KR100542654B1 - Nano-slide integrated Nano-probe array - Google Patents

Abstract

 Nano probe arrays incorporating nano slides are disclosed.

This disclosed nanoprobe array includes a plurality of openings having a nanometer width provided on top of a plurality of through holes formed in a base; And a first slide having a thickness of an optically transparent nanometer unit coupled to the base to cover the plurality of openings, wherein the near field photodetection can be performed sequentially or simultaneously through the respective openings. do.

According to the above configuration, it is possible to provide a nanoprobe array which is easy to manufacture and has a simple structure. The nanoprobe array can be used for large-area scanning, and the resolution can be improved by using a nanoprobe array having a two-layer structure.

Description

Nano-slide integrated Nano-probe array

1 is a view for explaining a method for measuring the optical properties of a nanostructured sample using a conventional optical fiber near-field optical probe.

2 is a view showing a two-dimensional array structure using a conventional optical fiber near-field optical probe.

FIG. 3 illustrates a nanoprobe array incorporating a nano slide according to a first embodiment of the present invention.

4 is a plan view of FIG. 3.

FIG. 5 illustrates a nanoprobe array in which nanoslides are bonded at minimum intervals in accordance with a first embodiment of the present invention.

FIG. 6 illustrates an example in which a metal film is coated on a nano probe array to which a nano slide is coupled according to a first embodiment of the present invention.

FIG. 7A illustrates a nanoprobe array having a two-layer structure in which nano slides are combined according to a second embodiment of the present invention.

7B illustrates an example in which lubricating oil is inserted into a nanoprobe array having a two-layer structure in which nano slides are combined according to a second embodiment of the present invention.

FIG. 8 illustrates the area of the first and second openings facing each other in the two-layer nanoprobe array according to the second embodiment of the present invention.

9A is a cross-sectional view of a nanoprobe array having a two-layer structure in which a plurality of openings are formed according to a second embodiment of the present invention.

9B illustrates a state in which a two-layer nano probe array having a plurality of openings according to a second embodiment of the present invention is turned off by moving an upper or lower nano probe array.

10 is a cross-sectional view of the nano-probe array combined with the nano slide according to the third embodiment of the present invention.

11 is a view for explaining the large-area scanning of the nano-probe array coupled to the nano slide according to the present invention.

<Explanation of symbols for main parts of the drawings>

10,22,27,32,37,51 ... base, 13,15,21,31,52 ... through hole

13a, 15a, 21a, 31a, 52a ... opening, 17,24,28,34,38,55,56 ... slide

20 metal film, 30 lubricant

T ... Sample

The present invention relates to a nano probe array in which nano slides are combined. More specifically, nanometer-thick slides are formed on a plurality of nanometer-wide openings, so that nanostructured samples can be easily placed on the slides, and then sequentially in each opening. The present invention relates to a nano-probe array which enables the measurement of near-field optical properties of a sample at the same time or simultaneously.

The optical microscope used as a tool for observing the shape of a biological sample or a microelement structure has a limitation in resolution due to diffraction limit phenomenon because the object is observed with light. Due to the diffraction limit phenomenon, objects whose size is less than half the wavelength of light cannot be observed optically. To overcome this diffraction limit, a near field optical microscope has emerged that can measure the optical characteristics of an object with a size much smaller than the wavelength of light. In a near-field optical microscope, light passing through an aperture smaller than the wavelength of light is irradiated onto a sample at a distance equal to or less than the size of the aperture. This is to overcome the diffraction limit phenomenon by using the phenomenon that the near field within a distance smaller than the wavelength of light from the sample surface does not cause diffraction.

Therefore, the probe used in the near field optical microscope should be configured so that the opening is very close to the surface of the sample to be observed. The most widely known near field optical probe used in such near field optical microscope is the optical fiber near field optical probe 100 as shown in FIG. 1. The optical fiber near-field optical probe 100 is manufactured by applying a heat to the optical fiber 102 to make it thin or etched with chemical so that one end has a size of several tens to several hundred nanometers. In order to prevent light leaking out of the optical fiber 102, a metal film 104 is deposited on the surface of the optical fiber, and an opening 105 having a diameter of several tens to several hundred nanometers is formed at an end thereof.

