KR100585184B1 - Voice-coil motor and 3-phase linear motor - Google Patents

Abstract

Provided is a three-phase linear motor effective for reducing coil heat generation.

In a three-phase linear motor, a pair of permanent magnets in which different magnetic poles face each other with a coil installation space in which a three-phase coil is installed are arranged in plural pairs in the moving direction of the movable part, and adjacent permanent magnets in the moving direction. Will also be different. The coils 60U, 60W, and 60V of each phase are each a bent part whose short side of the substantially rectangular coil forms an angle of about 90 degrees with respect to the straight part of the long side, respectively. It consists of two saddle-shaped coils 60A and 60B. The two saddle coils are combined so that the two bends in the respective saddle coils are opposite to each other, and the two straight portions between the two bends in the one saddle coil are respectively the other saddle. It is combined so as to be in close contact with the two straight portions between the two bent portions in the mold coil as a straight line portion. In addition, the coils of the respective phases are arranged so as to be arranged in series in the moving direction, and the coils of the phases adjacent to each other are combined so as to be in close contact with each other.

Voice coil, motor, linear, motor, permanent magnet, coil, moving part

Description

Voice-coil motor and 3-phase linear motor

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a plan view for explaining a relationship between a permanent magnet and a coil in a voice coil motor and a three-phase linear motor according to the present invention using a connection saddle coil.

2 is a view showing an example of a connection saddle coil used in the voice coil motor according to the present invention.

3 is a diagram showing an example of a connection saddle coil used in a three-phase linear motor according to the present invention.

FIG. 4 is a longitudinal cross-sectional view when the voice coil motor or the three-phase linear motor shown in FIG. 1 is configured as a movable coil type motor (FIG. (A)) and a movable magnet motor (FIG. (B)).

FIG. 5: is a figure which shows an example of the displacement amount-thrust characteristic in the voice coil motor shown in FIG.

FIG. 6 is a plan view showing an example of a voice coil motor using a known race track coil for comparison with the voice coil motor shown in FIG. 1.

FIG. 7 is a plan view showing an example of a three-phase linear motor using a known saddle coil for comparison with the three-phase linear motor shown in FIG. 1.

Fig. 8 is a longitudinal sectional view showing a schematic structure in the case where a voice coil or a three-phase coil used in the present invention is accommodated in a cooling shell and used.

9 is a perspective view showing an example of a race track coil.

FIG. 10 is a plan view for explaining a relationship between a permanent magnet and a coil in a known voice coil motor and a three-phase linear motor. FIG.

11 is a view for explaining an example of the manufacturing process of the saddle coil used in the present invention.

12 is a diagram illustrating an example of a connection saddle coil in which the saddle coil according to FIG. 11 is connected.

Explanation of symbols on the main parts of the drawings

11, 41, 46, 75, 210, 215, 216: permanent magnet

40, 45: York

42, 83: holder

50, 60, 500: connection saddle coil

Saddle coils: 50A, 50B, 60A, 60B, 400A, 400B

80: cooling shell

100, 200A, 200B: Race track type coil

101, 401A, 401B: straight part

102, 402A, 402B: bent portion

200: voice coil

300: three-phase coil

The present invention relates to a voice coil motor and a three phase linear motor.

It is known that a coil body assay most commonly used for constructing a linear motor is called a so-called race track type as shown in FIG. 9. This coil 100 is manufactured by the rotational motion around the axis which penetrates the coil center, and has a planar structure. Two straight portions (long side portions) 101 extending in the vertical direction in the drawing are effective portions for generating thrust. On the other hand, both upper and lower end portions (short side portions) have only a function of connecting two straight portions 101 and will be referred to as short sides 102. In addition, the distance between the centers of the two straight portions 101 is referred to as Lc.

The basic structure in the case of configuring a voice coil motor or a three-phase synchronous linear motor using the race track type coil like FIG. 9 is shown in FIG. In FIG. 10, a case in which the race track coil as described in FIG. 9 is used as the voice coil 200 and a case in which three race track coils are used in combination as the three-phase coil 300 are shown in a plan view. have. Although the voice coil 200 and the three-phase coil 300 are accommodated in the space written as a coil installation space in the figure, in FIG. 10, the voice coil 200 and the three-phase coil 300 are shown outside for convenience.

