KR100561728B1 - piezoelectric pump - Google Patents

piezoelectric pump Download PDF

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KR100561728B1
KR100561728B1 KR1020040008045A KR20040008045A KR100561728B1 KR 100561728 B1 KR100561728 B1 KR 100561728B1 KR 1020040008045 A KR1020040008045 A KR 1020040008045A KR 20040008045 A KR20040008045 A KR 20040008045A KR 100561728 B1 KR100561728 B1 KR 100561728B1
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KR
South Korea
Prior art keywords
piezoelectric
fluid
pump
pump case
piezoelectric actuator
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KR1020040008045A
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Korean (ko)
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KR20050079557A (en
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함영복
박중호
윤소남
조정대
김광영
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한국기계연구원
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00Machines, pumps, or pumping installations having flexible working members
    • F04B43/02Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04Pumps having electric drive
    • F04B43/043Micropumps
    • F04B43/046Micropumps with piezoelectric drive
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00Machines, pumps, or pumping installations having flexible working members
    • F04B43/02Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/025Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms two or more plate-like pumping members in parallel
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/043Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms two or more plate-like pumping flexible members in parallel
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047Pumps having electric drive
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06Control using electricity
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/16Casings; Cylinders; Cylinder liners or heads; Fluid connections
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05BINDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2210/00Working fluid
    • F05B2210/10Kind or type
    • F05B2210/11Kind or type liquid, i.e. incompressible
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05BINDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2210/00Working fluid
    • F05B2210/10Kind or type
    • F05B2210/12Kind or type gaseous, i.e. compressible
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05BINDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2260/00Function
    • F05B2260/60Fluid transfer
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00Pumps

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)

Abstract

본 발명은 도전성탄성판에 압전소자가 부착되는 다수의 압전액추에이터가 서로 다른 변위 차를 이루며 순차적으로 연동되게 하여 체크밸브 없이도 유체를 펌핑시킬 수 있는 압전펌프를 제공한다.The present invention provides a piezoelectric pump capable of pumping a fluid without a check valve by allowing a plurality of piezoelectric actuators to which a piezoelectric element is attached to the conductive elastic plate to sequentially interoperate with each other in a different displacement difference.

유체흡입관(11)이 연결되는 흡입공(21)과 유체토출관(12)이 연결되는 토출공(22)이 형성되는 펌프케이스(20)와, 도전성탄성판(31)에 부착되는 압전소자(34)가 변위를 일으키며 출구측으로 유체를 펌핑시키는 압전액추에이터(30)를 제어하는 콘트롤러(40)를 포함하는 압전펌프에 있어서, 상기 펌프케이스(20)의 내측에 유로(24)를 공유하는 다수의 유체펌핑실(23)이 설치되고, 각각의 유체펌핑실(23)에는 인접되는 유로(24)를 서로 공유하는 압전액추에이터(30)가 취부되어 콘트롤러(40)가 각각의 압전액추에이터(30)들을 순차적으로 제어하여 이들이 서로 다른 변위 차를 이루며 연동하여 동작하도록 구성되고, 상기 콘트롤러(40)에 의해 제어되는 압전액추에이터(30)가 0°,90°,180°,270°변위 폭(위상차)을 가지도록 설정되는 것을 특징으로 함.A pump case 20 having a suction hole 21 to which the fluid suction pipe 11 is connected and a discharge hole 22 to which the fluid discharge pipe 12 is connected, and a piezoelectric element attached to the conductive elastic plate 31. In a piezoelectric pump including a controller 40 for controlling a piezoelectric actuator 30 for causing displacement and pumping fluid to an outlet side, a plurality of channels sharing the flow passage 24 inside the pump case 20. The fluid pumping chamber 23 is installed, and each of the fluid pumping chambers 23 is provided with piezoelectric actuators 30 which share the adjacent flow paths 24 with each other, so that the controller 40 controls the respective piezoelectric actuators 30. The piezoelectric actuator 30 controlled by the controller 40 is configured to operate in conjunction with each other by sequentially controlling different displacement differences, and the 0 °, 90 °, 180 °, and 270 ° displacement widths (phase difference) are controlled. Characterized in that it is set to have.