The sample 106 is placed on a slide 108 prepared independently of the near field optical probe 100 in order to measure the optical characteristics of the sample 106 of the nanostructure using the optical fiber near field optical probe. The optical fiber near-field optical probe 100 is then approached from the sample 106 to a range of several nanometers to several tens of nanometers, and then the light signal is scanned at each scan point while scanning light against the surface of the sample 106. Measure and synthesize these optical signals to get a full image of the sample.

However, the optical fiber near-field optical probe as described above is very weak, because it is manufactured by forming the optical fiber extremely thin, there is a disadvantage that short life. In addition, an auxiliary device for holding the probe 100 and approaching the sample 106 to a nanometer distance, or a distance maintaining device for maintaining a constant distance from the sample is required. These auxiliary devices are not only very complicated, but when moving the probe using these auxiliary devices, as described above, since the optical fiber 102 is very weak, it is difficult to handle the probe with the optical fiber 102. have. In addition, since the probe 100 is to be moved without being fixed, it is very unstable and there is a fear that the accuracy of the measurement of the optical properties of the sample is deteriorated.

In particular, one of the reasons for the attention of the near-field optical microscope is the applicability to the optical device, for this purpose, a technique for arranging a plurality of near-field optical probes 100a, 100b, 100c in two dimensions as shown in FIG. This is necessary. However, near field optical probes made of optical fiber flow paths have a certain limit in reducing the array spacing (g) between the optical probes due to the diameter of the optical fiber itself, which usually ranges from tens of micrometers to several hundred micrometers. In addition, in order to keep all the probes 100a, 100b, and 100c in close proximity to the sample 106, each probe must be separately provided so that the equipment becomes large and very complicated.

In addition, the application to the optical device requires a technique of forming a two-layer structure by facing the near-field optical probe. However, in the case of constructing a two-layer structure using an optical fiber near field probe, since the tip of the optical fiber near field probe is very sharp, it is very difficult to bring the two probes into close proximity, and the probe may be easily broken.

On the other hand, as mentioned above, in order to obtain a high resolution optical image using a near field probe, the probe should be scanned at a very close distance on the sample to scan the entire surface of the sample. It takes a lot of time to get it. In addition, when the surface of the sample is scanned using a high resolution displacement controller in nanometer units, high resolution position control is possible, but the size of the total scanning area is limited. Therefore, it is a problem to be solved in expanding and industrializing the application of the near field optical microscope to acquire a high resolution image and to perform the fast data processing and the scanning capability of the large area.

The present invention has been made to solve the above problems, a plurality of nanometer openings are arranged at predetermined intervals, a slide is formed on the opening, the nanostructured sample is placed on the slide, through the openings The aim is to provide an array of nanoprobe arrays incorporating nano slides that can measure the near-field optical properties of nanostructured samples sequentially or simultaneously.

In order to achieve the above object, a nano probe array in which a nano slide is coupled according to the present invention comprises: a plurality of openings having a nanometer width provided on an upper portion of a plurality of through holes formed in a base; And a first slide having a thickness of an optically transparent nanometer unit coupled to the base to cover the plurality of openings, wherein the near field photodetection can be performed sequentially or simultaneously through the respective openings. do.

A second slide having a thickness of nanometers is provided to be movable on the first slide.

In order to achieve the above object, the nanoprobe array according to the present invention includes at least one first opening having a width in nanometers provided on an upper portion of the at least one through hole formed in the first base, and to cover the first opening. A first nanoprobe unit having a first slide having a thickness in optically transparent nanometer units bonded over the first base; At least one second opening having a width in nanometers provided on an upper portion of the at least one through hole formed in the second base, and a second slide formed on the second base to cover the at least one second opening, And a second nanoprobe unit disposed to face the first nanoprobe unit.

Preferably, a metal film is deposited on the inner wall of the through hole so as to increase absorption of light.

