KR100496937B1 - Apparatus and methods of contactless voltage measurements for electronic circuits - Google Patents

Abstract

An apparatus and method for contactless electronic circuit voltage measurement are disclosed. The non-contact electronic circuit voltage measuring device is installed at a predetermined position of a chamber, an electron gun for generating an electron beam, a pad having a circuit pattern on which an electron beam is incident, a sample having a connecting line electrically connecting the pads, and an incident path of the electron beam. Electron spectroscopy means for analyzing the distribution of secondary electron energy emitted from the circuit pattern of the sample, secondary electron detection means installed in the chamber and secondary electron detection means for collecting secondary electrons emitted through the electron spectroscopic means from the circuit pattern of the sample, and secondary electrons And a voltage measuring means connected to the detecting means to measure the voltage pattern of the secondary electrons detected therefrom and measuring a circuit pattern voltage of the sample, wherein the electron spectroscopic means is a secondary having a constant energy level or higher among secondary electrons emitted from the circuit pattern of the sample. Under the electronic storage grid and electronic storage grid that only pass electrons An electron extraction lattice network, which is connected to the electron extraction lattice network, which is connected to the electron extraction lattice network, is applied to the electron extraction lattice network so that the secondary electrons emitted from the sample can be attracted to the electron storage lattice network. Ramp-and-tooth of a frequency of tens to hundreds of hertz and ± several tens of volts, connected to the first power supply means and to the electronic low lattice network so that only secondary electrons having a predetermined constant energy level can reach the secondary electron detection means. And a second power supply means for applying one of the type voltages.

Description

Apparatus and methods of contactless voltage measurements for electronic circuits

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electronic circuit measuring apparatus and method capable of measuring voltage and various electrical characteristics of circuit patterns provided on various electronic circuit boards such as semiconductor chips, printed circuit boards, multi-chip module substrates, ceramic substrates, and the like. The present invention relates to a non-contact electronic circuit measuring apparatus and method for measuring the voltage of an electronic circuit in a non-destructive and non-contact manner using an electron beam emitted from an electron gun of a scanning electron microscope.

In general, a method of measuring the electrical characteristics of the electronic circuit or the voltage of the circuit pattern, a method of measuring the voltage of the circuit pattern by contacting the circuit pattern using a probe and looking into the microscope automatic wafer probe station (automatic wafer probe station) In addition, a contact method such as a 4-point probe station is used.

In the method of measuring the voltage of a circuit pattern using a probe made of such a contact gold, the circuit pattern may be damaged due to friction with the probe while measuring the voltage by physically contacting the probe with the circuit pattern. . In particular, when the size of the circuit pattern is an ultra-fine circuit pattern having a size of micrometer (μm), the size of the probe is large so that there is a technical limitation to measure the voltage of the microcircuit, which is impossible to measure. The conventional measurement method using a probe has a problem that the measurement speed is very slow because the contact probe is moved while contacting and measuring the voltage. In addition, although a sample measuring method of measuring only a part of a circuit pattern having a large number of nets is used, this includes a problem that it is impossible to measure the voltage and its electrical waveform for the entire circuit pattern or a specific circuit pattern in question.

Accordingly, the present invention has been made to solve the above problems, and irradiates the electron beam emitted from the electron gun of the scanning electron microscope to the surface of the electronic circuit board and collects secondary electrons emitted from the surface to collect the secondary electron energy. It is an object of the present invention to provide a non-contact electronic circuit voltage measuring apparatus and method capable of measuring microcircuit voltage at high speed, non-destructive and non-contact without measuring metal contact with the surface of the electronic circuit.

In addition, the present invention measures the induced voltage on the surface of the circuit pattern by measuring the energy of the secondary electrons emitted from the surface as the electron beam emitted from the electron gun is incident on the surface of the circuit pattern of the circuit pattern in the non-contact state of the probe It is another object of the present invention to provide a non-contact electronic circuit voltage measuring apparatus and method capable of inspecting a circuit pattern of less than a micrometer (μm) unit by measuring open and short circuits and measuring quantitatively easily and quickly.

