KR100726270B1 - Method for forming wiring pattern and method for forming gate electrode of tft - Google Patents

Abstract

An object of this invention is to provide a conductive material layer in the area | region without discharge | released a droplet in the area | region which has a width smaller than the diameter of a droplet.

The width of the first region is the first width, and the width of the second region is the second width that is equal to or less than the first width. The wiring pattern forming method includes the steps of: discharging droplets having a diameter smaller than or equal to the first width and greater than or equal to the second width toward the first region to form the conductive material layer covering the first region and the second region ( A). The step (A) includes a step (a1) of discharging the liquid droplets so that the liquid droplets reach a position facing a boundary between the first area and the second area.

Conductive, droplet, impact, discharge

Description

Method of forming wiring pattern and method of forming gate electrode for TFT {METHOD FOR FORMING WIRING PATTERN AND METHOD FOR FORMING GATE ELECTRODE OF TFT}

BRIEF DESCRIPTION OF THE DRAWINGS It is a schematic diagram which shows the some gate wiring formed by the wiring pattern formation method of Examples 1-3.

It is a schematic diagram which shows the device manufacturing apparatus of Examples 1-3.

3 is a schematic view showing the droplet ejection apparatus of Examples 1 to 3. FIG.

Fig. 4A is a schematic diagram showing a head in the discharge head portion in the droplet ejection apparatus, and Fig. 4B is a schematic diagram showing the discharge portion in the head.

5 is a schematic diagram illustrating a control device in the droplet ejection apparatus.

6A to 6D illustrate a method of forming the bank patterns of the first and second embodiments.

7A to 7D are views for explaining a method of forming the bank patterns of the first and second embodiments.

FIG. 8 is a schematic diagram showing a pattern formation region whose edges are defined by the bank patterns of Examples 1 and 2. FIG.

9 (a) to 9 (d) are schematic views for explaining the discharging step of Examples 1 and 2. FIG.

10 (a) to 10 (d) are schematic diagrams showing a discharging step of Example 1. FIG.

11 is a schematic diagram illustrating an injection period and a scanning range.

12 is a schematic diagram illustrating a discharging step in Example 1. FIG.

13A to 13E are views for explaining a method for manufacturing a TFT device.

14 is a schematic diagram illustrating a discharging step of Example 2. FIG.

15 is a schematic diagram illustrating a discharging step in Example 2. FIG.

(A)-(c) is a figure explaining the method of forming a liquid repellent pattern.

It is a schematic diagram which shows the pattern formation area | region whose edge was defined by the liquid repellent pattern.

18A to 18D are schematic diagrams showing a discharging step of Example 3. FIG.

19 (a) to 19 (c) are schematic diagrams showing electronic devices of the present embodiment.

* Description of the symbols for the main parts of the drawings *

8: conductive layer

8A: Conductive Material

8B: conductive material layer

10: gas

10A: Substrate

10B: device side substrate

12: HMDS layer

14: organic photosensitive material layer

16 · 16P: photoresist layer

16Q: protective layer

18: bank pattern

18B: Bank Section

24: pattern forming area

24A: first zone

24B: second zone

24C: Second Zone

24D: second area

34: gate wiring

34A: Light width

34B, 34C, 34D: Narrow width

35 semiconductor layer

37D37S: Bonding layer

41P: alignment film

42: gate insulating film

44: TFT element

44D: Drain Electrode

44G: Gate Electrode

44S: source electrode

44SL: source electrode wire

45A: second insulating layer

45B: second insulating layer

45C: Contact Hole

56: liquid film

58: liquid-repellent pattern

58B: Repellent Part

64: pattern forming area

64A: first zone

64B: Second Zone

100: droplet ejection device

103: discharge head

112: control unit

114: head

118: nozzle

127: discharge part

140: heater

150: clean oven

170: conveying device

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wiring pattern forming method using the droplet ejection method, and more particularly to a wiring pattern forming method suitable for forming a TFT gate electrode.

The formation technique of the metal wiring by the inkjet method is known (for example, refer patent document 1).

[Patent Document 1] Japanese Patent Application Laid-Open No. 2004-6578

The width of the TFT gate electrode is about 10 μm. On the other hand, the size (diameter) of droplets that the head of the existing droplet ejection apparatus can stably discharge is larger than the width of the gate electrode. For this reason, when the droplet of electroconductive material for forming a gate electrode is discharged to the area | region in which the gate electrode is to be formed, a droplet may adhere over the range of the area | region. Drops deposited beyond such areas will result in residue of the conductive material. As a result of the residue, the gate length and gate width of the gate electrode deviate from the design value, and as a result, the device characteristics of the TFT deviate from the design value.

Of course, the head of the conventional droplet ejection apparatus may directly eject droplets having a diameter smaller than the width of the gate electrode to the electrode formation region. However, in such a case, when a sudden flight bend occurs, a droplet may adhere to parts other than the area | region in which the gate electrode is to be formed. Therefore, even in such a case, the gate length and gate width of the finally obtained gate electrode deviate from the design value. In addition, when the size of the droplets is reduced, the volume of the droplets is reduced, thereby increasing the number of droplets required to form the gate electrode. As a result, it takes more time to form the gate electrode.

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and one of the objects is to provide a conductive material layer in the region without discharging the droplet in a region having a width smaller than the diameter of the droplet from the droplet ejection apparatus.

In the wiring pattern forming method of the present invention, a droplet is discharged from a liquid conductive material by using a droplet ejection apparatus, the edge is defined by a bank pattern on a substrate, and has a first area having a first width. A conductive material layer is provided in the pattern formation area which has a 2nd area | region which is in contact with a 1st area | region, and has a 2nd width below the said 1st width | variety. In this wiring pattern forming method, the droplets having diameters of the first width or less and the second width or more are discharged to the first region to form the conductive material layer covering the first region and the second region. It has a step A. In addition, the step A includes a step a1 of ejecting the droplet so that the droplet lands at a position facing the boundary between the first region and the second region.

One of the effects obtained by the above configuration is that the conductive material layer can be provided in the second region without discharging the droplet from the droplet ejection apparatus in the region (second region) having a width less than or equal to the diameter of the droplet from the droplet ejection apparatus. Is the point.

Preferably, the step A includes a step of ejecting the droplets only in the first region of the first region and the second region.

One of the effects obtained by the above configuration is that since the droplets are not discharged toward the second region, the droplets do not adhere beyond the range of the second region.

Preferably, the step a1 is a normal to the boundary line and is above the normal line passing through the center of the boundary line, and at a distance of about 1/2 times or more of the diameter from the boundary line. And discharging the droplets so that the centers of the droplets are in contact with each other.

One of the effects obtained by the above configuration is that the liquid conductive material can more reliably flow into the second region.

According to one embodiment of the present invention, the step (a1) is a normal to the boundary line, is a normal line passing substantially at the center of the boundary line, and is a line segment dividing the first region into a direction orthogonal to the first width direction. And ejecting the droplet so that the center of the droplet reaches the position at a distance of 0 to 1 times the diameter from a position where the line segments extending in the cross section intersect with each other.

One of the effects obtained by the above configuration is that the liquid conductive material can more reliably flow into the second region.

According to another aspect of the present invention, the step (a1) includes a step of ejecting the first droplet on the normal to the boundary line.

One of the effects obtained by the above configuration is that the liquid conductive material can more reliably flow into the second region.

The wiring pattern forming method of the present invention uses a droplet ejection apparatus to eject a plurality of droplets of a liquid conductive material, the first region having a first width having an edge defined by a bank pattern on a substrate, and the first region. A conductive material layer is provided in the pattern formation area which has a 2nd area | region which is in contact with an area | region, and has a 2nd width below the said 1st width. In this wiring pattern forming method, the plurality of droplets having diameters of the first width or less and the second width or more are discharged to the first region to form the conductive material layer covering the first region and the second region. It has a step (A). In the step A, one droplet hitting a position closest to a boundary between the first region and the second region among the plurality of droplets is isolated from another droplet for a predetermined time period on the first region. Preferably, the step (a1) of discharging the plurality of liquid droplets is included.

One of the effects obtained by the above configuration is that the conductive material layer can be provided in the second region without discharging the droplet from the droplet ejection apparatus in the region (second region) having a width less than or equal to the diameter of the droplet from the droplet ejection apparatus. Is the point.

Preferably, the step A includes a step of ejecting the plurality of droplets only in the first region of the first region and the second region.

One of the effects obtained by the above configuration is that the droplets are not discharged toward the second region, so that the droplets do not adhere beyond the range of the second region.

According to one embodiment of the present invention, the step (A) includes a step of discharging the one droplet and the other droplet so that the volume of the one droplet becomes larger than that of the other droplets.

One of the effects obtained by the above configuration is that the volume of the liquid conductive material flowing into the second region from one droplet can be increased.

In addition, this invention can be implemented in various forms. For example, it is possible to implement even in the form in which the bank pattern is replaced with the liquid repellent pattern.

Preferably, the pattern formation region exhibits lyophilic properties to the liquid conductive material.

One of the effects obtained by the above configuration is that the liquid conductive material is easily wetted and expanded in the shape of the pattern formation region.

In one embodiment of the present invention, the TFT gate electrode forming method includes the wiring pattern forming method. Here, the first region is a region where a wide portion of the gate wiring is formed, and the second region is a region where a gate electrode branched from the gate line is formed.

One of the effects obtained by the above configuration is that a TFT having excellent element characteristics can be formed by using a droplet ejection apparatus.

<Example 1>

The example which applied the wiring pattern formation method of this invention to the manufacturing process of the TFT gate electrode is demonstrated. The wiring pattern forming method of this embodiment includes a step of discharging droplets of a conductive material by the droplet discharging method and providing a wiring pattern made of a conductive layer on an object. "Wiring pattern" is a kind of "thin film pattern" here. In addition, the electrically-conductive material of a present Example is also represented by "ink for pattern formation," and is also described by "functional liquid."

Each of the plurality of gate wirings 34 shown in FIG. 1 corresponds to the "wiring pattern" of the present invention. Here, the spacing of each of the plurality of gate wirings 34 is approximately 300 mu m. Each of the plurality of gate wirings 34 has a wide portion 34A and narrow portions 34B, 34C, and 34D.

The wide portion 34A is a stripe-shaped portion extending in the X-axis direction in each gate wiring 34. The width of the wide portion 34A, that is, the length in the direction orthogonal to the longitudinal direction of the wide portion 34A, is longer than the width of the narrow portions 34B, 34C, 34D. Specifically, the width of the wide portion 34A is approximately 20 μm. The narrow portion 34B is a portion protruding from the wide portion 34A in the Y-axis direction and is the gate electrode 44G (FIG. 13) in the TFT element 44 (FIG. 13). The width of the narrow portion 34B is approximately 10 m. Narrow part 34C, 34D is the part which connects wide part 34A. Narrow portions 34C and 34D overlap the source electrode line 44SL (FIG. 13) through the gate insulating film 42 (FIG. 13). The source electrode line 44SL is a wiring extending in a direction (Y-axis direction) perpendicular to the direction in which the gate wiring 34 extends (X-axis direction).