In addition, at least one of the first nanoprobe unit and the second nanoprobe unit is movable, and the area facing the first opening and the second opening is adjustable.

Hereinafter, with reference to the accompanying drawings, a nano probe array is coupled nano-slides according to a preferred embodiment of the present invention will be described in detail.

The present invention is characterized by a nano-probe array structure in which a plurality of openings are arranged at predetermined intervals, and a nano slide coupled to the plurality of openings is combined.

Referring to FIG. 3, in the nanoprobe array in which the nano slide according to the first embodiment of the present invention is coupled, a plurality of through holes 13 and 15 are formed in the base 10 so that a plurality of openings 13a ( 15a are arranged at predetermined intervals, and a slide 17 is coupled to cover the openings 13a and 15a. The plurality of openings 13a and 15a may be two-dimensionally arranged as shown in FIG. 4. 4 shows an example of a 2x2 arrangement.

The through holes 13 and 15 are formed by etching the base 10 made of silicon. Therefore, the through holes 13 and 15 have a shape in which the width thereof decreases toward the top. Openings 13a and 15a are formed in the upper part of the through-holes 13 and 15, and inlets 13b and 15b are formed in the lower part of the openings 13a and 15a. The through holes 13 and 15 may be formed, for example, in truncated pyramid shape. The plurality of openings 13a and 13b may be arranged at predetermined intervals s, and may be arranged in a two-dimensional form of N × M (where N and M are integers).

The slide 17 is formed on the base 10 to cover at least the openings 13a and 15a and is formed of an optically transparent material. For example, the slide 17 is preferably formed of Si ₃ N ₄ material, and preferably has a thickness (a) of nanometers.

Place the sample (T) in nanometers on the slide 17 and irradiate the light (L) from below or above the opening (13a) (15a) to interact with the sample (T) to generate the light By receiving light in a photodetector (not shown), the optical characteristics of the sample can be measured.

Nano probe array having a two-dimensional array structure as described above can be easily manufactured through a semiconductor process. Nano probe arrays are fabricated by forming probe array patterns with the appropriate size and spacing for the base using a starting photomask for photolithography operations. When the through holes 13 and 15 are formed by etching, the widths of the openings 13a and 15a may be adjusted by adjusting the thickness d and the etching time of the base 10. In this way, an opening having a width in nanometers suitable for a near field optical microscope can be easily formed. In addition, the resolution is determined by the widths of the openings 13a and 15a. Since the manufacturing of the width of the openings can be made extremely small by the semiconductor manufacturing process, the resolution can be increased.

Referring to FIG. 5, the base 10 is formed of a Si layer, where the crystal angle between the Si {111} plane and the {100} plane is θ, the thickness of the base 10, that is, the Si layer is d, and the opening is formed. The width of (13a) (15a) is called n. The minimum spacing s _min between nanoprobes may be obtained when the spacing between neighboring through holes 13 and 15 is minimal. In order for the gap between the through holes 13 and 15 to be minimum, adjacent lower inlets 13b and 13b should be in contact with each other. In this case, the minimum distance between nano probes (s _min ) may be obtained as follows. have.

According to Equation 1, the minimum spacing between the nanoprobes is the opening width (n), the thickness (d) of the base 10 and the etching angle (θ) when one pattern of the nanoprobe array is continuously disposed with a neighboring pattern. Depends on For example, θ is approximately 54.74 degrees, the minimum distance between the probe in the nano-probe array by the thickness (d) and opening width (n) of the etching layer (ie, silicon layer or base) by This is determined. As such, by adjusting the thickness d and the opening width n of the base 10, the minimum distance s _min between the nanoprobes may be adjusted to be suitable for the nanometer structure.

Using the nanoprobe array fabricated as described above, a plurality of nanostructured specimens T are easily placed on the slide 17 and simultaneously or sequentially detect the near-field light generated through the respective openings 13a and 15a. It becomes possible. In addition, it is advantageous to investigate the optical characteristics of a large-area sample through the plurality of openings 13a and 15a.

