KR100548507B1 - 매핑센서의 센서부 구조 - Google Patents
매핑센서의 센서부 구조 Download PDFInfo
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- KR100548507B1 KR100548507B1 KR1020030093905A KR20030093905A KR100548507B1 KR 100548507 B1 KR100548507 B1 KR 100548507B1 KR 1020030093905 A KR1020030093905 A KR 1020030093905A KR 20030093905 A KR20030093905 A KR 20030093905A KR 100548507 B1 KR100548507 B1 KR 100548507B1
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- sensor
- sensor unit
- mapping
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Geophysics And Detection Of Objects (AREA)
Abstract
Description
Claims (3)
- 길이방향으로 길게 연장되고, 상부에 개방부(11)가 형성되며, 내부에 회로기판이 내장되어진 바디(10);상기 바디(10)의 개방부를 폐쇄시키는 커버(20);상기 커버(20)의 상부에 일정간격 이격되게 복수개 설치되고, 수직면(31)의 내부에 발광부(33)와 수광부(34)가 내장되어지며, 하부 결합면(32)에 길이방향으로 장공(35)을 형성함과 아울러 상기 장공(35)을 통해 나사결합시켜 위치를 조정가능하게 하는 센서부(30); 를 포함하는 것을 특징으로 하는 매핑센서의 센서부 구조.
- 제1항에 있어서, 상기 센서부(30)의 폭방향 양측에 간섭방지용 날개(36)를 부착한 것을 특징으로 하는 매핑센서의 센서부 구조.
- 제1항 또는 제2항에 있어서, 상기 센서부(30)의 하부결합면(32)과 수직면(31) 사이에 보강리브(37)가 더 형성된 것을 특징으로 하는 매핑센서의 센서부 구조.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020030093905A KR100548507B1 (ko) | 2003-12-19 | 2003-12-19 | 매핑센서의 센서부 구조 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020030093905A KR100548507B1 (ko) | 2003-12-19 | 2003-12-19 | 매핑센서의 센서부 구조 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
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KR20-2003-0039625U Division KR200345531Y1 (ko) | 2003-12-19 | 2003-12-19 | 매핑센서의 센서부 구조 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20050062905A KR20050062905A (ko) | 2005-06-28 |
KR100548507B1 true KR100548507B1 (ko) | 2006-02-01 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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KR1020030093905A KR100548507B1 (ko) | 2003-12-19 | 2003-12-19 | 매핑센서의 센서부 구조 |
Country Status (1)
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KR (1) | KR100548507B1 (ko) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100782097B1 (ko) | 2006-06-23 | 2007-12-04 | 주식회사 한영넉스 | 다방향 오토 티칭용 매핑센서 |
KR101511917B1 (ko) * | 2014-10-01 | 2015-04-20 | 주식회사 에코프로 | 유해가스 분해장치용 댐퍼 |
US10895561B2 (en) | 2017-12-15 | 2021-01-19 | Industrial Technology Research Institute | Embedded sensor module and sensing device |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100792505B1 (ko) * | 2006-07-07 | 2008-01-10 | 주식회사 한영넉스 | 자동 감도 설정 방식의 매핑 센서 |
-
2003
- 2003-12-19 KR KR1020030093905A patent/KR100548507B1/ko active IP Right Grant
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100782097B1 (ko) | 2006-06-23 | 2007-12-04 | 주식회사 한영넉스 | 다방향 오토 티칭용 매핑센서 |
KR101511917B1 (ko) * | 2014-10-01 | 2015-04-20 | 주식회사 에코프로 | 유해가스 분해장치용 댐퍼 |
US10895561B2 (en) | 2017-12-15 | 2021-01-19 | Industrial Technology Research Institute | Embedded sensor module and sensing device |
Also Published As
Publication number | Publication date |
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KR20050062905A (ko) | 2005-06-28 |
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