KR100706458B1 - Fine powder spraying device - Google Patents

Abstract

The present invention provides a fine powder dispersing device capable of dispersing fine powder such as a liquid crystal spacer on a large sized to-be-dispersed object without enlarging the device and without generating a falling object on the to-be-dispersed object. For the purpose of In order to achieve the above object, the dispersion device of fine powder according to the present invention is disposed at a predetermined interval away from the scattered object, and the spray nozzle tube discharging the fine powder from the tip thereof together with the air flow of the gas body with respect to the scattered body, A fine powder dispersing device comprising: a movement control means for moving the scattered object and the scatter nozzle tube in a relatively three-dimensional manner; a support part of the scatter nozzle tube controlled by the movement control means and a support part of the scattered object; The scattering nozzle tube is characterized in that it is provided outside the projection surface on the vertically upper side of the scattered object. On the other hand, it is preferable that the object to be distributed is configured to rotate at a predetermined rotational speed by the support portion.

Description

Fine powder scattering device {FINE POWDER SPRAYING DEVICE}

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to the technical field of a fine powder dispersing apparatus which discharges fine powder together with a gas stream of a gas nozzle from a scatter nozzle tube, and distributes fine powder onto a scattered object such as a substrate.

As the above-mentioned fine powder spreading device, a liquid crystal which is a fine powder having a uniform particle diameter between a liquid crystal substrate constituting a liquid crystal display panel used for a liquid crystal display device or the like, for example, between a glass plate and a glass plate or a plastic substrate. BACKGROUND ART A liquid crystal spacer spreading device that uniformly distributes a spacer (spacer beads) for a single layer and by a predetermined amount is known as a representative example.

In liquid crystal display panels, such as liquid crystal display devices, between the glass plate and glass plate which comprise a liquid crystal substrate, or between the board | substrates of plastics (organic glass system etc.) other than glass plate, or between this plastic board | substrate and a glass plate (henceforth a glass plate) In order to form a gap in which a liquid crystal is injected into a glass substrate composed of a glass plate and a glass plate), 1 mm ² of particles having a uniform diameter (spacer beads) having a particle diameter of several μm to several tens of μm are used as spacers. About 10-2000 pieces are distributed as uniformly as possible as possible. On the other hand, various plastic particles and silica particles are used as the liquid crystal spacer.

The above-mentioned liquid crystal spacer spreading device is known as a device for uniformly spreading a liquid crystal spacer in a single layer on a glass plate serving as a liquid crystal substrate and by a predetermined amount. As a liquid crystal spacer spreading device, for example, a device using gaseous gas such as air or nitrogen gas, which is disclosed in Japanese Patent Laid-Open No. 11-276941, is known.

The liquid crystal spacer spreading device is configured to load a fine liquid crystal spacer into an air stream of a gas body such as air or nitrogen gas, transport the inside of a thin pipe (transport tube), and move the liquid crystal spacer together with airflow from the oscillating spray nozzle tube. It is scattered on the glass substrate by releasing the particles.

However, as mentioned above, since the liquid crystal spacer is a fine powder having a particle diameter of several micrometers to several tens of micrometers, it is easy to float, and since the particle | grains of a liquid crystal spacer are particle | grains made from various plastics, or a silica particle, it is charged. It is easy to do it, and it is difficult to distribute it on a glass substrate with good reproducibility with a fixed density. Therefore, the particles of the liquid crystal spacer are usually charged according to the charging polarity (electrostatic polarity), and the glass substrate and the base (table) are grounded (earthed), and the liquid crystal is used on the glass substrate. It is possible to reliably scatter particles of the spacer at a constant density.

By the way, in recent years, while the liquid crystal display panel is gradually enlarged, many liquid crystal display panels are manufactured with one glass substrate, and it is calculated | required to spread | distribute a liquid crystal spacer to a wider range. In order to cope with this, it is necessary to make the mounting base (expectation) of a glass substrate large, to raise the dispersion chamber (chamber) height, or to increase the swing angle required for the dispersion nozzle tube which distributes the liquid crystal spacer.

Here, if the mounting base (expectation) of the glass substrate is made large and the height of the dispersion chamber (chamber) is increased, the dispersing device itself also becomes large, but the ceiling height of the clean room in which the liquid crystal spacers are scattered is formed. Because of this limitation, it is necessary to design the ceiling height of the clean room particularly high, which causes a problem of an increase in cost. In particular, when an enlargement of a glass substrate advances and it becomes about 1300 mm x 1300 mm, there exists a problem that the conventional dispersion | distribution system will not enter the clean room of a present situation.