The magnet device of the linear motor is formed by arranging a plurality of permanent magnets 210 with a coil installation space extending in one axis direction therebetween. In particular, the magnetic poles of the permanent magnets 210 facing each other are different from each other, and the magnetic poles of the permanent magnets 210 adjacent to each other are also different from each other. As a result, a strong magnetic flux density is generated in the gap serving as the coil installation space. The distance from the center of the N pole of the permanent magnet 210 to the center of the S pole of the adjacent permanent magnet 210 is called a magnetic pole pitch. If the center of one N pole is the origin and the coordinates along the magnet train are normalized by the magnetic pole pitch, the phase is displayed as shown in FIG. In Fig. 10, the magnetic pole pitch is pi (rad), and the magnetic period length from the center of one N pole to the center of the next N pole is 2 pi (rad). At this time, the magnetic flux density along this coordinate is expressed as approximately Acos θ when the maximum value is A.

In Fig. 10, the voice coil motor takes the distance Lc between the centers of two coil straight portions equal to the magnetic pole pitch π, and the N poles of the permanent magnets 210 adjacent to each other, respectively. This motor is arranged to coincide with the center of the S pole. That is, in FIG. 10, a pair of permanent magnets 210 opposed to each other are illustrated, but in the case of a voice coil motor, the permanent magnet side includes at least two pairs of permanent magnets 210. In the two straight portions of the voice coil 200, the current and the magnetic flux have opposite directions, but the thrust generated by the vector product is in the same direction. Since the voice coil 200 is provided at the maximum point of the magnetic flux density, the thrust generated also becomes maximum. However, the stroke cannot be taken large.

As described in FIG. 9, in the case of the race track coil 100, only the straight portion 101 contributes to generate thrust, and the upper and lower short sides 102 are not related. The short side portion 102 generates a side force perpendicular to the propulsion direction when it enters the magnet row shown in Fig. 10, so it must be released from the magnet row. The width (size in the up-down direction in the drawing) of the short side portion 102 is basically the same as the width (size in the left-right direction in the drawing) of the straight portion 101. Poor storage of the 102 is a problem.

On the other hand, in the three-phase synchronous linear motor in Fig. 10, three coils (300U, 300W, 300V) in the U-phase, W-phase, and V-phase sequence are used for two cycles of magnetic (4π (rad)). ) To be integrated. When the current is adjusted and flowed in each coil so as to be synchronized with the magnetic phase, almost constant thrust is obtained regardless of the position even when the three-phase coil 300 moves.

As is apparent from FIG. 10, in the three-phase coil 300, since the linear portions of the coils in the adjacent phases interfere with each other, in fact, the width of the linear portions of the coils can only be as half as that of the voice coil 200. Therefore, although the width | variety of a short side part is half compared with the voice coil 200, the storage property of this part also becomes a problem.

As a method of solving the problem of the short side part in such a race track coil, what is called a saddle coil as shown in FIG. 11 is proposed. This saddle-shaped coil 400 has the shape which bent the short side part 102 of the race track coil 100 shown in FIG. 9 at right angles with respect to the straight part 101. An example of the manufacturing method of this saddle coil 400 is demonstrated below.

In Fig. 11A, a winding having a rectangular cross section having a width t is wound a predetermined number of times on the same plane to form a race track type as one layer. The coil for one layer has a winding end 100s on the innermost side and a winding end 100e on the outermost side. Next, in order to make a coil for one phase, the coil for one layer shown to Fig.11 (a) is bent about 90 degrees so that the main surfaces of the two linear parts 101 may mutually face each other. It is shaped in a substantially U shape.

In FIG. 11B, a plurality of ones formed in a substantially U-shape as described above are prepared, and a plurality of these are stacked to form a saddle-shaped coil 400 for one phase. For this lamination, it is needless to say that in the bending step, the interval between the two straight portions of the coil to be the innermost side is the smallest, and the interval between the two straight portions of the coil to be the outermost is largest. Hereinafter, the right and left two long side portions are referred to as straight portions 401 and the upper and lower short side portions are referred to as bent portions 402. Of course, the manufacturing method of the said saddle-shaped coil is an example to the last, and what is important is what is necessary so that the short side of a coil which is a substantially long rectangle may be made so that the bending part may form an angle of about 90 degrees with respect to the linear part of a long side, respectively.

