KR100671656B1 - A tray alignment assembly - Google Patents

Abstract

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an alignment device, wherein a granular substrate tray and a mask tray on which a substrate and a mask are fixed to each other are fixed to a tray holder, so that the alignment position of the substrate tray and the mask tray can be stably maintained. will be.

The present invention includes a tray holder having a substrate tray, a mask tray, and fastening arms fastened to respective fastening holes formed in the trays, and the tray alignment device of the tray holder configured to reduce a gap between the holder plate of the tray holder and the substrate tray. To provide.

In the tray aligning apparatus according to the present invention, the mask tray and the substrate tray are fastened to the tray holder by the fastening portion, thereby minimizing the change of the alignment position and the distance between the mask tray and the substrate tray, and the efficient temperature reduction of the substrate tray by the holder plate is achieved. There are advantages to it.

Mask Tray, Board Tray, Tray Holder, Tray Aligner

Description

A tray alignment assembly             

1 is a perspective view schematically showing a tray alignment device for a light emitting device according to a preferred embodiment of the present invention;

2 and 3 are side views showing some separation and coupling of the alignment device shown in FIG.

4a and 4b is a perspective view and an enlarged rear view of the fastening hole is an enlarged view of the fastening portion shown in Figure 1,

Figure 4c is an enlarged perspective view of the auxiliary fastener shown in Figure 1 extracted.

5A is a front view of a substrate tray of a substrate tray alignment system according to another embodiment of the present invention;

5B is a rear view of the substrate tray of the substrate tray alignment system according to another embodiment of the present invention;

5C is a side view of a substrate tray of a substrate tray alignment system according to another embodiment of the present invention;

Figure 6a is a view showing a fixed holder member of the substrate tray alignment system according to another embodiment of the present invention,

6B is a view showing an auxiliary attachment member of a substrate tray alignment system according to an embodiment of the present invention;

7A illustrates a substrate, a substrate frame, and a substrate tray in a substrate tray of a substrate tray alignment system according to another embodiment of the present invention;

7B is a view illustrating a state in which a substrate is detached from the substrate tray of the substrate tray alignment system according to another embodiment of the present invention;

7C is a view showing a state in which a substrate is mounted on the substrate tray of the substrate tray alignment system according to another embodiment of the present invention;

8A is a view showing a combination of a substrate tray and an alignment plate in a substrate tray alignment system according to another embodiment of the present invention;

8B is a side view illustrating the coupling of the substrate tray and the alignment plate in the substrate tray alignment system according to the embodiment of the present invention;

9A is a view showing that the fixed holder member and the auxiliary attachment member of the substrate tray match with the insertion member and the auxiliary support member of the alignment plate respectively in the substrate tray alignment system according to another embodiment of the present invention;

FIG. 9B is a view illustrating an insertion member and an auxiliary support member of an alignment plate respectively matched with the fixed holder member and the auxiliary attachment member of the substrate tray in the substrate tray alignment system according to another embodiment of the present invention. FIG.

<Description of Symbols for Main Parts of Drawings>

100 ... tray alignment device 200 ...

210,220, fastening hole 230, fastening arm,

300 ... tray holder 310 ... holder plate,

400 ... secondary fastening 410, 420, 430 ... magnetic material.

The present invention relates to alignment of a tray for a light emitting device, and more particularly, to a tray alignment device for a light emitting device in which a proximal position for alignment of a substrate and a mask is stably maintained.

In general, an organic thin film of an organic semiconductor device including an organic light emitting device (OLED) is formed by evaporating a low molecular organic material in a vacuum to form an organic thin film, or dissolving a high molecular organic material in a solvent, and then spin An organic thin film is formed using a method such as coating, dip coating, doctor blading, inkjet printing, or the like.

In particular, in the case of manufacturing a thin film made of a low molecular organic material, especially in a vacuum, a shadow mask having a predetermined pattern is formed in order to stack the organic material at an appropriate position, and the shadow mask is fixedly installed on the shadow mask frame. Will be. In addition, a glass substrate is provided such that the glass substrate and the shadow mask are finally aligned after the alignment and bonding operations are performed. In addition, a low molecular weight organic material is deposited on the substrate according to a pattern using a point or linear organic material deposition source during the deposition process.

