KR100557977B1 - Method for forming dual gate oxide film of semiconductor device - Google Patents

Method for forming dual gate oxide film of semiconductor device Download PDF

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KR100557977B1
KR100557977B1 KR1019990015252A KR19990015252A KR100557977B1 KR 100557977 B1 KR100557977 B1 KR 100557977B1 KR 1019990015252 A KR1019990015252 A KR 1019990015252A KR 19990015252 A KR19990015252 A KR 19990015252A KR 100557977 B1 KR100557977 B1 KR 100557977B1
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gate oxide
oxide film
semiconductor substrate
forming
polysilicon
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KR20000067445A (en
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윤홍식
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주식회사 하이닉스반도체
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
    • H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
    • H01L21/8232—Field-effect technology
    • H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
    • H01L21/823462—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type with a particular manufacturing method of the gate insulating layers, e.g. different gate insulating layer thicknesses, particular gate insulator materials or particular gate insulator implants

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  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)

Abstract

본 발명은 반도체소자의 듀얼 게이트산화막 형성방법에 관한 것으로, 종래에는 제1게이트산화막이 원하는 두께가 되도록 습식식각을 실시할때, 노출된 반도체기판을 손상시킴에 따라 소자특성이 열화되며, 또한 제1,제2게이트산화막의 두께조절이 어렵고, 전체적으로 공정이 복잡한 문제점이 있다. 따라서, 본 발명은 반도체기판 상에 필드산화막을 형성하여 액티브영역을 정의한 후, 그 액티브영역 상에 순차적으로 제1게이트산화막 및 폴리실리콘을 형성하는 공정과; 사진식각공정을 적용하여 폴리실리콘 및 제1게이트산화막의 일부를 식각하여 반도체기판을 노출시키는 공정과; 상기 노출된 반도체기판 상에 제2게이트산화막을 형성한 후, 잔류하는 폴리실리콘을 제거하는 공정으로 이루어지는 반도체소자의 듀얼 게이트산화막 형성방법을 제공함으로써, 종래에 비해 전체적으로 공정이 단순해지며, 제1게이트산화막의 습식식각을 실시하지 않으므로, 반도체기판의 손상을 방지할 수 있고, 제1게이트산화막의 최초 증착두께가 최종적인 두께운 게이트산화막으로 형성되므로, 제1,제2게이트산화막의 두께를 효율적으로 제어할 수 있는 효과가 있다.The present invention relates to a method of forming a dual gate oxide film of a semiconductor device. In the related art, when wet etching is performed such that the first gate oxide film has a desired thickness, the device characteristics are degraded as the exposed semiconductor substrate is damaged. It is difficult to control the thickness of the first and second gate oxide films, and the overall process is complicated. Therefore, the present invention provides a process for forming a field oxide film on a semiconductor substrate to define an active region, and subsequently forming a first gate oxide film and polysilicon on the active region; Applying a photolithography process to etch a portion of the polysilicon and the first gate oxide film to expose the semiconductor substrate; Forming a second gate oxide film on the exposed semiconductor substrate, and then providing a method of forming a dual gate oxide film of a semiconductor device comprising the step of removing the remaining polysilicon, the overall process is simplified compared to the conventional, the first Since the wet etching of the gate oxide film is not performed, damage to the semiconductor substrate can be prevented, and since the initial deposition thickness of the first gate oxide film is formed as a gate oxide film having a final thickness, the thickness of the first and second gate oxide films can be effectively increased. There is an effect that can be controlled by.

Description

반도체소자의 듀얼 게이트산화막 형성방법{METHOD FOR FORMING DUAL GATE OXIDE FILM OF SEMICONDUCTOR DEVICE}TECHNICAL FOR FORMING DUAL GATE OXIDE FILM OF SEMICONDUCTOR DEVICE

도1a 내지 도1d는 종래 반도체소자의 듀얼 게이트산화막 형성방법을 보인 수순단면도.1A to 1D are cross-sectional views showing a method of forming a dual gate oxide film of a conventional semiconductor device.

도2a 내지 도2d는 본 발명의 일 실시예를 보인 수순단면도.2A to 2D are cross-sectional views showing an embodiment of the present invention.

***도면의 주요부분에 대한 부호의 설명****** Explanation of symbols for main parts of drawing ***

11:반도체기판 12:필드산화막11: semiconductor substrate 12: field oxide film

13:제1게이트산화막 14:폴리실리콘13: first gate oxide film 14: polysilicon

15:제2게이트산화막 PR11:감광막 패턴15: second gate oxide film PR11: photosensitive film pattern

본 발명은 반도체소자의 듀얼 게이트산화막 형성방법에 관한 것으로, 특히 반도체기판의 손상을 최소화함과 아울러 공정을 단순화하여 두께가 서로 다른 게이트산화막을 효율적으로 형성하기에 적당하도록 한 반도체소자의 듀얼 게이트산화막 형성방법에 관한 것이다.The present invention relates to a method for forming a dual gate oxide film of a semiconductor device. In particular, the dual gate oxide film of a semiconductor device is suitable for efficiently forming a gate oxide film having a different thickness by minimizing damage to a semiconductor substrate and simplifying a process. It relates to a formation method.

