KR100725894B1 - Pressure sensor and pressure measurement method - Google Patents

Abstract

The present invention discloses a pressure sensor and a pressure measuring method. The pressure sensor and the pressure measuring method include a pressure pad whose impedance value is changed in response to an externally applied pressure, an input signal generator for generating an input signal, and a reference signal for generating a reference signal by delaying the input signal for a predetermined time. And a pressure signal generator for delaying an input signal in response to a variable impedance value of the pressure pad to generate a pressure signal, and measuring a delay time difference of the pressure signal with respect to the reference signal, and corresponding to the measured delay time difference. And a pressure data generator for outputting pressure data having a value. Therefore, the pressure can be measured by converting the change in pressure into a change in the corresponding delay time, and the magnitude or precision of the pressure to be measured can be easily adjusted by changing the period of the applied signal. In addition, since the measured pressure can be directly output as a digital value, a separate converter is unnecessary, and it is easy to manufacture due to its simple implementation.

Description

Pressure sensor and pressure measurement method

1A to 1C are diagrams showing an example of a conventional pressure sensor according to each method.

2 is a view showing the configuration of a conventional electrical contact sensor and a human interface device using the same.

3 is a block diagram showing a configuration according to a first embodiment of a pressure sensor according to the present invention.

4 is a block diagram illustrating a first embodiment of the pressure data generator of FIG. 3.

5A to 5C are signal timing diagrams for explaining the operation of the pressure data generator of FIG.

6 is a block diagram illustrating a second embodiment of the pressure data generator of FIG. 3.

7A to 7C are signal timing diagrams for explaining the operation of the pressure data generator of FIG.

8 is a block diagram showing a configuration according to a second embodiment of a pressure sensor according to the present invention.

9 is a block diagram showing the configuration of a contact and pressure sensor incorporating a conventional contact sensor and the pressure sensor of the present invention.

10A to 10D are views showing devices in which the pressure sensor of FIGS. 3 and 8 and the contact and pressure sensors of FIG. 9 are applied.

The present invention relates to a pressure sensor, in particular to a pressure sensor for measuring the pressure by converting the change in the pressure applied from the outside to a variable delay time.

Conventional pressure sensors include mechanical pressure sensors, electric pressure sensors, and semiconductor pressure sensors.

Mechanical pressure sensors are mainly used for elasticity, such as full dome tube using elasticity of closed tube, bellows using change of pressure of gas and repulsive force of spring, and diaphragm using thin diaphragm. Etc.

Figure 1a is a view showing an example of a pulled dome tube commonly used in mechanical pressure sensors.

When the measurement pressure P is applied from the fixed end 11 opened in the pull dome tube, the tip 12 of the hermetically sealed tube is moved. Since the amount of movement of the tip is proportional to the magnitude of the pressure inside the pipe, the indication needle 13-1 of the display portion 13 connected to the end of the tip indicates the mechanically enlarged pressure.

Most electric pressure sensors convert mechanical displacements into electrical signals. Capacitives measure the displacement between capacitances between two electrodes, and force generated in proportion to the measured pressure and externally generated forces. There is an inverse balanced pressure sensor that balances the measured pressure with current and voltage.

1B is a diagram illustrating an example of a capacitance type among electric pressure sensors.

In the capacitive pressure sensor, the center is divided by the diaphragm 21, and the electrodes 22 and 23 are disposed on both sides of the diaphragm 21, respectively, and the reference pressure P1 is applied to one side, and the measured pressure to the other side. Apply (P2). The change in the measured pressure P2 relative to the reference pressure P1 changes the position of the diaphragm 21 to change the capacitances C1 and C2 applied between the two electrodes 22 and 23 and the diaphragm 21. . Therefore, the capacitive pressure sensor measures the changed capacitance to display the pressure.

The semiconductor pressure sensor has no hysteresis phenomenon, has excellent linearity, small size and light weight, and is very resistant to vibration, and has been used more and more recently because of its high sensitivity, high reliability, and excellent mass production. The semiconductor pressure sensor chemically etches single crystal silicon to form a diaphragm, converts the stress generated from the diaphragm into an electrical signal, and measures the pressure to create a resistance on the diaphragm. The piezo-resistive effect is a piezo-resistive effect measuring pressure using a piezo-resistive effect. There is a capacitive type that measures the pressure by changing the capacitance between the electrodes.

