KR100726117B1 - Separation Type Nozzle Element For Adhesion The Plate Element Of Head And Manufacturing Method Thereof - Google Patents

Abstract

According to the present invention, when using a separate nozzle member for bonding a plate member of a head and a manufacturing method thereof, the nozzle forming layer and the chamber forming layer are respectively formed through a mask etching process in a state in which a depth control film is not laminated between the nozzle forming layer and the chamber forming layer. Since the nozzle hole for ejecting ink, the chamber for storing ink, and the first and second incisions are etched to form a separate nozzle member having a connection part, the chamber is precisely manufactured by reducing the length variation of the nozzle member by using the difference in etching conditions. In addition, the wear resistance to the fluid is improved, and the first and second incisions are applied even when a deformable force in the tangential direction is applied due to the difference in the expansion ratio of the dissimilar materials when thermally fusion bonding the separate nozzle member to the plate member of the head. The connection between the parts is cut off to compensate for deviations, so each separate nozzle member is damaged from the plate member. It relates to a highly useful and effective invention to prevent the departure.

Print head, chamber forming layer, nozzle forming layer, nozzle hole, chamber, connection part

Description

Separation Type Nozzle Element For Adhesion The Plate Element Of Head And Manufacturing Method Thereof}

1 is an exploded perspective view of a plate member constituting a general ink jet printing head,

Figure 2 is an assembled state of Figure 1,

3 to 13 are views sequentially showing a method of manufacturing a separate nozzle member of a head using a semiconductor process according to an embodiment of the present invention,

14 is a view showing a final manufacturing state of the removable nozzle member according to another embodiment of the present invention,

15 is a partial cutaway perspective view of a detachable nozzle member manufactured by a process according to an embodiment of the present invention,

16 is a view showing a state in which the removable nozzle member according to the present invention attached to the plate member of the head to use,

17 is a view showing a state in which the connecting portion is cut while heat-sealing the detachable nozzle member according to an embodiment of the present invention to the plate member of the head.

* Explanation of symbols for main parts of drawings *

2: chamber forming layer 4: depth control film

6: nozzle forming layer 8: first photosensitive film

10: first mask 12: patterning

14 nozzle hole 15 first incision

16: second photosensitive film 18: second mask

20: patterning 21: second incision

22: chamber 23, 23a: connection portion

24: adhesive layer 26: protective film

28: coating film 50: the first outer plate member

60: center plate member 70: second outer plate member

100: nozzle member

The present invention relates to an inkjet printhead of a digital printing machine, and in particular, a nozzle for injecting ink into the nozzle forming layer and the chamber forming layer, respectively, through a mask etching process in a state in which a depth control film is not laminated between the nozzle forming layer and the chamber forming layer. Since the chamber for storing holes and ink and the first and second incisions are etched to form a separate nozzle member having a connection portion, the chamber is precisely manufactured by reducing the length variation of the nozzle member by using the difference in etching conditions. In addition to improving abrasion resistance, the connection between the first and second incisions is applied even when the detachable nozzle member is thermally fused for bonding to the plate member of the head, even when a strain force in the tangential direction is applied due to the difference in the expansion ratio of the dissimilar materials Is cut off to compensate for deviations, so each separate nozzle member is broken from the plate member , To a plate member detachable adhesive nozzle member, and a manufacturing method of the head to prevent.

In general, an ink jet printhead is an ink ejection apparatus for ejecting ink of various colors in order to print characters, pictures, and the like required for media, which is printing paper, in a digital printing machine. Chambers and nozzles are formed by etching to bond to each other to produce them.

As shown in Fig. 1 and Fig. 2, there is shown a configuration of a plate member 40 for injecting ink directly into the media in the ink jet printhead, and the plate element is formed of glass, such as glass. The first plate member 50, the center plate member 60, and the second plate member 70, which are made of a ceramic material and are etched to supply ink, are bonded to each other.