압전펌프, 체크밸브, 도전성탄성판, 압전소자Piezoelectric pumps, check valves, conductive elastic plates, piezoelectric elements

Description

압전펌프 {piezoelectric pump}Piezoelectric pump

도1은 종래 유니몰프(unimorph) 압전액추에이터를 이용한 압전펌프의 예시도,1 is an exemplary diagram of a piezoelectric pump using a conventional unimorph piezoelectric actuator;

도2은 종래 바이몰프(bimorph) 압전액추에이터를 이용한 압전펌프의 예시도,Figure 2 is an illustration of a piezoelectric pump using a conventional bimorph piezoelectric actuator,

도3은 종래 압전펌프의 작동관계를 설명하는 선도,3 is a diagram illustrating an operation relationship of a conventional piezoelectric pump;

도4는 본 발명이 적용된 디스크형 압전액추에이터의 예시도,Figure 4 is an illustration of a disk-type piezoelectric actuator to which the present invention is applied,

도5는 본 발명이 적용된 압전펌프의 일 예시도,5 is an exemplary view of a piezoelectric pump to which the present invention is applied;

도6은 본 발명에 따른 압전펌프의 작동에 다른 유체의 흐름을 표현한 참고도,Figure 6 is a reference diagram representing the flow of other fluid in the operation of the piezoelectric pump according to the present invention,

도7은 본 발명의 또 다른 구성에 의한 압전 펌프케이스의 예시도, Figure 7 is an illustration of a piezoelectric pump case according to another configuration of the present invention,

도8은 본 발명의 또 다른 실시예에 따른 압전펌프의 예시도,Figure 8 is an illustration of a piezoelectric pump according to another embodiment of the present invention,

도9는 도8에 나타낸 압전펌프의 단면도,9 is a cross-sectional view of the piezoelectric pump shown in FIG. 8;

<도면의 주요 부분에 대한 부호의 설명><Explanation of symbols for the main parts of the drawings>

11: 유체흡입관 12: 유체토출관11: fluid suction pipe 12: fluid discharge pipe

20: 펌프케이스 21: 흡입공20: pump case 21: suction hole

22: 토출공 23: 유체펌핑실22: discharge hole 23: fluid pumping chamber

24: 유로 30: 압전액추에이터24: Euro 30: Piezo actuator

31: 도전성탄성판 34: 압전소자31 conductive conductive plate 34 piezoelectric element

40: 콘트롤러40: controller

본 발명은 소량의 유체를 펌핑하는 압전펌프에 관한 것으로, 더욱 상세하게는 도전성탄성판(plate)에 압전소자가 부착되는 다수의 압전액추에이터(unimorph 또는 bimorph)가 서로 다른 변위 차를 이루며 순차적으로 연동되는 방식으로 개량하여 체크밸브 없이도 유체를 펌핑시킴으로써 구조가 간단하고, 고장 및 소음도 줄일 수 있는 압전펌프를 제공함에 있는 것이다.The present invention relates to a piezoelectric pump for pumping a small amount of fluid, and more particularly, a plurality of piezoelectric actuators (unimorph or bimorph) to which a piezoelectric element is attached to a conductive elastic plate (unimorph or bimorph) form a different displacement difference and sequentially interlock. The present invention provides a piezoelectric pump that is simple in structure and can reduce failure and noise by pumping fluid without a check valve.

미소(微少) 유체 이송을 위한 소형 펌프로는 다이아후램 펌프가 주로이용되고 있으며, 이는 소형전동기와 소형전동기의 회전운동을 로드의 왕복운동으로 바꾸어 다이아후램에 변위를 주어 체크밸브를 통해 비교적 작은 양의 유체를 펌핑시키도록 구성되고 있다.The diaphragm pump is mainly used as a small pump for micro fluid transfer, and the diaphragm displaces the diaphragm by converting the rotational movement of the small motor and the small motor into a reciprocating motion of the rod, thereby providing a relatively small amount through the check valve. Is configured to pump fluid.

종래에는 도1에 나타낸 바와 같이 펌프케이스(20)에 유체 흡입공(21)과 토출공(22)이 구비되어 내측에 도전성탄성판(31:plate) 즉, 심(shim)의 한쪽면에는 인가전압에 따라 변위를 일으키도록 된 압전소자(34)가 부착되는 방식의 유니몰프(unimorph) 압전액추에이터(30)로 내설되어 상기 유니몰프 압전액추에이터(30)의 리드선(35a,35b)과 연결되는 콘트롤러의 전계 신호를 통해 기전력을 가하면 극성에 따라 압전소자(34)가 한쪽방향으로 변위를 일으키면서 유체를 유입시킨 후 출구측으로 펌핑(pumping)작용하도록 되어 있다.Conventionally, as shown in FIG. 1, a fluid suction hole 21 and a discharge hole 22 are provided in a pump case 20, and applied to an inner side of a conductive elastic plate 31, that is, a shim. Controller connected to the lead wires (35a, 35b) of the unimorph piezoelectric actuator 30 is built into a unimorph piezoelectric actuator (30) of the method that is attached to the piezoelectric element 34 to cause a displacement in accordance with the voltage When an electromotive force is applied through the electric field signal of the piezoelectric element 34, the piezoelectric element 34 is displaced in one direction and pumps to the outlet side after introducing the fluid.