1C is a diagram illustrating an example of a piezoresistive type of a semiconductor pressure sensor.

When the resistance 33 is formed on the silicon 32 to which the reference pressure P1 is applied and the measurement pressure P2 is applied through the input unit 31 made of glass, the resistance value of the resistance 33 changes and the value is changed. Measure and display pressure.

The pressure sensors are variously applied to various home appliances such as refrigerators, air conditioners, automobile parts, general industrial devices, and semiconductor devices such as wafer adsorption pressure detection, and medical devices such as artificial heart.

However, the above-mentioned pressure sensors are not universal in terms of accuracy or magnitude of pressure, and are used according to their respective uses, and the market demands are diversified as the field of use is gradually increased, resulting in higher sensitivity and higher reliability. Research is ongoing to develop pressure sensors.

2 is a view showing an example of a conventional electrical contact sensor and a human interface device using the same.

The reference signal generator 40 generates a reference signal ref_sig.

The first signal generator 50 generates the first signal sig1 by delaying the reference signal ref_sig.

The second signal generator 60 includes a contact pad 61 to generate a second signal sig2 by delaying the reference signal ref_sig smaller than the first signal when there is no connection to the contact pad 61. When the pad 61 is in contact with the pad 61, the reference signal ref_sig is delayed more than the first signal to generate the second signal sig2.

The touch signal generator 70 receives the second signal in synchronization with the first signal, generates a touch signal con_sig, and determines whether or not the touch pad 61 is in contact with the touch pad 61.

The filter unit 80 smoothes and outputs the contact signal con_sig.

 The conventional electrical contact sensor and the human interface device using the same are disclosed in application number 10-2005-0023382 filed March 21, 2005.

Therefore, even if the conductivity is not sufficient, it is possible to accurately determine the presence or absence of the contact object having a certain charge accumulation ability.

However, the electrical contact sensor and the human interface device using the same output only a signal corresponding to ON / OFF by dividing the presence or absence of a contact with a difference in delay time, and do not output a value corresponding to the strength of the contact pressure.

It is an object of the present invention to provide a pressure sensor that outputs a value corresponding to the strength of the contacted pressure.

Another object of the present invention is to provide a pressure measuring method for achieving the above object.

Still another object of the present invention is to provide a contact and pressure sensor for simultaneously outputting a value corresponding to the presence or absence of a contact and the strength of pressure to achieve the above object.

A first aspect of the pressure sensor of the present invention for achieving the above object is a pressure pad variable in impedance value in response to a pressure applied from the outside, an input signal generator for generating an input signal, delaying the input signal for a predetermined time A reference signal generator for generating a reference signal, a pressure signal generator for generating a pressure signal by delaying an input signal in response to a variable impedance value of the pressure pad, and measuring a difference in delay time of the pressure signal with respect to the reference signal, And a pressure data generator for outputting pressure data having a value corresponding to the measured delay time difference.

A second aspect of the pressure sensor of the present invention for achieving the above object is a pressure pad variable in impedance value in response to a pressure applied from the outside, an input signal generator for generating an input signal, variable impedance value of the pressure pad Depressing the input signal in response to the pressure signal generator for generating a pressure signal, measuring the difference in the delay time of the pressure signal with respect to the input signal, and generates delay data having a value corresponding to the measured delay time difference The pressure data generator outputs the pressure data subtracted from the zero point data at the controller, and the delay data having a value corresponding to the delay time difference of the pressure signal with respect to the input signal when a command is received by the user from the outside. It is characterized in that it comprises a zero adjustment unit for receiving from the unit stored as zero data.

Pressure measurement method of the present invention for achieving the above another object is an input signal generation step for generating an input signal, a reference signal generation step for generating a reference signal by delaying the input signal for a predetermined time, the input signal to the pressure applied from the outside A pressure signal generating step of delaying in response to generating a pressure signal, and a pressure data output step of measuring pressure difference of the pressure signal with respect to the reference signal and outputting pressure data having a value corresponding to the measured delay time difference. Characterized in that.