Non-contact electronic circuit voltage measuring apparatus according to the present invention for achieving the above object comprises a chamber having an internal vacuum; An electron gun installed in the chamber to generate an electron beam; A sample positioned below the chamber, the pad having a circuit pattern on which an electron beam is incident, and a connection line electrically connecting the pads; Electron spectroscopic means for analyzing the distribution of secondary electron energy emitted from a circuit pattern of the sample by being installed at a predetermined position of the incident path of the electron beam; Secondary electron detection means installed in the chamber and collecting secondary electrons emitted through the electron spectroscopic means from a circuit pattern of a sample; And voltage measurement means connected to the secondary electron detection means and measuring voltage patterns of the secondary? U>? / U> detected therefrom to measure a circuit pattern voltage of the sample, wherein the electron spectroscopic means each includes a plurality of wires. Are formed to cross, but the electron incidence hole is formed at the center thereof, and is formed in a flat plate shape in which predetermined portions are stacked, and the electron blocking lattice network passes only secondary electrons having a predetermined energy level among secondary electrons emitted from the circuit pattern of the sample. And an electron extraction lattice network disposed below the electronic storage lattice network to assist in the emission of secondary electrons. First power supply means connected to the electron extraction grid to apply a positive DC voltage of several hundred volts to the electron extraction grid so that secondary electrons emitted from a sample can be attracted to the electron blocking grid; And a frequency of tens to hundreds of hertz and ± several tens of volts and sawtooth voltages connected to the electronic low lattice network so that only secondary electrons having the predetermined energy level can reach the secondary electron detecting means. And a second power supply means for applying one. The non-contact electronic circuit voltage measuring method according to the present invention for achieving the above object comprises the steps of: (a) generating an electron beam from an electron gun installed in a chamber in a vacuum state; (b) focusing the electron beam generated from the electron gun, passing through the electron blocking lattice network and the electron extraction lattice network formed in a flat plate having electron injection holes formed in the center of each of them, and stacking predetermined portions, and entering the circuit pattern of the sample; Making a step; (c) applying an anode DC voltage of several hundred volts or more to the electron extraction grid to assist in external emission of secondary electrons from the circuit pattern of the sample; (d) A frequency of several tens to several hundred hertz and ± several dozens of frequencies in the electronic ground lattice network so that only secondary electrons having a predetermined energy level or higher are emitted through the electronic ground lattice network located above the electron extraction grid network. Applying one of the ramped and serrated voltages of the volts; (e) collecting only secondary electrons above a certain energy level passed from the electronic low qualification network; And (f) measuring the voltage of the circuit pattern of the sample by discriminating the energy change of the secondary electrons collected in step (e).

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings of FIG. 1.

The non-contact electronic circuit voltage measuring device according to the present invention is implemented so that the voltage of a circuit pattern can be quickly and accurately checked without contacting the circuit pattern by using an electron beam and an electron spectrometer. In this embodiment, as shown in FIG. As described above, the chamber 115 is formed in a vacuum state, an electron gun 120 installed above the chamber 115 to generate an electron beam, and a primary electron provided at a lower portion of the electron gun 120 and emitted therefrom. An electron beam concentrator 131 for focusing the electron beam 121 is provided. In this case, the electron beam concentrator 131 usually uses an objective lens.

In addition, a lower portion of the chamber 115 may include a sample 101 having a circuit pattern formed thereon and the sample 101 placed on an upper end thereof so that the electron beam 121 may be incident on the circuit pattern. When the xyz position shift block 102 for adjusting the position and the electron beam focused by the electron beam concentrator 131 are incident on the circuit pattern of the sample 101, secondary electrons are emitted to the circuit pattern of the sample. A sample power source 105 is provided which is connected and energizes it.

here. The primary electrons of the electron beam incident on the circuit pattern emit secondary electrons within 0.01 micron of the incident surface thickness. The secondary electrons have an energy distribution of less than 50 eV, where the energy magnitude of the secondary electrons varies with the voltage applied to the circuit surface.

A secondary electron detector 133 is installed in the chamber 115 to collect secondary electrons emitted from the circuit pattern of the sample 101, and the secondary electron detector () is located at a predetermined position of the incident path of the electron beam 121. A planar electron spectrometer 420 is installed to analyze the distribution of secondary electron energy collected by 133.

In addition, the secondary electron detector 133 includes a CRT screen device 135 for inspecting the state of the circuit pattern surface from the secondary electrons 122 detected therefrom, and a signal from the secondary electrons detected by the secondary electron detector 133. Oscilloscopes 137 for reading waveforms are sequentially connected.