(A. Ink for Forming Wiring Pattern)

The conductive material used to form the gate wiring 34 will be described. Here, a conductive material is a kind of "liquid material" and is also called "ink for pattern formation." The conductive material includes a dispersion medium and conductive fine particles dispersed by the dispersion medium. The electroconductive fine particles of a present Example are silver particle whose average particle diameter is about 10 nm. Moreover, the particle | grains whose average particle diameter is about 1 nm to several 100 nm are also described as "nanoparticle." According to this notation, the conductive material of the present example contains silver nanoparticles.

It is preferable that the particle diameter of electroconductive fine particles is 1 nm or more and 1.0 micrometer or less here. If it is 1.0 micrometer or less, the possibility of the nozzle 118 (FIG. 4) of the head 114 becoming clogging is small. Moreover, since the volume ratio of the coating agent with respect to electroconductive fine particles becomes it suitable that it is 1 nm or more, the ratio of the organic substance in the film | membrane obtained becomes suitable.

The dispersant (or solvent) is not particularly limited as long as it can disperse the conductive fine particles and does not cause aggregation. For example, in addition to water, alcohols such as methanol, ethanol, propanol, butanol, n-heptane, n-octane, decane, dodecane, tetradecane, toluene, xylene, cymene, durene, indene, dipentene Hydrocarbon-based compounds such as tetrahydronaphthalene, decahydronaphthalene, cyclohexylbenzene, ethylene glycol dimethyl ether, ethylene glycol diethyl methyl, ethylene glycol methyl ethyl ether, diethylene glycol dimethyl ether, diethylene glycol diethyl ether, Ether compounds such as diethylene glycol methyl ethyl ether, 1, 2-dimethoxyethane, bis (2-methoxyethyl) ether, p-dioxane, and also propylene carbonate, γ-butyl olactone, and N-methyl-2 Polar compounds, such as -pyrrolidone, dimethylformamide, dimethyl sulfoxide, and cyclohexanone, can be illustrated. Among them, water, alcohols, hydrocarbon-based compounds and ether-based compounds are preferred from the viewpoint of dispersibility of the conductive fine particles, stability of the dispersion liquid, and easy application to the droplet discharging method. Can be mentioned.

The above-mentioned "liquid material" means a material having a viscosity that can be discharged as droplets from the nozzle 118 (Fig. 4) of the droplet discharge apparatus. Here, it is irrespective of whether the liquid material is aqueous or oily. It is sufficient to have fluidity (viscosity) which can be discharged from a nozzle, and a fluid may be sufficient as a whole even if a solid substance mixes. Preferably, the viscosity of the liquid material may be 1 mPa · s or more and 50 mPa · s or less. When the liquid material is discharged as droplets using the droplet ejection method, when the viscosity is 1 mPa · s or more, the nozzle periphery is less likely to be contaminated by ink. When the viscosity is 50 mPa · s or less, the clogging frequency in the nozzle is more This is because the droplets are lowered and the droplets can be discharged more smoothly.

Moreover, it is preferable that the surface tension of a liquid material exists in the range of 0.02 N / m or more and 0.07 N / m or less. When discharging the conductive material by the droplet discharging method, if the surface tension is 0.02 N / m or more, flight bend is less likely to occur because the hygroscopicity of the ink to the nozzle surface becomes more appropriate. If it is 0.07 N / m or less, since the shape of the meniscus at the tip of a nozzle is more stable, control of discharge amount and discharge timing becomes easier. In order to adjust the surface tension, a small amount of surface tension regulators such as fluorine, silicon, and non-ion may be added to the dispersion in a range that does not significantly reduce the contact angle with the object. The nonionic surface tension modifier improves the hygroscopicity of the ink to the object, improves the leveling property of the film, and helps to prevent the occurrence of minute unevenness of the film. The said surface tension regulator may also contain organic compounds, such as alcohol, ether, ester, a ketone, as needed.

(B. Overall Configuration of Device Manufacturing Apparatus)

The device manufacturing apparatus for forming a wiring pattern is demonstrated. The device manufacturing apparatus 1 shown in FIG. 2 is a part of the manufacturing apparatus of a liquid crystal display device. The device manufacturing apparatus 1 includes the liquid droplet ejecting apparatus 100, the clean oven 150, and the conveying apparatus 170. The droplet ejection apparatus 100 is a device for ejecting droplets of a conductive material onto the base 10 (FIG. 3) to provide a conductive material layer on the base 10. On the other hand, the clean oven 150 is an apparatus which activates the conductive material layer provided by the droplet ejection apparatus 100, and forms a conductive layer.

The conveying apparatus 170 is equipped with the fork part, the drive part which moves a fork part up and down, and a self-propelled part. And the conveying apparatus 170 conveys the base 10 so that the base 10 may receive each process in order of the droplet discharge apparatus 100 and the clean oven 150. Hereinafter, the structure and function of the droplet ejection apparatus 100 will be described in detail.

As shown in FIG. 3, the droplet ejection apparatus 100 is what is called an inkjet apparatus. Specifically, the droplet ejection apparatus 100 includes the tank 101 holding the conductive material 8A, the tube 110, the ground stage GS, the discharge head 103, the stage 106, And a first position control device 104, a second position control device 108, a control device 112, a support part 104a, and a heater 140.

The discharge head portion 103 holds the head 114 (FIG. 4). The head 114 discharges the droplets of the conductive material 8A in accordance with the drive signal from the control device 112. In addition, the head 114 in the discharge head portion 103 is connected to the tank 101 by the tube 110, so that the conductive material 8A is transferred from the tank 101 to the head 114. Supplied.

The stage 106 provides a plane for fixing the body 10. This plane of the stage 106 is parallel to the X-axis direction and the Y-axis direction. The stage 106 also has a function of fixing the position of the base 10 by using a suction force.

The 1st position control apparatus 104 is being fixed to the position of predetermined height from the ground stage GS by the support part 104a. This first position control device 104 has a function of moving the discharge head 103 along the X axis direction and the Z axis direction orthogonal to the X axis direction in response to a signal from the control device 112. The first position control device 104 also has a function of rotating the discharge head portion 103 around an axis parallel to the Z axis. Here, in this embodiment, the Z-axis direction is a direction parallel to the vertical direction (ie, the gravity acceleration direction).

The second position control device 108 moves the stage 106 in the Y-axis direction on the ground stage GS in accordance with a signal from the control device 112. Here, the Y-axis direction is a direction orthogonal to both the X-axis direction and the Z-axis direction.

The configuration of the first position control device 104 and the second position control device 108 having the above functions can be realized by using a known XY robot using a linear motor and a servo motor. For this reason, description of these detailed structures is abbreviate | omitted here. In addition, in this specification, the 1st position control apparatus 104 and the 2nd position control apparatus 108 are also described as "robot" or "scanning part."

In addition, the X-axis direction, the Y-axis direction, and the Z-axis direction in this embodiment correspond to the direction in which one of the discharge head part 103 and the stage 106 moves relative to the other. Among them, the X-axis direction is also called the "scanning direction". The Y-axis direction is also called "non-scanning direction". The virtual origin of the XYZ coordinate system defining the X-axis direction, the Y-axis direction, and the Z-axis direction is fixed to the reference portion of the droplet ejection apparatus 100. In this specification, the X coordinate, the Y coordinate, and the Z coordinate are coordinates in such an XYZ coordinate system. The virtual origin may be fixed not only to the reference portion but also to the stage 106 or to the discharge head 103.

As described above, the discharge head 103 is moved in the X-axis direction by the first position control device 104. The base 10 moves in the Y-axis direction together with the stage 106 by the second position control device 108. As a result, the relative position of the head 114 with respect to the body 10 is changed. More specifically, by these operations, the discharge head 103, the head 114, or the nozzle 118 (FIG. 4) maintains a predetermined distance in the Z-axis direction with respect to the base 10. Scan relative to the axial and Y axis directions, ie "Relative movement" or "relative scanning" means the relative movement of at least one of the side which discharges the droplet of electroconductive material 8A, and the side (discharge part) to which a droplet hits from there relative.

The control apparatus 112 is comprised so that discharge data may be received from an external information processing apparatus. The control device 112 stores the discharge data received in the internal storage device 202 (FIG. 5), and at the same time, the first position control device 104 and the second position control device 108 in accordance with the stored discharge data. And the head 114 is controlled. Here, the "discharge data" is data indicating the relative position at which the droplet of the conductive material 8A should be discharged. In this embodiment, the ejection data has a data format of bitmap data.

By having the above configuration, the droplet ejection apparatus 100 moves the nozzle 118 (Fig. 4) of the head 114 relative to the base 10 in accordance with the ejection data, and at the same time, the nozzle 118 toward the set impact position. ), Droplets of the conductive material 8A are discharged. In addition, when the relative movement of the head 114 by the droplet ejection apparatus 100 and the ejection of the droplet of the conductive material 8A from the nozzle 118 are described as "coating scan" or "discharge scanning." There is also.

In addition, in this specification, the part to which the droplet of 8A of electroconductive materials touches is also described as "the discharge part." In addition, the part to which the droplet which extended reached is wetted is also described as a "coated part." Either of the "to-discharge part" and "the to-be-applied part" is also a part formed by subjecting the base material to surface modification so that the conductive material 8A shows a desired contact angle. However, even if the surface modification process is not performed, the surface of the lower body shows the desired liquid repellency or lyophilic with respect to the conductive material 8A (that is, the impacted conductive material 8A shows a desirable contact angle on the surface of the lower body). In this case, the surface of the underlying object may be the "exhausted part" or the "coated part". The "pattern formation area 24" mentioned later consists of such a "bleeding part" and a "coated part". In addition, in this specification, a to-be-extracted part is also described as a "target" or a "accommodating part."

3, the heater 140 is an infrared lamp for lamp annealing the base 10. The turning on and off of the heater 140 are also controlled by the control device 112.

(C. head)

Next, the head 114 will be described in detail. As shown in FIG. 4A, the head 114 is an inkjet head having a plurality of nozzles 118. The head 114 is fixed to the discharge head 103 by a carriage 103A. As shown in FIG. 4B, the head 114 includes a diaphragm 126 and a nozzle plate 128 that defines an opening of the nozzle 118. Further, a liquid reservoir 129 is located between the diaphragm 126 and the nozzle plate 128, and the liquid reservoir 129 is provided with a conductive material supplied through the hole 131 from an external tank not shown in the drawing. 8A) is always charged.