In addition, about the point of increasing the swing angle required for the dispersion nozzle tube which distributes the liquid crystal spacer, since the conventional dispersion method of the dispersion nozzle tube is implement | achieved by a crank or an eccentric cam, a dispersion nozzle tube is fixed. Rather than moving at speed, there was a problem that the moving speed fluctuated greatly at both ends.

The liquid crystal spacer spreading apparatus disclosed in Japanese Patent Laid-Open No. 11-276941 described above is an apparatus developed to meet such a demand. That is, in the liquid crystal spacer spreading apparatus disclosed in Japanese Patent Application Laid-Open No. 11-276941, two scattering nozzle tubes arranged at predetermined intervals can be inclined in either of two plane directions perpendicular to each other. By supporting two swing mechanisms and synthesizing the swings by the two swing mechanisms described above, the swing angle of the spray nozzle tube is increased more than before without increasing the distance between the spray nozzle tube and the target body. I'm smoothing the motion.

[Initiation of invention]

According to the liquid crystal spacer spreading apparatus disclosed in Japanese Patent Laid-Open No. 11-276941, the swing angle of the spray nozzle tube is increased more than before, without increasing the distance between the spray nozzle tube and the target body. The effect of smoothing the operation can be obtained, but other problems have also been pointed out in this apparatus.

The problem is common to the conventional liquid crystal spacer spreading apparatus including the liquid crystal spacer spreading apparatus disclosed in Japanese Patent Laid-Open No. 11-276941, wherein a part of the particles ejected from the spray nozzle tube are spray nozzles. When it adheres to the particle ejection port of a tube and this deposit collects to some extent, it falls on a to-be-cold object for some reason (for example, a vibration of an apparatus, etc.), and the uniformity of dispersion of the liquid crystal spacer particle on a to-be-cold object is carried out. It is said to hurt.

The problem is that the basic configuration of a conventional liquid crystal spacer spreading apparatus including the liquid crystal spacer spreading apparatus disclosed in Japanese Patent Laid-Open No. 11-276941 is uniform in dispersion of liquid crystal spacer particles on a scattered object. The reason for this was that the constitution of dispersing the liquid crystal spacer particles using a scatter nozzle tube from the upper side of the flat scattered object in order to improve the efficiency was caused.

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and an object thereof is to solve the problems in the prior art, to not increase the size of the apparatus, and to prevent a falling object from being formed on the object. An object of the present invention is to provide a fine powder dispersing apparatus capable of dispersing fine powder such as a liquid crystal spacer.

In order to achieve the above object, there is provided a scattering apparatus of fine powder according to the present invention, wherein the scattering nozzle tube is disposed at a predetermined interval away from the scattered body, and discharges the fine powder from the tip thereof together with the air flow of the gas body with respect to the scattered body. A dispersion of fine powder having a support part of the spray nozzle tube controlled by the movement control means and a support part of the scattered object controlled by the movement control means; The apparatus is characterized in that the dispersion nozzle tube is provided outside the projection surface on the vertically upper side of the workpiece.

More specifically, the apparatus for dispersing fine powder according to the present invention is provided with a spray nozzle tube disposed at a predetermined interval apart from the target object and discharging the fine powder from the distal end thereof together with the airflow of the gas body with respect to the target object. A fine powder dispersing apparatus comprising a support portion of the scatter nozzle tube for supporting the discharging direction of the fine powder from the scatter nozzle tube through a direction control means capable of three-dimensionally controlling the dispersing nozzle, It is characterized in that it is provided outside the projection surface to the vertically upper part of the object.

Here, when the said to-be-dispersed object is arrange | positioned substantially horizontally with the said to-be-dispersed surface upwards, and the said scatter nozzle tube is arrange | positioned at the position higher than the said to-be-dispersed surface outside the projection surface to the vertically upper direction of the said to-be-dispersed object, The scattered object is disposed in an inclined state with its scattered surface upward, and the scattered nozzle tube is disposed at a position higher than the scattered surface outside the projection surface vertically upward of the scattered object. When the sieve is disposed substantially vertically with the scattered surface as the scattering nozzle side, and the scattering nozzle tube is disposed outside the projection surface above the vertical position of the scattered object, the scattered surface faces the scattered surface downward. It is arrange | positioned substantially horizontally, and the said dispersing nozzle tube is opposite to the projection surface to the vertical upper part of the to-be-dispersed object. When placed on the surface, the scattered object is disposed in an inclined state with its scattered surface downward, and the scattered nozzle tube is disposed on a surface opposite to the projection surface on the vertically upward side of the scattered object. It is possible to configure the case.

In addition, in the dispersion apparatus of fine powder according to the present invention, the dispersion nozzle tube is fixed to the attachment position outside the projection surface on the vertical upper side of the scattered object, and the surface of the scattered object is arranged substantially horizontally. It is characterized in that it is configured to disperse the fine powder in two dimensions.