In addition, a coil as shown in FIG. 12, which is a combination of two saddle coils as shown in FIG. 11, is called a connection saddle coil 500 and has been proposed. In Fig. 12, the two saddle coils 400A and 400B are combined so that the bent portions 402A and 402B are opposite to each other and the two sets of straight portions 401A and 401B are in close contact with each other. Is done. The current in the same direction is caused to flow through the straight portions 401A and 401B in close contact. Thereby, the coil by which the straight line parts 401A and 401B which were in close contact were integrally obtained is obtained (for example, refer patent document 1, 2).

[Patent Document 1] Japanese Patent Publication No. 2002-095231

[Patent Document 2] Japanese Patent Application Laid-Open No. 2001-103725

An object of the present invention is to provide a voice coil motor and a three-phase linear motor effective for reducing coil heat generation by using the above-described connection saddle coil.

The present invention also provides a reduction in the number of wirings between the switching box and the coil for switching the current flowing through the coil in the voice coil motor and the three-phase linear motor.

According to the present invention, at least two pairs of permanent magnets in which different magnetic poles face each other with the coil installation space in which the coils are installed are arranged in relation to the moving direction of the movable portion, and adjacent to the moving direction. In a voice coil motor in which magnetic poles of permanent magnets are also different, the coil is formed by a bent portion in which the short side of the substantially rectangular coil forms an angle of about 90 degrees with respect to the straight portion on the long side, respectively. It consists of two saddle-shaped coils provided, and these two saddle-shaped coils are combined so that the two bends in each saddle-shaped coil may be mutually opposite directions, and the said in one saddle-shaped coil Even if the two straight portions between the two bent portions are in close contact with the two straight portions between the two bent portions in the other saddle-shaped coil as a close straight portion, respectively. A voice coil motor, characterized in that a combination is provided.

In this voice coil motor, currents in opposite directions flow through the two close linear portions.

In this voice coil motor, the coil is further arranged such that the positions of the respective close contact portions in the two close contact straight portions coincide with the magnetic pole centers of two permanent magnets adjacent to each other with respect to the moving direction.

According to the present invention, a plurality of pairs of permanent magnets with different magnetic poles facing each other with a coil installation space in which three-phase coils are provided are arranged in plural pairs with respect to the moving direction of the movable portion, and adjacent permanently with respect to the moving direction. In a three-phase linear motor in which magnetic poles are also different, the coil of each phase in the three-phase coil has an angle of about 90 degrees with respect to the linear portion on the long side of each of the short side coils of the substantially rectangular coil. It consists of two saddle-shaped coils which are made of bent portions, and these two saddle-shaped coils are combined so that two bent portions in each saddle-shaped coil become opposite to each other, and in one saddle-shaped coil The two straight portions between the two bent portions are each in close contact with the two straight portions between the two bent portions in the other saddle coil. The coils of the respective phases in the three-phase coils are arranged to be arranged in series in the moving direction, and the close linear portions in the coils of the adjacent phases are adjacent to each other. A three-phase linear motor is provided which is combined to be in close contact.

Also in this three-phase linear motor, the electric current of the opposite direction flows to the two said contact | adherence linear parts of each phase.

In the three-phase linear motor, the coil of each phase has a distance between an outer side or an inner side of one of the two linear lines, and an inner side or the outer side of the other linear line. The distance between the magnetic pole centers of two permanent magnets adjacent to each other with respect to the moving direction is equal to the distance between the magnetic poles.

<Example>

1 shows a voice coil motor and a three-phase linear motor according to the present invention in the form of a plan view similar to that of FIG. 10. In the case of the magnet device of the voice coil motor, at least two pairs of permanent magnets 11 are arranged with the coil installation space extending in the axial direction therebetween. On the other hand, the magnet device in the case of a three-phase linear motor is formed by arranging a plurality of pairs of permanent magnets 11 with a coil installation space extending in one axis direction therebetween. In particular, the magnetic poles of the permanent magnets 11 facing each other in each pair are different, and the magnetic poles of the permanent magnets 11 adjacent to each other are also different from each other. As a result, a strong magnetic flux density is generated in the gap serving as the coil installation space.