또 다른 예로는 도2에서와 같이 도전성탄성판(31)의 양쪽면 모두에 압전소자(34:34a,34b)가 부착되는 바이몰프(bimorph) 압전액추에이터(30a)가 제안되기도 하였으며, 상기 바이몰프 압전액추에이터(30a)는 기전력을 가하면 압전소자(34a,34b)가 부착된 양쪽방향으로 변위를 일으키면서 펌핑(pumping) 작용하게 하여 상기한 유니몰프 압전액추에이터 보다는 더 큰 변위를 일으키면서 유체를 펌핑시키도록 구성되어 있다.As another example, as shown in FIG. 2, a bimorph piezoelectric actuator 30a having piezoelectric elements 34: 34a and 34b attached to both surfaces of the conductive elastic plate 31 has been proposed. The piezoelectric actuator 30a pumps fluid by applying an electromotive force, causing displacement in both directions to which the piezoelectric elements 34a and 34b are attached, thereby causing a larger displacement than the unimorph piezoelectric actuator described above. It is configured to.

상기한 종래 구조의 압전액추에이터는 전계 신호에 따라 변위만을 발생하므로 펌핑 유체의 흡입과 토출을 단속하는 별도의 체크밸브(10a,10b)를 필요로 하고 있다.The piezoelectric actuator of the above-described conventional structure only generates displacement in accordance with the electric field signal, and thus requires separate check valves 10a and 10b for controlling the suction and discharge of the pumping fluid.

하지만 체크밸브(10a,10b)는 그 내측에 유로를 단속하는 볼(ball)과, 상기 볼이 안착되는 씨트(sheet)를 형성하고 있어 상기 체크밸브(10)가 제대로 동작하지 않을 경우 누설이 발생하여 펌핑 성능을 저하시키는 단점이 있다.However, the check valves 10a and 10b form a ball to control the flow path inside the sheet and a seat on which the ball rests, so that leakage occurs when the check valve 10 does not operate properly. This has the disadvantage of lowering the pumping performance.

또한, 체크밸브(10a,10b)는 유로 단속을 위해 볼을 이용하는 관계로 펌핑 중에 소음을 발생할 뿐만 아니라, 부품수가 많아져서 구성이 복잡하다는 등의 문제점을 안고 있다.In addition, the check valves 10a and 10b not only generate noise during pumping due to the use of balls for intermittent flow, but also have a problem in that the number of parts increases and the configuration is complicated.

본 발명은 상기한 바와 같은 종래기술의 문제점을 감안 해결하고자 하는 것으로, 본 발명은 체크밸브를 이용하지 아니하면서도 다수의 압전액추에이터만으로도 펌핑 작용을 수행할 수 있도록 개선된 체크밸브가 필요없는 압전펌프를 제공함으로써 체크밸브를 이용하는 따른 펌핑 성능이 저하 및 소음이 발생되는 것을 예방하는데 그 목적이 있는 것이다.The present invention has been made in view of the problems of the prior art as described above, the present invention is a piezoelectric pump that does not require an improved check valve to perform the pumping action only a plurality of piezoelectric actuators without using a check valve. The purpose of the present invention is to prevent deterioration of pumping performance and noise caused by using a check valve.

또한, 본 발명은 압전펌프의 구조가 간단하면서도 콤펙트하게 구성하여 작은 양의 유체 이송에 적합하여 다양한 의료장비나 가전제품 등에서 아주 유용하게 사용되어질 수 있도록 하는 것을 또 다른 목적으로 하고 있다.In addition, the present invention is another object of the piezoelectric pump structure to be simple yet compact so that it can be used in a variety of medical equipment or home appliances, such as suitable for small amount of fluid transfer.

상기한 목적 달성을 위해 본 발명에서는 압전액추에이터가 수용되는 내측 유체펌핑실에 유체흡입관과 연결되는 흡입공 및 유체토출관이 연결되는 토출공이 형성되는 펌프케이스와, 도전성탄성판에 부착되는 압전소자가 변위를 일으키며 펌프케이스의 흡입공으로 유입된 유체를 출구측 토출공으로 펌핑하도록 된 압전액추에이터와, 상기 압전액추에이터를 제어하는 콘트롤러를 포함하는 압전펌프에 있어서, 상기 펌프케이스의 내측에 유로를 공유하는 다수의 유체펌핑실이 설치되고, 각각의 유체펌핑실에는 인접되는 유로를 서로 공유하는 압전액추에이터가 취부되어 콘트롤러가 각각의 압전액추에이터들을 순차적으로 제어하여 이들이 서로 다른 변위 차를 이루며 연동하여 동작하도록 구성되고, 상기 콘트롤러는 하나의 압전액추에이터와 인접되는 또 다른 압전액추에이터가 서로 다른 변위( 0°,90°,180°,270°변위) 폭(위상차)을 가지도록 설정되는 것을 특징으로 하는 압전펌프를 제공한다.In order to achieve the above object, the present invention provides a pump case in which a suction hole connected to a fluid suction pipe and a discharge hole connected to a fluid discharge tube are formed in an inner fluid pumping chamber in which a piezoelectric actuator is accommodated, and a piezoelectric element attached to a conductive elastic plate. A piezoelectric actuator including a piezoelectric actuator configured to cause displacement and pump the fluid introduced into a suction hole of a pump case to an outlet discharge hole, and a controller for controlling the piezoelectric actuator, the plurality of which share a flow path inside the pump case. A fluid pumping chamber is installed, and each of the fluid pumping chambers is provided with piezoelectric actuators which share adjacent flow paths so that the controller sequentially controls the respective piezoelectric actuators so that they operate in conjunction with each other with different displacements. The controller is adjacent to one piezo actuator Provides a piezoelectric pump, characterized in that another of the piezoelectric actuator so as to set a different displacement (0 °, 90 °, 180 °, 270 ° displacement) width (a phase difference).