The contact and pressure sensor of the present invention for achieving the above another object is provided with a contact portion and a pressure portion, the input signal for generating a contact and pressure pad, the input signal of the impedance value is changed in response to the contact and pressure applied from the outside Generator, a first reference signal generator for generating a first reference signal by delaying the input signal by a first delay time, a second reference signal generator for generating a second reference signal by delaying the input signal by a second delay time, contacting And a contact signal generator for delaying an input signal in response to a variable impedance value connected to the contact portion of the pressure pad to generate a contact signal, and receiving the input signal in response to a variable impedance value connected to the pressure portion of the contact and pressure pad. The pressure signal generator for delaying the pressure signal and measuring the difference in the delay time of the contact signal with respect to the first reference signal to determine the contact signal as the first reference signal. The contact data generator for generating contact data when the delay is further delayed, and the pressure data generator for outputting pressure data having a value corresponding to the measured delay time difference by measuring a delay time difference of the pressure signal with respect to the second reference signal. It is characterized by including.

Hereinafter, the pressure sensor and the pressure measuring method of the present invention will be described with reference to the accompanying drawings.

3 is a block diagram showing a configuration according to a first embodiment of the present invention.

Referring to FIG. 3, the input signal generator 140 generates an input signal input_sig with the same device as the reference signal generator 40 of FIG. 2.

The pressure pad 161 may be any kind of element having an impedance value that varies in response to a pressure applied from the outside.

The pressure signal generator 160 variably delays the input signal input_sig according to a change in the impedance value of the pressure pad 161 and outputs the pressure signal pre_sig. The pressure signal pre_sig has a short delay time when no pressure is applied to the pressure pad 161, and a longer delay time when the pressure is largely applied.

The reference signal generator 150 is configured to have a delay time equal to the time at which the input signal input_sig is delayed in the pressure signal generator 160 when no pressure is applied to the pressure pad 161. The reference signal generator 150 has an impedance value equal to the sum of the impedance value when the pressure is not applied to the pressure pad 161 and the impedance value of the pressure signal generator 160.

At this time, as the variable impedance value, any of capacitance, resistance value, and inductance may be changed, but the configuration of the reference signal generator 150 and the pressure signal generator 160 is determined according to the variable impedance. .

That is, when the variable impedance is a capacitance, the pressure signal generator 160 has a resistance for issuing an RC delay to the input signal input_sig, like the second signal generator 60 of FIG. The generator 150 includes a capacitor connected to a resistor and a ground voltage as in the first signal generator 50 of FIG. 2.

Here, the reference signal generator 150 is configured to give the reference signal ref_sig the same delay time as the pressure signal pre_sig generated by the pressure signal generator 160 when no pressure is applied to the pressure pad. do. Therefore, as an example, the resistance of the reference signal generator 150 has the same resistance value as that of the pressure signal generator 160 and the capacitor of the reference signal generator 150 is a case in which no pressure is applied to the pressure pad 161. Have the same capacitance as the capacitance.

Similarly, when the resistance value is changed by the impedance value of the pressure pad 161, the pressure signal generator 160 includes a capacitor connected to the ground voltage, and the reference signal generator 150 of the pressure signal generator 160 A capacitor having the same capacitance as the capacitor and a resistor having a resistance value equal to that in the case where no pressure is applied to the pressure pad 161 are provided.

In addition, when the inductance is varied by the impedance value of the pressure pad 161, the pressure signal generator 160 has a resistance connected to the ground voltage, and the reference signal generator 150 is the pressure signal generator 160. And a reactance having a resistance of the same resistance value as that of and an inductance such as an inductance when no pressure is applied to the pressure pad 161.

The pressure data generator 170 measures a delay time difference of the pressure signal pre_sig with respect to the reference signal ref_sig and outputs a value corresponding to the measured delay time difference as pressure data. When no pressure is applied to the pressure pad 161, since the delay time of the reference signal ref_sig and the pressure signal pre_sig is the same, the value of the pressure data is “0” and the pressure is output to the pressure pad 161. When this is applied, the impedance value of the pressure pad 161 increases, so that the delay time of the pressure signal pre_sig becomes longer, and thus a delay time difference occurs. Therefore, a value of the pressure data is greater than " 0 ".

