KR100598996B1 - Precision processing stage apparatus - Google Patents

Abstract

The movable table which supports a to-be-processed object allows the movement to arbitrary directions in the same surface by a table support mechanism. Moreover, the said movable table is conveyed in the same plane by an electromagnetic drive means. In addition, the movable table is stopped at an arbitrary position within the same plane by an electromagnetic braking mechanism. The electromagnetic drive means transfers the movable table by mutual magnetism between the driven magnet and the drive coil. The electromagnetic braking mechanism includes a braking magnet and a nonmagnetic and conductive braking plate, and the jaw of the braking magnet and the braking plate is formed of the movable table. In accordance with the movement, a braking force is generated based on the magnetic action of the magnetic force due to the eddy current generated in the braking plate and the magnetic force of the braking magnet.

Description

Precision machined stage device {PRECISION PROCESSING STAGE APPARATUS}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a stage apparatus for precision machining, and more particularly, to a stage apparatus for precision machining used in precision machining, wiring work, inspection thereof, or the like in semiconductor production processes such as IC and LSI.

Background Art Conventionally, in the semiconductor industry and the like, the workpieces are arranged and supported at positions such as precision machining or inspection in a production process such as IC or LSI. The processing stage apparatus provided with the table) is used.

In this case, in order to precisely move the movable table to an arbitrary position on the X-Y plane, usually, the whole movable table is first moved in the X direction by the X direction moving mechanism, and then (or at the same time), Many of the system provided with the movable body support mechanism of the double superimposition structure of moving the whole movable table and an X direction movement mechanism to a Y direction movement mechanism by the Y direction movement mechanism.

Moreover, this kind of processing stage apparatus drives a movable table at a comparatively low speed in the movement control to a X direction and a Y direction, and is equipped with the mechanical brake mechanism in many cases.

However, in the conventional example, in the movement of the movable table, as described above, the movable body support mechanism having a dual structure in which the X direction movement mechanism to move in the X direction and the Y direction movement mechanism to move in the Y direction is intersected. In particular, the contact moving portion requiring precision has a problem that it requires a lot of effort in processing and requires skill in precise adjustment at the time of assembling because the contact moving portion that requires precision is provided. For this reason, productivity was bad and in most cases, the whole apparatus was expensive.

In addition, in the automation of the system related to the table movement, there is a problem that a large amount of space is wasted because of the connection of the drive mechanism of the dual structure, the equipment of the position sensor, and the like, and the entire apparatus is enlarged.

In the conventional example, many return springs for returning to the home position are provided in parallel on the movable table. In this case, when the movable table is stopped, the reciprocating micro-movement at the stop position is likely to occur in the movable table due to the driving force of acceleration or deceleration added to the movable table. For this reason, in the stop at a predetermined position, a mechanical braking device using friction is indispensable.

On the other hand, mechanical friction braking of this kind tends to cause small vibrations during operation, and therefore the movement at the time of stop is unstable for precise movement of the micron unit. Moreover, the parallel installation of this mechanical braking mechanism has always caused a problem that the whole apparatus is enlarged, the mobility is poor, and the water retention is also poor.

An object of the present invention is to provide a function of precisely moving the movable table for precision machining smoothly in a predetermined direction on the same surface, and to allow for a significant improvement in the assembly work and to reduce the size and weight of the entire apparatus. Moreover, it is providing the precision processing stage apparatus which can suppress reciprocation operation | movement at the time of the stoppage of a movable table, a micro vibration, etc. effectively, and can make the movement of this movable table more quickly and smoothly by this.

In order to achieve the above object, the stage device for precision machining according to the present invention is assembled to a main body part to support a workpiece, and is assembled to the main body part to move the movable table to any direction within the same plane. A table support mechanism that allows movement of the vehicle, electronic drive means that is assembled to the main body to cause the movable table to be transferred within the same plane, and to any position within the same plane. An electromagnetic braking mechanism for generating a braking force for stopping the movable table;

The electromagnetic drive means includes a plurality of driven magnets and a pair of drive coils for generating a magnetic force acting on the magnetic force of the driven magnet by a direction in which the energized current is energized. And transfer the movable table by mutual magnetic action between the driven magnet and the driving coil,

One of the driven magnet and the driving coil is fixed at a fixed position, and the other is provided to be movable with the movable table integrally.

The electromagnetic braking mechanism includes a braking magnet and a nonmagnetic and conductive braking plate which face each other and which move relatively in synchronization with the operation of the movable table.

One of the braking magnet and the braking plate is fixed at a fixed position, and the other of the braking magnet and the braking plate is provided to be movable in synchronization with the operation of the movable table. A configuration in which a braking force is generated based on the mutual magnetic interaction between the magnetic force caused by the eddy current generated in the braking plate and the magnetic force of the braking magnet according to the movement of the movable table is adopted.

According to the present invention, when the electromagnetic drive means is operated, firstly, a mutual magnetic action is generated between the drive coil of the electromagnetic drive means and the driven magnet, and the mutual magnetic action causes the movable table to move in a predetermined direction. The transfer of is given. In this case, since the movable table is allowed to move in the same plane by the table support mechanism, the movable table moves smoothly in a predetermined direction without moving up and down. In particular, when the home position return force is applied to the movable table, the movable table is moved to a position where the home position return force and the magnetic force of the electromagnetic drive means are balanced (that is, a predetermined movement stop position).

In this case, the movable table is often accelerated by the electronic drive means or by the home position return force applied to the movable table when the movable table is moved. In the case of the micron unit, for example, the movable range of the movable table is suddenly decelerated and stopped while being rapidly accelerated. Therefore, when the movable table is stopped, a small reciprocation operation tends to occur when the movable table is stopped by the inertial force of the movable table and the home position return force of the table support mechanism.

In the present invention, when the movable table moves rapidly, the braking magnet of the electromagnetic brake mechanism and the nonmagnetic and conductive braking plate are relatively displaced in synchronization with the movement of the movable table. In the electromagnetic braking mechanism, an eddy current of a magnitude proportional to the moving speed of the movable table is generated in the braking plate, and a magnetic interaction between the magnetic force due to the eddy current generated in the braking plate and the magnetic force of the braking magnet is performed. Generates a braking force based on Under the braking force of the electromagnetic braking mechanism, the micro reciprocating operation of the movable table is converged within a short time.

Therefore, the stop time required for stopping the movable table at a desired position is shortened, and further, the overall time required for moving the movable table in the same plane can be shortened, and the working efficiency can be improved. .

In the present invention, the electromagnetic braking mechanism may be configured to brake the movable table or to apply braking to the movable table and the table support mechanism.

Therefore, by applying the braking force by the electromagnetic braking mechanism to the movable table, the braking time of the movable table can be shortened as described above. Further, the braking time of the movable table can be further shortened by applying a braking force by the electromagnetic braking mechanism to the jaws of the movable table and the electromagnetic braking mechanism.

In the present invention, the electromagnetic braking mechanism is a simple configuration that includes a braking magnet and a nonmagnetic and conductive braking plate that face each other and move relatively in synchronization with the operation of the movable table.

Therefore, the whole apparatus can be reduced in size and weight. For this reason, the inertial force of the movable table is not increased, and the movement of the movable table is not impeded. In addition, also in the assembling work, since no particular skill is required, the workability is also improved, and productivity can be significantly improved as compared with the conventional one provided with the dual-structure moving mechanism in this respect.

In addition, the braking magnet of the electromagnetic braking mechanism may use a driven magnet constituting the electromagnetic driving means, or may be formed as a separate part, i.e., a separate body from the driven magnet.

Therefore, when the braking magnet of the electromagnetic braking mechanism is formed of the driven magnet, the braking plate is a portion that bridges the magnetic flux formed by the drive coil of the electromagnetic driving means. Since it functions equally as this coil, it constitutes the same circuit as the secondary circuit of the transformer, and at the same time, the secondary circuit is always short-circuited through the electrical resistance component of the braking plate (which causes eddy current loss). Configure

For this reason, the eddy current flows in the braking plate which comprises the secondary circuit in this case, the magnetic flux which a drive coil produces | generates is canceled, and it becomes the magnetic flux of only the original drive magnet, and a driving force is generated without distortion. In addition, the braking plate has the same effect as the short ring of the voice coil motor, the impedance of the primary circuit seen from the power source is observed to be small, and the secondary circuit is open. Compared with (without braking plate), relatively large current can be supplied without phase delay. Therefore, compared with the case where this braking plate does not exist between the said driven magnet, it becomes possible to output a comparatively large electromagnetic force without a phase delay.

In addition, the braking plate also functions as a heat dissipation plate. In this regard, the braking plate effectively suppresses an increase in resistance and a decrease in the value of the current carrying current (i.e., a decrease in the electromagnetic driving force) under a high temperature caused by continuous operation of the driving coil, thereby reducing the current carrying current. It can be set at a constant level for a long time. For this reason, the current control from the outside can be continued in the stable state with respect to the drive force by the magnetic force output from the electromagnetic drive means, and an aging change (insulation breakdown by heat) can be suppressed effectively. For this reason, the durability of the whole apparatus can be improved and also the reliability of the whole apparatus can be improved.

Moreover, it is preferable to equip the said electronic brake mechanism with the center part of the said movable table. In this way, the braking force by the electromagnetic braking mechanism can be applied uniformly without biasing the movable table, and the reciprocating operation when the movable table stops can be suppressed in a short time.

The braking plate of the electromagnetic braking mechanism may be formed as a single plate with respect to a plurality of braking magnets. As a result, the time required for assembling the braking plate can be shortened and the efficiency of the assembling work can be improved.

The movable table may be supported by the table support mechanism via the auxiliary table connected in parallel and integrally with the movable table.

Thus, the relationship which supports a movable table by a table support mechanism can be selected suitably, and it can be assembled in the form which can exhibit the braking force of an electromagnetic brake mechanism effectively using a movable table and an auxiliary table.

The table support mechanism is arranged in parallel on the same circumference of the peripheral end of the movable table at predetermined intervals, and one end is planted on the movable table. (Iii) correspond to at least three rod-shaped elastic members and at least one rod-shaped elastic member, respectively, and are arranged in parallel on the same circumference on the same circumference outside of each of the rod-shaped elastic members. At least three other rod-shaped elastic members of the same length having one end supported by the main body and the other end of each of the one and the other of the rod-shaped elastic members maintained in parallel with each other. It consists of a relay member that supports integrally,

Each of the three sets of rod-shaped elastic members of the table support mechanism can adopt a form constituted by rod-shaped elastic members such as piano wires of the same length with the same strength, respectively.

In this way, by configuring the table support mechanism as a link mechanism, the movable table can be accurately moved even when the movable table is moved in microns without moving the movable table up and down within the same plane.

As described above, when the table support mechanism is configured as a link mechanism, one of the braking magnet and the braking plate of the electromagnetic braking mechanism is provided so as to move integrally with the movable table, and the other It is preferable to provide in a main body part.

In addition, one of the braking magnet and the braking plate of the electromagnetic braking mechanism is provided so as to move integrally with the movable table, and the other is provided in the main body, and the braking of the electromagnetic braking mechanism One of the magnet and the braking plate may be provided to move integrally with the relay member, and the other may be provided to the main body.

Thus, by appropriately installing the electromagnetic brake mechanism on the movable table and the relay member of the table support mechanism, the braking force of the electromagnetic brake mechanism can be effectively applied to the movable table.

The braking magnet of the electromagnetic braking mechanism may be formed of the driven magnet or may be constituted separately from the driven magnet. Thereby, the installation position of the said electromagnetic brake mechanism can be selected suitably, and the electromagnetic brake mechanism can be provided in the position which exhibits the braking force by the electromagnetic brake mechanism effectively.

The braking magnet of the electromagnetic braking mechanism can be formed of either a permanent magnet or an electromagnet. Thereby, the structure of the driven magnet of an electromagnetic drive means can be changed in various ways. In addition, by forming the driven magnet into an electromagnet, the drive control of the movable table can be changed in various ways. For example, in the acceleration / deceleration during the movement of the movable table, the movable table can be moved by driving control of both the drive coil and the electromagnet, and the moving direction of the movable table can be changed quickly.

The table support mechanism may have a home position return force for returning the movable table to its original position. Thereby, the structure of an apparatus can be made compact compared with the case where a home position return mechanism is provided separately from a table support mechanism.

Moreover, it is preferable to arrange | position the said to-be-operated magnet on the some axis line which is divided equally to the circumferential direction with respect to one axis line which passes the origin set in the surface which the said movable table moves. In this case, the plurality of axes is set as a plurality of orthogonal axes passing through the origin set in the plane in which the movable table moves. Alternatively, the plurality of axes are set as a plurality of axes that are directed in the radial direction about the origin set in the plane on which the movable table moves.

Moreover, it is preferable to set so that the home position which the said movable table returns by the said table support mechanism may correspond to the origin used as the origin of the axis line set in the surface which the said movable table moves.

Thereby, the return position of the said movable table by the said table support mechanism, and the position used as the starting point for moving the said movable table correspond, and this movable table can be accurately positioned and moved.

The plurality of driven magnets constituting the electron drive means are disposed on the respective axes at positions equidistant from the origin, and the plurality of drive coils constituting the electron drive means includes the plurality of drive magnets. It is preferable to arrange | position corresponding to a driven magnet.

Therefore, since the driven magnet and drive coil which make up the electronic drive means are arrange | positioned on the axis line, an extra rotational force can be prevented from applying to a movable table, and accurate position control of a movable table can be performed. By arranging a plurality of driven magnets arranged on the axis in a line symmetrical positional relationship, a force that obstructs the movement of the movable table can be reliably removed.

Moreover, although it is preferable to arrange | position an electromagnetic brake mechanism on the said axis line, you may arrange | position the jaw of the said driven magnet and the said drive coil in the position shifted with respect to the said axis line. Even when the installation position of the jaws of the driven magnet and the drive coil is freely changed, the movable table can be stopped at a predetermined position by using the braking force of the electromagnetic braking mechanism. Can provide.

The driven magnet of the electromagnetic drive means may be formed by a permanent magnet or by an electromagnet.

By forming the electromagnetic drive means from the permanent magnet, the energization circuit is unnecessary like the electromagnet, and the troublesome work at the time of assembly and maintenance inspection can be avoided.

When the driven magnet of the electromagnetic drive means is formed of an electromagnet, the energization of the driven magnet is selectively controlled in the forward or reverse direction in synchronization with the energization of the drive coil. As a result, various changes can be made to drive control of the movable table. In addition, it is possible to freely change the conveyance degree given to the movable table by the electromagnetic force by controlling the energization to the plurality of drive coils, respectively.

The drive coil has a coil side for generating a magnetic force acting on the magnetic force of the driven magnet. In this case, it is preferable that the coil side of the said drive coil is arrange | positioned at the posture which is formed in the shape of a cross shape or a linear shape or along the said axis line in which the said driven magnet was arrange | positioned. Thereby, mutual magnetic interaction can be reliably produced between the coil side of a drive coil and a driven magnet. In addition, by selecting and forming the coil sides in a cross shape or a straight shape, the directionality of the mutual magnetic action generated between the driven magnets can be arbitrarily selected, and various changes can be made to the operation of the movable table. Can be.

In addition, the drive coil can be formed as a plurality of coils arranged inside and outside with different dimensions. Thereby, the mutual magnetic force which arises between a drive coil and a driven magnet can be doubled, the conveyance force of a movable table can be improved, and the conveyance force by a movable table can be doubled.

In this case, it is preferable to arrange the linear coil side of the drive coil in a posture along the axis line or in the transverse position where the driven magnet is arranged. Thereby, the mutual magnetic interaction which arises between a drive coil and a driven magnet can be arbitrarily selected, and the driving force with respect to a movable table can be changed in various ways.

The drive coil is formed by combining a plurality of small coils which are independently energized, and the crosswise or linear coil sides of the small coils can be formed in abutting portions. Thereby, a coil side can be easily formed in a drive coil.

In this case, it is preferable that the said small coil is formed in the shape of a square especially any one of a quadrilateral, a triangular, a pentagon, or a fan shape. In addition, since the square shape of a drive coil is a means for easily forming a coil edge, it is not limited to a tetragon, a triangular, a pentagon, or a fan shape.

Moreover, it is preferable that the external dimension of the said drive coil is set larger than the external dimension of the said driven magnet. As a result, the electromagnetic driving force generated between the plurality of driving coils and the driven magnet is always generated in the direction from the starting point position of the movable table to the outside, and the force of these electronic driving forces is always activated. It can generate | occur | produce in the direction toward an outer side from the starting point position of a table.

In addition, the electronic drive means may be provided with an operation control system that controls the energization to the drive coil to linearly move the movable table or to linearly move and rotate. This makes it possible to change the operation of the movable table.

The operation control system includes a coil drive control means for energizing and controlling the drive coil of the electronic drive means along a control mode, and a plurality of controls in which a moving direction, a rotation direction, an operation amount, and the like of the movable table are specified. A program storage unit for storing a plurality of control programs relating to a mode, a data storage unit for storing predetermined coordinate data and the like used in the execution of the respective control programs, and the coil drive control means for the drive coil. It is possible to comprise an operation command input unit which commands a predetermined control operation.

In this case, the control code of the operation control system includes the first to fourth control modes for moving the movable table in the positive direction of each axis with the intersection of the two orthogonal axes as the origin, and the orthogonal to the orthogonal to each other. The fifth to eighth control modes for moving the movable table in directions within respective upper limits defined by two axes, and the movable table clockwise in a plane formed by the two orthogonal axes. Or as the respective ninth to tenth control modes for rotating in the counterclockwise direction.

In the above configuration, the coil drive control means operates on the basis of the instruction from the operation command input section, extracts the information of the moving direction destination and the predetermined control mode for the movement from the program storage section and the data storage section, and based on this. By driving control of the drive coil of the above-mentioned electronic drive means, the movable table is moved to a predetermined direction by this.

Therefore, the control mode of the drive coil is stored in advance, and the drive coil can be drive-controlled based on this, and the command from the operation command input unit can be quickly responded to.

In addition to the above configuration, the operation control system performs a predetermined operation based on a plurality of position detection sensors that detect and output the movement information of the movable table to the outside, and information detected by the position detection sensor. Therefore, it is possible to adopt a configuration in which a position information calculating circuit for specifying the moving direction of the movable table, the amount of change thereof, and the like, and outputting them as position information to the outside in parallel.

Therefore, the movement information of the movable table and the position information after the movement can be output to the outside in real time, and the operator can easily grasp the movement direction of the movable table, the position displacement after the movement, etc. from the outside. For this reason, the movement work of the movable table can be performed with high precision and quickly.

Moreover, the said electronic drive means is comprised by the operation control system which operates according to the command from the outside, and controls the drive coil and driven magnet which this electromagnetic drive means has separately, and moves the said movable table to a predetermined movement direction. May be employed.

Thereby, one or two driven magnets which function effectively toward the moving direction of the movable table can be selected and operated, and the movable table can be reliably moved in a predetermined direction.

The operation control system includes an energization direction setting function for setting and maintaining an energization direction for the drive coil in one direction, a drive coil energization control function for variably setting the magnitude of the energization direction for the drive coil, and the drive coil. A magnetic pole variable setting function which operates according to the energizing direction of the driven magnets to individually set and maintain magnetic poles for each of the driven magnets, and the magnetic force strength of each of the driven magnets individually according to an external command. It becomes possible to set it as the structure which has the variable magnetic-strength setting function of variable setting, and the table motion control function which adjusts the feed direction and feed force with respect to a movable table by operating these functions properly.

Thereby, the movable table can be controlled to move in a predetermined direction specifically and reliably.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic cross sectional view in which part of the first embodiment of the present invention is omitted.

FIG. 2 is a plan view in which part of FIG. 1 is notched. FIG.

3 is a schematic cross-sectional view taken along the line A-A of FIG. 1.

4 is a bottom view of a part of the bottom view of FIG. 1 notched;

FIG. 5 is an explanatory diagram showing a positional relationship between a ta-shaped drive coil, a driven magnet and a braking plate disclosed in FIG. 1; FIG.

FIG. 6 is a block diagram showing the relationship between each component part of FIG. 1 and its operation control system. FIG.

FIG. 7 is a view showing an example of the operation of the auxiliary table (movable table) applied to the motion control system disclosed in FIG. 6, and FIG. 7 (A) shows the case where the movable table is moved in the upper right 45 ° direction. 7 (B) is an explanatory diagram showing a case where the auxiliary table (movable table) is rotated by an angle θ.

FIG. 8 is a diagram showing four energization patterns (an energization program is stored in a program storage unit in advance) and functions thereof, which are supplied to four rectangular small coils of the drive coils disclosed in FIGS. 1 to 4.

FIG. 9 is a diagram showing a control mode when the operation control system disclosed in FIG. 6 drives and controls four drive coils, and an operation direction of an auxiliary table (operation table). FIG. 9A illustrates a first control mode. Explanatory drawing which shows operation | movement to the X-axis (forward) direction of an auxiliary table (moving table), and FIG. 9 (B) is explanatory drawing which shows the relationship between the magnitude | size of a driving force in this case, and an action point.

FIG. 10 is a diagram illustrating a control mode when the operation control system disclosed in FIG. 6 drives and controls four drive coils, and an operation direction of the auxiliary plate (operation table). FIG. 10A illustrates a third control mode. Explanatory drawing which shows operation | movement to the Y-axis (positive) direction of a movable table, FIG. 10 (B) is explanatory drawing which shows the relationship between the magnitude | size of a driving force in this case, and an acting point.

Fig. 11 is a diagram showing the control mode and the operation direction of the auxiliary table (operation table) when the operation control system disclosed in Fig. 6 drives the drive control of four drive coils, and Fig. 11A shows the fifth control mode. Explanatory drawing which shows the operation | movement to the 1st upper limit direction on X-Y coordinate of an auxiliary table (moving table), and FIG. 11 (B) is explanatory drawing which shows the relationship between the magnitude | size of a driving force in this case, and an operating point.

Fig. 12 is a diagram showing the control mode and the operation direction of the auxiliary table (operation table) when the operation control system disclosed in Fig. 6 drives the drive control of four drive coils, and Fig. 12A shows the seventh control mode. Explanatory drawing which shows the operation | movement to the 2nd upper limit direction on the y-Y coordinate of an auxiliary table (moving table), and FIG. 12 (B) is explanatory drawing which shows the relationship between the magnitude | size of a driving force in this case, and an operating point.

FIG. 13 is a diagram showing a control mode and an operation direction of an auxiliary table (operation table) when the operation control system disclosed in FIG. 6 drives driving control of four drive coils. FIG. Explanatory drawing which shows the case where it rotates about the origin on the 테이블 -Y coordinate of an auxiliary table (moving table), and FIG. 13 (B) is explanatory drawing which shows the relationship between the magnitude | size of a driving force in this case, and an action point.

FIG. 14 is a view showing the positional relationship between the braking plate disclosed in FIG. 1, four drive coils, and driven magnets, and FIG. 14A is a partial cross-sectional view showing the structure of a portion including the braking plate; (B) is the top view which looked along the AA line of FIG. 14 (A).

FIG. 15 is a view showing a principle of generating braking force of the braking plate disclosed in FIG. 1, FIG. 15A is an enlarged partial sectional view showing the braking plate portion of FIG. 1, and FIG. 15B is FIG. 14 in this case. Explanatory drawing which shows the generation | occurrence | production situation of the eddy current braking which appears on this braking plate along the line A-A in (A).

FIG. 16 is a diagram showing an electrical relationship between the drive coil and the braking plate disclosed in FIG. 1, and FIG. 16A is an equivalent circuit showing a state when both are connected; Fig. 16B is an equivalent circuit showing the state of the drive coil when there is no braking plate.

FIG. 17 is an explanatory diagram showing an overall operation example of the first embodiment disclosed in FIG. 1; FIG.

FIG. 18 is an explanatory diagram showing an example when the operation example of FIG. 17 is viewed in a plan view; FIG.

Fig. 19 is a schematic sectional view in which part of the second embodiment of the present invention is omitted.

FIG. 20 is a plan view in which part of FIG. 19 is notched; FIG.

Fig. 21 is a view showing a third embodiment of the present invention, in which Fig. 21 (A) is a schematic partial cross-sectional view in which a part is omitted, and Fig. 21 (B) is a part viewed along the line AA of Fig. 21 (A). Omitted floor plan.

Fig. 22 is a schematic sectional view in which part of the fourth embodiment of the present invention is omitted.

Fig. 23 is a schematic sectional view in which part of the fifth embodiment of the present invention is omitted.

Fig. 24 is a schematic sectional view in which part of the sixth embodiment of the present invention is omitted.

25 is an explanatory diagram showing a relationship between another arrangement example and a driven magnet on the fixing plates of the four drive coils disclosed in the embodiments of the present invention.

Fig. 26 is a diagram showing another example of the electronic driving means in the present invention, and Fig. 26 (A) is an explanatory diagram showing an example in the case of having a single cubic drive coil and four driven magnets; FIG. 26B is an explanatory diagram showing an example in the case where four drive coils and eight driven magnets are provided. FIG.

FIG. 27 is a diagram showing another example of the electromagnetic drive means according to the present invention, and FIG. 27A is an explanatory diagram showing another example when a single drive coil and four driven magnets are provided. (B) is explanatory drawing which shows the example in the case of providing the cross-shaped frame-type drive coil formed in the cross-shaped frame type, and eight driven magnets.

Fig. 28 is a schematic cross sectional view of a part showing an eighth embodiment of the present invention;

It is a figure which shows the other example of the drive coil disclosed by each embodiment in this invention, and is explanatory drawing which shows the example at the time of making a drive coil into a ridge shape.

FIG. 30 is a diagram showing another example of the ta-shaped drive coil disclosed in each embodiment in the present invention, and is an explanatory diagram showing an example when the drive coil is formed into a circular shape. FIG.

It is a figure which shows the other example of the drive coil disclosed by each embodiment in this invention, and is explanatory drawing which shows the example at the time of making a drive coil into an octagonal shape.

32 is a longitudinal cross-sectional view showing a tenth embodiment of the present invention.

FIG. 33 is a plan view in which part of the embodiment shown in FIG. 32 is notched; FIG.

FIG. 34 is a schematic cross sectional view along line A-A in FIG. 32;

FIG. 35 is a block diagram showing the entire apparatus including the operation control system of the tenth embodiment disclosed in FIG.

FIG. 36 is an explanatory diagram showing a relationship between an operation of an auxiliary table portion disclosed in FIG. 32 and a capacitance detection electrode for position information detection; FIG.

FIG. 37 shows the control contents of the plurality of energization control modes A1 to A4 executed by the table drive control means in the tenth embodiment disclosed in FIG. 35 and the moving direction of the entire driven magnet (the conveying direction of the movable table). Chart).

FIG. 38 shows the control contents of the plurality of energization control modes A5 to A8 executed by the table drive control means in the tenth embodiment disclosed in FIG. 35 and the moving direction of the entire driven magnet (the conveying direction of the movable table). Chart).

FIG. 39: is a figure which shows the brake plate shown in FIG. 32, FIG. 39 (A) is explanatory drawing which shows the structure, and FIG. 39 (B) is explanatory drawing which shows the operation principle.

FIG. 40 is an explanatory diagram showing an operation example of the entire tenth embodiment disclosed in FIG. 32; FIG.

FIG. 41 is an explanatory diagram showing a state when the capacitance detecting electrode detects a change in the amount of movement of the auxiliary table portion shown in the operation embodiment shown in FIG. 40; FIG.

FIG. 42 is an explanatory diagram showing another example of the braking plate disclosed in FIG. 32. FIG.

FIG. 43 is a diagram illustrating another example of the drive coil disclosed in FIG. 32, and FIG. 43A is an explanatory diagram showing an example in the case where the drive coil has a triangular shape, and FIG. 43B is a drive coil. Explanatory drawing which shows the example in the case of making circular shape, FIG. 43 (C) is explanatory drawing which shows the example in the case of making drive coil a hexagonal shape, and FIG. 43 (D) shows the case where the drive coil is made in octagonal shape. Explanatory drawing which shows an example.

44 is a longitudinal sectional view showing an eleventh embodiment of the present invention.

FIG. 45 is a schematic cross sectional view along line A-A in FIG. 44; FIG.

FIG. 46 is a block diagram showing the entire apparatus including the operation control system of the eleventh embodiment disclosed in FIG. 44;

FIG. 47 shows the control contents of the plurality of energization control modes B1 to B4 executed by the table drive control means in the embodiment disclosed in FIG. 46 and the moving direction (transfer direction of the movable table) of the entire driven magnet. Chart indicating.

FIG. 48 shows the control contents of the plurality of energization control modes B5 to B8 executed by the table drive control means in the embodiment disclosed in FIG. 46 and the moving direction (transfer direction of the movable table) of the driven magnet as a whole. Chart indicating.

49 is a longitudinal sectional view showing an embodiment of the present invention.

50 is a schematic cross-sectional view taken along the line A-A of FIG. 49;

FIG. 51 is a block diagram showing the entire apparatus including the operation control system of the embodiment disclosed in FIG. 49; FIG.

FIG. 52 shows the energization control contents of the plurality of energization control modes C1 to C4 executed by the table drive control means in the embodiment disclosed in FIG. 49 and the moving direction of the entire driven magnets (transfer direction of the movable table). A diagram showing.

FIG. 53 shows the control contents of the plurality of energization control modes C5 to C8 executed by the table drive control means in the embodiment disclosed in FIG. 49 and the moving direction (transfer direction of the movable table) of the driven magnet as a whole. Chart indicating.

Fig. 54 is a longitudinal sectional view showing a thirteenth embodiment of the present invention;

FIG. 55 is a schematic cross sectional view along the line A-A in FIG. 54; FIG.

FIG. 56 is a block diagram showing the entire apparatus including the operation control system of the embodiment disclosed in FIG. 54; FIG.

FIG. 57 shows the energization control contents of the plurality of energization control modes D1 to D4 executed by the table drive control means in the embodiment disclosed in FIG. 54 and the moving direction of the driven magnet as a whole (moving direction of the movable table). A diagram showing.

FIG. 58 shows the control contents of the plurality of energization control modes D5 to D8 executed by the table drive control means in the embodiment disclosed in FIG. 54 and the moving direction (transfer direction of the movable table) of the driven magnet as a whole. Chart indicating.

Fig. 59 is a longitudinal sectional view showing a fourteenth embodiment of the present invention;

FIG. 60 is a schematic cross-sectional view seen along a line A-A in FIG. 59. FIG.

FIG. 61 is a block diagram showing the entire apparatus including the operation control system of the embodiment disclosed in FIG. 59; FIG.

FIG. 62 shows the energization control contents of the plurality of energization control modes E1 to E4 executed by the table drive control means in the embodiment disclosed in FIG. 59 and the moving direction of the entire driven magnets (transfer direction of the movable table). A diagram showing.

FIG. 63 shows the energization control contents of the plurality of energization control modes E5 to E8 executed by the table drive control means in the embodiment disclosed in FIG. 59 and the moving direction of the driven magnet as a whole (transfer direction of the movable table). A diagram showing.

FIG. 64 shows the energization control contents of the plurality of energization control modes E9 to E10 (rotational operation) executed by the table drive control means in the embodiment disclosed in FIG. 59 and the moving direction of the driven magnet (moving table). Diagram of the feed direction of the

Fig. 65 is a longitudinal sectional view showing a fifteenth embodiment of the present invention;

FIG. 66 is a schematic cross sectional view taken along the line A-A of FIG. 65; FIG.

FIG. 67 is a block diagram showing the entire apparatus including the operation control system of the embodiment disclosed in FIG. 65; FIG.

FIG. 68 shows the energization control contents of the plurality of energization control modes F1 to F4 executed by the table drive control means in the embodiment disclosed in FIG. 65 and the moving direction of the driven magnet as a whole (moving direction of the movable table). A diagram showing.

FIG. 69 shows the energization control contents of the plurality of energization control modes F5 to F8 executed by the table drive control means in the embodiment disclosed in FIG. 65 and the moving direction of the driven magnet as a whole (transfer direction of the movable table). A diagram showing.

FIG. 70 shows the energization control contents of the plurality of energization control modes F9 to F10 (rotation operation) executed by the table drive control means in the embodiment disclosed in FIG. 65 and the moving direction of the driven magnet (moving table). Diagram of the feed direction of the

Fig. 71 is a longitudinal sectional view showing a sixteenth embodiment of the present invention;

FIG. 72 is a schematic cross-sectional view seen along a line A-A in FIG. 71; FIG.

FIG. 73 is a block diagram showing the entire apparatus including the operation control system of the embodiment disclosed in FIG. 71; FIG.

FIG. 74 shows the energization control contents of the plurality of energization control modes K1 to K4 executed by the drive control means in the embodiment disclosed in FIG. 71 and the moving direction (transfer direction of the movable table) of the entire driven magnet. Chart indicating.

FIG. 75 shows the energization control contents of the plurality of energization control modes K5 to K8 executed by the table drive control means in the embodiment disclosed in FIG. 71 and the moving direction of the driven magnet as a whole (transfer direction of the movable table). A diagram showing.

FIG. 76 shows the energization control contents of the plurality of energization control modes K9 to K10 (rotational operation) executed by the table drive control means in the embodiment disclosed in FIG. 71 and the moving direction of the driven magnet (moving table). Diagram of the feed direction of the

FIG. 77 is a view showing a seventeenth embodiment of the present invention, and is a schematic cross-sectional view showing an example in which the electromagnetic braking mechanism is attached to the jaws of the movable table and the table support mechanism. FIG.

Fig. 78 is a diagram showing an example of the arrangement of the braking magnet in the electromagnetic braking mechanism with the bottom of the main body removed from the main body and the braking plate removed;

Fig. 79 is a characteristic diagram showing a result of comparing the braking characteristic in the seventeenth embodiment with a conventional example;

EMBODIMENT OF THE INVENTION Below, embodiment of this invention is described based on an accompanying drawing.

{First Embodiment}

1 to 18 show a first embodiment of the present invention. 1-18, the code | symbol 1 shows a movable table, and the code | symbol 2 shows a table support mechanism. As shown in FIG. 1, this table support mechanism 2 is arrange | positioned in the lower part of the case main body (main part) 3. The table support mechanism 2 allows the movable table 1 to move in any direction within the same plane, and at the same time, the movable table 1 is provided with the home position return force. It is configured to support 1).                 

This table support mechanism 2 is supported by the case main body 3 as a main body part.

As shown in FIG. 1, the case main body 3 which concerns on this embodiment is formed in the box shape which the upper side and the lower side opened.

Reference numeral 4 denotes an electronic drive means. This electronic drive means 4 is equipped with the function by which the main part is supported by the case main body 3 side, and provides a movement force (feeding) to the said movable table 1. Reference numeral 3A denotes a main body side protrusion provided to protrude in the inward direction around the inner wall of the case main body 3.

The electromagnetic drive means 4 which concerns on this embodiment is arrange | positioned between the movable table 1 and the auxiliary table 5 mentioned later.

The auxiliary table 5 is formed of a magnetic material and is connected to the movable table 1 in parallel with the movable table 1 at a predetermined interval. And the said table support mechanism 2 is equipped in this side table 5 side, and is comprised so that the movable table 1 may be supported through the side table 5.

The electromagnetic drive means 4 opposes four square-shaped driven magnets 6 fixedly mounted at a predetermined position of the auxiliary table 5 and the driven magnets 6, respectively. It has a cross-shaped coil side arranged, and cooperates with each of the driven magnets 6 to apply a predetermined movement force (transfer) to the movable table 1 by a magnetic force in a predetermined movement direction. A fixed plate provided on the movable table 1 side of the auxiliary table 5 while supporting the convex drive coil 7 to be provided and the convex drive coil 7 at a fixed position. (8) is provided. This fixing plate 8 is formed as a magnetic member. In addition, although the drive coil 7 is shown like a closed circuit in order to emphasize the shape of the winding edge part, this drive coil 7 is wound in a solenoid shape, ) Is provided with two terminals for electricity supply, and has a structure which generates a magnetic force by electricity supply. The drawing method of this drive coil is the same also in each embodiment demonstrated below.

In addition, the said several shaped drive coil 7 is a nonmagnetic metal member (for example, copper member with few electrical resistance) in the end surface side which faces the said driven magnet 6. Each braking plate 9 is provided, and the braking plate 9 is close to the magnetic pole face of the driven magnet 6 facing each other. This braking plate 9 is fixed to the fixing plate 8 side.

This will be described in more detail below.

(Moving table and auxiliary table)

1 to 4, the movable table 1 is formed in a circular shape, and the auxiliary table 5 is formed in a quadrangular shape. The auxiliary table 5 faces the movable table 1 and is arranged in parallel at predetermined intervals, and is integrally connected to the movable table 1 via a connecting post 10 at the center thereof. have. For this reason, this movable table 1 can move integrally and rotate integrally, maintaining the parallel state with the auxiliary table 5.

The connecting post 10 is a connecting member for connecting the movable table 1 and the auxiliary table 5 as described above, and has a cross section having flange portions 10A and 10B at both ends thereof. The protrusions 10a and 10b which are formed in a shape and are caught by positioning holes 1a and 5a formed in the central portions of the movable table 1 and the auxiliary table 5 are provided in the centers at both ends outside the ends. have.

The movable table 1 and the auxiliary table 5 are positioned by the projections 10a and 10b and the flange portions 10A and 10B, and are fixed to and integral with the connecting post 10. In this integration, although an adhesive agent is used in this embodiment, you may join together by welding, or it presses in part of projection 10a, 10b to positioning hole 1a, 5a, and attaches another part to an adhesive agent, welding, etc. You may integrate by. In addition, attachment or detachment of the movable table 1 or the auxiliary table 5 may be freely attached or detached to the flange portion 10A or 10B of the connecting support 10 by screwing. In this case, after the screw stops, some knock pins may be caught for positioning fixing and driven between them (not shown). In this way, the movable table 1 and the auxiliary table 5 can be integrated reliably.

[Table support mechanism]

The table support mechanism 2 according to the present embodiment has a function of allowing the movable table 1 to move freely in any direction on the same surface without changing its height position while supporting the movable table 1. This is done by the auxiliary table (5).

The table support mechanism 2 is a link mechanism applied to a three-dimensional space, and the corners around the end of the auxiliary table 5 are previously formed using two piano wires provided at predetermined intervals as a pair. Four pairs are prepared corresponding to the corner portion, and each of the four pairs of piano wires is divided into four corner portions of the quadrilateral relay plate 2G and planted in an upward direction, respectively. The table support mechanism 2 supports the auxiliary table 5 from below with four piano wires 2A located on the inner side, and the relay plate 2G with four piano wires 2B located on the outside. The swing is freely hung from the main body 3 to form a step. The two piano wires may be other members as long as they are rod-shaped elastic wire rods having rigidity sufficiently suitable for supporting the movable table 1 and the auxiliary table 5.

Thereby, the auxiliary table 5 (that is, the movable table 1) is supported by the relay plate 2G and each of the four piano wires 2A and 2B as a stable form in the air, within the horizontal plane. The movement of can be freely moved in any direction while maintaining the same height position as will be described later. The rotational motion in the same plane of the auxiliary table 5 (that is, the movable table 1) can be almost similarly possible.

This is explained in more detail.

The table support mechanism 2 includes four table-side piano wires 2A and four table-side piano wires each planted downward from the four corner portions of the peripheral end of the auxiliary table 5, respectively. The relay plate 2G equipped in the lower end part in FIG. 1 of 2A), and this relay plate 2G are attached to it from the main-body part 3 side, and the table side piano wire 2A The main body side piano wire 2B equipped on the outer side is provided.

2A of these four table side piano wires, the upper end part in FIG. 1 is fixed to the auxiliary table 5, and the lower end part is fixed to the relay plate 2G. 5A and 5B represent the lower protrusion parts provided in two places on the lower surface side of the auxiliary table 5, respectively. The fixed position of the table side piano wire 2A is set by these lower protrusions 5A and 5B.

On the outer side of each of these four table side piano wires 2A, the main body side piano wires 2B are arranged individually and in parallel with a predetermined interval S therebetween. The main body side piano wire 2B has a lower end portion fixed to the relay plate 2G similarly to the table side piano wire 2A, and its upper end portion is provided with a main body side protrusion 3B provided on an inner wall portion of the case main body 3. Stuck to

Each of these piano wires 2A and 2B is formed of a rod-shaped elastic wire rod having rigidity sufficiently sufficient to support the movable table 1 and the auxiliary table 5 as described above.

Thereby, the said movable table 1 is supported by the inner 4 table side piano wire 2A on the relay plate 2G with the auxiliary table 5, and these four table side piano wire 2A In parallel with the principle of the link mechanism within its elastic limit, the parallel movement and the rotation in the plane are allowed.

On the other hand, since the relay plate 2G is supported by the main body side protrusion 3 by four table-side piano wires 2B located on the outside of the relay plate 2G, the case body 3 is supported by the case main body 3. With respect to this, the parallel movement and the rotation in the plane are similarly allowed.

For this reason, when the auxiliary table 5 (namely, the movable table 1) is moved in-plane or rotated under the external force, as shown in FIG. 17 to be described later, Each piano wire 2A, 2B simultaneously elastically deforms, and the relay plate 2G moves up and down while maintaining a parallel state. And when the auxiliary table 5 (namely, the movable table 1) moves in-plane or rotates by an external force, the change of the height position will change with the height of the relay plate 2G fluctuating up and down. Is absorbed by.

Thereby, even if it moves by receiving an external force, the movable table 1 can move, maintaining the same height in any direction within the elastic limit of each piano wire 2A, 2B.

Here, each of the piano wires 2A and 2B on the table side and the case body side has the same diameter and the same elasticity, and the effective length L is all set the same. In addition, although each piano wire 2A, 2B which concerns on this embodiment is arrange | positioned along the left-right direction, as shown to FIG. 1, FIG. 3, for example, If arranged in a line symmetrical position with respect to the axis and the Y axis, they may be arranged in positions other than the position shown in FIG.

In the movement of the movable table 1, since each of the piano wires 2A and 2B uniformly generates elastic stresses, the movable table 1 can be smoothly moved including the return of the movable table 1 to its original position. It can be said that the advantage can be obtained.

In this way, the table support mechanism 2, for example, when the auxiliary table 5 slides in the same direction as a whole, the respective piano wires 2A and 2B in each pair are deformed in the same manner. . In this case, since the main body side piano wire 2B is elastically deformed in the state in which the edge part was supported, the height position of the auxiliary table 5 is changed by the deformation | transformation operation of 2 A of table side piano wires which are elastically deformed similarly. Instead, the height position of the relay plate 2G commonly supported by both piano wires 2A and 2B fluctuates.

In other words, this relay plate 2G absorbs the fluctuation of the height position caused by deformation of both piano wires 2A and 2B, whereby the auxiliary table 5 (i.e., the movable table 1) as a whole It will slide in the same plane without height change. In this case, when the external force is released from the auxiliary table 5, the auxiliary table 5 returns to its original position in a straight line by the spring action (restoration force) of each of the piano wires 2A and 2B.

Further, even when the auxiliary table 5 (i.e., the movable table 1) is rotationally driven in the same plane, the auxiliary table 5 (i.e., the movable table 1) maintains substantially the same height as a whole for the same reason. While rotating within the same plane. Even in this case, when the external force is released from the auxiliary table 5, the auxiliary table 5 returns to its original position in a straight line by the spring action (restoration force) of the respective piano wires 2A and 2B.

[Electronic drive means]

Between the movable table 1 and the auxiliary table 5, as mentioned above, the electronic drive means 4 which provides predetermined movement force with respect to the movable table 1 via the auxiliary table 5 is equipped. (See FIG. 1).

The electromagnetic drive means 4 according to the present embodiment includes four driven magnets (permanent magnets are used in the present embodiment) 6 mounted on the auxiliary table 5, and the driven magnets of the respective driven magnets. Four (5) shaped drive coils (7) for generating a predetermined electromagnetic force in a predetermined, moving direction through the movable table (1), and for supporting the respective shaped drive coils (7) The fixing plate 8 is provided.

As shown in FIG. 1, the fixed plate 8 is equipped on the movable table 1 side (between the auxiliary table 5 and the movable table 1) of the auxiliary table 5, and the periphery of the case body Fixing equipment is attached to (3). Here, about this fixing plate 8, only the left and right both ends of FIG. 1 may be comprised so that the case main body 3 may be fixed. In the center part of this fixing plate 8, 8 A of through-holes which allow parallel movement in the predetermined range of the said support | pillar 10 are formed. Although the through hole 8A which concerns on this embodiment is formed in circular shape, it may be a square shape or another shape may be sufficient as it. That is, any shape may be sufficient as 8 A of through-holes of the fixing plate 8, as long as it is a shape which allows the movement of the connecting column 10 to be allowed.

As described above, the fixing plate 8 is supported by the main body side protrusion 3 in its entire circumference. In this case, the fixing plate 8 and the main body side protrusion 3A may be integrated with a rust pin or the like after the screw stops, or may be integrated with welding, etc. in order to solidify the integration. In this case, there is an advantage that the fixing plate 8 can smoothly cope with the displacement and movement in the micron (μm) unit of the movable table 1 without showing the positional displacement with respect to the case body 3. Occurs.

As shown in Figs. 2 and 3, the four driven magnets 6 according to the present embodiment are formed as permanent magnets in which the opposing surfaces opposing the drive coils 7 form a quadrangular shape.

Here, in order to control the positional movement of the movable table 1, it is divided into equal parts to the circumferential direction on the basis of one axis which passes the origin set in the same plane which the movable table 1 moves. A plurality of axis lines are set. In the case of this embodiment, the said origin is set to match the center part of the fixed plate 8.

In this embodiment shown to FIG. 2 and FIG. 3, four axes are divided into four equally at every 90 degree angle to the circumferential direction with respect to one axis passing through the origin set in the same plane which the movable table 1 moves. Setting. Then, the jaws of the two axes extending in the opposite directions past the origin are assumed to be the y-axis and the y-axis, respectively, and the directions coincident with the y-axis and the y-axis are assumed to be the y-direction and the y-direction. . Therefore, these X and Y directions are orthogonal to the origin.

In addition, the position which becomes the starting point of the movement of the movable table 1 is the center position of the connecting support 10 when the movable table 1 exists in the free state without receiving an external force on the main-body part 3, ie, movable It is set as the center position of the table 1, and the origin point which this center position and said X-Y direction intersect is made to match on the center position of the fixing plate 8.

As shown in FIG. 2 and FIG. 3, the four driven magnets 6 are located in the Ⅹ-Y direction (on four axes) on the auxiliary table 5 and at positions equidistant from the origin. Each is arranged and fixed.

In the position opposite to the four driven magnets 6, the? -Shaped driving coil 7 is fixed to the fixed position on the fixed plate 8 in correspondence with the four driven magnets 6 individually. Equipped The datum-shaped drive coil 7 has a cross-shaped coil edge along the X-Y axis at its center portion, and furthermore, the magnetic force generated by energization and the magnetic force of each driven magnet 6. A mutual force is applied to the movable table 1 along a predetermined direction of movement (transfer).

In this case, the directions of the four driven magnets 6 are the magnetic poles on the side facing the? -Shaped drive coil 7. In this embodiment, the Y-axis is the N pole and the Y-axis is the S pole. , Respectively (see FIGS. 2 and 3).

For this reason, the magnetic force generated between the magnetic force generated in the longitudinal or transverse direction of the cross coil side of the drive coil 7 and the magnetic force of the driven magnet 6 is always unified in the y-axis direction or the Y-axis direction. And the sum is always set to the maximum value. For this reason, it becomes possible to output the magnetic force which generate | occur | produces efficiently as a driving force with respect to the movable table 1.

