KR100612530B1 - Simultaneous multi-beam planar array irpair spectroscopy - Google Patents

Abstract

Apparatus 300 and method of the present invention utilizes IR absorption phenomena that require self-compensation during the floating part or the Fourier transform during operation and the deterioration of the background spectrum and element performance. It provides spatially multiplexed IR spectrum information simultaneously in real time. IR spectral and chemical analysis of the sample may include one or more IR light sources 310, 311, one or more sampling accessories 330, 331 to locate the sample volume, one or more optical dispersing elements 350, and a scattered light beam. Determining using focal plane arrays (FPA, 370), processor 380, display 390 to control FPA, and display 390 to control FPA 370 and display IR spectrographs arranged for detection. .

Description

Multibeam Planar Array IR Spectrometer {SIMULTANEOUS MULTI-BEAM PLANAR ARRAY IR (PAIR) SPECTROSCOPY}

This application is a application claiming priority of PCT / US01 / 30724 filed by Rabolt et al. In 10.1 in 2001, and relates to the "apparatus and method for a real-time IR spectroscopy" and related patents filed by Rabolt et al. US patent application 09 / 984,137, "apparatus and method for real-time IR spectroscopy".

The United States Government has the rights of the present invention provided by NATIONAL SCIENCE FOUNDATION GRANT NO.0076017 and DEPARTMENT OF ENERGY GRANT NO DE-FG02-99-ER45794.

The present invention is directed to an apparatus and method for simultaneously determining multisample materials of the IR spectrum. More specifically, the present invention relates to the multiplexing of a space capable of spectroscopically determining an IR spectral multisample using an apparatus and a method operating simultaneously in real time having a background compensation, without using a dynamic part. In addition, the present invention does not use a mathematical transform on the information of the spectrum detected by analyzing the composition of the sample material.

The present invention has industrial utility. For example, it is a real-time method in the monitor manufacturing process. Such monitor manufacturing processes include, but are not limited to, thickness, chemical structure, and coating direction (solid, liquid, chemical boundary, physical absorption) on the surface. The thickness is made of, but is not limited to, biomaterials, polymers, superconductors, semiconductors, metals, dielectrics, minerals, and the like. In addition, availability can be found in real-time devices and methods of measurement and can be found in the detection of chemical components in chemical reactions involving various process materials in gaseous or solid state. In addition, the apparatus and method according to the present invention provide for self-compensation to calculate environmental changes that affect the measurements obtained or to calculate changes in sensors or optical paths.

As the industry continues to lead to cost reductions in key technologies, the emphasis is on replacing them with optimized processes and performance. Such cost savings will inevitably result in the development and introduction of new types of complex devices that are portable, robust, reliable, and active for a long time in an industry or other non-experimental environment.

Spectroscopic techniques are often used in the field of analysis of materials. Conventional spectrometers measure the scattering of specific color light due to selective absorption and radiation problems. Visible white light can separate the portion of color or spectrum by a prism. The main purpose of spectroscopic measurements is to identify the chemical composition of an unknown material or to explain the details of its structure, operation or environmental properties (such as internal temperature, pressure magnetic field strength) of a known material or object.

The broad technical significance of spectroscopy in various fields, such as science and industry, dates back to the 19th century, with industries such as those that determine the properties of natural materials and synthetic chemistry and the composition of stars.

Modern spectroscopy generalizes the meaning of "LIGHT", which covers the whole range or spectrum of electromagnetic field radiation and extends from gamma, x-rays and ultraviolet to ultraviolet, visible and infrared as well as microwave and radio waves. . The various forms (or wavelength ranges) of the electromagnetic field of all light have their own way of measuring their properties. There are various kinds of methods for measuring the intrinsic properties as described above according to different spectroscopy devices and techniques, and they rely on different physical phenomena to measure the properties of materials. In addition, many experts and researchers in various fields do not or often exchange technology in various technical fields as a systematic knowledge and experience rule.

The use of IR described above is one of many spectroscopic techniques for analyzing chemical materials. In all cases, spectroscopic analysis measures the specific wavelength of light energy by the amount of absorption or reflection by the sample in question, or by the amount emitted from the sample when properly energized.

In the case of IR, the absorption form of spectrometer analysis is reliable. IR radiation does not have enough energy to reduce the transition between molecular orbits, as seen by the electronic state, ie ultraviolet light. Unlike atomic absorption, the IR spectrum examines vibrational transitions within a single electronic state of a molecule and does not relate to specific electronic elements such as Pb and Cu. Such vibrations fall into one of three main categories. The three main categories are stretching, resulting in a change in the inner atomic distance along the bond axis; BENDING resulting in a change in angle between the two bonds; It is a torsional bond that changes in the bond and separation between two groups of atoms. Almost all materials absorb IR radiation, except for HOMONUCLEAR divalent molecules such as O ₂ , H ₂ , N ₂ , Cl ₂ , F ₂ or NOBLE GAS.

IR generally covers a range of electromagnetic field spectra between 0.78 and 1000 μm. Temporary frequencies in the IR spectrometer environment are measured within "WAVENUMBERS" (cm ^-1 ) and are calculated as the mutual wavelength of radiation (cm). Although not precisely defined, the range of IR is sometimes additionally outlined by three regions with wavelengths and corresponding wavelength number ranges.

"Near-IR": 0.78-2.5 μm 12800-4000 cm ⁻¹ ;

"Medium distance-IR": 2.5-50 µm 4000-200 cm ^-1 ; And

"Long distance-IR": 50-1000 μm 200-10 cm ⁻¹ ;

In a molecule to absorb IR, vibration or rotation within the molecule should cause the nets to change within the dipole moment of the molecule. The IR-emitted electric field intersects the wave in the dipole moment of the molecule, and radiation will be absorbed if the emission frequency matches the vibration frequency of the molecule, causing the IR bandwidth intensity to be reduced by molecular vibration.

The electronic states of the molecular functional groups are combined vibration states, each with a different energy level. As a result, an IR spectrometer is associated with a group of atoms of a particular chemical combination or with a molecular type in a form known as a "functional group." The various functional groups have an effect on determining the properties of the material or on the activity predicted by the absorption properties of the chemical bond form. The chemical bonds undergo a change in the dipole moment during vibration. For example, functional groups and their respective energy bands include hydroxyl (OH) (3610-3640 cm ^-1 ), amines (NH) (3300-3500 cm ^-1 ), and aromatic rings (CH) (3000-3100 cm). ^-1 ), alkenes (CH) (3020-3080 cm ^-1 ), alkanes (CH) (2850-2960 cm ^-1 ), nitriles (C≡N) (2210-2260 cm ^-1 ), carbonyl (C═O) (1650-1750 cm ⁻¹ ) or Amines (CN) (1180-1360 cm ⁻¹ ). The IR absorption band is combined with a functional group as a "fingerprint" form which is very useful in molecules of organisms and organometals for composition analysis, special identification.

As it is known that the wavelength is absorbed by the surplus of functional groups, a suitable wavelength is governed in the sample being analyzed and the amount of energy absorbed by the sample is measured. Many of the energy absorbed is in the sample as a special functional group director. The result is numerically weighed. In addition, the absence of an absorbing band in the sample can provide equally useful information.

The intensity and frequency of sample absorption are described in a two-sided plot called spectrum. Intensity is generally described by absorption and can be described by the amount of light absorption, or percent transmission, in the sample, the amount of light passing through the prism.

Infrared spectrum meters are manufactured using light sources (eg, the sun), wavelength identification units or optical dispersing elements such as IR detectors and prisms. By scanning the optical scattering elements, the spectral information is obtained at different wavelengths using a reflection mode, ie a light source reflection or a transmission mode, ie a transmission through the sample. However, a drawback in this approach is the movable portion combined with the required scanning operation. Such movable parts can limit the robustness and portability of the device.

Recently, a Michelson interferometer has been used to generate what is called INTERFEROGRAM in the IR spectrum, and the latter requires Fourier series (FT), such as Fast Fourier series (FFT). Within the IR range, spectrometers were called FTIR interferometers and first appeared for business purposes in the 1960s. The FTIR interferometer is shown in FIG.

The main elements of the FTIR interferometer 100 are the IR light source 110, the interferometers 130, 140, 150 and the IR detector 160. The FTIR interferometer 100 is provided to spectrometer means for measuring all optical frequencies passed through the sample 120, and modulates the intensity of each radiation frequency before the detector rig 160 detects the signal. In general, the movable mirror arrangement 15 is used to obtain the path length between two identifiable light beams. After moving different lengths from the reference beam, the second beam and the reference beam are recombined, resulting in an interference pattern. The IR detector 160 is used to detect such interference patterns.

The detected interference pattern or interferogram is a plot of the strength with respect to the mirror position. The interferogram is the sum of all wavelengths emitted by the sample for all practical purposes, so the interferogram does not change in its fundamental shape. Using the equation of the FT, a computer or presented processor changes the interferogram into a characteristic spectrum of light absorbed or transmitted through the sample 120.

The invention of FT spectroscopy is one of the most advanced in modern device development in the 20th century. Optical spectroscopy using optical interference is very fast and sensitive to the detection of molecular vibrations / rotations depending on the high throughput, and has the various advantages provided by FT devices. In NMR (NUCLEAR MAGNETIC RESONANCE) and mass spectrometers where high resolution spectra are required, FT devices are very effective as a recent technology.

The same innovation should have an FT device made as a choice in the spectroscopy generation but also have a FT device that is very sensitive to the environment of the FT device. For this reason, FT interferometers are most limited in experimental environments that require the use of optical benches to prevent vibration, and strict environmental controls are needed to control the temperature oscillation that affects the interferogram due to thermal induced length differences. . This type of scanning approach demonstrates that it can be implemented and the signal-to-noise ratio (SNR) that can be obtained under certain circumstances requires a continuous average signal of multiple interferograms, and a slower FTIR system is required that is required under some circumstances. This results in reduced speed and lower reliability from multiple moving parts of the system.

In spectroscopy, resolution is a measure of resolution or two peak differences in a spectrum, where a high resolution corresponds to a wavelength number of a small peak difference, and a low resolution relates to a larger peak difference wavelength number. Fourier series interferometers have very high resolution in the order of 1/1000 ^th cm ^-1 and depend on the possible amount of mirror movement or path length differences that can be generated by a particular device. The "low" resolution is chosen based on the measurement and the specific application the resolution requires, so there is no BRIGHT-LINE between "low" and "high" resolutions but generally 16-32 cm ^-1 It is judged within the range. In general chemistry analysis and identification combined with FTR, "high" resolutions of 8 cm ^-1 or more are common. In other words, chemical information is lost if the identified adjacent peaks or oscillations with special chemical bonds are all "smooth" together, and if lower resolutions are used, they cannot be visualized. will be.

The need for thermal stability, mechanical vibration suppression, and strict optical alignment is strongly raised where and how the FT device can be used, in particular with regard to the portability limitations of the device. If this problem is a limitation of the FTIR interferometer, testing by specific techniques should be made on the currently available equipment to find some drawbacks. Table 1 lists the four common techniques used for the operation of the optical interferometer and its limitations.