The longer the period of the input signal (input_sig) generated by the input signal generator 140 and the greater the width of the impedance value that is variable in the pressure pad 161, the greater the pressure can be measured.

4 is a diagram illustrating a first embodiment of the pressure data generator of FIG. 3.

The sampling signal generator 171 generates a high frequency sampling signal sam_sig.

The counter 172 receives the sampling signal sam_sig and starts to count the sampling signal sam_sig when the reference signal ref_sig is applied, and ends the counting when the pressure signal pre_sig is applied. That is, the number of counted sampling signals sam_sig generated while the delay time between the reference signal ref_sig and the pressure signal pre_sig is different is output as the pressure data pre_data.

Therefore, since the delay time difference between the reference signal ref_sig and the pressure signal pre_sig is measured as the sampling signal sam_sig, the shorter the period of the sampling signal sam_sig, the more accurate measurement is possible.

The first level classifier 173 creates a level for dividing the pressure into a predetermined unit according to a signal (user_sig) applied by the user, and analyzes the pressure data (pre_data) output from the counter 172 to correspond to the level. Output level data.

For example, if the pressure data (pre_data) output from the counter 172 is binary data of 4 bits, the output value is represented by "0000" through "1111", and the first level classifier 173 has 2 bits of binary data. When the pressure data pre_data output from the counter 172 is output in the range of "0000" to "0011", the level data output from the first level classifier 173 is "00". Is output.

Similarly, when the pressure data pre_data is output in the range of "0100" to "0111", the level data output from the first level classifier 173 is output as "01", and the pressure data pre_data is " When the output is in the range of 1000 "to" 1011 ", the level data output from the first level classifier 173 is output as" 10 ", and the pressure data pre_data is in the range of" 1100 "to" 1111 ". When output as is, the level data (level data) output from the first level classifier 173 is output as "11".

5A to 5C are signal timing diagrams for explaining the operation of the pressure data generator of FIG.

Referring to FIGS. 5 and 5C with reference to FIGS. 3 and 4, in FIG. 5A, when the pressure is not applied to the pressure pad 161, the delay time of the reference signal ref_sig and the pressure signal pre_sig is the same. Do. Therefore, since there is no difference in delay time between the reference signal ref_sig and the pressure signal pre_sig, the number of sampling signals counted by the counter 172 is 0, and the counter 172 outputs "0000".

In FIG. 5B, when a predetermined pressure is applied to the pressure pad 161, the delay time of the pressure signal pre_sig is longer than the reference signal ref_sig, resulting in a difference Td of the delay time.

FIG. 5C shows the difference in the delay time generated in FIG. 5B by counting the sampling signal sam_sig of FIG. 4, starting counting at the rising edge of the reference signal ref_sig and counting the counting at the rising edge of the pressure signal pre_sig. Quit. When the counter operates on the rising edge of the sampling signal sam_sig, the second sampling signal sam_sig is counted, and the pressure data generator 70 outputs the pressure data pre_data corresponding to binary number "0010".

FIG. 6 is a diagram illustrating a second embodiment of the pressure data generator 170 of FIG. 3.

Delay unit 174 is composed of a plurality of delay elements (D1, D2, ... Dn) and receives a reference signal (ref_sig) and delays each delay element by a delay time to output a delayed reference signal (Q1, Q2, ... Qn).

The comparator 175 is composed of a plurality of comparators C1, C2, ... Cn to compare the delayed reference signals Q1, Q2, ... Qn respectively output from the delay unit with the pressure signal pre_sig. If the reference signals Q1, Q2, ... Qn delayed more than the pressure signal pre_sig are output "1", and if the reference signals Q1, Q2, ... Qn delayed than the pressure signal pre_sig are slow, respectively. Outputs "0" respectively. That is, the signal output from each of the comparators C1, C2, ... Cn is a binary code in the form of thermometer code (Thermometer code) is output as the pressure data (pre_data).