In addition, with respect to the said datum-shaped drive coil 7, the magnitude | size is set in the dimension which the length of the cross-shaped coil side which has inside allows the maximum range of movement of the said driven magnet 6.

For this reason, the electromagnetic force of the Ta-shaped drive coil 7 which arises between the four driven magnets 6 is a fixed position on the fixed plate 8 in this Ta-shaped drive coil 7. By being fixed to the, it is reliably output as a moving force in a predetermined direction with respect to the auxiliary table 5 via this driven magnet 6.

(Da-shaped drive coil)

For example, as shown in FIG. 5, the square shaped drive coils 7 forming the main part of the electromagnetic drive means 4 are four square small coils 7a and 7b that can be energized independently of each other. , 7c, 7d). And the coil part which mutually joined to the cross shape inside the four square small coils 7a, 7b, 7c, 7d forms the said cross shape coil side.

For this reason, the switching current of the square small coils 7a to 7d is controlled externally by an operation control system to be described later, for example, a current flowing in a cross-shaped portion of the inside of the? -Shaped drive coil 7. Can be limited to either the longitudinal or transverse direction in the drawing to conduct electricity (including a positive or reverse direction), whereby the driven magnets 6 correspondingly arranged In accordance with Fleming's left-hand rule, an electromagnetic force (reaction force) that presses each driven magnet 6 in a predetermined direction can be output.

By combining the directions of the electromagnetic forces generated in the four rectangular small coils 7a to 7d, the cross-shaped coil edge portion located inside the t-shaped drive coil 7 is placed in the longitudinal direction or the horizontal direction. The energized state to either of them is set, whereby the electromagnetic driving force in a predetermined direction is output to the corresponding driven magnet 6. The force of the electromagnetic driving force generated by the four driven magnets 6 imparts a moving force to the auxiliary table 5 in any direction including a rotational motion on the X-Y axis. .

The method of conducting a series of energization control to these four square small coils 7a-7d is demonstrated in detail in the description location (FIG. 6, FIG. 8) of the program storage part 22 mentioned later.

The four square small coils 7a to 7d may be hollow coils, but a conductive magnetic member such as ferrite may be filled inside.

In FIG. 5, the diagonal line part inside a coil shows the magnetic flux chain bridge area | region.

Reference numeral 9 denotes a braking plate fixedly provided on the side of the? -Shaped drive coil 7 in a direction opposite to the driven magnet 6.

[Position detection sensor mechanism]

The movement state of the auxiliary table 5 (that is, the movable table 1) driven by the electromagnetic drive means 4 is detected by the position detection sensor mechanism 25.

The position detection sensor mechanism 25 shown in FIG. 6 includes a capacitive sensor group 26 including a plurality of electrostatic capacitance type detection electrodes (eight in the present embodiment), It is provided with the position information calculating circuit 27 which carries out voltage conversion of the some capacitance change component detected by this capacitance sensor group 26, and performs a predetermined | prescribed calculation and sends it to the table drive control means 21 mentioned later as position change information. It is in one configuration.

The position information calculating circuit 27 includes a signal converting circuit section 27A for separately voltage converting a plurality of capacitive change components detected by the capacitive sensor group 26, and a plurality of converted from the signal converting circuit section 27. The voltage signal relating to the capacitance change component of is converted into an X-direction position signal VV and a Y-direction position signal VY indicating a position on the X-Y coordinate by a predetermined operation, and the rotation angle signal? It is comprised by the position signal calculation circuit part 27B which calculates and outputs.

As shown in FIGS. 1 to 4, the plurality of capacitive sensor groups 26 oppose the lower surface portion of the periphery of the auxiliary table 5 and the upper surface of the main body side protrusion 3B. ) 8 square capacitor detection electrodes 26 # 1, 26 # 2, 26 # 3, 26 # 4, 26Y1, 26Y2, 26Y3, 26Y4 arranged at predetermined intervals, and the lower surface part around the said auxiliary table 5 correspondingly. It is comprised by the comparatively wide common electrode (not shown) set to.

The capacitor detecting electrodes 26'1, 26'2 are placed on the right end of Figs. 2 and 3 among the capacitance detecting electrodes 26'1, 26'2, 26'3, 26'4, 26Y1, 26Y2, 26Y3 and 26Y4. Capacitive detection electrodes 26'3 and 26'4 are provided at the left end portions of Figs. 2 and 3 at predetermined intervals along the upper and lower sides.

Further, among the capacitance detecting electrodes 26'1, 26'2, 26'3, 26'4, 26Y1, 26Y2, 26Y3 and 26Y4, the capacitance detecting electrodes 26Y1 and 26Y2 are left and right on the upper end of Figs. The capacitors are provided at predetermined intervals, and the capacitance detection electrodes 26Y3 and 26Y4 are provided at predetermined intervals along the left and right at the lower ends of FIGS. 2 and 3.                 

Then, for example, the auxiliary table 5 (that is, the movable table 1) is given a feed by the electronic drive means 4, and as shown in Fig. 7A, the direction of the arrow F ( In the figure, when the movement operation is performed in the upper right direction, in this embodiment, one capacitance detection electrode 26'1, 26'2 (26Y1, 26Y2) located on both sides (and in the up and down direction) of the auxiliary table 5. ] And the capacitance change component detected by the other capacitance detection electrodes 26_3, 26_4 (26Y3, 26Y4) are sent to the position signal calculation circuit 27B after voltage conversion by the signal conversion circuit 27A, and this position signal is carried out. The arithmetic circuit 27B is configured to input the respective converted voltages and differentially output them as the X-direction signal VX to the Y-direction position signal VY.

When the auxiliary table 5 is driven by the electromagnetic drive means 4 and rotated in the direction of the arrow as shown in Fig. 7 (B), in this embodiment, each part is similar to the above case. It functions similarly by operation, and it is comprised so that a change component may be voltage-converted and differentially output as a predetermined rotation angle signal (theta).

For this reason, in the present embodiment, noise applied simultaneously to each of the left and right (and top and bottom) capacitive detection electrodes of FIG. 3 is applied to a differential output (for example, one end in the y-axis direction). Taking the difference in capacitance change detected by the capacitance detecting electrode disposed at the other end: an external noise rejection function), and at the same time, after the measured value is voltage-converted, the changes are summed and outputted. (The reduced one is subtracted as the negative one: for example, A-(-A) = 2A), thereby outputting the position information of the auxiliary table 5 (the movable table 1) with high sensitivity. There is an advantage that it can be done.

[Operation control system]

In the present embodiment, the electromagnetic drive means 4 includes an operation control system 20 which individually controls driving of the plurality of? -Shaped drive coils 7 to regulate the movement or rotational operation of the movable table 1. ) Are installed in parallel (see FIG. 6).

As shown in Fig. 6, the operation control system 20 individually drives each of the plurality of? -Shaped drive coils 7 of the electronic drive means 4 along a predetermined control mode to operate the movable table 1 ) Is installed in parallel with the table drive control means 21 and the table drive control means 21 to control the movement in a predetermined direction so that the moving direction, the rotation direction, the operation amount thereof, etc. of the movable table 1 are specified. And a program storage section 22 in which a plurality of control programs relating to the plurality of control modes are stored, and a data storage section 23 storing predetermined data and the like used in the execution of each of the control programs. .

The table drive control means 21 is provided with the operation command input part 24 which instruct | indicates the predetermined | prescribed control operation | movement with respect to each of the several shaped drive coils 7 in parallel. In this table drive control means 21, the positional information during and after the movement of the movable table 1 is detected by the position detection sensor mechanism 25 so as to be computed and sent with high sensitivity as described later. It is.

The said table drive control means 21 which concerns on this embodiment has the main control part 21A and the coil drive control part 21B. The main control unit 21A operates on the basis of the command from the operation command input unit 24, selects a predetermined control mode from the program storage unit 22, and assigns the predetermined control mode to the respective plurality of? -Shaped drive coils 7. It has the function to control the energization of the current. The coil drive control unit 21B has a function of simultaneously and individually driving control of each of the four predetermined? -Shaped drive coils 7, 7,..., In accordance with the control mode set by the main control unit 21A. Have

In addition to the above functions, the main control unit 21A calculates the position of the movable table 1 based on input information from the position detection sensor mechanism 25 that detects the table position, or various other methods. It also has the ability to perform operations.

Reference numeral 4G denotes a power supply circuit portion that supplies a predetermined current to each of the? -Shaped drive coils 7 of the electron drive means 4.

The table drive control means 21 inputs the information from the position detection sensor mechanism 25 to execute a predetermined operation, and based on this, the reference position of the moving destination set by the operation command input unit 24 in advance. A position displacement calculation function for calculating a deviation from the information, and a table for driving the electronic drive means 4 based on the calculated position displacement information to transfer and control the movable table 1 to a reference position of a predetermined moving destination. Position correction function is provided.

For this reason, in the present embodiment, when the moving direction of the movable table 1 is shifted due to disturbance or the like, the movable table 1 is transferred and controlled in a predetermined direction while correcting this deviation. By this, the movable table 1 is conveyed to the target position set in advance quickly and with high precision.                 

[Program storage part]

The table drive control means 21 uses four of the electronic drive means 4 in accordance with a predetermined control program (a predetermined control mode which is a predetermined energization pattern and a selected combination thereof) stored in the program storage section 22 in advance. It is configured to individually drive control the five? -Shaped drive coils 7.

That is, the program storage section 22 stores a program for executing four basic energization patterns for the four respective five-shaped drive coils 7, 7, ... in the present embodiment. (See FIG. 6, FIG. 8).

FIG. 8 shows four types of energization patterns A, B, C, and D for the four square small coils 7a, 7b, 7c, and 7d of the datum-shaped drive coil 7 (stator side), and The electric current generated in the cross-section of each of the two-shaped driving coils at the time, and the electromagnetic driving force (thrust force) generated in the driven magnet (permanent magnet) 6 on the mover side corresponding thereto. ] Direction is shown, respectively.

In FIG. 8, in the case of the energization pattern A, the current of the left rotation is energized and controlled for each of the square small coils 7a and 7b, and the current of the right rotating is applied to the other small square coils 7c and 7d, respectively. As a result, in the cross-shaped coil edge portion located in the center portion, the magnetic flux output to the outside is added or canceled as a whole, and as a result, the current in the positive direction of the y-axis Only 1A is in a state of being energized.

In the energization pattern B, each rectangular small coil 7a-7c is energized control separately as shown, respectively, and it becomes a state in which only the electric current IB of the negative direction of the y-axis was energized. In the energization pattern C, each rectangular small coil 7a-7c is energized and controlled separately as shown, respectively, and it becomes a state in which only the electric current IC of the positive direction of the Y-axis was energized. Similarly, in the energization pattern D, each rectangular small coil 7a-7c is energized and controlled separately as shown, respectively, and in this state, only the current ID of the negative direction of the Y-axis was energized. do.

The four energization patterns A, B, C, and D are executed based on a predetermined control program stored in the program storage unit 22 in advance.

The white arrow shown in FIG. 8 shows the direction of the electromagnetic driving force (thrust) generated between the driven magnets (permanent magnets) 6 on the mover side in response to these energization patterns A, B, C, and D. FIG. Are respectively shown.

In this case, each of the corresponding electromagnetic forces is generated by Fleming's left-hand law on the side of the energizing coil side of the ta-shaped drive coil 7, but the ta-shaped drive coil 7 is fixed on the fixing plate 8. Therefore, the reaction force is generated toward the driven magnet (permanent magnet) 6 side as the electromagnetic driving force (thrust).

The white arrow shown in FIG. 8 represents the reaction force (electron driving force). For this reason, this reaction force (electron driving force) is reversed in direction by the kind of magnetic poles N and S of the driven magnet 6.

In the program storage section 22, the movable table 1 is moved in the positive two directions of the y-axis and the two positive directions of the y-axis on the Y-Y plane assumed as the origin of the center portion on the fixed plate 8, respectively. First to fourth control modes, fifth to eighth control modes for moving the movable table 1 in predetermined directions within respective upper limits set on the X-Y plane, Each operation program relating to each of the ninth to tenth control modes for causing the movable table 1 to rotate in a clockwise or counterclockwise direction at a predetermined position is stored.

9 to 13, the function and the auxiliary table (operation table 1) of each of the ta-shaped drive coils 7 generated when an operation program relating to each of the first to tenth control modes is executed. Each example of the operation state of () is shown.

9 (A) and 9 (B) show a state when the first control mode is executed. As shown in this figure, in this first control mode, the two? -Shaped drive coils 7 and 7 on the Y-axis are energized and controlled by the method of the current pattern D, respectively, and the two? -Shaped drives on the Y-axis are driven. The coils 7 and 7 are energized and controlled by the method of the current pattern C, respectively. In Fig. 9A, symbols N and S represent the types of magnetic poles of the driven magnets (permanent magnets) 6, respectively.

As a result, in this first control mode, for each of the driven magnets (permanent magnets) 6, an electromagnetic driving force is generated in the direction of the arrows FX1, FX2, FX3, and FX4. The auxiliary table 5 is driven toward the positive direction of the image (arrow + FX).

FIG. 9B shows the direction when the same electromagnetic driving force is generated in each of the? -Shaped drive coils 7, 7, ... on the Y-Y coordinate. Thereby, in the case of conveying the auxiliary table 5 in the positive direction on the y-axis, in particular, the driving force of the same magnitude is generated in each of the da-shaped drive coils 7 and 7 on the y-axis. It becomes important.

In the case of the second control mode, the auxiliary table 5 is transferred in the negative direction (not shown) on the X axis, so that each of the datum-shaped driving coils 7, 7, ... is used. What is necessary is just to reversely set the current pattern which energizes compared with the case of the said 1st control mode.

That is, in this second control mode, the two ta-shaped drive coils 7 and 7 on the y-axis are energized and controlled by the method of the current pattern C, respectively, and the two ta-shape drive coils 7 and 7 on the y-axis. ) Is energized and controlled by the method of current pattern D, respectively. As a result, the auxiliary table 5 is smoothly conveyed in the negative direction on the X axis (not shown).

10 (A) and 10 (B) show a state when the third control mode is executed. As shown in this figure, in this third control mode, the two? -Shaped drive coils 7 and 7 on the Y-axis are energized and controlled by the method of the current pattern A, respectively, and the two? -Shaped drives on the Y-axis are driven. The coils 7 and 7 are energized and controlled by the method of the current pattern B, respectively.

As a result, in this third control mode, for each of the driven magnets (permanent magnets) 6, an electromagnetic driving force is generated in the directions of arrows FY1, FY2, FY3, and FY4, whereby the Y axis The auxiliary table 5 is driven toward the positive direction of the image (arrow + FY).

FIG. 10 (B) illustrates the direction of the combined force when the same electromagnetic driving force is generated in each of the? -Shaped drive coils 7, 7, ... on the Y-Y coordinate. Thereby, when conveying the auxiliary table 5 to the positive direction on a Y-axis, it becomes important especially to generate the driving force of the same magnitude | size in each of the da-shaped drive coils 7 and 7 on a Y-axis. .

In the fourth control mode, since the auxiliary table 5 is conveyed in the negative direction on the Y axis (not shown), the electric current is supplied to each of the five-shaped driving coils 7, 7, 7,. The patterns may be set in reverse in comparison with the case of the third control mode.

That is, in this second control mode, the two ta-shaped drive coils 7 and 7 on the y-axis are energized and controlled by the method of the current pattern B, respectively, and the two ta-shape drive coils 7 and 7 on the y-axis. ) Is energized and controlled by the method of current pattern A, respectively. As a result, the auxiliary table 5 is smoothly conveyed in the negative direction on the Y axis (not shown).

11A and 11B show the state when the fifth control mode is executed. As shown in this figure, in this fifth control mode, the two? -Shaped drive coils 7 and 7 on the Y-axis are energized and controlled by the method of the current pattern D, respectively, and the two? -Shaped drives on the Y-axis are driven. The coils 7 and 7 are each energized and controlled by the method of the current pattern B, respectively.

As a result, in this fifth control mode, for the two driven magnets (permanent magnets) 6 on the y-axis, an electromagnetic drive force is generated in the directions of the arrows FX1 and FX3, and the two driven on the Y-axis. With respect to the magnet (permanent magnet) 6, an electromagnetic driving force is generated in the directions of the arrows FY2 and FY4, which causes the auxiliary table from the center point on the X-Y axis to the first upper limit direction (to the arrow FXY). (5) is driven.                 

FIG. 11B illustrates the direction of the combined force when the same electromagnetic driving force is generated in each of the? -Shaped drive coils 7, 7, ... on the Y-Y coordinate. As a result, when the auxiliary table 5 is driven from the center point on the X-Y axis toward the first upper limit direction (arrow FXY), each of the five-shaped drive coils 7, 7, ... By appropriately setting the magnitude of the current value to be supplied, the moving direction thereof can be changed. The magnitude of this energizing current is set and controlled by the main control unit 21A.

In the sixth control mode, the auxiliary table 5 is moved from the center point on the X-Y axis toward the third upper limit direction (not shown). What is necessary is just to set all the current patterns which energize through ... are reversed compared with the case of said 5th control mode.

That is, in this fifth control mode, the two ta-shaped drive coils 7 and 7 on the y-axis are energized and controlled by the method of the current pattern C, respectively, and the two ta-shape drive coils 7 and 7 on the y-axis. ) Is energized and controlled by the method of current pattern B, respectively. As a result, the auxiliary table 5 is smoothly conveyed from the center point on the X-Y axis toward the third upper limit direction (not shown).

12 (A) and 12 (B) show the state when the seventh control mode is executed. As shown in this figure, in this seventh control mode, the two? -Shaped drive coils 7 and 7 on the Y-axis are energized and controlled by the method of the current pattern C, respectively, and the two? -Shaped drives on the Y-axis are driven. The coils 7 and 7 are each energized and controlled by the method of the current pattern B, respectively.                 

As a result, in this seventh control mode, for the two driven magnets (permanent magnets) 6 on the X axis, an electromagnetic driving force is generated in the directions of the arrows (-FX1, -FX3), and the two on the Y axis With respect to the driven magnet (permanent magnet) 6, an electromagnetic driving force is generated in the directions of the arrows FY2 and FY4, whereby from the center point on the X-Y axis toward the second upper limit direction (to the arrow FYX). ) The auxiliary table 5 is driven.

FIG. 12B illustrates the direction of the combined force when the same electromagnetic drive force is generated in each of the? -Shaped drive coils 7, 7, ... on the Ⅹ-Y coordinate. As a result, when driving the auxiliary table 5 from the center point on the X-Y axis toward the second upper limit direction (arrow FYX), each of the five-shaped drive coils 7, 7, ... By appropriately setting the magnitude of the current value to be supplied, the moving direction thereof can be changed. The magnitude of this energizing current is set and controlled by the said main control part 21A.

In the eighth control mode, the auxiliary table 5 is moved from the center point on the X-Y axis toward the fourth upper limit direction (not shown). What is necessary is just to set all the current patterns which energize through ... are reversed compared with the case of the 7th control mode.

That is, in this eighth control mode, the two ta-shaped drive coils 7 and 7 on the y-axis are energized and controlled by the method of the current pattern D, respectively, and the two ta-shape drive coils 7 and 7 on the y-axis are controlled. ) Is energized and controlled by the method of current pattern A, respectively. As a result, the auxiliary table 5 is smoothly conveyed from the center point on the X-Y axis toward the fourth upper limit direction (not shown).                 

13A and 13B show a state when the ninth control mode is executed. As shown in this figure, in this ninth control mode, the auxiliary table 5 (that is, the movable table 1) is rotated by a predetermined angle θ. The auxiliary table 5 which does not have a center axis in the inside is made to perform a left-handed circular motion, and the stop operation at a predetermined position is made possible.

That is, in the ninth control mode shown in Fig. 13A, the ta-shaped drive coil 7 on the positive axis of the y-axis is driven by the current pattern A, and the y-axis driving coil 7 on the y-axis negative axis is formed. The magnetic drive coil 7 is by the method of the current pattern B, and the ta-shaped drive coil 7 on the Y-axis constant axis is by the technique of the current pattern D, and the other-shaped drive coil 7 on the Y-axis minor axis. Is energized by the method of the current pattern C, respectively.

As a result, in this ninth control mode, each of the driven magnets (permanent magnets) 6 corresponding to the respective? -Shaped drive coils 7, 7, ... is turned left as shown in FIG. The electromagnetic driving force is generated in the direction FY1, -FX2, -FY3, or FX4 orthogonal to each axis along the direction of.

For this reason, as shown in FIG. 13 (A), by setting and controlling the magnitude of the electromagnetic driving force generated in each of the driven magnets (permanent magnets) 6 to the same size P, the auxiliary table 5 has a predetermined value. Even if the center axis is not within the allowable range, the circular motion of left rotation is performed, and the stop operation at a predetermined position becomes possible.

In this case, the stop position after the circular motion is a balance point (a position rotated by a predetermined angle θ) between the whole electromagnetic driving force and the home position return force due to the spring action of the table support mechanism 2. Is experimentally specified in advance as a relationship between the set rotation angle and the electronic driving force, and is tabulated (mapped) so as to be searchable and stored in the data storage unit 23.

FIG. 13B illustrates the direction when the same electromagnetic driving force is generated in each of the? -Shaped drive coils 7, 7, ... on the Y-Y coordinate. As a result, the auxiliary table 5 (that is, the movable table 1) is rotated leftward by a predetermined angle θ and stopped by using the center point O on the X-Y axis as the rotation center.

In this case, the magnitude | size of the rotation angle (theta) which sets the stop position after a rotation sets the magnitude | size of the same electric current value applied to each of the zi-shaped drive coils (7, 7, ...), and it controls the rotation angle (theta) appropriately. Is determined. The magnitude of this energizing current is set and controlled by the main control unit 21A.

In the case of the tenth control mode, the auxiliary table 5 (that is, the movable table 1) is rotated to the right. For this reason, in this 10th control mode, the direction of the same electric current supplied to each said 5 shaped drive coils 7, 7, ... may be set to the opposite direction.

That is, the ta-shaped drive coil 7 on the positive axis of the y-axis is by the method of the current pattern B, and the ta-shaped drive coil 7 on the negative axis of the y-axis is by the method of the current pattern A. The shape drive coil 7 is electrically energized and controlled by the method of the current pattern C, and the Ta-shaped drive coil 7 on the negative axis of the Y axis is controlled by the method of the current pattern D, respectively.                 

As a result, the auxiliary table 5 is smoothly rotated and controlled by the predetermined angle θ on the Y-Y axis (not shown).

The operation programs relating to the respective energization patterns and the respective control operations are stored in the operation program storage unit 22 provided in parallel with the table drive control means 21 so as to be outputable. And the table drive control means 21 selects one of the said operation programs based on the command | command from the operation command input part 24, and based on this, drive control of the said electronic drive means 4 is carried out. It is.

[Electromagnetic braking mechanism]

The electromagnetic braking mechanism includes a braking magnet and a nonmagnetic and conductive braking plate 9 which face each other and which move relatively in synchronization with the movement of the movable table 1. One of the braking magnet and the braking plate 9 is fixed at a fixed position, and the other is provided to be movable in synchronism with the movement of the movable table 1, and the braking magnet and the braking plate ( The jaw of 9) is based on the magnetic action of the magnetic force caused by the eddy current generated in the braking plate 9 and the magnetic force of the braking magnet in accordance with the movement of the movable table 1. It is a structure which generates a braking force.

The driven magnet 6 is used as the braking magnet of the electromagnetic braking mechanism according to the present embodiment. As shown in FIG. 14, a metal braking plate made of a non-magnetic member is formed on the end face of the four convex drive coils 7 on the side opposite to the driven magnet 6. 9) is insulated from the surroundings, and is attached to the magnetic pole face of each driven magnet 6, and is closely fixed to each other.

The electromagnetic braking mechanism has a function of gently moving the auxiliary table 5 (moving table 1) while suppressing this against sudden movement of the auxiliary table 5 (moving table 1).

Here, FIG. 14 (A) is a partial sectional view which shows the braking plate 9 part of FIG. 14 (B) shows the top view which looked along the arrow A-A line of FIG. 14 (A).

When the auxiliary table 5 or the movable table 1 equipped with four driven magnets 6 makes a sudden movement, each of the driven magnets 6 and the respective braking plates corresponding thereto are provided. Between (9) and electromagnetic braking (eddy current brake) acts. As a result, the subsidiary table 5 (that is, the movable table 1) is suppressed in rapid movement and gradually moves.

15A and 15B show occurrence of the electromagnetic braking (eddy current brake).

In this figure, the braking plate 9 is fixed to the end of the ta-shaped drive coil 7 facing the N pole of the driven magnet 6.

Now, when the auxiliary table 5 moves rapidly as the speed v1 in the right direction of the drawing, the metal braking plate 9 (because it is fixed) has a relatively same speed v2 (= v1) in the left direction of the drawing. ) Is rapidly moved. As a result, in the braking plate 9, an electromotive force EV having a magnitude proportional to the speed v2 is generated in the direction shown in Fig. 15B (upper side in the figure) according to Fleming's right-hand rule. A symmetrical eddy current flows in the direction of the arrow.

Subsequently, there is a magnetic flux from the N pole in the region where the electromotive force EV is generated, and therefore, between the magnetic flux of the driven magnet 6 and the eddy current in the braking plate 9 (in the electromotive force EV direction), According to the left-hand rule, a predetermined moving force f1 is generated in the braking plate 9 (toward the right direction of the drawing).

On the other hand, since the braking plate 9 is fixed on the fixed plate 8, the reaction force f2 of the moving force f1 is generated as the braking force on the driven magnet 6, and the direction thereof is the moving force ( It becomes a direction opposite to the direction of f1). That is, this braking force f2 becomes the direction opposite to the initial abrupt moving direction of the driven magnet 6 (that is, the auxiliary table 5), and furthermore, the magnitude of this braking force f2 Since it becomes a magnitude | size proportional to a movement speed, this auxiliary table 5 is suppressed by the appropriate braking force f2, and it moves smoothly in a stable state.

The predetermined braking force f2 is similarly generated in all other places of the braking plate 9.

For this reason, in the auxiliary table 5 provided with the driven magnet 6, for example, in the abrupt stop operation, the reciprocation operation tends to occur at this stop point, but on the other hand, the operation is moderately suppressed and smoothly performed. You will move slowly. For this reason, as a whole, each of these braking plates 9 functions effectively, and the auxiliary table 5 (moving table 1) can be moved in a stable state. In addition, even when the auxiliary table 5 vibrates reciprocally by vibrating from the outside, it functions similarly, and such reciprocation minute vibration is effectively suppressed.

As shown in FIG. 16, each braking plate 9 made of a metal made of a nonmagnetic member equipped with a cross-sectional portion of each of the other ta-shaped drive coils 7 is formed with the respective ta-shaped drive coils 7. ), The secondary circuit of the transformer is constituted, and a short circuit is formed through a predetermined low resistance r (indicative of eddy current loss).

In Fig. 16, K1 denotes a primary side winding that represents a zigzag drive coil 7, and K2 denotes a secondary side winding that corresponds to the braking plate 9. FIG. 16 (A) shows a state in which the secondary winding part is short-circuited through the electrical resistance component (low resistance r: eddy current loss) in the braking plate 9. In this case, a current (that is, an eddy current proportional to the magnitude of the magnetic flux of the drive coil 7) flows in the braking plate 9 such as a short circuit state of the secondary winding. All other places to which the other braking plate 9 is attached are in the same state. In addition, FIG. 16 (B) shows a state in which the braking plate 9 is not present (a state in which the secondary winding portion is open).

For this reason, even if there exists a large resistance by the inductance component of the coil at the time of starting (transient state) in each of the 5 shaped drive coils 7 which comprise the primary side circuit in this case, 2 The influence of the vehicle side short circuit can be effectively reduced. In this respect, a relatively large current can be energized from the start time, and the electromagnetic driving force can be quickly output as compared with the case where the braking plate 9 is not present between the driven magnets.

Each said braking plate 9 has a function of dissipating heat generated at the time of driving of each of the ta-shaped drive coils 7. In this regard, the increase in resistance under high temperature caused by the continuous operation of the drive coils and the decrease in the value of the conduction current (that is, the decrease in the electromagnetic driving force) can be effectively suppressed, and the conduction current can be set to a substantially constant level for a long time. For this reason, the external current control with respect to the electronic drive force output from the electronic drive means can be continued in a stable state, and a secular change (insulation breakdown by heat) can be suppressed effectively. Thereby, the durability of the whole apparatus and also the reliability of the whole apparatus can be improved.

In addition, in this embodiment, although the said braking plate 9 was equipped in each case of each da-shaped drive coil 7 as a braking plate, it illustrated, respectively, It may be formed as a single braking plate which acts in common with two or more of the da-shape drive coils 7 and is configured such that the single braking plates face the plurality of da-shape drive coils 7. .

Overall Operation of the Embodiments

Next, the overall operation of the first embodiment will be described.

In Fig. 6, first, when an operation command for moving the movable table 1 to a predetermined position is input from the operation command input unit 24, the main control unit 21A of the table drive control unit 21 immediately operates. Based on the operation command, the reference position information of the moving destination is selected from the data storage section 23, and at the same time, the control program according to the predetermined control mode corresponding to this is selected from the operation program storage section 22, and then Thus, the coil selection drive control unit 21B is operated to drive control the four? -Shaped drive coils 7 of the electronic drive means 4 based on the predetermined control mode.

In FIG. 17, FIG. 18, the instruction | command of the content which moves the movable table 1 to the predetermined position to the positive direction of a Y-axis is input from the operation | command instruction | command input part 24, and shows the state which the whole apparatus operated based on this. .

In this case, as the control mode, the first control mode shown in Fig. 9 is selected, and according to this, the energization pattern is selected in the state shown in Fig. 9 for each of the four? -Shaped drive coils 7, respectively. Indicates that operation was performed according to this.

In this case, in the said stage support mechanism 2, when the auxiliary table 5 is conveyed to the right side of the figure by the electronic drive means 4, the elastic force (in-place return force) of each piano wire 2A, 2B. This auxiliary table 5 moves in resistance. The auxiliary table 5 (that is, the movable table 1) includes the elastic return force of each of the piano wires 2A and 2B and the electrons of the electronic driving means 4 applied to the auxiliary table 5. Stop at the balance point (moving target position) with the driving force.

In FIG. 17 and FIG. 18, the code | symbol T represents the distance moved.

In Fig. 18, the hatched portion indicates a portion where the capacitance components of the other capacitance detecting electrodes 26'3 and 26'4 are reduced by the movement of the auxiliary table 5, and the cross diagonal portion shows the one capacitance detecting electrode 26'1. , 26Ⅹ2) shows the increased portion of the dose component. 18 shows the case where there is no positional displacement in the Y-axis direction.                 

During operation, when the movement position of the auxiliary table 5 is shifted from the target position due to disturbance or the like, it is based on the information of the increase and decrease of the capacitance components of the capacitance detection electrodes 26 # 1, 26 # 2, 26 # 3, 26 # 4. Thus, the position after the actual movement is detected, and feedback control for preventing the position displacement is performed.

On the other hand, when the electromagnetic driving force applied to the auxiliary table 5 is released from this state, the auxiliary table 5 is provided with the elastic return force of the piano wires 2A and 2B and returns to its original position.

In such a series of operations, the movement of the auxiliary table 5 is usually executed rapidly in either case of the application control or the open control of the electronic driving force. For this reason, in the auxiliary table 5 (or the movable table 1), the repetitive operation (reciprocating operation) attributable to the inertia force and the spring force at the stop position at the time of stopping at the moving destination or returning to the home position is provided. Occurs.

However, in the present embodiment, such a repeating operation (reciprocating operation) is suppressed by the electromagnetic braking current brake generated between the braking plate and the driven magnet, and moves smoothly toward a predetermined position, in a stable state. Stop is controlled.

Even when an operation command for moving the movable table 1 to a predetermined position other than the above is input from the operation command input unit 24, the main control unit 21A of the table drive control means 21 is similar to the above case. Starts immediately, and the reference position information of the moving destination is selected from the data storage unit 23 based on this operation command. At the same time, the control program relating to the predetermined control mode corresponding to this is selected from the operation program storage section 22. Subsequently, the coil selection drive control unit 21B is provided, and the four? -Shaped drive coils 7 of the electromagnetic drive means 4 are drive controlled based on the predetermined control mode.

And also in this case, the control operation similar to the said case, and the braking operation by a braking plate are performed, and the auxiliary table 5 (moving table 1) moves smoothly toward a predetermined position, and is in a stable state. In the stop is controlled.

Thus, in the said 1st Embodiment, the auxiliary table 5 (moving table) is not used, without using the heavy double-shaft Y-axis movement support mechanism which was needed in the conventional case. (1) can be smoothly moved in either direction on the X-Y plane while maintaining the same height position from the center position (within a predetermined range), or rotational driving within the same plane can be performed. have.

For this reason, according to the first embodiment, since the structure is simple, the whole apparatus can be reduced in size and weight, and the mobility can be remarkably improved in this respect, and the parts score (點數) also has the advantage of being less. In addition, since the number of parts is reduced, durability can be remarkably improved, and productivity can be increased because no skill is required for adjustment during assembly.

Even if the auxiliary table 5 (movable table 1) equipped with the driven magnet 6 changes suddenly, the driven magnet 6 is between the brake plate 9 made of a nonmagnetic metal member. Since the electromagnetic braking (eddy current brake) force of magnitude proportional to the sudden change is applied, the sudden operation of the movable table 1 can be suppressed, and the movable table 1 can move smoothly in a stable state in a predetermined direction.

The electronic drive means which makes it easy to equip the braking plate 9 with the zi-shaped drive coil 7 individually in a state facing the driven magnets 6, and generates an electromagnetic drive force ( 4) In addition, since the drive magnet 6 equipped to the auxiliary table 5 and the fixed plate 8 are equipped with the zi-shaped drive coil 7 opposite to this are made simple structure, the whole apparatus is reduced in size, and Since the weight can be reduced, the mobility can be improved and the assembly work is not particularly required. Therefore, the workability is also improved.

Further, the metal braking plate 9 made of a nonmagnetic member provided on the end face portion of the drive coil 7 on the side of the driven magnet 6 has a secondary side of the transformer in relation to the drive coil 7. A circuit similar to the circuit is constituted, and a short circuited form is formed through the electrical resistance component (indicative of eddy current loss) of the braking plate 9.

For this reason, the square shaped drive coil 7 which comprises the primary side circuit in this case can carry a comparatively large electric current compared with the case where a secondary side circuit is an open state. As a result, a relatively large electromagnetic force can be output as compared with the case where the braking plate 9 is not present between the driven magnets.

Moreover, since this braking plate 9 also functions as a heat sink, the secular variation (heat breakdown) caused by continuous operation of the datum-shaped drive coil 7 can be effectively suppressed. Thereby, the durability of the whole apparatus can be increased and as a result, the reliability of the whole apparatus can be improved.                 

In addition, in the said 1st Embodiment, although the case where the driven magnet 6 was equipped to the auxiliary table 5 was illustrated, while the driven magnet 6 is equipped to the movable table 1 side, You may arrange | position the said each letter-shaped drive coil 7 at the predetermined | prescribed position on the fixed table 8 toward the side. In this case, each of the ta-shaped drive coils 7 is provided in the state of passing through the fixed table 8, and the driven magnets 6 are opposed to the respective ta-shaped drive coils 7. You may equip both the movable table 1 side and the auxiliary table 5 side.

In addition, in the said 1st Embodiment, although the case where the ta-shaped drive coil 7 was equipped as a drive coil was illustrated, in this invention, a drive coil is not necessarily limited to a ta-shaped drive coil, and functions equally. If it is, the drive coil of another form may be sufficient.

{2nd Embodiment}

2nd Embodiment is shown in FIGS. 19-20. In the second embodiment shown in FIGS. 19 to 20, the auxiliary table 5 equipped in the first embodiment is deleted, and the movable table 31 is directly supported by the table support mechanism 2 while the electronic drive is performed. It has a feature in that the means 4 are configured to drive the movable table 31 directly.

19 to 20, reference numeral 31 denotes a movable table having a quadrangular shape. This movable table 31 is provided with 31 A of circular flat work surfaces on the upper surface.

Reference numeral 2 denotes a table support mechanism that is the same as the table support mechanism in the first embodiment. This table support mechanism 2 is arranged in the lower part of FIG. 19 similarly to the said 1st Embodiment, permits the movement to arbitrary directions in the same surface of the movable table 31, and this movable The movable table 31 is supported in a state in which the home position return force can be added to the table 31.

That is, in this 2nd Embodiment, the movable table 31 is assembled to the said case main body 33 via the said table support mechanism 2 arrange | positioned inside the case main body 33 as a main body part. .

In addition, the capacitive position detection sensor which always detects the movement position of the movable table 31 between the movable table 31 and the driving means support part (main body side protrusion) 33A, which will be described later, of the case main body 33. Is equipped in the same manner as in the first embodiment.

That is, a cubic spacer 31B having a flat surface having a predetermined width is provided around an end portion of the lower surface [bottom face] in FIG. 19 of the movable table 31. The common electrode 31Ba of the capacitive position detection sensor is provided in the lower surface part. The capacitor detecting electrodes 26'1, 26'2, 26'3, 26'4, 26Y1, 26Y2, 26Y3, 26Y4, which are the same as the capacitor detecting electrode in the first embodiment, face the common electrode 31Ba. It is provided similarly to the case of the aspect, and is equipped in the upper surface of 33 A of drive means support parts (body side protrusion) mentioned later.

The table support mechanism 2 is rigid enough to support two piano wires (movable table 31) which are provided at predetermined intervals, similarly to the table support mechanism 2 in the first embodiment. (2A, 2B) may be used as a pair, and four pairs are prepared previously corresponding to the peripheral end of the movable table 31, and these four pairs of piano wires 2A, 2B) is divided into four corner | angular parts of the square-shaped relay member 2G for every group, and it installs and installs toward an upward direction, respectively.

Then, the movable table 31 is supported from below by four table side piano wires 2A located on the inner side, and the relay member 2G is supported by the four piano wires 2B on the main body side located on the outside. The rocking structure is freely suspended from (33).

Thereby, the movable table 31 can move in either direction in the same plane, without changing a height position similarly to the case of the said 1st Embodiment, and also the rotation operation within the permissible range It is possible.

As shown in FIG. 19, the case main body (body part) 33 which concerns on this embodiment is formed in the box shape which the upper side and the lower side opened.

Reference numeral 34 denotes an electronic drive means. This electromagnetic drive means 34 is formed in the same manner as the electromagnetic drive means 4 in the first embodiment, and is disposed below the movable table 31 in FIG. 19 to the case body 33 side. It is supported by, and has a function to give a movable force to the said movable table 31.

Reference numeral 33A denotes a drive means support portion as a main body side protrusion provided to protrude around the inner wall portion of the case main body 33. The electromagnetic drive means 34 is supported by the case main body 33 via this drive means support part 33A.

The top surface in FIG. 19 of this drive means support part 33A is formed as a flat surface, and on this flat surface, the capacitance detection electrodes 26'1, 26'2, 26'3, 26'4 which externally output the position information of the movable table 31 are shown. , 26Y1, 26Y2, 26Y3, and 26Y4 are provided in the same manner as in the first embodiment and function similarly.

The electromagnetic drive means 34 includes four driven magnets 6 fixedly mounted at predetermined positions of the lower surface portion of the movable table 31 in FIG. 19 as in the case of the first embodiment; It has a cross-shaped coil side arranged to face each of the driven magnets 6, and is electronically predetermined with respect to each of the driven magnets 6 along a predetermined direction of movement of the movable table 31. A ta-shaped drive coil 7 for imparting a driving force and a fixing plate 38 for supporting the ta-shaped drive coil 7 at a fixed position are provided.

The fixing plate 38 is set in parallel to the movable table 31 at a predetermined interval, and is arranged downward in FIG. 19 of the movable table 31 so that the periphery of the case body 33 It is supported by the drive means support part 33A.

In addition, on the end face side of the driven magnet 6 of the? -Shaped drive coil 7, the braking plate 9 made of a nonmagnetic metal member, similar to the case of the first embodiment, has a driven magnet ( Individually arranged close to the magnetic pole surface of 6).

The braking plate 9 according to the present embodiment is fixed to the cross-sectional portion of the ta-shaped drive coil 7, and is fixed to the fixing plate 38 side via the ta-shaped drive coil 7. It is.                 

The braking plate 9 may be configured to be fixed to the fixing plate 38 via another spacer member (not shown) while maintaining a state of contact with the cross-sectional portion of the ta-shaped drive coil 7. good. This point is the same also in the case of the said 1st Embodiment.

The movable table 31 is supported by four table side piano wires 2A located inside. Reference numeral 31C denotes four table side corner portions provided so as to project downward from the lower surface in FIG. 19 of the movable table 31 to be hooked on the four table side piano wires 2A. The movable table 31 is connected to and supported by the four table side piano wires 2A through these four table side corner portions 31C.

The length of these four table side corner portions 31C is equal to the effective length L of the four piano wires 2B on which the four table side piano wires 2A located on the inner side are located outside. It is set to a possible length.

At four corners of the fixing plate 38, a through hole 38A having a predetermined size is formed, respectively. The through hole 38A according to the present embodiment is formed in a quadrangular shape, but as long as it is a size that can allow the operation of the movable table 31, other shapes such as a circle may be used.

Each of the four table side corner portions 31C is inserted into the through hole 38A individually, whereby the movable table 1 positioned in the upper portion of FIG. 19 is a lower portion of the same figure. It is a structure supported by the four table side piano wires 2A of the table support mechanism 2 located in.                 

Other configurations and functions are the same as those in the first embodiment.

The second embodiment described above has almost the same effect as the first embodiment, and in particular, the auxiliary table 5 equipped in the first embodiment is deleted to move the movable table 31 to the table support mechanism. Since the drive table 31 is directly driven by the table drive control means 21 while supporting directly by (2), the structure is further simplified, and the weight and size can be reduced. For this reason, since the weight on the movable table 1 side is reduced, not only can the durability of the table support mechanism 2 be improved, but also the mobility of the whole apparatus can be improved. Since the work process of connecting the auxiliary table 5 to the movable table 31 and assembling it becomes unnecessary, productivity and water retention can be improved remarkably, and the cost of the whole apparatus can be reduced. There is an advantage that it can be planned.

{Third Embodiment}

A third embodiment is shown in FIG. In the first embodiment shown in FIG. 21, in the first embodiment, one braking plate 9 is provided separately at the ends of a plurality of? -Shaped drive coils, facing each driven magnet. It is characterized by a structure made common using a plate-shaped member.

FIG. 21 shows a case where one braking plate 39 made of the same material is provided in place of the four braking plates 9 provided in the first embodiment.

In this case, the insertion part of the connecting support 10 shown in FIG. 1 is allowed to pass through the center part of the braking plate 39, and this connecting support 10 is the auxiliary table 5 (and the movable table 1). A through hole 39A is formed to allow movement in the plane of the orthogonal axis VII-Y in FIG.

In addition, in FIG. 21 (A), this braking plate 39 rotates each of these diamond-shaped drive coils 7 in a state in which they are in contact with the respective ends of the plurality of respective diamond-shaped drive coils 7. The case where it was attached to the fixed plate 8 is illustrated. On the other hand, the braking plate 39 is fixed to the fixing plate 8 via another spacer member (not shown) while maintaining a state of contact with the end surface portion of each of the ta-shaped drive coils 7. You may comprise.

The other structure is the same as that of the said 1st Embodiment.

In the third embodiment described above, the same operation and effect as in the first embodiment can be obtained, and the assembling work of the braking plate 39 is remarkably simplified in comparison with the case of the first embodiment. Since the whole surface area of the braking plate 39 becomes large, it functions also effectively as a heat sink. In addition, since the structure is simplified, there is an advantage that the productivity and durability of the apparatus can be improved.

In addition, although this 3rd Embodiment illustrated the case where it is comprised so that one plate-shaped member of the same material may be equipped instead of the several braking plates 9 in the said 1st Embodiment, it is limited to this. It is not. As in the second embodiment, instead of the plurality of braking plates 9 in the configuration in which the auxiliary table 5 is removed, one plate member of the same material is used as the single braking plate 39. It may be configured to be equipped.                 

In each of the first to third embodiments described above, the case where the permanent magnet is equipped as the driven magnet 6 is illustrated, but an electromagnet may be provided in place of the permanent magnet. In this case, the table drive control means 21 is responsible for the drive control of the electromagnet, and its forward or reverse direction or the energization stop state is selected in conjunction with the operation of the respective ta-shaped drive coils 7. The predetermined energization control is made (not shown).

For this reason, when the electromagnet is equipped as this driven magnet 6, it has the function similar to the said 1st Embodiment, and since it uses the electromagnet as a driven magnet, it is various to drive control of a movable table. You can make a difference.

For example, in acceleration / deceleration at the time of movement, since both drive coils and electromagnets can be drive-controlled and respond to this, it becomes possible to respond quickly to changes in the moving direction of the movable table or the like. . Further, since the magnetic flux density (magnetic strength) of the driven magnet can be freely set as necessary, there is an advantage that the strength of the driven magnet can be changed in accordance with the use state.

{4th embodiment}

22 shows a fourth embodiment. The electromagnetic braking mechanism in the first embodiment shown in FIG. 1 is configured by combining the driven magnet 6 and the braking plate 9 using the driven magnet 6 as the braking magnet. . In contrast, the electromagnetic braking mechanism 41 according to the fourth embodiment shown in FIG. 22 uses a separate magnet independent of the driven magnet as the braking magnet, and the braking magnet and the braking plate ( It consists of a braking plate 49 instead of 9).

That is, in FIG. 22, the electromagnetic brake mechanism 41 comprises four braking plates 49 fixedly equidistantly mounted on the same circumference of the upper surface portion of the fixed plate 8, and the respective braking plates. It is comprised by the four braking magnets 46 fixedly attached to the lower surface part of the said movable table 1 near and facing 49. As shown in FIG.

Here, each of the four braking plates 49 and the four braking magnets 46, respectively, each of the four? -Shaped drive coils 7 of the electromagnetic drive means 4, and each of them. Equipped at a position corresponding to the driven magnet 6.

Each of these four braking plates 49 is formed of a conductive member (for example, a plate made of copper) made of a nonmagnetic material. In addition, the four braking magnets 46 are arranged such that the polarities 00N and S of the magnetic poles are opposite to each other (so that the polarities of the adjacent magnets are different), whereby the movable table 1 The magnetic circuit is formed smoothly through the fixing plate 8.

The rest of the configuration is almost the same as in the first embodiment shown in FIG.

4th Embodiment demonstrated above can acquire the effect similar to the case of the 1st Embodiment which the action effect is shown in FIG. 1, and also FIG. 1 (1st Embodiment) also about the electromagnetic braking mechanism 41 especially. Electron braking equal to or greater than that of electromagnetic braking (eddy current braking) generated in the relationship between the braking plate 9 and the driven magnet 6 shown in FIG.

In addition, in this embodiment, since the braking plate 9 is removed from the installation area of the electromagnetic drive means 4, each of the zigzag drive coils 7 and the driven magnets 6 and The gap (interval) between can be set small (narrow). For this reason, there exists an advantage that an electronic drive force can be set larger compared with the case of the said 1st Embodiment.