또한, 본 발명은 압전액추에이터가 수용되는 내측 유체펌핑실에 흡입공과 토출공이 형성되는 펌프케이스와, 도전성탄성판에 부착되는 압전소자가 변위를 일으키며 펌프케이스의 흡입공으로 유입된 유체를 출구측 토출공으로 펌핑하도록 된 압전액추에이터와, 상기 압전액추에이터를 제어하는 콘트롤러를 포함하는 압전펌프에 있어서, 상기 펌프케이스는 그 상,하부측으로 또 다른 펌프케이스가 다수 적층되고, 각각의 펌프케이스에 조립되는 압전액추에이터의 흡입공과 토출공은 그 상부측으로 적층되는 펌프케이스의 토출공과 흡입공에 서로 연결되고, 최상부측 펌프케이스에는 가장 하부측에 위치한 펌프케이스의 흡입공과 직접 연결되는 유체흡입관과 최상부측 펌프케이스의 토출공과 연결되는 유체토출관이 함께 병설되고, 상기 펌프케이스의 일측면에 가이드홈이 형성되어 상기 가이드홈으로 조립되는 가이드블럭에 의해 ,상,하로 적층되는 펌프케이스를 고정 및 분리하도록 구성되는 것을 특징으로 하는 압전펌프를 제공한다.In addition, the present invention is the pump case in which the suction hole and the discharge hole is formed in the inner fluid pumping chamber in which the piezoelectric actuator is accommodated, and the piezoelectric element attached to the conductive elastic plate causes displacement, and the fluid introduced into the suction hole of the pump case is discharged to the outlet side. In a piezoelectric pump including a piezoelectric actuator to be pumped, and a controller for controlling the piezoelectric actuator, the pump case has a plurality of pump cases stacked on the upper and lower sides thereof, and the piezoelectric actuator is assembled to each pump case. The suction hole and the discharge hole are connected to the discharge hole and the suction hole of the pump case stacked on the upper side, and the upper pump case has a fluid suction pipe directly connected to the suction hole of the pump case located at the lower side and the discharge hole of the upper pump case. The fluid discharge pipe to be connected together is installed together, the pump case On one side the guide groove is formed to provide a piezoelectric pump, characterized in that is configured to secure and remove the pump casing which is assembled by a guide block with the guide groove, the up and down laminating.

이하, 본 발명의 바람직한 실시 예를 첨부 도면을 참고하여 보다 상세하게 설명하면 다음과 같다.Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

도 4는 본 발명에 따른 디스크형 압전액추에이터의 예시도를 나타낸 것으로, 압전액추에이터(30)는 도전성탄성판(31)의 한쪽면에 압전소자(34)가 부착되고, 상기 도전성탄성판(31)와 압전소자(34)에는 납땜 연결되는 리드선(35:35a,35b)이 구비되어 콘트롤러(40)가 상기 리드선(35)을 통해 압전액추에이터(30)에 기전력을 가하여 전계 신호를 발생시키면 압전소자(34)가 한쪽방향으로 변위를 일으키며 펌프케이스(20)의 흡입공(21)으로 유입된 유체를 출구측 토출공(22)으로 유체를 펌핑(pumping) 시키는 디스크 형태로 구성되고 있다.Figure 4 shows an exemplary view of a disk-type piezoelectric actuator according to the present invention, the piezoelectric actuator 30 is a piezoelectric element 34 is attached to one side of the conductive elastic plate 31, the conductive elastic plate 31 And the piezoelectric element 34 is provided with lead wires 35: 35a and 35b to be soldered and connected to each other. When the controller 40 generates an electric field signal by applying electromotive force to the piezoelectric actuator 30 through the lead wire 35, the piezoelectric element ( 34 has a disk shape for causing displacement in one direction and pumping the fluid introduced into the suction hole 21 of the pump case 20 to the discharge hole 22 at the outlet side.