Therefore, the difference between the delay time between the reference signal ref_sig and the pressure signal pre_sig is the number of delay elements D1, D2, ... Dn and the delay time of each delay element D1, D2, ... Dn. Since the number of delay elements D1, D2, ... Dn is large and the delay time is short, more accurate measurement is possible.

The second level classifier 173 'creates a level for dividing the pressure into a predetermined unit according to a signal (user_sig) applied by the user, and the pressure in the form of a thermometer code output from the comparator 175. The data pre_data is analyzed and the corresponding level data is output.

For example, if the number of delay elements D1, D2, ... Dn of the delay unit 174 is 8, n is 8, the pressure data pre_data output from the comparison unit 175 is an 8-bit thermometer code format. Is output as binary data, and the output value is represented by "00000000" to "11111111".

When the second level classifier 173 'outputs 2-bit binary data, when the pressure data pre_data output from the comparator 175 is output in the range of "00000000" to "11000000", the second level classifier ( The level data output from 173 'is output as "00".

Similarly, when the pressure data pre_data output from the comparator 175 is output in the range of "11100000" to "11110000", the level data output from the second level classifier 173 'is output as "01". When the pressure data pre_data is output in the range of "11111000" to "11111100", the level data output from the second level classifier 173 'is output as "10", and the pressure data (pre_data). Is output in the range of "11111110" to "11111111", the level data output from the second level classifier 173 'is output as "11".

7A to 7C with reference to FIGS. 3 and 6, in FIG. 7A, when the pressure is not applied to the pressure pad 161, the delay time of the reference signal ref_sig and the pressure signal pre_sig is the same. Do. Accordingly, since the delayed reference signal Q1 passing through the first delay element D1 has a delay time lower than that of the pressure signal pre_sig, the comparator 175 outputs binary data having a thermometer code of “00000000”.

7B, when a predetermined pressure is applied to the pressure pad 161, the delay time of the pressure signal pre_sig is longer than the reference signal ref_sig, resulting in a difference Td of the delay time.

FIG. 7C illustrates the delayed reference signals Q1, Q2, ... Qn outputted through the respective delay elements D1, D2, ... Dn by applying the reference signal ref_sig of FIG. 7B to the delay unit 174. FIG. ) And the pressure signal pre_sig in each of the comparators C1, C2, ... Cn of the comparator 175, the delayed reference signal Q3 passing through the third delay element D3 is the pressure signal. appear slower than (pre_sig) Therefore, the comparator 175 outputs binary data in the form of a thermometer code of “11000000” as the pressure data pre_data.

8 is a block diagram showing a configuration according to a second embodiment of a pressure sensor according to the present invention.

In FIG. 8, the pressure pad 161, the input signal generator 140, and the pressure signal generator 160 are the same as in FIG. 3.

The pressure sensor of FIG. 8 removes the reference signal generator 150 of FIG. 3 and is further provided with a zero point data controller 280.

The zero data controller 280 receives the user's command user_com from the outside and delays the input signal input_sig and the pressure signal pre_sig in the pressure data generator 270 when the user's command user_com is applied. Delay data generated due to time difference is stored as zero data (zero_data). Subsequently, the zero point data zero_data is subtracted from the delay data generated in the pressure data generator 270 to output the pressure data pre_sig.

The pressure data generator 270 receives the pressure signal pre_sig and the input signal input_sig and generates delay data based on a delay time difference between the two signals. When the user's command user_com is applied to the zero data controller 280, the delay data is output to the zero data controller 280. In addition, if there is a zero data (zero_data) stored in the zero data controller 280 at the time of outputting the pressure data (pre_data) with a subtractor (not shown), the zero point data (zero_data) is subtracted from the delay data to decompress the pressure data (pre_data). Output

Such zero data (zero_data) generally stores the pressure data (pre_data) when the pressure is not applied to the pressure pad 161 as zero data (zero_data), but to check the weight of an object in a container, etc. In this case, the weight of the container can be set as zero_data and used for weighing the object in the container.