종래 반도체소자의 듀얼 게이트산화막 형성방법을 첨부한 도1a 내지 도1d에 도시한 수순단면도를 참조하여 상세히 설명하면 다음과 같다.A detailed description will now be made with reference to the procedure cross-sectional view shown in FIGS. 1A to 1D attached to a method of forming a dual gate oxide film of a conventional semiconductor device.

먼저, 도1a에 도시한 바와같이 반도체기판(1) 상에 필드산화막(2)을 형성하여 액티브영역을 정의한 후, 그 액티브영역 상에 제1게이트산화막(3)을 형성한다.First, as shown in FIG. 1A, the field oxide film 2 is formed on the semiconductor substrate 1 to define an active region, and then the first gate oxide film 3 is formed on the active region.

그리고, 도1b에 도시한 바와같이 상기 필드산화막(2)에 의해 정의된 액티브영역의 일측 제1게이트산화막(3) 상부에 감광막 패턴(PR1)을 형성하여 제1게이트산화막(3)을 식각한다.As shown in FIG. 1B, the first gate oxide film 3 is etched by forming the photoresist pattern PR1 on the first gate oxide film 3 on the side of the active region defined by the field oxide film 2. .

그리고, 도1c에 도시한 바와같이 상기 감광막 패턴(PR1)을 제거한 후, 상기 제1게이트산화막(3)이 원하는 두께가 되도록 습식식각을 실시한다.After removing the photoresist pattern PR1 as shown in FIG. 1C, wet etching is performed so that the first gate oxide layer 3 has a desired thickness.

그리고, 도1d에 도시한 바와같이 상기 제1게이트산화막(3)이 형성된 반도체기판(1)의 액티브영역 상부전면에 제2게이트산화막(4)을 성장시켜 서로 두께가 다른 제1,제2게이트산화막(3,4)의 형성을 완료한다.As shown in FIG. 1D, the second gate oxide film 4 is grown on the upper surface of the active region of the semiconductor substrate 1 on which the first gate oxide film 3 is formed, and thus the first and second gates having different thicknesses from each other. The formation of the oxide films 3 and 4 is completed.

그러나, 상기한 바와같은 종래 반도체소자의 듀얼 게이트산화막 형성방법은 제1게이트산화막이 원하는 두께가 되도록 습식식각을 실시할때, 노출된 반도체기판을 손상시킴에 따라 소자특성이 열화되며, 또한 제1,제2게이트산화막의 두께조절이 어렵고, 전체적으로 공정이 복잡한 문제점이 있다. However, in the method of forming a dual gate oxide film of a conventional semiconductor device as described above, when wet etching is performed such that the first gate oxide film has a desired thickness, the device characteristics are degraded as the exposed semiconductor substrate is damaged. It is difficult to control the thickness of the second gate oxide film, and there is a problem in that the process is complicated.

본 발명은 상기한 바와같은 종래의 문제점을 해결하기 위하여 창안한 것으로, 본 발명의 목적은 반도체기판의 손상을 최소화함과 아울러 공정을 단순화하여 두께가 서로 다른 게이트산화막을 효율적으로 형성할 수 있는 반도체소자의 듀얼 게이트산화막 형성방법을 제공하는데 있다.The present invention was devised to solve the conventional problems as described above, and an object of the present invention is to minimize the damage to the semiconductor substrate and to simplify the process so as to efficiently form gate oxide films having different thicknesses. The present invention provides a method for forming a dual gate oxide film of a device.

상기한 바와같은 본 발명의 목적을 달성하기 위한 반도체소자의 듀얼 게이트산화막 형성방법은 반도체기판 상에 필드산화막을 형성하여 액티브영역을 정의하고 상기 반도체기판의 상기 액티브영역 상에 열산화에 의해 제1게이트산화막을 형성한 후 상기 제1게이트산화막 상에 폴리실리콘을 형성하는 공정과; 상기 폴리실리콘 및 제1게이트산화막의 일부를 사진식각방법으로 식각하여 상기 반도체기판을 노출시키는 공정과; 상기 반도체기판 상의 노출된 부분을 열산화하여 제2게이트산화막을 형성하고 상기 제1게이트산화막 상에 잔류하는 폴리실리콘을 제거하는 공정을 구비한다.A method of forming a dual gate oxide film of a semiconductor device for achieving the object of the present invention as described above is to form a field oxide film on a semiconductor substrate to define an active region and a first thermal oxidation on the active region of the semiconductor substrate Forming a polysilicon on the first gate oxide film after forming a gate oxide film; Etching a portion of the polysilicon and the first gate oxide film by a photolithography method to expose the semiconductor substrate; And thermally oxidizing the exposed portion on the semiconductor substrate to form a second gate oxide film and to remove polysilicon remaining on the first gate oxide film.

