KR100714780B1 - Beam line with several insertions for reducing noise effect - Google Patents

Abstract

The present invention relates to a noise reduction beam line capable of solving a noise problem caused by re-reflection of diffusely reflected light generated in a process of moving light along a beam line.

The beam line of the improved structure according to the present invention is characterized in that a plurality of anti-reflective module is installed in the waveguide of the beam line to obstruct the progress of the diffusely reflected beam (light), the anti-reflective module used An opening is formed in the center of the baffle plate perpendicular to the direction of travel of the beam, and a peripheral wall contacting the inner surface of the waveguide is integrally formed along the edge of the baffle plate.

In this case, preferably, the inner surface of the opening is inclined at an angle with respect to the center line of the waveguide so that two tangents extending from each other facing each other form 90 ° or more, and are inserted after the second of the anti-reflective modules. A fitting jaw is further formed on the edge of the anti-reflection module to maintain the assembled state therebetween.

Beam line, diffuse reflection, noise, modularization, baffle tube, antireflection module

Description

Noise reduction beam line {BEAM LINE WITH SEVERAL INSERTIONS FOR REDUCING NOISE EFFECT}

1 is a model diagram showing the overall configuration of a beam line according to a first embodiment of the present invention.

2A and 2B are cross-sectional views illustrating an example of an anti-reflective module used in the beam line of FIG. 1.

3 is a model diagram showing an overall configuration of a beam line according to a second embodiment of the present invention.

4 is a cross-sectional view showing an example of an anti-reflective module used in the beam line of FIG.

[Description of Drawing Reference]

10, 11... Waveguide 20, 21... Connection member

30, 40, 50... Anti-reflective module 31, 41, 51... Opening

32, 42, 52... Baffle plate 33, 43, 53... Circumference wall

44... Fitting jaw

The present invention relates to a beam line that can solve the noise problem due to the re-reflection of the diffusely reflected light generated in the process of moving the light along the beam line. More specifically, a noise reduction beamline with a new structure that prevents diffusely reflected light from propagating in the waveguide due to energy loss, incident angle of light, or other reasons by incorporating an antireflection module into the waveguide of the beam line. It is about.

In precision physical optical devices such as ion beam incidence devices and neutral particle detectors, beam lines are used to transport light from one point to another. Generally, beams emitted from light sources or ion generating sources (light ) Is a Gaussian dispersion with a divergence angle of about 1 °, so that the light is diffusely reflected while the beam progresses along the beam line, and the light is reflected again to spread around. Therefore, in the apparatus using the light or measuring its characteristics, an error or error occurs in the measurement result due to the noise problem caused by the re-reflection of the diffusely reflected light.

In order to solve this noise problem, a baffle tube type beam line has recently been developed, which wrinkles the inner wall of the beam line so that diffusely reflected light does not proceed, but is integrated into the inner wall of the elongated beam line. It is very difficult to form a baffle (wrinkle) has a disadvantage of high defect rate and very high purchase cost.

SUMMARY OF THE INVENTION The present invention has been made to solve such a problem, and an object of the present invention is to provide a prefabricated beam line that can effectively reduce noise and precisely fabricate very thin and long beam lines as well as beam lines of various lengths. have.

The present invention has a technical feature to solve the problem of the inner wall processing of the elongated beam line, which is the most difficult part when manufacturing a conventional baffle tube type beam line, baffle to suppress the rereflection of diffusely reflected light as efficiently as possible to implement this It is valued to make a structure (anti-reflective module) and modularize it with various waveguides into various specifications so that beam lines of various specifications can be easily manufactured.

The noise reduction beam line of the present invention for solving the above problems is a re-reflection prevention module for suppressing the re-reflection of the diffusely reflected beam (light) in the beam line is equipped with connecting members at both ends of the waveguide in the waveguide It is characterized in that it is inserted continuously. Claim 1 The number of antireflection modules to be inserted may be determined by the length of the beam line and the height of the antireflection module.

In the present invention, as shown in the accompanying drawings, the anti-reflective module has a container shape in which an upper portion is opened and a hole (hereinafter, 'opening') is formed in the center of a lower surface (hereinafter, 'baffle plate'). That is, the anti-reflective module according to the present invention has an opening formed at the center of the baffle plate which is placed in a direction perpendicular to the direction of travel of the beam when installed and is in contact with the inner surface of the waveguide along the edge of the baffle plate. The walls are formed. (Claim 2)

The size of the anti-reflective module, that is, the height of the circumferential wall, the diameter of the circle formed by the circumferential wall, the diameter of the opening (= length of the baffle), etc. are not limited. In theory, however, the outer diameter of the circumferential wall should be the same as the inner diameter of the waveguide, and the height of the circumferential wall should be 0.5 to 2 times the outer diameter of the circumferential wall, and the diameter of the opening should be 0.2 to 0.8 times the outer diameter of the circumferential wall.