In addition, the apparatus for dispersing fine powder according to the present invention is configured such that the dispersing nozzle tube can be moved in one dimension at an attachment position outside the projection surface of the scattered object, and a predetermined amount is determined during this one-dimensional movement. It stops at a position, and it is comprised so that the said fine powder may be distributed two-dimensionally with respect to the surface of the said to-be-dispersed body arrange | positioned substantially horizontally at this stop position.

In addition, the apparatus for dispersing fine powder according to the present invention is configured such that the dispersion nozzle tube is capable of intermittently moving in one dimension at a predetermined pitch at an attachment position outside the projection surface of the workpiece. The fine powder is placed in a direction orthogonal to the moving direction of the scatter nozzle tube with respect to the surface of the scattered object that is disposed substantially horizontally at the stop position, and stops at a predetermined position in the course of. It is characterized in that it is configured to be distributed in dimension.

In addition, in the dispersion apparatus of fine powder according to the present invention, the two-dimensional dispersion of the fine powder at the stop position of the dispersion nozzle tube is provided in proximity to the fine powder discharge opening of the dispersion nozzle tube. By air flow supply means from at least two directions. In addition to the air flow supply means, the spray nozzle pipe has a direction changing means in a plane orthogonal to the moving direction of the spray nozzle pipe.

In addition, in the dispersion device of fine powder according to the present invention, it is also possible to arrange the scatter nozzle tube in two substantially perpendicular planes facing the outside of the projection surface of the scattered object. Here, the dispersion nozzle tubes arranged in the two opposing substantially perpendicular planes may alternately disperse the fine powder, or may sequentially distribute the fine powder.

In addition, another fine powder dispersing apparatus according to the present invention is provided with a spray nozzle tube disposed at a predetermined interval away from the diffused object and discharging the fine powder from the distal end thereof together with the airflow of the gas body with respect to the diffused object, and the spray nozzle. A fine powder dispersing device having a support portion of the spray nozzle tube for supporting a discharge direction of the fine powder from a tube through a two-dimensionally controllable direction control means, wherein the scatter nozzle tube is a vertical of the scattered object. It is provided outside the projection surface to the upper side, and the said to-be-absorbed body is comprised so that it may be comprised so that it may rotate by a predetermined rotational speed.

Here, when the said to-be-dispersed object is arrange | positioned substantially horizontally with the said to-be-dispersed surface upward, and the said scatter nozzle tube is arrange | positioned in the position higher than the said to-be-dispersed surface outside the projection surface to the vertically upper direction of the said to-be-dispersed object, When the scattered object is disposed in an inclined state with its scattered surface upward, and the scattered nozzle tube is disposed at a position higher than the scattered surface outside the projection surface of the vertically upper part of the scattered object, the scattered body is The scattered surface is disposed substantially vertically with the scattered nozzle tube side, and the scattered nozzle tube is arranged outside the projected surface above the vertical position of the scattered object.

BRIEF DESCRIPTION OF THE DRAWINGS It is sectional drawing which shows schematic structure of the fine powder dispersion apparatus which concerns on one Embodiment of this invention.

FIG. 2 is a detailed view of the direction control mechanism 18B used in the apparatus shown in FIG. 1, wherein (a) is a side view and (b) is a top view.

3 (a) and 3 (b) are diagrams showing examples of particle scattering in the apparatus shown in FIG. 1.

4 is a top view showing a schematic configuration of a fine powder spreading apparatus according to another embodiment of the present invention.

FIG. 5: is a top view which shows schematic structure of the fine powder dispersion apparatus which concerns on embodiment shown in FIG.

6 is a cross-sectional view (No. 1) showing a schematic configuration of a fine powder dispersing device according to still another embodiment of the present invention.

FIG. 7: is sectional drawing (the 2) which shows schematic structure of the fine powder dispersion apparatus which concerns on other embodiment of this invention.

8 is a cross-sectional view (No. 3) showing a schematic configuration of a fine powder dispersing device according to still another embodiment of the present invention.

9 is a cross-sectional view (No. 4) showing a schematic configuration of a fine powder dispersing device according to still another embodiment of the present invention.

FIG. 10: is sectional drawing (the 5) which shows schematic structure of the fine powder dispersion apparatus which concerns on other embodiment of this invention.

FIG. 11 is a side view showing a configuration example of an angle control mechanism of a dispersion nozzle tube in a dispersion device for fine powder according to still another embodiment of the present invention. FIG.

FIG. 12 is a view for explaining the function of the control device in the fine particle dispersion device according to the embodiment of the present invention. FIG.