On the other hand, when the light absorption of the nano-probe is low, light may leak through the openings 13a and 15a, and thus, optical characteristics of the sample may not be accurately measured. At this time, as shown in FIG. 6, the metal film 20 is deposited on the inner walls of the through holes 13 and 15 to increase light absorption to prevent light from leaking around the openings 13a and 15a. can do. The metal film 20 is preferably formed of a material such as Al, Au, Ag or Cr.

The nanoprobe array according to the present invention may be applied to various fields, but may be advantageously applied to, for example, a near field optical microscope. Near-field optical microscopy allows light that passes through an aperture smaller than the wavelength of light to be irradiated onto the sample at a distance similar to the size of this aperture. The optical properties of the sample can be measured. Therefore, as described above, the probe used in the near field optical microscope should be positioned extremely close to the surface of the sample to be observed. In this regard, the nanoprobe array incorporating the nano slide according to the present invention has a very desirable structure for near field optical microscopy. That is, simply placing the sample T on the slide 17 does not need to move the probe close to the sample, and the openings 13a and 15a automatically slide the thickness 17 of the slide 17 from the sample T. Because of the distance of) can be very advantageously applied to near-field optical microscope.

Next, referring to FIG. 7A, a nano slide array having nano slides according to a second embodiment of the present invention may include a first nano probe unit 25 having a first slide 24 and a second slide 28. Is coupled to the second nanoprobe unit 29 is composed of a two-layer structure disposed facing each other.

The first nanoprobe unit 25 has a base 22 having a through hole 21 having at least one first opening 21a therein, and the second nanoprobe unit 29 has at least one The base 27 is provided with a through hole 26 having a second opening 26a. In FIG. 7A, one opening 21a and 26a are formed in the first and second nanoprobe units 25 and 29, respectively.

Here, the nanostructured sample T is attached to the slide 24 toward the first opening 21a or the slide 28 toward the second opening 26a or the first and second openings 21a ( 26a). The first and second openings 21a and 26a serve as probes. Since the slides 24 and 28 are coupled to the openings 21a and 26a, it is possible to bring the two probes as close together as possible without fear of damaging the probes.

When fabricating a two-layer nanoprobe array, there is a method in which the first opening 21a and the second opening 26a are faced to each other, fixedly arranged, and then bonded. Here, it is assumed that the first opening 21a and the second opening 26a have the same area. When the first nanoprobe unit 25 and the second nanoprobe unit 29 are fixedly arranged, the first opening 21a and the second opening 26a may be disposed to exactly face each other. As shown in FIG. 1, the first opening 21a and the second opening 26a may be disposed to face each other slightly. In FIG. 8, the first opening 21a and the second opening 26a are exaggerated for convenience of explanation.

In this case, light passes through an area Z of the first opening 21a and the second opening 26a to measure the optical characteristics of the sample. In this case, the area Z facing the first opening 21a and the second opening 26a serves as a substantial opening. Since the facing area Z has a smaller area than the first opening 21a and the second opening 26a, the resolution is substantially improved. As described above, in the two-layer nanoprobe array, the resolution may be controlled by adjusting the area of the facing region Z of the first opening and the second opening.

Meanwhile, at least one probe unit of the first and second nanoprobe units 25 and 29 may be manufactured to be movable. In this movable structure, near field photodetection can be performed while moving the nanoprobe unit. By moving at least one of the first nanoprobe unit 25 and the second nanoprobe unit 29, the area of the facing area Z of the first opening 21a and the second opening 26a is adjusted. Can be. In a structure capable of moving the nanoprobe unit, the resolution may be selected according to the type of sample to be observed by adjusting the area of the facing area Z as necessary.

In addition, when the area of the first opening 21a and the second opening 26a is different from each other, the opening having the smaller area when the first opening 21a and the second opening 26a are precisely disposed to face each other. The resolution is determined by On the other hand, when the first and second nanoprobe units 25 and 29 are disposed to be offset, the resolution is determined by the area of the region Z where the first and second openings 21a and 26a face each other as described above. This is determined.