In this case, an alignment apparatus is required in which the substrate and the mask are fixed to the respective substrate trays and the mask trays, and the substrates and the masks are aligned by aligning the substrate trays and the mask trays.

In addition, when the substrate has a small area, no difficulty was generated, but the problem of deriving the limitations of the conventional horizontal alignment device such as maximizing the warpage of the center due to its own weight as the substrate becomes large is overcome. There was a need for a vertical alignment device.

The present invention devised to meet the requirements as described above, the substrate tray and the mask tray is fixed to the tray holder at the same time the fastening portion and the auxiliary fastening portion is formed to prevent shaking, the gap between the substrate tray and the holder plate of the tray holder Due to this shortening, a stable alignment position of the mask tray and the substrate tray is secured while the alignment position is firmly maintained, and an object thereof is to provide an alignment device for a tray, which enables accurate alignment of trays having a relatively low temperature.

Tray alignment apparatus according to the present invention for achieving the above object, the substrate tray is granular and fixed to the substrate; and the mask tray is granular and fixed to the mask to be aligned with the substrate tray; and the substrate tray and the mask The tray holder is fastened by the fastening portion; is provided.

Preferably, the fastening part includes respective fastening holes formed in the substrate tray and the mask tray, and fastening arms formed in the tray holder to be inserted into and fastened to the fastening holes.

In addition, the fastening arm is preferably formed with a fastening groove for fitting a part of the edge of the fastening hole of the mask tray.

In addition, the fastening hole of the mask tray is preferably formed by overlapping two different diameter holes.

In addition, the mask tray is preferably provided with a support piece which is formed to protrude so that the fastening hole is contained on the opposite side of the insertion of the fastening arm, and in contact with the uppermost end of the fastening arm.

In addition, the tray holder preferably includes a holder plate disposed to approach the substrate tray.

It is preferable that the magnetic body to which mutual attraction acts so that the fastening position of the mask tray and the substrate tray fastened to the tray holder is further included in each tray and the auxiliary fastening part mounted to the tray holder.

Hereinafter, a tray alignment apparatus according to the present invention will be described in detail with reference to the accompanying drawings.

1 is a perspective view schematically showing a tray alignment device for a light emitting device according to a preferred embodiment of the present invention, Figures 2 and 3 are side views showing some separation and coupling of the alignment device shown in FIG. 4A and 4B are enlarged perspective views of the fastening part and the auxiliary fastening part shown in FIG. 1.

In the tray aligning apparatus 100 according to the present invention, as shown in FIG. 1, the mask tray 110 and the substrate tray 120 are fixed to the tray holder 300 at the same time by the fastening part 200. 120 and the gap between the holder plate 310 of the tray holder 300 is reduced.

In addition, the tray alignment device 100 is configured such that the fixing position of the substrate tray 120 and the mask tray 110 fixed to the tray holder 300 is maintained by the auxiliary fastening unit 400.

Referring to FIG. 2, the fastening part 200 includes fastening holes 210 and 220 formed in the mask tray 110 and the substrate tray 120, and tray holders 300 inserted into and fastened to the fastening holes 112 and 122. It includes a fastening arm 230 formed on the holder plate 310 of the).

The fastening arm 230 protrudes from the holder plate 310, and a fastening groove 232 is formed at an upper end thereof.

4A and 4B, the fastening holes 210 and 220 are superposed so that a hole of a small diameter r is positioned above a hole of a large diameter R so that interference with movement of the fastening arm 230 is avoided. The small diameter r is formed to be larger than the diameter of the minimum fastening arm 230.

The reason why the fastening holes 210 and 220 are formed by overlapping the small diameter r and the large diameter R is because the fastening arm 230 is smoothly inserted into the large diameter R while being moved and fixed to the small diameter r. This is to reduce the degree of fluctuation.

The upper edge of the fastening hole 210 of the mask tray 110 is fitted into the fastening groove 232 formed in the fastening arm 230 and fastened.