In addition, in the said embodiment, although the case where the braking plate 9 in the said 1st Embodiment (FIG. 1) was removed was mentioned above, in the state equipped with the braking plate 9 as it was, in fact, it newly renewed. You may use it as the state equipped with the electromagnetic braking mechanism 41 further.

Although the case where the number of the braking magnets 46, the number of the braking plates 49, and the equipment location were specified about this electromagnetic braking mechanism 41, this invention is not necessarily limited to this. The braking magnet 46 may be provided with any number of three or more, and the braking plate 49 has a size corresponding to each braking magnet 46 for braking of a predetermined shape. You may equip a plate.

Moreover, even if the braking magnet 46 and the braking plate 49 are changed in the equipment position, the electromagnetic braking mechanism 41 which functions similarly can be obtained.

{5th embodiment}

23 shows a fifth embodiment. In the second embodiment illustrated in FIG. 23, in the second embodiment illustrated in FIG. 19, the electromagnetic brake mechanism 51 is newly equipped, and the electromagnetic brake mechanism 51 is used as the electromagnetic drive means 34. It is characterized by being separated from the equipment and mounted separately.                 

In this case, as shown in FIG. 23, the electromagnetic braking mechanism 51 is adjacent to the two braking magnets 56 mounted on the upper center portion of the fixing plate 38, and the braking magnets 56. Moreover, it is comprised by the one braking plate 59 fixedly attached to the lower surface part of the said movable table 1, opposingly.

Here, one braking plate 59 and two braking magnets 56 each have four respective da-shaped drive coils 7 and respective dodges of the electronic drive means 4. It is equipped independently from the copper magnet 6. The braking plate 59 is formed of a conductive member (for example, a plate made of copper) made of a nonmagnetic material. In addition, the two braking magnets 56 are arranged such that the polarities N and S of the magnetic poles are reversed (so that the polarities of the adjacent magnets are different), whereby the movable table 1 and the fixed plate 38 are disposed. The magnetic circuit is formed smoothly.

The rest of the configuration is substantially the same as in the second embodiment shown in FIG. 19.

In the fifth embodiment, the same effects as those of the second embodiment shown in FIG. 19 can be obtained. In addition, in the fifth embodiment, the braking plate 9 is provided with an installation area of the electromagnetic drive means 4. In this case, the gap (spacing) between the respective? -Shaped drive coils 7 and the driven magnets 6 can be set small (narrow). For this reason, compared with the case of the said 2nd Embodiment, there exists an advantage that an electronic drive force can be set larger.

In addition, in the said 5th Embodiment, although the case where the braking plate 59 in the said 2nd Embodiment (FIG. 19) was deleted, in reality, the braking plate 9 was equipped as it was. You may use it.

In addition, about the electromagnetic braking mechanism 51, although the number of the braking magnets 56, the number of the braking plates 59, and the equipment location were illustrated, the present invention is not necessarily limited to this. The braking magnet 56 may be provided with any number of three or more, and the braking plate 59 may be provided separately and independently of each braking magnet 56.

{Sixth Embodiment}

24 shows an example of the sixth embodiment. In the third embodiment shown in FIG. 21, the electromagnetic braking mechanism according to the sixth embodiment shown in FIG. 24 is provided with a large extension around the braking plate 39 in place of the braking plate 39. Thus, the new braking plate 69 is fixed to the case main body 3 (see FIG. 1), and the fixing plate 8 is removed. Reference numeral 69A denotes a through hole formed in the central portion of the braking plate 69. This through hole 69A is formed in the size which allows the movement | movement operation | movement of the connection column 10. As shown in FIG.

Here, the braking plate 69 is formed of a conductive member (for example, a plate made of copper) made of a nonmagnetic material.

In the sixth embodiment shown in FIG. 24, by removing the fixing plate 8, the respective letter-shaped drive coils 7 are in a form in which the lower surface side thereof is supported by the braking plate 69. .

For this reason, the electromagnetic drive means 4 which concerns on this 6th Embodiment includes the braking plate 69, each da-shaped drive coil 7 fixed on this braking plate 69, and It is comprised by the each driven magnet 6 of the state equipped on the auxiliary table 5 via the braking plate 69 and predetermined clearance | interval corresponding to each square shaped drive coil 7.

In addition, the electromagnetic braking mechanism according to the sixth embodiment is configured as a combination of the braking plate 69 and the driven magnet 6.

Also, reference numeral 66 denotes four different driven magnets. The four other driven magnets 66 face the upper surface (the end face on the movable table 1 side) in FIG. 24 of each of the above-mentioned shaped drive coils 7. ), And the driving force of the electromagnetic drive means 64 is strengthened.

Here, with respect to the magnetic poles of each of the newly added driven magnets 66, the surfaces facing the respective driven magnets 6 are set to have different magnetic poles (a form in which the N poles and the S poles face each other). It is. The other structure is the same as that of 3rd Embodiment shown in the said FIG.

Even if it does so, it has the same effect as the 3rd Embodiment shown in FIG. 21, In particular, the positional relationship of the braking plate 69 and the driven magnet 6 is the same as that of 3rd Embodiment (FIG. 21). Since it is maintained in the same state as the case, the braking function by the braking plate 69 is also the same as in the case of the third embodiment (Fig. 21). Another effect is that the fixing plate 8 is removed, so that the entire apparatus can be further downsized and lightened.

Here, the newly added driven magnet 66 may be configured as a normal magnetic member made of, for example, iron. In this case, the magnetic member replacing the driven magnet 66 functions effectively as a magnetic circuit forming member.

In this sixth embodiment, the new driven magnet 66 may be deleted. In this way, the size and weight of the whole apparatus can be further promoted, and the versatility of the apparatus can be further improved.

{Seventh Embodiment}

(Other embodiment regarding drive coil)

The example of other embodiment regarding each said drive coil 7 is shown, and the relationship with a braking plate is shown. In this case, the component parts other than a drive coil are comprised like the thing of said each embodiment, respectively, and the description is abbreviate | omitted here.

(One). Embodiment regarding a zigzag drive coil

In each of the embodiments described above, the case in which the? -Shaped drive coil 7 as the drive coil constituting the main part of the electromagnetic drive means 4, 34, and 64 is limited to the Y-Y axis is illustrated. As shown in Fig. 2, the 구동 -shaped drive coil 7 may be provided at a position deviated from the X-Y axis.

In this case, the driven magnet 6 (or 66) is fixed to the side of the? -Shaped drive coil 7 at a position corresponding to the? -Shaped drive coil 7.

In the case of the arrangement of the cross-shaped coil edges located in the inside of the? -Shaped drive coil 7 including the case of FIG. 25, in the respective embodiments, the vertical or horizontal coil edge portions are defined by the above-mentioned. Although the case where it was arrange | positioned along the Y-axis was illustrated, this invention is not necessarily limited to this, It may be arrange | positioned with predetermined inclination with respect to a Y-axis or a Y-axis.

Although the case where the four shaped drive coils 7 were equipped in FIG. 25 was illustrated, if it functions similarly, three may be sufficient and five or more may be sufficient as it.

The outer diameter of the convex drive coil 7 may be a shape other than square.

(2). Drive coils other than other shaped drive coils (first)

In each of the embodiments described above, the case in which the? -Shaped drive coil 7 is provided as a drive coil constituting the main part of the electronic drive means is described. It may be equipped with another drive coil.

FIG. 26 (A) shows a single cuboidal drive coil 71 having a relatively large inner area as a drive coil, and faces the four sides of the cuboidal drive coil 71 so as to face N, A case in which all four electromagnets 81 in which S can be individually set (including the energization stop control) can be individually arranged is shown, thereby forming the electromagnetic drive means 4 (or 34).                 

In this example, rotation operation of the movable table 1 (or 31) is performed by appropriately conducting and controlling the predetermined current amount including the energization direction and energization stop to the magnet-shaped drive coil 71 and each electromagnet 81. Except for the above, drive control of the movement in all directions is possible. The shape of the cube-shaped drive coil 71 may be a spherical shape or a square shape.

(3). Drive coils other than other shaped drive coils (second)

FIG. 26 (B) shows an example in which four cubic shape drive coils 72 and eight electromagnets 82 having relatively small inner areas are used as drive coils.

In the example of FIG. 26 (B), four respective four-shape drive coils 72 are disposed at positions intersecting the X-Y axis with, for example, symmetrical positions. In addition, the respective N- and S-poles of the magnetic poles face the coil side portions of each of the mag-shaped drive coils 72 located at positions intersecting the y-axis and the Y-axis. All eight electromagnets 82 capable of variable setting (including energization stop control) are individually arranged, thereby forming the electromagnetic drive means 4 (or 34).

Also in this case, similarly to the case of Fig. 26A, by appropriately conducting control of the predetermined current amount including the energization direction and the energization stop to each of the cuboidal drive coils 72 and the electromagnets 82, respectively. Except for the rotational operation of the movable table 1 (or 31), drive control with respect to the movement in all directions is possible.

Also in this case, the shape of the cuboidal drive coil 72 may be a spherical shape or a square shape.                 

(4). Drive coils other than other shaped drive coils (third)

FIG. 27A shows an example in which four cubic drive coils 73 and eight electromagnets 83 having relatively small inner areas are used as drive coils.

In the example of FIG. 27 (A), four respective four-shaped drive coils 73 are arranged at positions intersecting the X-Y axis at positions formed, for example, in symmetrical directions. In addition, the respective magnet-shaped driving coils 73 face the coil side portions of the respective magnet-shaped driving coils 73 located at positions not intersecting with the y-axis and the y-axis, respectively. All eight electromagnets 83 in which S can be set in a variable setting (including energization stop control) are individually arranged, thereby forming the electromagnetic drive means 4 or 34.

In this example, by appropriately conducting and controlling the predetermined current amount including the energization direction and energization stops to the cuboidal drive coil 73 and the electromagnet 83, the case of each of the first to third embodiments described above. Similarly, drive control of the rotation operation and the movement operation in all directions is possible. In this case, the shape of the cube-shaped drive coil 73 may be a spherical shape or a square shape.

(5). Drive coils other than other shaped drive coils (fourth)

FIG. 27B shows an example in which a cross-shaped frame drive coil 74 and eight electromagnets 84 formed in a single white cross shape are used as the drive coil.

In the example of FIG. 27 (B), the center line portions of the cross-shaped frame-shaped drive coil 74 in the longitudinal direction and the horizontal direction are positioned at positions on the Ⅹ-Y axis, for example, at positions formed symmetrically. To place. Then, the cross-shaped frame-shaped drive coil 74 faces the coil side portion of the cross-shaped frame-shaped drive coil 74 located at a position not intersecting with the y-axis and the Y-axis, respectively. All eight electromagnets 84 in which S can be set in a variable setting (including energization stop control) are individually arranged, thereby forming the electromagnetic drive means 4 or 34.

Also in this case, the first to third implementations are carried out by appropriately conducting and controlling the predetermined current amount including the energization direction and energization stops of the cross-shaped frame-shaped drive coil 74 and the eight electromagnets 84. As in the case of the aspect, drive control with respect to the rotation operation and the movement operation to all directions is attained.

In each of the cases (2) to (5), each of the driven magnets 6 abutting and corresponding to a predetermined coil side portion of each driving coil 71, 72, 73, or 74. Each braking plate 9 is fixed to the drive coil side for each driven magnet.

Also in this case as in the case of the third embodiment (see FIG. 21), a single plate-like member made of the same member in place of a plurality of respective braking plates 9 is provided with a braking plate 39 ( (Not shown).

As explained above, the said embodiment can move the movable table which supports a to-be-processed object freely in the predetermined direction (without changing a height position) freely and smoothly, or return to a home position, Since the movable table can be moved in any direction within the same plane by using an elastic member as the table support mechanism, the sliding mechanism of the double structure conventionally required is unnecessary. For this reason, since special precision processing etc. are no longer necessary, it is possible to greatly improve the work assembling work and to reduce the size and weight of the entire apparatus.

Moreover, since the electroconductive braking plate which consists of a nonmagnetic member is opposed to the some magnet which comprises a part of the electromagnetic drive means for table drive, the reciprocation of the reciprocating movement of the movable table at the time of a stop, and the surrounding Even if micro vibration or the like occurs in the same plane due to vibration or the like, this can be effectively suppressed. Thereby, the precise movement of this movable table can be performed smoothly.

As described above, the movable table is arranged to be movable in any direction on the same surface, a table support mechanism that allows movement in any direction within the same surface of the movable table, and the table support mechanism. It is equipped with the main body part and the electronic drive means which are equipped in this main body part side, and apply a moving force to the said movable table. In addition, the table support mechanism may be provided with a function of adding a home position return force to the movable table as described later.

In addition, the electronic drive means includes a plurality of driven magnets fixed at least at a predetermined position on the movable table side, and coil sides arranged to face each of the driven magnets. It is comprised by the drive coil which gives a predetermined drive force electronically along the predetermined movement direction of a movable table with respect to the said. In addition, the drive coil may be attached to the main body through a fixed plate or through another member replacing the fixed plate.

In addition, a braking plate made of a nonmagnetic metal member is arranged in close proximity to the magnetic pole surface of the driven magnet, and the electromagnetic braking mechanism is configured by the combination of the braking plate and the driven magnet.

For this reason, in this embodiment, when an electromagnetic drive means operates, first, a magnetic force will generate | occur | produce between the drive coil and the driven magnet which this electromagnetic drive means is equipped, and a movable table will give a moving force to a predetermined direction. do.

In this case, since the movable table is supported in a state where movement in any direction in the same plane is allowed by the table support mechanism, the movable table moves smoothly in a predetermined direction without moving up and down, and the table support mechanism The home position return force and the magnetic force of the electromagnetic drive means stop at a balanced position (that is, a predetermined movement stop position).

On the other hand, when the movable table suddenly accelerates or decelerates during its movement / stop, the movable table itself starts and stops suddenly, and in particular, during the stop, the movable table repeatedly reciprocates in interaction with the home position return force of the table support mechanism. Easy to move

In such a case, an electromagnetic braking (eddy current brake) acts between the driven magnet and the braking plate due to a sudden change in the movable table, whereby the sudden movement of the movable table is suppressed and a predetermined It can move slowly and smoothly in a stable state.

In addition, the electromagnetic braking mechanism has a simple configuration by combining a braking plate and a driven magnet, and the electromagnetic driving means has a simple configuration in which a driven magnet and a driving coil opposing thereto are combined. For this reason, compared with the conventional thing provided with the moving mechanism of the dual structure, the whole apparatus can be reduced in size and weight, and mobility is favorable, and also in assembly work, it does not require an expert in particular. Therefore, workability also becomes favorable and it becomes possible to raise productivity.

Further, the metal braking plate made of a nonmagnetic member provided on the end face of the driven magnet side of the drive coil constitutes a circuit corresponding to the secondary side circuit of the transformer in relation to the drive coil, In addition, it forms a short-circuited form through the electrical resistance component (which causes eddy current loss) of the braking plate.

For this reason, the drive coil which comprises the primary side circuit of a transformer can carry a comparatively large electric current compared with the case where a secondary side circuit is an open state. Thereby, it becomes possible to output a relatively large electromagnetic force compared with the case where there is no braking plate between the said driven magnet.

This braking plate also functions as a heat sink, and in this respect, it is possible to effectively suppress the aging change (heat breakdown or the like) caused by the continuous operation of the drive coil, thereby improving the durability and reliability of the entire apparatus.

In addition, the auxiliary table is integrally connected to the movable table in parallel to each other and at a predetermined interval, and the table supporting mechanism is provided on the side of the auxiliary table, and the dowel is mounted on the auxiliary table. It is also possible to employ | adopt the structure which equips a copper magnet.                 

By equipping the driven table with a driven magnet, it is possible to effectively avoid occurrence of damage to the movable table or the like in the assembling work.

In addition, the drive coil is constituted by a plurality of? -Shaped drive coils, and a configuration in which the driven magnets are arranged separately is provided corresponding to the cross-shaped portion located inside of the? -Shaped drive coils. It is also possible. This makes it possible to freely and precisely move each driven magnet (moving table) in a predetermined direction within an allowable moving range set inside the t-shaped drive coil.

In this case, the datum-shaped drive coil is generated by the drive control means, which is actually provided separately, for example, by generating driving force in the X direction or the Y direction between the corresponding driven magnets and the overall integrated control. Thus, it is possible to move the movable table in a predetermined direction through this driven magnet.

It is also possible to employ a configuration in which a plurality of driven magnets are composed of permanent magnets. Since the driven magnet is a permanent magnet, an energizing circuit such as an electromagnet is unnecessary, and thus, troublesome work can be avoided during assembly and maintenance inspection, thereby improving productivity and maintainability. And durability of the whole apparatus can be increased.

In addition, the plurality of driven magnets may be constituted of electromagnets, and the driven magnets may be configured to selectively conduct electricity control in a forward or reverse direction or in an energized stop state by interlocking with the drive coils.                 

For this reason, various changes can be made to drive control of a movable table. For example, acceleration / deceleration at the time of moving the movable table can be coped by driving control of both the drive coil and the electromagnet, and therefore, it is possible to respond quickly to changes in the moving direction of the movable table and the like. Since the magnetic flux density of the driven magnet can also be freely set, the strength of the driven magnet can be changed in accordance with the use state.

The braking plates may be separately provided corresponding to the plurality of driven magnets, and the braking plates may be fixed to the ends of the respective driving coils.

Further, the braking plate may be configured by a single plate member for the entire plurality of driven magnets, and the single plate member may be fixed to the magnet side end of each of the drive coils. .

Moreover, by equipping each drive coil with a braking plate, space is set between drive coils, and smooth maintenance, ie, improvement of maintenance property, can be aimed at.

In addition, by constructing the braking plate for a plurality of driven magnets as a single plate member, the assembling work is simplified, and the productivity and durability of the entire apparatus can be improved and the cost can be reduced.

It is also possible to remove the braking plate from the side of the drive coil and to form an electromagnetic braking mechanism by newly combining with another braking magnet. In this case, it becomes possible to equip a braking plate in a location different from a drive coil.

For this reason, the electromagnetic braking mechanism can be detached from the electromagnetic driving means and installed at any location, and the strength of the electromagnetic braking force can be set freely. In this case, since the gap between the drive coil and the driven magnet can be set smaller on the electron drive means side, it is possible to efficiently generate the electron driving force generated between the drive coil and the driven magnet.

Further, the braking plate may be composed of a single braking plate corresponding to each driven magnet, the single braking plate is fixed to the main body portion, and the single braking plate may be supported by the single braking plate.

For this reason, not only the said fixing plate can be deleted, but a driving coil can be supported by a braking plate. Moreover, since the fixing plate can be eliminated, it is possible to further promote the weight reduction of the entire apparatus. Thereby, mobility and versatility can be further improved, and cost reduction can be aimed at with the reduction of a component.

{Eighth Embodiment}

28, an eighth embodiment is shown. In the eighth embodiment shown in FIG. 28, the four fixing plate-shaped drive coils 7 in the first embodiment penetrate the holes of the fixing plate 48, respectively. And the driven magnet 6 is provided in each of the auxiliary table 5 and the movable table 1 in correspondence to the end faces of the respective? -Shaped drive coils 7 individually. This is characterized by the configuration of the electronic drive means 44.

Reference numeral 48A denotes a through hole that allows the movement of the connecting post 10, similarly to the through hole 8A in FIG. Further, reference numerals 49 and 50 respectively abut on and close to each of the driven magnets 6 on both sides of the fixed plate 8 in contact with respective cross sections of the respective? -Shaped drive coils 7. In the state, the braking plates each equipped with fixing are shown. The other structure is the same as that of the said 1st Embodiment.

The present embodiment has the same effects as those of the first embodiment, and further includes a driven magnet 6 having a cross-shaped coil of both end faces of the? -Shaped drive coil 7. Since the sides were sandwiched between the sides, the electronic driving force can be doubled. For this reason, there is an advantage that the auxiliary table 5 and the movable table 1 can be driven in a plane more quickly and in a stable state, and the performance and reliability of the entire apparatus can be improved.

In the case of the braking plates 49 and 50 according to the present embodiment, each section of each of the respective ta-shaped drive coils 7 is separately partitioned and separately mounted on the same surface. Although illustrated, similar to the case of the braking plate 39 (refer FIG. 21) in the said 3rd Embodiment, each driven magnet of the side of the auxiliary table 5 (or the movable table 1) ( It may be configured so as to be common to 6) and share as one braking plate.

In addition, in the eighth embodiment shown in Fig. 28, the driven magnet 6 of the electromagnetic drive means is used as the braking magnet of the electromagnetic braking mechanism, but a separate braking magnet is used in place of these driven magnets. The braking plates 49 and 50 may be deleted by combining the braking magnet and the braking plate to form an electromagnetic braking mechanism and separating the electromagnetic braking mechanism from the electromagnetic driving means.

This makes it possible to reduce the gap between each of the driven magnets 6 and the corresponding respective? -Shaped drive coils 7, and to set the electromagnetic driving force acting between the two to be large. have.

{Ninth embodiment}

Next, another example of the configuration related to the? -Shaped drive coil will be described. In the said 1st Embodiment, although a tetragonal thing was illustrated as a Ta-shaped drive coil, this invention does not necessarily limit a Ta-shaped drive coil to this. The shape shown below can also function as a zigzag drive coil.

(One). External shaped ridge-shaped drive coil

The datum shaped drive coil 61 shown in FIG. 29 is comprised by the four triangular triangular small coils 61a, 61b, 61c, 61d which can be energized independently, respectively, and the combination of the whole In the shape of a ridge (a state in which a quadrangular shape is rotated by 90 °), a cross-shaped coil edge is provided on the inside as shown in FIG. 29.

FIG. 29 shows four fixed drive coils 61 formed in this way on the respective axes on the y-Y rectangular coordinates as in the case of the first embodiment so as to be fixed table 8 (not shown). ) Shows the case of fixing equipment.                 

Also in this case, the driven magnet 6 is provided on the auxiliary table 5 in correspondence with the cross-shaped coil sides of the respective? -Shaped drive coils 61. Reference numeral 59 denotes a braking plate that functions equivalently to the braking plate 39. Likewise, reference numeral 5 denotes an auxiliary table. The other structure is the same as that of the said 1st Embodiment.

Also in this way, the ta-shaped drive coil 61 functions similarly to the ta-shaped drive coil 7 in the first embodiment, and the stage device for precision machining equipped with the same also has the case of the first embodiment. The same effect can be obtained.

(2). Round shaped zigzag drive coil

The ta-shaped drive coil 62 shown in FIG. 30 is comprised by the four fan-shaped square small coils 62a, 62b, 62c, and 62d which can each independently energize, and made the whole combination into the circular shape. The inner side is provided with a cross-shaped coil edge as in the case of FIGS. 2 and 9.

Fig. 30 shows four fixed circular shaped datum-shaped drive coils 62 formed on the respective axes on the y-Y Cartesian coordinates in the same manner as in the first embodiment. (Not shown).

Also in this case, the driven magnet 6 is provided on the auxiliary table 5 in correspondence with the cross-shaped coil sides of the respective? -Shaped drive coils 62. Reference numeral 59 denotes a braking plate that is the same as the braking plate 39 in the third embodiment. Likewise, reference numeral 5 denotes an auxiliary table. The other structure is the same as that of the said 1st Embodiment.

Even in this manner, the circular ta-shaped drive coil 62 functions similarly to the quadrangular ta-shaped drive coil 7 in the first embodiment, and the stage device for precision machining equipped with the same The same effects as in the case of the first embodiment can be obtained.

(3). Octagonal shaped drive coil

The triangular shaped drive coil 63 shown in FIG. 31 is constituted by four pentagonal small coils 63a, 63b, 63c, and 63d each capable of independently energizing, and a combination of all of them is an octagonal shape. In the same way as in Fig. 29, the inside is provided with a cross-shaped coil edge.

FIG. 31 shows the four octagonal octagonal drive coils 63 formed in this way on the respective axes on the Ⅹ-Y rectangular coordinates, similarly to the case of the first embodiment, to fix the table 8. The case where fixation equipment is attached to (not shown) is shown.

Also in this case, the driven magnet 6 is provided on the auxiliary table 5 in correspondence with the cross-shaped coil sides of the respective? -Shaped drive coils 63. Reference numeral 59 denotes a braking plate that is the same as the braking plate 39 in the third embodiment. Likewise, reference numeral 5 denotes an auxiliary table. The other structure is the same as that of the said 1st Embodiment.

Even in this way, the octagonal zigzag drive coil 63 functions similarly to the octagonal zigzag drive coil 7 in the first embodiment, and is equipped with a precision machining stage device. Also, the same effects as in the case of the first embodiment can be obtained.

As described above, in the? -Shaped drive coil of the present invention, if the cross-shaped coil edge is provided on the inner side, the shape of the outer shape is not necessarily limited to a quadrangular shape, and functions equally. If it is a thing, another shape may be sufficient.

Moreover, in each said embodiment, the case where the space area of the inner part (cross-shaped coil edge part) of each da-shaped drive coil was illustrated in the hollow state was illustrated, but in this part, ferrite etc. The non-conductive magnetic member may be filled.

In addition, in the said embodiment, although the case where the permanent magnet was equipped as the driven magnet 6 was illustrated, the electromagnet may be used instead of the permanent magnet as the driven magnet 6. In this case, the table drive control means 21 is responsible for the drive control of the electromagnet as the driven magnet 6, and the forward or reverse direction thereof is linked to the operation of the respective ta-shaped drive coils 7. Alternatively, the energization stop state is selected to perform predetermined energization control (not shown).

In the case where the driven magnet 6 is an electromagnet, various changes can be made to the drive control of the movable table 1. For example, in acceleration / deceleration at the time of movement, since both drive coils and electromagnets can be drive-controlled and respond to this, it becomes possible to respond quickly to changes in the moving direction of the movable table or the like. .

That is, in the case where the driven magnet 6 is an electromagnet, the magnetic flux density (magnitude of the magnet) of the driven magnet can be freely set as necessary, so that the strength of the driven magnet is changed depending on the use state. There is an advantage that it can be done.

In each of the above embodiments, the four driven magnets 6 and the corresponding respective? -Shaped drive coils 7, 61, 62, or 63 are arranged in the auxiliary table 5 (or the movable table 1). Although the case where it arrange | positioned on the Y-axis and Y-axis of the position of equidistant distance from the origin on the y-Y rectangular coordinate in the upper surface of] was illustrated, respectively, this invention is not necessarily limited to this, 4 Each of the driven magnets 6 of the dogs may not be an equidistant position at the center of origin, provided that they are balanced positions on the y-Y Cartesian coordinate.

For the driven magnet 6, an even number (not necessarily four) of these can be prepared, and the even number of the driven magnet 6 is placed on the same circumference of the auxiliary table 5 (or the movable table 1). The datum-shaped drive coils 7 may be arranged on the fixing plate 8, respectively, at equal intervals, and correspondingly to the respective driven magnets 6 whose positions are specified.

In addition, for the driven magnet 6, an even number of the driven magnet 6 is prepared, and the even number of the driven magnet 6 is, for example, the auxiliary table 5 (or the movable table 1). Each driven magnet 6 whose position is specified by symmetry (or up-down symmetry) on the basis of the y-axis (or Y-axis) on the y-Y Cartesian coordinate in the plane of]. In addition, the said datum shaped drive coil 7 may be arrange | positioned on the said fixing plate 8, respectively.

In this manner as well, a stage apparatus for precision machining having an effect similar to that of the above embodiment can be obtained.

In each of the above embodiments, the capacitive sensor group 26 includes eight capacitive detection electrodes 26'1, 26'2, 26'3, 26'4, 26Y1, 26Y2, 26Y3 and 26Y4 for the auxiliary table 5 or the movable table. The two electrodes (1) are spaced apart from each other (e.g., regions located at both ends of each axis in the y-Y plane) corresponding to the Z-shaped common electrode on the lower surface of (1). Although the case was illustrated, it may be halved, and two may be arrange | positioned at predetermined intervals only in the area | region located in the positive stage of each axis | shaft in a Y-Y plane, for example.

This eliminates the noise rejection function of the calculation unit, but not only the configuration is simplified but also the amount of information to be detected is halved, so that the calculation processing of the position information can be performed more quickly, and the positional displacement of the movable table 1 during movement is reduced. It shows an effect that the correction can be made more quickly.

Moreover, in each said embodiment, as table support mechanism 2, four table side rod-shaped elastic members (table side piano wire) 2A and four main bodies corresponding to this and located in the main body side Although the specific example when the side rod-shaped elastic member (main body side piano wire) 2B is provided and it arrange | positions in the position which is adjacent to each corresponding rod-shaped elastic member 2A, 2B was demonstrated, this invention is It does not necessarily limit to this, About the number of rod-shaped elastic members 2A and 2B, three pieces (6 pieces in total) may be sufficient on the assumption that they are arrange | positioned in good balance, respectively. In addition, in each rod-shaped elastic member 2A, 2B of the table side and the main body side which comprise one set, it does not necessarily need to be closely adjacent to each other and to equip.

Even in this manner, in the movement of the movable table 1, the respective bar-shaped elastic members 2A and 2B are elastically deformed in almost the same manner and correspond to this, so as a whole, the table in the respective embodiments described above. It functions similarly to the case of the support mechanism 2, and the same effect can be obtained. In addition, about the rod-shaped elastic members 2A and 2B in this table support mechanism 2, 5 sets or more may be sufficient.

As described above, the present embodiment is characterized in that the shape of the external shape of the datum-shaped drive coil in the stage device for precision machining is specified.

That is, each rectangular shaped drive coil is comprised by four square-shaped small coils which can each independently energize, and let the shape of the whole combination be a square shape. Each oval-shaped drive coil is constituted by four triangular small coils that can be energized independently of each other, and the shape of the entire combination is ridged. Each oval drive coil is constituted by four fan-shaped square small coils which can be energized independently of each other, and the shape of the combination as a whole is circular. Each five-shaped drive coil is constituted by four pentagon-shaped small coils each capable of independently energizing, and the shape of the combination as a whole is octagonal. As mentioned above, it becomes possible to change variously the structure of a zigzag drive coil.

For this reason, according to the shape of a movable table, a structure, or other environmental conditions, the square shaped drive coil corresponding to this can be set, and the versatility of an apparatus can be improved.

Further, a braking plate made of a nonmagnetic metal member is arranged in close proximity to the magnetic pole face of the driven magnet in a cross section of the driven magnet side of the? -Shaped drive coil, and the braking plate is fixed. It becomes possible to equip the plate side.

For this reason, when the auxiliary table or movable table equipped with the driven magnet makes a rapid movement, electromagnetic braking (eddy current brake) is applied between the driven magnet and the braking plate, and the auxiliary table or movable table is operated. Sudden movement is suppressed and can be moved slowly.

Further, an operation control system for restricting the movement of the movable table in the plane is provided in parallel in the electromagnetic drive means, and the operation control system is used to determine the cross-shaped coil sides of the plurality of zigzag drive coils of the electronic drive means. It becomes possible to set it as the structure provided with the coil drive control means which carries out the electrification control selectively at least one of a vertical direction or a horizontal direction, and moves the control table to a predetermined direction.

For this reason, the motion control system functions effectively to operate the plurality of? -Shaped drive coils, thereby enabling the movable table to be moved specifically in a predetermined direction.

In addition, it becomes possible to provide, in parallel, an operation control system for regulating the movement or rotation of the movable table in the electronic drive means. Then, the coil drive control means operates on the basis of the command from the operation command input unit of the operation control system, and the program storage unit and the data storage unit extract information of the moving direction destination and a predetermined control mode for movement. Based on this, it is possible to drive control each of the plurality of? -Shaped drive coils of the electronic drive means and to move the movable table in a predetermined direction.

Further, a plurality of movement information detection sensors for detecting and outputting movement information of the movable table to the outside are distributed and equipped in a plurality of locations at the peripheral end of the movable table, respectively, and based on the information detected by the plurality of movement information detection sensors. It is also possible to adopt a configuration in which a position information calculation circuit section for executing a predetermined calculation to specify the moving direction of the movable table, the amount of change thereof, and the like and output it as the position information to the outside.

Therefore, the movement information of the movable table or the position information after the movement can be output to the outside in real time, and the operator can easily grasp the movement direction of the movable table, the deviation of the position after the movement, etc. from the outside, You can quickly identify the need for a fix or fix. For this reason, the movement of the auxiliary table (i.e., movable table) can be executed with high accuracy and speed.

Further, a plurality of position information detection sensors that detect movement information of the movable table and output them to the outside are distributed and equipped in a plurality of locations of the auxiliary table, respectively, and are determined based on information detected by the plurality of position information detection sensors. It is possible to provide a position information calculating circuit unit which calculates the moving direction of the movable table, the amount of change thereof, and the like and outputs the position information to the outside as position information.

Therefore, the movement information of the movable table or the position information after the movement can be output to the outside in real time. In addition, since the operator can easily grasp the moving direction of the movable table, the deviation of the position after the movement, etc. from the outside, the operator can quickly grasp the necessity of correcting or correcting the movement, and the movement of the auxiliary table (ie, the movable table). The job can be executed quickly and with high precision.

It is also possible to configure the driven magnet by a permanent magnet.

For this reason, since the electricity supply circuit required for an electromagnet becomes unnecessary and the structure is simplified by that, productivity and maintenance property can be improved, the failure rate of the whole apparatus can be reduced, and in this respect, durability Improvement can be aimed at.

{Tenth Embodiment}

32 to 43 show a tenth embodiment of the present invention. 32 to 34, reference numeral 1 denotes a movable table for precision work. 2 denotes a table support mechanism. This table support mechanism 2 is arranged in the lower part of the movable table 1 in FIG. 32, and allows the said movable table 1 to move to arbitrary directions in the same plane, It has a home position return function with respect to this movable table 1, and is comprised so that this movable table 1 may be supported in the state which can always add an original position return force to this movable table 1.

This table support mechanism 2 is supported by the case main body 3 as a main body part.

In this embodiment, this case main body 3 is formed in the box shape which opened up and down as shown in FIG.

Reference numeral 4 denotes an electronic drive means for driving the movable table 1. This electronic drive means 4 is equipped with the function by which the main part is supported by the case main body 3 side, and gives a predetermined movement force to the said movable table 1 according to the instruction | command from the outside. 3A designates the drive means support part protruded around the inner wall part of the case main body 3. As shown to FIG. The electromagnetic drive means 4 which concerns on this embodiment is arrange | positioned between the movable table 1 and the auxiliary table 5 mentioned later.

The auxiliary table 5 is arrange | positioned below the movable table 1 in FIG. The auxiliary table 5 is arranged in parallel with the movable table 1 at a predetermined interval and connected to the movable table 1. And the movable table part 15 is comprised by this auxiliary table 5 and the said movable table 1.

The said table support mechanism 2 is equipped in this auxiliary table 5 side, and is comprised so that the said movable table 1 may be supported through this auxiliary table 5.

The electromagnetic drive means 4 includes four square-shaped driven magnets 6A, 6B, 6C, and 6D, each of which is fixed to a predetermined position of the auxiliary table 5, as described later, and each of the driven parts. One relatively large quadrangular annular drive coil 7 as a drive coil in which the respective coil edges 7a, 7b, 7c, and 7d are disposed opposite to the magnets 6A to 6D, and The fixed plate 8 which supports the annular drive coil 7 in the fixed position is provided.

As shown in FIG. 32, the fixing plate 8 is arranged on the movable table 1 side of the auxiliary table 5 and is supported by the case main body 3.                 

Here, the stator part which is a main part of the said electronic drive means 4 is comprised by the annular drive coil 7 and the fixed plate 8.

When the annular drive coil 7 is set to the operating state, the driven magnets 6A to 6D are placed in a direction orthogonal to the respective coil sides between the driven magnets 6A to 6D. Generates an electronic driving force to drive the repulsion. For this reason, when conveying the said movable table part 15 to the direction which is not orthogonal to each coil edge | side 7a-7d (direction oblique to each coil edge | side 7a-7d), at least as mentioned later, With the combined force of the electromagnetic driving force for each of the two or more driven magnets 6A to 6D, the transfer of the movable table 15 is performed.

Further, a braking plate 9 made of a nonmagnetic metal member is provided at each of the coil edges 7a to 7d of the annular drive coil 7 facing the driven magnets 6A to 6D. 6A to 6D) are arranged individually adjacent to the magnetic pole surface. This braking plate 9 is fixed to the annular drive coil 7 side (in the present embodiment, the fixed plate 8 side). Reference numerals 9A and 9B denote spacer members for supporting the braking plate 9.

This will be described in more detail below.

[Movable table part]

First, in FIGS. 32-34, the movable table 1 which concerns on this embodiment is formed in circular shape, and the auxiliary table 5 is formed in square shape. The auxiliary table 5 faces the movable table 1 and is arranged in parallel at a predetermined interval, and is integrally connected to the movable table 1 via a connecting post 10 at its center. It connects, and the movable table part 15 is comprised by this.

For this reason, this movable table 1 can move integrally and rotate integrally, maintaining the parallel state with the auxiliary table 5.

The connecting post 10 is a connecting member for connecting the movable table 1 and the auxiliary table 5 as described above, and has end faces having flange portions 10A and 10B at both ends thereof. And the projections 10a and 10b which are caught by the positioning holes 1a and 5a formed in the respective centers of the movable table 1 and the auxiliary table 5, respectively, are formed at the outer center of both ends thereof. have.

The movable table 1 and the auxiliary table 5 are positioned by the protrusions 10a and 10b and the flange portions 10A and 10B, are fixed to the connecting posts 10, and are integrated. In this integration, although an adhesive agent is used in this embodiment, even if it is partially joined by welding, the protrusion 10a, 10b part is pushed in the positioning hole 1a, 5a, and the other part is an adhesive agent. Alternatively, it may be integrated by welding or the like.

In addition, one of the movable table 1 or the auxiliary table 5 may be detachably fixed to the flange portion 10A or 10B of the connecting support 10 by screwing. In this case, after screwing, some rust pins may be inserted between both of them for positioning fixing (not shown). In this way, the integration of the movable table 1 and the auxiliary table 5 can be implemented more effectively, and it is convenient.

[Table support mechanism]                 

The table support mechanism 2 according to the present embodiment allows the movable table 1 to move freely in any direction on the same surface without changing its height position while supporting the movable table 1. When the external force is released at the same time, the original table has a home position return function for returning the movable table 1 to its original position, and the auxiliary table 5 executes this function.

In this table support mechanism 2, a link mechanism is applied to a three-dimensional space as a whole, and piano wires (table side piano wires) as two rod-shaped elastic members provided at predetermined intervals (2A) ) And piano wire 2B (main body side piano wire) as one set, four pairs are prepared previously corresponding to the corner part around the edge part of the auxiliary table 5, and these four sets of piano wires 2A and 2B are each , Divided into four corner portions of the relay plate 2G as the relay member formed in a quadrangular shape, and are planted in an upward direction, respectively. For each of the piano wires 2A and 2B, ones each having the same rigidity are used.

Here, for the piano wires 2A and 2B, if it is a rod-shaped elastic member having rigidity sufficiently suitable for supporting the movable table 1 and the auxiliary table 5, it is a different material instead of this piano wire. It may be formed.

The auxiliary table 5 is supported from below by four piano wires 2A located inside of each of the piano wires 2A and 2B, and is provided by four piano wires 2B located outside. The relay plate 2G as the relay member is configured to freely swing from the main body 3.                 

As a result, the movable table 15 (that is, the movable table 1 and the auxiliary table 5) is formed by the relay plate 2G and the four piano wires (rod-shaped elastic members) 2A and 2B, respectively. It is supported in a stable form in the air, and the movement in the horizontal plane is freely movable in a predetermined range in any direction while maintaining the same height position as described later. The rotational motion in the same plane can be almost similarly possible.

The upper end of the four table side piano wires 2A is fixed to the auxiliary table 5 in FIG. 32, and the lower end is fixed to the relay plate 2G. Reference numerals 5A and 5B denote lower projections provided at two locations on the lower surface side of the auxiliary table 5. The fixed position of the table side piano wire 2A is set by these lower protrusions 5A and 5B.

In addition, outside of these four table side piano wires 2A, the main body side piano wires 2B are arranged individually and in parallel to each other at a predetermined interval S, respectively. It is. The main body side piano wire 2B has a lower end thereof fixed to a relay plate (relay member) 2G similarly to the table side piano wire 2A, and an upper end thereof provided on an inner wall of the case main body 3. It is fixed to the side protrusion part 3B.

Each of these piano wires 2A, 2B is formed of an elastic wire rod having rigidity sufficiently suitable for supporting the movable table 1 and the auxiliary table 5.

As a result, the movable table 1 is first supported by the four table side piano wires 2A on the inside of the relay plate 2G together with the auxiliary table 5, and the four table side pianos. Within the elastic limit of the line 2A, parallel movement and in-plane rotation are permitted in accordance with the principle of the link mechanism.

On the other hand, the relay plate 2G is suspended from the main body side protrusion 3B by the four table side piano wires 2B on the outer side of the relay plate 2G, and therefore, the case body 3 is not supported. Parallel movement and in-plane rotation are likewise allowed.

For this reason, when the auxiliary table 5 (that is, the movable table 1) is given an external force and moves or rotates in the surface, as shown in Fig. 49 to be described later, the respective pianos on the table side and the case main body side will be described. The lines 2A and 2B elastically deform at the same time, and the relay plate 2G moves up and down while maintaining a parallel state. That is, when the auxiliary table 5 (that is, the movable table 1) is moved or rotated in the plane by the external force, the variation of the height position is absorbed by the relay plate 2G.

This enables the movable table 1 to move while maintaining the same height in any direction within the elastic limits of the respective piano wires 2A and 2B even if the movable table 1 is moved with an external force applied thereto.

In the present embodiment, four pairs of the piano wires 2A and 2B on the table side and the case body side are provided at almost equal intervals, while the piano wire 2A on the table side and the piano wire 2B on the case body side are provided. ) Is provided in close proximity at predetermined intervals, so that the whole is balanced in strength, and there is an advantage that the movable table 1 can be moved in a stable state.                 

Here, the piano wires 2A and 2B on the table side and the case body side have the same diameter and have the same elasticity, and the length L of the exposed portion is all set the same. Each of the piano wires 2A and 2B is arranged in the left and right directions with respect to the Y axis, and is also arranged in the vertical direction with respect to the Y axis, as shown in Figs. 32 and 34, respectively. have.

In this case, if each of the piano wires 2A and 2B is arranged at a position that is linearly symmetrical with respect to the y-axis and the Y-axis (or if each of the piano wires 2A and 2B are almost evenly arranged), You may arrange | position at positions other than the position shown in FIG.

By arranging the respective piano wires 2A and 2B, elastic stresses are uniformly generated in the piano wires 2A and 2B in the movement of the movable table 1, so that the movable table 1 The advantage that the movable table 1 can be smoothly moved including the home position return operation can be obtained.

Thus, in the said table support mechanism 2, when the auxiliary table 5 slides in the same direction as a whole, each piano wire 2A, 2B of each set will deform | transform similarly. In this case, since the main body side piano wire 2B elastically deforms in the state in which the edge part was supported, the height position of the auxiliary table 5 becomes unchanged by the deformation | transformation operation of the table side piano wire 2A which elastically deforms similarly. Instead, the height position of the relay plate 2G commonly supported by both piano wires 2A and 2B fluctuates.

In other words, this relay plate 2G absorbs the fluctuation of the height position resulting from the deformation of both piano wires 2A and 2B, whereby the auxiliary table 5 (that is, the movable table 1) Will slide in the same plane without fluctuating overall height. In this case, when the driving force is released from the auxiliary table 5, the auxiliary table 5 returns to its original position in a straight line by the spring action of the piano wires 2A and 2B (initiation of the home position return function).

Further, even when the movable table 15 is rotationally driven in the same plane (within a predetermined angle range), the movable table 15 is rotated in the same plane while maintaining substantially the same height as a whole. It is done. Also in this case, when the driving force is released, the auxiliary table 5 returns to its original position in a straight line by the spring action of the piano wires 2A and 2B (initiation of the home position return function).

Here, although the case where the table support mechanism 2 was equipped with four sets of eight pianos 2A and 2B, the two piano wires 2A and 2B were appropriately balanced (for example, etc.). By disposing at intervals), three to six pieces may be configured. In this case, the three sets of six piano wires 2A, 2B arrange one pair of piano wires 2A, 2B in close proximity to each other, and as a whole, the three sets of piano wires 2A, 2B are disposed at substantially equal intervals ( It may be installed in parallel at three places). In addition, five or more sets of both piano wires 2A and 2B may be woven together.

[Electronic drive means]

The electromagnetic drive means 4 according to the present embodiment includes four driven magnets (electromagnets are used in this embodiment) 6A to 6D provided on the auxiliary table 5, and each of the driven magnets. An annular drive coil 7 as a drive coil that imparts a predetermined electromagnetic force to the movable table 1 in a predetermined movement direction through 6A to 6D, and a fixed plate 8 that supports the annular drive coil 7. ).

As shown in Fig. 32, the fixing plate 8 is provided on the movable table 1 side (between the auxiliary table 5 and the movable table 1) of the auxiliary table 5, the circumference of which is the case. The main body 3 is equipped with fixing. Here, with respect to this fixing plate 8, only the left and right both ends of FIG. 32 may be set as the structure supported by the case main body 3. As shown in FIG.

In the center part of this fixing plate 8, 8 A of through-holes which allow parallel movement in the predetermined range of the said support | pillar 10 are formed. Although 8 A of circular through holes are formed in this embodiment, the through-hole 8A may be square or other shape may be sufficient as it.

A part or all of the circumference of the fixed plate 8 is connected to and supported by the main body side protrusion 3. In this case, the fixing plate 8 and the main body side protrusion 3A may be integrated with a plurality of rust pins or the like after the screw stops, or may be integrated with welding or the like in order to solidify the integration thereof.

In this way, the displacement and movement in the micron (micrometer) unit of the movable table 1 can also respond smoothly to this, without showing the positional displacement with respect to the case main body 3. As shown in FIG.

The annular drive coil 7 is arrange | positioned in the state which matched the center part with the origin on the Y-Y plane assumed as the origin of the center part of the coil support surface on the said fixing plate 8 as an origin. Each of the driven magnets 6A to 6D individually corresponds to a portion of each of the coil sides 7a, 7b, 7c, and 7d that intersects the X-axis and the Y-axis of the drive coil 7. It is arranged.

That is, the four driven magnets 6A to 6D according to the present embodiment are opposite to the respective coil sides of the magnetic poles (each side of the annular drive coil 7 as shown in Figs. 33 and 34). The electromagnet of a quadrangular shape is used, and it arrange | positions and adhere | attaches on the Y-axis and Y-axis of the equidistant position from a center in the Y-Y plane assumed on the upper surface of the auxiliary table 5, respectively.

For this reason, in this embodiment, when the energization direction of the annular drive coil 7 is specified, for example, and electricity supply is started, correspondingly to this, first, four driven magnets 6A-6D will be described later. A predetermined operating current is energized in part or all of the magnetic poles, so that magnetic poles (N pole, S pole, or no pole) are set in accordance with the transfer direction of the movable table portion 15. At the same time, the magnitude of the magnetic force of each of the driven magnets 6A to 6D including the annular drive coil 7 is adjusted by the energization control, whereby the movable table 15 is in a predetermined direction. Is transferred to.

Here, the moving direction of each of the driven magnets 6A to 6D is a direction orthogonal to each coil side 7a to 7d of the annular drive coil 7 (that is, outward from the origin on the Ⅹ-Y plane). Direction), the rotational drive with respect to the movable table 15 is not made, and is limited to the movement to the 360 ° direction within the same plane.