Motion technology Limit Air bearing The necessity of stable supply of a close level moving plane in clean, dry air and moving mirror Magnetic coil Need for a Highly Adjusted Power Supply Low Tolerances in Vibration Piezo Stack Limit of travel range. High power supply required to operate piezo elements. Mechanical / PiezoHybrid Need for complex feedback system for large mechanical structure and piezo element operation

Common FTIR Interferometer Designs and Limitations

FTIR is applied to a variety of studies in industrial, government and school laboratories, and analyzes are performed on various samples, resulting in more advanced results compared to conventional methods. However, it has become clear that the movable mirror structure in the conventional sub-system has limitations in the design and structure of the FTIR which is more compact and portable. One possible solution attempted by Stezle, Tuchtenhagen and Rabolt ("Novel All-fibre-optic Fourier-transform Spectometer with Thermally Scanned Interferometer") is a fiber-optic FT spectrometer structure, which has no moving parts and is capable of performing infrared spectroscopy. will be.

In this feasibility study, trials have made it possible to fabricate interferometers in the near-IR (10000-5000 cm ⁻¹ ) range using optical fibers. Two carefully measured and isolated optical fibers are used as an optical path having one optical fiber having an ambient temperature while two optical channels or other optical fibers are repeatedly heated / cooled. Due to the change between the wavelength and the refractive index of the heated / cooled optical fiber of the optical fiber, the optical path difference (OPD) between the two optical channels causes interference in the combined channel. The heating / cooling cycle is used to generate an OPD of 3 cm and thus produces an interferogram with a calculated power spectrum.

However, the interference of the cranial beams in the optical fiber is known to be very complex due to thermal and mechanical state differences. In contrast, the conventional Michelson interferometer is that the cause of the optical path length difference is made from the geometric path length resulting from the movable mirror, and the optical fiber interferometer responds to changes in mechanical or heat in the operating environment, This causes the loss of necessary phase information. This can be concluded that the fiber optic concept is a good one, but more careful planning needs to be developed for the floating part of the IR device.

 In the literature review, it can be seen, as shown in Fig. 2, that another approach to the structure of the FT with floating portions was attempted without considering the band of visible light, near-IR, or IR. Such folding is using a focal plane array (FPA) that collects linear array detectors or interferograms. The design of the same approach can include projection of the center of the interferogram on the detector, using a "image" interferogram to calculate the power spectrum after Fourier series processing. One of the difficulties of this prior art is the range of the limited spectral response of the array detector size, the dynamic range of the detector and the range of limited interferograms that can be captured by the array detector.

Also, a rather mobile approach still relies on a thorough Fourier series calculation that leads to power spectrum. Thus, there is a need for robust, incoherent and floating spectrometers within the medium-IR range.

In addition to conventional Fourier series spectrometers, spectrometers based on dispersion provide a possible implementation. In this approach, optically dispersed elements such as prisms or diffraction gratings are used to separate the spectral frequencies present in the light emission. The dispersing element is rotated to allow various wavelengths present in the detected projection light.

Dispersion-dependent IR spectroscopy has become the most sought after instrument in the late 1960s due to its slow scan rate and lower sensitivity. This is well known for the scanning structure of dispersion spectrometers, such as movable prisms, which are limited in robustness and optical output. What is needed for scanning is derived from the fact that photon point detection is a method that can only be used during scanning, which is especially true within the IR range of the spectrum. Today, however, array detectors in the visible and near-IR ranges are widely used for area detection of photons. In the visible range, a CCD (CHARGED-COUPLED-DEVICE) with greater than 80% quantum efficiency (QE) has been made and used in many fields. As a result of these advances, CCD-based high performance spectroscopy systems in the visible and near-infrared ranges are commercially available. Such a system is optionally supplied to a conventional FT interferometer.

However, the range of scientific problems that benefit from IR research has increased significantly, and applications involving samples that change their position in the beam (vibration or fluctuations) during recording are routinely made using conventional FTIR devices. It cannot be addressed. The scanning structure of the FTIR device and the modulation result of the different optical frequency components are further changed by the samples whose position is shaken, thereby rendering only the spectrum information which is not useful.

For example, some techniques may provide structural information about LANGMUIR films. Infrared reflection-absorption spectroscopy (IRRAS) is a non-destructive technique that provides direct structural information on the phase filling or expansion of the Langmuir monolayer. The technique can provide information for a headgroup that depends on the tail of the hydrocarbon and the monitoring vibration mode having a frequency within the 4000-400 cm ^-1 region. Polarized infrared spectrometers are sensitive to the direction of the transition dipole moment, and IRRAS can be used to determine the orientation of different subcomponents of AMPHIPHILIC.

Therefore, in order to fabricate a langur-blodgjet (LB) film, the langur monolayer of the above-described AMPHIPHILIC polymer is first formed on the surface of the water, and the order of the thermodynamic state is the structure of the transferred LB film. Has a dramatic effect on Therefore, it is very important to understand the structure of the monolayer on the water surface under conditions where thermodynamics are well understood. One such condition is the condition of applying continuous pressure to the Langture monolayer film and generally the most accurate and reproducible thermodynamic dimensions are obtained during the process. However, pressure-independent IRRAS spectra are collected exclusively in the "STEP-WISE" method. In other words, the IRRAS spectrum is shown to correspond to the langur monolayer under continuous pressure.

IRRAS using conventional FTIR spectroscopy offers the advantages of a variety of devices for studying thin film films that are analogous to standard transition measurements, and the technology has some limitations. Inherently weak monolayer absorption bands result in relatively inferior signal-to-noise ratio (S / N) spectra, making it difficult to reduce environmental changes and spectral compensation for water vapor above the LANGMUIR TROUGH. Is attempted.

In the last decade, S / N, recognized in IRRAS experiments on dielectric substrates, has been progressively improved with advances in devices and optical interfaces. There are many ways to minimize the problem of water vapor compensation and include a shuttle transport system that allows for fine humidity control and sample troughs that repeatedly replace the reference troughs that allow samples and recorded spectra.

Another way to minimize water vapor compensation problems is to include the application of polarization modulated infrared reflection-absorption spectroscopy (PM-IRRAS). The polarization of the beam projected by PM-IRRAS is a fast modulation between the two orthogonal directions for the photoelastic modulator. The detected signal is a mathematical process that passes through a two channel electronic system and gives a differential reflection spectrum. In this theory, because of fast polarization modulation, the PM-IRRAS signal is lacking due to all polarization-independent signals such as strong water vapor absorption, device deviations and fluctuations.

Notwithstanding the above limitations, the IRRAS or PM-IRRAS technique is used in various studies of the langur monolayers and includes the study of fatty acids, phospholipids and phospholipid-protein monolayers. The technique is used to provide information on lipid structure, molecular tilt angle and head group structure as well as information on protein secondary structure and orientation. However, neither IRRAS nor PM-IRRAS can provide time resolved measurements of the Langmuir monolayers in 1 ms during 1 s, and no technique is known to provide multiple independent measurements simultaneously.

Therefore, the need for non-scanning devices with conventional transmission and detection of IR radiation cannot be stronger. For example, in areas where the need for on-line studies of micromechanical deformations in polymer thin films is applied during the process, structural studies of LED generation, and monitoring of the production of inorganic (Si, SiN) thin films on flexible polymer substrates are in sequence. Thus, there will be all the advantages from IR devices with floating parts, which will be more robust and portable. Such portable devices will facilitate material research by providing powerful new tools during thin film research, particularly thin film studies with the geometry of the sampling or remote sample positions that can be deformed.

Additional benefits during such bisscanning may include realtile devices within the IR range based on environmental monitoring, monitoring nearby armies or monitoring citizens during possible chemical or biological war attacks. Complex chemical compositions in any drug show strong IR absorption and can be easily demonstrated.

Invasion is made in spectroscopy by spectroscopy within the visible and near infrared range, but basically because of the progress in the previously described CCD detector, the FT device is superior in the use of the spectroscope in the middle of the far red line range, and thus Within this range the device will still be very limited by the operating environment of the interferometer.

In addition, all spectral techniques require the collection of reference spectra compared to those obtained from samples. In almost all cases, the two measurements are continuous and essentially double the measurement time. If this time is as long as obtaining the spectrum of a thin film or obtaining molecules in the hydrous phase, variations in device or sample conditions, such as temperature or humidity variations in the device or environment, can protect the compensation of the device background. have.

Therefore, creating a background in equilibrium rejection or compensation in instrumental variation and sample measurement reduces the overall time of spectral collection, preserves sample preservation in the case of "generation" or deflection, and "real time" in the collection plot. “Background or non-experimental environments can be created, providing additional benefits in terms of device portability.

As sample variation causes a significant drop in the signal-to-noise ratio within the conventional FTIR spectrum, there is a need for robust, compact and portable devices within the IR range that address specific applications.

In addition, there is a need for portable and reliable IR spectroscopy that requires multiplicity of simultaneous spectral measurements.

In addition, for the analysis of IR spectroscopic materials, devices and methods with real time, sensitivity, and relatively high resolution are needed, not relying on interferometers or mathematical Fourier series approaches, and vibrations and a wide range of temperature fluctuations. It is a relative sensitivity in the harsh environment, including, and it is necessary to provide a compensation ability for the background spectral component and element drop in real time.

Thus, there is a need for devices and equipment for collecting multiple independent spectra with background compensation and compensation of elemental generations, including orthogonally polarized measurements, and measuring time resolution on the Langmuir monolayer and time Decomposition molecular orientation measurements should be included.

Summary of the Invention

The present invention solves the above-mentioned problems by providing a robust, high resolution and sensitive apparatus and method for determining the background compensation IR spectrum of multiple samples without moving parts or mathematical Fourier series interferometer techniques.

PAIR spectroscopy offers several advantages over conventional FT-IR while applying various material properties.

Some embodiments of the present invention include the use of routine IR spectroscopy, the use of time resolved IR spectroscopy, the imaging of time resolved spectroscopy, the online monitoring of monolayer spectroscopy and processes in more advanced systems. The use of the PAIR spectrometer can be used to study the basic kinetics associated with weak and thin polymer films in an unchangeable environment.

The present invention discloses international patent applications PCT / US01 / 30724 and US patent application 09/09 for measuring two or more background compensation beams that can be at least partially possible using FPA (FOCAL PLANE ARRAY) having a relatively large area. It is an extension of the apparatus and methods contained in 984,137.

At least one of the multiple beam samples can be a background reference sample from which the spectrum of the background environment can be determined. This may allow for background data compensated from several samples collected simultaneously in real time or data compensated from several spatial locations within the same eye sample that may be collected simultaneously. In addition, an IR polarizer selected for the electric field component of the IR beam can be inserted into the optical path and thus supplied for simultaneous collection of IR dichroic data.

The use of multibeam PAIR spectroscopy can be used for film mapping in “real time” space for reliability to control applications within the process line. Due to the presence of water vapor in the optical path, compensation for environmental factors such as spectral compensation, and for sensor characteristics that can be frozen in real time, can be obtained in real time without complex computational processes. The spectrometer can be used for the detection of chemical toxins and, if combined with ANALYTE or bio specific reagents, can be used to detect biological factors in the environment such as viruses or bacteria. In addition, the multi-beam PAIR used in the apparatus and method of the present invention can be used to measure the contaminants of water, the dielectric film production of semiconductors and the direction of progress in polymer film production lines.