In addition, the mask tray 110 is further provided with a support piece 212 so as to protrude from the opposite side of the fastening arm 230 is inserted into the fastening hole 210 of the mask tray 110 in the formation range.

The support piece 212 is firmly in contact with a portion of the top end of the fastening arm 230 in a state in which the fastening hole 210 of the mask tray 110 is fastened to the fastening groove 232, and this contact is performed by the mask tray. The fastening of the fastening hole 210 and the fastening groove 232 of the 110 is maintained firmly.

In addition, the support piece 212 may be formed in the substrate tray 120 in the same manner as that formed in the mask tray 110, in which case the position of the support piece 212 is changed in the direction in which the fastening arm 230 is inserted. do.

As the mask tray 110 and the substrate tray 120 are fastened to the fastening arm 230, the distance L between the substrate tray 120 and the holder plate 310 is reduced as much as possible.

Meanwhile, referring to FIG. 4C, the auxiliary fastening part 400 includes a mask tray 110 in a state in which the fastening arm 230, the mask tray 110, and the fastening holes 210 and 220 of the substrate tray 120 are fastened. In order to maintain the fixed state of the substrate tray 120 and the holder plate 310 and the mask tray 110, the substrate tray 120 and the holder plate 310 in sequence mutual attraction Magnetic material (410, 420, 430) is disposed to act to include.

The magnetic bodies 410, 420, 430 are preferably fixed on the same line to the two trays 110, 120 and the holder plate 310, and are fixed to the mask tray 110 and the substrate tray 120 to form the same outer surface. The magnetic body 430 fixed to the 310 is formed to protrude so as to be close to the magnetic body 420 of the substrate tray 120 in a state where the distance L between the holder plate 310 and the substrate plate 120 is reduced. do.

Meanwhile, the fastening arm 230 and the magnetic body 430 fixed to the holder plate 310 of the tray holder 300, the fastening holes 210 and 220 and the magnetic body formed in the mask tray 110 and the substrate tray 120, respectively. 410 and 420 are preferably formed at four corners, respectively.

On the other hand, Figure 5a is a front view of the substrate tray of the substrate tray alignment system according to an embodiment of the present invention, Figure 5b is a rear view of the substrate tray of the substrate tray alignment system according to an embodiment of the present invention, Figure 5c is a present invention A side view of a substrate tray of a substrate tray alignment system according to an embodiment of the present invention.

5A to 5C, a substrate tray of a substrate tray alignment system according to an embodiment of the present invention accommodates a substrate 510 on which a deposit is deposited and the substrate 510 and at least one fixed holder member 600. The substrate tray 560 is provided with.

The substrate tray 560 having a flat plate shape is configured to accommodate the substrate frame 580, and a frame fixing piece 582 is further configured to be fixed to the substrate tray 560. The substrate frame 580 accommodated in the substrate tray 560 is configured to accommodate the substrate 510. The substrate fixing piece 512 is further configured to fix the substrate 510. The transfer means 564 is formed at the lower portion of the substrate tray 560 to allow the transfer of the substrate 510 in the vacuum chamber, and the upper portion of the substrate tray 560 is configured to guide the transfer by the transfer means 564. Guide means 562 is configured. The fixed holder member 600 and the attachment member 700 are formed on the flat plate of the substrate tray 560 around the periphery of the substrate frame 580, and the fixed holder member 600 has a through hole 620 formed therein. It is.

Figure 6a is a view showing a fixed holder member of the substrate tray alignment system according to an embodiment of the present invention.

As described above, the fixed holder member 600 is configured at least one around the periphery of the substrate frame 580 on the flat plate of the substrate tray 560. The fixing holder member 600 forms a step 610 protruding outward from the surface opposite to the surface on which the fixed holder member 600 is attached to the substrate tray 560. The through hole 620 of the fixed holder member 600 has an inner diameter a of the side attached to the substrate tray 560 in a circular shape. The inner diameter of the step side 610 protruding outward from the substrate tray 560, that is, the side opposite to the side of the surface attached to the substrate tray 560, is equal to the inner diameter a and the step 610 of the side attached to the substrate tray 560. The inner diameter (b) formed by) forms an overlapping shape, and the circle formed by the inner diameter (a) penetrates through the fixed holder member 600. The inner diameter (a) and the inner diameter (b) is preferably formed in a different size, more preferably the inner diameter (a) is formed larger than the inner diameter (b) so that the inner diameter (b) on the upper portion of the inner diameter (a) Is located.