And in this example, although the connection saddle coil mentioned above is used as a coil, in particular, the connection saddle coil for voice coil motors is made into the voice coil of the connection saddle coil 50 with a wide linear part as mentioned later. Use as. On the other hand, the connection saddle coil for a three-phase linear motor is used as a connection saddle coil with a narrow width | variety of a linear part as mentioned later.

Also in this example, the distance from the center of the N pole of any permanent magnet 11 to the center of the S pole of the adjacent permanent magnet 11 is called the magnetic pole pitch p, and one center of the N pole is the origin. Thus, the coordinates along the magnet train are normalized to the magnetic pole pitch p and the phase is displayed as shown in FIG. That is, the magnetic pole pitch p is π (rad), and the magnetic period length from one N pole center to the next N pole center is 2π (rad). At this time, the magnetic flux density along this coordinate is expressed as Acos θ when the maximum value is A, as described in FIG. 10.

In FIG. 1, the voice coil motor described in FIG. 10 is replaced with a connection saddle coil 50 composed of two saddle coils. This voice coil motor takes the distance Lp between the portions in which the straight portions are in close contact with each other in the two saddle coils as the magnetic pole pitch p, and the permanent magnets adjacent to each other in each of the portions in which the straight portions are in close contact with each other. This motor is arranged to coincide with the centers of the N pole and the S pole of (11). Hereinafter, the linear part formed by two linear parts in close contact is called a close contact straight part. Of course, the direction of the electric current of a close linear part is connected so that it may become the same. In addition, although the direction of the electric current of one close contact linear part and the direction of the electric current of the other close contact linear part is opposite and has a magnetic flux reverse direction, the thrust generate | occur | produced by a vector product becomes the same direction. Since the connection saddle coil 50 is arranged at the maximum point of the magnetic flux density, the thrust generated also becomes maximum.

On the other hand, in the case of a three-phase linear motor, the three race track coils 300U, 300W, and 300V described in FIG. 10 are replaced with three of the saddle coils 60U, 60W, and 60V connected by two saddle coils. Doing. In other words, three connected saddle coils 60U, 60W, and 60V are integrated and arranged between two magnetic cycles (4 pi (rad)) in the order of U phase, W phase, and V phase. That is, the three connection saddle coils 60U, 60W, 60V are in close contact with the outside of one of the close contact straight portions of the connection saddle coil 60U, and the outside of the one close contact straight portion of the connecting saddle coils 60W, While the outer side of the other close contact straight part of the connection saddle-shaped coil 60W and the outer side of the one close contact straight part of the connection saddle-shaped coil 60V are closely contacted, it arrange | positions so that it may be lined up in the uniaxial direction. Furthermore, as for the connection saddle-shaped coil 60U, the distance between the outer side (or the inner side) in one of the close linear parts and the inner side (or the outer side) in the other close straight lines is the distance Lp. That is, it is equal to the stimulus pitch (p). The same applies to the connection saddle coils 60W and 60V.

In such a three-phase coil, if the magnitude of current flows to the coil of each phase to synchronize with a magnetic phase, even if a three-phase coil moves, a substantially constant thrust will be acquired irrespective of the position.

Next, with reference to FIGS. 2 and 3, a connection saddle coil used in a voice coil motor or a three-phase linear motor according to the present invention will be described. 2 and 3 show connection saddle coils formed by connecting two saddle coils obtained by attaching a bent portion to a race track coil.

The connection saddle coil 50 of FIG. 2 shows the example which combined two saddle-shaped coils 50A and 50B by the wide race track coil of two linear parts as demonstrated in FIG. Such a connection saddle coil 50 is suitable for a voice coil motor, but can also be applied to a three-phase linear motor. And the part shown with the broken line shows the outline before bending.

The connection saddle coil 60 of FIG. 3 shows the example which combined two saddle-shaped coils 60A, 60B by the narrow track track coil of two straight parts as demonstrated in FIG. Such a connection saddle coil 60 is suitable for a three-phase linear motor. This is because, as described above, the linear portions of the coils in the adjacent phases interfere with each other. However, it may be applied to a voice coil motor.

