper and lower sections, And the upper and lower sections and the stopper are coupled to each other by electron beam welding. The ion beam extraction electrode of claim 1, wherein the flat plate is made of oxygen-free copper. The ion beam extraction electrode of claim 1, wherein the mounting portion is coupled to the flat plate by screwing and soldering. In the ion beam extraction electrode manufacturing method used for a high current ion beam incidence apparatus, (A) preparing a metal plate of a predetermined dimension; (B) forming a plurality of minute passages extending in the longitudinal direction of the metal plate inside the metal plate; (C) forming grooves at both ends of the metal plate in the width direction of the metal plate; (D) providing a pair of upper sections having grooves of a shape corresponding to the width direction grooves, and coupling to both ends of the metal plate to form distribution pipes; (E) cutting the lower part of the metal plate leaving only both ends thereof; And (F) forming a plurality of holes in the thickness direction in the region between the both ends of the metal plate in the thickness direction. In the ion beam extraction electrode manufacturing method used for a high current ion beam incidence apparatus, (a) preparing a metal plate of predetermined dimensions; (b) cutting the lower part of the metal plate with only two edges to form shoulders at both ends; (c) forming a plurality of holes in a thickness direction in a region between the shoulders of the metal plate; (d) processing an upper portion of the shoulder to form a groove in the width direction of the metal plate and drilling one or more holes in the shoulder to be connected to the shoulder groove from a side of the shoulder; (e) forming a plurality of minute passages extending between the shoulder grooves in a length direction of the metal plate inside the metal plate; And (f) coupling an upper section with a groove corresponding to the shoulder groove to the shoulder and engaging a stopper at both ends of the shoulder groove and the upper section to form a distribution tube. Method for producing lead electrode. The method of manufacturing an ion beam extraction electrode according to claim 5 or 6, wherein the forming of the fine passage of (b) or (e) is performed by drilling a fine hole by a super drilling operation. The method of claim 7, wherein the fine hole is trimmed by a wire operation after the super drill operation. 6. The method of claim 5, wherein (d) forming the distribution pipe further comprises coupling a stopper at both ends of the widthwise groove and the upper section. 7. The method of claim 5 or 6, further comprising a mounting portion coupling step of coupling a pair of mounting portions having a cooling line connector connected to the holes of the shoulder to the shoulder. The method of claim 10, wherein the mounting of the mounting unit is performed by soldering. 12. The method of claim 11, wherein the soldering is low temperature soldering. The method of claim 10, wherein the mounting of the mounting unit is performed by screwing. The method of claim 10, wherein the forming of the distribution tube of (d) or (f) is performed by electron beam welding. 7. The method of claim 5 or 6, wherein the plate is made of oxygen-free copper.

Images