The first plate member 50 forms an ink supply hole 52 through which ink is injected, a first storage chamber 54 through which ink is temporarily sucked and stored, and a first flow path through which ink moves. And a first supply chamber 58 temporarily gathered before supplying the ink moved to the first flow passage 56 on one side.

The center plate member 60 is bonded to one side of the first plate member 50 by a bond and supplies ink supplied to the ink supply hole 52 of the first plate member 50. An ink through hole 62 moving to the opposite side and a center hole 64 through which ink stored in the first supply chamber 58 of the first plate member 50 moves; The nozzle groove 66 for directly spraying the media of ink) is recessed on one side.

In addition, the second plate member 60 is bonded to the opposite side of the center plate member 60 and the ink passed through the ink through hole 62 of the center plate member 60 is temporarily sucked in and stored. One side of the second storage chamber 72, the second flow path 74 through which ink moves, and the second supply chamber 76 temporarily gathered before the ink moved to the second flow path 74 is supplied. To form a depression.

As such, various grooves having a predetermined depth, width, and width in the first plate member 50, the center plate member 60, and the second plate member 70, which are components of the plate member 40, are picked up. It is formed by etching using the formed etching solution, and then bonded.

In addition, the nozzle groove of the center plate member 60 may be cut by cutting the end portion in a state in which the first plate member 50, the center plate member 60, and the second plate member 70 of the plate member 40 are bonded to each other. Open (66) so that ink is ejected and used.

However, as described above, the plate member 40 is mainly manufactured using a ceramic material such as glass, and the first plate member 50, the center plate member 60, and the second plate, which are components thereof. In order to form various grooves in the member 70, the etching process must be performed precisely and uniformly with the accurate depth, width and width in mm or μm, but the acidity of the etching solution and the uniformity of the material of the plate member 40 are required. Since the etch is not guaranteed, inaccurate etching is often performed, resulting in a depth deviation of several tens of micrometers, resulting in a decrease in processing accuracy, thereby causing a defect in ink supply of the printhead.

That is, the first and second storage chambers 54 and 72, the first and second supply chambers 58, and the first and second flow paths 56 and 74 formed in the plate member 40 are moved. Due to the inaccurate etching portion of the ink solution, friction is not so large that precise movement is not achieved, and the ink jetting through the center hole 64 of the center plate 60 to the nozzle groove 66 is accurate. There is a problem that can not maintain the direction and spray range.

The present invention has been made to solve the above problems, and the nozzle hole for injecting ink to the nozzle forming layer and the chamber forming layer, respectively, through a mask etching process in a state in which the depth control film is not laminated between the nozzle forming layer and the chamber forming layer; Since the chamber for storing ink and the first and second incisions are etched to form a separate nozzle member having a connection part, the chamber is precisely manufactured by reducing the length variation of the nozzle member by using the difference in etching conditions, and the wear resistance to the fluid is reduced. In addition to the improvement, the connection between the first and second incisions is cut when thermally fusion bonding the detachable nozzle member to the plate member of the head, even when a tangential strain is applied due to the difference in the expansion ratio of the dissimilar materials. Compensation for variations in deformation prevents each detachable nozzle member from breaking off the plate member It is an object of to.

The configuration according to an embodiment of the present invention for achieving the above object is composed of the first outer plate member, the center plate member and the second outer plate member and is coupled to the plate member of the digital printing machine head for supplying ink A nozzle member for ejecting ink, comprising: a chamber forming layer, a depth control film, and a nozzle forming layer sequentially stacked; A plurality of nozzle holes formed to spray ink onto the nozzle forming layer by a masking etching process; A first cutout formed by etching between the nozzle holes; A chamber formed to supply ink to the chamber forming layer through the nozzle hole; A second incision formed slightly apart from the first incision between the chambers; In order to prevent the detachable nozzle member from being damaged due to the difference in expansion ratio with respect to the plate member when the heat-sealed adhesive of the separate nozzle member to the end of the plate member between the first and second cutouts. It is achieved by providing a separate nozzle member, characterized in that consisting of a connecting portion formed to be cut.