In addition, since the user can designate a range of levels in the first and second level classifiers 173 and 173 'illustrated in FIGS. 4 and 6, the pressure data (1) in the first and second level classifiers 173 and 173' are defined. The level classifiers 173 and 173 'may be used in place of the zero data controller 280 by designating and using a specific range of pre_data as zero data.

9 is a block diagram showing the configuration of a contact and pressure sensor incorporating a conventional contact sensor and the pressure sensor of the present invention.

The contact and pressure pad 261 is composed of a conductor at the top thereof to detect the capacitance of an object to be contacted. A pressure signal generator has a conductor connected to the ground voltage (GND) with an insulator beneath it. The conductor which transmits the value of the impedance which changes to (160), and the insulator were put in the lowest stage again. The uppermost conductor is used to detect the capacitance of the object to be contacted, but is connected to the contact signal generator 260, but is connected to the conductor and the pressure signal generator 160 connected to the ground voltage GND located below. Since the conductor has an elastic insulator in the center, the capacitance changes due to pressure, and the change in capacitance is transmitted to the pressure signal generator 160.

The input signal generator 140, the pressure signal generator 160, and the pressure data generator 170 are the same as in FIG. 3, and the second reference signal generator 150 is connected to the reference signal generator 150 of FIG. 3. same.

The first reference signal generator 250, the contact signal generator 260, and the contact data generator 290 generate contact signals with the first signal generator 50 and the second signal generator 60 of FIG. 2. It is the same as the part 70.

The contact and pressure sensor of Figure 9 can be usefully used as an electric scroll and selection device because it recognizes the pressure at the same time with a single pressure pad.

10A to 10D are views showing devices in which the pressure sensor of FIGS. 3 and 8 and the contact and pressure sensors of FIG. 9 are applied.

Figure 10a is an example of a pressure measuring device using a pressure sensor of the present invention.

The pressure sensor 310 is a pressure sensor shown in FIG. 3 or 8 and has a pressure pad whose impedance is variable in response to a pressure P applied from the outside to control pressure data pre_data corresponding to the pressure P. Output to 320.

The display unit 330 receives the display data (display_data) from the control unit 320 and outputs to the screen.

The controller 320 receives the user command user_com and converts the pressure data pre_data received from the pressure sensor 310 in a manner designated by the user, and outputs the display data display_data to the display unit 330.

For example, when the user command user_com specifies the kilogram Kg as a unit of weight, which is one of the units specified in the controller, the controller 320 displays data of the kilogram Kg corresponding to the pressure data pre_data. ) Is converted to the display unit 330 and output.

In the pressure measuring apparatus of FIG. 10A, since the pressure sensor 310 sets a unit designated by the controller, the level classifiers 173 and 173 ′ of FIGS. 4 and 6, which are the components of the pressure data generator 170 shown in FIG. 3, are omitted. .

FIG. 10B illustrates a mouse as an example of the electric scroll device using the pressure sensor shown in FIGS. 3 and 8.

The input unit 410 transmits the movement information of the mouse to the controller.

The two pressure pads 421 and 422 are disposed up and down to change the impedance value in response to the pressure applied by the user.

The control unit 420 detects a change in the movement information of the mouse and the impedance values of the two pressure pads 421 and 422 in the input unit 410 to scroll the screen of the computer connected in the direction and speed corresponding to the impedance value. To generate a signal.

The interface unit 430 converts the signal output from the controller 420 to be transmitted in a form designated by the connected computer.

Thus, the mouse implements the function of electric scroll simply as two pressure sensors in place of the conventional mechanical wheel.

10C and 10D have been applied to a portable terminal or an MP3 player as an example of implementing an electric scroll and selection device using the contact and pressure sensor of FIG.

A plurality of contact and pressure pads were arranged in a predetermined pattern for use as a scroll and selection device. That is, when the user applies pressure to the contact pad and the pressure pad at a specific position, the display screen moves or the pointer on the display screen moves, and as the pressure intensity increases, the movement speed can be increased. In addition, it can be used as a location selection device that recognizes a contact and selects a specific item displayed on the screen.