Meanwhile, when the first and second nanoprobe units 25 and 29 are movable in the double-layered nanoprobe array as described above, the first nanoprobe unit 25 and the second nanometer as shown in FIG. 7B. It is preferable to apply the lubricating oil 30 between the probe units 29. This is to prevent damage to the other nanoprobe unit during movement of one nanoprobe unit because the first and second nanoprobe units 25 and 29 are in close proximity. The lubricating oil 30 uses one having a refractive index equal to or similar to that of the first and second nano slides 24 and 28. The use of a lubricating oil having a refractive index equal to or similar to that of the nano slide is to ensure that the optical properties do not change when light L passes through the openings 21a and 26a.

Furthermore, in the two-layer nanoprobe array as described above, each nanoprobe unit can be formed in a two-dimensional array structure.

Referring to FIG. 9A, a first nanoprobe unit 35 having a plurality of first openings 31a arranged in two dimensions and a second nanoprobe unit having a plurality of second openings 36a arranged in two dimensions Install (40) to face each other.

The nanoprobe array having a two-layer structure includes a sample T having a large area between the first nanoprobe units 25 and 35 and the second nanoprobe unit 29 and 40, and the first nanoprobe unit ( Large area scanning is possible while moving at least one of the 25 and 35 and the second nanoprobe unit 29 and 40. In addition, as shown in FIGS. 7A and 8A, when the first openings 21a and 31a and the second openings 26a and 36a face each other, they are turned on and the first openings are shown in FIG. 9B. It turns off when 31a and 2nd opening 36a do not face. As such, the two-layer nano probe array may be interconnected between the structure of the upper nano probe unit and the lower nano probe unit, and thus may be applied as an optical device.

Furthermore, the first and second nanoprobe units 35 and 40 having a plurality of first and second openings 31a and 36a are disposed to face each other, and light L causes the plurality of openings to face each other. Through it can be selectively passed or blocked can be manufactured as an optical device. In addition, as described with reference to FIG. 8, at least one of the first and second nanoprobe units 35 and 40 having the plurality of openings may be moved so that the first opening 31a and the second opening 36a are formed. You can control the resolution by adjusting the facing area.

FIG. 10 illustrates a nanoprobe array incorporating nano slides according to a third embodiment of the present invention. In the nanoprobe array according to the third embodiment, a plurality of through holes 52 having openings 52a are formed in the base 51, and the first slide may cover the openings 52a on the base 51. 55 are combined. In addition, a second slide 56 is disposed above the first slide 55 to be movable. Here, it is preferable that lubricating oil is inserted between the first slide 55 and the second slide 56.

The sample T is placed on the second slide 56 and the light L is irradiated from the lower portion so that the light reaches the sample T through the opening 52a. The light L interacts with the sample T and is then detected by a photodetector (not shown) to measure the optical properties of the sample. Meanwhile, the optical characteristics of the sample T having a large area may be measured by scanning while moving the second slide 56.

11 illustrates a process in which the second slide 56 is scanned while being moved. Here, A represents the scanning trajectory of the second slide 56. When the second slide 56 is moved by p from one opening to a neighboring opening in one longitudinal direction in the figure, the total scanning distance is q since it is moved simultaneously for all the openings in the nanoprobe array as a whole. In addition, if the scanning is performed along the trajectory A of the inverted S shape, it is possible to obtain the same effect as the scanning in both the vertical direction and the horizontal direction of the second slide 56 as a whole. In this way, when scanning an N × N nanoprobe array, the actual scanning area is N ² times larger. In other words, when the plurality of openings are arranged in two dimensions, the second slide 56 is moved along the neighboring openings about one of the openings so that light passes through the entire opening and the entire area of the sample T. Can be injected. In this structure in which the probes are two-dimensionally arranged, a large area scanning is possible in which the scanning area increases with the number of arrays of the probes.

In FIG. 11, the scan trajectory by the second slide 56 is shown in an inverted S-shape, but this is exaggerated for convenience of description, and actually scans an area between neighboring openings with an extremely fine trajectory. Scanning trajectories are also possible in various forms as well as inverted S-shapes.