The planar electron spectrometer 420 is formed by crossing a plurality of wires 202 so as to have a mesh (#) of a predetermined size as shown in FIG. It is a structure laminated | stacked and attached at intervals of several mm. This allows more secondary electrons to reach the secondary electron detector 133 between the mesh spaces 201 woven by the crossed wires.

In this embodiment, the planar electron spectrometer 420 has a size capable of accommodating all the secondary electrons emitted from the sample, but is composed of a double planar lattice network 204 formed by stacking two networks. Is the electron blocking lattice network 104 that passes only secondary electrons above a certain energy, and the lower network is an electron extraction lattice that helps to release secondary electrons so that all secondary electrons emitted from the sample surface reach the electron blocking lattice network 104. Network 103. Here, the electron incidence hole 203 has a size through which primary electrons can pass, that is, any one of 13 to 17 mm in diameter, and generally has a size of about 15 mm. In addition, the electronic blocking grid 104 is connected to a signal generator 106 for applying a voltage so as to change its energy level. In the signal generator 106, as shown in FIG. 4, a ramp type or a sawtooth voltage 400 having a frequency of several tens to several hundred hertz (Hz) and ± several tens of volts is applied to the electronic storage grid. 104 to induce a change in the magnitude of the electron energy passing through the electron blocking grid network (104). Secondary electrons having energy greater than the formed potential are allowed to pass through, and all the passed secondary electrons are collected by the electron detector, thereby changing the voltage applied to the electron storage grid network 104 from a negative voltage to a positive voltage. The amount of secondary electrons passing through changes. The amount of secondary electrons passing through is represented as an integral signal when viewed from the secondary electron detector 133, that is, the "S" curve is displayed. From this, the waveform formed by the secondary electrons collected by the secondary electron detector 133 is measured with a digital oscilloscope, and the "S" curve shown in FIG. 7 appears, so that the voltage on the sample surface changes due to the voltage change of the circuit pattern. If so, the "S" curve will appear to move.

The waveform of the secondary electrons collected through the electron spectrometer 420 configured as described above can be made into an S curve, and the S circuit is moved as the voltage of the circuit pattern changes, thereby measuring the electronic circuit pattern. Will be able to measure the voltage.

As shown in FIG. 3, the electronic circuit used as the sample 101 is composed of a pad 205 of the chip and a connection line 206. In the sample power source 105, a voltage is applied to the pad 205. By changing the applied voltage, the S curve appearing in the oscilloscope 137 is moved in parallel horizontally in accordance with the voltage 105 applied to the sample 101.

Referring to the measuring method of the electronic circuit according to the present invention configured as described above are as follows.

First, after the position of the sample 101 is moved to an incident position by using the x-y-z position movement block 102, the chamber 115 is in a vacuum state.

In the vacuum state of the chamber 115, the battery beam 121 emitted through the electron gun 120 of the scanning electron microscope penetrates into the sample 101 through the electron beam concentrator 131 and is discharged from the sample. 122 reaches the secondary electron detector 133 through the electron extraction grating network 103 and the electron blocking grating network 104 of the electron spectrometer 420 to obtain an image of the sample surface. In this case, the obtained image signal is inspected by the CRT display device 135 to detect the circuit pattern surface state, and the waveform of the image signal is obtained using the digital oscilloscope 137. In the process, the electron extraction lattice network 103 installed at the incident path of the electron beam has a high DC voltage 107 high enough to attract all the secondary electrons emitted from the sample 101 to the secondary electron detector 133. Add. In addition, the electron blocking grating network 104 has a positive voltage and a negative voltage generated by the signal generator 106 to adjust only secondary batteries having a certain amount of energy to reach the secondary electron detector 133. Apply a voltage waveform 400 in the form of a lamp that can be applied to both.

Accordingly, as shown in FIG. 4, a curve 501 having an “S” shape appears in the digital oscilloscope 137. The "S" curve 420 moves in parallel in the horizontal direction according to the voltage of the sample power source 105 applied to the sample 101. By measuring the shifted amount, it is possible to measure the magnitude of the quantitative voltage flowing in the electronic circuit or the substrate.