Action of the electromagnetic drive means 4 on the conveyance direction with respect to the movable table part 15 and its drive feed force (energized drive with respect to the annular drive coil 7 and four driven magnets 6A-6D) This will be described in detail with reference to FIGS. 37 to 38. In FIG. 37 and FIG. 38, rotational drive by the electricity supply to a drive coil is shown as there is no.

[Annular drive coil]

The triangular annular drive coils 7 forming the main portion of the electromagnetic drive means 4 are formed in an octagonal shape in which the corner portions are cut out, as shown in Figs. It is formed in the square shape provided with two coil edges 7a, 7b, 7c, and 7d.

For this reason, the energization direction of each coil side 7a-7d is specified externally by the operation control system 20 mentioned later, and correspondingly, the energization direction of four driven magnets 6A-6D, and an energization current are corresponded to this. By controlling the magnitude of the variable (including the energization stop control), for the driven magnets 6A to 6D, each of the driven magnets 6A, 6B, 6C, or 6D is prescribed according to Fleming's left-hand rule. The electromagnetic force (reaction force) pressed in the direction (direction orthogonal to the coil edge 7a, 7b, 7c, or 7d) can be output.

In addition, by selecting and combining the directions of the electromagnetic forces generated in the four driven magnets 6A to 6D in advance, the total force of the electromagnetic driving forces generated in the four driven magnets 6A to 6D is transferred to the movable table portion 15. It becomes possible to match to a direction, and can move this movable table part 15 toward arbitrary directions on a X-Y plane.

A series of energization control methods for these four driven magnets 6A to 6D will be described in detail in the description points (Figs. 37 to 38) of the program storage section 22 described later.                 

Here, on the outer side and the inner side of the annular drive coil 7 at least at the same height as the height (in the Y-axis direction) of the annular drive coil 7, the driven magnets 6A to the same. In the range including the operating range of 6D), a magnetic material such as ferrite may be filled with equipment.

[Position information detecting means]

The movement position of the movable table part 15 driven by the said electronic drive means 4 is detected by the positional information detection means 25. As shown in FIG.

As shown in Fig. 35, the positional information detecting means 25 according to the present embodiment collectively refers to the entirety of the capacitive sensor group 26 (capacitive detecting electrodes 26 # 1 to 26 # 4) having a plurality of capacitive detection electrodes. And a plurality of capacitive change components detected by the capacitive sensor group 26, and at the same time perform predetermined calculations and send them to the table drive control means 21 of the operation control system 20 described later as position change information. It is a structure provided with the positional information calculating circuit 27 as a calculating part.

The position information calculation circuit (operation section) 27 converts the signal conversion circuit section 27A for separately voltage converting the plurality of capacitance change components detected in the capacitive sensor group 26 and the signal conversion circuit section 27A. Converting and outputting a voltage signal relating to a plurality of capacitive change components to a Y-direction signal VY and a Y-direction position signal VY indicating a position on the Y-Y coordinate by a predetermined calculation, and calculating and outputting a rotation angle signal θ. It is comprised by the position signal calculation circuit part 27B.

The capacitive sensor group 26 including the plurality of detection electrodes is opposed to the lower surface portion of the periphery of the auxiliary table 5 as shown in FIGS. 32 to 34 and is disposed on the upper surface of the main body side protrusion 3B. Eight square capacitor detection electrodes 26 # 1, 26 # 2, 26 # 3, 26 # 4, and 26Y1, 26Y2, 26Y3, 26Y4 arranged at predetermined intervals, and correspondingly to the lower surface portion around the auxiliary table 5 It is comprised by the comparatively wide common electrode (not shown) provided continuously.

The position detection sensor is composed of a combination of a plurality of capacitance detection electrodes 26'1, 26'2, 26'3, 26'4, and 26Y1, 26Y2, 26Y3, 26Y4 and a common electrode (not shown). The electrodes 26'1, 26'2, 26'3, 26'4, 26Y1, 26Y2, 26Y3, 26Y4 are assumed to be treated as position detection sensors.

A pair of capacitive detection electrodes (position detection sensors) 26'1, 26'2 are respectively moved up and down at the right end portions of FIGS. 33 and 34 among the capacitance detection electrodes (position detection sensors) 26'1 to 26'4 and 26Y1 to 26Y4. A predetermined pair of capacitor detection electrodes (position detection sensors) 26'3 and 26'4 are provided at the left end portions of Figs. 33 and 34 at predetermined intervals along the upper and lower sides. .

In addition, among each of the capacitance detection electrodes 26Ⅹ1 to 26Ⅹ4 and 26Y1 to 26Y4, a pair of capacitance detection electrodes (position detection sensors) 26Y1 and 26Y2 are arranged at predetermined intervals along the left and right in the upper ends of FIGS. 33 and 34. The other pair of capacitive detection electrodes (position detection sensors) 26Y3 and Y4 are provided at the lower ends of Figs. 33 and 34 at predetermined intervals along the left and right.

That is, each of the eight capacitive detection electrodes (position detection sensors) 26 Ⅹ 1 to 26, 4 and 26 Y1 to 26 Y 4 according to the present embodiment is shown in Figs. Arranged in line symmetry position.

And when the said movable table part 15 is provided to the electromagnetic drive means 4, for example, and it moves to the direction of arrow F (upper right direction in drawing), as shown in FIG. 36, this embodiment In the figure, one position detection sensor 26'1, 26'2, 26Y1, 26Y2 located on both sides (and in the up and down direction) of the auxiliary table 5 and the other position detection sensor 26'3, 26'4, 26Y3, 26Y4 ), The capacitance change component detected by the? Is sent to the position signal calculation circuit 27B after voltage conversion by the signal conversion circuit 27A, and the respective position conversion voltages are inputted by the position signal calculation circuit 27B to carry out the Ⅹ direction. The position signal VV-Y is configured to differentially output the position signal VY.

Here, when the movable table part 15 rotates in the same plane by the external force or the malfunction of the electronic drive means 4, in this embodiment, each part operates similarly to the case mentioned above, and functions similarly. The change component is subjected to voltage conversion and differentially output as a predetermined rotation angle signal θ. In this case, it is actually determined that the operation table unit 15 is abnormal in the operation control system 20 described later, and the corrective operation is performed.

Here, together with the movement of the movable table 15, each of the eight capacitance detection electrodes (position detection sensors) detects the capacitance change in real time and outputs it to the position information calculation circuit (operation section) 27. The positional information calculating circuit (operation unit) 27 specifies the moving direction and the moving amount of the movable table unit 15 based on the eight sensor information.                 

In this case, when the capacity change is not seen in each of the two pairs (four) of position detection sensors equipped to be orthogonal to the Y axis in the direction along the Y axis, for example, the movable table is located along the X axis ( Without the rotational movement). At the same time, the movement amount is determined by determining the increase and decrease of the capacitance of the two pairs of position detection sensors 26 # 1, 26 # 2, and 26 # 3, 26 # 4 in the X-axis direction.

In addition, when the position detection sensors in both the Y-axis direction and the Y-axis direction detect the same capacitance change, for example, the movable table 1 moves in the Y-axis positive direction within the first upper limit as shown in FIG. 36. Means movement in the direction of 45 ° (without rotation operation), and the movement direction is determined by the pattern of increase and decrease of the capacity of each position detection sensor, and the amount of movement is the capacity of each position detection sensor. It is specified by the change amount of.

The specification of the movement direction by the pattern of the capacitance change of each position detection sensor, and the relationship between the variation amount of the capacity of each position detection sensor and the movement amount of the movable table 1 is experimentally specified previously, for example, It may also be mapped and stored in a memory or the like, and the positional displacement or the like may be determined based on this. In this way, the arithmetic processing can be speeded up.

In addition, in the present embodiment, for example, noise applied simultaneously to each of the capacitance detection electrodes on the left and right (and up and down) in Fig. 34 is applied to a differential output (for example, one end in the y-axis direction). Taking the difference of the capacitance change detected by the capacitance detecting electrode disposed at the other end: external noise rejection function, and at the same time, the change is measured after the measured value is voltage-converted. For example, "(+ v ')-(-vX) = 2vX" is summed and output. For this reason, there exists an advantage that the position change information of the auxiliary table 5 (movable table 1) can be output with high sensitivity.

[Operation control system]

In this embodiment, the said electromagnetic drive means 4 drives the said annular drive coil 7 and each of four driven magnets 6A-6D individually, and controls the movement of the movable table part 15. FIG. Or the operation control system 20 which regulates a rotation operation is provided in parallel (refer FIG. 35).

The operation control system 20 has an energization direction setting function for setting and holding the energization direction for the annular drive coil 7 in a predetermined direction (one or the other), and the energization current to the annular drive coil 7. Drive coil energization control function for varying the size of the magnetic pole and magnetic pole individual setting for operating the magnetic poles of the driven magnets 6A to 6D individually by operating in accordance with the energization direction to the annular drive coil 7. The function and the magnetic force strength of each of the driven magnets 6A to 6D are individually set (set by variably controlling the energizing current) in accordance with an external command, and thereby the movable table section 15 And a table motion control function for adjusting the conveying direction and the conveying force with respect.

The operation control system 20 uses the annular drive coils 7 and the driven magnets 6A to 6D of the electronic drive means 4 to perform the above functions. Table drive control means 21 which drives separately along the energization control mode and controls the movable table 15 to move in a predetermined direction, and the table drive control means 21 are provided in parallel to the movable table 1 ) And a program storage section 22 in which a plurality of control programs relating to a plurality of control modes (in this embodiment, eight energization control modes of A1 to A8) in which the movement direction and the amount of movement thereof are specified, and each of them are stored. And a data storage unit 23 storing predetermined data or the like used in the execution of the control program (see FIG. 35).

Moreover, the table drive control means 21 is provided in parallel with the operation command input part 24 which instructs the annular drive coil 7 and the predetermined | prescribed control operation with respect to each driven magnet 6A-6D. In addition, the table drive control means 21 is configured such that the positional information during and after the movement of the movable table 1 is detected by the positional information detection means 25 and arithmetic processing is sent.

The various control functions of the operation control system 20 are collectively included in the plurality of energization control modes A1 to A8 of the program storage unit 22, and the operation command input unit 24 is provided. The selection is made based on an externally entered selection command. Through the selected predetermined control modes A1 to A8, the various control functions are operated and the movable table 1 is conveyed in a predetermined direction based on an external command.

This will be described in more detail.

The table drive control means 21 according to the present embodiment operates on the basis of the command from the operation command input unit 24 to select a predetermined energization control mode from the program storage unit 22 to perform the annular drive coil 7. ) And the main control unit 21A for energizing and controlling a predetermined DC current including zero in each of the four driven magnets 6A to 6D, and the main control unit 21A. A coil selection drive control section 21B for driving control of the annular drive coil 7 and the four driven magnets 6A to 6D simultaneously or separately along the modes A1 to A8 is provided.

The main control unit 21A also functions to calculate the position of the movable table 1 or perform various other calculations based on the input information from the positional information detecting means 25 that detects the table position. At the same time has a combination.

Here, reference numeral 4G denotes a power supply circuit portion for energizing a predetermined current through the annular drive coil 7 and the four driven magnets 6A to 6D of the electronic drive means 4.

Further, the table drive control means 21 inputs information from the position information detection means 25 to perform a predetermined calculation, and based on this, the movement destination set by the operation command input unit 24 in advance. A position displacement calculation function for calculating a deviation from the reference position information of and the movable table unit 15 at the reference position of the preset movement destination by driving the electronic drive means 4 based on the calculated position displacement information. It is equipped with the table position correction function of conveyance control.

For this reason, in the tenth embodiment, when the moving direction of the movable table 15 is shifted due to disturbance or the like, the movable table 15 is transferred and controlled in a predetermined direction while correcting this deviation. As a result, the movable table 15 is quickly and accurately transferred to the target position set in advance. In this case, the correction of the positional displacement is performed by adjusting the energizing current of each of the driven magnets 6A to 6D during energization driving.

[Program storage part]

The table drive control means 21 is provided with an annular drive coil 7 and four of the electronic drive means 4 in accordance with a predetermined control program (predetermined control mode) previously stored in the program storage section 22. Each of the driven magnets 6A to 6D has a predetermined relationship and is configured to drive control individually.

That is, in the program storage unit 22 according to the present embodiment, the control program for the drive coil which specifies the energization direction for the annular drive coil 7 and variably sets the magnitude of the energized current, and the annular drive coil 7. It functions when the direction of energization with respect to is specified, correspondingly to the direction of energization of each of the four driven magnets (electromagnets) individually to specify the N pole or the S pole of the magnetic pole, and includes the energization stop. A plurality of magnet control programs for individually varying the magnitude of the energized current are stored. At the same time, the operation timings of the respective control programs are collectively stored in eight sets of energization control modes A1 to A8 (see Figs. 37 and 38).

Here, eight sets of energization control modes A1 to A8 in the tenth embodiment will be described based on FIGS. 37 to 38.

37, respective energization control modes in the case of conveying the movable table part 15 toward the positive direction or the negative direction of the Y-axis, or the positive direction or the negative direction of the Y-axis, respectively. An example (charted) of (A1 to A4) is shown.                 

In each of the energization control modes A1 to A4 in this FIG. 37, as shown by an arrow A, the energization direction of the DC current to the annular drive coil 7 is set to right rotation in this embodiment. have.

(Control mode A1)

The control mode A1 in this tenth embodiment shows an example of the energization control mode for conveying the movable table 1 in the positive direction of the X axis (see FIG. 37).

In this control mode A1, the driven magnets 6B and 6D on the Y-axis are energized and stopped, and the end surface portion facing the coil side 7a of the driven magnet 6A on the X-axis is opposed. Is set to the N pole, and a cross-section portion of the driven magnet 6C on the y-axis that faces the coil side 7c is set to the S pole.

For this reason, in the coil edge | side 7a, 7c part of the annular drive coil 7, the electromagnetic drive force of the direction shown by the dotted arrow in this coil edge | side 7a, 7c generate | occur | produces, and the reaction force (cyclic drive coil ( 7) is fixed], and the driven magnets 6A and 6C are driven in the repulsion in the direction indicated by the solid arrow (in the drawing, to the right), whereby the movable table 15 is formed on the X-axis. Are transported in the positive direction.

(Control mode A2)

This control mode A2 shows an example of the control mode for conveying the movable table 1 to the negative direction of a Y-axis (refer FIG. 37).

In this control mode A2, the point where the setting of the magnetic poles of the driven magnets 6A, 6C on the X axis is reversed compared to the case of the control mode A1 is different. Others are the same as in the case of the control mode A1.

For this reason, in the coil side 7a, 7c part of the annular drive coil 7, the electromagnetic drive force generate | occur | produces in the opposite direction to the case of the control mode A1 on the principle similar to the case of the said control mode A1, By the reaction force, the driven magnets 6A and 6C are driven back in the direction indicated by the solid arrow (left side in the drawing), whereby the movable table 15 is transferred in the negative direction on the X axis. .

(Control mode A3)

This control mode A3 shows an example of the control mode for conveying the movable table 1 to the positive direction of a Y-axis (refer FIG. 37).

In this control mode A3, the driven magnets 6A and 6C on the X axis are subjected to energization stop control. The end face of the driven magnet 6B on the Y axis that faces the coil side 7b is set to the N pole, and similarly faces the coil side 7d of the driven magnet 6D on the Y axis. The cross section is set to the S pole.

For this reason, in the coil edge | side 7b, 7d part of the annular drive coil 7, the electromagnetic drive force of the direction shown by the dotted arrow in this coil edge | side 7b, 7d generate | occur | produces, and the reaction force (cyclic drive coil ( 7) is fixed], and the driven magnets 6B and 6D are driven in the repulsion in the direction indicated by the solid arrow (upper direction in the drawing), whereby the movable table 15 is positioned on the Y axis. Are transported in the positive direction.

(Control mode A4)

This control mode A4 shows an example of the control mode for conveying the movable table 1 to the negative direction of a Y-axis (refer FIG. 37).

In this control mode A4, the difference is that the setting of the magnetic poles of the driven magnets 6B and 6D on the Y axis is reversed as compared with the case of the control mode A3. Others are the same as in the case of the control mode A3.

For this reason, in the coil edge 7b, 7d part of the annular drive coil 7, the electromagnetic drive force generate | occur | produces on the principle similar to the case of the said mode A3, and the driven magnets 6B, 6D are solid line by reaction force. It drives in the direction shown by the arrow of (refer to the downward direction in drawing), and the movable table part 15 is conveyed to the negative direction on a Y-axis by this.

Subsequently, an example (shown in the diagram) of the respective energization control modes A5 to A8 when the movable table unit 15 is transferred toward the four upper limit directions on the X-Y plane coordinates will be described. This is shown in FIG.

In each of the energization control modes A5 to A8 in this FIG. 38, as shown by an arrow A, the energization direction of the DC current to the annular drive coil 7 is set to right rotation in this embodiment. have.

(Control mode A5)

The control mode A5 in this tenth embodiment shows an example of the energization control mode for transferring the movable table 1 in the direction of the first upper limit on the X-Y plane coordinate (see FIG. 38).

In this control mode A5, the four driven magnets 6A to 6D are energized and controlled at the same time, and the magnetic poles N and S are opposed to the coil sides 7a and 7b of the annular drive coil 7. The magnetic poles of the cross-sections of the cross sections at the locations opposite to the coil sides 7c and 7d of the annular drive coil 7 are set to the N poles, respectively.

For this reason, in each coil side 7a-7d part of the annular drive coil 7, it will be in the same state as the said control mode A1 and A3 operated simultaneously, and the combined force of the control mode A5 of FIG. As shown in the column, the direction of the first upper limit is directed. Thereby, the movable table part 15 is conveyed toward the 1st upper limit direction on a Y-Y plane coordinate.

Here, the conveyance angle θ in the first upper limit direction with respect to the y-axis variably controls the magnitude of the energizing current of each of the driven magnets 6A to 6D, and acts on each of the driven magnets 6A to 6D. By changing the electronic driving force, the size can be freely set. Thereby, the movable table part 15 can be freely controlled to transfer to arbitrary directions of a 1st upper limit direction.

(Control mode A6)

This control mode A6 shows an example of the control mode for conveying the movable table 1 toward the 3rd upper limit direction (direction opposite to the direction of a 1st upper limit) on a Y-Y plane coordinate (FIG. 38).

In this control mode A6, four each of the driven magnets 6A to 6D is energized and controlled at the same time, and the magnetic poles N and S are set opposite to those in the control mode A5.

For this reason, in each coil side 7a-7d part of the annular drive coil 7, it will be in the same state as the said control mode A2 and A4 operated simultaneously, and the combined force will be the control mode A6 of FIG. As shown in the column of Fig. 3, the direction of the third upper limit is oriented. Thereby, the movable table part 15 is conveyed toward the 3rd upper limit direction on a Y-Y plane coordinate.

Here, the feed angle θ in the third upper limit direction with respect to the y-axis variably controls the magnitude of the energizing current of each of the driven magnets 6A to 6D, and acts on each of the driven magnets 6A to 6D. By changing the electronic driving force, the size can be freely set. Thereby, the movable table part 15 can be freely controlled to transfer to arbitrary directions of a 3rd upper limit direction.

(Control mode A7)

This control mode A7 shows an example of the control mode for conveying the movable table 1 toward the 2nd upper limit direction on a Y-Y plane coordinate (refer FIG. 38).

In this control mode A7, the four driven magnets 6A to 6D are energized and controlled at the same time, and the magnetic poles N and S are opposed to the coil sides 7b and 7C of the annular drive coil 7. The magnetic poles of the cross-sections of the sections at the locations opposite to the coil sides 7c and 7a of the annular drive coil 7 are set to the N poles, respectively.

For this reason, in each coil side 7a-7d part of the annular drive coil 7, it will be in the same state as the said control mode A2 and the control mode A3 operated simultaneously, and the combined force is the control mode A7 of FIG. As shown in the column of Fig. 2, the direction of the second upper limit is directed. Thereby, the movable table part 15 is conveyed toward the 2nd upper limit direction on a Y-Y plane coordinate.

Here, the transfer angle θ in the second upper limit direction with respect to the y-axis variably controls the magnitude of the energizing current of each of the driven magnets 6A to 6D, and acts on each of the driven magnets 6A to 6D. By changing the electronic driving force, the size can be freely set. As a result, the movable table 15 can be freely transferred to any direction in the second upper limit direction.

(Control mode A8)

This control mode A8 shows an example of the control mode for conveying the movable table part 15 toward the 4th upper limit direction (direction opposite to the direction of a 1st upper limit) on a Y-Y plane coordinate ( See FIG. 38).

In this control mode A8, the four driven magnets 6A to 6D are energized and controlled at the same time, and the magnetic poles N and S are set opposite to those in the control mode A7, respectively.

For this reason, in each coil side 7a-7d part of the annular drive coil 7, it will be in the same state that the said control mode A1 and the control mode A4 operated simultaneously, and the combined force is the control mode A8 of FIG. As shown in the column of Fig. 8), the direction of the fourth upper limit is directed. Thereby, the movable table part 15 is conveyed toward the 4th upper limit direction on a Y-Y plane coordinate.

Here, the feed angle θ in the fourth upper limit direction with respect to the y-axis acts on each of the driven magnets 6A to 6D by variably controlling the magnitude of the conduction current of each of the driven magnets 6A to 6D. By changing the electronic driving force, the size can be freely set. Thereby, the movable table part 15 can be freely controlled to transfer to arbitrary directions of a 4th upper limit direction.                 

[Braking plate]

32 to 34 are located at positions adjacent to and adjacent to the magnetic pole surfaces of the four driven magnets 6A to 6D at respective coil sides 7a to 7d of the annular drive coil 7. As shown, the metal braking plate 9 made of a nonmagnetic member is arranged in an insulated state from the surroundings, and is fixed to the annular drive coil 7 side, respectively.

Each of these braking plates 9 has a function of smoothly moving the movable table portion 15 while suppressing this against the sudden movement of the movable table portion 15. Fig. 39 shows the operation principle.

Here, FIG. 39A is a partial sectional view in which a part of the braking plate 9 in FIG. 32 is omitted. 39 (B) shows a plan view (operation principle explanatory diagram) seen along the arrow A-A line in FIG. 39 (A).

In this case, when the movable table part 15 equipped with four driven magnets 6A-6D has moved abruptly, each of the driven magnets 6A-6D and the respective braking plates corresponding thereto are provided. Between (9) and electromagnetic braking (eddy current brake) of magnitude proportional to the moving speed is applied. As a result, the movable table portion 15 is suppressed in the sudden movement operation and gradually moves.

More specifically, in FIG. 39, the braking plate 9 is fixed to the coil side 7a portion of the annular drive coil 7 facing the N pole of the driven magnet 6A. Reference numerals 9A and 9B denote spacer members for fixing the braking plate 9. These spacer members 9A and 9B are formed of a nonconductive member in this embodiment.

Now, when the auxiliary table 5 moves rapidly in the right direction of the drawing as the speed V1, the metal braking plate 9 (because it is fixed) has a relatively same speed V2 (= V1) in the left direction of the drawing. As it moves rapidly. Thereby, in the braking plate 9, an electromotive force EV proportional to the speed V2 is generated in the direction shown in Fig. 39 (B) according to Fleming's right-hand rule, A symmetrical eddy current flows in the direction. The magnitude of this eddy current is also proportional to the speed V2.

Subsequently, there is a magnetic flux from the N pole in the generation area of the electromotive force EV, and therefore, between the magnetic flux of the driven magnets 6A to 6D and the eddy current in the braking plate 9 (in the electromotive force EV direction), According to the left hand rule, a predetermined moving force f1 is generated in the braking plate 9 (toward the right direction of the drawing).

On the other hand, since the braking plate 9 is fixed on the fixed plate 8, the reaction force f2 of the moving force f1 is generated as the braking force on the driven magnets 6A to 6D, and the direction thereof is the direction of the moving force f1. And in the opposite direction. In other words, this braking force f2 becomes the direction opposite to the first abrupt movement direction of the driven magnets 6A to 6D (that is, the auxiliary table 5), and the magnitude thereof is the movement speed of the auxiliary table 5 as well. Since the auxiliary table 5 has a magnitude proportional to, the sudden movement of the auxiliary table 5 is suppressed by a suitable braking force f2, and the smooth movement of the auxiliary table 5 occurs in a stable state.

Similarly, the predetermined braking force f2 is generated also in all other places of the braking plate 9.

For this reason, in the auxiliary table 5 provided with the driven magnets 6A to 6D, reciprocating movements are likely to occur at this stop point, for example, in a sudden stop operation, but the operation is appropriately performed by the braking force f2. It is suppressed and it moves smoothly smoothly. That is, as a whole, each of these braking plates 9 functions effectively, and a device in which the movable operation of the movable table 15 is stable can be obtained. Even when the movable table part 15 vibrates reciprocally microscopically by the external vibration, it functions similarly and this reciprocation microscopic vibration is suppressed effectively.

Each of the braking plates 9 also has a function of dissipating heat generated when the annular drive coil 7 is driven. In this respect, the conduction current can be set at a substantially constant level for a long time while effectively suppressing the increase in resistance under high temperature and the decrease in the conduction current value (that is, the deterioration of the electronic driving force) caused by the continuous operation of the annular drive coil 7. For this reason, the external current control with respect to the electronic driving force output from the electronic driving means can be continued in a stable state, and the secular variation (heat insulation breakdown) can be effectively suppressed, and the durability of the whole apparatus is further improved. The reliability of the whole apparatus can be improved.

[Overall operation]

Next, the overall operation in the tenth embodiment will be described. In FIG. 35, first, when an operation command for moving the movable table 1 to a predetermined position is input from the operation command input unit 24 to the operation control system 20, the main control unit of the table drive control means 21. 21A operates immediately, selects the reference position information of the moving destination from the data storage unit 23 based on this operation command, and simultaneously the predetermined control mode A1 corresponding to this from the operation program storage unit 22. To a control program relating to any one of A8 to A8. Subsequently, the coil selection drive control unit 21B is operated to drive control the one annular drive coil 7 and the four driven coils 7 of the electronic drive means 4 based on the predetermined control mode.

Here, the operation command of the content which transfer-drives the movable table 1 to the predetermined position of the positive direction of the Y-axis, for example is input to the said motion control system 20 from the operation command input part 24, and based on this, an apparatus The whole operates according to a predetermined energization control mode. 40-41 shows the state after operation in this case.

In this example, the control mode A1 shown in FIG. 37 is selected as the energization control mode, and thus the annular drive coil 7 and the four driven coils 6A to 6D are connected to this control mode A1. It works by

In this case, in the said table support mechanism 4, when the auxiliary table 5 is provided to the right side of FIG. 32 by the electromagnetic drive means 4, it will resist the elastic force of each piano wire 2A, 2B, and this auxiliary | assistant The table 5 is moved. And this auxiliary table 5 (namely, the movable table 1) has the elastic return force of each piano wire 2A, 2B, and the electromagnetic drive force of the electromagnetic drive means 4 applied to this auxiliary table 5, respectively. It stops at the balance point (moving target position) with (refer FIG. 40, FIG. 41).

40 and 41, symbol T represents the distance traveled. In addition, in FIG. 41, an oblique part shows the part where the capacitance component of the said other capacitance detection electrode 26'3, 26'4 was reduced by the movement of the auxiliary table 5, and a cross diagonal part shows the said one capacitance detection electrode. (26x1, 26x2) shows the part where the dose component increased. In addition, in this FIG. 41, the abnormal state in which there is no positional displacement to a Y-axis direction is shown.

During the operation, when the moving position of the auxiliary table 5 is out of the target position due to disturbance or the like, the above-described method is based on the information of the increase and decrease of the capacitance component of the capacitance detecting electrodes 26 # 1, 26 # 2, 26 # 3, 26 # 4. As described above, the position after the actual movement is detected, and the feed back control (not shown) for preventing the position displacement is performed.

On the other hand, when the electromagnetic driving force applied to the auxiliary table 5 is released from this state, the auxiliary table 5 is supplied with the elastic return force of the piano wires 2A and 2B and returns to its original position (invoke of the home position return function). ).

In such a series of operations, the movement operation of the auxiliary table 5 is usually rapidly performed in either case of the application control or the open control of the electronic driving force. In such a case, the auxiliary table 5 (or the movable table 1) is in a state in which the reciprocating reciprocating operation due to the inertia force and the spring force occurs at the stop position at the stop of the moving destination or the home position return. .

However, in this embodiment, this kind of reciprocating reciprocating operation is suppressed by electromagnetic braking (eddy current brake) generated between the braking plate and the driven magnet, and smoothly moves toward a predetermined position. It is controlled to stop in a stable state.

Even when an operation command for moving the movable table 1 to other predetermined positions other than the above is input from the operation command input unit 24, the main control unit 21A of the table drive control means 21 immediately starts. And the reference position information of the moving destination is selected from the data storage unit 23 based on this operation command, and at the same time, the control program for the predetermined control mode corresponding to this is selected from the operation program storage unit 22. . Subsequently, the coil selection drive control unit 21B is operated to drive control the annular drive coil 7 and the four driven magnets 6A to 6D of the electronic drive means 4 based on the predetermined control mode.

Also in this case, the same control operation and braking operation by the braking plate as described above are executed, and the auxiliary table 5 (moving table 1) moves smoothly toward a predetermined position, and in a stable state. Stop is controlled.

Thus, in the tenth embodiment, the movable table portion 15 has the same height position (within a predetermined range) from the center position without involving the sliding operation by the table support mechanism 2 to which the link mechanism is applied. It can be smoothly moved (or rotated) in either direction on the Ⅹ-Y plane while maintaining.

Therefore, in the tenth embodiment, since the double-axis X-axis movement support mechanism of the heavy double structure required in the past is unnecessary, the entire apparatus can be reduced in size and weight, and at the same time, the mobility is reduced by light weight. Significant improvement can be achieved, and parts scores can be reduced as compared with the conventional example, and durability can be remarkably improved. Moreover, since no skill is required for the adjustment at the time of assembly, productivity can be improved.

Further, even if the movable table portion 15 having the driven magnets 6A to 6D is suddenly changed in operation, between the driven magnets 6A to 6D and the braking plate 9 made of a nonmagnetic metal member. Since electromagnetic braking (eddy current brake) acts, the sudden movement of the movable table is suppressed by this, and it can move smoothly in a stable state in a predetermined direction.

Further, the braking plate 9 is provided on each coil side 7a, 7b, 7c, 7d of the annular drive coil 7 in a state facing the driven magnets 6A to 6D. The electronic drive means 4 which has a simple structure and simultaneously generates an electromagnetic drive force also has one ring on the fixed plate 8 corresponding to the driven magnets 6A to 6D provided in the auxiliary table 5 and this. It is a simple structure equipped with the drive coil 7. For this reason, miniaturization and weight reduction of the whole apparatus can be attained, mobility not only becomes favorable, but workability also becomes favorable since it does not require special skill also in an assembly work.

Further, the metal braking plate 9 made of a nonmagnetic member equipped with a cross section of the drive coils 6A to 6D side of the drive coil has a secondary circuit of the transformer in relation to the drive coil 7. A circuit such as the above is constructed, and a short-circuited form is formed through the electric resistance component of the braking plate (which indicates eddy current loss).

And in each coil side 7a, 7b, 7c, 7d of the drive coil 7 which comprises the primary side circuit in this case, compared with the case where a secondary side circuit is an open state (without a braking plate), Can carry a large current. Accordingly, although the distance between the drive coil 7 and the driven magnets 6A to 6D is increased by the braking plate 9 to some extent, the energizing current also increases, and thus the electromagnetic driving force generated in this regard. It is possible to output a relatively large electromagnetic force with respect to the driven magnets 6A to 6D without any deterioration.

In addition, this braking plate 9 also functions as a heat sink, and in this respect, it is possible to effectively suppress the secular variation (heat breakdown or the like) caused by continuous operation of the annular drive coil 7. Therefore, the durability of the whole apparatus can be increased, and also the reliability of the whole apparatus can be improved.

In addition, in this embodiment, since one annular drive coil 7 and each of the driven magnets 6A-6D corresponding to this in the electromagnetic drive means 4 were equipped, Each of the four coil edges 7a, 7b, 7c, and 7d presses the corresponding driven magnets 6A to 6D in a direction orthogonal to the Y-axis or Y-axis on the Y-Y plane. It works. For this reason, the electromagnetic driving force with respect to the auxiliary table 5 (that is, the movable table 1) always moves in either direction so that the force occurs in the direction toward the outside from the center point side on the X-Y plane. It becomes.

Therefore, even if the conveyance direction of the movable table part 15 changes, the movable table 1 can be smoothly moved (within the permissible range) in a plane without always rotating.                 

As described above, in the above embodiment, the electromagnetic driving force continuous in a predetermined direction can be output by adjusting and setting the energizing current for one annular drive coil 7 and four driven magnets 6A to 6D. Therefore, the movable table 1 can be continuously conveyed in either direction, and in this respect, the micron unit can be precisely moved.

In addition, since the drive coil is composed of one annular drive coil 7, the structure is simplified, and the entire size of the movable table portion 15 is used, including the corresponding driven magnets 6A to 6D. In the expanded state, since the movable table 15 and the stationary plate 8 are installed between each other, the oil exclusive area of the space can be reduced, and in this respect, the entire apparatus can be reduced in size and weight. Better mobility Moreover, since there are few parts points, there exists an advantage that productivity and water retention can be improved.

Here, in the tenth embodiment, the case where the driven magnets 6A to 6D are provided in the auxiliary table 5 is illustrated, but the driven magnets 6A to 6D are provided on the movable table 1 side. At the same time, the annular drive coil 7 may be arranged at a predetermined position on the fixed plate 8 so as to face this.

In addition, although the case of circular shape was illustrated about the movable table 1, a square shape may be sufficient and another shape may be sufficient. Although the case of a quadrilateral shape was illustrated about the auxiliary table 5, as long as the said function can be implement | achieved, circular shape may be sufficient and a different shape may be sufficient as it.

Although the said table support mechanism 2 has illustrated the thing which has a home position return function with respect to the movable table part 15, the table support mechanism 2 is equipped with the home position return means with respect to this movable table part 15 separately. In this case, it may be configured to remove the home position return function. Specifically, in the embodiment of the present invention, by using the piano wire made of the spring material as the link mechanism, the link mechanism has the home position return force of the movable table, but is not limited thereto. That is, the link mechanism and the original position return mechanism for returning the movable table to the original position may be separated and configured as an independent mechanism.

As described above, when the link mechanism and the home position return mechanism of the table support mechanism are configured as independent mechanisms, the home position return mechanism saves the spring force as the home position return force as the movable table moves. Moreover, the spring which the said home return mechanism generate | occur | produces by providing the sensor which detects the moved current position of a movable table, and controls the electric current value which energizes the drive coil of an electromagnetic drive means based on the position signal which the sensor detected. It is necessary to generate reaction force opposite the force.

Although the braking plate 9 according to the present embodiment exemplifies the case where the driven magnets 6A to 6D are provided for each of the driven magnets 6A to 6D, these are intended for two or more or all the driven magnets 6A to 6D. May be configured to face one braking plate.

FIG. 42 shows an example in which the braking plate of one sheet is configured to face all of the driven magnets 6A to 6D.

In FIG. 42, reference numerals 92 and 93 denote spacer members for supporting the single braking plate 9. Here, reference numeral 9a denotes a through hole that allows the support 10 to reciprocate along the fixing plate 8.

In this case, the spacer members 92 and 93 are configured to extend around the braking plate 9 and to support a part or all of the circumference of the braking plate 9 by the case body 3. ) May be omitted.

In addition, each of the driven magnets 6A to 6D and the annular drive coils 7 are replaced, and the annular drive coils 7 are provided on the side of the auxiliary table 5 or each of the driven magnets 6A to 6D. 6D) may be provided on the fixing plate 8 side. In this case, the braking plate 9 is also fixed to the annular drive coil 7 side in order to achieve the effectiveness of the function.

In addition, in the tenth embodiment, the case where four driven magnets are equidistant from the origin on the rectangular coordinates (Ⅹ-Y coordinates) is exemplified. However, a plurality of driven magnets are used for each of the driven magnets. If the movement direction (repulsion drive direction) is on the line passing through the coordinate origin (it may not be orthogonal coordinate), it may not be equidistant from an origin, and may be arrange | positioned in the position which shifted on the coordinate axis, The number may not be four.

In this case, when the movable table portion 15 is conveyed and driven in a predetermined direction by one or two or more driven magnets, an element in which a rotational force component is generated can be reliably removed in advance. For example, when four driven magnets are equidistant from the origin on rectangular coordinates (v-Y coordinates), the control operation by the motion control system 20 can be simplified. For this reason, this movable table part 15 can be conveyed to a predetermined direction quickly and smoothly.                 

In the tenth embodiment, the case where four driven magnets 6A to 6D are provided as driven magnets is illustrated. However, in the present invention, the number of driven magnets is not limited to four, but may be three. Or five or more driven magnets may be provided. In addition, the shape of this driven magnet may be another shape (for example, a cylindrical shape).

In addition, in the case where the plurality of driven magnets are appropriately equipped, the operation control system 20 allows the situation to be favorable in the direction of movement instructed from the outside (for example, at a position that functions efficiently in the feeding direction). A plurality of driven magnets may be selected and energized and driven so that the movable table portion 15 may be conveyed toward the direction of movement instructed from the outside with the combined force.

In addition, in the said 10th embodiment, when setting the conveyance direction of the movable table part 15, the case where the drive control of the electronic drive means 4 was divided into the control modes of A1-A8 was illustrated, for example, In the control mode A2, if the respective energization directions of the driven magnets 6A to 6D are the same as in the control mode A1, only the energization direction of the annular drive coil 7 is set in the reverse direction. You may employ | adopt a method.

[Other example of annular drive coil]

43A to 43D show another example of the configuration of one annular drive coil 7 arranged on the Ⅹ-Y plane, respectively.

(Triangle shaped annular drive coil)

First, Fig. 43A shows a case where the annular drive coil is formed in a regular triangle shape. The regular triangular annular drive coil 71 is formed in a circular arc shape, and is fixed to and supported by a fixing plate (not shown) on the stator side.

In addition, corresponding to the coil edges 71a, 71b, 71c of the triangular annular drive coil 71, driven magnets 6A to 6C made of electromagnets are arranged separately. Each of the driven magnets 6A to 6C is fixed to the movable table portion (not shown) that is the movable side.

Each of the driven magnets 6A, 6B or 6C receives an electromagnetic force from each of the corresponding coil sides 71a, 71b or 71c of the annular drive coil 71 individually in the movable state. Repulsion drive is performed toward the direction orthogonal to the coil edge 71a, 71b, or 71c.

Here, each of the driven magnets 6A, 6B, or 6C has each coil side 71a such that an extension line of the center line in the driving direction thereof passes an origin on the X-Y plane of the annular drive coil 71. , 71b, or 71c).

In operation of the entire apparatus, as in the case of the tenth embodiment, the operation control system operates, and a predetermined energization control mode is selected from a plurality of energization control modes specified in advance, and the annular drive coil ( 71 and each of the driven magnets 6A, 6B, or 6C are to be individually energized. The rest of the configuration is substantially the same as in the case of the tenth embodiment shown in FIGS. 32 to 41.                 

Even in this case, the movable table portion is Ⅹ-Y plane by energization control (including zero) by an operation control system that is made separately for the annular drive coil 71 and each of the driven magnets 6A, 6B, or 6C. It can transfer to arbitrary directions of a phase, and the effect similar to the case of the said 10th embodiment can be acquired.

(Circular annular drive coil)

Next, the case where an annular drive coil is formed in circular shape in FIG. 43 (B) is shown. The circular annular drive coil 72 is fixed to and supported by a fixing plate (not shown) on the stator side.

Moreover, each coil side part 72a, 72b, 72c, 72d of this annular drive coil 72 is located in the position which cross | intersects the y-axis and Y-axis on the Y-Y plane of this circular annular drive coil 72. FIG. Corresponding to)), the driven magnets 6A, 6B, 6C, and 6D made of electromagnets are arranged separately. Each of the driven magnets 6A to 6D is fixed to the movable table portion (not shown) on the mover side.

Each of the driven magnets 6A, 6B, 6C, or 6D receives an electromagnetic force from each of the corresponding coil side portions 72a, 72b, 72c, or 72d in the movable state, and receives the annular drive coil ( Repulsion drive is performed toward the direction orthogonal to the tangent of the said location of 7B).

Here, each of the driven magnets 6A, 6B, 6C, or 6D includes the respective coils such that the extension line of the center line in the driving direction passes the origin on the Ⅹ-Y plane of the annular drive coil 72. It is arrange | positioned corresponding to the edge part 72a, 72b, 72c, or 72d.                 

In operation of the entire apparatus, as in the case of the tenth embodiment, the operation control system operates, and a predetermined energization control mode is selected from a plurality of energization control modes specified in advance, and the annular drive coil ( 72 and each of the driven magnets 6A, 6B, 6C, or 6D are individually energized. The rest of the configuration is substantially the same as in the case of the tenth embodiment shown in FIGS. 32 to 41.

Even in this case, the movable table is controlled by the energization control (including zero) by the operation control system separately made for the annular drive coil 72 and each of the driven magnets 6A, 6B, 6C, or 6D. The part can be transferred in any direction on the X-Y plane, and almost the same effects as in the case of the tenth embodiment can be obtained.

(Hexagonal annular drive coil)

Next, the case where an annular drive coil is formed in square hexagon shape is shown to FIG. 43 (C). The regular hexagonal annular drive coil 73 is fixed to and supported by a fixing plate (not shown) on the stator side.

In addition, each of the six driven magnets 6A formed as an electromagnet corresponds to six coil sides 73a, 73b, 73c, 73d, 73e, and 73f of the annular drive coil 73 having a regular hexagon shape. , 6B, 6C, 6D, 6E, and 6F) are arranged separately. Each of the driven magnets 6A to 6F is fixed to the movable table portion (not shown) on the mover side.

Each of the driven magnets 6A to 6F receives an electromagnetic force separately from the respective coil sides 73a to 73f at the time of operation, and is perpendicular to the respective coil sides 73a to 73f. Towards the backlash is driven.

Here, each of the driven magnets 6A to 6F has the respective coil side portions 73a to so that the extension line of the center line in the driving direction passes the origin on the X-Y plane of the annular drive coil 73. 73f).

In operation of the entire apparatus, as in the case of the tenth embodiment, the operation control system operates, and a predetermined energization control mode is selected from a plurality of energization control modes specified in advance, and the annular drive coil ( 73 and each of the driven magnets 6A to 6F are individually controlled to conduct electricity. The rest of the configuration is substantially the same as in the case of the tenth embodiment shown in FIGS. 32 to 41.

Even in this case, the movable table portion is controlled by energization control (including zero) by the motion control system that is made separately for the hexagonal annular drive coil 73 and the driven magnets 6A to 6F. It can convey in arbitrary directions on a Y-Y plane, and the effect similar to the case of the said 10th embodiment can be obtained by this.

(8-shape annular drive coil)

Next, the case where an annular drive coil is formed in an equilateral octagonal shape is shown to FIG. 43 (D). The cyclic octagonal drive coil 74 is fixed to and supported by a fixing plate (not shown) on the stator side.

In addition, the eight driven magnets formed as electromagnets corresponding to the eight coil sides 74a, 74b, 74c, 74d, 74e, 74f, 74g, 74h of the circular octagonal drive coil 74 are formed. (6A, 6B, 6C, 6D, 6E, 6F, 6G, 6H) are arranged separately, respectively. Each of the driven magnets 6A to 6H is fixed to the movable table portion (not shown) on the mover side.

Each of the driven magnets 6A to 6H receives an electromagnetic force from each of the coil sides 74a to 74h corresponding to each other in the movable state, and faces in a direction orthogonal to each of the coil sides 74a to 74h. Individually driven backlash.

Here, each of the driven magnets 6A to 6H has the respective coil side portions 74a to 6 so that the extension line of the center line in the driving direction passes the origin on the X-Y plane of the annular drive coil 74. 73h) are individually arranged.

In operation of the entire apparatus, as in the case of the tenth embodiment, the operation control system operates, and a predetermined energization control mode is selected from a plurality of energization control modes specified in advance, and the annular drive coil ( 74) and each of the driven magnets 6A to 6H are individually energized and controlled. The rest of the configuration is substantially the same as in the case of the tenth embodiment shown in FIGS. 32 to 41.

Even in this case, the movable table portion is formed on the Ⅹ-Y plane by the energization control by the operation control system (including zero) which is made separately for the annular drive coil 74 and each of the driven magnets 6A to 6H. It can convey in arbitrary directions, and the effect similar to the case of the said 10th embodiment can be obtained by this.

{Eleventh embodiment}                 

Next, 11th Embodiment is described based on FIGS. 44-48.

In this eleventh embodiment, the four drive coils formed in the shape of a day are formed by the electronic drive means 4 according to the tenth embodiment equipped with one annular drive coil 7 as the drive coil. It is characterized by the fact that the equipped electronic drive means 142 is provided. At the same time, an operation control system 202 for efficiently driving the electronic drive means 142 is provided in place of the operation control system 20.

This will be described in detail below.

First, as in the case of the tenth embodiment, the eleventh embodiment includes the movable table portion 15 for the precision work and the movable table portion 15 for precision work, which are arranged to be movable in any direction on the same surface. While supporting the movable table portion 15, the table supporting mechanism 2 having the home position return function with respect to the movable table portion 15, and the table supporting mechanism 2 are supported. Electronic drive means 142 which is provided on the case main body 3 as a main body part and this case main body 3 side, and provides a movable force to a predetermined direction to the movable table part 15 according to the instruction | command from the outside. ).

Here, the movable table 15 is a movable table 1 for precision work and an auxiliary table parallel to the movable table 1 at a predetermined interval and integrally arranged on the same central axis ( It is comprised by 5). And as shown in FIG. 44, the table support mechanism 2 is equipped in the auxiliary table 5 side, and is comprised so that the said movable table 1 may be supported through this auxiliary table 5.                 

(About the electronic drive means 142)

The main drive part of the electromagnetic drive means 142 is supported by the case main body 3 side, and predetermined movement along the conveyance direction of this movable table part 15 to the said movable table part 15 according to the instruction | command from the outside. Equipped with a function to give power (driving power). This electromagnetic drive means 142 is arrange | positioned between the said movable table 1 and the auxiliary table 5.

Specifically, the electronic drive means 142 includes four drive coils 721, 722, 723, and 724, and inner coil edges 721a to 724a located at the center of the respective drive coils 721 to 724. ), Which fixes the four driven magnets 6A, 6B, 6C, and 6D and the four driving coils 721 to 724 mounted on the auxiliary table 5 at predetermined positions. The plate 8 is provided. The four drive coils 721, 722, 723, and 724 are formed by combining two □ -shaped coils, and the inner coil sides 721a to 724a are formed at the butt portions of the coils.

Each of the Japanese-shaped drive coils 721 to 724 has an inner coil edge 721a to 724a positioned at the center portion thereof on the Ⅹ-Y surface on which the center portion on the fixed plate 8 is assumed as the origin. It arrange | positions each on the said y-axis and the Y-axis so that it may mutually orthogonally cross-axis.

In addition, each of the four driven magnets 6A to 6D is composed of an electromagnet capable of controlling the energization from the outside, and corresponds to the inner coil edges 721a to 724a of the Japanese-shaped drive coils, respectively. They are arranged separately on the phase and the Y axis.                 