As for the connection saddle coil 50 like FIG. 2, the width | variety, thickness, and height are taken the same about the linear part which concerns on thrust generation in the saddle-shaped coils 50A and 50B. In the race track coil, it extends up and down by the width (size in the vertical direction) of the bent portion, but in the structure of the connection saddle coil, this is divided into left and right. Choice whether it is good to extend up and down or to divide from side to side is not able to say uniformly as it depends on use form. However, when used in the form as shown in FIG. 4, it is better to use a connection saddle coil.

Fig. 4A shows a longitudinal cross-sectional structure in the case where a connection saddle coil is applied to a linear motor called a movable coil type. Although the connection saddle coil can use both FIG.2 and FIG.3, the case where the connection saddle coil 60 of FIG.3 is used is demonstrated below. In FIG. 4A, a plurality of permanent magnets 41 are fixed to an inner portion of a substantially U-shaped yoke 40 fixed in a non-illustrated fixing portion and extend in one axial direction as described in FIG. 1. ) Is fixed. In the coil installation space formed between the permanent magnets 41 on both sides, a three-phase coil by three connection saddle coils 60U, 60W, 60V shown in FIG. 1 is movably installed. In FIG. 4A, one connection saddle coil is represented by 60. As for the connection saddle coil 60, the holder 42 is attached to the one side here, and the upper side of the bend | folder side. The holder 42 is supported to be movable in the axial direction through a guide member (not shown) extending in the axial direction. The holder 42 is also usually provided with a table for mounting a transported object.

FIG.4 (b) shows the longitudinal cross-sectional structure at the time of applying a connection saddle coil to the linear motor called a movable magnet type. In Fig. 4B, a plurality of three-phase coils by the three connection saddle coils 60U, 60W, and 60V shown in Fig. 1 are arranged in series in the axial direction, and both ends thereof are fixed at the fixed portion. It is fixed. In FIG. 4B, one connection saddle coil is represented by 60. A yoke 45 having a rectangular cross section is disposed to be movable in one axis direction so as to surround the connection saddle coil 60. That is, the yoke 45 has a predetermined length and is supported to be movable in the axial direction through a guide member (not shown) extending in the axial direction. A plurality of permanent magnets 46 are fixed to both inner walls of the yoke 45, respectively.

In either case of Figs. 4A and 4B, permanent magnets enter both sides of the contact straight portion of the connection saddle coil 60, so that a space suitable for storing the bent portion is provided above and below. On the other hand, when a race track coil is used, it becomes longer up and down, and useless space is created above and below the permanent magnet.

Also in the case of a voice coil motor, it becomes the form similar to FIG.4 (a), FIG.4 (b). That is, in the case of a movable coil type, the connection saddle type coil 50 shown in FIG. 1, ie, a voice coil, is movable in the coil installation space formed between the permanent magnets 41 on both sides. On the other hand, in the case of the movable magnet type, a plurality of connection saddle coils 50 shown in Fig. 1 are arranged in one axis direction in series, and both ends thereof are fixed at the fixing portion.

The voice coil 200 shown in FIG. 10 and the connection saddle-shaped coil 50 (voice coil) shown in FIG. 1 take the maximum value of thrust in the position ((theta) = 0rad) shown. As the voice coil moves, the thrust decreases as shown in FIG. In general, it is preferable that the voice coil continues to produce a constant thrust regardless of the position variation. For example, θ can only be taken up to 0.45 (rad) for a request to suppress thrust reduction within 10%. Since the normalized coordinate is? (Rad) when the magnetic pole pitch is p (mm), the stroke L (mm) corresponding to 0.45 (rad) is L = (0.45 / π) p (mm).

In order to increase the stroke L, the magnetic pole pitch p must be large. On the other hand, when the magnetic pole pitch p is made large with the wide track of the straight track, the width (size in the vertical direction) of the upper and lower short side portions is increased, and the storage performance deteriorates as described above. Therefore, as a large stroke L is required, it becomes clear that the superiority of the connection saddle coil (voice coil) 50 by this invention becomes high.