In addition, the nozzle forming layer and the chamber forming layer preferably use silicon (Si).

In addition, it is preferable to use silicon oxide (SiO 2) as the depth control film.

Then, by laminating an adhesive layer having improved adhesion to the inner and outer wall surfaces of the separate nozzle member, and subsequently forming a protective film that increases abrasion resistance, the non-hydrophilic part has a non-hydrophilic property in the front surface of the nozzle hole of the separate nozzle member. It is preferable to laminate a coating film.

According to another exemplary embodiment of the present invention, a nozzle member including a first outer plate member, a center plate member, and a second outer plate member and coupled to a plate member of a digital printing machine head for supplying ink to eject ink is provided. A chamber forming layer and a nozzle forming layer sequentially stacked; A plurality of nozzle holes formed to spray ink onto the nozzle forming layer by a masking etching process; A first cutout formed by etching between the nozzle holes; A chamber formed to supply ink to the chamber forming layer through the nozzle hole; A second incision formed slightly apart from the first incision between the chambers; In order to prevent the detachable nozzle member from being damaged due to the difference in expansion ratio with respect to the plate member when the heat-sealed adhesive of the separate nozzle member to the end of the plate member between the first and second cutouts. It is achieved by providing a separate nozzle member for adhering the plate member of the head, characterized in that it is composed of a connecting portion formed to be cut.

The nozzle forming layer is preferably made of silicon (Si).

In addition, the chamber forming layer is preferably made of silicon oxide (SiO 2).

Then, by laminating an adhesive layer having improved adhesion to the inner and outer wall surfaces of the separate nozzle member, and subsequently forming a protective film that increases abrasion resistance, the non-hydrophilic part has a non-hydrophilic property in the front surface of the nozzle hole of the separate nozzle member. It is preferable to laminate a coating film.

The manufacturing method according to an embodiment of the present invention comprises a first outer plate member, a center plate member, and a second outer plate member, which is coupled to a plate member of a digital printing machine head for supplying ink to spray ink. A method of manufacturing a nozzle member, comprising: sequentially stacking a chamber forming layer, a depth adjusting film, and a nozzle forming layer, and then stacking a first photosensitive film on the nozzle forming layer; After the step, patterning is formed on the first photoresist film using a first mask, and the first incision is formed by etching only a plurality of nozzle holes and the nozzle formation layer by etching to the nozzle formation layer and the depth control layer through an etching process through the patterning portion. Respectively forming; Removing the first photoresist film after the step, laminating a second photoresist film on the chamber forming layer, and then forming a patterning on the second photoresist film using a second mask; After the step, the chamber forming layer is etched to expose the depth control layer by an etching process through the patterning of the second photoresist layer to form a connection by etching the second cutout portion to be spaced apart from the chamber and the first cutout portion. Removing the photosensitive film to produce a separate nozzle member; After forming an adhesive layer to improve the adhesion to the inner and outer wall surface of the nozzle member, and subsequently forming a protective film to increase the wear resistance, and to laminate a non-hydrophilic coating film on the front surface of the nozzle hole of the nozzle member Steps; After the step of thermally fusion-bonding the separate nozzle member to the front portion of the plate member, the separating nozzle member is separately separated and bonded to the plate member while cutting the connection due to the difference in thermal expansion ratio. .

The chamber forming layer and the nozzle forming layer are preferably made of silicon (Si), and the depth adjusting film is made of silicon oxide (SiO 2).

The chamber forming layer is preferably thicker than the nozzle forming layer.

In addition, when the chamber, the nozzle hole, and the first and second cutouts are formed in the chamber forming layer and the nozzle forming layer by an etching process, it is preferable to proceed with dry etching.

And, it is preferable to use a part of the depth control film, the connecting portion.

The adhesive layer is preferably formed of a silicon oxide film (SiO 2), and the protective film is formed of a silicon nitride film or a silicon carbide film (SiC).