The present invention includes an apparatus for determining the IR spectrum of a plurality of sample materials using IR FPA technology to capture IR spectral information for each sample, without using a scanning structure or moving portion, and performing mathematical operations such as Fourier series or the like. There is no use of signal processing.

The above-described present invention is an apparatus for multi-IR spectrum information in space for a plurality of samples, the apparatus comprising: at least one light source; At least one sample holder for positioning a plurality of samples in the optical path; optical dispersing elements in the optical path; An optical dispersing element formed to intersect each of the plurality of samples along an optical path formed to correspond to radiated sample radiation from at least one IR light source, wherein the plurality of sample radiations correspond to a plurality of distributed sample light beams; And the plurality of distributed sample light beams correspond to one of a plurality of samples, the IR FPA detector having a plurality of pixels arranged in a plurality of columns and rows, arranged in an optical path, the IR FPA detector corresponding And at least one output for detecting a plurality of distributed sample light beams and representing IR spectral information for a plurality of samples.

In addition, the present invention provides a real-time non-interferometer device using an IR absorption phenomenon and a floating portion during the operation of performing a chemical analysis in a plurality of sample volumes simultaneously, comprising: a broadband light source; At least one sampling accessory for having a plurality of sample volumes such that at least some of the light is radiated from the broadband light source intersecting the plurality of sample volumes; Adjusting means for optically dispersing at least some of the light intersecting the plurality of sample volumes to obtain a plurality of corresponding distributed sample beams; A two-sided IR detector array (ARRAY) having a plurality of detector elements arranged in columns and rows; Optical coupling means for coupling a plurality of corresponding distributed sample beams to the two-sided IR detector array, the two sides controlling the IR detector array surface and at least absorbing within one or more particular wavelength ranges. Processor means for supplying non-interferometric chemical analysis of the plurality of samples based on the spectrum; Multiple corresponding distributed sample beams are projected in multiple columns of different areas of a two-sided IR detector array, and the multiple rows of corresponding row detector elements are two-sided IR detectors for determining the density of IR spectral elements at a particular wavelength in real time. IR absorption phenomena and immobility, which are added to each other within different areas of the array, and the signal-to-noise ratio of the signal representing the density of the IR spectral component at the particular wavelength is increased by adding the corresponding row detector element in the multiplex column. It is a real-time non-interferometer device using parts.

In the present invention, chemical analysis of multiple samples is also performed by determining the IR absorption spectrum of each multiple sample. The present invention thus comprises projecting radiation of at least a portion of a broadband light source to a plurality of sample volumes; Intersecting the plurality of sample volumes with radiation of at least a portion of the broadband light source; Providing a plurality of sample radiation corresponding to the optical scattering elements; Forming a plurality of distributed sample beams; Optically coupling a plurality of distributed sample beams corresponding to two rows of IR detector arrays, wherein a plurality of corresponding distributed sample beams are projected in multiple rows in different areas of the two-sided IR detector array; Processing each output from each detector in a plurality of ROW detectors in different areas of the IR detector array on both sides, with each COLUMN detector exhibiting a particular wavelength in each different area ; Evaluating the processed output from each detector to determine a plurality of samples of the IR absorption spectrum; And at least partially analyzing the chemical preparation of the plurality of samples by comparing the processed output with one or more reference specifications. It provides a method of performing a chemical analysis of a plurality of samples by determining a plurality of samples of the IR absorption spectrum comprising a.

The invention also includes a method for simultaneously determining multiple sample volumes of an IR spectrum using a non-interferometer device that can be operated using a floating portion. Therefore, the present invention comprises the steps of supplying an IR light source; Providing a plurality of sample volumes in the optical path; Radiation intersecting at least a portion of the plurality of sample volumes and the IR light source along an optical path forming a plurality of sample radiations; Optically dispersing the plurality of sample radiations to form a corresponding plurality of distributed sample beams; Detecting a plurality of distributed sample beams of spatially separated areas of a focal plane array having columns and rows of pixels; And evaluating the combined output from the spatially separated areas of the focal arrays to simultaneously and non-coherently determine a plurality of sample radiated IR spectra; wherein each row pixel is one of a plurality of spatially separated areas. Provided is a method for simultaneously determining multiple sample volumes of an IR spectrum that represent wavelengths contained within a combined one of sample radiation.

The invention also provides an apparatus for displaying, processing, and displaying IR spectral information for one or more samples. Accordingly, the present invention provides a plurality of IR light source; At least one optical dispersing element; Multiple optical paths; IR FPA; Processing means for processing the output of the IR focal plane array and for determining IR spectral information; And display means for displaying IR spectral information, each of the plurality of optical paths for collecting, processing and one or more samples to adjust a combined one of a plurality of reflected IR beams and a different spatial area on the IR FPA. To provide IR spectrum information.

The present invention also provides a method of determining anisotropic IR optical constants of a material. Accordingly, the present invention provides a method for manufacturing a substrate comprising: providing a substrate; Projecting an IR light source on the surface of the substrate at a non-vertical tilt angle; Transmitting the first transmission surface of the IR light source through the substrate; Coupling the first transmission surface of the IR light source to the first path on the optical path and the FPA; Providing a film material on the substrate; Projecting an IR light source on the surface of the film material at a non-vertical tilt angle; Transmitting the second transmission surface of the IR light source through the film material and the substrate; Coupling a second transmissive surface of the IR light source to a second path on the optical path and the FPA; Rotating a mirror in the optical path moving the second area on the FPA to coincide with the first area on the FPA; And determining a refractive angle in the film material by measuring a rotation angle of the mirror.

On the other hand, there are various ways to minimize the water vapor compensation problem while measuring the IR sample spectrum. In this regard, the present invention provides a PAARIRRAS (PLANAR ARRAY INFRARED REFLECTION-ABSORPTION SPECTROSCOPY) for measuring the direction of the thin film on the substrate, IR light source; Two orthogonal polarization filters for receiving the IR light beams from the IR light source; A pair of detectors; And a processor; wherein the two orthogonal polarization IR beams emitted from the two orthogonal polarization filters are reflected from the thin film and detected by a pair of detectors, the differential reflectance spectra are calculated by the processor, and the differential reflectance spectra are water An arrangement is provided for measuring the orientation of a thin film, including evaporation absorption, instrument absorption, and signal variation. The processor is used to calculate a differential reflection spectrum that determines the molecular orientation of the thin film.

In connection with the above, the present invention provides a method for determining the orientation of a thin film on a substrate. Accordingly, the present invention provides a method for producing an IR light source; Producing two orthogonal polarized beams from the IR light source; Detecting two reflected orthogonal polarization beams with a pair of detectors; Calculating differential reflectance spectra in the processor using the two orthogonal polarizing beams; Including but the differential reflectance spectrum provides a method for determining the direction of the thin film on the substrate including water vapor absorption, instrument absorption and signal variation.

In the present invention, a coupling direct lens (DIRECT LENS) through an aperture or medium-distance-IR optical fiber may be used to collect sample light emission representing a sample. The use of fiber optics provides the desired flexibility in the location of the device, and is used for remote sensing of chimneys and for easier performance of multichannel detection and chemical analysis.

The apparatus and method according to the invention do not require a moving part for determining spectral information. The method and apparatus may consequently be provided in relatively poor environments, such as high vibration environments in the manufacturing process.

Depending at least in part upon the results of the floating part structure, the method and apparatus according to the present invention may be characterized by a thickness, transmission or reflection mode, chemical structure and coating / film of a liquid surface, including but not limited to water, oils, solvents (solids). The thickness of a film electrically laminated on a solid substrate, including, but not limited to, metals and semiconductors, used in various industries to measure and detect directions of liquids, chemical limits, physical absorptions, Used in industry to measure fragrance and chemical structure.

The multi-beam PAIR spectrometer provides a conventional FT-IR interferometer with several advantages in the field of applying various important material properties, using routine IR spectroscopy, time resolved IR spectroscopy, imaging of time resolved spectroscopy On-line monitoring of monolayer spectroscopy and processes, and the use of the PAIR spectroscopy can be used to study the basic kinetics associated with weak and thin polymer films in an unalterable environment.

1 illustrates a conventional FTIR interferometer,

Fig. 2 shows the different configurations used in the conventional interferometer based on the Fourier series, which does not require the movable portion to occur in the optical path length,

3A illustrates an embodiment of the present invention in which a non-interfering IR spectrometer of multiple samples in one sample holder is made without using a movable portion,

FIG. 3B illustrates another embodiment of the present invention in which a multisample non-interfering spectrometer is made using a multiple IR light source and an optical path and no moving parts,

FIG. 3C shows the added optical path as an arrangement suitable for spatial multiplexing of multiple beams in the apparatus shown in FIG. 3B;

3D shows sampling with polarization,

FIG. 4 illustrates, as another embodiment, an IR optical fiber used for PELLIN-BROCA as an optically dispersed element and for coupling light within the field of view;

FIG. 5 shows the refractive index of Zn-Se and the light refractive index in PELLIN-BROCA of FIG. 4,

6 illustrates a shape suitable for real tile environmental calibration;

7 shows an arrangement suitable for measuring multiplicity of IR radiation reflected from a surface,

8 illustrates a three layered phase system representing a film on a substrate,

Fig. 9 shows a suitable arrangement in reflection / refraction used to determine the light constant of a thin film;

10 shows a suitable arrangement in the conventional PM-IRRAS,

Figure 11 shows a suitable arrangement of the present invention in PA-IRRAS.

DETAILED DESCRIPTION Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings so that the present invention may be easily implemented in detail by those skilled in the art. do. Other objects, features, and operational advantages, including the object, operation, and effect of the present invention will become more apparent from the description of the preferred embodiment.

One embodiment of the present invention is described with reference to FIG. 3A. Device 300 includes an IR light source 310 and is a general IR light source, for example tungsten lamps, NERNST GLOWERS or GLOWBARS or IR radiation from the sun. In a preferred embodiment the IR light source can be an IR emitter with a Zn-Se window, for example manufactured by Cal-Sensors. Preferably the IR light source 310 has a "flat" or has a constant form of intensity or at least a portion of the IR spectrum that intersects the IR spectrum. However, if the IR light source 310 is not of constant shape, then the non-uniform shape is revealed during the analysis process.

The adjustment aperture 320 is partly used to achieve the resolution of a device that opens to a smaller size than providing high resolution. The adjustment aperture 320 may be an annular iris, and preferably has an adjustable square slit of about 1 cm and an adjustable area of 0-2 mm. Such slits are manufactured by RIIC as the WH-01 model.

Sampling accessory 330 is located in one or more volumes and includes one or more samples to be analyzed in the optical path. Sampling accessory 330 in a preferred embodiment is used to form sampled small sample volume materials, such as polymer films, near-infrared light sources 310, or to include more sophisticated sampling volume arrays and to sample gases. Or hold multiple samples.

Gases have a lower density than solids or liquids and require a relatively more sophisticated sampling accessory with a mirror or other suitable arrangement provided to multi-pass the IR light source through the sample volume. As mentioned above, multipass is useful when sufficient optical density is obtained for an appropriately measured IR absorption phenomenon. Multiple pass arrays are used to monitor emissions from chimneys or harmful chemical emissions monitors and to monitor weather conditions in laboratories, military or industrial environments as in other embodiments.