In the case of using a conventional touch sensor, a plurality of contact pads are required in each direction to detect the direction and speed at which the screen moves, but the contact and pressure pads sense pressure as well as contact, so that the contact and pressure pads may be Even if you place only one in the direction, you can detect the direction and speed of the screen movement, so the space utilization is excellent.

Although the above has been described with reference to a preferred embodiment of the present invention, those skilled in the art will be able to variously modify and change the present invention without departing from the spirit and scope of the invention described in the claims below. It will be appreciated.

Therefore, the pressure sensor and the pressure measuring device of the present invention measures the pressure by converting the change in the pressure into a change in the corresponding delay time, by measuring the period of the applied signal or by changing the delay time and the number of delay elements You can easily adjust the strength or precision of the possible pressure. In addition, the measured pressure is directly output as a digital value, so there is no need for a separate converter, so it is simple to implement, small and easy to manufacture, and strong in noise. In addition, using the contact and pressure sensor as an electric scroll and selector, navigation and volume control can be easily implemented in a small space on various portable devices. Later, power can be turned off or turned off to save power.

Claims (19)

A pressure pad whose impedance value is changed in response to a pressure applied from the outside; An input signal generator for generating an input signal; A reference signal generator for generating a reference signal by delaying the input signal for a predetermined time; A pressure signal generator for delaying the input signal to generate a pressure signal in response to a variable impedance value of the pressure pad; And And a pressure data generator for measuring a delay time difference of the pressure signal with respect to the reference signal, and outputting pressure data having a value corresponding to the measured delay time difference. The method of claim 1, wherein the impedance value of the pressure pad is Pressure sensor, characterized in that one of the capacitance, resistance, and inductive capacity. The pressure signal generator of claim 1, wherein the pressure signal of the pressure signal generator is If the pressure is not applied to the pressure pad has the same delay time as the reference signal, when the pressure is applied to the pressure pad has a longer delay time than the reference signal according to the strength of the pressure. The method of claim 1, wherein the pressure data generating unit A sampling signal generator for generating a high frequency sampling signal; And A counter for starting counting the sampling signal in response to the reference signal, ending counting of the sampling signal in response to the pressure signal, and outputting the pressure data having a value corresponding to the counted number of sampling signals; Pressure sensor characterized in that it comprises. The method of claim 1, wherein the pressure data generating unit A delay unit comprising a plurality of delay elements arranged in series and respectively delaying the reference signal by a predetermined time; And Comparing a plurality of reference signals delayed by the delay time of the delay element in the delay unit with a plurality of comparators and the pressure signal, respectively, and the delayed reference signal of the delayed phase slower than the pressure signal is transmitted of the delay element And a comparator for outputting the pressure data having a value corresponding to the number. The method of claim 4 or 5, wherein the pressure data generating unit And a level classifier for classifying the pressure in units of a number specified by the user in response to the user's input, and outputting the corresponding level of the pressure data. A pressure pad whose impedance value is changed in response to a pressure applied from the outside; An input signal generator for generating an input signal; A pressure signal generator for delaying the input signal to generate a pressure signal in response to a variable impedance value of the pressure pad; Pressure data for measuring a delay time difference of the pressure signal with respect to the input signal, generating delay data having a value corresponding to the measured delay time difference, and outputting pressure data obtained by subtracting the zero data from the delay data. Generator; And It is provided with a zero point adjustment unit for receiving a command from the outside by the user at this time and receives the delay data having a value corresponding to the delay time difference of the pressure signal for the input signal from the pressure data generating unit to store as the zero data Characterized by a pressure sensor. The method of claim 7, wherein the pressure data generating unit A sampling signal generator for generating a high frequency sampling signal; A counter for counting the sampling signal in response to the input signal and outputting delay data having a value corresponding to the number of the sampling signals counted in response to the pressure signal; And And a subtractor for outputting the pressure data by subtracting the value of the zero data stored in the zero point controller from the value of the delay data. The method of claim 7, wherein the pressure data generating unit A delay unit comprising a plurality of delay elements arranged in series and each delaying the input signal by a predetermined time; A comparator for outputting delay data having a value corresponding to the number of the delay elements that pass through the plurality of delay elements until the input signal delayed by the delay time