6B illustrates an auxiliary attachment member of a substrate tray alignment system according to an embodiment of the present invention.

As described above, a plurality of auxiliary attachment members 700 are configured around the periphery of the substrate frame 580 on the flat plate of the substrate tray 560. The auxiliary attachment member 700 has a flat side surface attached to the substrate tray 560, and is further configured to be firmly attached to the substrate tray 560. In addition, the auxiliary attachment member 700 is formed on the opposite side of the side of the surface attached to the substrate tray 560, that is, the surface protruding outward from the substrate tray 560, and is attached to the auxiliary attachment member 700. Indented grooves or embossed microprojections may be further configured to match the mating material (described later). Preferably, the auxiliary attachment member 700 is made of a conductive material, more preferably, the auxiliary attachment member 700 made of this conductive material is a magnetic material.
7A illustrates a substrate, a substrate frame, and a substrate tray in a substrate tray of a substrate tray alignment system according to another embodiment of the present invention, and FIG. 7B illustrates a substrate tray of a substrate tray alignment system according to another embodiment of the present invention. 7 is a diagram illustrating a state in which a substrate is mounted in a substrate tray of a substrate tray alignment system according to another embodiment of the present invention.
7A-7C, the substrate frame 580 is coupled to the front of the substrate tray 560 and the substrate 510 is coupled to the substrate frame 580 at the back of the substrate tray 560. The substrate frame 580 is coupled to an opening formed in the center portion of the substrate tray 560 and fixed to the substrate tray 560 by the frame support piece 582. Subsequently, the substrate 510 is coupled to the opening formed in the substrate frame 580 and fixed to the substrate frame 580 by the substrate fixing piece 512. The substrate frame 580 and the substrate 510 are coupled to the substrate tray 560 to complete the substrate tray fixing the substrate 510.
FIG. 8A illustrates a combination of a substrate tray and an alignment plate in a substrate tray alignment system according to another embodiment of the present invention, and FIG. 8B illustrates a substrate tray and an alignment plate in a substrate tray alignment system according to an embodiment of the present invention. A side view of the bond is shown.
Referring to FIG. 8A, the substrate tray 560 is attached to the alignment plate 570 for vacuum deposition. The alignment plate 570 is configured by combining the tray holder 300 (see FIG. 1) with the chuck. The alignment plate 570 includes a plate chuck (not shown) configured to press the substrate 510 to a shadow mask, and drive means (not shown) and fixed holder member 600 connected to the plate chuck to move the plate chuck. And a fixed insertion member 572 correspondingly coupled thereto. The substrate tray 560 attached to the alignment plate 570 is deposited by attaching a shadow mask (not shown) having a pattern in the direction in which the deposition material flows, thereby forming a deposition pattern according to the pattern formed on the shadow mask. To lose. Before the deposition pattern is formed, the substrate 510 mounted on the substrate tray 560 is aligned with the shadow mask. For this alignment, the alignment plate 570 is configured to move the substrate tray 560 in multiple directions so that the substrate tray 560 on which the substrate 510 is fixed and supported is aligned with the shadow mask.
Referring to FIG. 8B, the fixed holder member 600 of the substrate tray alignment system according to an embodiment of the present invention is correspondingly coupled with the fixed insertion member 572 of the alignment plate 570, and the auxiliary attachment member 700 of the substrate tray. ) Is correspondingly coupled with the auxiliary support member 574 configured on the tray holder 300 side of the alignment plate 570.