In addition, a plurality of partition walls are positioned between the diaphragm 126 and the nozzle plate 128. The cavity 120 is a portion whose edge is defined by the diaphragm 126, the nozzle plate 128, and a pair of partition walls. Since the cavity 120 is provided corresponding to the nozzle 118, the number of the cavity 120 and the number of the nozzles 118 are the same. The conductive material 8A is supplied to the cavity 120 from the liquid reservoir 129 through a supply hole 130 located between the pair of partition walls. In addition, in this embodiment, the diameter of the nozzle 118 is about 27 micrometers.

However, on the diaphragm 126, each vibrator 124 is positioned corresponding to each cavity 120. Each of the vibrators 124 includes a piezo element and a pair of electrodes sandwiching the piezo element. The control apparatus 112 supplies a drive voltage between this pair of electrodes, and the droplet D of the electroconductive material 8A is discharged from the corresponding nozzle 118. FIG. Here, the volume of material discharged from the nozzle 118 is variable between 0 pl and 42 pl (pico liter) or less. Changing the volume of the droplet D here is realized by changing the waveform of the driving voltage (so-called variable dot technology). In addition, the shape of the nozzle 118 is adjusted so that the droplet D of the conductive material 8A may be discharged from the nozzle 118 in the Z-axis direction.

In the present specification, a case including a nozzle 118, a cavity 120 corresponding to the nozzle 118, and a vibrator 124 corresponding to the cavity 120 is denoted as “discharge unit 127”. There is also. According to this notation, one head 114 has the same number of discharge portions 127 as the number of nozzles 118. The discharge part 127 may have an electrothermal conversion element instead of the piezo element. That is, the discharge part 127 may have a structure which discharges material using the thermal expansion of the material by an electric thermal conversion element. However, the ejection using the piezoelectric element has an advantage that it is difficult to affect the composition of the liquid material because heat is not applied to the liquid material to be discharged.

(C. Control Unit)

Next, the structure of the control apparatus 112 is demonstrated. As shown in FIG. 5, the control device 112 includes an input buffer memory 200, a storage device 202, a processing unit 204, a scan driver 206, and a head driver 208. The input buffer memory 200 and the processing unit 204 are connected to each other so as to communicate with each other. The processing unit 204, the memory device 202, the scan driver 206, and the head drive unit 208 are connected to each other so as to be able to communicate with each other by a bus not shown.

The scan driver 206 is communicatively connected with the first position control device 104 and the second position control device 108. Similarly, the head drive unit 208 is connected to the head 114 so as to communicate with each other.

The input buffer memory 200 receives ejection data for ejecting the droplet D of the conductive material 8A from an external information processing apparatus (not shown) located outside the droplet ejection apparatus 100. The input buffer memory 200 supplies the discharge data to the processing unit 204, and the processing unit 204 stores the discharge data in the storage device 202. In FIG. 5, the memory device 202 is a RAM.

The processor 204 supplies the scan driver 206 with data indicating the relative position of the nozzle 118 with respect to the discharged part based on the discharge data in the memory device 202. The scan driver 206 supplies this data and the stage drive signal corresponding to the discharge period to the second position control device 108. As a result, the relative position of the discharge head 103 with respect to the discharged portion is changed. On the other hand, the processing unit 204 supplies the head 114 with a discharge signal for discharging the conductive material 8A based on the discharge data stored in the memory device 202. As a result, the droplet D of the conductive material 8A is discharged from the corresponding nozzle 118 in the head 114.

The control device 112 is a computer including a CPU, a ROM, a RAM, and a bus. For this reason, the said function of the control apparatus 112 is implement | achieved by the software program executed by a computer. Of course, the control device 112 may be realized by a dedicated circuit (hardware).

(D. Manufacturing Method)

Next, a wiring pattern forming method performed by the device manufacturing apparatus 1 will be described. The wiring pattern forming method of the present embodiment is realized as a step of providing a plurality of gate wirings 34 on the element side substrate 10B (Fig. 13) of the liquid crystal display device. For this reason, the wiring pattern formation method of a present Example is also a part of the manufacturing method of a liquid crystal display device.

(D1.bank layer)

First, as shown in Fig. 6A, a surface modification treatment is performed on the entire surface of the surface of the substrate 10A having light transmittance. In this embodiment, the substrate 10A is a glass substrate. And the surface modification treatment is an HMDS treatment. Here, the HMDS treatment is a method of applying hexamethyldisilaic acid ((CH ₃ ) ₃ SiNHSi (CH ₃ ) ₃ ) to the surface of an object in vapor form. By HMDS processing, the HMDS layer 12 is formed on the substrate 10A. On the HMDS layer 12, a bank pattern 18 (Fig. 7 (d)) is formed later. The HMDS layer 12 can not only be in close contact with the bank layer 18 but also can be in close contact with the substrate 10A. For this reason, the HMDS layer 12 functions as an adhesion layer for bringing the bank pattern 18 into close contact with the substrate 10A.

Next, an organic photosensitive material is applied on the HMDS layer 12 by spin coating. At this time, an organic photosensitive material is applied so that the thickness (height) of the bank pattern 18 mentioned later is obtained. Thereafter, the applied organic photosensitive material is cured by light irradiation to form the organic photosensitive material layer 14 as shown in Fig. 6B. In this embodiment, the thickness of the organic photosensitive material layer 14 is about 1 μm.

Here, the organic photosensitive material of this embodiment is an acrylic resin. However, instead of the acrylic resin, the organic photosensitive material layer 14 may be formed of any one polymer material such as polyimide resin, olefin resin, phenol resin, melamine resin, or the like. Instead of the spin coating method, an organic photosensitive material may be applied onto the HMDS layer 12 in spray coating, roll coating, die coating, dip coating, or the like.

Next, as shown in FIG. 6C, a negative photoresist is applied on the organic photosensitive material layer 14 to form a photoresist layer 16. As shown in FIG. 6D, the portion corresponding to the two-dimensional shape of the wiring pattern is exposed to the photoresist layer 16 through the photomask M1 covered by the light shielding mask MK. . Thereafter, the exposed photoresist layer 16 is developed as shown in Fig. 7A. Then, as shown in FIGS. 7B and 7C, the organic photosensitive material layer 14 is etched, and then the photoresist layer 16 remaining after the etching is peeled off. In this way, the bank pattern 18 is obtained from the organic photosensitive material layer 14.

The bank pattern 18 surrounds the two-dimensional shape of the wiring pattern. And the bank pattern 18 functions as a partition member in a later discharge process. Moreover, since the organic photosensitive material which comprises the bank pattern 18 is an acrylic resin, the bank pattern 18 has a light transmittance. In this case, the bank pattern 18 may be formed by a printing method (so-called complete additive process) instead of the patterning method by the photolithography method. As long as the bank pattern 18 surrounds the two-dimensional shape of the wiring pattern, it may be formed by any method.

Here, the "two-dimensional shape of the wiring pattern" is substantially the same as the shape of the bottom surface of the wiring pattern (that is, the portion in contact with the substrate 10A).

In addition, a material having a main chain of an inorganic skeleton (siloxane bond) and an organic group may be used as the material of the bank pattern 18. In addition, the bank pattern 18 (convex part) can also be formed in two or more layers which an inorganic layer and an upper layer consist of an organic substance. The photoresist layer 16 may be left on the bank pattern 18 without being peeled off.

The bank pattern 18 has a plurality of openings AP exposing the HMDS layer 12 provided on the substrate 10A. The shapes of the plurality of openings AP substantially coincide with the two-dimensional shapes of the plurality of gate wirings 34, respectively. In other words, in the present embodiment, the bank pattern 18 has a shape that completely surrounds each of the plurality of gate wirings 34 formed later.

Of course, the bank pattern 18 may consist of the some bank part 18B (FIG. 8) isolate | separated from each other, respectively. For example, the two-dimensional shape of one gate wiring 34 may be enclosed between a pair of bank portions 18B which deviate by a predetermined distance and are positioned substantially parallel to each other. In this case, the bank portion 18B may not be provided at portions corresponding to both ends of the gate wiring 34. In other words, the bank pattern 18 does not need to completely surround the two-dimensional shape of the gate wiring 34.

Moreover, it is preferable that the width | variety of the upper side of the opening part AP is wider than the width | variety of the bottom side (substrate 10A side) of the opening part AP. This is because the droplet D of the conductive material 8A is more likely to be extended and wet.

After the bank pattern 18 is formed on the HMDS layer 12, hydrofluoric acid treatment is performed on the substrate 10A. The hydrofluoric acid treatment is a treatment for etching the HMDS layer 12 with, for example, 2.5% hydrofluoric acid solution. Here, the bank pattern 18 functions as a mask, and as shown in FIG. 7D, the HMDS layer 12 at the bottom of the opening AP is removed to expose the substrate 10A. In the present embodiment, the surface of the substrate 10A exposed at the bottom of the opening AP becomes the "pattern forming region 24".

In this manner, a plurality of pattern formation regions 24 in which respective two-dimensional shapes are surrounded by the bank patterns 18 are formed on the substrate 10A. In each of the plurality of pattern formation regions 24, a conductive layer 8 (gate wiring 34 in FIG. 1) is provided by a discharge process described later. In the present embodiment, the substrate 10A after the plurality of pattern formation regions 24 is provided corresponds to the base 10 (FIG. 3).

By the way, the shape of the some pattern formation area | region 24 is all the same. Moreover, in each pattern formation area | region 24, the part (also called segment) of the same shape appears repeatedly. For this reason, below, the wiring pattern formation method is demonstrated focusing on a part of one pattern formation area | region 24. FIG.

The pattern forming region 24 shown in FIG. 8 includes a first region 24A having a width w1 and a second region 24B, 24C, 24D having a width w2 that is in contact with the first region 24A and has a width w1 or less. Have Here, the first region 24A is a portion extending in the first direction of the pattern formation region 24. And the 1st area | region 24A in the pattern formation area | region 24 is a part in which the wide part 34A is provided by a later process. On the other hand, the 2nd area | region 24B, 24C, 24D in the pattern formation area | region 24 is a part in which narrow part 34B, 34C, 34D is each provided by a later process. The width w1 of the first region 24A is approximately equal to the wide portion 34A (ie, about 20 μm). On the other hand, the width w2 of the second regions 24B, 24C, and 24D is approximately equal to the width of the narrow portions 34B, 34C, and 34D (that is, about 10 mu m).

(D2. Lyophilic treatment process)

Next, the lyophilic treatment process which gives a lyophilic property to the pattern formation area | region 24 is performed. As the lyophilization treatment step, an ultraviolet (UV) irradiation treatment for irradiating ultraviolet rays, an O ₂ plasma treatment using oxygen as a treatment gas, and the like can be selected from the atmosphere. Here, O ₂ plasma treatment is performed.