However, the invention has also been made such that the race track coil is divided into two coils to limit the width of the upper and lower short sides. For example, instead of the voice coil 200 of FIG. 10, it is conceivable to use two race track type voice coils 200A and 200B as shown in FIG. In this case, the width of the short side portion can be reduced by half while the volume of the linear portion effective for generating thrust is kept the same as that of the voice coil (connection saddle coil 50) of FIG. Further, the magnetic flux density from the north pole to the south pole of the permanent magnet 215 in the center can be taken to be the same. However, the magnetic flux density of the permanent magnet 216 having a length of half that is disposed on both sides of the permanent magnet 215 is considerably lower than the magnetic flux density of the center.

Therefore, in the case of the voice coil motor of FIG. 6, in addition to the thrust falling generally, the thrust fall rate with respect to the positional change of a voice coil also becomes large. In addition, there is a burden to make permanent magnets 215 and 216 of different sizes. Therefore, although the voice coil motor by the connection saddle coil 50 like this invention aimed at the same effect as the voice coil motor of FIG. 6, it is much superior in performance.

In order to explain the superiority of the three-phase linear motor by this invention, the three-phase linear motor disclosed by said patent document 2 is demonstrated with reference to FIG. FIG. 7: shows the three-phase linear motor using the connection saddle | wire coil in the form of the top view similar to FIG.

In FIG. 7, in this example, the six saddle-shaped coils described with reference to FIG. 11 are lined up in the uniaxial direction as follows and are integrated. The inner side of one straight part of the V-shaped first saddle coil 71-1V having the bend in the reverse direction is disposed adjacent to the inner side of one straight part of the U-phase first saddle coil 71-1U. . On the outer side of one linear part of U-shaped 1st saddle coil 71-1U, the outer side of one linear part of W-shaped 1st saddle coil 71-1W which made the bending part in the same direction is arrange | positioned adjacently. The inner side of the other linear part of the V-shaped 1st saddle coil 71-1V is arrange | positioned adjacent to the inner side of one linear part of this W-shaped 1st saddle coil 71-1W. 2nd U phase which made the bending part reverse between the inside of the other straight part of the 1st saddle-shaped coil 71-1W of W phase, and the outside of the other straight part of the 1st saddle coil 71-1V of V-phase. One straight part of the saddle-shaped coil 71-2U is disposed adjacent to one another. The V-phase which made the bend part the same direction between the outer side of the other straight part of the 1st saddle-shaped coil 71-1W of W phase, and the inner side of the other straight part of the 2nd saddle-shaped coil 71-2U of U phase. 2 One straight part of the saddle-shaped coil 71-2V is placed adjacent to each other. 2nd W phase which made the bending part reverse direction between the outer side of the other linear part of U-shaped 2nd saddle coil 71-2U, and the inside of the other linear part of 2nd saddle-shaped coil 71-2V of V phase. One straight part of the saddle-shaped coil 71-2W is disposed adjacent to one another. Then, the distance from the inside of one straight portion to the outside of the other straight portion of the saddle coil is made equal to the magnetic pole pitch?.

Here, while the three-phase coil of FIG. 10 or FIG. 1 mounts one unit of a three-phase coil at the normalization length 4 pi, two units are mounted at (4 + 2/3) pi in the three-phase coil of FIG. . Since the volume of the straight portion is the same for each unit, it can be said that a three-phase coil using a saddle coil can be mounted with coil turns nearly twice that of a race track coil. In the case where the same current flows, the thrust is about 2 times and the amount of heat is also about 2 times in the three-phase coil of FIG. 7.

On the other hand, if it is desired to obtain twice the thrust in the race track coil, the amount of heat generated is doubled by doubling the current. Therefore, even if the three-phase coil of FIG. 7 generates the same thrust, the heat generation is about 1/2.

Considering only from the viewpoint of generated calories, the three-phase coil of FIG. 7 is excellent, so the three-phase coil of FIG. 1 may be considered unnecessary. However, in practice, there are many cases in which the three-phase coil of FIG. 1 is preferable. This is the case, for example, in which a considerably long stroke is required in a movable magnet linear motor. In this case, in order to suppress heat generation, it is necessary to connect each coil to a switching box having a plurality of changeover switches, and to switch the coils through which the current flows as the mover (three-phase coil) moves by the changeover switch. Done.

By the way, in the three-phase coil of FIG. 7, the number of coils is about twice, so the number of wirings connecting the switching box and each coil is also doubled. Since three wirings are needed for each one coil unit, when it exceeds 10 units, it becomes 30 or more and becomes difficult. On the contrary, in the case of the present invention, the number of wirings is half, which is easy.