그리고 압전액추에이터(30)를 수용하는 펌프케이스(20)는 유체흡입관(11)이 연결되는 유체 흡입공(21)과 유체토출관(12)이 연결되는 토출공(22)이 형성되고, 그 내측에는 압전액추에이터(30)가 수납되는 유체펌핑실(23)이 구비되어 있다.In addition, the pump case 20 accommodating the piezoelectric actuator 30 has a fluid suction hole 21 to which the fluid suction pipe 11 is connected, and a discharge hole 22 to which the fluid discharge tube 12 is connected, and an inner side thereof. It is provided with a fluid pumping chamber 23 in which the piezoelectric actuator 30 is accommodated.

상기 펌프케이스(20)의 유체펌핑실(23)에 취부되어 유체를 펌핑시키는 압전액추에이터(30)는 이를 제어하는 콘트롤러(40)와 연결되어 상기 콘트롤러(40)의 전계 신호에 따라 압전액추에이터(30)가 변위를 일으키면 유체를 출구측으로 펌핑시키도록 구성된다.The piezoelectric actuator 30 mounted in the fluid pumping chamber 23 of the pump case 20 to pump the fluid is connected to the controller 40 controlling the piezoelectric actuator 30 according to the electric field signal of the controller 40. ) Causes the displacement to pump the fluid to the outlet side.

상기 펌프케이스(20)는 압전액추에이터(30)가 수용되는 내측 유체펌핑실(23)에 유체흡입관(11)이 연결되는 흡입공(21)과 유체토출관(12)이 연결되는 토출공(22)이 형성되는 펌프케이스(20)를 형성하되, 상기 펌프케이스(20)의 내측에 유로(24)를 공유하는 다수의 유체펌핑실(23:231,232,233,234,235)이 설치되어 각각의 유체펌핑실(23)에는 인접되는 유로(24)를 서로 공유하는 다수의 압전액추에이터(30:301,302,303,304,305)가 취부된다.The pump case 20 has a suction hole 21 in which the fluid suction pipe 11 is connected to the inner fluid pumping chamber 23 in which the piezoelectric actuator 30 is accommodated, and a discharge hole 22 in which the fluid discharge pipe 12 is connected. A plurality of fluid pumping chambers 23: 231, 232, 233, 234, and 235, which share a flow path 24, are formed inside the pump case 20, respectively. A plurality of piezoelectric actuators 30: 301, 302, 303, 304, and 305 that share adjacent flow paths 24 are mounted in the housing.

이들은 각각 콘트롤러(40)에 연결되어 상기 콘트롤러(40)가 각각의 압전액추에이터(30)들을 순차적으로 제어하여 이들이 서로 다른 변위 차를 이루며 연동하여 동작할 수 있도록 한다.These are connected to the controller 40, respectively, so that the controller 40 sequentially controls the respective piezoelectric actuators 30 so that they can operate in conjunction with each other in a different displacement difference.

상기 콘트롤러(40)에 의해 제어되는 각각의 압전액추에이터(30)는 이들이 서로 연동하여 순차적으로 동작할 수 있도록 0°,90°,180°,270°변위 폭(위상차)을 가지도록 차례로 설정된다.Each piezoelectric actuator 30 controlled by the controller 40 is set in order to have a 0 °, 90 °, 180 °, and 270 ° displacement width (phase difference) so that they can operate sequentially in conjunction with each other.

한편, 본 발명에서는 일실시예로 하나의 펌프케이스(20)에 일렬로 나란하게 다수의 압전액추에이터(30)가 부설되어 하나의 유체흡입입구를 통해 유입되는 유체를 그와 마주하는 유체토출구를 통해 토출되는 구성으로 되는 압전펌프를 도시하고 설명하였으나, 또 다른 실시예는 도7내지 도9에 나타낸 바와 같이 압전펌프를 부피가 작고 콤펙트화된 구조로 형성할 수 있다.Meanwhile, in the present invention, in one embodiment, a plurality of piezoelectric actuators 30 are arranged side by side in one pump case 20 through a fluid discharge port facing the fluid flowing through one fluid suction inlet. Although the piezoelectric pump having a discharged configuration is illustrated and described, another embodiment may form the piezoelectric pump in a compact and compact structure as shown in FIGS. 7 to 9.

도7은 본 발명의 또 다른 구성에 의한 압전 펌프케이스의 예시도이고, 도8은 다수의 펌프케이스가 상,하로 적층되는 구조를 갖는 압전펌프의 예시도이고, 도9는 압전펌프의 단면도,Figure 7 is an exemplary view of a piezoelectric pump case according to another configuration of the present invention, Figure 8 is an illustration of a piezoelectric pump having a structure in which a plurality of pump cases are stacked up and down, Figure 9 is a cross-sectional view of the piezoelectric pump,