상기한 바와같은 본 발명에 의한 반도체소자의 듀얼 게이트산화막 형성방법을 첨부한 도2a 내지 도2d에 도시한 수순단면도를 일 실시예로 하여 상세히 설명하면 다음과 같다.Referring to the cross-sectional view shown in Figure 2a to 2d attached to a method for forming a dual gate oxide film of a semiconductor device according to the present invention as described above in detail as follows.

먼저, 도2a에 도시한 바와같이 반도체기판(11) 상에 필드산화막(12)을 형성 하여 액티브영역을 정의한 후, 그 액티브영역 상에 제1게이트산화막(13) 및 폴리실리콘(14)을 순차적으로 형성한다. First, as shown in FIG. 2A, the field oxide film 12 is formed on the semiconductor substrate 11 to define an active region, and the first gate oxide film 13 and the polysilicon 14 are sequentially formed on the active region. To form.

그리고, 도2b에 도시한 바와같이 상기 필드산화막(12)에 의해 정의된 액티브영역의 일측 폴리실리콘(14) 상부에 감광막 패턴(PR11)을 형성하여 폴리실리콘(14) 및 제1게이트산화막(13)을 식각하여 반도체기판(11)을 노출시킨다.As shown in FIG. 2B, the photoresist pattern PR11 is formed on one side of the polysilicon 14 of the active region defined by the field oxide film 12 to form the polysilicon 14 and the first gate oxide film 13. Is etched to expose the semiconductor substrate 11.

그리고, 도2c에 도시한 바와같이 상기 감광막 패턴(PR11)을 제거한 후, 노출된 반도체기판(11) 상에 제2게이트산화막(15)을 형성한다. 이때, 상기 제1게이트산화막(13)은 성장되지 않으므로, 최초에 형성되는 두께가 최종적인 두꺼운 게이트산화막이 된다.As shown in FIG. 2C, after the photoresist pattern PR11 is removed, the second gate oxide film 15 is formed on the exposed semiconductor substrate 11. In this case, since the first gate oxide layer 13 is not grown, the first gate oxide layer 13 may be a thick gate oxide layer.

그리고, 도2d에 도시한 바와같이 상기 잔류하는 폴리실리콘(14)을 제거하여 두께가 서로 다른 제1,제2게이트산화막(13,15)의 형성을 완료한다.As shown in FIG. 2D, the remaining polysilicon 14 is removed to complete formation of the first and second gate oxide films 13 and 15 having different thicknesses.

상기한 바와같은 본 발명에 의한 반도체소자의 듀얼 게이트산화막 형성방법은 종래에 비해 전체적으로 공정이 단순해지며, 제1게이트산화막의 습식식각을 실시하지 않으므로, 반도체기판의 손상을 방지할 수 있고, 제1게이트산화막의 최초 증착두께가 최종적인 두께운 게이트산화막으로 형성되므로, 제1,제2게이트산화막의 두께를 효율적으로 제어할 수 있는 효과가 있다.
The dual gate oxide film forming method of the semiconductor device according to the present invention as described above is simpler than the conventional process, and does not perform wet etching of the first gate oxide film, thereby preventing damage to the semiconductor substrate. Since the first deposition thickness of the one-gate oxide film is formed as a gate oxide film having a final thickness, there is an effect of efficiently controlling the thicknesses of the first and second gate oxide films.

Claims (1)

반도체기판 상에 필드산화막을 형성하여 액티브영역을 정의하고 상기 반도체기판의 상기 액티브영역 상에 열산화에 의해 제1게이트산화막을 형성한 후 상기 제1게이트산화막 상에 폴리실리콘을 형성하는 공정과;Forming a field oxide film on the semiconductor substrate to define an active region, forming a first gate oxide film by thermal oxidation on the active region of the semiconductor substrate, and then forming polysilicon on the first gate oxide film; 상기 폴리실리콘 및 제1게이트산화막의 일부를 사진식각방법으로 식각하여 상기 반도체기판을 노출시키는 공정과;Etching a portion of the polysilicon and the first gate oxide film by a photolithography method to expose the semiconductor substrate; 상기 반도체기판 상의 노출된 부분을 열산화하여 제2게이트산화막을 형성하고 상기 제1게이트산화막 상에 잔류하는 폴리실리콘을 제거하는 공정을 구비하여 이루어지는 것을 특징으로 하는 반도체소자의 듀얼 게이트산화막 형성방법.And thermally oxidizing the exposed portion on the semiconductor substrate to form a second gate oxide film and to remove polysilicon remaining on the first gate oxide film.
KR1019990015252A 1999-04-28 1999-04-28 Method for forming dual gate oxide film of semiconductor device KR100557977B1 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101291751B1 (en) * 2011-12-29 2013-07-31 주식회사 동부하이텍 Semiconductor device and method for fabricating the same

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KR100364599B1 (en) * 2001-02-13 2002-12-16 삼성전자 주식회사 Method for fabricating semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101291751B1 (en) * 2011-12-29 2013-07-31 주식회사 동부하이텍 Semiconductor device and method for fabricating the same
US8673734B2 (en) 2011-12-29 2014-03-18 Dongbu Hitek Co., Ltd Semiconductor device and method for fabricating the same

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