As shown in FIG. 32, the fixing plate 8 is arranged on the movable table 1 side of the auxiliary table 5 and is supported by the case main body 3. Each of the date-shaped drive coils 721 to 724 and the fixed plate 8 constitutes a stator portion which is a main part of the electronic drive means 4.

When each of the drive coils 721 to 724 is set in an operating state, the respective driven magnets 6A to 6D are placed between the respective driven magnets 6A to 6D, respectively. Electron driving force for repulsion driving in the direction orthogonal to the sides 721a to 724a is generated. In this case, the center axis of the movement direction of each of the driven magnets 6A to 6D is set to pass through the center point on the X-Y plane. In addition, when conveying the said movable table part 15 to the direction which is not orthogonal to each inner coil edge | side 721a-724a (direction oblique to each coil edge | side 7a-7d), at least as mentioned later, The transfer of this movable table part 15 is performed with the combined force of the electromagnetic drive force with respect to two or more each of the driven magnets 6A-6D.

In addition, a braking plate 9 made of a nonmagnetic metal member is provided on the inner coil edges 721a to 724a of the drive coils 721 to 724 facing the driven magnets 6A to 6D. The magnetic poles of the driven magnets 6A to 6D are arranged in close proximity (almost in contact with each other). In the present embodiment, one braking plate 9 is used, and part or all of the circumference thereof is fixed to the case body 3.

In the present embodiment, the four driven magnets 6A to 6D constituting a part of the electromagnetic drive means 142 are, as shown in FIG. 45, in the cross section of the magnetic poles (the driving coils 721 to 724, respectively). Opposing surfaces of the inner coil edges 721a to 724a of each of?) Are formed by an electromagnet having a quadrangular shape, and are arranged at an equidistant position from the center on the? -Y plane assumed on the upper surface of the auxiliary table 5. Arranged and fixed, respectively, on an axis and a Y axis.

For this reason, in the present embodiment, for example, a predetermined operating current is supplied to some or all of the four driven magnets 6A to 6D so that each of the driven magnets 6A to 6D is set to the movable state. After that, or simultaneously, each of the drive coils 721 to 724 is set in an operating state in accordance with a predetermined control mode to be described later to start energization. Then, the magnitude of the magnetic force of each of the driven magnets 6A to 6D including the respective driving coils 721 to 724 is adjusted by the energization control, whereby the movable table 15 is predetermined. Is conveyed in the direction.

In this case, the operation of the electronic drive means 142 regarding the conveying direction to the movable table 15 and its conveying driving force (with respect to the driving coils 721 to 724 and the four driven magnets 6A to 6D, respectively) Energization drive] will be described in detail with reference to FIGS. 47 to 48. In FIG. 47 and FIG. 48, the rotation drive by the electricity supply to a drive coil is not shown.

The four Japanese-shaped drive coils 721 to 724 constituting the main part of the electromagnetic drive means 142 are a combination of two cuboidal small coil parts Ka and Kb, as shown in FIGS. 44 to 45. Formed. Coil edges (inner coil edges 721a to 724a portions) are formed at portions where the two cuboidal small coil portions Ka and Kb abut, and the coil edges (inner coil edges 721a to 724a portions). In this case, the current always flows in the same direction (the current in the same direction is always flown in each of the coil sides on one side and the other side of the contacted portion). For this reason, when the direction is changed, the energization directions in the two spherical small coil parts Ka and Kb are simultaneously changed.

In this case, in this eleventh embodiment, since the energization direction of the four driven magnets 6A to 6D formed as the electromagnets is specified in advance as described later, four Japanese-shaped drive coils 721 to 724 are provided. The operation control system 20 described later in correspondence with the transfer direction of the movable table 1, in which the energization direction and the magnitude (including energization stop control) of the respective inner coil edges 721a to 724a in FIG. Is controlled. This causes the driven magnets 6A to 6D to output an electromagnetic force (reaction force) that is pressed in a predetermined direction (the direction orthogonal to the inner coil edges 721a to 724a respectively) according to Fleming's left hand rule. do.

In addition, by selecting and combining the directions of the electromagnetic forces generated in the four driven magnets 6A to 6D in advance, the total force of the electromagnetic driving forces generated in the four driven magnets 6A to 6D is transferred to the movable table portion 15. It becomes possible to match to a direction, and can move this movable table part 15 toward arbitrary directions on a X-Y plane.

A series of energization control methods for these four driven magnets 6A to 6D will be described in detail with reference to the program storage section 22 (FIGS. 47 to 48) described later.

Here, outside and inside on the same surface of each of the drive coils 721 to 724 are at least at the same height as the height (in the Y-axis direction) of each of the drive coils 721 to 724. In the range including the operating range of the driven magnets 6A to 6D, a magnetic material such as ferrite may be charged.                 

(About the operation control system 202)

Next, the operation control system 202 in this eleventh embodiment will be described in detail.

In this eleventh embodiment, the energization control of each of the Japanese-shaped drive coils 721 to 724 and the four driven magnets 6A to 6D is carried out separately to move the movable table portion 15. An operation control system 202 for regulating the pressure is provided in parallel with the electronic drive means 142 (see FIG. 46).

The operation control system 202 has a magnetic pole individual setting function for individually setting and holding magnetic poles of each of the driven magnets 6A to 6D provided corresponding to the respective Japanese-shaped drive coils 721 to 724, Magnetic strength setting function for individually setting the magnetic strength of each of the driven magnets 6A to 6D (which can be set by varying the energizing current), and the respective Japanese-shaped driving coils 721 to 724. An energization direction setting function for setting and maintaining the energization direction of the inner coil sides 721a to 724a in the predetermined direction (one or the other) according to an external command, and each of the Japanese-shaped drive coils ( The drive coil energization control function for varying the magnitude of the energization current to 721-724 is provided, The conveyance direction and the conveyance force with respect to the said movable table part 15 are adjusted, while adjusting the output of these functions. Adjusted And a table for operation control.

And in order to perform the said function, this operation control system 202 is each Japanese-shaped drive coil 721-724 and four each of the said electronic drive means 142, as shown in FIG. Table drive control means 212 for individually driving the driven magnets 6A to 6D in accordance with a predetermined control mode to move the movable table 15 in a predetermined direction, and the table drive control means ( A plurality of control programs are stored in a plurality of control modes (8 power supply control modes of B1 to B8 in this embodiment), which are arranged in parallel in 212 and specify a moving direction of the movable table 1, its operation amount, and the like. And a data storage unit 23 storing therein predetermined data and the like used in the execution of the respective control programs.

The table drive control means 212 further includes an operation command input unit 24 for instructing predetermined control operations for the respective Japanese-shaped drive coils 721 to 724 and the four driven magnets 6A to 6D. ) Are installed in parallel. In addition, the table drive control means 212 is configured such that the positional information during and after the movement of the movable table unit 15 is detected by the positional information detection means 25 and processed and sent.

The various control functions of the operation control system 202 are collectively included in the plurality of energization control modes B1 to B8 of the program storage unit 222, and are operated via the operation command input unit 24. It operates and runs based on any one of the control modes B1 to B8 selected by the command from the operator to be input.

This is explained in more detail.

In the present embodiment, the table drive control means 212 operates on the basis of the command from the operation command input unit 24, selects a predetermined control mode from the program storage unit 222, and drives each of the above Japanese-shaped shapes. Selected and set by the main control unit 212A and the main control unit 212A for energizing and controlling a predetermined DC current including zero in the coils 721 to 724 and the four driven magnets 6A to 6D, respectively. Coil selection drive control unit which drives or controls each of the Japanese-shaped drive coils 721 to 724 and the four driven magnets 6A to 6D simultaneously or separately according to the predetermined energization control modes B1 to B8. 212B is provided.

In addition, the main control unit 212A calculates the position of the movable table unit 15 or performs various other operations based on the input information from the positional information detecting unit 25 that detects the table position. It also has a function at the same time. Here, reference numeral 4G denotes a power supply circuit portion for energizing a predetermined current to each of the Japanese-shaped drive coils 721 to 724 and the four driven magnets 6A to 6D of the electronic driving means 142. .

[Program Memory 222]

The table drive control means 212 is provided with the respective day-shaped drive coils of the electronic drive means 142 in accordance with a predetermined current control control program (predetermined control mode) stored in the program storage unit 222. 721 to 724 and the four driven magnets 6A to 6D are configured to have predetermined relations and drive control separately.

That is, in the program storage unit 222 according to the present embodiment, the energization directions of the four driven magnets (electromagnets) 6A to 6D are individually specified to specify the N pole or the S pole of the magnetic pole. A plurality of magnet control programs for individually varying the magnitude of the energization current including energization stops, and the energization directions of the four driven magnets (electromagnets) 6A to 6D are specified, so that the N pole or The S pole (or energization stop) functions when set, and controls the drive coil for varyingly setting the energization direction and the magnitude of the energization current for each of the four Japanese-shaped drive coils 721 to 724 correspondingly. The program is memorized. At the same time, the operation timing of each of these control programs is collectively stored in eight sets of control modes B1 to B8 (see Figs. 47 to 48).

Here, eight sets of control modes B1 to B8 in the eleventh embodiment will be described based on FIGS. 47 to 48.

Fig. 47 shows an example of the control modes B1 to B4 in the case of transferring the movable table 15 to the positive direction or the negative direction of the Y axis and the positive direction or the negative direction of the Y axis, respectively. ).

In Fig. 47, in each of the control modes B1 to B4, the current flow direction of the DC current to each of the Japanese-shaped driving coils 721 to 724 is set so as to be variably controlled individually. In addition, with respect to the energization direction of each of the four driven magnets (electromagnets), the N pole or the S pole of each magnetic pole does not always change regardless of the control mode (in a fixed state), The setting is controlled.

That is, in this eleventh embodiment, the magnetic poles of the end faces of the four driven magnets 6A to 6D facing the Japanese-shaped drive coils 721 and 722 are driven by the driven magnets 6A and 6B. The magnetic poles of each of the driven magnets 6A to 6D are set to a fixed state even if the control modes B1 to B4 are different. It is controlled.

(Control mode B1)

This control mode B1 shows an example of the control mode for conveying the movable table 1 to the positive direction of the X axis (refer FIG. 47).

In this control mode B1, the driven magnets 6B and 6D on the Y-axis are energized and stopped, so that the end face of the driven magnet 6A on the y-axis facing the inner coil side 721a is positioned on the N pole. It is fixed-controlled and the cross-section part which opposes the said coil side 723a of 6 C of driven magnets on a X axis is fixed-controlled to S pole.

For this reason, in the coil side 721a, 723a part of drive coil 721, 723, predetermined electromagnetic drive force generate | occur | produces in the direction shown by the dotted arrow in this coil side 721a, 723a, and the reaction force [day This occurs because the magnetic drive coils 721 and 723 are fixed], and the driven magnets 6A and 6C are driven in the repulsion in the direction indicated by the solid arrow (in the drawing, to the right), whereby The table portion 15 is conveyed in the positive direction on the X axis. In this case, the drive coils 722 and 724 are set in the state of energization stop control.

In addition, the drive coils 722 and 724 and the driven magnets 6B and 6D during energization stop are energized individually to perform the position displacement correction operation in the position displacement of the movable table 1 (this The same applies to other embodiments including the tenth embodiment).

(Control mode B2)

This control mode B2 shows an example of the control mode for conveying the movable table 1 to the negative direction of the y-axis (refer FIG. 47).

In this control mode B2, the point that the energization direction of the coil edge | side 721a, 723a of the drive coils 721, 723 on the X axis is reversed compared with the case of the said control mode B1 differs. Others are the same as in the case of the control mode B1.

For this reason, in the coil edges 721a and 723a of the drive coils 721 and 723, the electromagnetic driving force is generated on the principle similar to the case of the said mode B1, and the reaction force 6A, 6C is driven by the reaction force. Repulsion drive is carried out in the direction shown by the solid arrow of each, and the movable table part 15 is conveyed to the negative direction on a Y-axis by this. In the positional displacement of the movable table 1, the same correction operation as in the case of the control mode B1 is executed.

(Control mode B3)

This control mode B3 shows an example of the control mode for conveying the movable table 1 to the positive direction of a Y-axis (refer FIG. 47).

In this control mode B3, the driven magnets 6A and 6C on the y-axis are energized and stopped, so that a cross section of the driven magnet 6B on the Y-axis that faces the inner coil side 722a is connected to the N pole. It is fixed-controlled and the cross section which opposes the said coil side 724a of the driven magnet 6D on a Y-axis is fixed-controlled to S pole.

For this reason, in the coil side 722a, 724a part of drive coil 722, 724, predetermined electromagnetic drive force generate | occur | produces in the direction shown by the dotted arrow in each coil side 722a, 724a, and the reaction force at the same time [This occurs because the Japanese-shaped drive coils 722 and 724 are fixed], and the driven magnets 6A and 6C are driven repulsively in the direction (upper direction in the drawing) indicated by the solid arrows. , The movable table 15 is conveyed in the positive direction on the Y axis. In this case, the drive coils 721 and 723 are set to the state of energization stop control.

In addition, the drive coils 721 and 723 and the driven magnets 6A and 6C during energization stop are energized individually by the position displacement of the movable table 1, and a position displacement correction operation | movement is performed.

(Control mode B4)

This control mode B4 shows an example of the control mode for conveying the movable table 1 to the negative direction of a Y-axis (refer FIG. 47).

In this control mode B4, the point that the energization direction of the coil edge | side 722a, 724a of the drive coils 722, 724 on the Y-axis is reversed compared with the case of the said control mode B3 differs. Others are the same as in the case of the control mode B3.

For this reason, in the coil edge | side 722a, 724a part of drive coil 722, 724, an electromagnetic drive force generate | occur | produces on the principle similar to the case of the said mode B3, and, by the reaction force, the driven magnets 6B, 6D. Each of these is repulsively driven in the direction indicated by the solid arrow (in the figure, the downward direction), whereby the movable table 15 is transferred in the negative direction on the Y axis. In the positional displacement of the movable table 1, the same correction operation as in the case of the control mode B3 is executed.

Subsequently, in FIG. 48, an example of each control mode B5 to B8 in the case of transferring the movable table unit 15 toward the respective four upper limit directions on the Ⅹ-Y plane coordinate is illustrated. ).                 

In Fig. 48, in each control mode B5 to B8, four different dodgeballs are set so as to variably control the energization direction of the DC current to the respective Japanese-shaped drive coils 721 to 724, respectively. The energization direction of the copper magnet (electromagnet) is set and controlled so that the N pole or the S pole of each magnetic pole does not always change (in a fixed state) even if the control modes are different.

(Control mode B5)

The control mode B5 in this eleventh embodiment shows an example of the control mode for transferring the movable table 1 in the direction of the first upper limit on the y-Y plane coordinate (see FIG. 48).

In this control mode B5, the four driven magnets 6A to 6D are energized and controlled at the same time, and the energization directions (stimulus N and S) are the same as in the respective control modes B1 to B4. It is fixed.

That is, in the driven magnets 6A and 6B arranged in the positive direction on the Y-axis and the Y-axis, the cross-sectional portions facing the respective Japanese-shaped drive coils 721 and 722 are set to the N pole. Further, in the driven magnets 6C and 6D arranged in the negative direction on the Y-axis and the Y-axis, the cross-sectional portions facing the respective Japanese-shaped drive coils 723 and 724 are set to the S poles.

For this reason, in each coil side 721a-724d part of each Japanese-shaped drive coil 721-724, energization control like the said control mode B1 and B3 operated simultaneously is performed. For this reason, the electromagnetic driving force in the same direction (the right direction and the upper direction in FIG. 48) as in the case of the control modes B1 and B3 is generated at the same time, and the combined force is shown in the column of the control mode B5 in FIG. 48. Likewise, the direction of the first upper limit is oriented. Thereby, the said movable table part 15 is conveyed toward the 1st upper limit direction on a Y-Y plane coordinate.

Here, the feed angle θ (angle θ with the y-axis) in the first upper limit direction with respect to the y-axis is applied to each of the Japanese-shaped drive coils 721 to 724 and each of the driven magnets 6A to 6D. By varying and controlling the magnitude of the current individually, the electronic driving force acting on each of the driven magnets 6A to 6D is changed, whereby it can be freely set in any direction.

(Control mode B6)

This control mode B6 shows an example of the control mode for conveying the movable table 1 toward the 3rd upper limit direction (direction opposite to the direction of a 1st upper limit) on a Y-Y plane coordinate ( See FIG. 48).

In this control mode B6, the four driven magnets 6A to 6D are energized and controlled at the same time, and the magnetic poles N and S are set in the same manner as in the respective control modes B5.

That is, in each coil side 721a-724d part of each Japanese-shaped drive coil 721-724, energization control like the said control mode B2 and B4 operated simultaneously is performed.

For this reason, the electromagnetic driving force in the same direction (the left direction and the downward direction in FIG. 48) as in the case of the control modes B2 and B4 is generated at the same time, and the combined force is shown in the column of the control mode B6 in FIG. 48. Likewise, the third upper limit is directed. Thereby, the said movable table part 15 is conveyed toward the 3rd upper limit direction on a Y-Y plane coordinate.

Here, the transfer angle θ in the third upper limit direction with respect to the y-axis individually controls the magnitude of the energizing current of each of the Japanese-shaped drive coils 721 to 724 and each of the driven magnets 6A to 6D. As a result, the electromagnetic driving force acting on each of the driven magnets 6A to 6D is changed, whereby it can be freely set in any direction.

(Control mode B7)

This control mode B7 shows an example of the control mode for conveying the movable table 1 in the direction of the second upper limit on the X-Y plane coordinate (see FIG. 48).

In this control mode B7, the four driven magnets 6A to 6D are energized and controlled at the same time, and the magnetic poles N and S are fixed as in the case of the respective control modes B6.

In the case of this control mode B7, the energization control like the said control mode B2 and B3 operated simultaneously is performed in each coil side 721a-724d part of each Japanese-shaped drive coil 721-724. .

For this reason, the electromagnetic driving force in the same direction (the left direction and the upper direction in FIG. 48) as in the case of the control modes B2 and B3 is generated at the same time, and the combined force is shown in the column of the control mode B7 in FIG. 48. Likewise, the direction of the second upper limit is oriented. Thereby, the said movable table part 15 is conveyed toward the 2nd upper limit direction on a Y-Y plane coordinate.

Here, the feed angle θ in the second upper limit direction with respect to the y-axis individually controls the magnitude of the energizing current of each of the Japanese-shaped drive coils 721 to 724 and each of the driven magnets 6A to 6D. As a result, the electromagnetic driving force acting on each of the driven magnets 6A to 6D is changed, whereby it can be freely set in any direction.

(Control mode B8)

This control mode B8 shows an example of the control mode for conveying the movable table part 15 toward the 4th upper limit direction (direction opposite to the direction of a 1st upper limit) on a Y-Y plane coordinate. (See Figure 48).

In this control mode B8, each of four driven magnets 6A to 6D is energized and controlled at the same time, and the magnetic poles N and S are fixed as in the case of the respective control modes B7.

In the case of this control mode B8, the energization control like the said control mode B1 and B4 operated simultaneously is performed in each coil side 721a-724d part of each Japanese-shaped drive coil 721-724. . For this reason, the electromagnetic driving force in the same direction (the right direction and the downward direction in FIG. 48) as in the case of the control modes B1 and B4 is generated at the same time, and the combined force is shown in the column of the control mode B8 in FIG. 48. Likewise, the fourth upper limit is directed. Thereby, the said movable table part 15 is conveyed toward the 4th upper limit direction on a Y-Y plane coordinate.

Here, the transfer angle θ in the fourth upper limit direction with respect to the y-axis individually controls the magnitudes of the energization currents of the respective Japanese-shaped drive coils 721 to 724 and the driven magnets 6A to 6D individually. As a result, the electromagnetic driving force acting on each of the driven magnets 6A to 6D is changed, whereby it can be freely set in any direction.

Other configurations, operations, functions, and the like are almost the same as those in the tenth embodiment.

Even in this case, the same effects as those in the tenth embodiment can be obtained. In addition, in the eleventh embodiment, the drive coils 721 to 724 are individually provided for the driven magnets 6A to 6D. Is arranged, the energization operation of the corresponding point is applied to the drive coils 721, 722, 723 or 724 or the driven magnets 6A, 6B, 6c or 6D that do not require the output of the driving force 10. It is possible to stop control. Therefore, there is an advantage that it is possible to save energy of the entire apparatus during operation.

In addition, in the said 11th Embodiment, although the case of setting the conveyance direction of the movable table part 15 to drive control of the electronic drive means 142 divided into the control modes of B1-B8 was illustrated, for example, In the control mode B2, the energization directions of the driven magnets 6A to 6D are set in the opposite directions to those in the control mode B1, and the energization directions of the drive coils 721 and 723 are controlled modes. As long as the function is the same as in the case of (B1), the electronic drive means 142 may be controlled to be driven by another control method.

In addition, in the eleventh embodiment, the equipment locations of the driven magnets 6A to 6D and the equipment locations of the Japanese-shaped drive coils 721 to 724 may be replaced. In this case, the driven magnets 6A to 6D are provided on the stator side, and the Japanese-shaped drive coils 721 to 724 are provided on the mover side.

In the eleventh embodiment, the case where the driven magnets 6A to 6D are constituted by electromagnets is exemplified, but the driven magnets 6A to 6D may be constituted by permanent magnets.

This simplifies the electrical wiring around the driven magnets 6A to 6D, greatly improving the productivity and maintainability, and the space area of the equipment location of the driven magnets 6A to 6D due to the simplification of the electrical wiring. Can be made small. As a result, the entire apparatus can be reduced in size and weight, and the energization driving becomes unnecessary as compared with the case where the driven magnets 6A to 6D are electromagnets. It can be suppressed. Therefore, the running cost of the whole apparatus can be reduced significantly, and in the drive control of the electronic drive means 4, the movable table 1 is made only by switching control of the energization direction of each of the several drive coils 721-724. The feed drive can be performed in any direction. As a result, a quick response in switching the moving direction of the movable table 1 becomes possible, and there is no occurrence of a disconnection accident or the like of the driven magnets 6A to 6D. There is an advantage that it can be improved.

{Twelfth Embodiment}

Next, 12th Embodiment is described based on FIGS. 49-53.

This twelfth embodiment replaces the electron drive means 4 according to the tenth embodiment, and uses the electron drive means 143 provided with two annular drive coils and a driven magnet corresponding thereto. It is characterized by its equipped point.

At the same time, it is characterized in that the operation control system 203 for efficiently driving the electronic drive means 143 is provided in place of the operation control system 20.

This will be described in detail below.

First, in the twelfth embodiment, as in the case of the tenth embodiment, the movable table portion 15 for the precision work and the movable table portion 15 for the precision work which are arranged to be movable in any direction on the same surface are provided. While supporting the movable table portion 15, the table supporting mechanism 2 having the home position return function with respect to the movable table portion 15, and the table supporting mechanism 2 are supported. The electronic drive means 143 which is equipped in the case main body 3 as a main body part, and this case main body 3 side, and gives a movable force to a predetermined direction to the movable table part 15 according to the instruction | command from the outside. ).

Here, the movable table 15 is a movable table 1 for precision work and an auxiliary table (arranged in parallel with the movable table 1 at predetermined intervals and integrally arranged on the same central axis) It is comprised by 5). And as shown in FIG. 49, the table support mechanism 2 is comprised in the side of the auxiliary table 5, and is comprised so that the said movable table 1 may be supported through this auxiliary table 5. As shown in FIG.

(About the electronic drive means 143)

As described above, the electromagnetic drive means 143 is equipped with two large and small annular drive coils 731 and 732 on the same surface instead of the annular drive coil 7 provided in the tenth embodiment. These annular drive coils 731 and 732 are supported by the fixed plate 8.

In addition, the electromagnetic drive means 143 corresponds to the coil sides 731a to 731d and 732a to 732d of each of the annular drive coils 731 and 732, as in the case of the first embodiment described above. Each of four driven magnets 6A to 6D and 16A to 16D is arranged in an array.

Each of the driven magnets 6A to 6D and 16A to 16D is attached to the auxiliary table 5.

In this twelfth embodiment, these large and small respective annular drive coils 731 and 732 are centered on the same X-Y surface assumed as the origin of the central portion of the coil support surface on the fixed plate 8. The axes are arranged in common.

Among these, the inner annular drive coil 731 located inside is formed in substantially quadrangular shape similarly to the annular drive coil 7 in the case of the said 10th embodiment, and each coil side 731a, Each center of 731b, 731c, and 731d is provided on the fixing plate 8 so as to intersect the y-axis and the Y-axis.

6 A of each driven magnet 6A which is close to the center part of each line segment of each coil side 731a, 731b, 731c, and 731d of this inner ring drive coil 731, and opposes. ~ 6D) are arranged separately, and are attached to and hold | maintained in the auxiliary table 5, respectively.

In addition, the outer ring driving coil 732 arranged outside the inner ring driving coil 731 is formed in an octagonal shape as shown in FIG. In the outer annular drive coil 732, the central portions of the four sides of the coil edges 732a to 732d adjacent to the respective coil sides 731a to 731d of the inner annular drive coil 731 are the y-axis, Y It is equipped on the stationary plate 8 so as to intersect with each axis.

In addition, the driving magnets 16A to 16D are adjacent to and opposed to the center portion of each line segment of each coil side 732a, 732b, 732c, and 732d of the outer annular drive coil 732. Each is arranged separately. Each of the driven magnets 16A to 16D is mounted and supported on the auxiliary table 5 in a state in which the driven magnets 16A to 16D are installed in parallel to the respective driven magnets 6A to 6D.

Each of the driven magnets 6A to 6D and 16A to 16D is constituted of an electromagnet capable of controlling the energization from the outside in the present embodiment.

In the four driven magnets 6A to 6D according to the present embodiment, as shown in Fig. 50, the end face of the magnetic pole (the opposing face of each coil side of the annular drive coil 7) is a quadrangular electromagnet. It is used, and is arrange | positioned and fixed respectively on the Y-axis and Y-axis of the position equidistant from a center part on the Y-Y plane assumed by the upper surface of the auxiliary table 5, respectively.

The same electromagnet is also used for the other four driven magnets 16A to 16D, and the Y-axis and Y-axis images of the equidistant positions from the center are on the Y-Y plane assumed on the upper surface of the auxiliary table 5. Are arranged and fixed to each other.

As shown in FIG. 49, the fixing plate 8 is arranged between the auxiliary table 5 and the movable table 1, and is supported by the case main body 3. As shown in FIG. Here, the stator part which is a main part of the said electromagnetic drive means 4 is comprised by the annular drive coils 731 and 732 and the fixed plate 8.

When the annular drive coils 731 and 732 are set to the movable state, the driven magnets 6A to 6D and 16A to the respective driven magnets 6A to 6D and 16A to 16D are set. 16D) generates an electromagnetic driving force for driving the repulsion in the direction orthogonal to each coil side.

For this reason, the said movable table part 15 is conveyed to the direction which is not orthogonal to each coil edge | side 731a-731d and 732a-732d (direction oblique to each coil edge | side [731a-731d, 732a-732d)). In this case, as will be described later, the transfer of the movable table 15 is carried out with the combined force of the electromagnetic driving force to the at least two driven magnets 6A to 6D and 16A to 16D.

In addition, a braking plate made of a nonmagnetic metal member is formed on the coil edges 731a to 731d and 732a to 732d of the annular drive coils 731 and 732 facing the driven magnets 6A to 6D and 16A to 16D. (9) is arranged close to the magnetic pole surface of each of the driven magnets 6A to 6D and 16A to 16D. The braking plate 9 is fixed to the annular drive coils 731 and 732 (in this embodiment, the case main body 3).

In this twelfth embodiment, when the entire apparatus is set to the movable state, energization is started in the energization direction set in advance in the annular drive coils 731 and 732. In addition, correspondingly to this, as described later, a predetermined operating current is supplied to some or all of the driven magnets 6A to 6D and 16A to 16D, and the magnetic poles are supplied in accordance with the transfer direction of the movable table 15. (N pole, S pole or no magnetic pole) is set. At the same time, the magnitude of the magnetic force of each of the driven magnets 6A to 6D and 16A to 16D including the annular drive coils 731 and 732 is adjusted by energization control, whereby the movable table portion 15 Is conveyed in a predetermined direction.

In this case, the energization direction of the annular drive coils 731, 732 is specified in advance by the operation control system 203 which will be described later, and correspondingly, the energization direction of each of the driven magnets 6A to 6D and 16A to 16D. It is specified according to the conveyance direction of this movable table part 15, and in the operation | movement of the whole apparatus, as mentioned above, the magnitude of the energization current is variable-controlled (including energization stop control) by the operation control system 203. As shown in FIG. .

And. In the coil edges 731a to 731d of the inner annular drive coil 731, the driven magnets 6A to 6D are, for example, each driven magnet 6A, 6B and 6c according to Fleming's left-hand rule. Alternatively, an electromagnetic force (reaction force) for pressing 6D in a predetermined direction (direction orthogonal to the coil sides 731a, 731b, 731c, or 731d) is output.

Similarly between the outer annular drive coil 732 and the driven magnets 16A, 16B, 16c or 16D, a predetermined electromagnetic force (reaction force) is adapted to the respective driven magnets 6A, 6B, 6c or 6D. Is output.

In this case, the electromagnetic driving force that the inner annular drive coil 731 outputs to the corresponding driven magnets 6A to 6D, and the respective driven magnets 16A to 16D to which the outer annular drive coil 732 corresponds. The electronic driving force to be output to is controlled in advance so that the direction of the output always matches.

In addition, by selecting and combining the directions of the electromagnetic forces generated in the four driven magnets 6A to 6D, 16A to 16D of each of the annular drive coils 731 and 732 in advance, the respective four driven magnets 6A It is possible to match the force of the electromagnetic driving force generated in the ˜6D and 16A to 16D with the conveying direction of the movable table portion 15, and move the movable table portion 15 in any direction on the X-Y plane. Force can be given.

In this case, the operation of the electromagnetic drive means 143 (the annular drive coils 731 and 732 and the driven magnets 6A to 6D and 16A to the transfer direction with respect to the movable table 15 and its driving feed force). Energization drive for 16D) will be described in detail with reference to FIGS. 52 to 53. In FIG. 52 and FIG. 53, the rotation drive by the electricity supply to a drive coil is not shown.

Here, outside and inside on the same surface of the said annular drive coils 731 and 732 are at least the same height as the height (in the Y-axis direction) of the said annular drive coils 731 and 732, and the said driven object In a range including the operating range of the magnets 6A to 6D, a magnetic material such as ferrite may be charged.

[Operation Control System 203]

In the present embodiment, the electronic drive means 143 individually drives two annular drive coils 731 and 732 and four driven magnets 6A to 6D and 16A to 16D on the inside and the outside. The operation control system 203 which controls and regulates the movement operation of the said movable table part 15 is provided in parallel (refer FIG. 51).                 

The operation control system 203 has an energization direction setting function for setting and holding an energization direction for each of the annular drive coils 731 and 732 in a predetermined direction (one or the other), and each of the annular drive coils ( The drive coil energization control function for variably setting the magnitude of the energization current to 731 and 732, and it operates according to the energization direction to each of the said annular drive coils 731 and 732, and operates each said driven magnet 6A-6D, 16A. The magnetic field setting function for individually setting and holding the magnetic poles of the ˜16D) and the magnetic strength of each of the driven magnets 6A to 6D and 16A to 16D are individually set in accordance with an external command (current supply current). And a magnetic force setting function, and a table operation for adjusting the conveying direction and the conveying force with respect to the movable table 15 by appropriately adjusting the operations by these functions. My Equipped with a feature.

And in order to perform the said function, this operation control system 203 carries out two annular drive coils 731 and 732 of the said electronic drive means 143, and each corresponding driven object, as shown in FIG. Table drive control means 213 for driving the magnets 6A to 6D and 16A to 16D individually in accordance with a predetermined control mode to move the movable table 15 in a predetermined direction, and the table drive control means. A plurality of energization control programs relating to a plurality of energization control modes (in this embodiment, eight control modes of C1 to C8) provided in parallel with 213 and specifying a moving direction of the movable table 1, its operation amount, and the like. The stored program storage unit 223 and a data storage unit 23 storing predetermined data and the like used in the execution of the respective control programs are provided.

The table drive control means 213 further includes an operation command input unit 24 for instructing predetermined control operations for the annular drive coils 731 and 732 and the driven magnets 6A to 6D and 16A to 16D. It is installed in parallel. In addition, the table drive control means 213 is configured such that the positional information during and after the movement of the movable table 15 is detected by the positional information detecting means 25 and processed and sent.

The various control functions of the operation control system 203 are collectively included in the plurality of energization control modes C1 to C8 of the program storage unit 223, and are input from the operation command input unit 24. The operation and execution are performed based on any one of the control modes C1 to C8 selected based on the command from the operator.

This is explained in more detail.

Specifically, the table drive control means 213 operates on the basis of a command from the operation command input unit 24 to select a predetermined energization control mode from the program storage unit 223, and each of the annular drive coils 731. , 732 and each of the four driven magnets 6A to 6D and 16A to 16D, the main control unit 213A for energizing and controlling a predetermined DC current including zero is selected and set in the main control unit 213A. Coil selection drive control unit for simultaneously or individually driving control of the annular drive coils 731 and 732 and the four driven magnets 6A to 6D and 16A to 16D in accordance with the predetermined energization control modes C1 to C8. 213B is provided.

This main control unit 213A calculates the position of the movable table 1 based on the input information from the position information detecting means 25 for detecting the table position, or performs other various operations. At the same time has a combination.                 

Here, reference numeral 4G denotes a power supply circuit portion for energizing a predetermined current through the annular drive coils 731 and 732 and the four driven magnets 6A to 6D and 16A to 16D of the electronic driving means 4, respectively. .

In addition, the table drive control means 213 inputs information from the position information detection means 25 to perform a predetermined operation, and based on this, the movement destination set by the operation command input unit 24 in advance. A position displacement calculation function for calculating a displacement from the reference position information of < RTI ID = 0.0 >, < / RTI > and driving the electronic drive means 4 on the basis of the calculated position displacement information. It is equipped with the table position correction function of conveyance control.

For this reason, in this embodiment, when the moving direction of the movable table part 15 deviates by the disturbance etc., the movement of the movable table part 15 to a predetermined direction is correct | amended, correcting this displacement, and, thereby, This movable table part 15 is conveyed to the target position previously preset quickly and with high precision. In this case, the positional displacement is corrected by adjusting the energizing current of each of the driven magnets 6A to 6D or 16A to 16D during energization driving.

[Program storage part]

The table drive control means 213 is an annular drive coil 731 of each of the electronic drive means 143 in accordance with a predetermined current control control program (predetermined current control mode) stored in the program storage unit 223. 732 and four driven magnets 6A to 6D and 16A to 16D are configured to individually drive control with a predetermined relationship.

That is, the program storage unit 223, in the present embodiment, controls a drive coil control program for specifying the energization direction with respect to each of the annular drive coils 731 and 732 and variably sets the magnitude of the energization current. It functions when the energization direction for the annular drive coils 731 and 732 is specified, and correspondingly, the energization directions of each of the four driven magnets (electromagnets) 6A to 6D, 16A to 16D, respectively, are individually corresponding to each other. A plurality of magnet control programs are stored to specify the N pole or the S pole of the magnetic pole, and to individually vary the magnitude of the energized current including the energization stop. At the same time, the timing of the operation of each of these control programs is collectively stored in the eight sets of control modes C1 to C8 and stored in the program storage unit 223 (see FIGS. 51 and 52).

Here, eight sets of energization control modes C1 to C8 in the twelfth embodiment will be described based on FIGS. 52 to 53.

Fig. 52 shows an example of the energization control modes C1 to C4 when the movable table section 15 is conveyed toward the positive or negative direction of the X axis and toward the positive or negative direction of the Y axis, respectively. ).

In each of the energization control modes C1 to C4 in this FIG. 52, as shown by an arrow A, the energization direction of the DC current to the inner ring drive coil 731 is set to the right turn in this embodiment. In addition, as shown by arrow B, the energization direction of the direct current with respect to the outer ring drive coil 732 is set to left rotation in this embodiment.                 

(Control mode C1)

This control mode C1 shows an example of the control mode for conveying the movable table 1 in the positive direction of the X axis (see FIG. 52).

In this control mode C1, the driven magnets 6B, 6D, 16B, and 16D on the Y axis are subjected to energization stop control.

And about the inner ring drive coil 731, the cross section which opposes the said coil edge 731a of 6 A of driven magnets on a w-axis is set to N pole, and the 6 C of driven magnets on a w-axis are set. The cross section facing the coil edge 731c is set to the S pole.

Similarly, with respect to the outer annular drive coil 732, the end face of the driven magnet 16A on the y-axis that faces the coil side 732a is set to the S pole, and the driven magnet 16C on the y-axis is set. The cross section facing the coil edge 732c is set to the N pole.

For this reason, in each coil side 731a, 731c, and 732a, 732c part of the annular drive coil 731, 732, the electromagnetic drive force of the direction shown by the dotted arrow in this 731a, 731c, 732a, 732c generate | occur | produces, At the same time, with the reaction force (the annular drive coils 731 and 732 are fixed), the driven magnets 6A, 6C and 16A, 16C are driven in a repulsion in the direction indicated by the solid arrow (in the figure, to the right), Thereby, the movable table part 15 is conveyed to the positive direction on a Y-axis.

(Control mode C2)

This control mode C2 shows an example of the control mode for conveying the movable table 1 in the negative direction of the X axis (see FIG. 52).

In this control mode C2, the point that the setting of the magnetic poles of the driven magnets 6A, 6C and 16A, 16C on the X axis is reversed compared with the case of the control mode C1 is different. Others are the same as in the case of the control mode C1.

For this reason, in the coil side 731a, 731c, and 732a, 732c part of each annular drive coil 731, 732, the electromagnetic drive force of the opposite direction is shown by the arrow of a dotted line on the principle similar to the case of the said mode C1. It arises in the direction shown, and the driven magnets 6A, 6C, and 16A, 16C are driven repulsively in the direction (in the figure, left direction) shown by the solid arrow by this reaction force, and, thereby, the movable table part 15 Is conveyed in the negative direction on the y-axis.

(Control mode C3)

This control mode C3 shows an example of the control mode for conveying the movable table 1 to the positive direction of the Y-axis (refer FIG. 52).

In this control mode C3, the driven magnets 6A, 6C, 16A, and 16C on the X axis are subjected to energization stop control.

As for the inner annular drive coil 731, the cross section facing the coil side 731b of the driven magnet 6B on the Y-axis is set to the N pole, and the driven magnet 6D on the Y-axis is set. The cross section facing the coil edge 731d is set to the S pole.

Similarly, with respect to the outer annular drive coil 732, the cross-section portion facing the coil side 732b of the driven magnet 16B on the Y axis is set to the S pole, and the driven magnet 16D on the Y axis is The cross section facing the coil edge 732d is set to the N pole.

For this reason, in each coil side 731b, 731d, 732b, 732d part of the annular drive coil 731, 732, the electromagnetic drive force of the direction shown by the dotted arrow in this coil side 731b, 731d, 732b, 732d. Is generated and at the same time the reaction force (the annular drive coils 731 and 732 are fixed) and the driven magnets 6B, 6D and 16B and 16D are indicated by the solid arrows in the direction (upper direction in the figure). Repulsion drive is carried out, and the movable table part 15 is conveyed to the positive direction on a Y-axis by this.

(Control mode C4)

This control mode C4 shows an example of the control mode for conveying the movable table 1 to the negative direction of a Y-axis (refer FIG. 52).

In this control mode C4, the difference is that the setting of the magnetic poles of the driven magnets 6B, 6D, 16B, 16D on the Y axis is reversed compared to the case of the control mode C3. Others are the same as in the case of the control mode C3.

Therefore, in the coil edges 731b, 731d and 732b, 732d of the annular drive coils 731, 732, the electromagnetic driving force is generated on the same principle as in the case of the mode C3, and the reaction force The copper magnets 6B, 6D and 16B and 16D are driven in the repulsion in the direction indicated by the solid arrow (in the figure, the downward direction), whereby the movable table 15 is transferred in the negative direction on the Y axis.

Subsequently, examples of the control mode C5 to the control mode C8 will be described.                 

FIG. 53 shows an example (categorized) of each control mode C5 to control mode C8 when the movable table unit 15 is conveyed toward the respective four upper limit directions on the X-Y plane coordinate. .

(Control mode C5)

The control mode C5 in this twelfth embodiment shows an example of the control mode for transferring the movable table 1 in the direction of the first upper limit on the y-Y plane coordinate (see FIG. 53).

In this control mode C5, the four driven magnets 6A to 6D and 16A to 16D are energized and controlled at the same time, and the magnetic poles N and S are the coil sides 731a of the inner ring drive coil 731. The magnetic poles of the cross-sections of the locations facing the 731b) are set to the N poles, and the magnetic poles of the cross-sections of the locations facing the coil edges 731c and 731d of the inner annular drive coil 731 are set to the S poles, respectively.

Similarly, the magnetic pole of the cross section of the part facing the coil edges 732a and 732b of the outer ring drive coil 732 is S pole and similarly opposes the coil edges 732c and 732d of the outer ring drive coil 732. The magnetic poles of the cross section of the location are set to the N poles, respectively.

For this reason, in the coil side 731a-731d, 732a-732d part of each annular drive coil 731, 732, it is the same state that the said control mode C1 and C3 operated simultaneously, and the combined force is shown in FIG. As shown in the column of the control mode C5, the direction of the first upper limit on the y-Y coordinate is oriented. Thereby, the movable table part 15 is conveyed toward the 1st upper limit direction on a Y-Y plane coordinate.                 

Here, the conveyance angle θ in the first upper limit direction with respect to the y-axis is, for example, by varying the magnitude of the conduction current of each of the driven magnets 6A to 6D and 16A to 16D. The electron driving force acting on 6A-6D and 16A-16D) is changed, and it can be freely set to arbitrary directions by this.

(Control mode C6)

This control mode C6 shows an example of the control mode for conveying the movable table 1 toward the 3rd upper limit direction (direction opposite to the direction of a 1st upper limit) on a Y-Y plane coordinate (FIG. 53).

In this control mode C6, each of the four driven magnets 6A to 6D and 16A to 16D is energized and controlled at the same time, and the magnetic poles N and S are set opposite to those of the control mode C5, respectively. It is.

For this reason, in the coil side 731a-731d, 732a-732d part of each annular drive coil 731, 732, it is the same state as the said control mode C2 and C4 operated simultaneously, and the combined force is shown in FIG. As shown in the column of the control mode C6, the direction of the third upper limit is directed. Thereby, the movable table part 15 is conveyed toward the 3rd upper limit direction on a Y-Y plane coordinate.

Here, the transfer angle θ in the third upper limit direction with respect to the y-axis is set in any direction by individually varying the magnitude of the energizing current of each of the driven magnets 6A to 6D and 16A to 16D, for example. The variable setting can be made freely.

(Control mode C7)                 

This control mode C7 shows an example of the control mode for conveying the movable table 1 in the direction of the second upper limit on the X-Y plane coordinate (see FIG. 53).

In this control mode C7, each of the four driven magnets 6A to 6D and 16A to 16D is energized and controlled at the same time, and the magnetic poles N and S are the coil sides 731b of the inner annular drive coil 731. The magnetic poles of the cross-sections of the sections facing the 731c are set to the N poles, and the magnetic poles of the cross-sections of the sections facing the coil sides 731d and 731a of the inner annular drive coil 731 are set to the S poles, respectively.

Similarly, the magnetic pole of the cross section of the part facing the coil sides 732b and 732c of the outer ring driving coil 732 is S-pole, and similarly opposes the coil sides 732d and 732a of the outer ring driving coil 732. The magnetic poles of the cross section of the location are set to the N poles, respectively.

For this reason, in the coil side 731a-731d, 732a-732d part of each annular drive coil 731, 732, it is the same state as the said control mode C2 and C3 operated simultaneously, and the combined force is shown in FIG. As shown in the column of the control mode C7, the direction of the second upper limit is directed. Thereby, the movable table part 15 is conveyed toward the 2nd upper limit direction on a Y-Y plane coordinate.

Further, the transfer angle θ in the second upper limit direction with respect to the y-axis is controlled by each of the driven magnets 6A to 6D by variably controlling the magnitude of the conduction current of each of the driven magnets 6A to 6D and 16A to 16D. , 16A to 16D), and the electronic driving force acting on them can be changed, whereby it can be freely set in any direction.

(Control mode C8)                 

This control mode C8 shows an example of the electricity supply control mode for conveying the movable table part 15 toward the 4th upper limit direction (direction opposite to the direction of a 2nd upper limit) on a Y-Y plane coordinate. (See Figure 53).

In this control mode C8, each of the four driven magnets 6A to 6D and 16A to 16D is energized and controlled at the same time, and the magnetic poles N and S are opposite to those in the control mode C7, respectively. It is set.

For this reason, in each coil side 731a-731d, 732a-732d part of each annular drive coil 731, 732, it is the same state that the said control mode C1 and the control mode C4 operated simultaneously, and the force As shown in the column of the control mode C8 in FIG. 53, the direction of the fourth upper limit is directed. Thereby, the movable table part 15 is conveyed toward the 4th upper limit direction on a Y-Y plane coordinate.

In addition, the feed angle in the fourth upper limit direction with respect to the y-axis can be freely set in any direction by individually varying the magnitude of the energizing current of each of the driven magnets 6A to 6D and 16A to 16D. It is possible.

[Other examples of annular drive coils 731, 732]

In this twelfth embodiment, the technically equivalent to the annular drive coils 71 to 74 disclosed in Figs. 43A to 43D in the tenth embodiment is based on the configuration of the embodiment of Fig. 50. Therefore, they are installed in large and small on the same surface, respectively, and a plurality of driven magnets are equipped in accordance with this. And correspondingly, each said component is constructed and by this, the electronic drive means provided with the annular drive coil which functions similarly to this 12th Embodiment can be obtained.

Since this 12th embodiment is comprised as mentioned above, it has the same function as the case of the said 10th embodiment, and has the same effect, and also the annular drive coil and a driven magnet are the case of the 10th embodiment. Since each of them is equipped with twice as many, the output of the electronic drive means can be increased, and since there are many driven magnets, in the transfer control of the movable table portion, as compared with the case of the tenth embodiment, There is an advantage that the moving operation of the movable table portion can be executed more quickly and with high accuracy.

In addition, in this twelfth embodiment, since the equipment locations of the plurality of driven magnets are arranged at locations intersecting with the y-axis and the y-axis of each of the drive coils, the feed direction is actually specified (calculated processing). ), And the driving control of the driven magnet as a whole is simplified. Therefore, the change of the conveyance direction of the movable table part can be quickly responded to this, and at the same time also in the conveyance control of the movable table part etc. (for example, correction in the case of switching control of the direction or position displacement etc.), This has the advantage of being able to respond quickly to this.

{Thirteenth Embodiment}

Next, 13th Embodiment is described based on FIGS. 54-58.

This thirteenth embodiment is characterized in that the electronic drive means 142 according to the eleventh embodiment is equipped with other electronic drive means 144 provided with four rectangular drive coils. Have At the same time, it is characterized in that an operation control system 204 for efficiently driving the electronic drive means 144 is provided in place of the operation control system 202.

This will be described in detail below.