이에 도시된 바와 같이 압전액추에이터(30)가 수용되는 내측 유체펌핑실(23)에 흡입공(21)과 토출공(22)이 형성되는 펌프케이스(20)와, 도전성탄성판(31)에 부착되는 압전소자(34)가 변위를 일으키며 펌프케이스(20)의 흡입공(21)으로 유입된 유체를 출구측 토출공(22)으로 펌핑하도록 된 압전액추에이터(30)와, 상기 압전액추에이터(30)를 제어하는 콘트롤러(40)를 포함하는 압전펌프에 있어서, 상기 펌프케이스는 그 상,하부측으로 또 다른 펌프케이스(201,202,203,204)가 다수 적층되고, 각각의 펌프케이스(20)에 조립되는 압전액추에이터(30)의 흡입공(21)과 토출공(22)은 그 상부측으로 적층되는 펌프케이스(202)의 토출공(22)과 흡입공(21)에 서로 연결되고, 최상부측 펌프케이스(204)에는 가장 하부측에 위치한 펌프케이스(201)의 흡입공(21)과 직접 연결되는 유체흡입관(11)과 최상부측 펌프케이스(204)의 토출공(22)과 연결되는 유체토출관(12)이 함께 병설된다.As shown therein, the pump case 20 having the suction hole 21 and the discharge hole 22 is formed in the inner fluid pumping chamber 23 in which the piezoelectric actuator 30 is accommodated, and attached to the conductive elastic plate 31. The piezoelectric element 34 which causes the displacement and pumps the fluid introduced into the suction hole 21 of the pump case 20 to the outlet side discharge hole 22, and the piezoelectric actuator 30 In the piezoelectric pump including a controller 40 for controlling the pump case, a plurality of pump cases 201, 202, 203, 204 are stacked on the upper and lower sides thereof, and the piezoelectric actuator 30 is assembled to each pump case 20. Suction hole 21 and discharge hole 22 are connected to discharge hole 22 and suction hole 21 of pump case 202 stacked on the upper side, and the uppermost pump case 204 Fluid suction pipe 11 directly connected to the suction hole 21 of the pump case 201 located on the lower side The discharge hole 22 the fluid discharge pipe 12 is connected to the top side of the pump case 204 is juxtaposed with.

그리고 상기 펌프케이스(20)의 일측면에 가이드홈(26)이 형성되어 상기 가이드홈(26)으로 조립되는 가이드블럭(27)에 의해 ,상,하로 적층되는 펌프케이스(20)를 고정 및 분리하도록 구성되고, 상기 가이드블럭(27)의 내측면에는 각각의 압전액추에이터(30)에 납땜 연결되는 리드선(35)을 외부로 인출시키도록 그 내측면에 요함부로 형성되는 리드선인출통로(271)를 형성하여 상기 가이드블럭(27)을 통해 인출되는 리드선(35)을 콘트롤러(40)에 연결하도록 되어있다.In addition, the guide groove 26 is formed on one side of the pump case 20 to fix and separate the pump case 20 stacked up and down by the guide block 27 assembled into the guide groove 26. And a lead wire drawing passage 271 formed on the inner surface of the guide block 27 to form a recess in the inner surface of the guide block 27 so as to lead the lead wire 35 soldered to each piezoelectric actuator 30 to the outside. And a lead wire 35 drawn out through the guide block 27 to the controller 40.

이처럼 상,하로 적층되는 구성을 갖는 압전펌프는 각각의 압전액추에이터의 토출공이 인접되는 또 다른 펌프케이스의 유입포트에 연결되도록 조립하면 제1펌프케이스(201)를 통해 펌핑되는 유체는 제2펌프케이스(202)로 유입되어질 수 있게되고, 제2펌프케이스(202)로 유입된 유체는 또 다른 제3, 4펌프케이스(203,204)를 순차적으로 경유하면서 순차적으로 펌핑작용을 하게 된다.Thus, when the piezoelectric pump having a configuration stacked up and down is assembled such that the discharge hole of each piezoelectric actuator is connected to the inlet port of another pump case adjacent to the pump, the fluid pumped through the first pump case 201 is the second pump case. 202 may be introduced, and the fluid introduced into the second pump case 202 may be sequentially pumped through the third and fourth pump cases 203 and 204.

그리고 유체의 유입과 펌핑된 유체를 원하는 영역으로 토출시키기 위해서는 최상부측에 위치한 펌프케이스(204)에는 상기 압전펌프에 유체를 공급하는 유체공급관(11) 및 토출구를 통해 펌핑되는 유체를 이송하는 유체배출관(12)이 함께 설치되며, 상기 유체공급관(11)은 맨아랫쪽에 위치한 펌프케이스(201)의 유체 흡입공에 직접 연결된다.In order to discharge the inflow of the fluid and the pumped fluid to the desired area, the pump case 204 located at the top thereof includes a fluid supply pipe 11 for supplying the fluid to the piezoelectric pump and a fluid discharge pipe for transporting the pumped fluid through the discharge port. 12 is installed together, the fluid supply pipe 11 is directly connected to the fluid suction hole of the pump case 201 located at the bottom.