Sampling accessory 330 comprises a lens comprising a telescope or microscope or a lens coupling one optical fiber or bundle of optical fibers.

As shown in FIG. 3B, the apparatus 330 can be used with a suitable lens that passes through the aperture 321 and the sampling accessory 331 and passes through the portion radiated to the second IR light source 311. Sampling accessories 330,331.

Optically, the dispersing element 350 receives the radiation portion from the IR light sources 310, 311 that pass through each sample volume and are reflected from the mirrors 340, 341. The IR spectrum representing the overall IR light source 310 is not a wavelength in the sample volume in the sampling accessory 330. The non-absorbed IR wavelength intersects and splits or scatters in one direction and intersects with the optical dispersing element 350 forming a scattered light beam, the wavelength being within the IR light exiting the sampling accessory 330.

Optically dispersing element 350 in the present invention has a predetermined turnover with 300 lines (or “grooves”) per mm and in this embodiment has a blaze wavelength of 4.0 μm. Such a turnover is manufactured by SPEX as a model 300g / mm holographic (HOLOGRAPHIC) turnover. Although not shown, there are two optical dispersing elements, arranged in almost one or more combined optical paths. The second optical disperser has 50 per mm and a blaze wavelength of 0.9 mm and allows two different spectral regions collected continuously on the FPA. It also uses more FPA surface area for signal analysis and allows for continuous analysis of multiple signals.

In another aspect of the invention, the optically dispersive element becomes a prism as shown in FIG. Device 400 operates similarly to device 300 as shown in FIG. 3A although changes in components are optionally present.

For example, the optical coupling means includes an IR optical fiber 410; Dish-type mirror 440; A concave mirror 442 and a convex mirror 444. The light projected by the IR fiber 410 includes light coming from the sample volume to be irradiated, or the IR fiber is used to irradiate the sample volume. The focus lens 360 is used to suitably project the light emitted from the prism 450 onto the germanium (GE) IR detector 370 in a preferred embodiment. The dish mirror is preferred when using an IR optical fiber to aim a circular unfinished optical fiber output light beam. The Pelin-Broca prism is used with optical coupling and IR light source 310 as shown in FIG. 3 and fiber optic embodiments. Conversely, assuming a suitable measurement aims at conical beam radiation from an optical fiber, a given diffraction rate is used with the optical fiber and the light is coupled to the system and the diffraction rate when an optically dispersed element 350 is used.

Although diffraction only provides adequate resolution for many applications, the Pellin-Broca geometry has three advantages: (1) Optical dispersion is only a function of refractive index at different wavelengths. (2) The TWO-IN-ONE prism design has a very high angle of dispersion efficiency, and about 90 ° of available folding beam results in a compact footprint of the optical system achieved. Allow. And (3) BREWSTER each projection shape can be used to maximize the transmission of light at the ambient / ZnSe interface. The latter is crucial within the IR range because the return loss is the major relation due to the high refractive index of ZnSe (∼2.4).

Based on the tray-tracing with the refractive index information shown in FIG. 5, it operates within the "SHOT-SIDE-ENTRANCE" geometry approximating to the booster angle (θ _B of ZnSe to 67.5 °). A 67.5 ° Pelin-Broca prism made from ZnSe will give a dispersion angle of about 6 ° between 3 and 13 μm wavelength beams. On-chip spatial dispersion between different wavelengths is determined by the focal lens used, the size of the Pelin-Broca prism and the f number of the system. Spans in the 500-1000 cm ⁻¹ spectral range are focused on horizontal FPA (256,320, etc. pixels). Since the number of pixels on the FPA is given along the direction of dispersion of the optical beam, the maximum resolution is about 5 cm ⁻¹ . However, when using other optical elements such as, for example, better groove gratings, resolutions better than 5 cm ⁻¹ can be easily detected in the spectrometer.

In addition to the Pellin-Broca prism design, a special diffraction grating optimized for medium-IR performance can theoretically be provided if the workload and dispersion are less desirable than the prism approach. However, the dependence of resolution on groove number and grating size will be suppressed in grating optical design. Therefore, when using a grating for a prism, alternative uses may be considered.

LOW-COST OFF-THE-SHELF lattice with the same relatively low groove number can be satisfied when many applications require higher resolution than can be achieved with prism. will be.

When using a prism or using a diffraction rate, the optical dispersion element 350 may be adjusted to the projection angle between the surface projected on the surface and the projection light. Such projection angle adjustment may be used to adjust the spectral bandpass appearing in the wavelength range or IR detector 370 described below.

The focus lens 360 couples light from the optically dispersed element 350 to an IR detector 370 having a plurality of detection elements arranged along a dispersion direction corresponding to the direction of the scattered light beam. In general, the projection light is projected onto more than one pixel column and the light projected from the optically dispersive element will be cover 20 pixels. The IR detector 370 is often used to detect scattered light from the optical dispersing element, provide output and determine IR spectral information of the sample in the sample volume contained within the sampling accessory 330.                 

In a preferred embodiment of the present invention, the IR detector 370 can be an InSb camera within the 3-5 μm wavelength range, for example a Merlin Mid model made by an Indigo system. Such a detector comprises a 320 × 256 pixel InSb detector and a 30 μm pixel pitch, 3.0-5.0 micron changeable cold filter; User selectable 15,30 or 60 fps (FRAME-PER-SECONDS) frame rate; Liquid nitrogen cooled diwer (DEWAR) with a minimum hold time of 4 hours; Noise equivalent temperature difference of NEΔT <20m Kelvin; User select completion time from 10 ms to 16.6 ms; Calibrated non-uniformity <0.1%. Within this range, the InSb detector expands portability and is thermally cooled. Such special InSb cameras are controlled by camera control, RS-232 with a graphical user interface, and by a standard Windows terminal communication program or a commercial interface such as a USB or IEEE 1394 standard interface. The camera also provides a bias that allows observation of automatic gain control (AGC) algorithms, adjustable detector gain and high and low brightness scenes. Data outputs include NTSC, S-Video, and 12-bit calibrated digital video. In addition, a focal lens 360 is provided, such as an IR detector 370, and commercially available, such as a 25 mm medium-length IR lens.

In another aspect of the invention, the IR detector 370 becomes a microborometer camera and is manufactured by an Indigo system as a Merlin UNCOOLED. This particular camera includes a 320 x 240 pixel microborometer detector with a 51 micro pixel pitch in the 7.5-13.5 microspectral range. User selectable frame rates of 15,30 or 60 FPS are possible. The device is thermally stable (TE) at 313K in contrast to InSb cameras and has a noise equivalent temperature difference of NEΔT <100 m Kelvin and user selectable completion time from 1-48 Hz.

The detector array is controlled in the same manner as the InSb arrangement as described above. Similar detector gain control and data outputs are available as in the InSb model.

In addition, in another embodiment of the present invention, the mercury-cadmium-tellurium HgCdTe (“MCT”) array is used as an IR detector 370 and has improved sensitivity and bandwidth compared to InSb and microbolometer devices. . At present, such arrangements are difficult to manufacture and are more expensive than available IR detectors. The use of MCT FPAs with frames up to 6000 Hz results in one beam spectrum controlled every 170 ms and a completion time as low as 10 ms.

The detector's InSb and microborometer forms are thermally cooled, but the InSb FPA's sensitivity is higher than that of the microborometer. In fact, the sensitivity for InSb FPA is superior to the liquid nitrogen-cooled MCT detector used in conventional FTIR. On the other hand, the sensitivity of modern microborometer FPAs is orders of magnitude smaller than liquid nitrogen-cooled MCT detectors. However, the sensitivity at the performance level of liquid nitrogen-cooled MCT detectors is not always necessary in many applications, and it is possible that the lower sensitivity of the microborometer does not cause a significant efficiency problem in the device. In addition, the advantage of using FPA can be put in the longitudinal binning as compared to a single element detector. By adding a signal from the finite height of the pixel, the SNR can be significantly increased.

In another embodiment of the present invention, the optical path or optical coupling between the various elements of the apparatus 300 is connected to the IR detector 370 through the optically dispersed element 350 and the focusing lens 360. Standard IR mirrors 340, 341, 342 of various shapes that couple light from IR light sources 310, 311 through sample volumes therein. The shape includes multiple sampling accessories or polarizers. The mirror is an aluminum mirror with a front surface of 3 inches (7.6 cm) manufactured by NEWPORT COPORATION. Other mirror coatings available in the IR band may be copper and preferably gold.

Figure 3C shows in more detail the arrangement shown in Figure 3B, as shown. For example, the beamlens are arranged and adjusted to present images from samples disposed differently on the optically dispersed element 350. This results in the efficient division of the IR FPA detector 370 into other areas in the sample radiation. In addition such segmentation is used as additional IR light source and / or sample. Known methods are used to address selected columns and / or rows of FPAs.

The radiation from the IR light sources 310,311 intersects with the background reference environment arranged along the light path providing the background reference radiation. The IR FPA detector preferably detects the background reference light beam results scattered over the area of space forming the given sample radiation.

The processor preferably receives the output from the FPA comprising a signal indicative of the distributed background reference light beam and effectively determines the compensated IR spectral information for a plurality of samples by measurement in the background reference environment in real time.

In another embodiment of the present invention, referring to FIG. 3D, the first and second polarizers 335 and 336 are orthogonally polarized with respect to each other, and are provided in an optical path that receives separated IR radiation and are provided by an IR light source 310 or 311. Can be provided. Passing through the sample held by the sampling accessory 330, the resulting first and second polarized sample radiation are coupled along one or more light paths intersected with the optical scattering element 350 and the FPA detector 370. Is projected on. Optionally, a beam splitter (not shown) is combined with the polarizer and used to obtain two orthogonal flat beams from the IR light source beams. The first polarized sample radiation is orthogonally polarized with the second polarized sample radiation. The orthogonally polarized light beams are used to determine the molecular orientation of the polymer film by comparing them with the intensity of each other or experimentally polarized beams.

As described above, the IR FPA detector detects the correspondence with multiple scattered light beams in the spatially separated area of the IR FPA detector.

In all embodiments of the present invention, the IR FPA detector detects a plurality of distributed sample light beams and at least one output of the FPA that determines IR spectral information due to the plurality of samples at the same constant in time. In addition, the FPA preferably comprises InSb, HGCdTD (MCT) or microborometer FPA, or preferably detects light having a wavelength in at least the medium range IR band.

In another embodiment of the invention, the IR FPA detector detects an IR camera. Ab InSb Focal Plane Array (FPA) is used to detect absorption within 3-5 μm and FPA based on microborometers is used for the 7-13 μm range. In addition, MCT arrangements or other InSb or other forms of arrangements with broader or different spectral responses can be used. In addition, at least one output from the IR FPA detector includes a plurality of rough pixel outputs at a plurality of wavelengths present in the distributed light beam. Multiple combined pixel outputs at one of the multiple wavelengths improves the signal-to-noise ratio of the signal representing an intensity of one of the multiple wavelengths.