It is sectional drawing which shows schematic structure of the fine powder dispersion apparatus which concerns on other embodiment of this invention.

FIG. 14: is a schematic top view of the apparatus shown in FIG.

Best Mode for Implementation of the Invention

EMBODIMENT OF THE INVENTION Based on drawing attached below, embodiment of this invention is described in detail.

FIG. 1: is sectional drawing which shows schematic structure of the fine powder dispersion apparatus 10 which concerns on one Embodiment of this invention. The fine powder spreading apparatus 10 according to the present embodiment is usually installed in a clean room (not shown). That is, in the fine powder spreading device 10 according to the present embodiment, the glass substrate 16, which is a scattering body, is placed on the base 14 disposed below the sealed chamber 12, and is fixed by positioning. . The base 14 and the glass substrate 16 placed thereon are grounded (earth) or charged with a voltage opposite to that of the charged fine powder, and the particles 20 of the liquid crystal spacer which is the charged fine powder are grounded. It is made to attach reliably to the made glass substrate 16. FIG.

In a conventional general fine powder dispersing apparatus, a scatter nozzle tube 18 that scatters particles 20 (hereinafter, also simply referred to as particles 20) of a liquid crystal spacer is disposed above the base 14 vertically. Although the dispersion | distribution apparatus 10 of the fine powder which concerns on this embodiment was made, as for the dispersion nozzle tube 18, the fall object from the dispersion nozzle tube 18 itself is expected 14 (as mentioned later, In order to prevent it from falling on the glass substrate 16}, it is arrange | positioned so that it may be located outside the projection surface of the base 14.

That is, in the dispersion apparatus 10 of the fine powder which concerns on this embodiment, the dispersion nozzle tube 18 is arrange | positioned outside the projection surface (shown by the dashed-dotted line 16a in FIG. 1) of the glass substrate 16. In FIG. It is. Here, the outside of the projection surface of the glass substrate 16 means that the particle 20 adhering to the particle discharge port 18a of the dispersion nozzle tube 18 is slightly dropped in the direction during the fall when the particle 20 adheres to the particle discharge port 18a. Even if it is changed, it is preferable that it is a position (specifically, the position separated 50 mm or more from the edge part of the glass substrate 16) so that it may fall on the glass substrate 16.

In the fine powder spreading device 10 according to the embodiment shown in FIG. 1, the dispersion nozzle pipe 18 is arranged to be movable in a direction perpendicular to the ground along the vertical wall surface of the chamber 12. The drive mechanism is configured to stop at a desired position. There is no restriction | limiting in particular in the moving mechanism of the spray nozzle pipe 18 used here, It is possible to use various methods, such as the method of moving the slider block 18A which moves on the guide rail 30 through a ball screw ( 5).

In the slider block 18A described above, in addition to the spray nozzle tube 18, the arrival direction of the air flow including the particles 20 discharged from the spray nozzle tube 18, that is, the spray direction of the particles 20, is controlled. A spray nozzle tube direction control mechanism section (hereinafter, abbreviated to the direction control mechanism section) 18B is provided. 2 (a) and 2 (b) show this direction control mechanism part 18B in detail.

As shown in FIG. 2, the direction control mechanism 18B discharges airflow from the substantially vertical upper portion of the spray nozzle tube 18 toward the particle discharge port 18a of the spray nozzle tube 18. (2) (refer FIG. 2 (a)) and two 2nd gas discharge pipes 22a and 22b which were provided in the surface which goes directly to the said airflow discharge pipe 24 of the dispersion nozzle pipe 18 (FIG. 2 ( b)). In addition, although the said 2nd gas discharge pipes 22a and 22b are provided in the 45 degree direction each left and right with respect to the dispersion nozzle pipe 18, this is an example and is not limited to this.

The spray nozzle tube 18 itself is supplied at a predetermined flow rate from a supply device of the particle 20 of the liquid crystal spacer (not shown, for example, Disper-μR (trade name) manufactured by Nisshin Engineering Co., Ltd.). It has a function of taking in particles 20 to be used together with an inert gas (for example, nitrogen gas adjusted to a low dew point) and discharging them in a predetermined direction. It is done by the installed control unit.

The gas discharge pipes 22a, 22b, and 24 described above control the discharge direction and dispersion of the air flow including the particles 20 discharged from the spray nozzle pipe 18, and the upper first gas discharge pipe ( 24 controls the discharge direction of the air stream including the particles 20 discharged from the spray nozzle tube 18, and distributes to a target position according to the distance between the discharge position and the dispersion position.

In addition, the two gas discharge pipes 22a and 22b provided on the left and right sides of the spray nozzle pipe 18 control the dispersion of air flow including the particles 20 discharged from the spray nozzle pipe 18. By controlling the degree of dispersion in accordance with the distance between one discharge position and the dispersion position, an appropriate dispersion range is set.