First, in the thirteenth embodiment, as in the case of the tenth embodiment, the movable table portion 15 for the precision work and the movable table portion 15 for precision work which are arranged to be movable in any direction on the same surface are provided. The main body which supports this movable table part 15 while allowing movement, and which has the original position return function with respect to the movable table part 15, and this table supporting mechanism 2 is supported. The case main body 3 as a part and the electronic drive means 144 which are equipped in this case main body 3 side, and give a movable force to a movable direction to the predetermined | prescribed direction to the movable table part 15 according to the instruction | command from the outside are provided. Equipped.

Here, the movable table part 15 is a movable table 1 for precision work, and the auxiliary table 5 which is parallel to the movable table 1 at predetermined intervals and integrally arranged on the same central axis. It is comprised by). As shown in FIG. 54, the table support mechanism 2 is provided on the side of the auxiliary table 5, and is configured to support the movable table 1 through the auxiliary table 5.

(About the electronic drive means 144)

The electronic drive means 144 has its main part supported by the case main body 3 side, and gives a predetermined movement force (driving force) along the conveyance direction of the said movable table part 15 according to the command from the outside. Equipped with. The electromagnetic drive means 144 is arranged between the movable table 1 and the auxiliary table 5.                 

Specifically, the electromagnetic drive means 144 includes four rectangular drive coils 741, 742, 743, and 744 formed in a quadrangular shape, and the y-axis of the respective rectangular drive coils 741 to 744. Alternatively, each of the four units provided on the auxiliary table 5 and arranged in correspondence with the inner coil sides 741a to 744a and the outer coil sides 741b to 744b located at a position intersecting the Y axis. Two driven magnets 6A, 6B, 6C, 6D, and 16A, 16B, 16C, 16D, and fixing plates 8 for supporting the four rectangular drive coils 741 to 744 at predetermined positions, respectively. Equipped.

Each of the rectangular drive coils 741 to 744 is arranged such that the two opposite sides are orthogonal to the Y axis or the Y axis on the Y-Y plane, which is assumed as the origin of the center portion on the fixing plate 8. On the Y axis, they are arranged separately.

In addition, each of the eight driven magnets 6A to 6D and 16A to 16D is constituted by an electromagnet capable of individually conduction control from the outside, and inner coil sides 741a to 744a of the respective rectangular drive coils. And the outer coil edges 741b to 744b are arranged separately on the y-axis and the y-axis.

As shown in FIG. 54, the fixing plate 8 is arranged on the movable table 1 side of the auxiliary table 5 and is supported by the case main body 3. Moreover, the stator part which is a principal part of the said electronic drive means 144 is comprised by each said drive coil 741-744 and the fixed plate 8 of the said rectangular shape.

When each of the drive coils 741 to 744 is set to an operating state, the respective driven magnets 6A to 6D and 16A are interposed between the driven magnets 6A to 6D and 16A to 16D. Electron driving force for repulsion driving is generated in a direction orthogonal to the respective coil sides 741a to 744a and 741b to 744b. In this case, the center axis of the movement direction of each of the driven magnets 6A to 6D and 16A to 16D is set to pass through the center point on the X-Y plane.

Further, the movable table portion 15 can be transferred in a direction that is not orthogonal to the respective coil sides 741a to 744a and 741b to 744b (an oblique direction with respect to the respective coil sides 741a to 744a and 741b to 744b). In this case, as will be described later, the transfer of the movable table 15 has a force of the electromagnetic driving force for each of the driven magnets with respect to the at least two rectangular drive coils 741, 742, 743 or 744. Is supposed to run.

In addition, the braking side formed as a non-magnetic metal member is formed in the coil edges 741a to 744a and 741b to 744b of the drive coils 741 to 744 facing the driven magnets 6A to 6D and 16A to 16D. The plates 9 are arranged close to (nearly in contact with) the magnetic pole surfaces of the respective driven magnets 6A to 6D and 16A to 16D. In the present embodiment, one braking plate 9 is used, and part or all of the circumference thereof is fixed to the case body 3.

The four driven magnets 6A to 6D and 16A to 16D constituting a part of the electromagnetic drive means 144 have the cross sections of the magnetic poles (each of the driving coils 741 to 744 as shown in FIG. 55 in this embodiment). Opposing surfaces of the coil sides 721a to 724a and 721b to 724b of each of the?) Are quadrangular electromagnets and are equidistant from the center on the Ⅹ-Y plane assumed on the upper surface of the auxiliary table 5. On the y-axis and Y-axis of a position, they are arranged and fixed, respectively.                 

In the present embodiment, for example, a predetermined operating current is supplied to a part or all of the eight driven magnets 6A to 6D and 16A to 16D, and the respective driven magnets 6A to 6D and 16A to are supplied. 16D) is set to the movable state, and then or simultaneously, each of the drive coils 741 to 744 is set to the movable state in accordance with a predetermined control mode described later. Then, the magnitude of the magnetic force of each of the driven magnets 6A to 6D and 16A to 16D including the respective driving coils 741 to 744 is adjusted by the energization control, whereby the movable table portion 15 ) Is conveyed in a predetermined direction.

In this case, the action of the electronic drive means 144 on the conveying direction to the movable table 15 and its conveying driving force (the driving coils 741 to 744 and the four driven magnets 6A to 6D and 16A to Energization drive for 16D) will be described in detail with reference to FIGS. 57 to 58. In FIG. 57 and FIG. 58, the rotation drive by the electricity supply to a drive coil is not shown.

In this case, in the thirteenth embodiment, since the energization directions of the eight driven magnets 6A to 6D and 16A to 16D which are formed as electromagnets are specified in advance as described later, eight rectangular drive coils 741 to The direction of energization of the inner coil sides 741a to 744a and the outer coil sides 741b to 744b of the 744 and the magnitude (including the energization stop control) of the energization current are transferred to the movable table 1. Correspondingly, setting control is performed by the operation control system 204 described later. As a result, the driven magnets 6A to 6D and 16A to 16D are arranged in predetermined directions (directions orthogonal to the respective coil edges 741a to 744a and 741b to 744b) according to Fleming's left-hand rule. The pressing electromagnetic force (reaction force) is output.

In addition, by selecting and combining the directions of the electromagnetic forces generated in the eight driven magnets 6A to 6D and 16A to 16D in advance, the combined force of the electron driving forces generated in the respective driven magnets 6A to 6D and 16A to 16D is determined. The movable table portion 15 can be aligned with the conveying direction, and the movable table portion 15 can be provided with a moving force in an arbitrary direction on the X-Y plane.

The series of energization control methods for these eight driven magnets 6A to 6D and 16A to 16D will be described in detail in the description points (Figs. 57 to 58) of the program storage section 22 described later.

Here, outside and inside on the same surface of each of the drive coils 741 to 744 are at least at the same height as the height (in the Y-axis direction) of the respective drive coils 741 to 744. In the range including the operating range of the driven magnets 6A to 6D and 16A to 16D, magnetic materials such as ferrite may be charged.

(About the operation control system 204)

Next, the operation control system 204 in this thirteenth embodiment will be described in detail.

In the thirteenth embodiment, the respective rectangular drive coils 741 to 744 and the eight driven magnets 6A to 6D and 16A to 16D are individually energized to control the movable table unit 15. An operation control system 204 for restricting the movement operation of the controller is provided in parallel with the electronic drive means 144 (see FIG. 56).

The operation control system 204 is a magnetic pole for individually setting and holding magnetic poles of the eight driven magnets 6A to 6D and 16A to 16D provided corresponding to the respective rectangular drive coils 741 to 744. An individual setting function, a magnetic strength setting function for individually setting the magnetic strength of each of the driven magnets 6A to 6D and 16A to 16D (which can be set by varying the energizing current), and the respective rectangular shapes The energization direction of the coil edges 741a, 741b, 742a, 742b, 743a, 743b, 744a, and 744b of the portion of the drive coils 741 to 744 that intersects the X-axis or the Y-axis is a predetermined direction (one or the other). Power supply direction setting function to be set and held according to an external command, and drive coil power supply control function for variably setting the magnitude of the current supply to each of the rectangular drive coils 741 to 744. While adjusting the output of the above It has a table | wheel operation control function which adjusts the feed direction and feed force with respect to the movable table part 15. FIG.

And in order to perform the said function, this operation control system 204 is each square drive coil 741-744 and each of four each of the said electronic drive means 144, as shown in FIG. A table drive control means 214 for driving the driven magnets 6A to 6D and 16A to 16D individually along a predetermined control mode to control the movable table 15 to move in a predetermined direction; A plurality of control programs provided in parallel to the control means 214 and in which a plurality of control modes (eight control modes of D1 to D8 in the present embodiment) in which the moving direction of the movable table 1 and its operation amount are specified are specified. This stored program storage unit 224 and a data storage unit 23 storing therein predetermined data and the like used in the execution of the respective control programs.

The table drive control means 214 further includes an operation command input unit for instructing predetermined control operations for the rectangular drive coils 741 to 744 and the eight driven magnets 6A to 6D and 16A to 16D. 24) are installed in parallel. In addition, the table drive control means 214 detects the positional information during and after the movement of the movable table 1 by the positional information detecting means 24, and calculates and sends the positional information.

The various control functions of the operation control system 204 are collectively included in the plurality of control modes D1 to D8 of the program storage unit 224, and are input through the operation command input unit 24. It is operated based on any one of the control modes D1 to D8 selected by the command from the operator to be executed.

This is explained in more detail.

The table drive control means 214 according to the present embodiment operates on the basis of the command from the operation command input unit 24 to select a predetermined control mode from the program storage unit 224, and the respective rectangular drive coils ( 741 to 744 and the eight control magnets 6A to 6D and 16A to 16D, the main control unit 214A for energizing and controlling a predetermined DC current including zero, and the main control unit 214A. Coil selection for driving control of each of the rectangular drive coils 741 to 744 and the eight driven magnets 6A to 6D and 16A to 16D simultaneously or separately according to the predetermined control mode D1 to D8. The drive control part 214B is provided.

In addition, the main control unit 214A calculates the position of the movable table 1 based on the input information from the positional information detecting means 25 for detecting the table position or performs other various operations. At the same time has a combination. Here, reference numeral 4G denotes a power supply circuit portion for energizing a predetermined current through each of the rectangular drive coils 721 to 724 and the four driven magnets 6A to 6D of the electron drive means 142.

[Program Memory 224]

The table drive control means 214 is a rectangular drive coil 741 to each of the electronic drive means 144 in accordance with a predetermined control program (predetermined control mode) stored in the program storage unit 224 in advance. 744 and each of the eight driven magnets 6A to 6D and 16A to 16D have predetermined relations and are configured to individually drive control.

In other words, in the thirteenth embodiment, the program storage unit 224 individually specifies the energization directions of the eight driven magnets (electromagnets) 6A to 6D, 16A to 16D, respectively, and specifies the N poles of the magnetic poles or the like. A plurality of magnet control programs that individually specify the S pole and individually vary the magnitude of the energized current including the energization stop, and the eight driven magnets (electromagnets) 6A to 6D and 16A to 16D. This function functions when the energization direction of is specified and the N pole or the S pole (or energization stop) of the magnetic pole is set, and correspondingly, the energization direction and the energization current for each of the four rectangular drive coils 741 to 744 are correspondingly set. The control program for the drive coil which variably sets the size of is stored. At the same time, the timing of the operation of each of these control programs is collectively stored in eight sets of control modes D1 to D8 (see Figs. 57 and 58).

Here, eight sets of control modes D1 to D8 in the thirteenth embodiment will be described based on FIGS. 57 to 58.

Fig. 57 shows an example of the control modes D1 to D4 in the case where the movable table 15 is transported toward the positive or negative direction of the Y-axis and toward the positive or negative direction of the Y axis, respectively. ).

In each of the control modes D1 to D4 in this Fig. 57, the current flow direction of the direct current to the respective rectangular drive coils 741 to 744 is set to be variably controlled individually. In addition, the energization direction of each of the eight driven magnets (electromagnets) is set and controlled so that the N pole or the S pole of each magnetic pole does not always change (in a fixed state) even if the control modes are different.

That is, in this thirteenth embodiment, the magnetic poles of the end faces of the eight driven magnets 6A to 6D and 16A to 16D that face the rectangular drive coils 741 and 742 are moved. 6B), it is set to the N pole, and to the S pole in the driven magnets 6C and 6D, respectively. Similarly, S poles are set in the driven magnets 16A and 16B and N poles in the driven magnets 16C and 16D, respectively. In this thirteenth embodiment, N and S of each set magnetic pole are controlled in a fixed state even if the control modes D1 to D4 are different.

(Control mode D1)

The control mode D1 in this thirteenth embodiment shows an example of the control mode for transferring the movable table 1 in the positive direction of the X axis (see FIG. 57).

In this control mode D1, the driven magnets 6B, 6D, 16B, 16D on the Y axis are subjected to energization stop control. At the same time, the rectangular drive coils 742 and 744 also maintain the state of energization stop control.                 

Moreover, the cross section which opposes the said inner coil side 741a of the driven magnet 6A on a y-axis is fixed-controlled by N pole, and opposes the said inner coil side 743a of the driven magnet 6C on a y-axis. The cross section to be fixed is controlled to the S pole.

Moreover, the cross section which opposes the said outer coil side 741b of 16 A of driven magnets on a X axis is fixed-controlled by S pole, and opposes the said outer coil side 743b of 16 C of driven magnets on a Y-axis. The cross section to be fixed is controlled to the N pole.

The drive coils 741 and 743 are both energized and driven in the counterclockwise direction (left rotation).

For this reason, in actual energization drive, predetermined electromagnetic force is generated in the direction shown by the dotted arrow in the respective coil edges 741a, 741b, 743a, and 743b of the drive coils 741 and 743, and simultaneously The reaction force (which occurs because the rectangular drive coils 741 and 743 are fixed) causes the driven magnets 6A, 6C, 16A, and 16C to be driven in the direction indicated by the solid arrow (in the figure, to the right). . Thereby, the movable table part 15 is conveyed to the positive direction on a Y-axis.

In addition, the drive coils 742 and 744 and the driven magnets 6B, 16B, 6D, and 16D during energization stop are energized individually to perform the position displacement correction operation in the position displacement of the movable table 1. It is.

(Control mode D2)

This control mode D2 shows an example of the control mode for conveying the movable table 1 to the negative direction of the X axis (refer FIG. 57).                 

In this control mode D2, the energization direction of each coil edge | side 741a, 741b, 743a, 743b part of the square drive coils 741, 743 on a Z axis is compared with the case of the said control mode D1. 1 point in the opposite direction (clockwise) is different. Others are the same as in the case of the control mode D1.

For this reason, in each coil side 741a, 741b, 743a, 743b part of the drive coil 741, 743, the electromagnetic drive force (arrow of a dotted line) of a reverse direction is carried out on the principle similar to the case of the said mode D1. Generated and the driven magnets 6A, 16A, 6C, and 16C are repulsively driven in the directions indicated by the solid arrows, respectively, in the left direction in the drawing. Conveyed in the negative direction on the axis. Here, in the positional displacement of the movable table 1, the same correction operation as in the case of the control mode D1 is executed.

(Control mode D3)

This control mode D3 shows an example of the control mode for conveying the movable table 1 to the positive direction of a Y-axis (refer FIG. 57).

In this control mode D3, the driven magnets 6A, 6C, 16A, and 16C on the X axis are subjected to energization stop control. At the same time, the rectangular drive coils 741 and 743 are also set to the state of energization stop control.

In addition, the end face portion of the driven magnet 6B on the Y axis opposite to the inner coil side 742a is fixedly controlled to the N pole, and is opposed to the coil side 744a of the driven magnet 6D on the Y axis. The end face is fixedly controlled to the S pole.                 

Similarly, the cross section opposite to the inner coil side 742b of the driven magnet 16B on the Y axis is fixedly controlled to the S pole, and is opposed to the coil side 744b of the driven magnet 16D on the Y axis. The cross section is fixedly controlled to the N pole.

On the other hand, the drive coils 742 and 744 are both energized and driven in the counterclockwise direction (left rotation).

For this reason, in actual energization drive, the electromagnetic drive force of the direction shown by the dotted line is respectively generated in each coil edge | side 742a, 742b, and 744a, 744b of the drive coil 742, 744, and the reaction force [ This occurs because the rectangular drive coils 742 and 744 are fixed.] The driven magnets 6B, 16B, 6D, and 16D are driven repulsively in the direction indicated by the solid arrow (upper direction in the figure). By this, the movable table 15 is conveyed in the positive direction on the Y axis.

Here, the drive coils 741 and 743 and the driven magnets 6A, 6C, 16A, and 16C during energization stop are energized separately for the position displacement of the movable table 1 so that a position displacement correction operation may be performed. It is.

(Control mode D4)

This control mode D4 shows an example of the control mode for conveying the movable table 1 to the negative direction of a Y-axis (refer FIG. 57).

In this control mode D4, the energization direction of each coil edge | side 742a, 742b, 744a, 744b part of each square drive coil 742,744 on a Z axis is made into the case of the said control mode D3. Compared with, the point in the opposite direction (clockwise) is different. Others are the same as in the case of the control mode D3.

For this reason, in each coil side 742a, 742b, 744a, 744b part of square drive coil 742, 744, the direction (control) shown by the dotted line arrow on the principle similar to the case of the said control mode D3 The electromagnetic driving force is generated in the opposite direction as in the case of the mode D3, and the reaction force is repulsively driven in the direction indicated by the solid arrows (refer to the lower direction in the drawing) by the driven magnets 6B, 16B, 6D, and 16D, respectively. By this, the movable table part 15 is conveyed to the negative direction on a Y-axis. Here, in the positional displacement of the movable table 1, the same correction operation as in the case of the control mode D3 is executed.

Subsequently, in FIG. 58, an example of each of the control modes D5 to D8 in the case of transferring the movable table unit 15 toward the respective four upper limit directions on the Ⅹ-Y plane coordinate is illustrated. ).

In FIG. 58, in each control mode D5 to D8, the current flow direction of the DC current to each of the rectangular drive coils 741 to 744, similarly to the case of the respective control modes D1 to D4. Are set to be individually variable controlled so that the N pole or the S pole of each magnetic pole does not always change (in a fixed state) with respect to the energization direction of each of the eight driven magnets (electromagnets). The setting is controlled.

(Control mode D5)

This control mode D5 shows an example of the control mode for conveying the movable table 1 in the direction of the first upper limit on the X-Y plane coordinate (see FIG. 58).

In this control mode D5, each of the eight driven magnets 6A to 6D and 16A to 16D is set in a state capable of energizing control at the same time. In addition, the energization direction (setting of the magnetic poles N and S) is fixed as in the case of the respective control modes D1 to D4.

That is, in the driven magnets 6A and 6B arranged in the positive direction on the Y-axis and the Y-axis, the cross-sectional portions facing the coil sides 741a and 742a of the respective rectangular drive coils are set to the N pole. . Further, in the driven magnets 6C and 6D arranged in the negative direction on the Y-axis and the Y-axis, the cross-sectional portions facing the coil sides 743a and 744a of the respective rectangular drive coils are set to the S pole. have.

Similarly, in the driven magnets 16A and 16B arranged in the positive direction on the y-axis and the Y-axis, the cross-sectional portions facing the coil sides 741b and 742b of the respective rectangular drive coils are set to the S pole. . Further, in the driven magnets 16C and 16D arranged in the negative direction on the Y-axis and the Y-axis, the cross-sectional portions facing the respective rectangular drive coils 743b and 744b are set to the N pole.

In each of the coil sides 741a, 741b, 742a, 742b, 743a, 743b, 744a, and 744b of the rectangular drive coils 741 to 744, energization is performed such that the control modes D1 and D3 operate simultaneously. Control (the energization direction is counterclockwise) is made. For this reason, the electromagnetic driving force in the same direction (the positive direction of the y-axis and the positive direction of the y-axis) is generated at the same time as in the case of the control modes D1 and D3, and the combined force is shown in the column of the control mode D5 in FIG. Likewise, the direction of the first upper limit is oriented.

Thereby, the said movable table part 15 is conveyed toward the 1st upper limit direction on a Y-Y plane coordinate.                 

Here, the feed angle θ (feed direction) in the first upper limit direction with respect to the X axis is the energization current of each of the rectangular drive coils 741 to 744 and each of the driven magnets 6A to 6D and 16A to 16D. By individually varying the size of, the electronic driving force acting on each of the driven magnets 6A to 6D is changed, whereby it can be freely set in any direction.

(Control mode D6)

This control mode D6 shows an example of the control mode for conveying the movable table 1 toward the 3rd upper limit direction (direction opposite to the direction of a 1st upper limit) on a Y-Y plane coordinate (FIG. 58).

In this control mode D6, each of the eight driven magnets 6A to 6D and 16A to 16D is set in a state capable of energizing control at the same time, and the magnetic poles N and S are the respective control modes D1 to D5. Is set in the same way as

Further, in the respective coil sides 741a, 741b, 742a, 742b, 743a, 743b, 744a, and 744b of the respective rectangular drive coils 741 to 744, the same control modes D2 and D4 operate simultaneously. Power supply control (power supply direction is all clockwise rotation direction) is performed. For this reason, reaction force (electron driving force) in the same direction (the left direction and the downward direction in FIG. 58) in the same manner as in the case of the control modes D2 and D4 is generated at the same time, and the combined force is the difficulty of the control mode D6 in FIG. As shown in Fig. 3, the direction of the third upper limit is oriented. Thereby, the said movable table part 15 is conveyed toward the 3rd upper limit direction on a Y-Y plane coordinate.                 

In addition, the feed angle θ (feed direction) in the third upper limit direction with respect to the X axis is the energization current of each of the rectangular drive coils 741 to 744 and the driven magnets 6A to 16D and 16A to 16D. By individually varying the size of the magnetic force, the electromagnetic driving force acting on each of the driven magnets 6A to 6D and 16A to 16D is changed, whereby it can be freely set in any direction.

(Control mode D7)

This control mode D7 shows an example of the control mode for conveying the movable table 1 in the direction of the second upper limit on the X-Y plane coordinate (see FIG. 58).

In this control mode D7, eight driven magnets 6A to 6D and 16A to 16D are energized and controlled at the same time, and the magnetic poles N and S are the same as those of the respective control modes D1 to D6. Likewise fixed.

On the other hand, with respect to the respective rectangular drive coils 741 to 744, the rectangular drive coils 741 and 743 on the y-axis are energized and driven in the clockwise direction (right turn in FIG. 58) as in the case of the control mode D2, The rectangular drive coils 742 and 744 on the Y-axis are energized to be driven in the counterclockwise direction (left rotation in Fig. 58) as in the case of the control mode D3.

For this reason, in this control mode D7, in each coil side 741a, 741b, 742a, 742b, 743a, 743b, 744a, 724b part of each rectangular drive coil 741-744, the said control is carried out. The energization control is the same as if the modes D2 and D3 were operated simultaneously. For this reason, the electromagnetic driving force in the same direction (the left direction and the upper direction in FIG. 58) as in the case of the control modes D2 and D3 is generated at the same time, and the combined force is shown in the column of the control mode D7 in FIG. As shown, the direction of the second upper limit is directed. Thereby, the said movable table part 15 is conveyed toward the 2nd upper limit direction on a Y-Y plane coordinate.

In addition, the feed angle θ (feed direction) in the second upper limit direction with respect to the X axis is the current carrying current of each of the rectangular drive coils 741 to 744 and each of the driven magnets 6A to 6D and 16A to 16D. By individually varying the size of, the electron driving force acting on each of the driven magnets 6A to 6D and 16A to 16D is changed, whereby the feeding direction can be set in any direction.

(Control mode D8)

This control mode D8 shows an example of the control mode for conveying the movable table part 15 toward the 4th upper limit direction (direction opposite to the direction of a 1st upper limit) on a Y-Y plane coordinate ( See FIG. 58).

In this control mode D8, eight driven magnets 6A to 6D and 16A to 16D are energized and controlled at the same time, and the magnetic poles N and S are the same as those of the respective control modes D1 to D7. Likewise fixed.

On the other hand, with respect to each of the rectangular drive coils 741 to 744, the energization driving direction is set in the reverse direction as in the case of the control mode D7. That is, the rectangular drive coils 741 and 743 on the y-axis are energized in a counterclockwise direction (left turn in FIG. 58) as in the case of the control mode D1, and the rectangular drive coils 742 and 744 on the Y-axis are controlled. As in the case of the mode D4, energization driving is performed in the clockwise direction (right turn in Fig. 58).

For this reason, in this control mode D8, in each coil side 741a, 741b, 742a, 742b, 743a, 743b, 744a, 744b part of each rectangular drive coil 741-744, the said control is carried out. The energization control is performed as if the modes D1 and D4 were operated simultaneously, and the electromagnetic driving force in the same direction (the right direction and the downward direction in Fig. 58) as in the case of the control modes D1 and D4 was generated simultaneously, and the combined force was shown in Fig. 58. As shown in the column of the control mode D8, the direction of the fourth upper limit is directed. Thereby, the said movable table part 15 is conveyed toward the 4th upper limit direction on a Y-Y plane coordinate.

In addition, the conveyance angle θ (feed direction) in the fourth upper limit direction with respect to the X axis is the energization current of each of the rectangular drive coils 741 to 744 and each of the driven magnets 6A to 6D and 16A to 16D. By individually varying the size of the magnetic force, the electromagnetic driving force acting on each of the driven magnets 6A to 6D and 16A to 16D is changed, whereby it can be freely set in any direction.

The rest of the configuration, the operation, the function, and the like are almost the same as those in the eleventh embodiment.

Even in this case, the same effects as those in the eleventh embodiment can be obtained, and the configurations of the rectangular drive coils 741 to 744 are similar to the Japanese-shaped drive coils 721 to 724 in the second embodiment. Compared to the case of the eleventh embodiment, the productivity and durability of the drive coils 741 to 744 can be improved by simplifying the wiring of the drive coils 741 to 744. In addition, since the energization control of the drive coils 741 to 744 is simplified, there is an advantage that the response is also improved.

In addition, since each of the driven magnets 6A to 6D and 16A to 16D is doubled in the case of the eleventh embodiment, the output of the electromagnetic driving force can be enhanced, and the rapid movement of the movable table 1 can be achieved. There is also the advantage of being able to run.

In addition, in the said thirteenth embodiment, in the setting of the conveyance direction of the movable table part 15, the case where the drive control of the electronic drive means 142 was divided into the control modes of D1-D8 was illustrated, for example, In the control mode D2, the energization directions of the driven magnets 6A to 6D and 16A to 16D are set in the opposite directions to those in the control mode D1, and the energization directions of the drive coils 741 and 743 are controlled. As long as the function is the same as in the case of D1, the electronic drive means 144 may be configured to drive control by another control method.

In addition, in the thirteenth embodiment, the equipment locations of the driven magnets 6A to 6D and 16A to 16D and the equipment locations of the rectangular drive coils 741 to 744 may be replaced. In this case, the driven magnets 6A to 6D and 16A to 16D are provided on the stator side, and the rectangular drive coils 741 to 744 are provided on the mover side.

In the thirteenth embodiment, the case where the driven magnets 6A to 6D and 16A to 16D are constituted by electromagnets is exemplified, but this may be constituted by permanent magnets.

This eliminates the need for any electrical wiring around the driven magnets 6A to 6D and 16A to 16D, thereby reducing the space area at the equipment location of the driven magnets 6A to 6D and 16A to 16D. have. Therefore, the whole apparatus can be reduced in size and weight, productivity and water retention can be improved, and the energization drive is compared with the case where the driven magnets 6A to 6D and 16A to 16D are electromagnets. This becomes unnecessary, and the power consumption and the temperature rise of this part can be suppressed as a whole. Thereby, the running cost of the whole apparatus can be reduced significantly, and in the drive control of the electromagnetic drive means 4, only a switching control of the electricity supply direction of each of the rectangular drive coils 741-744 is movable table. (1) can be conveyed and driven in any direction. Therefore, a quick response in switching the moving direction of the movable table 1 becomes possible, and there is no occurrence of a disconnection accident or the like of the driven magnets 6A to 6D. There is an advantage that it can greatly improve.

{14th Embodiment}

Next, a fourteenth embodiment will be described based on FIGS. 59 to 64.

This fourteenth embodiment is equipped with another electronic driving means 145 in place of the electronic driving means 142 in the eleventh embodiment, and at the same time, for efficiently driving the electronic driving means 145. The operation control system 205 is characterized in that it is provided in place of the operation control system 202.

That is, the electronic drive means 145 in this embodiment is four Japanese-shaped drive coils 721, 722, 723, 724 equipped in the electron drive means 142 in the eleventh embodiment. Is equipped to the stationary plate 8 in the state which rotated 90 degrees, respectively, and it has the characteristic that this was made into the Japanese-shaped drive coil 751, 752, 753, 754. At the same time, it is characterized in that the rotation control functions (control modes 9 and 10) are newly added to the control contents by the operation control system 205.

As a result, this fourteenth embodiment made it possible to rotate the drive in the limited range with respect to the movable table 1, which was not possible in principle in the eleventh embodiment, without newly installing other driving means.

This is described below.

First, as in the case of the eleventh embodiment, the fourteenth embodiment includes the movable table portion 15 for the precision work and the movable table portion 15 for precision work, which are arranged to be movable in any direction on the same surface. A table support mechanism (2) which supports the movable table portion (15) while allowing movement, and has a home position return function with respect to the movable table portion (15), and a main body portion that supports the table support mechanism (2). It is provided with the case main body 3 as this, and the electronic drive means 145 which is equipped in the case main body 3 side, and gives the movable table part 15 the movement force to a predetermined direction according to the instruction | command from the outside. Doing.

Here, the movable table 15 is parallel to the movable table 1 for precision work at predetermined intervals with respect to the movable table 1 and at the same center axis on the same central axis as in the case of the respective embodiments described above. It is comprised by the auxiliary table 5 arrange | positioned integrally in the. 59, the table support mechanism 2 is equipped in the side of the auxiliary table 5, and is comprised so that the said movable table 1 may be supported through this auxiliary table 5. As shown in FIG.

(About the electronic drive means 145)                 

The electronic drive means 145 has its main part supported by the case main body 3 side, and gives a predetermined movement force (driving force) along the conveyance direction of the said movable table part 15 according to the command from the outside. Equipped with. This electromagnetic drive means 45 is arrange | positioned between the said movable table 1 and the auxiliary table 5.

Specifically, the electronic drive means 145 includes four drive coils 751, 752, 753, and 754 formed in a Japanese shape, and an inner coil located at the center of each of the drive coils 751 to 754. The four driven magnets 6A, 6B, 6C, and 6D and the four driving coils 751 to 754 provided on the auxiliary table 5 in correspondence with the sides 751a to 754a individually are prescribed. A fixing plate 8 supporting at the position is provided.

Each of the Japanese-shaped drive coils 751 to 754 has a respective Y-Y surface on which the inner coil edges 751a to 754a positioned at the center portion thereof are assumed to be the origin of the center portion on the fixed plate 8. In the state superposed | polymerized along an axial phase, it arrange | positions each on the said y-axis phase and a Y-axis individually.

For this reason, about each of four driven magnets 6A-6D arrange | positioned facing each other in this inner coil edge 751a-754a individually, as described later, each inner coil edge 751a-754a is mentioned. (I.e., y-axis or Y-axis), the electromagnetic driving force is output in a direction orthogonal to each other.

In the present embodiment, the movable table 1 is rotationally driven within a predetermined range by variably controlling the direction of the current supplied to each of the inner coil edges 751a to 754a according to the purpose. It is.                 

Each of the four driven magnets 6A to 6D is composed of an electromagnet capable of controlling the energization from the outside, and corresponds to the inner coil sides 751a to 754a of the respective Japanese-shaped drive coils. It is arranged separately on the Y axis and Y axis.

As shown in Fig. 59, the fixing plate 8 is arranged on the movable table 1 side of the auxiliary table 5 and is supported by the case main body 3. Each of the date-shaped drive coils 751 to 754 and the fixing plate 8 constitutes a stator portion which is a main part of the electronic drive means 4.

When each of the Japanese-shaped drive coils 751 to 754 is set to an operating state, the respective driven magnets 6A to 6D are disposed between the driven magnets 6A to 6D. An electromagnetic driving force for repulsion driving is generated in a direction orthogonal to each of the inner coil sides 751a to 754a (that is, a direction orthogonal to the corresponding y-axis or Y-axis).

In addition, when conveying the said movable table part 15 to the direction which is not orthogonal to each inner coil edge | side 751a-754a (a direction oblique to each coil edge 751a-754a), at least as mentioned later, The conveyance of this movable table part 15 is performed by the force of the electromagnetic drive force with respect to two or more each of the driven magnets 6A-6D.

A braking plate 9 made of a non-magnetic metal member is provided on the inner coil edges 751a to 754a of the respective Japanese-shaped drive coils 751 to 754 facing the driven magnets 6A to 6D. Is arranged close to (near in contact with) the magnetic pole surface of each of the driven magnets 6A to 6D. In the present embodiment, one braking plate 9 is used, and part or all of the surroundings thereof is fixed to the case body 3.

The four driven magnets 6A to 6D constituting a part of the electromagnetic drive means 145, as shown in FIG. 60 in this embodiment, have a cross section of the magnetic pole (each of the respective driving coils 751 to 754). An electromagnet having a quadrangular shape having an opposite surface to the inner coil sides 751a to 754a is used, and on the Ⅹ-Y plane assumed on the upper surface of the auxiliary table 5, on the axial axis of the equidistant position from the center and Arranged and fixed to the Y-axis, respectively.

For this reason, in the present embodiment, for example, a predetermined operating current is supplied to some or all of the four driven magnets 6A to 6D so that each of the driven magnets 6A to 6D is set in the movable state. After that, or at the same time, each of the drive coils 751 to 754 is set in an operating state in accordance with a predetermined control mode to start energization. Then, the magnitude of the magnetic force of each of the driven magnets 6A to 6D including the respective driving coils 751 to 754 is adjusted by the energization control, whereby the movable table 15 is predetermined. Is conveyed in the direction.

In this case, the action of the electronic drive means 145 on the conveying direction to the movable table 15 and its conveying driving force (with respect to the driving coils 751 to 754 and the four driven magnets 6A to 6D, respectively) Energization drive] will be described in detail with reference to FIGS. 62 to 64.

The four Japanese-shaped drive coils 751 to 754 forming the main part of the electromagnetic drive means 145 are made as a combination of two square small coil parts Ka and Kb, as shown in Figs. In general, it is composed of a Japanese shape. In the coil edges (parts of the inner coil edges 751a to 754a) where the two rectangular small coil portions Ka and Kb abut each other, the direction of the current (the one where the other small square coil portion abuts the other) In the coil edge, setting control is carried out so that the direction of the electric current which flows is made into the same direction. For this reason, when changing the direction, the energization direction in two square small coil parts Ka and Kb changes simultaneously.

In this case, in this fourteenth embodiment, the energization direction of each of the four driven magnets 6A to 6D formed as the electromagnet is specified in advance, as will be described later. The conduction direction and the magnitude (including the energization stop control) of the respective inner coil sides 751a to 754a of the coils 751 to 754 operate in response to the conveyance direction of the movable table unit 15. The setting is controlled by the control system 205.

This causes the driven magnets 6A to 6D to be outputted with an electromagnetic force (reaction force) pressed in a predetermined direction (the direction orthogonal to the inner coil edges 751a to 754a respectively) in accordance with the Fleming's left hand rule. do.

In addition, by selecting and combining the directions of the electromagnetic forces generated in the four driven magnets 6A to 6D in advance, the total force of the electromagnetic driving forces generated in the four driven magnets 6A to 6D is transferred to the movable table portion 15. It becomes possible to match to a direction, and can move this movable table part 15 toward arbitrary directions on a X-Y plane.

The method of conducting a series of energization controls for these four driven magnets 6A to 6D will be described in detail in the description point (Figs. 62 to 64) of the program storage unit 225 described later.                 

Here, outside and inside on the same surface of each of the drive coils 751 to 754 are at least at the same height as the height (in the Y-axis direction) of the respective drive coils 751 to 754. In the range including the operating range of the driven magnets 6A to 6D, a magnetic material such as ferrite may be charged.

[Operation Control System 205]

Next, the operation control system 205 in this fourteenth embodiment will be described in detail.

In this fourteenth embodiment, each of the Japanese-shaped driving coils 751 to 754 and the four driven magnets 6A to 6D are energized individually to control the movement of the movable table 15. The operation control system 205 for regulating the pressure is provided in parallel with the electronic drive means 145 (see Fig. 61).

This operation control system 205 has a magnetic pole individual setting function for individually setting and holding magnetic poles of each of the driven magnets 6A to 6D provided corresponding to the respective Japanese-shaped drive coils 751 to 754, Magnetic strength setting function for individually setting the magnetic strength of each of the driven magnets 6A to 6D (which can be set by varying the energizing current), and for each of the Japanese-shaped drive coils 751 to 754, respectively. An energization direction setting function for setting and maintaining the energization direction of the inner coil edges 751a to 754a in a predetermined direction (one or the other) according to an instruction from the outside, and the respective day-shaped driving coils 751 to ... A drive coil energization control function for variably setting the magnitude of the energization current to the 754, and a table copper for adjusting the conveying direction and the conveying force to the movable table portion 15 while appropriately adjusting the operations by these functions. It provided with a control function.

And, in order to perform the above functions, the operation control system 205, as shown in Fig. 61, each of the Japanese-shaped drive coils 751 to 754 and four of each of the electromagnetic drive means 145, respectively. Table drive control means 215 for driving the driven magnets 6A to 6D individually along a predetermined control mode to move the movable table 15 in a predetermined direction, and this table drive control means 215. ), A plurality of controls related to a plurality of energization control modes (10 control modes of E1 to E10 in this embodiment) in which the moving direction, the rotation direction, the operation amount, and the like of the movable table 1 are specified. A program storage section 225 in which the program is stored, and a data storage section 23 storing therein predetermined data and the like used in the execution of the respective control programs.

In the table drive control means 215, an operation command input unit 24 for instructing predetermined control operations for each of the Japanese-shaped drive coils 751 to 754 and the four driven magnets 6A to 6D is provided. It is installed in parallel. In addition, the table drive control means 215 detects the positional information during and after the movement of the movable table 1 by the positional information detecting means 25 and calculates and sends the calculated positional information.

The various control functions of the operation control system 205 are collectively included in the plurality of control modes E1 to E10 of the program storage unit 225, and are input through the operation command input unit 24. It is operated based on any one of the control modes E1 to E10 selected by the command from the operator to be operated.

This is explained in more detail.                 

The table drive control means 215 according to the present embodiment operates on the basis of the command from the operation command input unit 24, selects a predetermined control mode from the program storage unit 225, and drives each of the above Japanese-shaped shapes. The main control unit 215A for energizing and controlling the predetermined DC current including zero in the coils 751 to 754 and the four driven magnets 6A to 6D, and the main control unit 215A are selected and set. Coil selection drive control unit 215B for simultaneously or individually driving control of each of the Japanese-shaped drive coils 751 to 754 and the four driven magnets 6A to 6D in accordance with the control modes E1 to E10 of FIG. Equipped with.

In addition, the main control unit 215A has a function of calculating the position of the movable table 1 based on the input information from the positional information detecting means 25 for detecting the table position or performing other various operations. At the same time has a combination. Here, reference numeral 4G denotes a power supply circuit portion for energizing a predetermined current to each of the Japanese-shaped drive coils 751 to 754 and the four driven magnets 6A to 6D of the electronic driving means 145. .

[Program Memory 225]

The table drive control means 215 is a Japanese-shaped drive coil 751 of each of the electronic drive means 145 in accordance with a predetermined control program (predetermined control mode) stored in the program storage unit 225 in advance. And 754) and four driven magnets 6A to 6D are each configured to drive control individually with a predetermined relationship.

That is, in the program storage unit 225 according to the present embodiment, the energization directions of the four driven magnets (electromagnets) 6A to 6D are individually specified to specify the N pole or the S pole of the magnetic pole. A plurality of magnet control programs for individually varying the magnitude of the energization current including energization stops, and the energization directions of the four driven magnets (electromagnets) 6A to 6D are specified, so that the N pole or The S pole (or energization stop) functions when set, and in response to this, the drive coil for varyingly setting the energization direction for each of the four Japanese-shaped drive coils 751 to 754 and the magnitude of the energization current thereof. An energization control program is stored. At the same time, the timing of the operation of each of the energization control programs is collectively stored in the ten sets of control modes E1 to E10 (see Figs. 62 to 64).

Next, 10 sets of control modes E1 to E10 in the fourteenth embodiment will be described based on FIGS. 62 to 64.

FIG. 62 shows an example of the control modes E1 to E4 when the movable table 15 is conveyed toward the positive or negative direction of the Y-axis and toward the positive or negative direction of the Y axis, respectively. ).

In FIG. 62, in each control mode E1 to E4, it is set so that the energization direction of the DC current with respect to each Japanese-shaped drive coil 751-754 may be individually controlled. In addition, the energization directions of the four driven magnets (electromagnets) are set and controlled so that the N pole or the S pole of each magnetic pole does not always change (in a fixed state) even if the energization control modes are different.

That is, in this fourteenth embodiment, the magnetic poles of the end faces of the four driven magnets 6A to 6D facing the Japanese-shaped drive coils 751 and 752 are transferred to the driven magnets 6A and 6B. Is set to the N pole, and to the S pole in the driven magnets 6C and 6D, respectively. Even if the control modes E1 to E4 are different, the magnetic poles of each of the driven magnets 6A to 6D are fixed. The setting is controlled.

(Control mode E1)

The control mode E1 in this fourteenth embodiment is an example of the energization control mode for transferring the movable table 1 in the positive direction of the X axis (see FIG. 62).

In this control mode E1, the Japanese-shaped drive coils 752 and 754 on the Y-axis and the driven magnets 6B and 6D equipped corresponding thereto are energized and controlled, and the Japanese-shaped drive coils on the Y-axis ( 751 and 753 and the driven magnets 6A and 6C equipped correspondingly to this are controlled to stop energization.

The energization direction of the Japanese-shaped drive coils 752 and 754 on the Y-axis is in the direction from the positive direction of the Y-axis toward the origin 0 along the Y-axis in the inner coil side 752a of the Japanese-shaped drive coil 752. Similarly, it is set and controlled in the inner coil side 754a portion of the Japanese-shaped drive coil 754 in the direction from the negative direction of the Y axis to the origin along the Y axis.

In addition, in the driven magnets 6B and 6D, the end surface portion opposite to the inner coil side 752a of the driven magnet 6B on the Y axis is fixedly controlled to the N pole, and the driven magnet 6D on the Y axis is likewise. The cross section opposite to the inner coil side 754a of the s) is fixedly controlled to the S pole.

For this reason, a predetermined electromagnetic force is generated in the coil sides 752a and 754a of the drive coils 752 and 754 in the coil sides 752a and 754a (indicated by a left-dotted arrow in the drawing). At the same time, the reaction force (produced because the Japanese-shaped drive coils 752 and 754 are fixed) causes the driven magnets 6B and 6D to be driven in the direction indicated by the solid arrow (in the figure, to the right), On the basis of the balance of the electromagnetic driving force generated in these two driven magnets 6B and 6D, the movable table portion 15 is transferred in the positive direction on the X axis.

Moreover, in the displacement of a conveyance direction, the magnitude | size of the energizing current with respect to the two driven magnets 6B and 6D or the drive coils 752 and 754 is adjusted, and, thereby, the two driven magnets 6B and 6D. The balance of the electron driving force generated in the plane is maintained, and the displacement in the conveying direction is corrected.

(Control mode E2)

This control mode E2 is an example of the control mode for conveying the movable table 1 to the negative direction of the X axis (refer FIG. 62).

In this control mode E2, the point that the energization direction of the side 752a, 754a part of the drive coil 752, 754 on the X axis is reversed compared with the case of the said control mode E1 differs. Others are the same as in the case of the control mode E1.

For this reason, in the coil edges 721a and 724a of the drive coils 752 and 754, the electromagnetic force in the opposite direction to that in the control mode E1 is generated on the same principle as in the control mode E1. With the reaction force, the driven magnets 6A and 6C are driven in the repulsion in the direction indicated by the solid arrows, respectively, in the left direction, and the balance of the electronic driving force generated in these two driven magnets 6B and 6D is achieved. On the basis, the movable table 15 is conveyed in the direction of the portion on the X axis.

(Control mode E3)

This control mode E3 is an example of the electricity supply control mode for conveying the movable table 1 to the positive direction of a Y-axis (refer FIG. 62).

In this control mode E3, the Japanese-shaped drive coils 751 and 753 on the Y-axis and the driven magnets 6A and 6C equipped corresponding thereto are energized and controlled, and the Y-shaped drive coils on the Y-axis. 752 and 754 and the driven magnets 6B and 6D equipped correspondingly are energized to stop control.

And the energization direction of the Japanese-shaped drive coils 751 and 753 on the Y-axis is set in the direction from the zero origin direction to the positive direction along the Y-axis at the inner coil side 751a of the Japanese-shaped drive coil 751. Similarly, it is set and controlled in the direction from the origin 0 direction to the negative direction along the Y axis in the inner coil side 753a part of the Japanese-shaped drive coil 753 similarly.

Further, in the driven magnets 6A and 6C, the end surface portion opposite to the inner coil side 751a of the driven magnet 6A on the X axis is fixedly controlled to the N pole, and the driven magnet 6C on the X axis is similarly The cross section opposite to the inner coil side 753a of the s) is fixedly controlled to the S pole.

For this reason, in the coil edges 751a and 753a of the drive coils 751 and 753, a predetermined electromagnetic force is generated in each of the coil edges 751a and 753a, and at the same time, the reaction force (Japanese-shaped drive coil 751 753 is fixed, so that the driven magnets 6A and 6C are driven back in the direction indicated by the solid arrow (upper direction in the drawing), and these two driven magnets 6A and 6C are driven. On the basis of the balance of the electron driving force generated in the movable table 15, the movable table 15 is conveyed in the positive direction on the Y axis.

In the positional deformation of the movable table 15, the same correction operation as in the case of the control mode E1 is executed.

(Control mode E4)

This control mode E4 shows an example of the electricity supply control mode for conveying the movable table 1 to the negative direction of a Y-axis (refer FIG. 62).

In this control mode E4, the point that the energization direction of the coil edges 751a and 753a of the drive coils 751 and 753 on the X axis is reversed compared with the case of the said control mode E3 differs. Others are the same as in the case of the control mode E3.

For this reason, in the coil sides 751a and 753a of the drive coils 751 and 753, the electromagnetic force in the opposite direction to that in the control mode E3 is generated on the same principle as in the control mode E3. By the reaction force, the driven magnets 6A and 6C are repulsively driven in the directions indicated by the solid arrows respectively (downward direction in the drawing), and the balance of the electronic driving force generated in these two driven magnets 6A and 6C is achieved. On the basis of this, the movable table portion 15 is conveyed in the negative direction on the Y axis. In the positional displacement of the movable table 1, the same correction operation as in the case of the control mode E3 is executed.

63, an example of each control mode E5 to E8 at the time of conveying the movable table part 15 toward four upper limit directions on a Y-Y plane coordinate, respectively (FIG. ).

In each of the control modes E5 to E8 in Fig. 63, the direction in which the direct current flows with respect to the respective Japanese-shaped driving coils 751 to 754 is set to be variably controlled. In the energization direction of the copper magnet (electromagnet), the N pole or the S pole of each magnetic pole is set and controlled so that it does not always change (in a fixed state) even if the control modes are different.