The O ₂ plasma process is a process of irradiating oxygen in a plasma state to the substrate 10A (gas 10) from a plasma discharge electrode not shown in the figure. Examples of conditions for the O ₂ plasma treatment include a plasma power of 50 to 1000 W, an oxygen gas flow rate of 50 to 100 mL / min, a relative moving speed of the gas 10 to the plasma discharge electrode of 0.5 to 10 mm / sec, a gas The temperature is 70 to 90 ° C.

Here, it is preferable to perform a lyophilic treatment process (here, O ₂ plasma treatment) on the pattern formation region 24 so that the contact angle of the liquid conductive material 8A on the pattern formation region 24 is 20 degrees or less. . Of course, in the case where the substrate 10A is a glass substrate as in the present embodiment, since the surface already has some degree of lyophilic with respect to the liquid conductive material 8A, the lyophilic treatment step may not be necessary. . Nevertheless, if the O ₂ plasma treatment or the ultraviolet irradiation treatment is performed, residues of the photoresist or HMDS layer which may remain on the pattern formation region 24 can be completely removed. It is preferable to carry out. The lyophilic treatment step may be a step in which the O ₂ plasma treatment and the ultraviolet irradiation treatment are combined.

In addition, since the HMDS layer 12 on the pattern formation region 24 can be sufficiently removed by the O ₂ plasma treatment or the ultraviolet irradiation treatment, it is not necessary to remove the HMDS layer 12 by the hydrofluoric acid treatment described above. There is also. Nevertheless, if the hydrofluoric acid treatment and the lyophilic treatment process described above are performed, the HMDS layer 12 on the pattern formation region 24 can be reliably removed. Therefore, it is preferable to perform the hydrofluoric acid treatment and the lyophilic treatment process.

(D3. Liquefaction treatment process)

Next, a liquid repelling treatment is performed on the bank pattern 18 to impart liquid repellency to the surface thereof. As the liquid repelling treatment, a plasma treatment method (CF ₄ plasma treatment method) using carbon tetrafluoromethane (tetrafluoromethane) as a treatment gas is adopted. Conditions for the CF ₄ plasma treatment include, for example, a plasma power of 50 to 1000 W, a tetrafluorocarbon gas flow rate of 50 to 100 mL / min, a gas conveyance rate to a plasma discharge electrode of 0.5 to 1020 mm / sec, and a gas temperature. Is 70 to 90 ° C. As the processing gas, other fluorocarbon gas or gas such as SF ₆ or SF ₅ CF ₃ may be used instead of tetrafluoromethane.

By performing such a liquid repelling treatment process, since fluorine group flows into resin which comprises the bank pattern 18, high liquid repellency is provided to the surface of the bank pattern 18. FIG. In addition, the O ₂ plasma treatment as the lyophilic treatment process described above may be performed before the formation of the bank pattern 18. However, acrylic resins, polyimide resins, and the like have a property of being more easily fluorinated (liquidized) when pretreatment by O ₂ plasma is performed. Therefore, it is preferable to perform O ₂ plasma treatment after the bank pattern 18 is formed. Do.

Even after receiving the liquid repelling treatment process for the bank pattern 18, the surface of the pattern formation region 24 can substantially maintain the lyophilic properties given earlier. In particular, since the substrate 10A of the present embodiment is a glass substrate, no fluorine group flows into the surface (the pattern formation region 24) even when the liquid repelling treatment step is performed. For this reason, the lipophilic property of the pattern formation area | region 24, ie, the hygroscopicity, does not fall.

However, in the present embodiment, after performing the liquid repellent treatment process for the bank pattern 18, the hydrofluoric acid treatment is again performed on the bottom portion (the pattern formation region 24) of the opening AP. As a result, the surface (glass) of the substrate 10A is reliably exposed at the bottom of the opening AP, and as a result, the lyophilic property at the bottom of the opening AP is more reliably maintained.

The liquid repellency of the surface of the bank pattern 18 becomes higher than the liquid repellency of the pattern formation area | region 24 by the above-mentioned lyophilic process and liquid repellent treatment process. In the present embodiment, the pattern formation region 24 is rather lyophilic. As described above, since the substrate 10A of the present embodiment is made of glass, the fluorine group does not flow into the pattern formation region 24 even when the CF ₄ plasma treatment is performed. For this reason, even if only the CF ₄ plasma treatment (liquidization treatment step) is performed without performing the O ₂ plasma treatment (liquidization treatment step), the liquid repellency on the surface of the bank pattern 18 is higher than the liquid repellency of the pattern formation region 24. Increases. However, as described above, since the residue on the pattern formation region 24 is completely removed and the bank pattern 18 is easily fluorinated, the O ₂ plasma process is not omitted in this embodiment.

In addition, one of the indexes indicating liquid repellency of the object surface is the contact angle that the liquid material exhibits on the object surface. The smaller the contact angle exhibited by the liquid material on the object surface, the greater the lipophilic properties of the object surface. In this embodiment, the contact angle exhibited by the conductive material 8A on the pattern formation region 24 is 20 degrees or less.

(D4. Discharge process)

After performing the surface modification process (liquidization process process) of the pattern formation area | region 24, the electroconductive material layer 8B which covers the pattern formation area | region 24 is provided. Details are as follows.

First, the base 10 provided with the plurality of pattern formation regions 24 is positioned on the stage 106 of the droplet ejection apparatus 100. As a result, each surface of the plurality of pattern formation regions 24 is parallel to the X-axis direction and the Y-axis direction. In the present embodiment, the substrate 10A is positioned on the stage 106 so that the first direction (that is, the direction in which the first region 24A extends) and the X-axis direction coincide.

The droplet ejection apparatus 100 ejects a plurality of droplets D toward the first region 24A in accordance with the ejection data corresponding to the wiring pattern. By doing so, the conductive material layer 8B covering the pattern formation region 24 is obtained. Specifically, the droplet ejection apparatus 100 changes the relative position of the nozzle 118 with respect to the substrate 10A in two dimensions (X-axis direction and Y-axis direction). As shown in FIG. 9A, whenever the nozzle 118 reaches a position corresponding to the first region 24A, the droplet D of the conductive material 8A is discharged from the nozzle 118. do. As a result, as shown in FIG. 9B, the plurality of droplets D of the conductive material 8A reach the first region 24A and are expanded and wetted. As shown in FIG. 9C, the plurality of droplets D landing on the first region 24A are expanded and wetted so that not only the first region 24A but also the second regions 24B, 24C, and 24D are also wetted. A covering conductive material layer 8B is formed.

Here, in the discharge data, the volume and number (dots) of the droplets D are defined so that the thickness of the conductive layer 8 (FIG. 9D) obtained after the activation process described later is about 1 μm. In addition, the cross section shown by (d) passing through FIG. 9A corresponds to the B'-B cross section in FIG.

In addition, in this embodiment, even if the nozzle 118 reaches the position corresponding to the second areas 24B, 24C, and 24D, the droplet ejection apparatus 100 does not eject the droplet D of the conductive material 8A at all. Do not. For this reason, the droplet D from the nozzle 118 does not reach the 2nd area | region 24B, 24C, 24D at all.

Instead, the droplet ejection apparatus 100 is configured to drop droplets D having a diameter? 1 at a position facing the boundary line BR between the first region 24A and the second region 24B, 24C, and 24D. D) is discharged. The position facing the border BR corresponds to one of the following 1), 2) and 3):

1) Location above normal V (FIG. 10) relative to boundary line BR. Here, the normal line V passes through approximately the center of the boundary line BR. In this case, it is preferable that the discharge of the droplet D to the position above the normal line V is the first among the droplets discharged to the first region 24A.

2) A position above the normal line (V), which is at a distance not less than 1/2 times or more than 1 times the diameter (φ1) of the droplet D from the boundary line BR. Example 1 corresponds to this case.

3) A position at a distance of 0 to 1 times the diameter φ1 from a position PX where the normal line V and the line segment L (Fig. 10) dividing the first region 24A cross each other. . The line segment L extends in the direction orthogonal to the 1st width w1 direction here. In other words, the line segment L is parallel to the longitudinal direction of the first region 24A.

When the droplet discharging device 100 discharges the droplets D such that the center of the droplets D reaches the same position as 1), the droplets D landing on the first region 24A reach the second region 24B, respectively. It is easy to contact the inlet EN of 24C, 24D. In particular, when the droplet discharging device 100 discharges the droplet D such that the center of the droplet D reaches the same position as 2), the droplet is substantially simultaneously with the timing at which the droplet D hits the first region 24A. (D) is in contact with the inlet EN of the second regions 24B, 24C, 24D. And even if the droplet ejection apparatus 100 discharges the droplet D so that the center of the droplet D reaches the same position as 3), the droplet D is expanded and wetted, so that the droplet D is formed in the second region ( It may be in contact with the entrance EN of 24B, 24C, 24D.

The diameter φ1 of the droplet D is equal to or less than the width w1 of the first region 24A and equal to or more than the width w2 of the second regions 24B, 24C, and 24D.

By discharging the droplets D as described above, the liquid conductive material 8A applied to the first region 24A, as shown in Fig. 9C, has the first region 24A and the second region 24B. ) (Or 24C, 24D) flows into the second region 24B (or 24C, 24D) by magnetic flow (capillary phenomenon). As a result, the conductive material layer 8B is also formed on the second region 24B (or 24C, 24D). The length of the second region 24B (or 24C, 24D) is long, and the conductive material layer 8B covering the entire second region 24B (or 24C, 24D) is formed only by the volume of one droplet D. If this is not possible, the plurality of droplets D may be discharged from the nozzle 118 so that the plurality of droplets D arrive at approximately the same position facing the boundary line BR. At this time, the nozzle 118 used when discharging the plurality of droplets D toward the same position may be one same nozzle 118 or may be a plurality of different nozzles 118.

In the following, the discharge method of the present embodiment will be described in more detail by focusing on one first region 24A and three second regions 24B, 24C, and 24D in contact with the one first region 24A.

As shown in FIG. 10, the longitudinal direction of the first region 24A coincides with the X-axis direction. The first region 24A is in contact with the three second regions 24B, 24C, and 24D through respective boundary lines BR. Here, the second regions 24C and 24D are located at both ends of the first region 24A extending in the X-axis direction. In addition, the second region 24B protrudes in the Y-axis direction from the middle of the first region 24A. Further, in the second region 24B, the narrow portion 34B (Fig. 1), that is, the gate electrode 44G is later provided.

As shown in Figs. 10 and 12, ten impact positions CP (CP1 to CP10 in the drawing) are allocated to one first region 24A in the discharge data. In FIG. 10 and FIG. 12, white circles representing these ten impact positions are superimposed on the first region 24A. The droplet ejection apparatus 100 ejects the droplets D in the order of CP1 to CP10 to these 10 impact positions CP based on the ejection data. Here, the number following the "CP" has shown the order in which the droplet D is discharged in one 1st area | region 24A. 10 and 12, these impact positions CP are from the negative in the X-axis direction to the positive direction (left to right in the drawing), CP1, CP6, CP2, CP7, CP3, CP8, CP4. , CP9, CP5, CP10 in order.