In another embodiment of the present invention, the IR FPA detector is divided into multiple segments that include different portions of multiple pixels. Each corresponding multiple distributed light beam is projected to a combined one of multiple segments. The splitting of the IR FPA is not necessary to respond to the actual physical partitioning in hardware, but rather using a known technique for addressing the columns and rows of pixels on the IR FPA using relatively simple software control between the processor and the IR FPA. Will be.

In the present invention, the corresponding multiple distributed sample light beam, the column direction on the IR FPA detector, is projected on the IR FPA detector such that the direction of dispersion of the corresponding multiple distributed sample light beam is aligned. Each row of focal plane arrays within multiple segments corresponds to light of a particular wavelength contained within a plurality of distributed sample light beams.

In addition, within at least one of the multiple segments, the output from one pixel in the multiple columns is added to combine along a focal plane arrangement that improves the signal-to-noise ratio of the signal representing the intensity of the combined light wavelength.                 

In addition, in another embodiment of the invention a distributed sample light beam that is combined with different spatial portions of one of the plurality of samples is projected in two or more multiple segments. Different wavelengths appear within at least two of the multiple segments, whether imaging different portions of a sample or imaging different samples in multiple segments.

In another embodiment of the present invention, at least one of the plurality of samples includes a background target (TARGET) comprising analyte (ANALYTE). The analyte is selected to react with a particular form of biological agent (AGENT) that produces a change in IR absorption in the background object.

For example, the analyte becomes a biospecific reagent that reacts with one or more biohazardous materials such as viruses or bacteria.

As shown in FIG. 3B, at least one sample holder or accessory includes a plurality of sampling accessories, the plurality of sampling accessories having different sample volumes of the optical path. The device simultaneously determines IR spectral information of each different sample volume. The same sample holder is suitable for the detection of IR absorption manifestations in the optical path.

In another embodiment of the present invention, a plurality of optical dispersing elements 350 are preferably provided to form a plurality of scattered light beams corresponding to different sample volumes. Each multiple scattered light beam will be projected in different spatial areas on the IR FPA detector 370.                 

In another embodiment of the invention, it is preferred to provide a display device for displaying an IR spectrometer for one or more multiple samples, a means for controlling the IR FPA detector and a display device. Preferably the means for controlling the IR FPA detector and the display device comprise at least a processor or a personal computer.

In addition, in the transmission mode, the IR light sources 310 and 311 are transmitted through a plurality of samples along the optical path. In reflection mode, transmission from the IR light source will be reflected from each of the plurality of samples along the light path.

In another embodiment of the present invention shown in FIG. 4, the optical path includes using an optical fiber or an optical fiber bundle, in particular the multimode IR optical fiber is C1-500 manufactured by AMORPHOUS MATERIAL INC. The same different sample shapes and sampling shapes allow the combined medium-distance IR fiber to deliver the IR light source to the sample volume between the light source and the dispersing element and the medium distance to provide the optical path for IR light after absorption in the sample volume of the dispersing element. Allow IR fiber.

Optical fibers having a loss of 1 dB / m or less in the mid-IR range (including 3-5 or 7-13 μm) are commercially available. Such multimode optical fiber provides features such as elasticity and flexibility as based on the optical fiber counterpart within the visible light and near-IR range. The thermal and mechanical properties of the optical materials are greatly improved over the past decade.

When the FPA detector and the multi-channel fiber bundle are combined, it is possible to measure several samples or the same sample at different locations. The proposed spectrometer means provides multiple detection channels with a single device, thus reducing COST-OF OWNERSHIP per channel basis. In the general structure shown in FIG. 4, the off-axis dish mirror 440 is used to collect and aim signals from the output of the incoming aperture or IR fiber 410 or fiber bundle. Adjusting aperture 420 is used to control the aimed beam size, and charging lenses 442 and 444 are used to couple the signal into the prism. The combination and aperture size at which the lens fills the beam determines the f number of the spectrometer and the spectral resolution.

The processor 480 is a special purpose computer specially equipped for IR spectrum processing, and is performed by an IC such as so-called "FIRMWARE" or ASIC (APPLICATION SPECIFIC INTEGRATED CIRCUIT), and commonly used PC (PERSONAL COMPUTER) Include. Processor 480 is provided to control software / hardware for IR detector 470.

In another embodiment of the present invention, using one of the above-described FPAs, a "TALON ULTRA" data collection device manufactured by INDIGO SYSTEM may be used.

Processor 380 runs with the provided IR image acquisition device, 500MHZ Pentium III, 256MB RAM, 12G hard drive, Windows NT 4.0, IR camera digital interface cable (10ft or 3M), high speed 16-bit frame grabber (GRABBER), camera interface Software and image analysis software based on Image Pro 4.0 or such software.                 

The display device 390 may be a standard computer monitor such as a CRT or LCD, or may be a printing device.

In a preferred embodiment, the memory of the PC system for data collection is used, but if there is a special purpose, the proposed fast memory may be used. In addition, the processor 380 at 480 may be combined with a laptop or notebook with an LCD coupled to add portability.

In a preferred embodiment, the software running processor 380 or 480 includes a real time histogram; Real-time digital filtering, real-time frame averaging, user-definable ROI (REGION-OF-INTEREST); Data display of all functions, reduced analysis compatibility; And VISUAL BASIC compatible macro language for automatic data collection, analysis and reporting.

In this application, the "real time" is preferably less than 1 second from initialization through sampling and analysis, more preferably less than 500 ms, and more preferably less than 20 ms. This type of response time leads to desirable results overcoming conventional scanning and interferometer techniques. In addition, "real-time" detection means the ability to continuously monitor a process as it can happen, and the time domain between the collected data sets is generally in the range of 5-100 ms.

Additionally, the analysis software operates within processors 380 and 480 that analyze IR spectral information and is based on one or more specific groups or chemically based on the same volume, such as fluorocarbons, hydrocarbons or complexes by molecular bonds. Determine the "signature" functional group or biological reagent. In addition, alarms and audible or visible signals can be obtained if a particular signature group or chemical composition is determined within the sample volume.

Some of the contents of the apparatus 300,400 may be adjusted to facilitate setup or supplied for optimal data collection, and the apparatus 300,400 may determine IR spectral information that does not use a floating portion during operation.

A non-interfering device of a first embodiment of the present invention is operable to provide an IR light source to determine an IR spectrum of a sample in the sample volume, the method comprising: supplying an IR light source; Providing a plurality of sample volumes in the optical path; Radiation intersecting at least a portion of the plurality of sample volumes and the IR light source along an optical path forming a plurality of sample radiations; Optically dispersing the plurality of sample radiations to form a corresponding plurality of distributed sample beams;

Detecting a plurality of distributed sample beams of spatially separated areas of a focal plane array having columns and rows of pixels; And evaluating the combined output from the spatially separated areas of the focus arrays to simultaneously and non-coherently determine a plurality of sample emitted IR spectra. In a more preferred method, a detector array having two sides, such as FPA, is operated, each row of detectors representing wavelengths contained within a scattered IR light beam, and at least two columns of detector elements are used to improve the SNR of the detected signal. Is used.

Before the device is used reliably, the IR light sources 310 and 311 are known to compensate for the spectral intensity that is calculated or intersects the benefits of the band to make the light source intensity not constant.

Conventionally, the light source calculation process includes a series of processes for collecting a background power spectrum without sample volume in a lens; Collecting a sample power spectrum; Dividing the sample power spectrum by a background power spectrum that determines the sample intensity / background intensity or transmission for all frequency positions reported by the device (forming a constant ratio); Typically the data is processed by an algebraic operation to determine ABS (ABSORBANCE SPECTRUM) such as ABS ∝ -log ₁₀ (sample / background).

However, in the multi-beam approach according to the present invention, the light source and the environmental calculation can be performed simultaneously with the sample radiation detection. Processors 380 and 480 effectively compensate for sample measurements in real tyes using light sources and environmental calculation data.

When the absorption spectrum is determined, the presented apparatus and methods are used in environmental prose monitoring to measure the thickness of a solid or the thickness of a liquid film or to coat other solids or liquids.

Based on the general operating process described above, the absorption spectrum of the sample is obtained by the present invention. The amount of ABS can generally be expressed as follows.

ABS = A × B × C

A is the absorption coefficient of the absorption functional group in the sample, B is the path length in the sample, C is the concentration of the functional group. In general, the quantitative relationship is known as "BEER'S LAW".

Concentration and thickness measurements can be made using standard samples with concentration C and thickness B to calculate the absorption coefficients for the vibration bands known by the sample. A is known as an absorption band, and BEER'S LAW can be used to measure concentration or thickness.

For example, in a film processing line, if the material formula is fixed at a constant, the corresponding C and A values are constant. In this case, the present invention can be used because it monitors the film thickness and the absorption level is directly proportional to B. On the other hand, in the chemical vapor processing chamber of a semiconductor, the concentration depending on the gas type is determined by the concentration of A (known type) and B (fixed chamber size), which are fixed constants and are directly proportional to the measured absorption. As it is, it can be measured with the present invention.

The direction measurement can be made by the following method. When unpolarized IR light is used within IR measurements, all functional groups that match the oscillation frequency will be the source of absorption. However, when the projected IR light is passed linearly through the oscillating electromagnetic wave wavelength in a particular direction, a double moment change in the same direction as the matching frequency and the polarized light absorbs the projected light.

In samples where the RANDOMLY direction is set, all dual directions are sampled equally, and independent of the polarization direction is observed. On the other hand, in the sample having the preferred direction generated by the processing step, stronger absorption will be achieved when the polarization direction matches the sample double change direction. Compared with absorption spectra with polarized and unpolarized IR light sources, one can infer that the sample under study is oriented.                 

Infrared polarization can often be achieved using gold wire polarization prisms. The optical device may be constructed by separating gold wires arranged in parallel to an IR transparent substrate such as ZnS.

The quantitative relationship between the polarization direction and the sample double direction can be expressed as follows.

ABS _Observed ∝ COS (Θ)

Is the angle between the double moment change direction of the sample during the polarization direction of the vibration and the projection IR light. In the above equation, when Θ = 90 °, absorption will not occur if the vibrational frequency condition is satisfactory.

In another embodiment of the present invention, an additional method includes adjusting the optical dispersion over a plurality of sample orientations to control the wavelength range within the plurality of distributed sample beams. Generally

The angle of projection on the dispersing element 350, such as diffraction, or on a prism 450, such as a Pelin-Broca prism, can vary the wavelength range presented to the IR FPAs 370,470.

In addition, the method according to the present invention involves increasing the signal-to-noise ratio by adding multiple pixel outputs to each row of pixels to one of the spatially separated areas.

As described above, in another embodiment of the present invention, the present invention comprises the steps of simultaneously evaluating the reference spectrum in the environmental background; And modifying multiple samples of the calculated IR spectrum for reference spectra in an environmental background. The method includes simultaneously evaluating the spectrum of the IR light source; And modifying a plurality of samples of the calculated IR spectrum for the spectrum of the IR light source.

According to another embodiment of the present invention, a method according to the present invention comprises the steps of: processing multiple sample emissions of the IR spectrum to clarify one or more signal functional groups within the plurality of sample volumes; And enabling an alarm if one or more signal functional groups are found within one of the plurality of sample emissions.