(Control mode E5)

The control mode E5 in this fourteenth embodiment shows an example of the energization control mode for transferring the movable table 1 in the direction of the first upper limit on the X-Y plane coordinate (see FIG. 63).

In this control mode E5, the four driven magnets 6A to 6D are energized and controlled simultaneously, and the energization directions (stimulus N and S) are the same as in the respective control modes E1 to E4. It is fixed. That is, in the driven magnets 6A and 6B arranged in the positive direction on the Y-axis and the Y-axis, cross-sectional portions facing the respective Japanese-shaped drive coils 751 and 752 are set to the N poles. Further, in the driven magnets 6C and 6D arranged in the negative direction on the Y-axis and the Y-axis, the cross-sectional portions facing the respective Japanese-shaped drive coils 753 and 754 are set to the S poles.

In addition, in the control mode E5, each of the four Japanese-shaped drive coils 751 to 754 is also energized and driven at the same time. Specifically, in each portion of the inner coil sides 751a to 754a of each of the Japanese-shaped drive coils 751 to 754, energization control is performed such that the control modes E1 and E3 operate simultaneously. For this reason, the electromagnetic driving force in the same direction (the right direction and the upper direction in FIG. 63) as in the case of the control modes E1 and E3 is generated at the same time, and the combined force is shown in the column of the control mode E5 in FIG. Similarly, the direction of the first upper limit is directed. Thereby, the said movable table part 15 is conveyed toward the 1st upper limit direction on a Y-Y plane coordinate.

Here, the feed angle θ (angle θ with the y-axis) in the first upper limit direction with respect to the y-axis is the energization of each of the Japanese-shaped drive coils 751 to 754 and the respective driven magnets 6A to 6D. By varying and controlling the magnitude of the current individually, the electronic driving force acting on each of the driven magnets 6A to 6D is changed, whereby it can be freely set in any direction.

(Control mode E6)

This control mode E6 shows an example of the electricity supply control mode for conveying the movable table 1 toward the 3rd upper limit direction (direction opposite to the direction of a 1st upper limit) on a y-Y plane coordinate ( See FIG. 63).

In this control mode E6, the four driven magnets 6A to 6D are energized and controlled at the same time, and the magnetic poles N and S are set in the same manner as in the respective control modes E1 to E5. have.

For this reason, each of the Japanese-shaped drive coils 751 to 754 is subjected to energization control such that the control modes E2 and E4 operate simultaneously. For this reason, in each inner coil side 751a-754a part, the electromagnetic drive force of the same direction (the left direction and the downward direction of FIG. 63) similarly to the case of the said control modes E2 and E4 generate | occur | produces simultaneously, and the force As shown in the column of the control mode E6 in FIG. 63, the direction of the third upper limit is directed. Thereby, the said movable table part 15 is conveyed toward the 3rd upper limit direction on a Y-Y plane coordinate.

Here, the transfer angle θ in the third upper limit direction with respect to the y-axis individually controls the magnitude of the energizing current of each of the Japanese-shaped drive coils 751 to 754 and each of the driven magnets 6A to 6D. As a result, the electromagnetic driving force acting on each of the driven magnets 6A to 6D is changed, whereby it can be freely set in any direction.

(Control mode E7)

This control mode E7 shows an example of the electricity supply control mode for conveying the movable table 1 toward the 2nd upper limit direction on a Y-Y plane coordinate (refer FIG. 63).

In this control mode E7, the four driven magnets 6A to 6D are energized and controlled at the same time, and the magnetic poles N and S are fixed as in the respective control modes E1 to E6. .

In the case of this control mode E7, four each of the Japanese-shaped drive coils 751 to 754 are also energized and driven at the same time. Specifically, in each of the Japanese-shaped drive coils 751 to 754, energization control is performed such that the control modes E2 and E3 simultaneously operate at the respective coil edges 751a to 754a.

For this reason, the electromagnetic driving force in the same direction (the left direction and the upper direction in Fig. 63) as in the case of the control modes E2 and E3 is generated at the same time, and the combined force is shown in the column of the control mode E7 in Fig. 63. As shown, the direction of the second upper limit is directed. Thereby, the said movable table part 15 is conveyed toward the 2nd upper limit direction on a Y-Y plane coordinate.

Here, the transfer angle θ in the second upper limit direction with respect to the y-axis individually controls the magnitudes of the energizing currents of the respective Japanese-shaped drive coils 751 to 754 and the driven magnets 6A to 6D individually. As a result, the electromagnetic driving force acting on each of the driven magnets 6A to 6D is changed, whereby it can be freely set in any direction.

(Control mode E8)

This control mode E8 shows an example of the control mode for conveying the movable table part 15 toward the 4th upper limit direction (direction opposite to the direction of a 1st upper limit) on a Y-Y plane coordinate ( See FIG. 63).

In this control mode E8, the four driven magnets 6A to 6D are energized and controlled at the same time, and the magnetic poles N and S are fixed as in the respective control modes E1 to E7. .

In the case of this control mode E8, the energization control like the said control mode E1 and E4 operated simultaneously is performed in each coil edge 751a-754a part of each Japanese-shaped drive coil 751-754. . For this reason, the electromagnetic driving force in the same direction (the right direction and the downward direction in FIG. 63) as in the case of the control modes E1 and E4 is generated at the same time, and the combined force is shown in the column of the control mode E8 in FIG. Likewise, the fourth upper limit is directed. Thereby, the said movable table part 15 is conveyed toward the 4th upper limit direction on a Y-Y plane coordinate.

Here, the feed angle θ in the fourth upper limit direction with respect to the Y axis is to individually control the magnitude of the energizing current of each of the Japanese-shaped drive coils 751 to 754 and each of the driven magnets 6A to 6D. As a result, the electromagnetic driving force acting on each of the driven magnets 6A to 6D is changed, whereby it can be freely set in any direction.

(Control mode E9)

This control mode E9 enables the rotation of the movable table 1 at a predetermined angle in the counterclockwise direction (left rotation) on the X-Y plane, and shows an example of the energization control mode therefor (FIG. 64).

In this control mode E9, the day-shaped drive coils 751 to 754 and the four driven magnets 6A to 6D are simultaneously energized and controlled. In this case, the magnetic poles N and S of the driven magnets 6A to 6D are set in the same manner as in the case of the above E1 to E8.

In addition, for the Japanese-shaped drive coils 751 to 754, the four levels of the driven magnets 6A to 6D are predetermined at the same level around the origin (zero point) on the X-Y plane. The energization control is performed so that the moment (rotational driving force in the direction orthogonal to the y-axis or the y-axis) occurs in the counterclockwise direction, respectively (see Fig. 64).

Specifically, an energization direction is set in the inner coil side 751a of the drive coil 751 on the y-axis from the origin (0) direction on the y-axis to the forward direction, and the inner coil of the drive coil 753 on the y-axis. The energization direction is set and controlled by the side 753a part toward the origin (0) direction from the negative direction on a X axis. In addition, an energization direction is set in the inner coil side 752a of the drive coil 752 on the Y axis from the origin (0) direction on the Y axis to the forward direction, and the inner coil side of the drive coil 754 on the Y axis ( In the portion 754a, the energization direction is set and controlled from the negative direction on the Y axis toward the origin (0) direction.

In each of the inner coil edges 751a to 754a, the magnitude of the energizing current is set to be the same so that the same electromagnetic force can be output to each of the driven magnets 6A to 6D.

In FIG. 64, the predetermined rotational moment of the same level is shown by the solid line. As a result, the movable table portion 15 supporting the driven magnets 6A to 6D is driven to rotate in the counterclockwise direction within the predetermined range via the driven magnets 6A to 6D.

That is, in each of the coil edges 751a to 754a of the drive coils 751 to 754, a predetermined electromagnetic driving force indicated by a dotted arrow is generated in the coil edges 751a to 754a, and at the same time, the reaction force This occurs because the shape drive coils 751 to 754 are fixed to the fixing plate 8], and each of the driven magnets 6A to 6D is repulsed in the direction indicated by the solid arrow (in the figure, counterclockwise direction). On the basis of the balance of the respective electromagnetic driving forces (predetermined rotational moments of the same level) generated in these four driven magnets 6A to 6D, the movable table 15 is moved on the X-Y plane ( Rotationally in the counterclockwise direction).

(Control mode E1O)

This control mode E10 enables the drive of the movable table 15 to rotate at a predetermined angle in the clockwise direction (right turn) on the X-Y plane, and shows an example of the control mode therefor (FIG. 64). Reference).

In this control mode E10, the day-shaped drive coils 751 to 754 and the four driven magnets 6A to 6D are simultaneously energized and controlled.

In this case, the magnetic poles N and S of the driven magnets 6A to 6D are set in the same manner as in the case of the above E1 to E9. Further, for the Japanese-shaped drive coils 751 to 754, four corresponding ones are respectively provided. For the driven magnets 6A to 6D, predetermined moments (rotational driving force in the direction orthogonal to the y-axis or the y-axis) at the same level around the origin (zero point) on the y-Y plane are respectively clocked. In order to generate | occur | produce in a direction (right turn), electricity supply control is performed in the opposite direction to the case of the said control mode E9.

In FIG. 64, the predetermined rotational moment of the same level is shown by the solid line. As a result, the movable table portion 15 supporting the driven magnets 6A to 6D is driven to rotate in the counterclockwise direction within the predetermined range via the driven magnets 6A to 6D.

That is, in each of the coil edges 751a to 754a of the drive coils 751 to 754, a predetermined electromagnetic driving force indicated by a dotted arrow is generated in the coil edges 751a to 754a, and at the same time, the reaction force This occurs because the shape drive coils 751 to 754 are fixed to the fixing plate 8], and each of the driven magnets 6A to 6D is repulsed in the direction indicated by the solid arrow (in the figure, clockwise rotation direction). On the basis of the balance of the respective electromagnetic driving forces (predetermined rotational moments of the same level) generated in these four driven magnets 6A to 6D, the movable table 15 is moved on the X-Y plane ( Rotationally driven in a clockwise rotation direction) within a predetermined range.                 

The rest of the configuration, the operation, the function, and the like are almost the same as those in the eleventh embodiment.

Even in this case, the same effects as those in the eleventh embodiment can be obtained, and in addition, in this fourteenth embodiment, the respective electromagnetic driving forces output by the electron driving means with respect to the Y-axis or the Y-axis. Since it can output in the direction orthogonal to a direction which rotates, there exists an advantage that the rotation drive within a predetermined angle with respect to a movable table part is attained, without providing a new rotation drive means separately, and the generalization is carried out. Can be further increased.

Here, in the fourteenth embodiment, in the setting of the transfer direction of the movable table unit 15, the case where the drive control of the electronic drive means 145 is divided into the control modes of E1 to E10 is illustrated. In the control mode E2, the energization directions of the driven magnets 6A to 6D are set in the opposite directions to those in the control mode E1, and the energization directions of the drive coils 751 and 753 are controlled modes. As long as the function is the same as in the case of (E1), the electronic drive means 145 may be controlled to be driven by another control method.

In addition, in the fourteenth embodiment, the equipment locations of the driven magnets 6A to 6D and the equipment locations of the Japanese-shaped drive coils 751 to 754 may be replaced. In this case, the driven magnets 6A to 6D are provided on the stator side, and the Japanese-shaped drive coils 751 to 754 are provided on the mover side.

In addition, in the said embodiment, although the case where each driven magnet 6A-6D was comprised with the electromagnet was illustrated, you may comprise the driven magnet 6A-6D with a permanent magnet, respectively.

By using each of the driven magnets 6A to 6D as a permanent magnet, no electrical wiring around the driven magnets 6A to 6D is necessary and the space area at the equipment location of the driven magnets 6A to 6D is eliminated. It can be made small. Therefore, the whole apparatus can be reduced in size and weight, productivity and water retention can be improved, and the energization drive becomes unnecessary as compared with the case where the driven magnets 6A to 6D are electromagnets. Therefore, power consumption can be suppressed as a whole. Thereby, the running cost of the whole apparatus can be reduced significantly, and in the drive control of the electronic drive means 4, only the switching control of the energization direction of each of the plurality of drive coils 751 to 754 is performed. ) Can be driven in any direction. Therefore, a quick response in switching the moving direction of the movable table 1 becomes possible, and there is no occurrence of a disconnection accident or the like of the driven magnets 6A to 6D, so that the durability of the entire apparatus can be greatly improved. There is an advantage that can be.

{15th Embodiment}

Next, 15th Embodiment is described based on FIGS. 65-70.

This fifteenth embodiment is characterized in that other electronic driving means 146 (see FIG. 65) is provided in place of the electronic driving means 144 (see FIG. 54) in the thirteenth embodiment. .

Specifically, the electromagnetic drive means 146 in the present embodiment includes four rectangular drive coils of the electromagnetic drive means 144 in the thirteenth embodiment and the respective driven devices corresponding thereto. The coil has a structural feature in that it is arranged and equipped in the state which rotated 90 degrees for each rectangular drive coil. Thereby, it has an operation characteristic in the point which realized rotational drive on the same surface with respect to the movable table part 15 with movement to arbitrary directions, without mounting another rotational drive means newly.

Moreover, it has the characteristic that the operation control system 206 for efficiently driving this electronic drive means 146 was equipped instead of the operation control system 204 in 13th Embodiment.

This is described in detail below.

First, this fifteenth embodiment is similar to the case of the thirteenth embodiment, in which the movable table portion 15 for precision work and the movable table portion 15 for precision work are arranged to be movable in any direction on the same surface. The main body which supports the movable table part 15 while allowing movement, and which has the original position return function with respect to this movable table part 15, and the main body which supports this table support mechanism 2 The case main body 3 as a part and the electronic drive means 146 which are equipped in this case main body 3 side, and give a movable force to the movable table part 15 to a predetermined direction according to the instruction | command from the outside are provided. Equipped.

Here, the movable table part 15 is the movable table 1 for precision work, and the auxiliary table 5 integrally arrange | positioned in parallel with the movable table 1 at predetermined intervals, and on the same center axis | shaft. It is comprised by). And as shown in FIG. 65, the table support mechanism 2 is equipped in the auxiliary table 5 side, and is comprised so that the said movable table 1 may be supported through this auxiliary table 5.

(About the electronic drive means 146)

The electronic drive means 146 has its main part supported by the case main body 3 side, and gives a predetermined movement force (driving force) along the conveyance direction of the said movable table part 15 according to the instruction | command from the outside. Equipped with. The electromagnetic drive means 146 is arranged between the movable table 1 and the auxiliary table 5.

Specifically, the electromagnetic drive means 146 includes four rectangular drive coils 761, 762, 763, and 764 formed in a quadrangular shape, and the axial axis of each of the rectangular drive coils 761 to 764. And parallel coil sides 761a, 761b, 762a, 762b, 763a, 763b, 764a, and 764b (symbols are sequentially assigned in FIG. 65 in the counterclockwise direction) positioned parallel to the Y axis. Eight driven magnets 6A, 16A, 6B, 16B, 6C, 16C, 6D, and 16D provided on the auxiliary table 5 and the four rectangular drive coils 761 to 1, respectively. The fixing plate 8 which supports the 764 at a predetermined position is provided.

Each of the square drive coils 761 to 764 is parallel to and interposed with a Y-axis or Y-axis on the Y-Y surface assumed to be the origin of the central portions on two opposing sides of the fixed plate 8. They are arranged individually on the axis or on the Y axis.

In addition, each of the eight driven magnets 6A to 6D and 16A to 16D is constituted by an electromagnet capable of individually conduction control from the outside, and is parallel to the y-axis or the y-axis of the respective rectangular drive coils. Corresponding to the central regions of one of the coil sides 761a to 764a and the outer coil sides 761b to 764b, each is arranged separately.

As shown in FIG. 65, the fixing plate 8 is arranged on the movable table 1 side of the auxiliary table 5 and is supported by the case main body 3. Here, each of the rectangular drive coils 761 to 764 and the fixing plate 8 constitutes a stator portion which is a main part of the electronic driving means 146.

When each of the rectangular drive coils 761 to 764 is set to an operating state, the respective driven magnets 6A to 6D are formed between the driven magnets 6A to 6D and 16A to 16D. , 16A to 16D are generated by the repulsive drive in the direction orthogonal to the respective coil sides 761a to 764a and 761b to 764b. In this case, the center axis line of the movement direction of each of the driven magnets 6A to 6D and 16A to 16D is set to be orthogonal to the y-axis or the Y-axis.

Further, the movable table portion 15 may be transferred in a direction that is not orthogonal to each of the coil sides 761a to 764a and 761b to 764b (an oblique direction with respect to the respective coil sides 761a to 764a and 761b to 764b). In this case, as described later, the conveyance of the movable table portion 15 is controlled by the force of the electromagnetic driving force for each of the driven magnets with respect to the at least two rectangular drive coils 661, 762, 763, or 764. It is intended to be executed.

Each of the four driven magnets 6A, 6D, 16A to 16D constituting a part of the electromagnetic drive means 146 is a cross section of the magnetic pole (each driving coil 761 as shown in FIG. 66 in this embodiment). The opposing surfaces of the coil sides 761a to 764a and 761b to 764b of the ˜764 are used as electromagnets each having a quadrangular shape, and on the 중심부 -Y plane assumed on the upper surface of the auxiliary table 5 from the center. Arranged and fixed, respectively, on the y-axis or Y-axis of equidistant positions.

In the present embodiment, for example, a predetermined operating current is supplied to a part or all of the eight driven magnets 6A to 6D and 16A to 16D, and the respective driven magnets 6A to 6D and 16A to are supplied. 16D) is set to the movable state, and then or simultaneously, each of the rectangular drive coils 761 to 764 is set to the movable state in accordance with the predetermined control mode described later to start energization. The magnitude of the magnetic force of each of the driven magnets 6A to 6D and 16A to 16D including the respective driving coils 761 to 764 is adjusted by the energization control, whereby the movable table portion 15 ) Is conveyed in a predetermined direction.

In this case, the action of the electronic driving means 146 on the conveying direction to the movable table 15 and its conveying driving force (the driving coils 761 to 764 and the four driven magnets 6A to 6D and 16A to the respective ones). Energization drive for 16D) will be described in detail with reference to FIGS. 67 to 69.

In this case, in this fifteenth embodiment, since the energization directions of the eight driven magnets 6A to 6D and 16A to 16D serving as electromagnets are specified in advance as described later, eight rectangular drive coils 761 are provided. The inner and outer sides of the inner coil sides 761a to 764a and the outer side of the coil sides 761b to 764b, and the magnitude (including the energization stop control) of the electric current, are transferred to the movable table 1. The setting control is performed by the operation control system 206 corresponding to the direction. Thereby, with respect to the driven magnets 6A to 6D and 16A to 16D, the predetermined directions (directions orthogonal to the respective coil edges 661a to 764a and 761b to 764b) in accordance with the left-hand rule of the flaming. The electromagnetic force (reaction force) pressed against is output.

In addition, by selecting and combining the directions of the electromagnetic forces generated in the eight driven magnets 6A to 6D and 16A to 16D in advance, the combined force of the electron driving forces generated in the eight driven magnets 6A to 6D and 16A to 16D is determined. It becomes possible to match with the conveyance direction of the movable table part 15, and can move this movable table part 15 toward the arbitrary directions on a Y-plane.

A series of energization control methods for these eight driven magnets 6A to 6D and 16A to 16D will be described in detail in the description place (Figs. 68 to 70) of the program storage unit 226 described later.

Here, at the same height as the height (in the Y-axis direction) of each of the drive coils 761 to 764 on the outside and the inside on the same surface of the respective rectangular drive coils 761 to 764. Further, magnetic materials such as ferrite may be charged in a range including the operating ranges of the driven magnets 6A to 6D and 16A to 16D.

(About the operation control system 206)

Next, the operation control system 206 in this fifteenth embodiment will be described in detail.

In this fifteenth embodiment, the respective rectangular drive coils 761 to 764 and eight driven magnets 6A to 6D, 16A to 16D are individually energized and controlled to operate the movable table portion 15. An operation control system 206 for regulating the movement operation of the controller is provided in parallel with the electronic drive means 146 (see FIG. 67).

The operation control system 206 individually sets and holds the magnetic poles N and S of each of the driven magnets 6A to 6D and 16A to 16D equipped in correspondence with the respective rectangular drive coils 761 to 764. Magnetic field strength setting function for setting the magnetic field strength of each of the driven magnets 6A to 6D individually (which can be set by varying the current supply), and the respective rectangular drive coils The energization direction of the coil edges 761a, 761b, 762a, 762b, 763a, 763b, 764a, and 764b parallel to the y-axis or Y-axis of (761 to 764) is external to a predetermined direction (one or the other). It has an energization direction setting function to be set and held in accordance with the command in the present invention, and a drive coil energization control function that variably sets the magnitude of the energization current to each of the rectangular drive coils 761 to 764. The movable table portion 15 while adjusting It is equipped with a table for operation control function for adjusting the feed direction and feed force.

And in order to perform the said function, this operation | movement control system 206, as shown in FIG. 66, each rectangular drive coil 761-764 of each of the said electronic drive means 146, and eight each dodgeball Table drive control means 216 for driving the copper magnets 6A to 6D and 16A to 16D individually according to a predetermined control mode to move and control the movable table 15 in a predetermined direction, and this table drive control A plurality of control modes (10 control modes of F1 to F10 in this embodiment) provided in parallel with the means 216 and specifying a moving direction, a rotating direction, an operation amount of the movable table 1, and the like. And a program storage section 226 which stores a control program of the control program, and a data storage section 23 which stores predetermined data or the like used in the execution of each of these control programs.

The table drive control means 216 also commands an operation command for commanding predetermined control operations for the respective rectangular drive coils 761 to 764 and the eight driven magnets 6A to 6D and 16A to 16D. The input units 24 are provided in parallel. In addition, the position information during and after the movement of the movable table 1 is detected by the position information detection means 25 and arithmeticly processed and sent to the table drive control means 216.

The various control functions of the operation control system 206 are collectively included in the plurality of control modes F1 to F10 of the program storage unit 226, and are input through the operation command input unit 24. The operation is performed and executed based on any one of the control modes F1 to F10 selected by the command from the operator.

This is explained in more detail.

The table drive control means 216 according to the present embodiment operates on the basis of the command from the operation command input unit 24 to select a predetermined control mode from the program storage unit 226, and the respective rectangular drive coils ( 761 to 764 and eight driven magnets 6A to 6D, and 16A to 16D, the main control unit 216A for energizing and controlling a predetermined DC current including zero, and the main control unit 216A. Selection of coils for driving control of each of the rectangular drive coils 761 to 764 and the eight driven magnets 6A to 6D, 16A to 16D simultaneously or separately according to the predetermined control mode F1 to F10. The drive control unit 216B is provided.

In addition, the main control unit 216A calculates the position of the movable table 1 based on the input information from the positional information detecting means 25 for detecting the table position or performs other various operations. At the same time has a combination. Here, reference numeral 4G denotes a power supply for supplying a predetermined current to each of the rectangular drive coils 761 to 764 and the four driven magnets 6A to 6D and 16A to 16D of the electronic driving means 146. The circuit part is shown.

[Program Storage Unit 226]

The table drive control means 216 is configured to drive each of the electronic drive means 146 in accordance with a predetermined current control control program (a program for executing a predetermined current control mode) stored in the program storage unit 226 in advance. The rectangular drive coils 761 to 764 and the eight driven magnets 6A to 6D and 16A to 16D have predetermined relations and are configured to individually drive control.

That is, in the program storage unit 226 according to the present embodiment, the energization directions of the eight driven magnets (electromagnets) 6A to 6D and 16A to 16D are individually specified, and the N pole or the S pole of the magnetic pole is individually specified. And a plurality of magnet control programs for individually varying the magnitude of the energized current including the energization stop, and the energization of these eight driven magnets (electromagnets) 6A to 6D and 16A to 16D. Functions when the direction is specified and the N pole or the S pole (or energization stop) of the magnetic pole is set, and correspondingly, the energization direction and the magnitude of the energization current for each of the four rectangular drive coils 761 to 764 correspondingly. Is stored in the control program for the drive coil.

At the same time, the operation timing of each of these control programs is collectively stored in ten sets of control modes F1 to F10 (see Figs. 68 to 70).

Here, this set of control modes F1 to F10 will be described based on FIGS. 68 to 70.

In Fig. 68, an example of the control modes F1 to F4 in the case of transferring the movable table portion 15 toward the positive or negative direction of the Y-axis and toward the positive or negative direction of the Y-axis, respectively, is shown. ).

In FIG. 68, in each control mode F1-F4, it sets so that the electricity supply direction of DC current to each rectangular drive coil 761-764 may be individually controlled. In addition, the energization direction of each of the eight driven magnets (electromagnets) is set and controlled so that the N pole or the S pole of each magnetic pole does not always change (in a fixed state) even if the control modes are different.

That is, in this fifteenth embodiment, the magnetic poles of the end faces of the eight driven magnets 6A to 6D and 16A to 16D facing the rectangular drive coils 761 and 762 are driven. 6D), it is set as the N pole, and in the driven magnets 16A to 16D, the S pole is set. In this fifteenth embodiment, N and S of each set magnetic pole are controlled in a fixed state even if the control modes F1 to F4 are different.

(Control mode F1)

This control mode F1 shows an example of the electricity supply control mode for conveying the movable table 1 to the positive direction of a Y-axis (refer FIG. 68).

In this control mode F1, the respective rectangular drive coils 762, 764 on the Y axis and the respective driven magnets 6B, 16B, 6D, 16D corresponding thereto are energized and controlled, respectively, on the y-axis. The rectangular drive coils 761 and 763 and the driven magnets 6A, 16A, 6C, and 16C corresponding thereto are controlled to stop energizing.

Here, the driven magnets 6B and 6D corresponding to the rectangular drive coils 762 and 764 on the Y axis have cross-sectional portions of the driven magnets 6B and 6D facing the respective coil sides 762a and 764a. The end portions of the driven magnets 16B, 16D that are fixed to the N pole and face the coil sides 762b and 764b are fixed to the S pole.

The energization direction of each of the rectangular drive coils 762 and 764 on the Y axis is clockwise (right) with respect to the rectangular drive coil 762 and counterclockwise with respect to the rectangular drive coil 764. It is set in the direction (left turn), respectively.

For this reason, in each coil side 762a, 762b, 764a, 764b part of each rectangular drive coil 762, 764, predetermined electromagnetic drive force generate | occur | produces in the direction shown by the dotted arrow, and simultaneously the reaction force [ This occurs because the rectangular drive coils 762 and 764 are fixed.] The driven magnets 6B, 16B, 6D, and 16D are driven repulsively in the direction indicated by the solid arrow (in the figure, to the right).

And based on the balance of the electromagnetic drive force which arises in these four driven magnets 6B, 16B, 6D, and 16D, the said movable table part 15 is smoothly conveyed in the positive direction on a Y-axis.

(Control mode F2)

This control mode F2 shows an example of the electricity supply control mode for conveying the movable table 1 to the negative direction of a w-axis (refer FIG. 68).

In this control mode F2, the energization direction of each coil side 762a, 762b, 764a, 764b part of the square drive coils 762, 764 on a Y-axis is compared with the case of the said control mode F1. On the contrary, one point is different. Others are the same as in the case of the control mode F1.

For this reason, in each coil side 762a, 762b, 764a, 764b of the drive coils 762, 764, the electromagnetic drive force (arrow of dashed line) of a reverse direction is carried out on the principle similar to the case of the said mode F1. Generated, and the driven magnets 6B, 16B, 6D, and 16D are driven back in the direction indicated by the solid arrows, respectively, in the left direction, thereby moving the movable table portion 15 to the left. Conveyed in the negative direction on the axis.

(Control mode F3)

This control mode F3 shows an example of the electricity supply control mode for conveying the movable table 3 to the positive direction of a Y-axis (refer FIG. 68).

In this control mode F3, the respective rectangular drive coils 761 and 763 on the y-axis and the respective driven magnets 6A, 16A and 6C and 16C corresponding thereto are energized and controlled, respectively. The rectangular drive coils 762 and 764 and the driven magnets 6B, 16B and 6D, 16D corresponding thereto are controlled to stop energizing.

Here, among the driven magnets 6A and 16A corresponding to the rectangular drive coil 761 on the X-axis, the end face of the driven magnet 6A opposite to the coil side 761a is fixedly controlled to the N pole, A cross section of the driven magnet 16A opposite to the coil side 761b is fixedly controlled to the S pole.

Similarly, among the driven magnets 6C and 16C corresponding to the square-shaped drive coil 763 on the y-axis, the end face of the driven magnet 6C facing the coil side 763a is fixedly controlled to the N pole, The cross section of the driven magnet 16C that faces the coil side 763b is fixedly controlled to the S pole.

Further, the energization direction of each of the rectangular drive coils 761 and 763 on the X axis is clockwise (left turn) with respect to the rectangular drive coil 761 and clockwise with respect to the rectangular drive coil 763. It is set in the direction (right turn), respectively.

For this reason, in each of the coil sides 761a, 761b, 763a, and 763b of the rectangular drive coils 761 and 763, a predetermined electromagnetic driving force is generated in the direction indicated by the dotted line arrow, and at the same time, the reaction force [square shape This occurs because the drive coils 761 and 763 are fixed.] The driven magnets 6A, 16A, 6C, and 16C are driven back in the direction indicated by the solid arrow (upper direction in the figure). On the basis of the balance of the electromagnetic driving force generated in the driven magnets 6A, 16A, 6C, and 16C, the movable table portion 15 is transferred in the positive direction on the Y axis.

(Control mode F4)

This control mode F4 shows an example of the electricity supply control mode for conveying the movable table 1 to the negative direction of a Y-axis (refer FIG. 68).

In this control mode F4, the energization direction of each coil side 761a, 761b, 763a, 763b part of the square drive coils 761, 763 on the X axis is compared with the case of the said control mode F3. On the contrary, one point is different. The others are the same as in the case of the control mode F3.

For this reason, in each coil side 761a, 761b, 763a, and 763b of the drive coils 761 and 763, the electromagnetic driving force (dotted line) in the reverse direction (opposite direction) on the same principle as in the case of the mode F3. Arrow) is generated and the driven magnets 6A, 16A, 6C, and 16C are repulsively driven in the directions indicated by the solid arrows, respectively, in the left direction in the drawing. 15) is conveyed in the negative direction on the y-axis.

Subsequently, in FIG. 69, an example of each control mode F5 to F8 in the case of conveying the movable table 15 in the direction of each of the four upper limits on the X-Y plane coordinate is illustrated. ).

In each of the control modes F5 to F8 in FIG. 69, the current flow direction of the DC current to each of the rectangular drive coils 761 to 764 is determined in the same manner as in the respective control modes F1 to F4. It is controlled so as to be individually variable set, and as for the energization directions of the eight driven magnets (electromagnets), as in the case of the respective control modes F1 to F4, the N pole or the S pole of each magnetic pole is controlled. The setting is controlled so as not to change (in a fixed state) at all times even if the modes are different.

(Control mode F5)

This control mode F5 shows an example of the electricity supply control mode for conveying the movable table 1 toward the 1st upper limit direction on a Y-Y plane coordinate (refer FIG. 69).

In this control mode F5, each of the eight driven magnets 6A to 6D and 16A to 16D is set in a state capable of energizing control at the same time, and the energization direction (setting of magnetic poles N and S) is respectively described above. Is fixed in the same manner as in the control modes F1 to F4.

That is, each of the driven magnets 6A to 6D equipped in correspondence with the coil sides 761a to 764a of the respective rectangular drive coils 761 to 764 located on the y-axis and on the Y-axis is respectively The cross-sectional portions facing the coil sides 761a to 764a of are respectively set to the N poles. In addition, each of the driven magnets 16A to 16D provided corresponding to the coil sides 761b to 764b of the respective rectangular drive coils 761 to 764 located on the Y axis and the Y axis is respectively The cross-sectional portions facing the coil sides 761b to 764b of are set to the S poles, respectively.

In each of the coil sides 761a, 761b, 762a, 762b, 763a, 763b, 764a, and 764b of the rectangular drive coils 761 to 764, energization is performed such that the control modes F1 and F3 operate simultaneously. Control is made. For this reason, the electromagnetic driving force in the same direction (the positive direction of the y-axis and the positive direction of the y-axis) in the same manner as in the case of the control modes F1 and F3 is generated at the same time, and the combined force is shown in the column of the control mode F5 of FIG. The direction of the upper limit is directed. Thereby, the said movable table part 15 is conveyed toward the 1st upper limit direction on a Y-Y plane coordinate.

Here, the transfer angle θ (angle θ with the y-axis) in the first upper limit direction with respect to the y-axis is represented by respective rectangular drive coils 661 to 764 and respective driven magnets 6A to 6D and 16A to 16D. By individually controlling the magnitude of the conduction current of the power supply, the electromagnetic driving force acting on each of the driven magnets 6A to 6D is changed, whereby it can be freely set in any direction.                 

(Control mode F6)

This control mode F6 shows an example of the electricity supply control mode for conveying the movable table 1 toward the 3rd upper limit direction (direction opposite to the direction of a 1st upper limit) on a Y-Y plane coordinate ( See FIG. 69).

In this control mode F6, eight driven magnets 6A-6D, 16A-16D are set to the state which can carry out electricity control simultaneously, The magnetic poles N, S are each said control modes F1-F5. Is set in the same way as

For this reason, in each coil side 761a, 761b, 762a, 762b, 763a, 763b, 764a, 764b of each square drive coil 761-764, the said control mode F2 and F4 operated simultaneously. The same energization control is achieved. For this reason, the electromagnetic driving force in the same direction (the left direction and the downward direction in FIG. 68) in the same manner as in the case of the control modes F2 and F4 is generated at the same time, and the combined force is shown in the column of the control mode F6 in FIG. Likewise, the third upper limit is directed. Thereby, the said movable table part 15 is conveyed toward the 3rd upper limit direction on a Y-Y plane coordinate.

Here, the transfer angle θ in the third upper limit direction with respect to the y-axis represents the magnitudes of the energizing currents of the respective rectangular drive coils 761 to 764 and the driven magnets 6A to 6D and 16A to 16D, respectively. By variable control in this manner, the electromagnetic driving force acting on each of the driven magnets 6A to 6D and 16A to 16D can be changed, whereby it can be freely set in any direction.

(Control mode F7)                 

This control mode F7 shows an example of the electricity supply control mode for conveying the movable table 1 toward the 2nd upper limit direction on a Y-Y plane coordinate (refer FIG. 69).

In this control mode F7, the eight driven magnets 6A to 6D and 16A to 16D are energized and controlled at the same time, and the magnetic poles N and S are the same as those of the respective control modes F1 to F6. Likewise fixed.

In the case of this control mode F7, in each coil side 761a, 761b, 762a, 762b, 763a, 763b, 764a, 764b of each rectangular drive coil 761-764, the said control mode F2 and The same energization control as the F3 works simultaneously. For this reason, the electromagnetic driving force in the same direction (the left direction and the upper direction in FIG. 68) as in the case of the control modes F2 and F3 is generated at the same time, and the combined force is shown in the column of the control mode F7 in FIG. Likewise, the direction of the second upper limit is oriented. Thereby, the said movable table part 15 is conveyed toward the 2nd upper limit direction on a Y-Y plane coordinate.

Here, the transfer angle θ in the second upper limit direction with respect to the y-axis represents the magnitudes of the energizing currents of the respective rectangular drive coils 661 to 764 and the driven magnets 6A to 6D and 16A to 16D, respectively. By variable control in this manner, the electromagnetic driving force acting on each of the driven magnets 6A to 6D and 16A to 16D can be changed, whereby it can be freely set in any direction.

(Control mode F8)

This control mode F8 shows an example of the electricity supply control mode for conveying the said movable table part 15 toward the 4th upper limit direction (direction opposite to the direction of a 2nd upper limit) on a Y-Y plane coordinate. (See FIG. 69).

In this control mode F8, the eight driven magnets 6A to 6D and 16A to 16D are simultaneously energized and controlled, and the magnetic poles N and S are the same as those of the respective control modes F1 to F7. Likewise fixed.

In the case of this control mode F8, in each coil side 761a, 761b, 762a, 762b, 763a, 763b, 764a, 764b of each rectangular drive coil 761-764, the said control mode F1 and The same energization control as the F4 works simultaneously. For this reason, the electromagnetic driving force in the same direction (the right direction and the downward direction in FIG. 68) as in the case of the control modes F1 and F4 is generated at the same time, and the combined force is shown in the column of the control mode F8 in FIG. Likewise, the fourth upper limit is directed. Thereby, the said movable table part 15 is conveyed toward the 4th upper limit direction on a Y-Y plane coordinate.

Here, the transfer angle θ in the fourth upper limit direction with respect to the y-axis represents the magnitudes of the energizing currents of the respective rectangular drive coils 661 to 764 and the driven magnets 6A to 6D and 16A to 16D, respectively. By variable control in this manner, the electromagnetic driving force acting on each of the driven magnets 6A to 6D and 16A to 16D can be changed, whereby it can be freely set in any direction.

(Control mode F9)

This control mode F9 enables the movable table 15 to be rotated at a predetermined angle in the counterclockwise direction on the X-Y plane, and shows an example of the energization control mode therefor (see FIG. 70). ).                 

In this control mode F9, the rectangular drive coils 761 to 764 and the eight driven magnets 6A to 6D and 16A to 16D are simultaneously energized and controlled.

In this case, the magnetic poles N and S of the driven magnets 6A to 6D are set in the same manner as in the case of F1 to F8.

In addition, about each rectangular drive coil 761-764, with respect to each of 8 corresponding driven magnets 6A-6D, 16A-16D, it centered on the origin (0 point) on a Y-Y plane. The energization control is performed so as to output a predetermined electromagnetic driving force so that a predetermined moment at the same level is generated in the counterclockwise direction, respectively.

In this case, the energization direction for each of the rectangular drive coils 761 to 764 is set and controlled in the counterclockwise direction (left turn) in this control mode F9.

In FIG. 70, the predetermined rotational moment of the same level which generate | occur | produces on the Y-axis and Y-axis of each driven magnet 6A-6D, 16A-16D, respectively, is shown by a solid line. As a result, the movable table portion 15 supporting the driven magnets 6A to 6D and 16A to 16D is counterclockwise through the driven magnets 6A to 6D and 16A to 16D within a predetermined range. Will be driven to rotate.

That is, in each of the coil sides 761a, 761b, 762a, 762b, 763a, 763b, 764a, and 764b of the rectangular drive coils 761 to 764, a predetermined electronic driving force indicated by a dotted arrow is generated and simultaneously. The reaction force (which occurs because the driving coils 761 to 764 are fixed to the fixing plate 8), and the direction in which each of the driven magnets 6A to 6D and 16A to 16D are indicated by solid arrows (in the drawing, The movable table is driven counterclockwise, based on the balance of the respective electromagnetic driving forces (predetermined rotational moment of the same level) generated in these eight driven magnets 6A to 6D and 16A to 16D. The part 15 is rotationally driven counterclockwise on the X-Y plane (within a predetermined range).

(Control mode F1O)

This control mode F10 enables the movable table 15 to be rotated at a predetermined angle clockwise on the X-Y plane, and shows an example of the energization control mode therefor (see Fig. 70). .

In this control mode F10, the rectangular drive coils 761 to 764 and eight driven magnets 6A to 6D and 16A to 16D are simultaneously energized and controlled. In this case, the control currents in the opposite directions to the respective rectangular drive coils 761 to 764 are energized (see the column of the control mode F10 in FIG. 70). .

In this case, magnetic poles N and S of the driven magnets 6A to 6D are set in the same manner as in the case of F1 to F9. In addition, for each of the rectangular drive coils 761 to 764, with respect to each of the eight driven magnets 6A to 6D and 16A to 16D, the origin (0 point) on the X-Y plane is centered. The energization is controlled in a direction opposite to the case of the control mode F9 so that a predetermined moment (rotational driving force) at the same level is generated in the clockwise direction, respectively, thereby setting a predetermined electronic driving force. .

This is shown in FIG. In the figure, the predetermined rotational moment of the same level is shown by the solid line. As a result, the movable table portion 15 supporting the driven magnets 6A to 6D and 16A to 16D is clockwise (within the predetermined range through the driven magnets 6A to 6D and 16A to 16D). Right turn) is driven to rotate.

Other configurations, operations, functions, and the like are almost the same as those in the thirteenth embodiment.

Even in this case, the same effects as those in the thirteenth embodiment can be obtained. In addition, in this fifteenth embodiment, each of the electromagnetic driving forces output by the electromagnetic driving means with respect to the Y-axis or the Y-axis. Since it can output in the direction orthogonal to the direction of rotation, there is an advantage that the rotational drive within a predetermined angle with respect to the movable table 15 can be performed without additionally equipped with a rotation drive means. Its generalization can be further enhanced.

In the fifteenth embodiment, in the setting of the transfer direction of the movable table 15, the case where the drive control of the electronic drive means 146 is divided into the respective control modes of F1 to F10 has been exemplified. For example, in the control mode F2, the energization directions of the driven magnets 6A to 6D and 16A to 16D are set in the opposite directions to those in the control mode F1, and the energization direction of the drive coils 761 and 763 is set to the control mode F1. As long as the function is the same as in the case of, the electronic drive means 146 may be controlled to be driven by another control method.

In this fifteenth embodiment, the equipment locations of the driven magnets 6A to 6D and 16A to 16D and the equipment locations of the rectangular drive coils 761 to 764 may be replaced. In this case, the driven magnets 6A to 6D and 16A to 16D are provided on the stator side, and the square drive coils 761 to 764 are equipped on the mover side.                 

In addition, in this fifteenth embodiment, the case where the driven magnets 6A to 6D and 16A to 16D are constituted by electromagnets is illustrated, but may be configured as permanent magnets.

By using the driven magnets 6A to 6D and 16A to 16D as permanent magnets, the electrical wiring around the driven magnets 6A to 6D and 16A to 16D is not necessary at all, and the driven magnets 6A to 6D. The space area of the equipment location of 6D and 16A-16D can be made small. As a result, the weight of the entire apparatus can be reduced, the productivity and maintenance can be improved, and the energization drive is unnecessary as compared with the case where the driven magnets 6A to 6D are electromagnets. Therefore, power consumption can be suppressed as a whole. Thereby, the running cost of the whole apparatus can be reduced significantly, and in the drive control of the electronic drive means 4, only a switching control of the electricity supply direction of each of the rectangular drive coils 761-764 is movable table. (1) can be conveyed and driven in any direction. Therefore, a quick response in switching the moving direction of the movable table 1 becomes possible, and there is no occurrence of a disconnection accident or the like of the driven magnets 6A to 6D and 16A to 16D. There is an advantage that it can greatly improve.

{16th Embodiment}

Next, 16th Embodiment is described based on FIGS. 71-76.

This sixteenth embodiment is characterized in that other electronic driving means 147 (see FIGS. 71 and 72) is provided in place of the electronic driving means 146 (see FIG. 66) in the fifteenth embodiment. Have

Specifically, the electromagnetic drive means 147 in this sixteenth embodiment is formed in a cross-shaped frame shape instead of the four rectangular drive coils of the electron drive means 146 in the fifteenth embodiment. The cross-shaped drive coil 771 is equipped with a structural feature, thereby enabling rotational driving on the same plane with respect to the movable table 15 with movement in any direction. Has operational characteristics.

In addition, an operation control system 207 for efficiently driving the electronic drive means 147 is provided in place of the operation control system 206 in the fifteenth embodiment to enable rotational drive on the same surface. It is characterized by one point.

This is described in detail below.

First, this sixteenth embodiment is similar to the case of the fifteenth embodiment described above, in which the movable table portion 15 for precision work and the movable table portion 15 for precision work are arranged to be movable in an arbitrary direction on the same surface. A table support mechanism (2) which supports the movable table portion (15) while allowing movement, and has a home position return function with respect to the movable table portion (15), and a main body portion that supports the table support mechanism (2). It is provided with the case main body 3 as this, and the electronic drive means which is provided in the case main body 3 side, and provides the movable table part 15 with the movement force to a predetermined direction according to the instruction | command from the outside.

Here, the movable table part 15 is the movable table 1 for precision work, and the auxiliary table 5 integrally arrange | positioned in parallel with the movable table 1 at predetermined intervals, and on the same center axis | shaft. It is comprised by). As shown in FIG. 71, the table support mechanism 2 is provided on the side of the auxiliary table 5, and is configured to support the movable table 1 via the auxiliary table 5.

(About the electronic drive means 147)

The electronic drive means 147 has its main part supported by the case main body 3 side, and gives a predetermined movement force (driving force) along the conveyance direction of the said movable table part 15 according to the instruction | command from the outside. Equipped with. The electromagnetic drive means 147 is arranged between the movable table 1 and the auxiliary table 5.

Specifically, the electromagnetic drive means 147 is a cross-shaped drive coil 771 formed in a cross-shaped frame shape and parallel to the X-axis and Y-axis of the cross-shaped drive coil 771. Coil sides 771a, 771b, 771c, 771d, 771e, 771f, 771g, and 771h (symbols are arranged in correspondence with each other in the counterclockwise direction sequentially in Fig. 72) are arranged on the auxiliary table 5, respectively. Each of the eight driven magnets 6A, 16A, 6B, 16B, 6C, 16C, 6D, and 16D equipped with the fixed plate 8 for supporting the cross drive coil 771 at a predetermined position is provided. Equipped.

The cross-shaped drive coil 771 is arranged at the origin on the Ⅹ-Y plane whose center point is assumed to be the origin of the center portion on the fixing plate 8, and has two opposite sides protruding in four directions. Each axis on the Y surface is sandwiched and arranged in parallel with the axis along the y axis and the Y axis.

In addition, each of the eight driven magnets 6A to 6D and 16A to 16D is constituted by an electromagnet capable of individually conduction control from the outside, and each coil side 771a of the cross-shaped driving coil 771 is provided. Corresponding to ~ 771h), they are arranged separately (refer to FIGS. 71 to 72).

As shown in FIG. 71, the fixing plate 8 is arranged on the movable table 1 side of the auxiliary table 5 and is supported by the case main body 3. The cross drive coil 771 and the fixing plate 8 constitute a stator portion which is a main part of the electronic drive means 147.

When the cross-shaped drive coil 771 is set to the movable state, the driven magnets 6A to 6D and 16A to the driven magnets 6A to 6D and 16A to 16D are respectively set. The electromagnetic driving force for repulsively driving 16D in the direction orthogonal to the respective coil sides 771a to 771h is generated. In this case, the center axis line of the movement direction of each of the driven magnets 6A to 6D and 16A to 16D is set to be orthogonal to the y-axis or the Y-axis.

In addition, when conveying the said movable table part 15 to the direction which is not orthogonal to each coil side 771a-771h (an oblique direction with respect to each coil side 771a-771h), as mentioned later, The transfer of the movable table section 15 is carried out with the force of the electromagnetic driving force generated in each of the at least two driven magnets 6A to 6D and 16A to 16D in different locations arranged along the y-axis and the y-axis, respectively. It is supposed to be.

Each of the eight driven magnets 6A to 6D and 16A to 16D constituting a part of the electron drive means 147 is a cross section of the magnetic pole (coil sides 771a in each embodiment) as shown in FIG. 72 in this embodiment. The opposing surface of ˜771h), and an electromagnet having a quadrangular shape is used, and on the Ⅹ-Y plane assumed on the upper surface of the auxiliary table 5, on each coil side 771a to 771h located equidistant from the center. Are arranged in each.                 