of the delay element becomes later than the pressure signal ; And And a subtractor for outputting the pressure data by subtracting the value of the zero data stored in the zero point controller from the value of the delay signal. A contact pad and a pressure pad including a contact part and a pressure part to vary an impedance value in response to a contact and pressure applied from the outside; An input signal generator for generating an input signal; A first reference signal generator configured to delay the input signal by a first delay time to generate a first reference signal; A second reference signal generator configured to generate a second reference signal by delaying the input signal by a second delay time; A contact signal generator for delaying the input signal in response to a variable impedance value connected to the contacts of the contact pad and the pressure pad to generate a contact signal; A pressure signal generator for delaying the input signal and generating a pressure signal in response to a variable impedance value connected to the contact portion and the pressure portion of the pressure pad; A touch data generator configured to measure a difference in delay time of the touch signal with respect to the first reference signal and to generate contact data when the touch signal is delayed more than the first reference signal; And And a pressure data generator for measuring a delay time difference of the pressure signal with respect to the second reference signal and outputting pressure data having a value corresponding to the measured delay time difference. 11. The method of claim 10, wherein the contact and pressure pad is A contact portion composed of a first conductor; And A first insulator under the contact portion, a second conductor connected to a ground voltage under the first insulator, a second insulator elastic under the second conductor, and a variable under the second insulator And a pressure unit configured to transmit an impedance value to the pressure signal generator, and a pressure unit including a third insulator under the third conductor. The touch signal generator of claim 10, wherein the contact signal of the contact signal generator is The contact and the contact portion of the pressure pad has a delay time shorter than the first delay time, the contact and the pressure pad has a delay time longer than the first delay time, characterized in that the contact And pressure sensors. The pressure signal generator of claim 10, wherein the pressure signal of the pressure signal generator is The contact is characterized in that if the pressure is not applied to the pressure portion of the pressure pad has a delay time equal to the second delay time, and if the pressure is applied to the pressure pad has a delay time longer than the second delay time. Pressure sensor. An input signal generating step of generating an input signal; Generating a reference signal by delaying the input signal for a predetermined time; Generating a pressure signal by delaying the input signal in response to a pressure applied from the outside; And And a pressure data output step of measuring pressure difference of the pressure signal with respect to the reference signal and outputting pressure data having a value corresponding to the measured delay time difference. 15. The method of claim 14, wherein the pressure data output step A sampling signal generating step of generating a high frequency sampling signal; A counting step of starting counting the sampling signal in response to the reference signal and ending counting of the sampling signal in response to the pressure signal; And And a data output step of outputting the pressure data having a value corresponding to the number of the counted sampling signals. 15. The method of claim 14, wherein the pressure data output step A delay step of delaying the reference signal by a predetermined time with a plurality of delay elements arranged in series; A comparison step of comparing a plurality of reference signals delayed by the delay time of the delay element with the pressure signal in the delay step, respectively; And And a data output step of outputting the pressure data having a value corresponding to the number of the delay elements to which the delayed reference signal, which is slower in phase than the pressure signal, is transmitted. 15. The method of claim 14, wherein the pressure data output step And a level classification step of dividing the pressure in units of a number designated by the user in response to a user input, and outputting the corresponding level of the pressure data. A display unit displaying data on a screen; A pressure pad whose impedance value is changed in response to a pressure applied from the outside; An input signal generator for generating an input signal; A reference signal generator for generating a reference signal by delaying the input signal for a predetermined time; A pressure signal generator for delaying the input signal to generate a pressure signal in response to a variable impedance value of the pressure pad; A pressure data generator for measuring a delay time difference of the pressure signal with respect to the reference signal, and outputting pressure data having a value corresponding to the measured delay time difference; And And a control unit for converting the pressure data into a form designated by a user and outputting display data to the display unit. 19. The apparatus of claim 18, wherein the pressure data generator A sampling signal generator for generating a high frequency sampling signal; And A counter for starting counting the sampling signal in response to the reference signal, ending counting of the sampling signal in response to the pressure signal, and outputting the pressure data having a value corresponding to the counted number of sampling signals; A pressure measuring device comprising:

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