In addition, the diameter of the droplet D discharged toward the impact positions CP1, CP2, CP10 is (phi) 1. ? 1 is substantially equal to the width w1 of the first region 24A, and is larger than the width w2 of the second region. On the other hand, the diameter of the droplet D discharged toward the impact positions CP3, CP4, CP5, CP6, CP7, CP8, CP9 is φ2 smaller than φ1. However, diameter phi 2 is larger than width w2 of a 2nd area | region. Here, unless otherwise indicated, "diameter of the droplet D" means the diameter of the projected image of the droplet D projected on the imaginary plane defined in the X-axis direction and the Y-axis direction. In addition, the diameters phi 1 and phi 2 of the droplet D depend on the volume of the conductive material 8A to be discharged.

By the way, before starting the first scanning period, the droplet ejection apparatus 100 relatively moves the ejection head portion 103 in the X-axis direction so that the X coordinate of one nozzle 118 is equal to the X coordinate of the impact position CP1. Match. Thereafter, when the first scanning period begins, the droplet ejection apparatus 100 changes the relative position of the nozzle 118 with respect to the substrate 10A in the positive direction in the Y-axis direction. When the nozzle 118 reaches the position corresponding to the impact position CP1 within the first scanning period, the droplet ejection apparatus 100 ejects the droplet D of the conductive material 8A from the nozzle 118. do. Then, droplet D of electroconductive material 8A impacts (collides) on the impact position CP1, and expands and wets around it from the impact position CP1. As a result, the conductive material 8A is applied or applied to the impact position CP1 and its surroundings.

By the way, in this embodiment, as shown in FIG. 11, one side of the discharge head part 103 is one end E1 (or the other end E2) of the scanning range 134 along the Y-axis direction as shown in FIG. Means a period in which the relative movement is performed from the other end to the other end E2 (or one end E1) once. Here, the scanning range 134 changes one side of the discharge head portion 103 until the conductive material 8A is applied or applied to all of the plurality of pattern formation regions 24 in the base 10. It means a relatively moving range. However, in some cases, the term "scanning range" may mean a range in which one nozzle 118 moves relatively, or may mean a range in which one head 114 moves relatively. In addition, the relative movement of the discharge head 103, the head 114, or the nozzle 118 means that their relative positions with respect to the pattern formation region 24 are changed. For this reason, even when the discharge head 103, the head 114, or the nozzle 118 are absolutely stopped and only the base 10 moves by the stage 106, the discharge head 103 and the head 114 are moved. Or, the nozzle 118 is expressed as moving relatively.

When the first scanning period ends, the droplet ejection apparatus 100 relatively moves the ejection head portion 103 in the X-axis direction so that the X coordinate of the one nozzle 118 coincides with the X coordinate of the impact position CP2. Then, when the second scanning period starts, the droplet ejection apparatus 100 changes the relative position of the nozzle 118 with respect to the substrate 10A in the negative direction of the Y-axis direction. When the nozzle 118 reaches the region corresponding to the impact position CP2 within the second scanning period, the droplet ejection apparatus 100 ejects the droplet D of the conductive material 8A from the nozzle 118. As a result, the droplets D of the conductive material 8A are impacted (impinged) onto the impact position CP2, and at the same time, they are expanded and wetted from the impact position CP2 around them. As a result, 8 A of electroconductive materials are apply | coated or provided to the impact position CP2 and its periphery.

As shown in FIG. 10, the impact position CP1 faces the boundary line BR corresponding to the 2nd area | region 24C. For this reason, as soon as the droplet D hits the impact position CP1, the droplet D of the bank pattern 18 surrounding the inlet EN and the inlet EN to the 2nd area | region 24C is carried out. Abut on two sides. Similarly, the impact position CP2 faces the boundary line BR corresponding to the second region 24B. For this reason, as soon as the droplet D hits the impact position CP2, the droplet D of the bank pattern 18 surrounding the inlet EN and the inlet EN to the 2nd area | region 24B. Abut on two sides. As a result, most of the volume of the droplet D flows into the 2nd area | region 24B, 24C rather than extended-wetting on the 1st area | region 24A. This is because the width w2 of each of the second regions 24B and 24C or the width of each inlet EN is smaller than the width w1 of the first region 24A.

Therefore, even if the droplet D is not discharged toward the second regions 24B and 24C, the conductive material 8A can flow into the second regions 24B and 24C from the first region 24A, and as a result, The conductive material layer 8B covering the second regions 24B and 24C can be formed. In particular, since the droplet D need not be discharged toward the second region 24B (the portion where the gate electrode 44G is formed), the conductive material 8A adheres beyond the range of the second region 24B. There is no possibility to be. That is, no residue of the conductive material 8A is generated. For this reason, the electroconductive material layer 8B which has the shape which correctly reflected the two-dimensional shape of the 2nd area | region 24B can be obtained. As a result, the gate width and gate length of the gate electrode 44G finally obtained become difficult to include an error resulting from the discharge process.

Similarly to the first scanning period and the second scanning period, in each of the fifth scanning period from the third scanning period, the droplet ejection apparatus 100 is directed toward each of the impact positions CP3, CP4, CP5 shown in FIG. 10, Each droplet D is discharged.

(D5.Intermediate Drying Process)

Next, using the heater 140, the several droplet D of the conductive material 8A which reached the impact positions CP1-CP5 is dried, and the dispersion medium in the conductive material 8A is removed. The thickness of the conductive layer 8 finally generated by such an intermediate drying process can be ensured. The heater 140 of this embodiment is an infrared lamp. However, in the intermediate drying process, instead of lamp annealing using an infrared lamp, excimer lasers such as xenon lamp, YAG laser, argon laser, carbon dioxide laser, XeF, XeCl, XeBr, KrF, KrCl, ArF, ArCl, etc. are used as the light source. Lamp annealing may be used. Generally, these light sources use the output of 10 W or more and 5000 W or less, but in this embodiment, the range of 100 W or more and 1000 W or less is sufficient. In addition, the intermediate drying treatment may include drying by a general hot plate, an electric furnace or the like that heats the base 10 instead of the lamp annealing.

After drying the five droplets D impacted at the impact positions CP1 to CP5, in each of the tenth to tenth scanning periods, the droplet ejection apparatus 100 has reached the impact positions CP6, shown in FIG. To each of CP7, CP8, CP9, CP10, each droplet D is discharged from one or a plurality of nozzles 118.

As shown in FIG. 12, the impact position CP10 is a position facing the boundary line BR between the first region 24A and the second region 24D. For this reason, the liquid droplets D are discharged and landed at the impact position CP10 so that the liquid conductive material 8A is formed from the first region 24A in the second region 24D, similarly to the second regions 24B and 24C. Can be introduced. As a result, the conductive material layer 8B covering the second region 24D can be formed without ejecting the droplet D toward the second region 24D.

In this manner, the ten droplets D of the conductive material 8A are impacted on the first region 24A to cover not only the first region 24A but also the three second regions 24 in contact with the first region 24A. The conductive material layer 8B which also covers 24B, 24C, and 24D can be formed.

(D6.Activation Process)

After the conductive material layer 8B is provided in all of the pattern formation regions 24 provided in the base 10, the conductive material layer 8B is activated to obtain the conductive layer 8. Specifically, the conductive material layer 8B is baked (heated) to sinter or fuse the silver particles contained in the conductive material layer 8B. Therefore, the conveying apparatus 170 lifts the board | substrate 10A from the droplet discharge apparatus 100, and carries it in the clean oven 150. As shown in FIG. The clean oven 150 then fires (heats) the substrate 10A.

The activation step of this embodiment is a heating step performed in the atmosphere. The heating step may be performed in an inert gas atmosphere such as nitrogen, argon or helium or in a reducing atmosphere such as hydrogen as necessary. The processing temperature of the heating step is the boiling point (vapor pressure) of the dispersion medium, the type and pressure of the atmosphere gas, the thermal behavior such as dispersibility and oxidative properties of the silver particles in the conductive material layer 8B, the presence or absence of the coating material covering the silver particles And the heat resistance temperature of the substrate 10A and the like are appropriately determined.

In the activation step of this embodiment, the conductive material layer 8B is fired (heated) for 300 minutes at 280 to 300 ° C. in the air using the clean oven 150. Here, in order to remove the organic component in the conductive material layer 8B, it is preferable to bake (heat) the conductive material layer 8B at about 200 ° C. However, when using board | substrates, such as plastic, instead of the board | substrate 10A which consists of glass, it is preferable to bake (heat) to room temperature or more and 250 degrees C or less.

The activation step may be a step of irradiating ultraviolet light to the conductive material layer 8B instead of the above heating step. The activation step may be a step in which the above heating step and the step of irradiating ultraviolet light are combined.

Through the above steps, electrical contact between the silver particles in the conductive material layer 8B is ensured. As a result, a conductive layer 8 (FIG. 9D) covering the first region 24A and the second regions 24B, 24C, and 24D is obtained from the conductive material layer 8B. That is, one wide portion 34A, one narrow portion 34B and two narrow portions 34C and 34D are formed. As described above, the narrow portion 34B is the gate electrode 44G. Moreover, the thickness of the conductive layer 8 is about 1 micrometer, and for this reason, the surface of the conductive layer 8 and the surface of the bank pattern 18 form the plane of substantially the same level.

In this embodiment, the bank pattern 18 remains even after the conductive layer 8 is formed. However, the bank pattern 18 may be removed after the activation process. In order to remove the bank pattern 18, the ashing treatment may be performed on the base 10, the bank pattern 18 may be dissolved in a solvent, or the bank pattern 18 may be physically removed.

One example of the ashing process is plasma ashing. Plasma ashing is a process of reacting gas, such as an oxygen plasma (plasmaized oxygen gas), with the bank pattern 18, vaporizing a bank layer, and peeling and removing. Specifically, since the bank pattern 18 is composed of carbon, oxygen, and hydrogen, when the bank pattern 18 chemically reacts with an oxygen plasma, all of CO ₂ , H ₂ O, and O ₂ are generated in a gaseous state. That is, the bank pattern 18 can be vaporized and peeled from a base body.

Another example of ashing treatment is ozone ashing. The basic principle of ozone ashing is to first decompose O ₃ (ozone) to obtain O ⁺ (oxygen radicals) of reactive gases. The O ⁺ and the bank pattern 18 are chemically reacted. This chemical reaction produces all of CO ₂ , H ₂ O and O ₂ in the gaseous state. That is, the bank pattern 18 can be vaporized and peeled from a base body.

(D7. TFT Device Fabrication)

After forming the wide portion 34A of the gate wiring 34 and the narrow portions 34B, 34C, and 34D of the gate wiring 34, a TFT (Thin Film Transistor) element is formed. Hereinafter, with reference to FIG. 13, the manufacturing process of a TFT element is demonstrated focusing on one pixel area.