On the other hand, the opening formed in the baffle plate to prevent re-reflection of the diffusely reflected beam is to be formed to be inclined rather than vertical. That is, the opening is formed by inclining upward or downward with respect to the vertical plane by a predetermined angle. The inclination, i.e., the two tangents (virtual lines) extending from the inner surface of the opening, intersect each other-more preferably, so that the two tangents are at an angle of 90 degrees or more-the inclined surface is obliquely processed. (Claim 4)

The antireflection module according to the present invention is inserted into the waveguide continuously. Therefore, it is also possible to form a fitting jaw at the connection portion where the baffle plate and the circumferential wall are connected so that the upper and lower portions of the continuous antireflection module can be closely connected. (Claim 3)

On the other hand, when the anti-reflection module is continuously inserted into the waveguide, it is preferable that the anti-reflection module and the waveguide are tightly coupled. For this purpose, the outer wall of the circumferential wall and the inner surface of the waveguide of each anti-reflective module may be fixed by coupling means (for example, adhesive, thread / dead bone, uneven groove, etc.), and the circumference of the end module only at both ends of the waveguide. The outer surface of the wall and the inner surface of the waveguide may be fixed by the coupling means. (Claim 5 and claim 6)

In the case where the length of the waveguide and the length of the plurality of modules do not match, it is only natural that the peripheral wall of one module can be removed horizontally (that is, by lowering the height of the peripheral wall).

The waveguides may be connected in series as necessary. In general, since the waveguide through which light travels is a vacuum inside, the waveguide connection should be airtight and secure. Therefore, any connection means could be applied as long as it could be connected confidentially and securely. In the following examples and drawings, a standard vacuum flange (KF NW40 type flange), which is standardized, is used as an example of the connecting means.

According to this structure, the neighboring anti-reflective modules are coupled to each other like a lego block by a fitting jaw or a coupling pair structure (coupling means), so that they do not leave the seat at a predetermined position, and are inclined at an oblique opening. As a result, the surface (reflection surface) lying horizontally in the traveling direction of the beam (light) is minimized, thereby suppressing re-reflection of diffusely reflected light.

Hereinafter, a noise reduction beam line according to an exemplary embodiment of the present invention will be described with reference to the accompanying drawings.

Example 1

1 and 2A to 2B are enlarged views of the entire structure and the anti-reflection prevention module of the noise reduction beam line according to the first embodiment of the present invention, which is applied to the charge exchange neutral particle detector of the Hanbit plasma apparatus. It is shown.

In the drawing, a beam line in which a vacuum is maintained inside is KF NW40 type connecting member 20, 21, which is a type of standard vacuum flange standard at both ends of the waveguide 10 so as to be easily used commercially. Is equipped.

Inside the waveguide 10, a plurality of antireflection modules 30 and 40 including baffle plates 32 and 42 and circumferential walls 33 and 43 are inserted into the waveguide 10. Only the anti-reflective module 30 positioned at both ends is fixed to the inner surface of the waveguide, and most of the anti-reflective module 40 sandwiched therebetween is fitted with fitting jaws 44 of other adjacent anti-reflective modules. The position is fixed by.

Therefore, when the beam (light) is incident in the direction of the arrow of FIG. 1, the light traveling straight into the openings 31 and 41 is transported to the target position, but the light or the diffusely reflected light (beam) tends to spread outward from the inside of the opening, Light incident on the baffle plate is interrupted by the baffle plate and minimizes re-reflection, thereby reducing energy and eventually disappearing, thereby reducing noise.

Example 2

3 and 4 illustrate a noise reduction beam line and an anti-reflective module according to a second embodiment of the present invention.

As shown in the figure, a thread is formed on the circumferential wall 53 of the antireflection module 50 fitted to both ends of the waveguide 11, and a corresponding thread groove is formed on the inner surface side of the waveguide. Other things are the same as that of Example 1, and since action and effect are the same, the detailed description is abbreviate | omitted. Further, in the present embodiment, reference numeral 51, which is not described, denotes an opening and 52 denotes a baffle plate.

As described above, since the beam line according to the present invention can be manufactured in various ways by arbitrarily adjusting the size of the anti-reflection module according to the length or thickness of the waveguide, even the very thin and long beam line can be manufactured efficiently with high precision.

In addition, since the re-reflection of the diffusely reflected light is minimized by the baffle plate, the light traveling straight inside the waveguide is transported as it is to the target position through the opening formed in the center of the baffle plate, thereby eliminating the conventional problem due to noise.

Therefore, the noise reduction beam line proposed in the present invention may be an item generating new demand in the existing optical component market.

Claims (6)

In the beam line in which the connecting member is mounted at both ends of the waveguide, The anti-reflection module for suppressing the re-reflection of the diffusely reflected beam (light) is inserted into the waveguide, The anti-reflection module An opening through which the beam passes is formed in the center of the baffle plate perpendicular to the direction of travel of the beam, and a circumferential wall along the edge of the baffle plate is formed along the edge of the waveguide when inserted into the waveguide. Become; The inner surface of the opening formed in the center of the baffle plate of the anti-reflective module Noise reduction beam line, characterized in that formed to be inclined obliquely to the center line of the waveguide so that the two tangents extending from the point facing each other. delete The method of claim 1, At the connection portion where the baffle plate and the circumferential wall of the anti-reflective module are connected, Noise reduction beam line, characterized in that the fitting jaw is formed. delete The method according to any one of claims 1 to 3, On the inner surface of the waveguide and the circumferential wall of the anti-reflective module located at both ends of the waveguide, Noise reduction beam line, characterized in that any one of the coupling pair structure is formed. The method of claim 5, The coupling pair structure is a noise reduction beam line, characterized in that the thread and the screw groove.

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