The manufacturing method according to an embodiment of the present invention comprises a first outer plate member, a center plate member, and a second outer plate member, which is coupled to a plate member of a digital printing machine head for supplying ink to spray ink. A method of manufacturing a nozzle member, comprising: sequentially stacking a chamber forming layer and a nozzle forming layer, and then laminating a first photosensitive film on the nozzle forming layer; After the step of forming a patterning on the first photoresist film using a first mask, and etching the nozzle forming layer through an etching process through the patterning portion to form a plurality of nozzle holes and first cutouts; Removing the first photoresist film after the step, laminating a second photoresist film on the chamber forming layer, and then forming a patterning on the second photoresist film using a second mask; After the step, the chamber forming layer is etched to expose the depth control layer by an etching process through the patterning of the second photoresist layer to form a connection by etching the second cutout portion to be spaced apart from the chamber and the first cutout portion. Removing the photosensitive film to produce a separate nozzle member; After forming an adhesive layer to improve the adhesion to the inner and outer wall surface of the nozzle member, and subsequently forming a protective film to increase the wear resistance, and to laminate a non-hydrophilic coating film on the front surface of the nozzle hole of the nozzle member Steps; After the step of thermally fusion-bonding the separate nozzle member to the front portion of the plate member, the separating nozzle member is separately separated and bonded to the plate member while cutting the connection due to the difference in thermal expansion ratio. .

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

3 to 13 are views sequentially showing a method of manufacturing a separate nozzle member of a head using a semiconductor process according to an embodiment of the present invention, Figure 14 is a final manufacturing state of the separate nozzle member according to another embodiment of the present invention 15 is a partial cutaway perspective view of a detachable nozzle member manufactured by a process according to an embodiment of the present invention, and FIG. 16 is a state in which the detachable nozzle member according to the present invention is adhered to a plate member of a head. 17 is a view showing a state in which the connection portion is cut while heat-sealing the detachable nozzle member to the plate member of the head according to an embodiment of the present invention.

3 to 13 of the present invention, the configuration of the separate nozzle member 100 of the head according to an embodiment, the first outer plate member 50, the center plate member 60 and the second outer side In the plate member 40 of the digital printing machine head, which is composed of the plate member 70 to supply and eject ink, the chamber forming layer 2, the depth control film 4, and the nozzle forming layer 6 are sequentially stacked. A first cutout 15 is etched between the nozzle holes 14 and the nozzle holes 14 for injecting ink into the nozzle forming layer 6 by a masking etching process, and the chamber forming layer 2 is formed. The second cutout portion 21 is etched so as to be slightly spaced apart from the first cutout portion 15 between the chamber 22 supplying ink to the nozzle hole 14 and the chamber 22. 23 to form a separate nozzle member 100, and the removable nozzle member 100 at the end of the plate member 40 When fusion bonding, the removable nozzle section 100 is due to the swelling ratio difference with respect to the plate member 40 so as to prevent the sealing region is broken it will be configured to have the connection portion 23 is cut.

The nozzle forming layer 6 and the chamber forming layer 2 are made of silicon (Si).

In addition, the depth adjusting layer 4 uses silicon oxide (SiO 2).

In addition, after the adhesive layer 24 having improved adhesive strength is laminated on the inner and outer wall surfaces of the separate nozzle member 100, and subsequently, a protective film 26 that increases abrasion resistance is laminated and formed, and then the separate nozzle member 100 is formed. The non-hydrophilic coating film 28 is laminated on the front surface of the nozzle hole 14 in the ().