First, as shown in FIG. 13A by CVD and patterning, the gate insulating film 42 covering the gate wiring 34 and the bank pattern 18 and the semiconductor layer 35 provided corresponding to the gate electrode 44G. And two bonding layers 37S and 37D positioned apart from each other at predetermined intervals on the semiconductor layer 35. The thickness of the gate insulating film 42 is about 200 nm. The semiconductor layer 35 is made of amorphous silicon (a-Si), and the thickness of the semiconductor layer 35 is in the range of 200 nm to 300 nm. Here, the portion of the semiconductor layer 35 overlapping with the gate electrode 44G through the gate insulating film 42 becomes a channel region. On the other hand, the two bonding layers 37S and 37D are made of n + type amorphous silicon, and the thickness of each of the two bonding layers 37S and 37D is about 50 nm. These two bonding layers 37S and 37D are respectively connected to the source electrode 44S and the drain electrode 44D formed later.

After the two bonding layers 37S and 37D are formed, as shown in FIG. 13B, the two bonding layers 37S and 37D, the semiconductor layer 35, and the gate insulating film 42 are covered. And the precursor of polyimide resin are apply | coated by spin coating, and photocured, and the interlayer insulation layer 45 of about 3 micrometers (3000 nm) thickness is formed. Here, the amount of the precursor of the polyimide resin to be applied is set so that the interlayer insulating layer 45 absorbs the steps generated by the underlying semiconductor layer 35 and the two bonding layers 37S and 37D. For this reason, the surface of the interlayer insulating layer 45 becomes flat.

Then, as shown in FIG. 13C, the portion where the source electrode line 44SL is provided, the portion where the source electrode 44S is provided, and the portion where the drain electrode 44D is provided are exposed. The insulating layer 45 is patterned. As a result, the interlayer insulating layer 45 surrounds the shape of the source electrode line 44SL, the shape of the source electrode 44S, and the shape of the drain electrode 44D. In addition, the patterned interlayer insulation layer 45 is also described as "bank pattern 46".

Thereafter, a conductive material layer is provided in each portion surrounded by the bank pattern 46 using the droplet ejection apparatus 100. By activating the conductive material layer, as shown in Fig. 13D, the source electrode line 44SL, the source electrode 44S, and the drain electrode 44D are obtained. One end of the source electrode 44S is positioned on the bonding layer 37S, and the other end is in contact with the source electrode line 44SL. In addition, the drain electrode 44D is positioned on the bonding layer 37D.

In the present embodiment, the gate electrode 44G, the semiconductor layer 35, the gate insulating film 42 located between the gate electrode 44G and the semiconductor layer 35, the bonding layer 37S, and the bonding layer ( The part including the source electrode 44S connected to the semiconductor layer 35 through 37S, the bonding layer 37D, and the drain electrode 44D connected to the semiconductor layer 35 through the bonding layer 37D is formed. TFT element 44.

Next, the second insulating layer 45A covering the source electrode line 44SL and the source electrode 44S and the second insulating layer 45B covering the drain electrode 44D are formed by the photolithography method. At this time, the second insulating layers 45A and 45B are formed so that the step difference of the base is absorbed. In doing so, the second insulating layers 45A and 45B and the bank pattern 46 provide the same level of plane. Here, when forming the second insulating layer 45B, a contact hole 45C that penetrates the second insulating layer 45B and reaches the drain electrode 44D is also formed at the same time. The contact hole 45C has a shape in which the diameter of the opening on the drain electrode 44D side is smaller than the diameter of the other opening. In other words, the contact hole 45C has a tapered shape.

After the second insulating layers 45A and 45B are formed, an ITO film is formed and patterned on the second insulating layers 45A and 45B and on the bank pattern 46 by using a sputtering method and a known patterning technique. By doing so, the second insulating layers 45A and 45B and the pixel electrode 36 covering the bank pattern 46 are obtained. At this time, the pixel electrode 36 and the drain electrode 44D are electrically connected through the contact hole 45C.

And a polyimide resin layer is formed by apply | coating and hardening | curing a polyimide resin so that the pixel electrode 36, the bank pattern 46, and the 2nd insulating layers 45A and 45B may be covered. And the orientation film 41P is obtained by rubbing the surface of the obtained polyimide resin layer to a predetermined direction. By the above process, the element side board | substrate 10B as shown to FIG. 13E is obtained.

Then, the element side substrate 10B and the opposing substrate not shown in the figure are bonded through a spacer not shown in the figure. Then, a liquid crystal material is introduced and sealed between the element side substrate 10B secured by the spacer and the opposing substrate (not shown) to obtain a liquid crystal display device.

<Example 2>

This embodiment is basically the same as the first embodiment except that the method for discharging the droplets D of the conductive material 8A to the first region 24A differs from the method of the first embodiment. For this reason, the same code | symbol is attached | subjected to the component same as the component of Example 1. FIG. In addition, description overlapping with description in Example 1 is abbreviate | omitted for the purpose of simplifying description.

As shown in Figs. 14 and 15, in the present embodiment, nine impact positions CP (CP1 to CP9 in the drawing) are allocated to one first region 24A in the discharge data. In FIG. 14 and FIG. 15, white circles representing these nine impact positions are superimposed on the first region 24A. Then, the droplet ejection apparatus 100 ejects the droplets D in the order of CP1 to CP9 at these nine impact positions CP based on the ejection data. Here, the number following the "CP" has shown the order in which the droplet D is discharged in one 1st area | region 24A. 14 and 15, these impact positions CP are from the negative in the X-axis direction to the positive direction (from the left to the right of the ground), CP2, CP4, CP1, CP7, CP5, CP8, CP6, CP9, CP3. Are listed in the order of.

As shown in FIG. 14, the impact position CP1 does not face the boundary line BR of the 2nd area | region 24B. However, the impact position CP1 is the closest to the boundary line BR of the 2nd area | region 24B among these 9 impact positions CP. On the other hand, the impact position CP2 faces the boundary line BR of the second region 24C. The impact position CP2 is closest to the boundary line BR of the second region 24C among the nine impact positions CP. In addition, the impact position CP3 faces the boundary line BR of the second region 24D. The impact position CP3 among the nine impact positions CP is closest to the boundary line BR of the second region 24D. In addition, since the description of the positional relationship of the impact position CP and the boundary line BR when the impact position CP "faces" the boundary line BR is described in Example 1, it is described here for the purpose of avoiding duplication. I never do that.

According to the discharge process of the present embodiment, when the droplet D reaches the impact position CP closest to the boundary line BR, the point of time when the droplet D reaches the impact position CP (time point TA From)), the droplet D reaches the point of time (expansion point TB) in which the droplet D is expanded and wetted over the width w2 in the second region 24B by magnetic flow (capillary phenomenon). ) Does not contact other droplets D in the first region 24A. In other words, over this period, the droplet D that is closest to the boundary line BR is isolated from the other droplet D. 14 has shown the range of the droplet D at the time point TA with a solid line, and has shown the range of the droplet D at the time point TB with a dotted line.

In addition, in this embodiment, even from the time point TA to the time point (time point TC) from which the droplet D from the impact position CP covers the whole area of the 2nd area | region 24B, this droplet D ) Does not contact other droplets D in the first region 24A. The time point TC is a time point after the time point TB.

In addition, in this embodiment, when the droplet D is discharged toward the impact position CP closest to any one boundary line BR among the impact positions CP which do not face the lower boundary line BR, Discharge of the droplet D is given priority over discharge to other impact positions CP. Specifically, the discharge of the droplet D to the impact position CP1 is given priority.

The discharge process of this embodiment is as follows. First, before starting the first scanning period, the droplet ejection apparatus 100 relatively moves the ejection head portion 103 in the X-axis direction, and moves the X coordinate of one nozzle 118 to X at the impact position CP1. Match the coordinates Thereafter, when the first scanning period begins, the droplet ejection apparatus 100 changes the relative position of the nozzle 118 with respect to the substrate 10A in the positive direction in the Y-axis direction. When the nozzle 118 reaches the position corresponding to the impact position CP1 within the first scanning period, the droplet ejection apparatus 100 ejects the droplet D of the conductive material 8A from the nozzle 118. do. As a result, the droplet D of the conductive material 8A impacts (collides) on the impact position CP1 and expands and wets from the impact position CP1 to its circumference. As a result, the conductive material 8A is applied or applied to the impact position CP1 and its surroundings.

As shown in FIG. 14, the impact position CP1 is closest to the boundary line BR corresponding to the 2nd area | region 24B among nine impact positions CP. For this reason, when the droplet D lands at the impact position CP1, between the time point TA and the time point TB, the droplet D is the entrance EN to the 2nd area | region 24B, Two sides of the bank pattern 18 surrounding the entrance EN to the second region 24B are reached. By doing so, most of the volume of the droplet D flows into the second region 24B, rather than being expanded and wetted on the first region 24A. This is because the width w2 of the second region 24B or the width of the inlet EN of the second region is smaller than the width w1 of the first region 24A. In this way, even if the droplet D is not discharged toward the second region 24B, the conductive material 8A can flow into the second region 24B from the first region 24A, and as a result, the second The conductive material layer 8B covering the region 24B can be formed.

Here, before the impacted droplet D reaches the two sides of the bank pattern 18 surrounding the inlet EN of the second region 24B and the inlet EN of the second region 24B, In the case of contacting with another droplet D provided to the first region 24A, the two droplets D contract with each other by surface tension. Therefore, in such a case, the conductive material 8A may not flow into the second region 24B.

However, according to the discharge method of the present embodiment, from the time point TA at which the droplet D hits the impact position CP1, the droplet D expands and wets over the width w2 in the second region 24B. Until the time point TB becomes, the droplet D is not in contact with another droplet D. For this reason, even if the impact position CP1 does not face the boundary line BR, the droplet D can flow into the second region 24B.

By discharging the droplets D of the conductive material 8A as described above, most of the volume of one droplet D that reaches the impact position closest to the boundary line BR is transferred to the second region (through the boundary line BR). Flows into 24B). Then, the conductive material layer 8B covering the second region 24B is formed by the droplet D (conductive material 8A) flowing into the second region 24B.

Therefore, according to the present embodiment, the conductive material 8A can flow from the first region 24A to the second region 24B without impacting the droplet D on the second region 24B. The conductive material layer 8B covering the two regions 24B can be formed. In particular, since the droplet D does not need to be discharged toward the second region 24B (the portion where the gate electrode 44G is formed), the conductive material 8A adheres beyond the range of the second region 24B. There is no possibility to be. That is, no residue of the conductive material 8A is generated. For this reason, the electroconductive material layer 8B which has the shape which accurately reflected the two-dimensional shape of the 2nd area | region 24B is obtained. As a result, the gate width and gate length of the gate electrode finally obtained become difficult to include the error resulting from a discharge process.