5 shows the secondary electron energy distribution 305 according to the voltage applied to the sample and the lattice network 204 when the sample 101 is measured using the scanning electron microscope and the planar electron spectrometer 420. . The energy of the secondary electrons emitted from the sample 101 is above the Fermi level 301 of the sample by AB size. Thus, the energy distribution 305 of the secondary electrons is present beyond the energy level 306 in the required vacuum state where the secondary electrons are released out of the metal or semiconductor material. At this time, when a high positive voltage 107 is applied to the electron extraction lattice network 103, the Fermi level 311 is lowered by the extraction lattice network potential from the B 301 to the B '311, and thus the secondary electrons emitted from the sample ( 122 all escape from the sample 101. In addition, Fermi level 301 is moved by B '' (321) from B '(311) in the electronic ground lattice network 104 applied the ramp waveform 400 or sawtooth waveform voltage and the extraction grid network The secondary electrons 122 that escape from the secondary electron detector only have the secondary electrons 325 having a larger energy than the Fermi level B '' 321 of the electron blocking grid 104 to escape the electron extraction grid 103. 133 will be collected. At this time, the secondary electron energy distribution 325 that passes through the electronic storage lattice network 104 is adjusted by adjusting the potential of the electronic storage lattice network from the reference level 310, 0 to the Fermi level 321, B ''. Can be.

6 shows the voltage waveform 400 input from the signal generator 106 to the electronic low lattice grid 104. The waveform 400 has a ramp shape or a sawtooth shape, has a voltage amplitude of AB and a signal period of CD.

7 shows an S curve 501 which is a signal waveform obtained by using a scanning electron microscope and a planar electron spectrometer 420. The S curve 501 is a horizontal parallel movement of the curve in accordance with the voltage applied to the sample. In addition, as the voltage of the sample power source 105 is changed, the horizontally moved "S" curves 502 and 503 can be seen, and the voltage applied to the sample is measured quantitatively from the horizontal movement degree of the "S" curve 501. can do.

The present invention described above is not limited to the above-described embodiments and the accompanying drawings, and various substitutions and changes may be made without departing from the technical spirit of the present invention. It will be apparent to those who have

As described above, according to the present invention, voltage measurement of an electronic product, such as an electronic circuit board, is performed in a non-contact and non-destructively manner by using an electron beam and an electron spectrometer of a scanning electron microscope without breaking due to physical contact between a semiconductor chip, a probe and a sample. Since there is no contact of the probe, it is possible to measure the voltage in the electronic circuit which is finer than the conventional voltage measuring method using the probe and can measure it quickly. In addition, it is easy to manufacture an electron spectrometer required for voltage measurement and is inexpensive, and the voltage information is obtained by using the structure of the electron spectrometer and the electron beam of the scanning electron microscope, and quantitatively measuring the voltage of the electronic circuit under the above measurement conditions. The electrical characteristics of the can be known reliably. In addition, by applying a ramp-type or sawtooth type voltage to the electronic low lattice network, only secondary electrons having a predetermined energy level are passed through the secondary electrons emitted from the circuit pattern of the sample. It is possible to generate the measurement signal by dividing the energy distribution of the secondary electrons, and as a result, it is possible to continuously output the measured voltage value to the oscilloscope without time delay.

Therefore, the measurement method of the present invention can perform voltage measurement inspection on the entire product in the production process of electronic products, and even minute electronic circuits such as memories and IC chips can measure voltage characteristics, thereby improving product reliability and productivity. It has an effect that can be improved.

1 is a schematic view showing an embodiment of a non-contact electronic circuit measuring apparatus according to the present invention.

Fig. 2 is a schematic diagram of a double planar grid that is a main part of the present invention.

3 is a perspective view showing a wafer sample used in the present invention.

4 is a state diagram in which the electronic circuit voltage due to the secondary electron energy change is measured in a non-contact manner using the electron spectroscope of the present invention.

5 is a graph showing secondary electron energy distribution according to a work function of a sample and a lattice plane;

Fig. 6 is a ramp waveform diagram of an input voltage across the electronic ground grid.

7 is an S curve graph for the detected secondary electrons.