And, as shown in Figure 14, the configuration of the separate nozzle member 100 according to another embodiment of the present invention, the first outer plate member 50, the center plate member 60 and the second outer plate member ( In the plate member 40 of the digital printing machine head, which is composed of 70) to supply and eject ink, the chamber forming layer 2 and the nozzle forming layer 6 are sequentially stacked and masked and etched on the nozzle forming layer 6. The first cutout 15 is etched between the plurality of nozzle holes 14 and the nozzle holes 14 through which the ink is ejected in the process, and the ink is formed by the nozzle holes 14 in the chamber forming layer 2. The second cutting portion 21 is etched so as to be slightly spaced apart from the first cutting portion 15 between the chamber 22 and the chamber 22 to supply a connection portion 23a to form a separate nozzle member 100. ), And the heat-sealing adhesion of the separate nozzle member 100 to the end of the plate member 40, the Polycyclic is the nozzle member 100, the plate member 40, the electrical connections (23a) is configured such that the cutting due to the expansion ratio difference so as to prevent the bonding portion is broken with respect to the.

The nozzle forming layer 6 is made of silicon (Si).

In addition, the chamber forming layer 2 uses silicon oxide (SiO 2).

In addition, after the adhesive layer 24 having improved adhesive strength is laminated on the inner and outer wall surfaces of the separate nozzle member 100, and subsequently, a protective film 26 that increases abrasion resistance is laminated and formed, and then the separate nozzle member 100 is formed. The non-hydrophilic coating film 28 is laminated on the front surface of the nozzle hole 14 in the ().

Hereinafter, the action and effect according to the present invention will be described in detail.

First, as shown in Figures 3 to 13, look at the process of manufacturing the nozzle member 100 of the head according to an embodiment of the present invention.

As shown in FIG. 3, the chamber forming layer 2, the depth control film 4 and the nozzle forming layer 6 are sequentially stacked, and then the first photosensitive film 8 is laminated on the nozzle forming layer 6. do.

At this time, the chamber forming layer 2 and the nozzle forming layer 6 are made of silicon (Si), and the depth control film 4 is made of silicon oxide (SiO 2).

The chamber forming layer 2 is formed thicker than the nozzle forming layer 6.

4 and 5, after the step, a patterning 12 is formed on the first photoresist film 8 using a first mask 10, and then, an etching process is performed through the patterning 12. The nozzle forming layer 6 and the depth control film 4 are etched to form a plurality of nozzle holes 14.

Then, only the nozzle forming layer 6 is etched between the nozzle holes 14 to form the first cutout 15 in a state in which the depth adjusting film 4 is exposed.

On the other hand, the reason for using silicon (Si) as the nozzle forming layer 6 in which the nozzle holes 14 are formed is that the surface is precisely etched compared to silicon oxide (SiO 2).

6 and 7, the first photoresist film 8 is removed after the step, the second photoresist film 16 is laminated on the chamber forming layer 2, and then the second mask 18 is removed. ) To form the patterning 20 on the second photosensitive film 16.

As shown in FIGS. 8 and 9, after the step, the chamber forming layer 2 is etched to expose the depth control film 4 by an etching process through the patterning 20 of the second photoresist film 16. The chamber 22 is formed.

In addition, a second cutout 21 is formed between the chambers 22 so as to be spaced apart from the first cutout 15 at a predetermined interval so that the depth adjusting film 4 is used as the connection part 23. The second photosensitive film 16 is removed to manufacture the separate nozzle member 100.

The connecting portion 23 serves to maintain the separation nozzle member 100 is not separated in the current state, it is configured to have a gap to facilitate the cutting in the subsequent bonding process.

That is, the connecting portion 23 is adjusted to various lengths with respect to the narrow part width (vertical length) of the detachable nozzle member 100 so that it is easy to be cut in a subsequent bonding process while maintaining the current state appropriately. It is formed to a suitable width to have a fixed state.

On the other hand, when the chamber 22 is etched, the depth control film 4 serves as an etch stop film to prevent the depth of the chamber 22 is unnecessary deeply etched, the chamber forming layer The etching depth of the chamber 22 in (2) is controlled to be within 1 μm in length deviation.

That is, when the etching of the chamber 22 is performed by etching equipment by adjusting the etching conditions for the silicon (Si) of the chamber forming layer (2), the moment that reaches the depth control film 4 of the silicon (SiO 2) material Since the etching conditions between the chamber forming layer 2 and the depth control film 4 are different from each other, the chamber 22 is accurately formed while the etching is stopped.