Moreover, FIG. 8 is a longitudinal cross-sectional view for demonstrating the cooling system of a coil applied to the movable coil type linear motor. The saddle-shaped connecting coil 60 is housed in a cooling shell 80 having a larger cross-sectional shape. In the cooling shell 80, the liquid refrigerant can be circulated, and the upper liquid storage part 81 is placed at a position corresponding to the bent portion above the saddle-type connecting coil 60, and the lower side of the saddle-type connecting coil 60. The lower liquid reservoir 82 is provided at a portion corresponding to the bent portion of the. 83 is a coil holder. The stator side of the linear motor is omitted in the drawing.

When a linear motor equipped with a cooling shell as shown in FIG. 8 is used in a vacuum, since a pressure difference between the cooling shell 80 and the outside becomes large, it is necessary to add a reinforcement to restrain expansion of the cooling shell 80. desirable.

In the three-phase coil of Fig. 7, the winding is reduced over almost the entire length, so there is no space for reinforcement. On the contrary, in the three-phase coil according to the present invention of FIG. 1, as is apparent from FIG. Therefore, the three-phase motor according to the present invention is better.

Industrial availability

The voice coil motor or the three-phase linear motor according to the present invention can be applied to a stage device for micro-moving a cast animal, a stepper for a semiconductor manufacturing apparatus, an exposure apparatus, or the like.

The voice coil motor or the three-phase linear motor according to the present invention is effective for reducing the heat generation of the coil by using a connection saddle coil, and reduces the number of wirings between the switching box and the coil for switching the current flowing through the coil. It can be realized. Further, when the connection saddle coil is accommodated in the cooling shell and used in a reduced pressure atmosphere, reinforcement that suppresses expansion of the cooling shell due to the pressure difference between the inside and outside of the cooling shell can be easily realized.

Claims (6)

At least two pairs of permanent magnets in which the other magnetic poles face each other are arranged with respect to the moving direction of the movable part, and the magnetic poles of adjacent permanent magnets with respect to the moving direction are also different. In the voice coil motor, The coil is composed of two saddle-shaped coils each having a bent portion at which the short side of the substantially rectangular coil is formed at an angle of about 90 degrees with respect to the straight portion on the long side, respectively. The two saddle coils are combined so that the two bent portions in each saddle coil are opposite to each other, and the two straight portions between the two bent portions in one saddle coil are respectively different from each other. A voice coil motor, wherein the voice coil motor is coupled to the two straight portions between the two bent portions in the saddle coil so as to be in close contact with the straight portions. The method of claim 1, Voice coil motor, characterized in that the current in the opposite direction flows to the two close contact portion. The method according to claim 1 or 2, The voice coil motor, wherein the coils are arranged so that the positions of the respective close contact portions in the two close contact straight portions coincide with the magnetic pole centers of two permanent magnets adjacent to each other with respect to the moving direction. A pair of permanent magnets in which the other magnetic poles face each other are arranged in a plurality of pairs with respect to the moving direction of the movable part, and the magnetic poles of adjacent permanent magnets with respect to the moving direction are also different. Three-phase linear motor, The coil of each phase in the said three-phase coil consists of two saddle-shaped coils whose short side of a substantially rectangular coil is a bending part which makes an angle of about 90 degree with respect to the linear part of a long side, respectively, These two saddle coils are combined so that two bent portions in each saddle coil are opposite to each other, and two straight portions between the two bent portions in one saddle coil are different from each other. It is combined so as to be in close contact with two straight portions between the two bent portions in the saddle-shaped coil as a close straight portion, and the coils of each phase in the three-phase coil are arranged in series in the moving direction. And a close contact with each other, such that the straight lines in the coils adjacent to each other are in close contact with each other. The method of claim 4, wherein The three-phase linear motor, characterized in that the current in the opposite direction flows to the two close contact straight portion of each phase. The method according to claim 4 or 5, The coils of the phases are adjacent to each other with respect to the moving direction in a distance between an outer side or an inner side of one of the two straight line portions and an inner side or the outer side of the other straight line portion. A three-phase linear motor characterized by being equal to the distance between the magnetic pole centers of two permanent magnets.

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