Here, about the control of the discharge direction of air stream, or the control of dispersion of air stream, it experiments previously and the spray nozzle pipe 18 with respect to the gas supply amount to these gas discharge pipes 22a, 22b, and 24 is performed. It is preferable to take data such as a change in the discharge direction of the air stream discharged from the air or a change in the dispersed state, and to have the control amount determined based on them in the form of a control table or the like in the above-described control device.

The dispersion apparatus 10 of fine powder which concerns on this embodiment comprised as mentioned above operates roughly as follows.

Particles 20 of the liquid crystal spacer are dispersed from the spray nozzle tube 18 on the spray nozzle tube holding block 18A placed on the base 14 and stopped at a predetermined position toward the grounded glass substrate 16. The air stream included is discharged (discharged), and the particles 20 are dispersed at predetermined positions on the glass substrate 16.

Here, since the area on the glass substrate 16 which can distribute the particle 20 uniformly from the spray nozzle tube 18 stopped at a certain position is limited, dispersion | distribution with respect to the large glass substrate 16 is carried out. In the case of carrying out, it is necessary to move the position of the dispersion nozzle tube 18 or control the dispersion of the dispersion nozzle tube 18 according to the dispersion target position to perform a uniform dispersion. There is.

3 shows an example thereof.

As shown in Fig. 3 (a), the dispersion nozzle tube 18 stopped at a certain position is used. First, after the particles 20 are scattered with respect to the distant "region 1," the above-mentioned first By supplying a gas having a predetermined flow rate to the gas discharge tube 24, the discharging direction of the dispersion nozzle tube 18 is changed to the vicinity, and the dispersal is performed on the “region 2” near the vicinity. As described above, the control of the supply flow rate to the gas discharge pipe 24 is performed by the control device.

In addition, the control of the dispersion | distribution of the particle | grains 20 by the above-mentioned 2nd gas discharge tube 22a, 22b needs to adjust a dispersion angle according to the distance from the dispersion nozzle tube 18 to the glass substrate 16, ie, In the point where the distance from the dispersion nozzle tube 18 on the glass substrate 16 is far, it is necessary to make the dispersion angle small and to increase the dispersion angle as the distance approaches, so as to synchronize the movement of the dispersion position. The scattering area is controlled to form a scattering area in the width direction of the particles 20.

In the fine powder spreading device 10 according to the present embodiment, when the scattering of the particles 20 using the dispersion nozzle pipe 18 stopped at a certain position is finished, the control device has described the dispersion nozzle pipe 18 described above. ) Is moved to move the position of the spray nozzle tube 18 to the next predetermined position. This position is preset.

At this new position, spreading over the far and near regions is performed by the above-described operation.

When the spreading operation while moving the spreading position as described above proceeds to the end of the glass substrate 16 in sequence, and the spreading to one glass substrate 16 is finished, the control device drives the moving mechanism. The position of the dispersion nozzle tube 18 is returned to the initial position, and the air is prepared for the next dispersion operation.

On the other hand, the board | substrate 16 which spread | dispersed was completed in the said order is taken out from the chamber 12, and is passed to a measurement part, and the measurement (evaluation) with respect to the predetermined measurement location on the board | substrate 16 is performed here. This evaluation consists of the method of measuring the scattering density of the particle | grains 20 in the predetermined measurement location (for example, 100 points) on the board | substrate 16. As shown in FIG. Moreover, based on this, calculation of the adhesion efficiency (adhesion amount / dispersion amount) of particle | grains is also made.

As a result of this evaluation, if a significant dispersion of the dispersion is found, the treatment is performed to adjust the amount of dispersion to the point, and the dispersion is performed again, and the results are judged to determine the validity of the treatment. do. Examples of the procedure for adjusting the dispersion amount include the above-described check of the particle discharge direction of the dispersion nozzle tube 18, adjustment of the discharge amount of the air flow from the gas discharge tube based on the check of the dispersion of the particles. . When the nonuniformity of attachment can be eliminated by this, the condition is made into the new control data and stored in the control apparatus.

In addition, although description was abbreviate | omitted in the said description, it puts on the base 14 of the glass substrate 16 (set), and this after exhaustion of the exhaust in the chamber 12 and the completion | finish of dispersion | distribution in synchronization with the start of dispersion of the particle | grains 20 is carried out. Operations such as stopping the exhaust and removing from the base 14 of the glass substrate 16 where the dispersion is completed may be substantially unchanged from the conventional operation.