As such, in the related art, since the depth of the bottom surface of the chamber 22 is not flat due to inaccurate etching, the supply of ink is not uniform, whereas the chamber 22 of the removable nozzle member 100 of the present invention is In the case of forming, since the bottom surface of the chamber 22 prevents etching due to the depth control film 4 of different materials, the depth of the chamber 22 is precisely formed, so that the flow of ink is uniform, so that the ink spraying performance of the head is achieved. This is improved.

Meanwhile, when the chamber 22, the nozzle hole 14, and the first and second cutouts 15 and 21 are formed in the chamber forming layer 2 and the nozzle forming layer 6, respectively, by an etching process, dry etching is performed. (Dry Etch) to form. At this time, the dry etching equipment is preferably using a DRIE (Deep Reactive Ion Etcher) equipment.

11 and 12, after the separation nozzle member 100 is manufactured, the adhesive layer 24 is adhered to the inner and outer wall surfaces of the separation nozzle member 100 to improve adhesion. In addition, a protective film 26 for increasing wear resistance against a fluid (ink) may be laminated on the outer side of the adhesive layer 24.

And, as shown in FIG. 13, the ink sprayed to stack the non-hydrophilic coating film 28 on the front surface of the nozzle hole 14 of the removable nozzle member 100 of the removable nozzle member 100 Try to prevent sticking to the front part as much as possible.

The adhesive layer 24 is formed by depositing a silicon oxide film (SiO 2) by a thermal oxidation process or low pressure vapor deposition (LPCVD), and the protective film 26 includes a silicon nitride film (SixNy) such as Si 3 N 4, SiN x, or the like. ) Or silicon carbide film (SiC) is deposited.

At this time, the adhesive layer 24 and the protective film 26 are bonded to the nozzle hole 14 and the inner wall surface of the chamber 21, and the first and second cutouts for cutting the connecting portion 23. It is preferable not to adhere to the inner wall surface of (15) (21).

And, Figure 14 is a view showing the final manufacturing state of the separate nozzle member according to another embodiment of the present invention, the manufacturing process is almost the same as the case of the embodiment shown in 3 to 13, but only the chamber forming layer (2) Since the manufacturing process proceeds in a state where there is no depth control film 4 laminated between the nozzle forming layer 6 and the nozzle forming layer 6, a detailed description of the process will be omitted.

Of course, the connecting portion 23a formed by etching the chamber forming layer 2 and the nozzle forming layer 6 may remain after forming at least one of the chamber forming layer 2 and the nozzle forming layer 6 after etching. Do it.

The nozzle forming layer 6 is silicon (Si), and the chamber forming layer 2 has a difference in that a silicon oxide film (SiO 2) is used instead of silicon (Si).

On the other hand, as shown in Figure 15, a perspective view showing a portion of the removable nozzle member 100 by cutting, wherein the nozzle hole 14 is formed of a small circular hole, the chamber 22, It is formed so that ink is stored as a tetrahedral space, and each of the nozzle holes 14 and the chamber 22 is formed by the first and second cutouts 15 and 21. It is connected and configured by the connecting portion 23 in a state that can be separated one by one.

And, as shown in FIG. 16, after finally manufacturing the separate nozzle member 100, the first outer plate member 50, the center plate member 60, and the second outer plate member 70. The detachable nozzle member 100 is attached to the end of the plate member 40 of the head by heat fusion.

At this time, as shown in FIG. 17, when the detachable nozzle member 100 is thermally bonded to the plate member 40, the chamber forming layer 2 and the nozzle forming layer 6 of the detachable nozzle member 100 are bonded to each other. ) Is silicon (Si), whereas the plate member 40 is a ceramic material of silicon oxide (SiO 2), so that the deformation rate is different due to different thermal expansion coefficients, so that deformation occurs in the direction of the arrow in the drawing. As each unit member of the 100 is opened, the connecting portions 23 and 23a are opened to prevent the detachable nozzle member 100 from being broken and separated from the adhesive part in the plate member 40.