In connection with the method of the present invention described above, the method according to the present invention comprises the steps of providing a TARGET having a bio-specific reagent; And reacting the sample volume comprising one or more signal functional groups with the bio-specific reagent.

According to a further embodiment of the invention, the method according to the invention is relatively in motion relative to the broadband light source, the optical dispersing element and at least each during the project phase, the crossover phase, the coupling phase, the formation phase and the optical coupling phase. Holding the two-sided IR detector array.

The optical coupling step includes the optical fiber coupling step of the sample light emission and / or the projection step includes optically coupling the radiation portion of the broadband light source to a plurality of sample volumes.

According to a further embodiment of the invention, the method according to the invention comprises at least one physical property which is determined effectively and continuously in real time of one or more multiple samples from one or more multiple samples of the IR absorption spectrum. Determining the physical properties, which are effectively and continuously determined in real time. The physical property is obtained by comparing two orthogonally polarized sample radiation comprising one molecular orientation of the plurality of samples and combined with one of the plurality of samples. The physical properties include measuring the monolayer polymer film thickness in real time, in particular.

In addition, each of the plurality of IR light sources 310 and 311 has different intensities and one or more optical paths include polarizing elements.

According to another embodiment of the invention, the processing means is a means for determining the molecular orientation of the polymer monolayer from IR spectral information determined from different spatial areas on the IR FPA, in particular an orthogonally polarized sample. Emissions are evaluated.

According to another embodiment of the invention, the method according to the invention comprises the step of calculating the refractive index and the absorption coefficient of the film material. The substrate includes a dielectric substrate having optical properties used in semiconductor processing. The monolayer film will be absorbed onto the substrate.

The method of the present invention in such an embodiment comprises projecting an IR light source to the surface of the substrate at a plurality of non-vertical tilt angles; And determining the angle of refraction in the film material by measuring the angle of rotation of the mirror for each of the plurality of non-vertical tilt angles.                 

Additionally polarized IR radiation is projected through the film material and the substrate; Determining a specific refractive angle of directivity in the film material; And calculating a specific composite index of refraction of the film material; Includes in addition.

In relation to the method of the present invention described above, the molecular orientation of at least one molecular group in the film material is determined by the method of the present invention.

Using the PAIR spectroscopy apparatus and method according to the invention, it is possible to perform external reflection measurements with compensation of the real-time background. In another embodiment of the present invention, a thin TEFLON barrier is inserted into the LANGMUIR film balance to create two separate TRUGHs as shown in FIG. The smaller of the troughs is used as the reference trough, while the larger trough is used as the sample trough. The center of the relatively wide infrared beam (4 or 5 cm) is reflected at the point where the two troughs separate at the Teflon barrier.

Half of the IR beam is reflected by the reference subphase, while the other half of the beam is reflected by the monolayer covered subphase. The results in these separate "samples" (above the FPA) and "reference" (below the FPA) spectral images are projected simultaneously to the FPA pixel array (shown in Figure 3C). In this method the spectrum obtained from the top of the column of pixels will contain information on the Langture monolayer, while the spectrum from the bottom of the column of pixels will contain data from the substrate or reference surface, for example, Can be.

In another embodiment of the present invention, the polarized infrared spectrum is obtained by measuring a sample, for example a film, through a polarizing element using transmission or reflection of the IR beam, wherein the beam is managed directly through the dispersing element. Optionally, radiation is split in the splitter, where each split beam passes through two different orthogonally polarized elements in each optical path and passes through a sample or samples that determine the polarized specific information.

Each polarized beam is dispersed by an optical scattering element such as diffraction or prism. This dispersion results in two orthogonally polarized beams that allow simultaneous imaging of different columns of the FPA detector. The polarized infrared spectrum is therefore available from the same location on the film at the same point in time, for example allowing the determination of the time resolved dichroic ratio.

Four spectral images (S-polarized reference, P-polarized reference, S-polarized sample and P-polarized sample) are simultaneously projected onto the FPA. The direction value is determined by comparing the measured dichroic ratios with the theoretical dichroic ratios obtained from the simulation or handbook.

In addition, in thin films such as lang coeur films, time resolution measurements during SUB-MILLISECOND times are obtained during recording of pressure area isotherms to the advantage of polymers using signal averages. The multispectral imaging characteristic of the PAIR device provides a continuous molecular picture of the order and direction at all points along the isotherm to provide the monolayer's S- and P-polarization spectra (compared to P-polarized emission) during compression. Significantly higher reflectivity during S-polarized radiation).                 

In another embodiment of the invention, when using a PAIR spectrometer, external reflection measurements are made simultaneously using multiple projection angles. An arrangement diagram is shown in Fig. 7, in which small mirrors or optical fibers are used to simultaneously collect multiple IR beams produced by multiple IR light sources. The separated infrared isolated beam is directed to different areas of the incoming slit in the aperture portion of the device. This process produces multispectral images at different locations on the FPA, each image corresponding to a different projection angle. The exact molecular orientation of the Langture monolayer is determined using multiple projection angles. The additional strength of the PAIR device provides for the precise determination of molecular orientation in the study of the langur polymer monolayer properties.

In another embodiment of the present invention, the molecular direction of the thin film using the polarized infrared spectrum of the thin film is determined. Some of these techniques are known, but an understanding of the constants (index of refraction and extinction coefficient) of anisotropic IR lenses during IR external reflection measurements from dielectric substrates is required. This information is not easy to obtain.

Historically, attempts have been made to obtain an anisotropic refractive index using IR ELIPSOMETRY. The use of this technique is generally limited to determining the optical constants of very simple molecules, and the area and orientation can be easily deduced from the model. Another method uses IR spectrometer transmission to obtain external reflection, ATR (ATTENUATED TOTAL Reflection) or lens constant.

A more accurate method of IR spectroscopy is to use the interdependence of the refractive index and extinction coefficient for the KRAMERS-KRONIG relationship according to the FRESNEL equation to obtain the lens constant. Unfortunately, such a method requires some premise that can affect the reliability resulting in the composite index of refraction. This can be underscored from the fact that many researchers use isotropic lens constants obtained from data in papers, measurements in bulk, and further reduce the reliability of directional measurements. A more reliable technique for determining infrared lens constants using the same infrared spectroscopy used in thin film analysis is more desirable.

일 때 ħ_j = n_j ＋ ik_j 이다.In this technical aspect, the PAIR spectrometer according to the present invention is applied to determine the anisotropic lens constant of the thin film. The monolayer film absorbed into the dielectric substrate from one lens perspective as structurally shown in FIG. 8 can be considered as a layered three phase system. j^th Phase lens characteristics are composite refractive index_j Characterized by n_j Real refractive index, k_j Is the absorption coefficient. I =                     

                     When ħ_j= n_j+ Ik_jto be.

The film thickness is expressed as d and is as small as one molecule, ie monolayer. When the values ħ ₁ ħ ₃ and d are known, the PAIR spectrometer has n ₂ , k _2, ie, the lens constant of the monolayer film. Film thickness is easily determined by known ELIPSOMETER, and ħ ₁ (air) and ħ ₃ (common dielectric substrate) are known in value.

9 shows the reflection and refractive index of infrared radiation projected onto a dielectric substrate, where E is the intensity of the reflected radiation (given frequency); E 'is the intensity of transmitted (refractive) radiation, the projection angle is the same and easily measured, and θ ₂ is the refractive angle. In the present invention, it is possible to measure E, E 'and θ ₂ . The angle θ ₂ is measured by being described below.

first. A clean dielectric substrate is provided horizontally at the same position (see Fig. 9). Any IR light source will be transmitted through the dielectric substrate at an angle appropriate to the general surface, and the light source will penetrate the FPA of the specific area "A". The same dielectric substrate has an absorbed monolayer film and is provided at the same location. The plane mirror is rotated until light passes through the same area "A" of the FPA. The angle of refraction is determined by accurately measuring the amount of mirror rotation required to return the transmitted IR returned to the area "A".

The values of E, E ', θ ₁ , θ ₂ , ħ ₁ , ħ ₃ and d are well known for several projection angles, and monolayer films (n ₂ and The lens constant of k ₂ ) is determined using the FRESNEL equation and known iterative processes. The use of multiple projection angles θ ₁ improves the accuracy of such a decision.

Spectrometers and segments used in industry face a problem of compensation for water evaporation in optical paths. There are several ways to minimize the problem of water vaporization that affects the measurement of the sample spectrum. For example, as shown in FIG. 10, a conventional PMLARIR (POLARIZATION MODULATION INFRARED REFLECTANCE- ABSORBANCE SPECTROSCOPY) using FTIR is used. Conventionally, in PM-IRRAS, initially polarized projection FTIR light beams (e.g., wire grid polarizers) UNDERGO under fast elastic modulation between two orthogonal polarization directions by photoelastic modulators. The detected signal is a process that passes through two channels of electronic systems and gives mathematically different reflection spectra. Due to the fast polarization modulation, PM-IRRAS different reflection spectrum signals are effectively deprived of all polarization independent signals, such as strong water vapor absorption which is variable in isotropy, device drift and signal strength. However, this approach relies on moving parts and mathematical Fourier series approaches.

In at least some of other embodiments of the present invention, a non-interfering PAIR arrangement in PA-IRRAS for measuring the orientation of a thin film on a substrate comprising an IR source in FIG. 11; Two fixed quadrature polarizers 335 and 336; There is a problem of calculating water vaporization as shown in a PAIR detector comprising a processor and a display.

The orthogonal flattened beam is reflected from the thin film and detected by the PAIR detector. The processor calculates different reflection spectra based on analyzing orthogonal polarization signals received by the PAIR detector. The different spectra are free from polarization independent signals including isotropic water evaporation absorption, device drift and signal variation. Because such effects are effectively canceled by different techniques. The different reflection spectra are additionally used to determine the molecular orientation of the thin film. The polarizing molecule becomes a photo-carbon component, for example, FPA may be InSb FPA, MCT FPA or microbolometer FPA.

As described above, the apparatus and method according to the present invention include the steps of measuring the thin film properties and including the lens constant, and is widely applied to various industrial fields and environmental processes.

Some additional devices include, but are not limited to, semiconductors, metals, and dielectrics, including thickness measurement methods, chemical structures, and methods of measuring coating (solid, liquid, chemical limits, physical absorption) directions on solid surfaces. .

For example, in modern material processing used in manufacturing equipment, subtle differences in the processed material on the molecular level can determine success or failure of a particular process. Molecular parameters such as crystalline order, chain direction and hydrogen bond strength have important effects on the function of the final device. For example, liquid crystal display devices used in notebooks depend on the chain direction of the polymer coating used on the glass template, which defines the "off" direction of the liquid crystal molecules.

However, the direction of each polymer chain is produced by a "BUFFING" process while the velour patch is used to rub the polymer-coated glass within a given direction to induce the chain direction. Although it is well known that the yield of a flat panel display manufacturing line relies on a successful boosting process, there is no monitoring process used during the various manufacturing stages that can access the chain direction induced by the boosting before the final assembly is completed. . Therefore, glass templates with poor LC aligning properties are not removed from the assembly line until the manufacturing process is complete. The wasted cost of a failed assembly display is much higher than removing polymer-coated and buff-glass-plates with insufficient alignment properties. In fact, the main difficulty in a more quantitative control process is the inability to reliably detect detection methods that can make use of advanced operating conditions based on manufacturing plants.