In the description of the above embodiment, the spray nozzle tube 18 is a direction perpendicular to the ground along the vertical wall surface of the chamber 12 via the slider block 18A (arrow a direction in FIG. 5). Although the present invention is not limited thereto, for example, the spray nozzle pipe 18 is a vertical wall surface of the chamber 12. However, the present invention is not limited thereto. It may be fixed to the predetermined position of (refer FIG. 4).

In this case, on the slider block 18A holding the dispersion nozzle tube 18, at a predetermined interval from the scattered object shown in the liquid crystal spacer spreading apparatus disclosed in Japanese Patent Laid-Open No. 11-276941 described above. The oscillating mechanism of the scatter nozzle tube, wherein the scatter nozzle tube arranged is supported by two oscillating mechanisms which can be inclined in either of two plane directions perpendicular to each other, and the oscillation by the two oscillating mechanisms described above is synthesized. It is preferred to have a.

In addition, various configurations shown in Figs. 6 to 10 are possible for the fine powder spreading apparatus according to the present invention.

That is, in the example shown in FIG. 6, with respect to the substrate arrangement similar to the arrangement shown in FIG. 1, the scatter nozzle tubes 18 are disposed opposite to each other, and the uniformity of the dispersion situation of the particles 20 can be improved. I'm doing it.

In addition, in the example shown to FIG. 7 and FIG. 8, the arrangement | positioning angle of the glass substrate 16 was changed, and the fall nozzle from the dispersion nozzle tube 18 is made to correspond to the board | substrate arrangement | positioning state, and the board | substrate 16 is there. The position which does not fall on a phase is selected and arrange | positioned. When such a substrate arrangement is employed, in particular, in the example shown in FIG. 7, a secondary effect of reducing the bottom area of the dispersion chamber 12 can be obtained.

In addition, in the example shown to FIG. 9 and FIG. 10, the example which has arrange | positioned the glass substrate 16 toward the lower side (to the inclined lower side) is shown, and the particle | grains 20 which are scattered are lowered (to the inclined lower side). The configuration supplied from this is adopted. In this case, since there is no possibility that the solidification body of the particle | grains 20, etc. fall on the board | substrate 16, the concern about this problem disappears completely.

In addition, although the position (angle with respect to the glass substrate 16) of the dispersion nozzle tube 18 on the slider block 18A is comprised constant in each above-mentioned embodiment, this invention is limited to this. Instead, the angle changing mechanism of the spray nozzle pipe 18 may be provided. The mechanism may be a manual operation system, but may be provided with an angle changing mechanism of the mechanical spray nozzle tube 18, for example, shown in FIG.

The angle change mechanism of the spray nozzle tube 18 shown in FIG. 11 fixes the spray nozzle tube 18 to the arc-shaped gear 40, and the small diameter which couple | bonded this gear 40 with the motor M is shown. By combining the gears 42 to drive the motor M, the gears 40 are rotated in the direction of the arrow b with the rotational center 44 as the axis. The angle of the nozzle tube 18 can be changed arbitrarily.

Moreover, when this angle change mechanism is provided, the effect that the dispersion position of the particle | grains 20 on the board | substrate 16 on the fine powder dispersion | distribution apparatus concerning this invention becomes quicker and more reliable can be acquired. . In addition, it is good to control this angle change also by the instruction | indication from the above-mentioned control apparatus.

12, the outline | summary of the function of the above-mentioned control apparatus is put together and shown.

As a function of the control device, in addition to reading the control program in the preparation step (step 50) and reading the control data (including input reception: step 52), control of each part at the time of execution of the scattering operation (step 54). -60) is mentioned.

In other words, when the control device is activated, after the preparation step is finished, the operation of setting the substrate and distributing the dispersion is repeated until the end is instructed, and the end processing operation is performed at the time when the end is instructed.

Here, the control of the dispersion operation in step 58 includes various controls for the slider block 18A and the dispersion nozzle tube 18 described above.

On the other hand, in order to smoothly control the spreading operation (that is, the control of the discharge direction of the airflow or the control of the dispersion of the airflow, etc.) in step 58, as described above, the gas discharge pipe ( Data such as a change in the discharge direction of the air stream discharged from the spray nozzle tube 18 or a change in the dispersion state, or the angle change mechanism of the spray nozzle tube 18 with respect to the gas supply amounts to 22a, 22b) and 24, or the like. It is preferable to take the same data for and keep the control amount determined based on them in the control apparatus in the form of a control table or the like.

In addition, the above-mentioned control apparatus may be implemented by the hardware which combined the IC chip which written the exclusive program, and may be the apparatus which assembled the whole in one personal computer (PC), and these compromise structures It may be configured as a device having a.