On the other hand, as the connecting portions 23 and 23a of the detachable nozzle member 100 are cut, the plurality of nozzle holes 14 and the chamber 22 of the detachable nozzle member 100 are individually plated one by one. Results in fusion to (40).

The connecting portions 23 and 23a may be formed in consideration of thickness and width so that the separate nozzle member 100 is easily cut due to the deformation force after thermal fusion while maintaining the shape before adhering to the plate member 40. It is preferable to form by etching.

In addition, the chamber 22 of the detachable nozzle member 100 is configured to appropriately adjust the size and position, etc. to be associated with the internal chambers of the plate member 40.

Therefore, as described above, when using the detachable nozzle member for bonding the plate member of the head of the present invention and a method of manufacturing the same, the nozzle is formed through a mask etching process in a state in which a depth control film is not laminated between the nozzle forming layer and the chamber forming layer. Since the nozzle hole for injecting ink, the chamber for storing ink, and the first and second incisions are etched in the forming layer and the chamber forming layer, a separate nozzle member having a connection part is formed, thereby reducing the length variation of the nozzle member by using the etching condition difference. It is possible to precisely manufacture the chamber and improve the abrasion resistance to the fluid, as well as to improve the abrasion resistance to the fluid. The connection between the first and second incisions is incised to compensate for variations in deformation so that each separate nozzle Material is very useful and effective invention to prevent the departure from the plate member is broken.

Claims (15)