As described above, in the nanoprobe array structure, it is possible to measure the optical characteristics of a sample having a large area with high spatial resolution. In other words, in order to scan at a very high spatial resolution, a fine scan must be performed, but it takes a very long time to scan a minute wide area, and it is impossible to scan the entire area in reality. However, in the array structure as shown in FIG. 10, scanning a small area can produce the same effect as scanning an entire area having a large area, so that a large area scan can be implemented.

As described above, according to the nanoprobe array incorporating the nanoslide according to the present invention, an effect such as bringing the nanoprobe close to the near field may be obtained by placing the nanostructured material on the nanoslide. In addition, by measuring the optical signal sequentially or simultaneously through the plurality of openings it is possible to study the optical properties of the nano-structured material having a large area. In addition, the nano-probe can be easily two-dimensionally arranged through a general semiconductor process, and the gap between neighboring nano-probes can be made very small, so that accurate optical properties of the nano-structured material can be measured with high resolution. have.

In addition, by using the nanoprobe array according to the present invention, since the near field photodetection can be performed sequentially or simultaneously with each probe, a plurality of nanostructured materials such as molecules, cells, semiconductor quantum structures, metal particles, and the like can be applied to the near field optical probe. Direct coupling allows easy measurement of near field optical properties.

On the other hand, by the on-off operation through the opening in the nano-probe array in accordance with the present invention it is possible to manufacture an optical device using a nanostructured material. This is the basis for applying the near-field optical properties of the nano-structured material directly to the optical device, and promotes the industrialization of the optical device by the near-field optical microscope, which was not easy to industrialize. The nanoprobe array according to the present invention enables multiple signal processing of near-field optical devices using nanostructured materials, and can be applied to optical devices such as optical modulators, optical interconnectors, optical switches, and the like.

In addition, by scanning by moving the N × N nanoprobe array, it is possible to scan N ² times larger than the actual scanning area, and the scanning time is shortened as the scanning area is increased.

Furthermore, in the two-layer nanoprobe array, the resolution may be improved by adjusting the area of the region where the openings of the lower nanoprobe unit and the upper nanoprobe unit face each other.

Claims (10)

A plurality of openings having a nanometer width provided on an upper portion of the plurality of through holes formed in the base; And a first slide having a thickness of an optically transparent nanometer unit coupled to the base to cover the plurality of openings, so that the near field photodetection of the sample can be performed sequentially or simultaneously through the respective openings. Nano probe array with nano slides. The method of claim 1, A second slide having a thickness of nanometers is installed to be movable on the first slide, the sample is placed on the second slide, the nano-scale, characterized in that the large area scan is possible according to the movement of the second slide Nano probe array with slides. The method according to claim 1 or 2, The base is formed of a Si layer, and when the crystal angle between the Si {111} plane and {100} plane is θ, the thickness of the base is d, and the width of the opening is n, the minimum distance between neighboring openings and openings S _min is a nano probe array combined nano slide, characterized in that determined by the following conditional formula. (Conditional expression)

At least one first opening having a width in nanometers provided on the at least one through hole formed in the first base, and an optically transparent nanometer thickness coupled to the first base to cover the first opening A first nanoprobe unit having a first slide having a; At least one second opening having a width in nanometers provided on an upper portion of the at least one through hole formed in the second base, and a second slide formed on the second base to cover the at least one second opening, And a second nanoprobe unit disposed to face the first nanoprobe unit. The method according to claim 2 or 4, Nano probe array coupled to the nano slide, characterized in that the lubricant is inserted between the first slide and the second slide. The method of claim 1, 2 or 4, wherein the through hole, Nano probe array coupled to the nano slide, characterized in that formed in a truncated pyramid shape. The method according to any one of claims 1, 2 or 4, And a metal film deposited on the inner wall of the through-hole to increase absorption of light. The method according to claim 2 or 4, The first slide and the second slide is a nano slide array of nano slides combined, characterized in that formed with Si ₃ N ₄ . The method of claim 4, wherein At least one of the first nanoprobe unit and the second nanoprobe unit is movable. The method of claim 4, wherein Nano probe array, characterized in that the area facing the first opening and the second opening is adjustable.

Images