In the present embodiment, for example, predetermined driving currents are energized by some or all of the eight driven magnets 6A to 6D and 16A to 16D, and the respective driven magnets 6A to 6D and 16A to. 16D) is set to the movable state, and then or simultaneously, the cross-shaped drive coil 771 is set to the movable state in accordance with a predetermined control mode to be described later to start energization. Then, the magnitude of the energizing current to the cross-shaped driving coil 771 and the magnetic force of each of the driven magnets 6A to 6D and 16A to 16D are adjusted by energization control, whereby the movable table portion ( 15) is conveyed in a predetermined direction.

In this case, the action of the electromagnetic drive means 147 on the conveying direction to the movable table portion 15 and its conveying driving force [cross-shaped driving coil 771 and each of the four driven magnets 6A to 6D and 16A. Energization drive for ˜16D) will be described in detail with reference to FIGS. 74 to 76.

In the sixteenth embodiment, since the energization directions of the eight driven magnets 6A to 6D and 16A to 16D, which are formed as electromagnets, are variably controlled in the same manner as in the case of the first embodiment, a cross-shaped drive coil The magnitude of the energization direction and energization current (of each coil side 771a to 771h portion) of the 771 is respectively determined by the operation control system 207 which will be described later in correspondence with the transfer direction of the movable table portion 15. The setting is controlled according to the contents of the control mode.

Thereby, with respect to the driven magnets 6A to 6D and 16A to 16D, the electromagnetic force pressed in a predetermined direction (the direction orthogonal to the respective coil edges 771a to 771h) in accordance with Fleming's left-hand rule ( Reaction force) is output.                 

In addition, by selecting and combining the directions of the electromagnetic forces generated in the eight driven magnets 6A to 6D and 16A to 16D in advance, the combined force of the electron driving forces generated in the eight driven magnets 6A to 6D and 16A to 16D is determined. It becomes possible to match with the conveyance direction (including rotation) of the movable table part 15, and can move this movable table part 15 toward arbitrary directions on a X-Y plane.

The method of conducting a series of energization controls for these eight driven magnets 6A to 6D and 16A to 16D will be described in detail in the description point (Figs. 74 to 76) of the program storage unit 227 described later.

Here, on the outer side and the inner side of the coil portion on the same side of the cross-shaped drive coil 771, at least the same height as the height of the cross-shaped drive coil 771 (the height on the fixed plate 8 surface). In addition, the magnetic material such as ferrite may be charged in the range including the operating ranges of the driven magnets 6A to 6D and 16A to 16D.

(About the operation control system 207)

Next, the operation control system 207 in this sixteenth embodiment will be described in detail.

In the sixteenth embodiment, the electromagnetic drive means 147 conducts energization control of the cross-shaped drive coil 771 and the eight driven magnets 6A to 6D and 16A to 16D individually to perform the above operation. An operation control system 207 for restricting the movement of the movable table 15 is provided in parallel (see FIG. 73).

The operation control system 207 has an energization direction setting function for setting and holding the energization direction with respect to the cross-shaped drive coil 771 in a predetermined direction (one or the other), and the cross-shaped drive coil 771. A drive coil energization control function for varying the magnitude of the energization current of the power supply) and the magnetic force of each of the driven magnets 6A to 6D and 16A to 16D by operating along the energization direction to the cross-shaped drive coil 771. The magnetic field strength setting function for setting and holding N and S individually, and the magnetic force strength of each of the driven magnets 6A to 6D and 16A to 16D are individually set in accordance with an external command (variable conduction current). Magnetic field strength setting function, and a table motion control function for adjusting the feed direction and the feed force to the movable table 15 while adjusting the operation of each of these functions. .

And in order to perform the said function, this operation control system 207 has the cross-shaped drive coil 771 of the said electronic drive means 147, and eight each driven magnet (as shown in FIG. 73). Table drive control means 217 for driving 6A to 6D and 16A to 16D individually according to a predetermined control mode to move the movable table 15 in a predetermined direction, and this table drive control means 217. ), A plurality of energization control programs relating to a plurality of energization control modes (in this embodiment, 10 energization control modes of K1 to K10) which are installed in parallel and specify the moving direction of the movable table 1, the operation amount thereof, and the like, A stored program storage unit 227 and a data storage unit 23 storing predetermined data and the like used in the execution of the respective control programs are provided.

The table drive control means 217 also includes an operation command input unit 24 for instructing a predetermined control operation for the cross-shaped drive coil 771 and the eight driven magnets 6A to 6D and 16A to 16D. ) Are installed in parallel. In addition, the table drive control means 217 detects the position information during and after the movement of the movable table 1 by the position information detection means 25, and calculates and sends it to the table drive control means 217.

The various control functions of the operation control system 207 are collectively included in the plurality of control modes K1 to K10 of the program storage unit 227, and are input from the operation command input unit 24. It operates and runs based on any one of the control modes K1 to K10 selected based on the command from the operator.

This is explained in more detail.

In this embodiment, the table drive control means 217 operates on the basis of the command from the operation command input unit 24, selects a predetermined control mode from the program storage unit 227, and selects the cross-shaped drive coil ( 771 and the main control unit 217A for energizing and controlling a predetermined DC current including zero in the eight driven magnets 6A to 6D and 16A to 16D, and the main control unit 217A is selectively set and predetermined. Coil selection drive control unit for simultaneously or separately driving control of the cross-shaped driving coil 771 and the eight driven magnets 6A to 6D, 16A to 16D in accordance with the control mode (one of K1 to K10). 217B is provided.

In addition, the main control unit 217A calculates the position of the movable table 1 based on the input information from the position information detecting means 25 for detecting the table position or performs other various operations. At the same time has a combination. Herein, reference numeral 4G denotes a power supply circuit portion which conducts a predetermined current to the cross-shaped driving coil 771 of the electromagnetic driving means 147 and the four driven magnets 6A to 6D and 16A to 16D. .

[Program Memory 227]

The table drive control means 217 drives the cross shape of the electronic drive means 147 according to a predetermined control program (program for executing a predetermined control mode) stored in the program storage unit 227 in advance. The coil 771 and each of the eight driven magnets 6A to 6D and 16A to 16D have predetermined relations and are configured to individually drive control.

That is, in the program storage unit 227 according to the present embodiment, the energization directions of the eight driven magnets (electromagnets) 6A to 6D, 16A to 16D are individually specified, and the N pole or the S pole of the magnetic pole is individually specified. And a plurality of magnet drive control programs for individually varying the magnitude of the energized current including energization stop and the eight driven magnets (electromagnets) 6A to 6D and 16A to 16D. It functions when the energization direction is specified and the N pole or the S pole (or energization stop) of the magnetic pole is set, and correspondingly, the variable direction of the energization direction and the magnitude of the energization current for the cross-shaped drive coil 771 are set. The energization control program for the drive coil is stored. At the same time, the operation timing of each of these control programs is collectively stored in ten sets of control modes K1 to K10 (see Figs. 74 to 76).

Here, these 10 sets of control modes K1 to K10 will be described based on FIGS. 73 to 75.

Fig. 74 shows an example of the control modes K1 to K4 in the case of transferring the movable table 15, respectively, in the positive or negative direction of the Y-axis and in the positive or negative direction of the Y axis. ).

In FIG. 74, in each control mode K1 to K4 in the present embodiment, the energization direction of the DC current with respect to the cross-shaped drive coil 771 is fixed to clockwise rotation (rightward rotation). As for the energization direction of each of the eight driven magnets (electromagnets), the magnetic poles (S pole or N pole) are individually variablely set by the control mode.

(Control mode K1)

This control mode K1 shows an example of the electricity supply control mode for conveying the movable table 1 to the positive direction of a Y-axis (refer FIG. 74).

In the control mode K1 in the seventh embodiment, the driven magnets 6B, 16B, 6D, and 16D for each of the coil sides 771c, 771d, 771g, and 771h located along the Y axis are controlled to conduct electricity. Then, each of the driven magnets 6A, 16A, 6C, and 16C for each of the coil sides 771a, 771b, 771e, and 771f located along the X axis is configured to perform energization stop control.

Here, in the driven magnets 6B and 16B arranged along the Y axis, the cross-sections facing the respective coil sides 771c and 771d are controlled to be set to the N pole and the S pole, respectively. Further, in the other driven magnets 6D and 16D arranged along the Y axis, the cross-sections facing the respective coil sides 771g and 771h are set and controlled by the S pole and the N pole, respectively.

For this reason, in each of the coil side 771c, 771d, 771g, and 771h of the cross drive coil 771, a predetermined electromagnetic driving force is generated in the direction indicated by the dotted arrow, and at the same time the reaction force [cross shape This occurs because the drive coil 771 is fixed.] The driven magnets 6B, 16B, 6D, and 16D are driven repulsively in the direction indicated by the solid arrow (in the figure, to the right). On the basis of the balance of the electromagnetic driving force generated in the magnets 6B, 16B, 6D, and 16D, the movable table portion 15 is conveyed in the positive direction on the X axis.

(Control mode K2)

This control mode K2 shows an example of the electricity supply control mode for conveying the movable table 1 to the negative direction of a w-axis (refer FIG. 74).

In this control mode K2, the difference is that the setting of the magnetic poles of the driven magnets 6B, 16B, 6D, 16D located in the direction along the Y axis is opposite to that in the control mode K1. Others are the same as in the case of the control mode K1.

For this reason, in each of the coil side 771c, 771d, 771g, and 771h of the cross-shaped drive coil 771, the electromagnetic driving force (dotted arrow) in the opposite direction on the same principle as in the case of the mode K1. Is generated and the driven magnets 6B, 16B, 6D, and 16D are repulsively driven in the directions indicated by the solid arrows, respectively, in the left direction in response to the reaction force. It is conveyed in the negative direction on the X axis.

(Control mode K3)

This control mode K3 shows an example of the electricity supply control mode for conveying the movable table part 15 to the positive direction of a Y-axis (refer FIG. 74).

In this control mode K3, the driven magnets 6A, 16A, 6C, and 16C for each of the coil sides 771a, 771b, 771e, and 771f located in the direction along the X axis are energized and controlled along the Y axis. Each of the driven magnets 6B, 16B, 6D, and 16D for each of the coil sides 771c, 771d, 771g, and 771b positioned in the direction is configured to perform energization stop control.

Here, in the driven magnets 6A and 16A arranged along the y-axis, cross-sections facing the respective coil sides 771a and 771b are set and controlled by the S pole and the N pole, respectively. In addition, in the other driven magnets 6C and 16C arranged along the y-axis, cross-sections facing the respective coil sides 771e and 771f are set and controlled by the N pole and the S pole, respectively.

For this reason, in each of the coil side 771a, 771b, 771e, and 771f of the cross-shaped drive coil 771, a predetermined electromagnetic driving force is generated in the direction indicated by the dotted arrow, and at the same time the reaction force [cross-shaped This occurs because the drive coil 771 is fixed.] The driven magnets 6A, 16A, 6C, and 16C are driven repulsively in the direction indicated by the solid arrow (upper direction in the figure). On the basis of the balance of the electromagnetic driving force generated in the magnets 6A, 16A, 6C, and 16C, the movable table portion 15 is conveyed in the positive direction on the Y axis.

(Control mode K4)

This control mode K4 shows an example of the electricity supply control mode for conveying the movable table 1 to the negative direction of a Y-axis (refer FIG. 74).

In this control mode K4, the difference is that the setting of the magnetic poles of the driven magnets 6A, 16A, 6C, and 16C located in the direction along the X axis is inversely compared with the case of the control mode K3. Others are the same as in the case of the control mode K3.

For this reason, in each coil side 771a, 771b, 771e, and 771f of the cross-shaped drive coil 771, the electromagnetic driving force (dotted arrow) in the opposite direction on the same principle as in the case of the above mode K3. Is generated and the driven magnets 6A, 16A, 6C, and 16C are repulsively driven in the directions indicated by the solid arrows, respectively, in the downward direction in the reaction force, whereby the movable table portion 15 is driven. It is conveyed in the negative direction on the Y axis.

(Control mode K5)

The control mode K5 in this sixteenth embodiment shows an example of the energization control mode for conveying the movable table 15 in the direction of the first upper limit on the X-Y plane coordinate (see FIG. 75). ).

In this control mode K5, each of the eight driven magnets 6A to 6D, 16A to 16D is set in a state capable of energizing control simultaneously, and all of the driven magnets 6A to 6D and 16A to 16D are all provided. The energization direction (setting of the magnetic poles N and S) is previously set and controlled individually.

That is, as shown in FIG. 75, each of the driven magnets 6A, 16A, 6B, 16B, 6C, 16C, which are provided corresponding to the respective coil sides 771a to 771h of the cross-shaped driving coil 771, In the 6D and 16D, each of the driven magnets 6A to 6D has cross-sectional portions facing the respective coil sides corresponding to the S pole, the N pole, the N pole, and the S pole, respectively. In the driven magnets 16A to 16D, cross-sectional portions facing the respective coil sides are sequentially set to N poles, S poles, S poles, and N poles, respectively.

In each portion of each of the coil sides 771a to 771h of the cross-shaped drive coil 771, energization control is performed in the same manner as the control modes K1 and K3 operate simultaneously. For this reason, the electronic driving force in the same direction (the positive direction of the y-axis and the positive direction of the y-axis) as in the case of the control modes K1 and K3 is generated at the same time, and the combined force is shown in the column of the control mode K5 of FIG. The direction of the upper limit is directed. Thereby, the said movable table part 15 is conveyed toward the 1st upper limit direction on a Y-Y plane coordinate.

Here, the conveyance angle θ (angle θ with the y-axis) in the first upper limit direction with respect to the y-axis is conducted by the cross-shaped drive coil 771 and the driven magnets 6A to 6D and 16A to 16D. By varying and controlling the magnitude of the current individually, the electronic driving force acting on each of the driven magnets 6A to 6D and 16A to 16D is changed, whereby it can be freely set in any direction.

(Control mode K6)

This control mode K6 shows an example of the electricity supply control mode for conveying the movable table 1 toward the 3rd upper limit direction (direction opposite to the direction of a 1st upper limit) on a Y-Y plane coordinate ( See FIG. 75).

In this control mode K6, the eight driven magnets 6A to 6D and 16A to 16D are set in a state capable of energizing control at the same time, and the magnetic poles N and S are set to the respective control modes K5. It is set to the opposite direction to the case.

For this reason, in each of the coil sides 771a to 771h of the cross-shaped drive coil 771, the energization control is performed such that the control modes K2 and K4 operate simultaneously. For this reason, the electromagnetic driving force in the same direction (the left direction and the downward direction in Fig. 75) as in the case of the control modes K2 and K4 is generated at the same time, and the combined force is shown in the column of the control mode K6 in Fig. 75. As shown, the direction of the third upper limit is directed. Thereby, the said movable table part 15 is conveyed toward the 3rd upper limit direction on a Y-Y plane coordinate.

Here, the transfer angle θ in the third upper limit direction with respect to the X axis is individually controlled to control the magnitudes of the energization currents of the cross-shaped drive coils 771 and the driven magnets 6A to 6D and 16A to 16D. Thereby, the electromagnetic driving force acting on each of the driven magnets 6A to 6D and 16A to 16D is changed, whereby it can be freely set in any direction.

(Control mode K7)

The control mode K7 in the sixteenth embodiment shows an example of the energization control mode for conveying the movable table 15 in the direction of the second upper limit on the X-Y plane coordinate (see FIG. 75). ).

In this control mode K7, each of the eight driven magnets 6A to 6D and 16A to 16D is set in a state capable of energizing control at the same time, and all of the driven magnets 6A to 6D and 16A to 16D are all. The energization direction (setting of the magnetic poles N and S) is previously set and controlled individually.

That is, as shown in Fig. 75, of each of the driven magnets 6A, 16A, 6B, 16B, 6C, 16C, 6D, and 16D equipped corresponding to the coil sides 771a to 771h located in the positive direction of the X axis. Each of the driven magnets 6A to 6D has a cross-section portion facing each of the corresponding coil sides sequentially set to the S pole, the S pole, the N pole, and the N pole, and each of the driven magnets ( 16A to 16D), cross-sectional portions facing the respective coil sides are sequentially set to the N pole, the N pole, the S pole, and the S pole, respectively.

Then, in each portion of each of the coil sides 771a to 771h of the cross-shaped drive coil 771, energization control is performed such that the control modes K2 and K3 are operated at the same time. For this reason, the electromagnetic driving force in the same direction (negative direction of the y-axis and positive direction of the y-axis) simultaneously occurs as in the case of the control modes K2 and K3, and the combined force is shown in the column of the control mode K7 in FIG. The direction of the second upper limit is directed. Thereby, the said movable table part 15 is conveyed toward the 2nd upper limit direction on a Y-Y plane coordinate.

Here, the transfer angle θ in the second upper limit direction with respect to the y-axis is individually controlled to control the magnitude of the conduction current of the cross-shaped drive coil 771 and each of the driven magnets 6A to 6D and 16A to I6D. Thereby, the electromagnetic driving force acting on each of the driven magnets 6A to 6D and 16A to 16D is changed, whereby it can be freely set in any direction.

(Control mode K8)

This control mode K8 shows an example of the electricity supply control mode for conveying the movable table 1 toward the 4th upper limit direction (direction opposite to the direction of a 2nd upper limit) on a Y-Y plane coordinate ( See FIG. 75).

In this control mode K8, each of the eight driven magnets 6A to 6D and 16A to 16D is set in a state capable of energizing control at the same time, and the magnetic poles N and S of the respective control modes K7 It is set to the opposite direction to the case.                 

Therefore, in each coil side 771a to 771h of the cross-shaped drive coil 771, energization control such that the control modes K1 and K4 are operated simultaneously is performed. Then, the electromagnetic driving force in the same direction (the right direction and the downward direction in Fig. 75) as in the case of the control modes K1 and K4 is generated at the same time, and the combined force is shown in the column of the control mode K8 in Fig. 75. The direction of the fourth upper limit is directed. Thereby, the said movable table part 15 is conveyed toward the 4th upper limit direction on a Y-Y plane coordinate.

Here, the transfer angle θ in the fourth upper limit direction with respect to the X axis is variably controlled to control the magnitudes of the energization currents of the cross-shaped drive coils 771 and the driven magnets 6A to 6D and 16A to 16D, respectively. Thereby, the electromagnetic driving force acting on each of the driven magnets 6A to 6D and 16A to 16D is changed, whereby it can be freely set in any direction.

(Control mode K9)

The control mode K9 according to the sixteenth embodiment enables the movable table 15 to be rotated at a predetermined angle in the counterclockwise direction on the X-Y plane, and is an example of the energization control mode therefor. (See FIG. 76).

In this control mode K9, the cross-shaped drive coil 771 and eight driven magnets 6A to 6D and 16A to 16D are simultaneously energized and controlled.

In this case, the energization direction of the cross-shaped drive coil 771 is set to the state fixed to the right rotation similarly to the case of said K1-K8, as shown in FIG. In addition, with respect to the magnetic poles N and S of the driven magnets 6A to 6D and 16A to 16D, the magnetic poles of the portions of the cross-shaped driving coil 771 that face the respective coil sides are driven to the driven magnets 6A to 6D. 6D) are set to the S poles, respectively, and to the N magnets in the driven magnets 16A to 16D.

Thereby, the cross drive coil 771 and each of the driven magnets 6A to 6D and 16A to 16D are energized and controlled in the above state, and the eight driven magnets 6A to 6D and 16A to 16D), predetermined moments (predetermined electromagnetic driving force) of each same level centering on the origin (zero point) on a X-Y plane generate | occur | produce each counterclockwise direction.

In FIG. 76, the predetermined rotational moment of the same level is shown by the solid line. As a result, the movable table portion 15 supporting the driven magnets 6A to 6D and 16A to 16D is counterclockwise through the driven magnets 6A to 6D and 16A to 16D within a predetermined range. Will be driven to rotate.

That is, in each of the coil sides 771a to 771h of the cross-shaped drive coil 771, a predetermined electromagnetic driving force indicated by a dotted arrow is generated, and at the same time, the reaction force [cross-shaped drive coil 771 is fixed. It is caused because it is fixed to the plate 8]. Each of the driven magnets 6A to 6D and 16A to 16D is driven repulsively in the direction indicated by the solid arrow (counterclockwise in the figure). On the basis of the balance of the respective electromagnetic driving forces (predetermined rotation moments of the same level) generated in each of the driven magnets 6A to 6D and 16A to 16D, the movable table portion 15 is on the X-Y plane (predetermined). Rotationally driven counterclockwise).

(Control mode K1O)                 

The control mode K10 in the sixteenth embodiment enables the movable table 15 to be rotated at a predetermined angle clockwise on the X-Y plane. (See FIG. 76).

In this control mode K10, the cross drive coil 771 and the eight driven magnets 6A to 6D and 16A to 16D are simultaneously energized and controlled. In this case, the drive current is energized in the cross-shaped drive coil 771 in the same direction (right turn) as in the case of the control mode F9 (see the column of the control mode K10 in FIG. 76). In addition, with respect to the setting of the magnetic poles N and S of the driven magnets 6A to 6D and 16A to 16D, the N pole and the S pole are set opposite to each other in the case of K9.

Thereby, the cross drive coil 771 and each of the driven magnets 6A to 6D and 16A to 16D are energized and controlled in the above state, and the eight driven magnets 6A to 6D and 16A to 16D), predetermined moments (predetermined electromagnetic driving force) of each same level with respect to the origin (zero point) on a Y-Y plane generate | occur | produce each clockwise direction (right turn).

76 shows this. In the figure, the predetermined rotational moment of the same level is shown by the solid line. As a result, the movable table portion 15 supporting the driven magnets 6A to 6D and 16A to 16D is clockwise (within the predetermined range through the driven magnets 6A to 6D and 16A to 16D). Right turn) is driven to rotate.

The rest of the configuration, the operation, the function, and the like are almost the same as those in the fifteenth embodiment.

In this case as well, the same operation and effect as in the case of the fifteenth embodiment can be obtained, and since the drive coil is constituted by one of the cross-shaped drive coils 771, the effort at the time of assembly is reduced, Occurrence can also be reduced, and in this respect, there is an advantage that the simplification and water retention of the production process can be improved.

Here, in the sixteenth embodiment, in the setting of the transfer direction of the movable table 15, the case where the drive control of the electronic drive means 147 is divided into the respective control modes of K1 to K10 is illustrated. For example, in the control modes K2 and K1O, the energization directions of the cross-shaped drive coils 771 are set in the opposite directions to those in the control modes K1 and K9, and the respective driven magnets 6A to 6D and 16A. The electronic drive means 147 may be configured to drive control by another control method as long as the energization direction of ˜16D) is set to be the same as in the case of the control modes K1 and K9.

In addition, in the sixteenth embodiment, the equipment locations of the driven magnets 6A to 6D and 16A to 16D and the equipment locations of the cross drive coil 771 may be replaced. In this case, the driven magnets 6A to 6D and 16A to 16D are mounted on the stator side, and the cross-shaped drive coil 771 and the braking plate 9 are mounted on the mover side.

Here, in each said embodiment, although the circular thing was illustrated as the movable table 1, a square shape may be sufficient and another shape may be sufficient. Although the case of a quadrilateral shape was illustrated about the auxiliary table 5, as long as the said function can be implement | achieved, circular shape may be sufficient and a different shape may be sufficient as it. In addition, as long as the driven magnets 6A to 6D have the same shape, the magnetic pole face may not be quadrangular, but may be circular, for example.                 

In addition, in each said embodiment, although the case where the braking plate 9 was equipped was illustrated, when the movement speed does not become a problem especially, this braking plate 9 does not need to be equipped.

In addition, although the said table support mechanism 2 demonstrated what was equipped with the home position return function with respect to the movable table part 15, the table support mechanism 2 is equipped with the home position return means with respect to this movable table part 15 separately, 2) may be configured to exclude the home position return function.

The braking plate 9 provided in each of the above embodiments may be provided for each of the driven magnets 6A to 6D and 16A to 16D, or a single braking common to a plurality of driven magnets. The plate 9 may be used.

In this case, it is comprised so that the circumference | surroundings of the braking plate 9 may be supported by the case main body 3, and the drive coil in each said embodiment is attached to this braking plate 9, and the fixed plate 8 ) May be deleted. In attaching the driving coil to the braking plate 9, the braking plate 9 is formed of a conductive and non-magnetic member, and the driving coil is maintained while maintaining the original function of the braking plate 9. It can be effectively maintained because it is good.

This simplifies the configuration, and thus has the advantage that the size and weight of the entire apparatus can be further promoted.

In addition, in each said embodiment, although the case where four driven magnets were equidistant from the origin on rectangular coordinates (k-Y coordinate) was illustrated, this invention is not necessarily limited to this, From the origin Even if it is not equidistant, even if it is arrange | positioned in the position which shifted on the coordinate axis, the number may not be four.

In this case, in each of the above embodiments, the operation control system 2, 202, 203, 204, etc., is a position where the situation is good (for example, functions efficiently in the conveying direction) toward the moving direction instructed from the outside. A plurality of driven magnets (A) may be selected and energized and driven so as to convey the movable table portion 15 toward the direction of movement instructed from the outside.

In addition, in each said embodiment, although the case where the movable table part 15 was comprised by the movable table 1 and the auxiliary table 5 was illustrated, it is made so that the movable table part 15 may be comprised only by the movable table 1. You may also

In this case, each of the driven magnets 6A to 6D (or 6A to 6D, 16A to 16D) is mounted on the movable table 1 side, and faces the drive coil 7 on the opposite surface of the fixed plate opposite thereto. 721, 731, ..., and the braking plate 9 may be provided. And the table support mechanism 2 has a structure which directly supports the movable table 1, without passing through the auxiliary table 5.

In this way, further miniaturization and weight reduction of the entire apparatus can be promoted, and mobility and versatility can be enhanced, which is advantageous.

In each of the above embodiments, the table support mechanism is provided with the home position return function for the movable table, but the home position return function for the movable table is separated from the table support mechanism (as a means having the home position return function). It may be equipped separately. In this case, if the means with this home position return function operates simultaneously with the table support mechanism, it is technically the same as the table support mechanism in each said embodiment.

In addition, in each said embodiment, although the case where each drive coil was equipped on the stationary coil 8 was illustrated, each drive coil corresponds to the said driven magnets 6A-6D, 16A-16D. Each of the coil side portions to be exposed may be exposed to the driven magnets 6A to 6D and 16A to 16D, and may be mounted so as to be embedded in the fixed coil 8, respectively.

In this case, the space area of the electronic drive means portion can be set smaller and the size and weight of the entire apparatus can be further promoted, which is advantageous.

As described above, in the present embodiment, the electronic drive means operates and energizes the annular drive coil, and at least one of the dodgeballs corresponding to the direction of movement in each of the driven magnets according to an external instruction. When the copper magnet is selected and energized and driven, the direction of the movable table in any direction on the same plane within a predetermined limited range supported by the table support mechanism by the force of the electromagnetic driving force (repulsive force) acting on each driven magnet. The plane transfer can be performed in the direction from the central portion side of the annular drive coil to the outside.

In this case, since the magnitude of the electromagnetic driving force can be variably controlled by setting the energization currents of both the annular drive coil and the driven magnet, the feed rate of the movable table can be set to an arbitrary magnitude on a large and large scale. Can be further improved.                 

In addition, the transfer of the movable table portion can change the magnitude of the current supplied to the annular drive coil of the electronic drive means and the predetermined driven magnet continuously to an analog amount or to set and control the predetermined amount. By balancing the home position return force of the table support mechanism, the feed distance can be set in microns. For this reason, the movable table for precision work can be conveyed with high precision and smoothly in the predetermined direction in the same plane smoothly and with high precision.

Moreover, by setting it as the structure which supports the electronic drive means using the space of a movable table part and a fixed plate, the whole of this electronic drive means can be arrange | positioned in the space of thin plate shape. Moreover, since the dual structure which crossed the y-axis direction and the Y-axis direction as a drive mechanism is not employ | adopted, miniaturization and weight reduction of this electronic drive means, and also the miniaturization and weight reduction of the whole apparatus are attained.

In addition, since the drive coil is a drive coil formed in a single shape, assembly and mounting operations during production are facilitated, productivity can be improved, and complicated energization control is unnecessary even during operation. Therefore, it is possible to provide an excellent precision machining stage apparatus that has not been conventionally known that rapid start-up at the time of starting the entire apparatus is possible.

Further, by arranging the coil sides of at least four sets of drive coils separately on the y-axis and the y-axis, as described above, and arranging respective driven magnets corresponding thereto, for example, along the y-axis In the movement in the direction, the energizing operation of the driving coil and the corresponding driven magnets on the Y axis can be stopped, and in this respect, power consumption and temperature rise can be effectively suppressed.

In addition, the drive coils are configured to face two rectangular small coils together, and the drive coils are arranged so as to be orthogonal to the respective axes on the Ⅹ-Y plane assumed as the origin of the coil side of the drive coils as the center portion on the fixed plate. It becomes possible to arrange | position individually on an axis and a Y axis, respectively. For this reason, it is possible to output the electromagnetic force individually and efficiently with respect to each of the corresponding driven magnets, and it is also possible to generate the electronic driving force of different magnitude individually for each driven magnet. In addition, by simultaneously operating the energizing currents of both the driving coil and the corresponding driven magnet, the feed speed in a predetermined direction can be set large, and for example, in the displacement in the moving direction, it is more quickly applied to this. It shows the effect that it can cope.

In addition, it is possible to equip two annular drive coils having the same central axis on the same surface as the drive coils, and to equip each of four driven magnets corresponding to each annular drive coil. For this reason, in the feed control of the movable table, there is an effect that the movement operation of the movable table portion can proceed more quickly and with high accuracy.

Moreover, in the stage device for precision machining, it is possible to employ | adopt the structure which arrange | positions the said driven magnet individually in correspondence with the coil edge part of this drive coil in the position which intersects the y-axis and Y-axis of a drive coil. Done.                 

Since the equipment parts of the plurality of driven magnets are limited to the locations intersecting with the y-axis and the y-axis of the drive coil, in practice, the specification (operation) of the conveying direction is facilitated, and as a result, this driven magnet as a whole Drive control is simplified. Therefore, the change of the conveyance direction of the movable table part can be quickly responded to this, and at the same time also in the conveyance control of the movable table part etc. (for example, correction in the case of switching control of the direction or position displacement etc.), This can be responded quickly.

Furthermore, by having at least four rectangular drive coils as the drive coils and doubling the number of driven magnets, the electron drive force generated between the rectangular drive coils and each driven magnet can be almost doubled. As a result, the transfer drive to the movable table can be performed more quickly and with higher accuracy.

Further, at least four sets of drive coils are provided as drive coils, and coil sides of each drive coil are arranged along the y-axis or y-axis, and the driven magnets are y-axis or y opposite to the coil-side. It becomes possible to arrange | position individually on an axis | shaft. For this reason, it becomes possible to output each electromagnetic drive force output by the electromagnetic drive means to the direction which rotates also in the direction orthogonal to a y-axis or a Y-axis. For this reason, the effect of being able to drive rotation within a predetermined angle with respect to the movable table, without having to install a new rotation drive means separately, can be acquired, and the general use can be further improved. It is possible to provide an excellent precision machining stage device.

Each of the driven magnets is constituted by at least four rectangular shape driving coils, and corresponding to each coil side of a position positioned in parallel with the y-axis and Y-axis of each rectangular-shaped driving coil. It is possible to arrange them individually. For this reason, the electromagnetic drive force generated between each drive coil and each driven magnet corresponding to it can be almost doubled in the whole apparatus, and thereby the drive control to this movable table part can be made quicker. Can also perform with high precision.

In the stage device for precision machining, since each driven magnet is made a permanent magnet in place of an electromagnet, the energization control for each driven magnet becomes unnecessary, and the wiring circuit of each driven magnet becomes unnecessary. The structure of the electronic drive means is further simplified, and the compactness and weight reduction are promoted, so that the number of control targets in the drive control for the movable table is reduced, so that the responsiveness of the control operation can be immediately increased, and the productivity and durability of the entire apparatus can be improved. It shows the effect that it can raise.

In addition, the drive coil is composed of one cross drive coil formed as a cross frame as a whole, and is positioned in parallel with the y-axis or the Y axis of the single cross drive coil. Corresponding to the coil side, it becomes possible to arrange each driven magnet individually. For this reason, it becomes possible to output each electromagnetic drive force output by the electromagnetic drive means to the direction which rotates also in the direction orthogonal to a y-axis or a Y-axis. Therefore, there is an effect that the rotational drive within a predetermined angle with respect to the movable table can be performed without additionally equipped with the rotational drive means. For this reason, the outstanding precision processing stage apparatus which can be improved further can be provided.

It is possible to arrange the braking plates, which face each of the driven magnets and become conductive members through the minute spacing, and to fix the braking plates to the drive coil side.

For this reason, even if the electronic drive means is suddenly driven or the operation is suddenly stopped, an appropriate braking force is generated on the movable table side without contact by the eddy current braking generated between the driven magnet and the braking plate, As a result, the movable table portion can be smoothly transferred in a stable state without minute vibration.

Here, the braking plate may be constituted by a single plate-like member which can correspond to each of the driven magnets in common.

This reduces the number of parts, simplifies the assembly process of the entire apparatus, and also improves water retention, thereby increasing the durability of the entire apparatus.

The equipment parts of the said drive coil and the some driven magnet equipped corresponding to this may be comprised so that the whole may be replaced and equipped, maintaining the correspondence of each said drive coil and a driven magnet.

The braking plate may be supported by the main body, and the braking plate may be fixed to the drive coil and the fixing plate may be removed.                 

For this reason, since the fixed plate was unnecessary, the small size and light weight can be further promoted.

The electronic drive means is operated in response to an external command and individually energized to control the drive coil and each driven magnet of the electronic drive means to output a predetermined driving force toward a predetermined moving direction of the movable table portion. The operation control system may be provided in parallel.

For this reason, since one or two driven magnets which function effectively toward the moving direction of the movable table are selected and operated, the movable table can be reliably moved in a predetermined direction.

Here, about the operation control system, the energization direction setting function which sets and maintains the energization direction with respect to the said drive coil to one direction, the drive coil energization control function which variably sets the magnitude of the energization current with respect to a drive coil, and a drive coil A stimulus variable setting function for operating according to the energization direction of the driven magnets to set and maintain the setting of the magnetic poles for each of the driven magnets, and individually setting the magnetic force strength of each driven magnet individually according to an external command At the same time, the configuration may be provided with a table motion control function for adjusting the conveying direction and the conveying force with respect to the movable table.

Thereby, simply and individually adjusting the energizing current of a drive coil or a drive coil and each driven magnet, a movable table is reliably conveyed in arbitrary directions and in high precision and in arbitrary directions in the same plane. It is possible to provide a stage device for excellent precision machining that is not available in the prior art.

{17th Embodiment}

A seventeenth embodiment of the present invention illustrated in FIGS. 77 and 78 relates to an improvement of the electromagnetic braking mechanism of the first embodiment illustrated in FIG. 1. That is, although the 1st Embodiment shown in FIG. 1 is an example which brakes only the movable table 1 by an electromagnetic brake mechanism (braking magnet and a braking plate), the 17th Embodiment shown in FIG. 77 is an electromagnetic brake mechanism. It is related with the structure which brakes both the movable table 1 and the table support mechanism 2 by this.

The seventeenth embodiment shown in FIG. 77 shows a case where a relay plate (relay member) 2G is particularly selected among the table support mechanisms 2, and brakes are applied to the relay plate 2G by an electromagnetic braking mechanism. have.

In FIG. 77, since the structure which brakes the movable table 1 by the electromagnetic brake mechanism is the same as the structure shown in FIG. 1, the structure which brakes the relay plate 2G by the electromagnetic brake mechanism is demonstrated. do. In addition, the structure which brakes the movable table 1 by an electromagnetic braking mechanism is not limited to the structure shown in FIG. 1, The electromagnetic braking mechanism demonstrated in embodiment mentioned above can be employ | adopted.

As shown in FIG. 77, the braking magnets 800a to 800b and the braking plate 801 are similar to the configuration employed in the above-described embodiment, in the electromagnetic brake mechanism for braking the table support mechanism, especially the relay plate 2G. ) Is composed of a combination.

The braking plate 801 is supported and supported in parallel with the relay plate 2G on the support shaft 802 planted in the bottom 3B of the case main body 3. And the braking plate 801 faces the relay plate 2G supported by the support shaft 802.

In this embodiment, four braking magnets are used. These four braking magnets 800a to 800d are supported by the bottom 3B of the case body 3. These braking magnets 800a to 800d are held by the case body 3 and face the relay plate 2G. That is, the braking magnets 800a to 800d are arranged at positions replaced with the relay plate 2G sandwiched therebetween. These braking magnets 800a to 800d are each disposed at positions divided at equal intervals in the circumferential direction of the support shaft 802 and around the support shaft 802. In addition, these brake magnets 800a-800d are arrange | positioned so that the magnetic poles of mutually adjacent braking magnets may differ. That is, for example, when the magnetic pole of the adjacent braking magnet 800a is set to the S pole, the braking magnet 800b or the braking magnet 800d is arranged to be the N pole.

Therefore, in this embodiment, the magnetic flux 804 from the N pole of the braking magnet 800b or 800d flows into the braking magnet 800a or 800c of the S pole through the braking plate 801, It is forming a road.

The electromagnetic braking mechanisms (braking magnets 800a to 800d and the braking plate 801) shown in FIGS. 77 and 78 generate a braking force based on the braking principle shown in FIG. 9, and apply the braking force to the table support mechanism 2. ), In particular, by hooking the relay plate 2G, a minute reciprocating movement occurring in the table support mechanism 2 is suppressed in a short time.                 

Next, FIG. 79 (A) and FIG. 79 (B) show the result of comparing braking force with this embodiment and the conventional example without an electromagnetic braking mechanism. 79 (A) and 79 (B), the horizontal axis represents time and the vertical axis represents the amplitude of the minute reciprocating operation. As shown in FIG. 79 (A), since the seventeenth embodiment of the present invention applies braking to both the movable table 1 and the table support mechanism 2 by the electromagnetic braking mechanism, it is shown in FIG. 79 (B). Compared with the conventional example, it can be seen that there is an effect that the minute reciprocating motion generated when applying the braking force can be suppressed in a short time.

As described above, according to the present invention, an eddy current of a magnitude proportional to the moving speed of the movable table is generated by displacing the braking magnet of the electromagnetic braking mechanism and the nonmagnetic and conductive braking plate relative to the movement of the movable table. Since the braking force is generated on the braking plate and generates a braking force based on the mutual magnetic interaction between the magnetic force caused by the eddy current generated in the braking plate and the magnetic force of the braking magnet, the braking force of the electromagnetic braking mechanism is applied to the braking plate. Micro reciprocating operation can be converged within a short time.

Claims (39)

A movable table assembled to the main body to support the workpiece, A table support mechanism which is assembled to the main body to allow movement of the movable table in any direction in the same plane; Electronic driving means which is assembled to the main body to move the movable table in the same plane; An electromagnetic braking mechanism for generating a braking force for stopping the movable table at any position within the same plane; The electromagnetic drive means is provided with a plurality of driven magnets and a drive coil for generating a magnetic force acting on the magnetic force of the driven magnets in an energizing direction, thereby forming the driven magnets; To transfer the movable table by mutual magnetic action with the drive coil, One of the driven magnet and the driving coil is fixed at a fixed position, and the other is provided to be movable with the movable table integrally. The electromagnetic braking mechanism includes a braking magnet which faces each other and moves relatively in synchronization with the movement of the movable table, and a nonmagnetic and conductive braking plate, One of the braking magnet and the braking plate is fixed at a fixed position, and the other is provided to be movable in synchronization with the movement of the movable table. The braking magnet and the jaw of the braking plate are Precision braking for generating a braking force based on mutual magnetic action between the magnetic force caused by the eddy current generated in the braking plate and the magnetic force of the braking magnet according to the movement of the movable table. Stage device. The stage device for precision machining according to claim 1, wherein the electromagnetic braking mechanism applies braking only to the movable table. The stage device for precision machining according to claim 1, wherein the electromagnetic braking mechanism applies braking to the movable table and the table support mechanism. The stage for precision machining according to claim 1, wherein the electromagnetic braking mechanism has a plurality of pairs of the braking magnet and the braking plate. The stage device for precision machining according to claim 1, wherein the electromagnetic braking mechanism is provided at a central portion of the movable table. The stage device for precision machining according to claim 1, wherein the braking plate of the electromagnetic braking mechanism is formed as a single plate with respect to the plurality of braking magnets. The stage device for precision machining according to claim 1, wherein the movable table is supported by the table support mechanism directly or through an auxiliary table parallel and integrally connected to the movable table. The method of claim 7, wherein the table support mechanism, At least one rod-shaped elastic member arranged in parallel on the same circumference of the peripheral end of the movable table at predetermined intervals, and having one end planted in the movable table. Absence, At least three of the same length corresponding to each of the rod-shaped elastic members on one side and arranged in parallel on the same circumference at predetermined intervals on the outside of each of the rod-shaped elastic members, and having one end supported by the main body portion. Rod-shaped elastic members on the other side, It is comprised by the relay member which integrally supports the other end part of each rod-shaped elastic member of the said one and the other, maintaining the parallel state, Each bar-shaped elastic member of the three sets of the table support mechanism is constituted by rod-shaped elastic members such as piano wires having the same length, respectively, with the same strength. . The precision machining method according to claim 8, wherein one of the braking magnet and the braking plate of the electromagnetic braking mechanism is provided to move integrally with the movable table, and the other is provided in the main body. Stage device. The said brake magnet of the said electromagnetic brake mechanism, and the said braking plate are provided so that one may move integrally with the said movable table, and the other is provided in the said main-body part, In addition, one of the braking magnet and the braking plate of the electromagnetic braking mechanism is provided so as to move integrally with the relay member, and the other is provided in the main body portion. The stage device for precision machining according to claim 1, wherein the braking magnet of the electromagnetic braking mechanism is formed of the driven magnet. The stage device for precision machining according to claim 1, wherein the braking magnet of the electromagnetic braking mechanism is constituted separately from the driven magnet. The stage device for precision machining according to claim 1, wherein the braking magnet of the electromagnetic braking mechanism is formed as either a permanent magnet or an electromagnet. The stage processing device for precision machining according to claim 1, wherein the table support mechanism has a home position return force for returning the movable table to its original position. The said driven magnet and said drive coil are equally divided in the circumferential direction based on one axis passing through the origin set in the surface which the said movable table moves. A stage device for precision machining, arranged on a plurality of axes to be fixed) and fixed at a fixed position. The precision processing stage apparatus according to claim 15, wherein the plurality of axes is a plurality of orthogonal axes passing through an origin set in a plane in which the movable table moves. 16. The stage for precision machining according to claim 15, wherein the plurality of axes are a plurality of axes which face the radial direction with respect to the origin set in the plane in which the movable table moves. The original position at which the movable table is returned by the table support mechanism coincides with the origin which is a starting point of the axis set in the plane in which the movable table is moved. Stage device for precision machining. 16. The stage device for precision machining according to claim 15, wherein a jaw of the driven magnet and the drive coil is disposed at a position shifted from the axis. The plurality of driven magnets constituting the electronic driving means are arranged on the respective axes at positions equidistant from the origin, The plurality of drive coils constituting the electromagnetic drive means are disposed corresponding to the plurality of driven magnets. 21. The stage device for precision machining according to claim 20, wherein the plurality of driven magnets arranged on the axis line is arranged in a line symmetric positional relationship. The stage device for precision machining according to claim 1, wherein the driven magnet of the electromagnetic drive means is formed of a permanent magnet. The driven magnet of the electromagnetic drive means is formed of an electromagnet, and forward or reverse direction is performed by synchronizing the energization of the driven magnet with the energization of the drive coil. The stage apparatus for precision machining characterized by the above-mentioned. The stage device for precision machining according to claim 1, wherein the drive coil has a coil side for generating a magnetic force acting on the magnetic force of the driven magnet. 2. The stage device for precision machining according to claim 1, wherein the drive coil is formed as a plurality of coils arranged in the inside and the outside with different dimensions. The stage device for precision machining according to claim 1, wherein the coil edge of the drive coil is formed in a cross shape or a straight shape. 27. The stage device for precision machining according to claim 26, wherein the cross-shaped coil sides of the drive coil are arranged in a posture along the axis line on which the driven magnet is arranged. The stage device for precision machining according to claim 26, wherein the linear coil side of the drive coil is disposed along the axis line in which the driven magnet is arranged or in a transverse posture. 27. The coil as claimed in claim 26, wherein the drive coils are formed by combining a plurality of small coils that are energized independently, and the cross-shaped or straight coil sides of the small coils are formed. A stage device for precision machining, characterized by the above-mentioned. 30. The stage device for precision machining according to claim 29, wherein the small coil is formed in a square shape. 30. The stage device for precision machining according to claim 29, wherein the rectangular shape of the small coil is any one of a quadrilateral, a triangular, a pentagon, and a fan shape. The stage device for precision machining according to claim 1, wherein the electron drive means has a plurality of pairs of the driven magnet and the drive coil. 2. The precision machining stage apparatus according to claim 1, wherein an external dimension of said drive coil is set larger than an external dimension of said driven magnet. The precision machining stage according to claim 1, wherein the electromagnetic drive means includes an operation control system for linearly moving the movable table by controlling energization to the drive coil, or for linearly moving and rotating. Device. The method of claim 34, wherein the operation control system, Coil drive control means for energizing and controlling the drive coil of the electronic drive means in accordance with a control mode; A program storage unit for storing a plurality of control programs relating to a plurality of control modes in which a moving direction, a rotating direction of the movable table, an operation amount thereof, and the like are specified; A data storage unit that stores predetermined coordinate data or the like used in the execution of the respective control programs; And an operation command input unit for instructing the coil drive control means a predetermined control operation for the drive coil. The method of claim 35, wherein the control mode of the operation control system, First to fourth control modes for moving the movable table in the positive direction of each axis with the intersection of the two orthogonal axes as the origin; Fifth to eighth control modes for moving the movable table in directions within respective upper limits defined by the two orthogonal axes; The stage for precision machining is comprised as each of the 9th thru | or 10th control modes for rotating the said movable table clockwise or counterclockwise in the surface formed by the 2 orthogonal axes. 36. The system of claim 35, wherein the operation control system further comprises: A plurality of position detection sensors for detecting and outputting movement information of the movable table to the outside; Based on the information detected by the position detection sensor, a predetermined operation is executed, the position information calculating circuit which specifies the moving direction of the movable table, the change amount thereof, and the like and outputs the position information to the outside in parallel is provided. Stage device for processing. The motion control system according to claim 1, wherein the electromagnetic drive means operates in response to an external command and individually controls the drive coil and the driven magnet included in the electronic drive means to move the movable table in a predetermined movement direction. The stage apparatus for precision processing characterized by the above-mentioned. The method of claim 38, wherein the operation control system, An energization direction setting function for setting and maintaining an energization direction for the drive coil in one direction; A drive coil energization control function for variably setting the magnitude of the energization direction with respect to the drive coil; A stimulus variable setting function which operates in accordance with the energization direction with respect to the drive coil to individually set and maintain magnetic poles for each driven magnet; A magnetic strength setting function for individually varying the magnetic force strength of each driven magnet individually according to an external command; And a table operation control function for adjusting the feed direction and feed force to the movable table by combining the energization direction setting function, the drive coil energization control function, the magnetic pole variable setting function, and the magnetic force setting function. Stage device for precision machining.

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