Process methods such as scanning probe microcopy and X-RAY diffraction can be destructive in practice because they require long data collection times and sample removal from the production line. As a result, the real-time statistics needed for successful online process monitoring methods are not available in the prior art. The apparatus and method according to the present invention allows a non-destructive monitoring process in real time. For example, information about the chain direction of a large area sample can be obtained after the buping process is completed.

In addition, because of the multi-beam approach, different sample areas or different samples of the same sample are monitored simultaneously, while compensation for the background spectrum and generation of elements are effective in real time.

The inventors of the present invention have included the study of liquid crystal alignment using different organic, inorganic and polymer surfaces and have shown detailed views of template surfaces that play an important role in order, direction, shape and final LC direction.

Environmental applications of the use of IR spectroscopy in water environments, such as lakes, rivers or seas, allow the detection and measurement of oil or other inclusions on surfaces using reflected IR energy to determine the presence and absence of specific functional groups. This can be

In addition, since the IR spectrometer is very mobile, it can be used as a water pollution monitor and operated in the above-mentioned field. The spectrum coverage of the present invention will be able to detect spectral features in the fingerprint region with the most fragrance contamination. IR bands (1600-1750 cm ^-1 ) that can be assigned to water cannot interfere with contamination signals within the spectral range, and bulk analysis of wasted water is possible with the device.

In addition, the present invention has described the use of a spectrometer for the thin film. Many optical, mechanical and generational properties of polymers have a direct function in order and shape and occur during processing. On the other hand, when the polymer is formed into a thin film, it can be seen that there are orders in the aromatic structure and time. The ability to structurally characterize the properties of polymer chain structures due to the use of real-time IR spectroscopy allows the optimization of processing protocols by providing control of the crystallization and orientation settings in the micromechanical direction.

In many cases, it is simply indicated by a specific IR band that can provide a TRANS or GAUCHE bond or simply by a crystalline or amorphous material. The frequency and intensity of the IR bands, such as the following thin film processing (heating, stretching, cooling), are intended to pursue the orientation and crystal shape of the molecules as they occur.

Another embodiment of the present invention is to measure a series of poly thin film. There are many studies in the literature on POLY ETHYLENE TEREPHTHALATE (PET) PRE-AND POST-PROCESSING, and no studies on PET during processing have been reported. In addition, some work has been done on the structural side of PEN (POLY EHTYLENEAPHTHALATE). Since the pioneering commercial market for PEN is a specialty film, understanding of the various parameter effects on properties is fundamentally important and relevant because of the improved thermal and dielectric properties associated with PET.

In a conventional study of PET after stretching, the bands at 973 and 1041 cm ^-1 previously assigned for trans and gouch identification of the OCH ₂ CH ₂ O group were shifted in intensity (993 cm ^-1 shift in frequency after stress application). ) Is changing. This suggests that stress converts the Gouch bond into a trans, but this indicates that the total sample crystallinity does not increase. This fact also requires the use of the 848 cm ^-1 CH ₂ ROCKING vibration characteristics of the TCONFORMER in the crystalline region based on the function of stress and increasing to 973 cm ^-1 increased.

Similar activity is observed in the 1386 cm ^-1 CH ₂ wagging mode, which is observed to characterize trans bonds in the PET crystal region. -OCH ₂ CH ₂ O- group is used between the fragrance groups at the frequency change of 973,1041,848 and 1386cm ^-1 bonds to understand the processing parameters that affect the development of polyester chain, strength monitoring and direction. Commonly linked, there is all the trans content and crystallinity between PET and PEN film. In addition, the PET and crystal Localization and changes, while the direction followed by the own use of the C = O overtones (OVERTONE) vibration in 3200㎝ ^-1 2870 and CH stretching mode in 2850㎝ ^-1 in the direction in the PEN Can be changed.

In addition, industrial applications of the device according to the present invention include coatings / films (solids, liquids, chemical limits, physical absorption) on surfaces of liquids, including but not limited to thickness, transmission or reflection, chemical structure and water, oil solvents. ) A method of measuring or detecting).

Although in various embodiments of the present invention the direction of determining IR spectral information has been presented, the apparatus and method of the present invention is not limited to some embodiments. For example, the present invention has been applied to the industrial and environmental processes described above and controls one or more physical properties during polymer film thickness or semiconductor processing, e.g., measuring multiple samples simultaneously and compensating for background radiation. It can be applied to a control system in a batch production line.

The present invention can be modified in various ways. For example, certain optical elements may vary at a particular location with the sample volume or IR light source. Such changes are not to be regarded as having arisen from the spirit and technical spirit of the present invention, but the above-described modified embodiments are obviously one of the techniques included in the following claims. The spirit and technical scope of the present invention will be limited only in the appended claims and equivalent embodiments thereof. In addition, the embodiments disclosed herein are only presented by selecting the most preferred embodiment in order to help those skilled in the art from the various possible examples, the technical spirit of the present invention is not necessarily limited or limited only by this embodiment, Various changes, additions, and changes are possible within the scope without departing from the spirit of the present invention, as well as other equivalent embodiments.

Claims (88)