이와 같이 구성된 본 발명은 펌프케이스의 내측에 유니몰프형 압전액추에이터를 다수개 배치하고, 각각의 압전액추에이터는 펌프케이스(20)의 흡입공(21)으로 유입된 유체를 출구측 토출공(22)으로 펌핑시키도록 이들이 서로 연동하여 동작되도록 전계를 인가함으로써, 체크밸브 없이도 흡입 측으로 유입된 유체가 출구 측으로 진행되도록 다수의 압전 액추에이터를 순차적으로 펌핑시킬 수 있게 된다. In the present invention configured as described above, a plurality of unimorphic piezoelectric actuators are disposed inside the pump case, and each piezoelectric actuator discharges the fluid introduced into the suction hole 21 of the pump case 20 to the outlet side discharge hole 22. By applying electric fields such that they operate in conjunction with each other to pump, it is possible to sequentially pump a plurality of piezoelectric actuators so that the fluid introduced to the suction side proceeds to the outlet side without a check valve.

상기 압전액추에이터에 기전력을 가하면 한쪽방향으로 변위를 일으킬 때 펌프케이스에 형성된 흡입포트과 연결되는 압전액추에이터의 흡입 측으로부터 첫번째 압전엑츄에이터가 변위를 일으켜 유체를 흡입하면, 90°위상지연으로 두 번째 압전 엑츄에이터가 변위를 시작하고, 180°지연으로 세번째 압전엑츄에이터가 변위를 시작하게 하면서 각 액추에이터 변위에 의해 발생된 공간에 유체가 유입되어 출구 측으로 토출하는 펌핑동작을 반복하게 된다.When an electromotive force is applied to the piezoelectric actuator, the first piezoelectric actuator causes a displacement from the suction side of the piezoelectric actuator connected to the suction port formed in the pump case when the displacement is induced in one direction, and the second piezoelectric actuator is subjected to a 90 ° phase delay. The displacement starts, and the third piezoelectric actuator starts the displacement with a 180 ° delay, and the pumping operation is repeated in which the fluid is introduced into the space generated by the displacement of each actuator and discharged to the outlet side.

이상에서 설명한 바와같이, 본 발명은 펌프케이스에 부설되는 다수의 압전액추에이터를 사용하여 이들이 서로 연동하여 동작되도록 전계를 인가함으로써, 체크 밸브 없이도 흡입 측으로 유입된 유체를 출구 측으로 펌핑 작동이 가능하여 부품수가 작고, 구조도 간단하여 고장이나 수리가 자주 발생하지 않을 뿐만 아니라 체크밸브에 의한 소음이 없으므로 저소음화를 실현할 수 있는 장점을 갖는 매우 유용한 발명인 것이다. As described above, the present invention uses a plurality of piezoelectric actuators attached to the pump case by applying an electric field so that they operate in conjunction with each other, it is possible to pump the fluid introduced to the suction side to the outlet side without a check valve, so that the number of parts It is a very useful invention having the advantage of being able to realize low noise because it is small and its structure is simple and does not frequently cause trouble or repair, and there is no noise caused by the check valve.

Claims (4)

