KR100523970B1 - 초고순도 및 고부식성 환경에서 사용 가능한 센서 - Google Patents

초고순도 및 고부식성 환경에서 사용 가능한 센서 Download PDF

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Publication number
KR100523970B1
KR100523970B1 KR10-2003-7000876A KR20037000876A KR100523970B1 KR 100523970 B1 KR100523970 B1 KR 100523970B1 KR 20037000876 A KR20037000876 A KR 20037000876A KR 100523970 B1 KR100523970 B1 KR 100523970B1
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KR
South Korea
Prior art keywords
diaphragm
sensor
back plate
nonporous
sensing member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
KR10-2003-7000876A
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English (en)
Korean (ko)
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KR20030015892A (ko
Inventor
피터슨톰
디아즈디아즈조지안드레스
쿠치제럴드알
Original Assignee
인티그리스, 인코포레이티드
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Publication of KR20030015892A publication Critical patent/KR20030015892A/ko
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0681—Protection against excessive heat
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
KR10-2003-7000876A 2000-07-20 2001-07-19 초고순도 및 고부식성 환경에서 사용 가능한 센서 Expired - Lifetime KR100523970B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/620,007 2000-07-20
US09/620,007 US6612175B1 (en) 2000-07-20 2000-07-20 Sensor usable in ultra pure and highly corrosive environments
PCT/US2001/022919 WO2002008713A1 (en) 2000-07-20 2001-07-19 Sensor usable in ultra pure and highly corrosive environments

Publications (2)

Publication Number Publication Date
KR20030015892A KR20030015892A (ko) 2003-02-25
KR100523970B1 true KR100523970B1 (ko) 2005-10-26

Family

ID=24484201

Family Applications (1)

Application Number Title Priority Date Filing Date
KR10-2003-7000876A Expired - Lifetime KR100523970B1 (ko) 2000-07-20 2001-07-19 초고순도 및 고부식성 환경에서 사용 가능한 센서

Country Status (9)

Country Link
US (1) US6612175B1 (enExample)
EP (1) EP1311818B1 (enExample)
JP (1) JP2004506180A (enExample)
KR (1) KR100523970B1 (enExample)
CN (1) CN1225643C (enExample)
AU (1) AU2001280659A1 (enExample)
DE (1) DE60130471T2 (enExample)
TW (1) TW593994B (enExample)
WO (1) WO2002008713A1 (enExample)

Cited By (2)

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Publication number Priority date Publication date Assignee Title
CN112179557A (zh) * 2019-07-02 2021-01-05 阿自倍尔株式会社 压力传感器
CN112345149A (zh) * 2019-08-08 2021-02-09 阿自倍尔株式会社 压力传感器

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ITTO20121130A1 (it) * 2012-12-21 2014-06-22 Metallux Sa Sensore di pressione
KR102208154B1 (ko) 2013-06-07 2021-01-27 엔테그리스, 아이엔씨. 보호층을 구비한 센서
TWI644712B (zh) 2016-06-01 2018-12-21 恩特葛瑞斯股份有限公司 具有整合式靜電放電抑制之流體迴路
DE102016119430A1 (de) * 2016-10-12 2018-04-12 Epcos Ag Anlegetemperaturmessfühler
EP3367074A1 (en) * 2017-02-23 2018-08-29 Kamstrup A/S Electronic flow meter including a built-in pressure sensor
CN108151953A (zh) * 2017-12-21 2018-06-12 中国电子科技集团公司第四十八研究所 一种密封转接壳体、差压芯体及密封转接壳体制作方法
EP3791100B1 (en) 2018-05-07 2023-11-22 Entegris, Inc. Fluid circuit with integrated electrostatic discharge mitigation
MY210138A (en) 2019-05-23 2025-08-28 Entegris Inc Electrostatic discharge mitigation tubing
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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112179557A (zh) * 2019-07-02 2021-01-05 阿自倍尔株式会社 压力传感器
KR20210003666A (ko) * 2019-07-02 2021-01-12 아즈빌주식회사 압력 센서
KR102358830B1 (ko) * 2019-07-02 2022-02-07 아즈빌주식회사 압력 센서
US11313746B2 (en) 2019-07-02 2022-04-26 Azbil Corporation Pressure sensor having a surface of a diaphragm held in a chemically inactive state
CN112345149A (zh) * 2019-08-08 2021-02-09 阿自倍尔株式会社 压力传感器
KR20210018041A (ko) * 2019-08-08 2021-02-17 아즈빌주식회사 압력 센서
KR102376829B1 (ko) * 2019-08-08 2022-03-21 아즈빌주식회사 압력 센서

Also Published As

Publication number Publication date
DE60130471T2 (de) 2008-06-12
KR20030015892A (ko) 2003-02-25
EP1311818A1 (en) 2003-05-21
DE60130471D1 (de) 2007-10-25
US6612175B1 (en) 2003-09-02
TW593994B (en) 2004-06-21
CN1461407A (zh) 2003-12-10
AU2001280659A1 (en) 2002-02-05
WO2002008713A1 (en) 2002-01-31
CN1225643C (zh) 2005-11-02
JP2004506180A (ja) 2004-02-26
EP1311818A4 (en) 2003-09-10
EP1311818B1 (en) 2007-09-12

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