The fixed insertion member 572 may be inserted into the fixed holder member 600 of the substrate tray 560 to fasten and fix the substrate tray 560, and the fixed insertion member 572 may be inserted into the fixed holder member 600. It is preferred that a groove is formed to allow it to be seated thereafter.
The auxiliary supporting member 574 is formed of a magnetic material and is configured to support and fix the auxiliary supporting member 700 of the substrate tray 560.
FIG. 9A is a view showing that the fixed holder member and the auxiliary attachment member of the substrate tray correspond to the insertion member and the auxiliary support member of the alignment plate, respectively, in the substrate tray alignment system according to another embodiment of the present invention, and FIG. In the substrate tray alignment system according to another embodiment of the present invention is a view showing the insertion member and the auxiliary support member of the alignment plate respectively matching the fixed holder member and the auxiliary attachment member of the substrate tray.
9A to 9B, the insertion member 572 of the alignment plate 570 has a rod shape, and has a step having a smaller diameter in the protruding direction, that is, the direction toward the substrate tray 560. . The portion having the smaller diameter of the insertion member 572 is sufficiently formed to be inserted into the inner diameter a (see FIG. 6A) of the through hole 620 of the fixed holder member 600. Further, in the portion having a smaller diameter of the insertion member 572, a groove is formed in the semicircle on one side thereof.
When the substrate tray 560 is attached to the alignment plate 570, the insertion member 572 is inserted into the through hole 620 of the fixed holder member 600 corresponding thereto. After the insertion end of the insertion member 572 is inserted into the inner diameter a of the through hole 620 of the fixed holder member 600, a groove formed in the portion having the smaller diameter of the insertion member 572 is formed in the through hole 620. While the inner diameter (b) is fitted to the surface formed by the inner diameter (b) is made to face a portion of the grooved portion of the portion having a smaller diameter of the insertion member (572). The groove formed in the portion having the smaller diameter of the insertion member 572 is configured to correspond to the thickness of the surface formed by the inner diameter (a) of the through hole 620. When the substrate tray 560 is attached to the alignment plate 570, the insertion member 572 is inserted into and fitted into the fixed holder member 600, so that the substrate tray 560 can be stably fixed. High precision alignment is possible.
The auxiliary support member 574 of the alignment plate 570 is configured to have a sufficient area to be in contact with the auxiliary attachment member 700 of the substrate tray 560. The auxiliary support member 574 is configured to include a magnetic force source (not shown) so as to attract the auxiliary attachment member 700, which is conductive and made of magnetic material, to magnetic force. At this time, in order to easily separate the auxiliary attachment member 700 from the auxiliary support member 574 after the end of the process, the magnetic force source is preferably an electromagnet.
When the substrate tray 560 is attached to the alignment plate 570, the auxiliary attachment member 700 is attached to the auxiliary support member 574 corresponding thereto, thereby stably holding the substrate tray 560. High precision alignment is possible.
In addition, the auxiliary supporting member 574 and the auxiliary attaching member 700 are formed to be joined to each other to form a yaw (철) and iron (凸) to each other to serve as a guide when attached, the contact area is increased and more robust It can also serve to attach correctly.