In the apparatus for multi-IR spectrum information in space for a plurality of each sample, At least one light source; At least one sample holder for positioning a plurality of samples in the optical path; Optical dispersion elements in the optical path; Including but not limited to: Radiation from at least one IR light source intersects each of the plurality of samples along an optical path formed to correspond to the sample radiation The plurality of sample radiation intersects with an optical scattering element formed to correspond to the plurality of distributed sample light beams, the plurality of distributed sample light beams correspond to one of the plurality of samples, and the IR FPA detector comprises a plurality of columns and rows. Arranged in an optical path with a number of pixels arranged in Wherein said IR FPA detector detects a corresponding plurality of distributed sample light beams and provides at least one output representing said IR spectral information for the plurality of samples. The apparatus of claim 1, wherein the optical scattering element is a diffraction grating. 2. The apparatus of claim 1 wherein the optical dispersing element is a prism. 4. The apparatus of claim 3, wherein the optical dispersing element is a Pellin-Broca prism that is partially transparent to IR wavelengths. The optical dispersion element of claim 1, wherein the optical dispersion element is adjustable and includes a range in which a plurality of distributed sample light beams are projected on the IR FPA detector, wherein the range of wavelengths is a projection angle between the radiation from the IR light source and the surface of the optical dispersion element. Device for multi-IR spectrum information in the space, characterized in that determined by adjusting the. The radiation of claim 1, wherein the radiation from the IR light source intersects with a background reference environment arranged along an optical path providing background reference radiation, the background reference radiation intersecting with an optical scattering element forming a distributed background reference light source, An IR FPA detector detects distributed background reference light sources. The processor of claim 6, comprising a processor for receiving a signal representing at least one output and a distributed background reference light source, wherein the processor is compensated for a plurality of samples due to compensation for the background reference environment effectively in real time. Apparatus for multi-IR spectrum information in the space, characterized in that for determining the IR spectrum information. The method of claim 1, wherein at least one including a first polarizer in the optical path corresponding to the plurality of sample radiation passes through a first polarizer formed a first polarized sample radiation. Device for. 10. The method of claim 8, wherein the optical path comprises a second polarizer, at least one corresponding to the plurality of sample radiations, passing through a second polarizer forming a second polarized sample radiation orthogonal to the first polarized sample radiation; And the second polarized sample radiation is orthogonal to the optical dispersing element forming the first and second dispersed polarized light beams and the IR FPA detector detects the first and second dispersed polarized light beams. Device for multiple IR spectrum information. 10. The apparatus of claim 9, wherein the first polarized sample radiation has perpendicular polarization to the polarization of the second polarized sample radiation. 10. The apparatus of claim 9, wherein the first and second scattered polarized light beams are used to determine the molecular orientation of the polymer film. The apparatus of claim 1, wherein the IR FPA detector detects a plurality of distributed sample light beams corresponding to spatially separated regions of the IR FPA detector separated in space. 2. The apparatus of claim 1 wherein the IR FPA detector detects a corresponding plurality of distributed sample light beams. 2. The apparatus of claim 1 wherein at least one output determines IR spectral information for each of a plurality of samples within the same time. 2. The apparatus of claim 1, wherein the IR FPA detector comprises InSb. The apparatus of claim 1, wherein the IR FPA detector comprises an MCT. The apparatus of claim 1, wherein the IR FPA detector comprises a microbolometer (MICROBOLOMETER). The method of claim 1, wherein the at least one output from the IR FPA detector comprises a plurality of combined pixel outputs at a plurality of wavelengths included in a distributed light beam, wherein the plurality of combined pixel outputs at one of the plurality of wavelengths is one of a plurality of wavelengths. A device for spatial multi-IR spectrum information, characterized by improving the signal-to-noise ratio of a signal representing one density. The signal of claim 1, wherein the output of the plurality of IR FPA detector pixels corresponding to at least one of the plurality of wavelengths included in the at least one corresponding to the plurality of distributed sample light beams amplifies at least one of the plurality of wavelengths. Apparatus for spatial multiple IR spectrum information, characterized in that they are joined together to improve the signal-to-noise ratio of. 2. The apparatus of claim 1 wherein the IR FPA detector is divided into multiple segments comprising different portions of multiple pixels. 21. The method of claim 20, wherein the corresponding plurality of distributed sample light beams is projected on an IR FPA detector such that the row direction on the IR FPA detector is effectively aligned with the dispersion direction corresponding to the plurality of distributed sample light beams. Device for multiple IR spectrum information in space. 21. The system of claim 20, wherein within at least one of the multiple segments, the output from one pixel in each of a plurality of rows comprises a column of FPAs for improving the signal to noise ratio of the signal indicative of the combined wavelength density of light. Apparatus for multi-IR spectrum information in the space, characterized in that added to each other according to. 21. The apparatus of claim 20, wherein the distributed light beam combined with the different spatial portions of one of the plurality of springs is projected in two or multiple segments. 21. The apparatus of claim 20, wherein different wavelengths are represented within at least two of the multiple segments. 2. The apparatus of claim 1, wherein the distributed sample light beam combined with the different spatial portions of one of the plurality of samples is projected to different ones of at least two multiple segments. . 2. The apparatus of claim 1 wherein the IR FPA detector detects light having a wavelength in at least an intermediate IR band. The method of claim 1, wherein at least one of the plurality of samples comprises a TARGET having an ANALYTE, the analytics reacting with a particular type of sample producing an IR absorption change in the background target. Apparatus for multi-IR spectrum information in the space, characterized in that. 28. The apparatus of claim 27, wherein the analytics is a bio-specific reagent that responds to one or more biohazardous materials. 29. The method of claim 28, wherein the audible or visible alarm is activated when the audible or visible alarm is activated or when the bio-specific reagent reacts to one or more biohazardous materials. Device. 2. The apparatus of claim 1, wherein the optical path comprises at least one optical fiber. The apparatus of claim 30, wherein the optical path includes a plurality of optical fibers. 31. The apparatus of claim 30, wherein the at least one optical fiber is a multimode optical fiber. 31. The apparatus of claim 30, wherein the at least one optical fiber transmits light within an intermediate IR band. The method of claim 1, wherein the at least one sample holder comprises a plurality of sampling accessories, the plurality of sampling accessories having different sample volumes in the optical path, and the apparatus simultaneously determining IR spectral information for different sample volumes. Apparatus for multi-IR spectrum information in the space, characterized in that. 2. The apparatus of claim 1, wherein the at least one sample holder is shaped to provide an optical path for each of a plurality of samples suitable for detection of IR absorption in the optical path. The method of claim 1, further comprising a plurality of optical scattering elements for forming a plurality of scattered light beams corresponding to different samples, wherein each of the plurality of scattered light beams is projected in different spaces on an IR FPA detector. Apparatus for multi-IR spectrum information in the space, characterized in that the. 2. The apparatus of claim 1 comprising a display for displaying an IR spectrometer for one or more multiple samples and a means for adjusting the IR FPA detector and display. 38. The apparatus of claim 37 wherein the means for adjusting the IR FPA detector and display device comprises a personal computer. 10. The apparatus of claim 1, wherein the IR FPA detector further comprises an IR camera. The apparatus of claim 1, wherein radiation from at least one IR light source is transmitted through each of a plurality of samples along an optical path. 2. The apparatus of claim 1, wherein radiation from at least one IR light source is reflected through each of a plurality of samples along an optical path. In a real-time non-interferometer device using IR absorption and floating portions during the operation of simultaneously performing chemical analysis in multiple sample volumes, Broadband light source; At least one sampling accessory for having a plurality of sample volumes such that at least some of the light is radiated from the broadband light source intersecting the plurality of sample volumes; Adjusting means for optically dispersing at least some of the light intersecting the plurality of sample volumes to obtain a plurality of corresponding distributed sample beams; A two-sided IR detector array (ARRAY) having a plurality of detector elements arranged in columns and rows; Optical coupling means for coupling a plurality of corresponding distributed sample beams to the two-sided IR detector array (ARRAY), Two surfaces comprising processor means for adjusting the IR detector array surface and for providing non-interferometric chemical analysis of a plurality of samples based at least on the absorption spectrum within one or more particular wavelength ranges;  Multiple corresponding distributed sample beams are projected in multiple columns of different areas of a two-sided IR detector array, and the multiple rows of corresponding row detector elements are two-sided IR detectors for determining the density of IR spectral elements at a particular wavelength in real time. Are added together within different areas of the array, And a signal-to-noise ratio of the signal representing the density of the IR spectral component at the particular wavelength is increased by adding the corresponding row detector element in the multiplexed column. 43. The IR absorption phenomenon of claim 42, wherein the adjusting means for optically dispersing at least a portion of the light passing through the one or more samples is a diffraction grating having an adjustable angle range with respect to the projected light. Real-time non-interferometer using the floating part. 43. The apparatus of claim 42, wherein the adjusting means for optically dispersing at least a portion of the light passing through the one or more samples is a Pelin-Broca prism having an adjustable angle range with respect to the projected light. Real-time non-interferometer device using IR absorption phenomenon and floating part. 43. The device of claim 42, wherein at least a portion of the light emitted from the broadband light source is transmitted through the plurality of sample volumes. 43. The device of claim 42, wherein at least a portion of the light emitted from the broadband light source is reflected through the plurality of sample volumes. 43. A non real-time interferometer as set forth in claim 42, wherein said optical coupling means comprises one or more optical fibers. 43. The real-time non-interferometer of claim 42, wherein the two-sided IR detector array is an InSb focal plane array. 43. The real-time non-interferometer of claim 42, wherein the two-sided IR detector comprises an MCT. 43. The non-interferometric apparatus of claim 42, wherein the processor means is a personal computer. In the method of simultaneously determining a plurality of sample volumes of the IR spectrum using a non-interferometer that can be operated using a floating portion, Supplying an IR light source; Providing a plurality of sample volumes in the optical path; Radiation intersecting at least a portion of the plurality of sample volumes and the IR light source along an optical path forming a plurality of sample radiations; Optically dispersing the plurality of sample radiations to form a corresponding plurality of distributed sample beams; Detecting a plurality of distributed sample beams of spatially separated areas of a focal plane array having columns and rows of pixels; And Evaluating the combined output from the spatially separated areas of the focused arrays to simultaneously and non-coherently determine a plurality of sample emitted IR spectra. A method of simultaneously determining multiple sample volumes of an IR spectrum, wherein each row pixel of one of the spatially separated areas represents a wavelength contained within the combined one of the plurality of sample radiations. 52. The method of claim 51, further comprising adjusting the optical dispersion of the plurality of sample emissions controlling the range of wavelengths in the plurality of scattered beams. . 53. The multiple sample volume of an IR spectrum of claim 51, further comprising increasing the signal-to-noise ratio by mutually additional multiple pixel outputs within each column pixel within one of the spatially separated areas. How to determine at the same time. 53. The method of claim 51, comprising simultaneously evaluating a reference spectrum in an environmental background and modifying a plurality of samples of the calculated IR spectrum for a reference spectrum in an environmental background. How to determine the sample at the same time. 53. The method of claim 51, further comprising simultaneously evaluating the spectrum of the IR light source and modifying the multiple samples of the IR spectrum calculated for the spectrum of the IR light source. How to decide. 56. The plurality of IR spectra of claim 55, further comprising simultaneously evaluating a reference spectrum of the environmental background and modifying a plurality of samples of the calculated IR spectrum for the reference spectrum of the environmental background. How to determine sample volume at the same time. 52. The method of claim 51, further comprising: processing multiple sample emissions of the IR spectrum to clarify one or more signal functional groups within the plurality of sample volumes and wherein the one or more signal functional groups are within one of the plurality of sample emissions. And if found, further comprising the step of enabling an alarm. 58. The method of claim 57, further comprising providing a TARGET having a bio-specific reagent and reacting the bio-specific reagent with a sample volume comprising one or more signal functional groups. A method of determining multiple sample volumes of an IR spectrum simultaneously. 43. A method of determining a plurality of samples of an IR absorption spectrum using the device of claim 42 and performing a chemical analysis of the plurality of samples. Projecting at least a portion of the broadband light source into the plurality of sample volumes; Intersecting the plurality of sample volumes with radiation of at least a portion of the broadband light source; Providing a plurality of sample radiation corresponding to the optical scattering elements; Forming a plurality of distributed sample beams; Optically coupling a plurality of distributed sample beams corresponding to two rows of IR detector arrays, wherein a plurality of corresponding distributed sample beams are projected in multiple rows in different areas of the two-sided IR detector array; Processing each output from each detector in a plurality of ROW detectors in different areas of the IR detector array on both sides, with each COLUMN detector exhibiting a particular wavelength in each different area ; Evaluating the processed output from each detector to determine a plurality of samples of the IR absorption spectrum; And At least partially analyzing the chemical preparation of the multiple samples by comparing the processed output with one or more reference specifications; Method for performing a chemical analysis of a plurality of samples by determining a plurality of samples of the IR absorption spectrum using a non-interferometer of the real-time using the IR absorption phenomenon and the floating portion, characterized in that it comprises a. 60. The method of claim 59, further comprising: maintaining the broadband light source, the optical dispersing element, and the relatively non-moving two-sided IR detector array during the project, cross, coupling, forming, and optical coupling steps. Method for performing a chemical analysis of a plurality of samples by determining a plurality of samples of the IR absorption spectrum using a non-interferometer of the real-time using the IR absorption phenomenon and the floating portion, characterized in that it comprises a. 60. The method of claim 59, further comprising the step of increasing the signal-to-noise ratio by means of a plurality of mutually additional detector outputs in each row within different areas. A method of determining the number of samples of the IR absorption spectrum using a non-interferometer to perform chemical analysis of the number of samples. 60. The method according to claim 59, wherein the optical coupling step comprises a fiber optical coupling step to determine a plurality of samples of the IR absorption spectrum using a real-time non-interferometer device using the IR absorption phenomenon and the floating portion. Method for performing chemical analysis of multiple samples. 60. The apparatus of claim 59, wherein the projecting step comprises fiber-optic coupling at least a portion of the broadband light source to the plurality of sample volumes. A method of performing a chemical analysis of a plurality of samples by determining a plurality of samples of the IR absorption spectrum using. 60. The method of claim 59, further comprising: intersecting at least some radiation of the bio-specific reagent and the broadband light source in the background reference sample; Detecting a change in IR absorption in the background reference sample from the reaction of the biohazard material with the particular functional group with the buyer specific reagent; And Enabling an alarm when an IR absorption change of the background reference sample is detected; Method for performing a chemical analysis of a plurality of samples by determining a plurality of samples of the IR absorption spectrum using a non-interferometer of the real-time using the IR absorption phenomenon and the floating portion, characterized in that it comprises a. 60. The method of claim 59, comprising determining at least one physical property that is effective and continuously determined in real time from one or more multiple samples of the IR absorption spectrum. A method for performing chemical analysis of a plurality of samples by determining a plurality of samples of the IR absorption spectrum using an IR absorption phenomenon and a real-time non-interferometer using a floating part. 66. The apparatus of claim 65, wherein determining the at least one physical property comprises determining a molecular orientation among a plurality of samples. A method of performing a chemical analysis of a plurality of samples by determining a plurality of samples of the IR absorption spectrum using. 67. The method of claim 66, wherein determining the molecular orientation of at least one of the plurality of samples is performed in part by comparison of two orthogonally polarized sample radiation associated with the plurality of samples. A method of determining a number of samples of an IR absorption spectrum using a real-time noninterferometer to perform chemical analysis of a number of samples. 68. The method of claim 67, wherein one of the plurality of samples is a polymer film, and the plurality of samples of the IR absorption spectrum are determined using a real time non-interferometer using an IR absorption phenomenon and a floating portion. How to perform an analysis. 66. The method of claim 65, wherein determining the at least one physical property comprises measuring the thickness of the film in real time. A method of determining the number of samples of the IR absorption spectrum used to perform a chemical analysis of the number of samples. An apparatus for collecting, processing, and displaying IR spectral information for one or more samples, the apparatus comprising: Multiple IR light sources; At least one optical dispersing element; Multiple optical paths; IR FPA; Processing means for processing the output of the IR focal plane array and for determining IR spectral information; And Display means for displaying IR spectral information, each of the plurality of light sources presenting different angles for one or more samples, the plurality of optical paths having different spatial areas on the IR FPA and a plurality of reflected IR beams A device for displaying IR spectral information for collection, processing, and one or more samples characterized by adjusting the combined one of the samples. 71. The apparatus of claim 70, wherein each of the plurality of IR light sources has different intensities. 71. The apparatus of claim 70, wherein at least one of the plurality of optical paths comprises a polarizing element. 71. The apparatus of claim 70, wherein at least one of the plurality of optical paths comprises fiber optical coupling. 71. The method of claim 70, wherein said processing means is a means for determining the molecular orientation of a polymer monolayer from IR spectral information determined from different spatial areas on an IR FPA. Apparatus for displaying IR spectral information for the above samples. delete delete delete delete delete delete delete delete delete delete delete delete delete delete

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