* Explanation of symbols for main parts of the drawings

101: sample 102: x-y-z position movement block

103: electronic extraction grid network 104: electronic storage grid

105: sample power source 106: signal generator

107: electronic extraction grid network power supply 115: chamber

120: electron gun 121: electron beam

122: secondary electron 131: electron beam focusing

133: secondary electron detector 135: CRT display device

137: oscilloscope 201: gap

202: wire 203: electron incidence hole

204: double plane grid 205: pad

206: connecting line 301: Fermi level of the sample

305: secondary electron energy distribution

306: energy level in the vacuum state of the sample

310: reference level 311: Fermi level of the electronic extraction grid

316: energy level in vacuum in the electron extraction grid

321: Fermi level of the e-storing grid

325: Secondary electron energy distribution through the electron storage grid

326: energy level in the vacuum state in the electronic storage grid

400: input waveform 420: electron spectrometer

501: S curve of -5V voltage applied to the electronic ground grid

502: S curve of 0V voltage applied to the electronic ground grid

503: S curve of + 5V voltage applied to electronic ground grid

Claims (13)

A chamber having an internal vacuum; An electron gun installed in the chamber to generate an electron beam; A sample positioned below the chamber, the pad having a circuit pattern on which an electron beam is incident, and a connection line electrically connecting the pads; Electron spectroscopic means for analyzing the distribution of secondary electron energy emitted from a circuit pattern of the sample by being installed at a predetermined position of the incident path of the electron beam; Secondary electron detection means installed in the chamber and collecting secondary electrons emitted through the electron spectroscopic means from a circuit pattern of a sample; And a voltage measuring means connected to the secondary electron detection means and measuring the circuit pattern voltage of the sample by examining the voltage waveform of the secondary electrons detected therefrom. The electron spectroscopic means It is formed by intersecting a plurality of wires each , the electron incidence hole is formed in the center and formed into a flat plate laminated a predetermined portion, passing only secondary electrons of a certain energy level of the secondary electrons emitted from the circuit pattern of the sample. An electron extraction lattice network and an electron extraction lattice network disposed below the electronic lattice lattice network to help release secondary electrons; First power supply means connected to the electron extraction grid for applying an anode DC voltage of several hundred volts to the electron extraction grid so that secondary electrons emitted from the sample can be attracted to the electron blocking grid; And One of the ramp type and sawtooth voltages having a frequency of several tens to several hundred hertz and ± several tens of volts so that only the secondary electrons having the predetermined energy level can reach the secondary electron detecting means primarily connected to the electronic storage lattice network. Non-contact electronic circuit voltage measurement device comprising a second power supply means for applying a. The method of claim 1, An electron beam focusing means provided at a lower portion of the electron gun to connect an electron beam emitted therefrom; Contactless electronic circuit voltage measurement device further comprising. The method according to claim 1 or 2, And a x-y-z position adjusting means for adjusting the position of the sample so that the sample is placed on top of the sample and the electron beam focused by the electron beam focusing means is incident on the circuit pattern of the sample. The method of claim 1, The voltage measuring means An oscilloscope for reading a signal waveform from the secondary electrons detected by the secondary electron detection means; And CRT display device for inspecting the state of the circuit pattern surface from the detected secondary electrons Contactless electronic circuit voltage measuring apparatus comprising a. delete The method of claim 1, A contactless electronic circuit voltage measuring device having a diameter of 13 mm to 17 mm in the electron incidence hole of the grid. delete delete (a) generating an electron beam from an electron gun installed in a vacuum chamber; (b) focusing the electron beam generated from the electron gun, passing through the electron blocking grating network and the electron extraction grating network formed into a flat plate having a predetermined position stacked with electron incidence holes in the center thereof, and entering the circuit pattern of the sample; Making a step; (c) applying an anode DC voltage of several hundred volts or more to the electron extraction grid to assist in external emission of secondary electrons from the circuit pattern of the sample; (d) A frequency of several tens to several hundred hertz and ± several dozens of frequencies in the electronic ground lattice network so that only secondary electrons having a predetermined energy level or higher are emitted through the electronic ground lattice network located above the electron extraction grid network. Applying one of the ramped and serrated voltages of the volts ; (e) collecting only secondary electrons above a certain energy level passed from the electronic low qualification network; And (f) measuring the voltage of the circuit pattern of the sample by discriminating the energy change of the secondary electrons collected in step (e). delete delete The method of claim 9, wherein step (f) (f1) inspecting a circuit surface state from the secondary electrons collected in step (e) through a CRT display device; And and (f2) measuring the voltage quantitatively by reading the detected waveform of the secondary electrons in an "S" shape through an oscilloscope. The method of claim 12, wherein step (f2) and (f21) quantitatively measuring the voltage applied to the sample with the degree that the "S" curve is moved horizontally.