Hereinafter, the operation of the tray alignment device according to the present invention will be briefly described.

As the tray holder 300 is operated by the driving device, the fastening arm 230 of the holder plate 310 is inserted into and fastened to the fastening holes 210 and 220 of the mask tray 110 and the substrate tray 120. The fastening groove 232 formed in the 230 is inserted into the edge of the fastening hole 210 of the mask tray 110, the support piece 212 formed in the mask tray 110 and the best end of the fastening arm 230 and In contact with each other, the fastening groove 232 and the fastening hole 210 of the mask tray 110 are supported to be firmly maintained.

In addition, while the mask tray 110, the substrate tray 120, and the holder plate 310 are firmly fastened by the magnet chuck 320 for alignment, mutual attraction is applied by the magnetic bodies 410, 420, and 430 so that the alignment position thereof is adjusted. Lasts firmly.

In addition, the substrate tray 120 and the holder plate 310 are located in close proximity, so that the temperature of the substrate tray 120 is lowered by the holder plate 310.

According to the present invention configured as described above, the mask tray and the substrate tray are fastened to each other by the fastening arms and the fastening holes formed in the tray holder, respectively, to secure the fastening of the stable mask tray and the substrate tray, thereby ensuring a stable alignment position. In addition, as the alignment positions of the tray holder, the mask tray and the substrate tray are firmly maintained by the magnetic material, the shaking of the trays is prevented, and the temperature of the substrate tray is reduced by the holder plate of the tray holder, thereby forming the magnetic materials formed between the magnetic materials. The force is stabilized to have an effect that the alignment of the trays is accurate and accurate.

Claims (26)

A substrate tray having a granular shape and a substrate fixed thereto; A mask tray in which the mask is fixed while being aligned with the substrate tray; A tray holder to which the substrate tray and the mask tray are fastened by a fastening part; Tray alignment device is provided. The method of claim 1, And the fastening portion includes respective fastening holes formed in the substrate tray and the mask tray, and fastening arms formed in the tray holder to be inserted into and fastened to the fastening holes. The method of claim 2, Tray fastening device is characterized in that the fastening arm is formed with a fastening groove which is partially fitted to the edge of the fastening hole of the mask tray. The method according to claim 2 or 3, The fastening hole of the mask tray tray tray arrangement, characterized in that formed by overlapping two holes of different diameters. The method of claim 4, wherein The fastening hole of the mask tray is a tray alignment device, characterized in that the small diameter hole is positioned in the upper portion of the large diameter hole is superimposed so as to avoid interference in the movement of the fastening arm. The method of claim 4, wherein The mask tray is a tray alignment device characterized in that the protrusion is formed so that the fastening hole is contained on the opposite side of the insertion of the fastening arm, the support piece is in contact with the most end of the fastening arm. The method of claim 1, The tray holder includes a holder plate which is operated by a driving device and arranged to be close to the substrate tray. The method of claim 1, And an auxiliary fastening part configured to fix the fastening position of the mask tray fastened to the tray holder and the substrate tray. The method of claim 8, The auxiliary fastening unit is a tray alignment device, characterized in that the substrate tray, the mask tray and the tray holder comprises a magnetic material disposed so as to sequentially interact with each other. The method according to claim 7 or 9, Magnetic tray holder is characterized in that the tray alignment device is installed on the holder plate. The method of claim 1, Tray substrate arrangement, characterized in that the substrate tray is provided with at least one fixed holder member. The method of claim 11, The tray holder includes a flat plate chuck configured to pressurize a substrate, driving means connected to the flat plate chuck to move the flat plate chuck, and a fixed insert member corresponding to the fixed holder member of the substrate tray. Tray alignment device. The method of claim 11, The fixed holder member is a tray alignment device, characterized in that the through-hole formed in a shape in which two circles of different diameters overlap. The method of claim 13, The through-hole tray alignment device, characterized in that the small-diameter through-hole is formed so as to be located on the upper portion of the large-diameter through. The method of claim 12, And the fixed insertion member is inserted into the fixed holder member to fasten and fix the substrate tray. The method of claim 15, The fixed insertion member is a tray alignment device characterized in that the groove is formed to be seated after being inserted into the fixed holder member. The method of claim 11, And at least one auxiliary attachment member in the substrate tray, and the tray holder further comprising an auxiliary support member corresponding to the auxiliary attachment member. The method of claim 17, And the auxiliary attachment member is a conductive attachment member. The method of claim 18, The conductive attachment member is a tray alignment device made of a magnetic material. The method of claim 19, At least one groove or protrusion is formed in the conductive attachment member made of the magnetic material. The method according to any one of claims 17 to 20, And the auxiliary supporting member is formed of a magnetic material to support and fix the auxiliary supporting member to correspond to the auxiliary attaching member of the substrate tray. The method according to claim 11 or 17, And the substrate tray further includes a substrate frame configured to receive the substrate and to be received in the substrate tray. The method of claim 22, Tray alignment device characterized in that the substrate frame further comprises a substrate fixing piece to accommodate the substrate. The method of claim 23, wherein The substrate frame further comprises a frame fixing piece to be accommodated in the substrate tray. The method of claim 24, Tray substrate arrangement, characterized in that the substrate tray further comprises a transfer means for transfer. The method of claim 24, The substrate tray further comprises a guide means for assisting the transfer by the transfer means.

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