삭제delete 압전액추에이터(30)가 수용되는 내측에 유로(24)를 공유하는 다수의 유체펌핑실(23)에 유체흡입관(11)이 연결되는 흡입공(21)과 유체토출관(12)이 연결되는 토출공(22)이 형성되는 펌프케이스(20)와, 도전성탄성판(31)에 부착되는 압전소자(34)가 변위를 일으키며 펌프케이스(20)의 흡입공(21)으로 유입된 유체를 출구측 토출공(22)으로 펌핑시키고 각각의 유체펌핑실(23)에는 인접되는 유로(24)를 서로 공유하는 압전액추에이터(30)와, 상기 압전액추에이터(30)가 취부되어 이들이 서로 다른 변위를 이루며 연동하여 동작하고 각각의 압전액추에이터(30)들을 순차적으로 제어하도록 구성되는 콘트롤러(40)를 포함하는 압전펌프에 있어서,A discharge hole in which the fluid suction pipe 11 is connected to the suction hole 21 and the fluid discharge pipe 12 are connected to the plurality of fluid pumping chambers 23 sharing the flow passage 24 inside the piezoelectric actuator 30 is accommodated. The pump case 20 in which the ball 22 is formed and the piezoelectric element 34 attached to the conductive elastic plate 31 cause displacement, and the fluid flowing into the suction hole 21 of the pump case 20 is discharged. The piezoelectric actuator 30 and the piezoelectric actuator 30 which share the flow path 24 adjacent to each other are pumped to the discharge hole 22, and each adjacent fluid pumping chamber 23 is mounted, and they interlock | operate by making different displacements. In the piezoelectric pump comprising a controller 40 which is configured to operate and to control each piezoelectric actuator 30 in sequence, 상기 콘트롤러(40)에 의해 제어되는 각각의 압전액추에이터(30)는 0°,90°,180°,270°의 변위 폭(위상차)을 이루며 동작하도록 구성되는 것을 특징으로 하는 압전펌프.Each piezoelectric actuator 30 controlled by the controller 40 is configured to operate in a displacement width (phase difference) of 0 °, 90 °, 180 °, 270 °. 압전액추에이터(30)가 수용되는 내측 유체펌핑실(23)에 흡입공(21)과 토출공(22)이 형성되는 펌프케이스(20)와, 도전성탄성판(31)에 부착되는 압전소자(34)가 변위를 일으키며 펌프케이스(20)의 흡입공(21)으로 유입된 유체를 출구측 토출공(22)으로 펌핑하도록 된 압전액추에이터(30)와, 이를 제어하는 콘트롤러(40)를 포함하는 압전펌프에 있어서,A pump case 20 in which the suction hole 21 and the discharge hole 22 are formed in the inner fluid pumping chamber 23 in which the piezoelectric actuator 30 is accommodated, and the piezoelectric element 34 attached to the conductive elastic plate 31. ) Causes a displacement and a piezoelectric actuator including a piezoelectric actuator 30 configured to pump the fluid introduced into the suction hole 21 of the pump case 20 to the outlet side discharge hole 22, and a controller 40 controlling the same. In the pump, 상기 펌프케이스(20)는 그 상,하부측으로 또 다른 펌프케이스(201,202,203,204)가 다수 적층되고, 각각의 펌프케이스(20)에 조립되는 압전액추에이터(30)의 흡입공(21)과 토출공(22)은 그 상부측으로 적층되는 펌프케이스(202)의 토출공(22)과 흡입공(21)에 서로 연결되며 최상부측 펌프케이스(204)에는 가장 하부측에 위치한 펌프케이스(201)의 흡입공(21)과 직접 연결되는 유체흡입관(11)과 최상부측 펌프케이스(204)의 토출공(22)과 연결되는 유체토출관(12)이 함께 병설되고, 상기 펌프케이스(20)에 취부되는 각각의 압전액추에이터(30)는 이들이 서로 다른 변위를 이루며 연동하여 동작하도록 콘트롤러(40)가 순차적으로 제어하도록 구성되는 것을 특징으로 하는 압전펌프.The pump case 20 has a plurality of pump cases 201, 202, 203, and 204 stacked on top and bottom thereof, and the suction hole 21 and the discharge hole 22 of the piezoelectric actuator 30 assembled to each pump case 20. ) Is connected to the discharge hole 22 and the suction hole 21 of the pump case 202 stacked on the upper side thereof, and the suction hole of the pump case 201 located at the bottom of the pump case 204 at the uppermost side. A fluid suction pipe 11 directly connected to 21 and a fluid discharge pipe 12 connected to a discharge hole 22 of the uppermost pump case 204 are provided together, and each of the fluid discharge pipes 12 connected to the pump case 20 is provided together. The piezoelectric actuator 30 is a piezoelectric pump, characterized in that the controller 40 is configured to control sequentially so that they operate in conjunction with different displacements. 제3항에 있어서, 상기 펌프케이스(20)의 일측면에는 가이드홈(26)이 형성되고, 상기 가이드홈(26)에는 리드선인출통로(271)가 형성된 가이드블럭(27)이 구비되어 상,하로 적층되는 펌프케이스(20)를 고정 및 분리하도록 구성되는 것을 특징으로 하는 압전펌프.According to claim 3, The guide groove 26 is formed on one side of the pump case 20, The guide groove 26 is provided with a guide block 27 having a lead wire drawing passage 271 is provided, Piezoelectric pump, characterized in that configured to fix and separate the pump case 20 to be stacked below.
KR1020040008045A 2004-02-06 2004-02-06 piezoelectric pump KR100561728B1 (en)

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Publication number Priority date Publication date Assignee Title
KR100990170B1 (en) 2008-10-09 2010-10-29 충북대학교 산학협력단 Piezoelectric pump for microfluid devices
KR20200056896A (en) 2018-11-15 2020-05-25 임정택 Piezoelectric blower and method of manufacturing the same

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KR100930979B1 (en) * 2008-06-05 2009-12-10 한국과학기술연구원 Piezoelectric Valveless Micro Pump
KR101462262B1 (en) 2013-08-14 2014-11-21 주식회사 프로텍 Temperature Control Type Piezoelectric Dispenser
KR101462261B1 (en) 2013-08-14 2014-11-21 주식회사 프로텍 Piezoelectric Dispenser Counting Operation Number

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100990170B1 (en) 2008-10-09 2010-10-29 충북대학교 산학협력단 Piezoelectric pump for microfluid devices
KR20200056896A (en) 2018-11-15 2020-05-25 임정택 Piezoelectric blower and method of manufacturing the same

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