A nozzle member comprising a first outer plate member, a center plate member, and a second outer plate member, coupled to a plate member of a digital printing machine head for supplying ink, for ejecting ink, A chamber forming layer, a depth control film, and a nozzle forming layer sequentially stacked; A plurality of nozzle holes formed to spray ink onto the nozzle forming layer by a masking etching process; A first cutout formed by etching between the nozzle holes; A chamber formed to supply ink to the chamber forming layer through the nozzle hole; A second incision formed slightly apart from the first incision between the chambers; In order to prevent the detachable nozzle member from being damaged due to the difference in expansion ratio with respect to the plate member when the heat-sealed adhesive of the separate nozzle member to the end of the plate member between the first and second cutouts. Separating nozzle member for bonding the plate member of the head, characterized in that consisting of the connection portion formed to be cut. 2. The detachable nozzle member according to claim 1, wherein the nozzle forming layer and the chamber forming layer use silicon (Si). 2. The detachable nozzle member according to claim 1, wherein the depth control film uses silicon oxide (SiO2). According to claim 1, wherein the adhesive layer formed to improve the adhesion to the inner, outer wall surface of the removable nozzle member; A protective film formed to continuously increase the wear resistance on the outer surface of the adhesive layer; And a coating film formed to have a non-hydrophilic property with respect to ink on the front surface of the nozzle hole of the separate nozzle member. A nozzle member comprising a first outer plate member, a center plate member, and a second outer plate member, coupled to a plate member of a digital printing machine head for supplying ink, for ejecting ink, A chamber forming layer and a nozzle forming layer sequentially stacked; A plurality of nozzle holes formed to spray ink onto the nozzle forming layer by a masking etching process;  A first cutout formed by etching between the nozzle holes; A chamber formed to supply ink to the chamber forming layer through the nozzle hole; A second incision formed slightly apart from the first incision between the chambers; In order to prevent the detachable nozzle member from being damaged due to the difference in expansion ratio with respect to the plate member when the heat-sealed adhesive of the separate nozzle member to the end of the plate member between the first and second cutouts. Separating nozzle member for bonding the plate member of the head, characterized in that consisting of the connection portion formed to be cut. 6. The detachable nozzle member according to claim 5, wherein the nozzle forming layer uses silicon (Si). 6. The detachable nozzle member according to claim 5, wherein the chamber forming layer uses silicon oxide (SiO2). The adhesive layer of claim 5, further comprising: an adhesive layer formed to improve adhesion to the inner and outer wall surfaces of the detachable nozzle member; A protective film formed to continuously increase the wear resistance on the outer surface of the adhesive layer; And a coating film formed to have a non-hydrophilic property with respect to ink on the front surface of the nozzle hole of the separate nozzle member. In the nozzle member manufacturing method which is coupled to the plate member of the digital printing machine head for supplying the ink consisting of the first outer plate member, the center plate member and the second outer plate member to eject the ink, Stacking a chamber forming layer, a depth control film and a nozzle forming layer sequentially, and then laminating a first photosensitive film on the nozzle forming layer; After the step, patterning is formed on the first photoresist film using a first mask, and the first incision is formed by etching only a plurality of nozzle holes and the nozzle formation layer by etching to the nozzle formation layer and the depth control layer through an etching process through the patterning portion. Respectively forming; Removing the first photoresist film after the step, laminating a second photoresist film on the chamber forming layer, and then forming a patterning on the second photoresist film using a second mask; After the step, the chamber forming layer is etched to expose the depth control layer by an etching process through the patterning of the second photoresist layer to form a connection by etching the second cutout portion to be spaced apart from the chamber and the first cutout portion. Removing the photosensitive film to produce a separate nozzle member; After forming an adhesive layer to improve the adhesion to the inner and outer wall surface of the nozzle member, and subsequently forming a protective film to increase the wear resistance, and to laminate a non-hydrophilic coating film on the front surface of the nozzle hole of the nozzle member Steps; After the step of thermally fusion bonding the removable nozzle member to the front portion of the plate member, the connection is cut by the connection part due to the difference in thermal expansion ratio, and the separate nozzle member is separated separately and adhered to the plate member Separating nozzle member manufacturing method for bonding the plate member of the head. 10. The method of claim 9, wherein the chamber forming layer and the nozzle forming layer use silicon (Si), and the depth control film uses silicon oxide (SiO 2). . 10. The method of claim 9, wherein the chamber forming layer is formed thicker than the nozzle forming layer. The head member of claim 9, wherein the chamber, the nozzle hole, and the first and second cutouts are formed in the chamber forming layer and the nozzle forming layer by an etching process, respectively. Method of manufacturing a detachable nozzle member for adhesion. 10. The method of claim 9, wherein the connection part uses a portion of the depth adjustment film. 10. The detachable nozzle according to claim 9, wherein the adhesive layer is formed of a silicon oxide film (SiO2), and the protective film is formed of a silicon nitride film or a silicon carbide film (SiC). Member manufacturing method. In the nozzle member manufacturing method which is coupled to the plate member of the digital printing machine head for supplying the ink consisting of the first outer plate member, the center plate member and the second outer plate member to eject the ink, Stacking a chamber forming layer and a nozzle forming layer sequentially, and then laminating a first photosensitive film on the nozzle forming layer; After the step of forming a patterning on the first photoresist film using a first mask, and etching the nozzle forming layer through an etching process through the patterning portion to form a plurality of nozzle holes and first cutouts; Removing the first photoresist film after the step, laminating a second photoresist film on the chamber forming layer, and then forming a patterning on the second photoresist film using a second mask; After the step, the chamber forming layer is etched to expose the depth control layer by an etching process through the patterning of the second photoresist layer to form a connection by etching the second cutout portion to be spaced apart from the chamber and the first cutout portion. Removing the photosensitive film to produce a separate nozzle member; After forming an adhesive layer to improve the adhesion to the inner and outer wall surface of the nozzle member, and subsequently forming a protective film to increase the wear resistance, and to laminate a non-hydrophilic coating film on the front surface of the nozzle hole of the nozzle member Steps; After the step of thermally fusion bonding the removable nozzle member to the front portion of the plate member, the connection is cut by the connection part due to the difference in thermal expansion ratio, and the separate nozzle member is separated separately and adhered to the plate member Separating nozzle member manufacturing method for bonding the plate member of the head.

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