After discharging the droplets D at the impact position CP1, in each of the ninth scanning period from the second scanning period, the droplet discharging device 100 is configured at the impact positions CP2 to CP9 shown in FIGS. 14 and 15. The droplet D is discharged from the nozzle 118 toward each one.

After the conductive material layer 8B is provided in all of the plurality of pattern formation regions 24 provided in the base 10, the conductive material layer 8B is activated. For this purpose, the conveying device 170 places the gas 10 inside the clean oven 150. And when the clean oven 150 heats the board | substrate 10A, the electrically conductive layer 8 which silver particle in the conductive material layer 8B sinters or fuses, and covers the pattern formation area | region 24 is obtained. Here, the conductive layer 8 covering the first region 24A of the pattern forming region 24 is the wide portion 34A, and the conductive layer 8 covering the second region 24B is the narrow portion 34B (ie, Gate electrode 44G, and the conductive layer 8 covering the second regions 24C and 24D is the narrow portions 34C and 34D.

<Example 3>

In the present embodiment, instead of the bank pattern 18 surrounding the pattern forming region 24 (the first region 24A, the second regions 24B, 24C, and 24D), the liquid repellent pattern 58 is formed in the pattern forming region ( It is basically the same as in Embodiment 1 or 2, except that it surrounds 64 (the first region 64A, the second regions 64B, 64C, 64D). For this reason, the same code | symbol is attached | subjected to the component same as the component of Example 1 or 2. In addition, the description overlapping with description in Example 1 or 2 is abbreviate | omitted for the purpose of simplifying description.

First, a liquid-repellent treatment is performed on the surface of the substrate 10A. As one of the methods for liquid repellent treatment, there is a method of forming a self-organizing film made of an organic molecular film or the like on the surface of the substrate 10A.

The molecules constituting the organic molecular film include functional groups capable of bonding to the substrate 10A, functional groups for modifying the surface characteristics of the substrate 10A (controlling surface energy), and normal chains of carbon connecting these functional groups. ) Or a partially branched carbon chain. The molecule then binds to the substrate to form a molecular film, for example a monomolecular film.

The self-organizing film is a film made of molecules oriented in the same direction. Such a molecule consists of a bonding functional group capable of reacting with atoms constituting the base such as the surface of the substrate 10A, and other normal chain molecules. And this molecule has extremely high orientation thanks to the interaction of normal chain molecules. In addition, since the self-organizing film is formed from molecules oriented in the same direction as each other, the thickness of the self-organizing film is extremely thin. In addition, the thickness is uniform at the molecular level. Moreover, since the same site | part of a single molecule is located over the surface of the self-organizing film, the surface characteristic (for example, liquid repellency) of a self-organizing film is also uniform over the surface.

As a compound capable of forming an organic molecular film to be a self-organizing film, an example of a compound showing liquid repellency is fluoroalkylsilane (hereinafter also referred to as FAS). When the FAS binds to the underlying substrate 10A, the molecules are oriented so that the fluoroalkyl group is located on the free surface to form a self-organizing film (hereinafter also referred to as a FAS film). The surface of the FAS film in which the fluoroalkyl groups are aligned has a small surface energy, and therefore exhibits liquid repellency. Thus, by forming a FAS film on the surface of the substrate 10A, liquid repellency is imparted to the surface of the substrate 10A. In addition, the FAS film not only imparts liquid repellency to the surface of the substrate 10A, but also has high adhesiveness to the substrate 10A, and thus is excellent in durability.

FAS includes heptadecafluoro-1,1,2,2 tetrahydrodisiltriethoxysilane, heptadecafluoro-1,1,2,2 tetrahydrodisyltrimethoxysilane, heptadecafluoro-1,1 , 2,2 tetrahydrodisiltrichlorosilane, tridecafluoro-1,1,2,2 tetrahydrooctyltriethoxysilane, tridecafluoro-1,1,2,2 tetrahydrooctyltrimethoxysilane And fluoroalkylsilanes such as tridecafluoro-1,1,2,2 tetrahydrooctyltrichlorosilane and trifluoropropyltrimethoxysilane. Although it is also preferable to use one compound alone at the time of use, even if it uses in combination of 2 or more types of compound, it will not be restrict | limited unless the objective of this invention is impaired.

More specifically, FAS is generally represented by the structural formula R _n SiX _(4-n) . N represents an integer of 1 or more and 3 or less, and X represents hydrolyzable groups, such as a methoxy group, an ethoxy group, and a halogen atom. R is a fluoroalkyl group, and has a structure of (CF ₃ ) (CF ₃ ) _x (CH ₃ ) _y (where x is an integer of 0 or more and 10 or less, y is an integer of 0 or more and 4 or less), When several R or X couple | bonds with Si, R or X may respectively be same or different. The hydrolyzate represented by X forms silanol by hydrolysis, and reacts with hydroxyl groups of the base such as substrate 10A (glass, silicon) to bond with substrate 10A by siloxane bonds. On the other hand, since R has a fluoro group such as (CF ₃ ) on the surface, the surface of the underlying object (here, gas 10A) is modified to a surface that is not wet (low surface energy).

A method of forming a FAS film from the gas phase on the substrate 10A is as follows. The raw material compound (i.e., FAS) and the substrate 10A are placed in the same hermetically sealed container, and left to stand for 2 to 3 days at room temperature. This forms a self-organizing film (i.e., FAS film) made of an organic molecular film on the substrate 10A. In the case where the entire sealed container is kept at 100 ° C, a FAS film is formed on the substrate 10A in about 3 hours.

In addition, a method of forming the FAS film in the liquid phase on the substrate 10A is as follows. First, ultraviolet light is irradiated onto the surface of the substrate 10A or washed with a solvent to perform a mount center treatment. Subsequently, when the substrate 10A is deposited, washed and dried in a solution containing a raw material compound (i.e., FAS), a self-organizing film (FAS film) is obtained on the substrate 10A. In addition, the pretreatment of the surface of the substrate 10A may be omitted as appropriate.

As described above, a liquid-repellent film (FAS film) 56 is provided on the substrate 10A as shown in Fig. 16A. As shown in Fig. 16B, the portion surrounding the two-dimensional shape of the wiring pattern is exposed to the FAS film 56 through the photomask M1 covered by the light shielding mask MK. As a result, the liquid-repellent film 56 of the portion to which light is irradiated is decomposed, so that the liquid-repellent pattern 58 shown in FIG. 16C is formed. At the same time, a plurality of portions (surface of the substrate 10A) surrounded by the two-dimensional shapes are exposed by the liquid repellent pattern 58.

In the present embodiment, the liquid repellent pattern 58 has a shape that completely surrounds each of the plurality of gate wirings 34 formed later. Of course, the liquid repellent pattern 58 may consist of the some liquid repellent part 58B (FIG. 17) isolate | separated from each other, respectively. For example, the two-dimensional shape of one gate wiring 34 may be enclosed between a pair of liquid repellent parts 58B which deviate by a predetermined distance and are positioned substantially parallel to each other. In this case, the liquid repelling portion 58B may not be provided at portions corresponding to both ends of the gate wiring 34. That is, the liquid repellent pattern 58 does not need to completely surround the two-dimensional shape of the gate wiring 34.

In the present embodiment, each of the plurality of portions in which the two-dimensional shapes are surrounded by the liquid repellent pattern 58 is also referred to as "pattern formation region 64".

In addition, one of the indicators showing the liquid repellency of the object surface is the contact angle that the liquid material exhibits on the object surface. The larger the contact angle of the liquid material on the object surface, the greater the liquid repellency of the liquid material. In this embodiment, the contact angle indicated by the conductive material 8A on the liquid repellent pattern 58 is 30 ° or more larger than the contact angle indicated by the conductive material 8A on the pattern formation region 64.

As shown in FIG. 17, each of the plurality of pattern formation regions 64 has a width w2 that is in contact with the first region 64A having a width w1 and the first region 64A and is narrower than the width w1. Have second regions 64B, 64C, and 64D having Here, the first region 64A is a portion extending in the first direction among the pattern formation regions 64. And the 1st area | region 64A in the pattern formation area | region 64 is a part in which the wide part 34A (FIG. 1) is provided by a later process. On the other hand, the second regions 64B, 64C, and 64D in the pattern formation region 64 are portions in which the narrow portions 34B, 34C, and 34D (FIG. 1) are respectively formed by a later process. The width w1 of the first region 64A is approximately equal to the wide portion 34A (ie, about 20 μm). On the other hand, the width w2 of the second regions 64B, 64C, and 64D is approximately equal to the width of the narrow portions 34B, 34C, and 34D (that is, about 10 mu m).

As such, each two-dimensional shape of the plurality of pattern forming regions 64 is the same as the two-dimensional shape of the pattern forming regions 24 of the first or second embodiment. In addition, the substrate 10A after the pattern formation region 64 is provided corresponds to the base 10 (FIG. 3).

Since the liquid repellent film 56 is not formed in the pattern formation region 64, the liquid repellency of the pattern formation region 64 is lower than the liquid repellency of the liquid repellent pattern 58. Rather, in the present embodiment, the pattern formation region 64 shows lyophilic with respect to the droplet D of the conductive material 8A. This is because the pattern formation region 64 is the surface of the substrate 10A, and as described in the first embodiment, the substrate 10A is a glass substrate.

After the pattern formation region 64 is formed, the droplet ejection apparatus 100 forms the conductive layer 8 (gate wiring 34) on the pattern formation region 64 according to the ejection process described in the first or second embodiment. Form.

Specifically, the droplet ejection apparatus 100 changes the relative position of the nozzle 118 with respect to the base 10 in two dimensions (X-axis direction and Y-axis direction). As shown in FIG. 18A, whenever the nozzle 118 reaches a position corresponding to the first region 64A, the droplet D of the conductive material 8A is discharged from the nozzle 118. . As a result, as shown in FIG. 18B, the plurality of droplets D of the conductive material 8A reach the first region 64A and expand and wet. As shown in FIG. 18C, the plurality of droplets D impacted on the first region 64A are expanded and wetted so that not only the first region 64A but also the second regions 64B, 64C, and 64D are also wetted. A covering conductive material layer 8B is formed.

Thereafter, the conductive material layer 8B is activated (heated here) using the clean oven 150 to obtain the conductive layer 8 shown in FIG. 18D. In addition, the cross section shown to (a)-(d) of FIG. 18 corresponds to the B'-B cross section in FIG.