Further, the angle adjustment (control) of the spray nozzle tube 18 itself or the direction adjustment of the air flow including the particles 20 discharged from the spray nozzle tube 18 or the dispersion of the air stream (actually contained here) The dispersion control of (20) also is not limited to the illustrated method, and other various methods may be appropriately employed.

FIG. 13 is a cross-sectional view showing a schematic configuration of a fine powder spreading device 70 according to another embodiment of the present invention, and FIG. 14 is the same top view.

The fine powder spreading device 70 according to the present embodiment is also provided in the clean room. In the fine powder spreading device 70 according to the present embodiment, the glass substrate 16, which is a scattering body, is placed on a swivel 72 disposed below the sealed chamber 12, and is positioned and fixed.

The rotating table 72 described above has a structure in which a rotating disc 74 having a shaft 74a connected to a motor M via a gear 72a is supported via a roller 74b. When the motor M rotates, it is possible to smoothly rotate the glass substrate 16 which is mounted on the rotating disc 74 and positioned and fixed, at a predetermined rotational speed.

In this case, the glass substrate 16 placed on the swivel table 72 and the upper portion thereof has a ground (earth) or charged fine powder and a reverse polarity voltage applied thereto, and the glass substrate 16 placed on the upper portion thereof. ) And the particle | grains 20 of the liquid crystal spacer which are the fine powder charged are reliably attached to the glass substrate 16. On the other hand, the ceiling and sidewall surfaces of the chamber 12 are configured to prevent unnecessary adhesion of the fine powder particles 20 by applying a voltage having the same polarity as the fine powder.

Also in the dispersion apparatus 70 of fine powder which concerns on this embodiment, the spray nozzle tube 18 which distributes the fine powder particle 20 falls in the scattering nozzle tube 18 itself on the swivel table 72. FIG. In order to prevent it from falling on the glass substrate 16, it is arrange | positioned so that it may be located outside the projection surface of the rotating table 72 (actually, the glass substrate 16).

That is, also in the dispersion apparatus 70 of the fine powder which concerns on this embodiment, the projection surface (shown with a dashed-dotted line in FIG. 13) of the glass substrate 16 like the case of embodiment mentioned above (refer FIG. 1). Outside, specifically, it is arrange | positioned in the position separated 50 mm or more from the edge part of the glass substrate 16, for example.

On the other hand, as shown in FIG. 14, the above-mentioned rotating disk 74 on the rotating table 72 cuts off the corner part in the range which does not interfere with the support of the glass substrate 16, in order to make rotation smooth. It is preferable to set it as the form near a disc. Moreover, it is preferable to provide the inner wall board 12a with respect to the corner part of the chamber 12 in order to make small the change of the airflow at the time of rotation of the rotation disk 74. As shown in FIG.

In the dispersion device 70 of the fine powder according to the embodiment shown in FIGS. 13 and 14, the dispersion nozzle pipe 18 is disposed above the corner portion of the chamber 12. For example, the above-described block ( By the spray nozzle tube direction control mechanism 18B (refer FIG. 2) in 18A, it reciprocates reciprocally at a predetermined speed in the up-down direction in the figure (namely, it operates one-dimensionally with respect to the glass substrate 16 which is a scattering body). } Is configured to.

The fine powder spreading device 70 according to the present embodiment, configured as described above, operates as follows schematically.

The glass substrate 16 which was mounted (fixed) on the rotating disc 74 on the swivel table 72 and rotated at a predetermined speed (here, for example, 15 to 60 rpm) was rotated toward the glass substrate 16. The airflow containing the fine powder particle 20 is discharged from the nozzle tube 18, and the particle | grain 20 is spread | dispersed in the predetermined position on the glass substrate 16. FIG.

Here, in the dispersion apparatus 70 of the fine powder which concerns on this embodiment, by rotating the glass substrate 16, the glass substrate 16 with the operation | movement of the up-down direction of the dispersion nozzle tube 18 mentioned above is carried out here. The particle | grains 20 can be scattered so that the uniformity may be good over the whole surface of ().

In addition, each said embodiment showed an example of this invention, Comprising: This invention does not have to be limited to these, Of course, you may change suitably or improve in the range which does not deviate from the summary of this invention. .

As described above in detail, according to the present invention, it is possible to disperse fine powder such as a liquid crystal spacer on a large sized to-be-scattered body without causing an increase in the size of the apparatus and without the occurrence of falling objects on the large-size to-be-scattered body. A fine powder spreading device can be realized.

Moreover, according to this invention, the fine powder spreading apparatus which can distribute the fine powders, such as a liquid crystal spacer, on a large sized to-be-dispersed body with high efficiency can be realized.

Claims (19)

A spray nozzle tube disposed at a predetermined interval away from the object to be dispersed, and discharging the fine powder from the distal end thereof together with the air flow of the gas body with respect to the object to be dispersed; Movement control means for moving the spray nozzle tube relative to the scattered object; A fine powder dispersing device having a support portion of the spray nozzle tube and a support portion of the scattered object controlled by the movement control means, And the scattering nozzle tube is provided outside the projection surface vertically above the scattered object to perform a scattering operation outside the projection surface. A spray nozzle tube disposed at a predetermined interval away from the object to be dispersed, and discharging the fine powder from the distal end thereof together with the air flow of the gas body with respect to the object to be dispersed; Direction control means capable of three-dimensionally controlling the discharge direction of the fine powder from the spray nozzle tube; A fine powder dispersing device having a support for supporting the scatter nozzle tube, And the scattering nozzle tube is provided outside the projection surface vertically above the scattered object to perform a scattering operation outside the projection surface. The method of claim 2, The scattered object is disposed substantially horizontally with the scattered surface upward, and the scatter nozzle tube is disposed at a position higher than the scattered surface outside the projection surface on the vertically upper side of the scattered object. Dispersion device of fine powder. The method of claim 2, The scattered object is arranged in an inclined state with its scattered surface upward, and the scattered nozzle tube is disposed at a position higher than the scattered surface outside the projection surface vertically upward of the scattered object. , Dispersion device of fine powder. The method of claim 2, And said scattered nozzle is disposed substantially perpendicular to said scattered nozzle tube side, and said scattered nozzle tube is disposed outside the projection plane above the vertical direction of said scattered object. delete delete The method according to any one of claims 3 to 5, The dispersion nozzle tube is configured to disperse the fine powder in a planar manner with respect to the surface of the distributed object in a state where the dispersion nozzle tube is stopped in a substantially vertical plane outside the projection plane of the target object. Spreader. The method of claim 3, wherein The scatter nozzle tube is configured to be movable along one side of the scattered object in a substantially vertical plane outside the projection surface of the scattered object, and stops at a predetermined position in the course of the movement. A fine powder dispersing device, characterized in that the fine powder is spread in a plane with respect to the surface of the scattered object arranged horizontally. The method of claim 3, wherein The scatter nozzle tube is configured to be movable along one side of the scattered object at a predetermined pitch in a substantially vertical plane outside the projection surface of the scattered object, and stops at a fixed position in the course of this movement. The fine powder spreading device according to claim 1, wherein the fine powder is flatly dispersed in a direction orthogonal to the moving direction with respect to the surface of the scattered object arranged substantially horizontally. The method of claim 8, The planar dispersion of the fine powder at the stop position of the dispersion nozzle tube is made by air flow supply means in at least two directions provided in proximity to the fine powder discharge opening of the dispersion nozzle tube. Fine powder spreading device. The method of claim 8, And a direction changing means in a plane perpendicular to the moving direction of the spray nozzle tube, in addition to the air flow supply means. The method of claim 8, The scattering nozzle tube is disposed on two substantially vertical surfaces facing each other outside the projection surface of the scattered object. The method of claim 13, A dispersion nozzle apparatus for dispersing fine powder, wherein the dispersing nozzle tubes arranged on the two substantially perpendicular surfaces alternately distribute fine powder. The method of claim 13, The dispersing device of fine powder characterized in that, after one of the dispersing nozzle tubes arranged on the two substantially perpendicular planes disperse the fine powder, the other dispersing nozzle tube disperse the fine powder. A spray nozzle tube disposed at a predetermined interval away from the object to be dispersed, and discharging the fine powder from the distal end thereof together with the air flow of the gas body with respect to the object to be dispersed; Direction control means capable of controlling two-dimensionally the discharge direction of the fine powder from the spray nozzle tube; A fine powder dispersing device having a support for supporting the scatter nozzle tube, The scattering nozzle tube is provided outside the projection surface vertically above the workpiece to perform a scattering operation outside the projection surface, and the target body is configured to rotate at a predetermined rotational speed. Spreader. The method of claim 16, The scattered object is disposed substantially horizontally with its scattered surface upward, and the scattered nozzle tube is disposed at a position higher than the scattered surface outside the projection surface vertically upward of the scattered object. Dispersion device of fine powder. The method of claim 16, The scattered object is arranged in an inclined state with its scattered surface upward, and the scattered nozzle tube is disposed at a position higher than the scattered surface outside the projection surface vertically upward of the scattered object. , Dispersion device of fine powder. The method of claim 16, The dispersing device is finely dispersed, the dispersing surface is disposed substantially vertically toward the dispersing nozzle tube, and the dispersing nozzle tube is disposed outside the projection surface above the vertical direction of the dispersing body. .

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