Therefore, according to the present embodiment, even if the droplet D is not discharged toward the second regions 64B, 64C, and 64D, the conductive material (1) is formed from the first region 64A to the second regions 64B, 64C, and 64D. 8A) can flow, and as a result, the conductive material layer 8B covering the second regions 64B, 64C, and 64D can be formed. In particular, since the droplet D need not be discharged toward the second region 64B (the portion where the gate electrode 44G is formed), the conductive material 8A adheres beyond the range of the second region 64B. There is no possibility to be. That is, no residue of the conductive material 8A is generated. For this reason, the conductive material layer 8B which has the two-dimensional shape which accurately reflected the two-dimensional shape of the 2nd area | region 64B can be obtained. As a result, the gate width and gate length of the gate electrode 44G finally obtained become difficult to include errors due to the discharge process.

According to the above embodiment, the present invention has been applied to the manufacture of a gate electrode for a TFT in a liquid crystal display device. However, the present invention may be applied to the production of various electrodes in other display devices, such as the production of gate electrodes for TFTs in organic electroluminescent display devices. It may also be applied to the manufacture of metal wires in an address electrode in a plasma display device, a Surface-Conduction Electron-Emitter Display (SED) or a field emission display (FED).

In addition, in this specification, a liquid crystal display device, an electroluminescent display device, a plasma display device, SED, FED, etc. may be described as "electro-optical device." Here, the "electro-optical device" referred to in the present specification is not limited to a device using a change in optical characteristics such as a change in birefringence, a change in optical activity, or a change in light scattering property (so-called electro-optic effect). It means the whole device which emits, transmits, or reflects light according to application.

(Electronics)

The specific example of the electronic device of this invention is demonstrated. The mobile telephone 600 shown in FIG. 19A includes an electro-optical device 601 manufactured by the manufacturing method of the above embodiment. The portable information processing apparatus 700 shown in FIG. 19B includes a keyboard 701, an information processing main body 703, and an electro-optical device 702 manufactured by the manufacturing method of the embodiment. More specific examples of such portable information processing apparatus 700 are word processors and personal computers. The wrist watch type electronic device 800 shown in FIG. 19C includes an electro-optical device 801 manufactured by the manufacturing method of the above embodiment. Thus, since the electronic device shown to Fig.19 (a)-(c) is equipped with the electro-optical device manufactured by the manufacturing method of the said Example, TFT characteristics are favorable and for this reason, an electro-optical device with favorable display is shown. The electronic device which has is obtained.

As mentioned above, although the preferred embodiment which concerns on this invention was described referring an accompanying drawing, it cannot be overemphasized that this invention is not limited to this example. All shapes, combinations, and the like of the respective constituent members shown in the above-described examples are examples, and various changes can be made based on design requirements and the like without departing from the spirit of the present invention.

<Modification 1>

The conductive fine particles contained in the conductive material 8A may be, for example, metal fine particles containing at least any one of gold, copper, aluminum, vanadium and nickel, instead of silver particles, and oxides and conductive polymers thereof. The fine particles of the superconductor may be used. In order to improve dispersibility, these electroconductive fine particles may be coated with organic substance etc. on the surface.

<Modification 2>

The liquid liquefaction treatment step of the substrate 10A in Example 3 may be a plasma treatment instead of the formation of the FAS film. When performing a plasma process, after forming the protective layer corresponding to the shape of a wiring pattern on the board | substrate 10A, plasma irradiation is performed with respect to the board | substrate 10A by atmospheric pressure or a vacuum state. Here, the kind of gas used for plasma irradiation can be variously selected in consideration of the material of the surface of the substrate 10A and the like. For example, fluorocarbon gas such as methane tetrafluoride, perfluorohexane, perfluorodecane can be used as the treatment gas. In the case of using these compounds, a liquid-repellent fluorinated polymer film can be formed on the surface of the substrate 10A. Even with such a plasma treatment, the liquid repellent pattern 58 can be formed.

<Modification 3>

In Examples 1 to 3, the substrate 10A is disposed on the stage 106 so that the first direction (that is, the direction in which the first region 24A extends) and the X-axis direction (that is, the non-scanning direction) coincide with each other. Let's do it. However, the present invention is not limited to this form. Specifically, you may arrange | position the board | substrate 10A on the stage 106 so that a 1st direction and a Y-axis direction (that is, a scanning direction) may correspond. Even if the substrate 10A is disposed so that the first direction and the Y-axis direction coincide, the ejection method described in the above embodiment can be performed, and for this reason, the droplet D is directed toward the second regions 24B, 24C, and 24D. This is because the conductive layer 8 (that is, the gate electrode 44G) that covers the second regions 24B, 24C, and 24D can be formed even without discharging the liquid crystals.

<Modification 4>

According to the first embodiment, after the bank pattern 18 is formed, liquefaction (fluorination) is performed by plasma treatment, and the surface of the bank pattern 18 is liquefied. However, when the bank pattern 18 is formed using a material having liquid repellency, the liquid repelling treatment to the bank pattern 18 may be omitted. As a material having liquid repellency, there is an acrylic chemically amplified photosensitive resin blended with a fluoropolymer.

<Modification 5>

Each of the gate wiring 34, the drain electrode 44D, the source electrode 44S, and the source electrode line 44SL in the first to third embodiments is made of a silver layer. Instead of this structure, at least one of the gate wiring 34, the drain electrode 44D, the source electrode 44S, and the source electrode line 44SL is a multilayer composed of a base layer made of silver and a cap metal layer located on the base layer. You may have a structure. The cap metal layer is made of nickel, for example, and facilitates electrical bonding between the gate wiring 34 and other wiring.

According to the present invention, the conductive material layer can be provided in the second region without discharging the droplet from the droplet ejection apparatus in a region (second region) having a width less than or equal to the diameter of the droplet from the droplet ejection apparatus. Since the droplets are not discharged toward the liquid crystals, the droplets do not adhere beyond the range of the second region, and the liquid conductive material can more reliably flow into the second region, and flows into the second region from one droplet. The volume of the liquid conductive material can be increased, and there is an effect that the liquid conductive material is easily wetted by the shape of the pattern formation region. In addition, the present invention has the effect of forming a TFT having excellent device characteristics.

Claims (18)

A droplet is discharged from a liquid conductive material by using a droplet ejection apparatus, the edge is defined by a bank pattern on a substrate, and has a first region having a first width, the first region, As a wiring pattern formation method which provides a conductive material layer in the pattern formation area | region which has a 2nd area | region which contact | connects and has a 2nd width below the said 1st width, And discharging the droplets having a diameter less than or equal to the first width and greater than or equal to the second width to the first region to form the conductive material layer covering the first region and the second region, And said step (A) comprises a step (a1) of discharging said droplets so that said droplets land at positions facing a boundary line between said first region and said second region. The method of claim 1, And said step (A) comprises the step of ejecting said droplets only in said first region of said first region and said second region. The method of claim 1, The step (a1) is a normal to the boundary line and is located on a normal line passing through approximately the center of the boundary line and at a distance of about 1/2 times or more times the diameter from the boundary line. And discharging said droplets so that approximately the center of said droplets is reached. The method of claim 1, The step (a1) is a normal to the boundary line from a position where a normal line passing through approximately the center of the boundary line and a line segment extending in a direction orthogonal to the first width direction as a line segment dividing the first region. And discharging the droplets so that the center of the droplets reaches a position at a distance of 0 to 1 times the diameter. The method of claim 1, And said step (a1) comprises a step of ejecting a first droplet on a normal to said boundary line. The droplet ejection apparatus ejects a plurality of droplets of a liquid conductive material, the edge being defined by a bank pattern on the substrate, the first region having a first width, and the first region in contact with the first region. As a wiring pattern formation method which provides a conductive material layer in the pattern formation area which has a 2nd area | region which has the following 2nd width, And discharging the plurality of droplets having a diameter less than or equal to the first width and greater than or equal to the second width to the first region to form the conductive material layer covering the first region and the second region. , The step (A) is such that the plurality of droplets hitting a position closest to the boundary between the first region and the second region of the plurality of droplets is isolated from the other droplets for a period of time above the first region. Step (a1) of discharging droplets of the wiring pattern comprising the wiring pattern forming method. The method of claim 6, And said step (A) comprises the step of ejecting said plurality of droplets only in said first region of said first region and said second region. The method of claim 6, And said step (A) comprises discharging said one droplet and said other droplet such that the volume of said one droplet becomes larger than that of said other droplet. Droplets of a liquid conductive material are discharged using a droplet ejection apparatus, the edges of which are determined by a liquid repellent pattern on a substrate, and the first region having a first width, and the first region having a first width and less than or equal to the first width. A wiring pattern forming method of providing a conductive material layer in a pattern forming region having a second region having a second width, And discharging the droplets having a diameter less than or equal to the first width and greater than or equal to the second width to the first region to form the conductive material layer covering the first region and the second region, And said step (A) comprises a step (a1) of discharging said droplet so that said droplet lands at a position facing a boundary line between said first region and said second region. The method of claim 9, And said step (A) comprises the step of ejecting said droplets only in said first region of said first region and said second region. The method of claim 9, The step (a1) is a normal to the boundary line and is located on a normal line passing through approximately the center of the boundary line, and at a position at a distance of about 1/2 times or more times the diameter from the boundary line. And a step of ejecting the droplets so that the center thereof is approximately reached. The method of claim 9, The step (a1) is a position with respect to the boundary line where a normal line passing through approximately the center of the boundary line and a line segment extending in a direction orthogonal to the first width direction as a line segment dividing the first region are intersected. And discharging said droplets to a position at a distance of 0 to 1 times the diameter of the droplets so that approximately the center of the droplets is reached. The method of claim 9, And said step (a1) comprises a step of ejecting a first droplet on a normal to said boundary line. A plurality of droplets of a liquid conductive material are discharged using a droplet ejection apparatus, the edges of which are defined by a liquid repellent pattern on a substrate, and have a first area having a first width, and the first area in contact with the first area. As a wiring pattern formation method which provides a conductive material layer in the pattern formation area which has a 2nd area | region which has the following 2nd width, And discharging the plurality of droplets having a diameter less than or equal to the first width and greater than or equal to the second width to the first region to form the conductive material layer covering the first region and the second region. , The step (A) is such that the plurality of droplets hitting a position closest to the boundary between the first region and the second region of the plurality of droplets is isolated from the other droplets for a period of time above the first region. Step (a1) of discharging droplets of the wiring pattern comprising the wiring pattern forming method. The method of claim 14, And said step (A) comprises the step of ejecting said plurality of droplets only in said first region of said first region and said second region. The method of claim 14, And said step (A) comprises discharging said one droplet and said other droplet such that the volume of said one droplet becomes larger than that of said other droplet. The method according to any one of claims 1, 6, 9 and 14, The said pattern formation area is a wiring pattern formation method which shows lyophilic with respect to the said liquid conductive material. A method for forming a gate electrode for a TFT including the wiring pattern forming method according to any one of claims 1, 6, 9 and 14. The first region is a region where a wide portion of the gate wiring is formed. And the second region is a region where a gate electrode branched from the gate line is formed.

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