KR100492544B1 - Optical receiver and transmitter with integrated variable optical attenuator - Google Patents

Abstract

According to an aspect of the present invention, there is provided a conventional optical receiver and an optical transmitter comprising: an optical bench having a diode accommodating portion and an optical attenuator accommodating portion formed on an upper surface thereof; A light receiving part mounted on the diode receiving part; An optical attenuator mounted on the optical attenuator accommodating part and configured to output output light toward the optical receiver; The optical attenuator is controlled to control the amount of incident light coming from the optical input unit of the commutator and the commutator is fixed to one end of the commutator and the light input end of the optical attenuator formed using MEMS technology An optical attenuator-integrated optical receiver including a member, and an optical bench having a diode receiving portion and an optical attenuator receiving portion formed on an upper surface thereof; An optical transmitter mounted on the diode receiver; An optical attenuator mounted on the optical attenuator accommodating part, the optical attenuator configured to face an optical input part; The optical attenuator includes a comb actuator formed using MEMS technology, and an adjustment member configured to be fixed to one end of the comb actuator and to flow, and to control the amount of light input from the optical input end of the optical attenuator to the output end. By providing an optical attenuator integrated optical transmitter including a, the variable optical attenuator is directly formed integrally, it is possible to reduce the size of the optical device, to enable mass production to reduce the production cost.

Description

Optical attenuator integrated optical receiver and optical transmitter {OPTICAL RECEIVER AND TRANSMITTER WITH INTEGRATED VARIABLE OPTICAL ATTENUATOR}

The present invention relates to an optical receiver and an optical transmitter, and in particular, a variable optical attenuator is integrally formed to reduce the size of the optical device, and mass production is possible, thereby reducing the production cost of the variable optical attenuator integrated optical receiver and optical Relates to a transmitter.

Recently, the information-related technology is rapidly developing with the development of high speed optical fiber communication technology capable of transmitting and receiving a large amount of information. In particular, in accordance with the trend of speeding up the transmission of multimedia information including various types of data such as moving images, voice signals and text signals, the emergence of interactive interactive communication environment, and the explosive increase in the number of subscribers, communication networks using conventional copper transmission lines In the face of limitations, an optical signal communication network capable of high-speed transmission at high carrier frequencies is emerging as an alternative.

With the development of optical communication technology, the importance of variable optical attenuators is becoming more important, in which each element is driven by a wide range of optical power, from high output signals from transmitters and amplifiers to weak signals entering receivers. Because it becomes. Fixed optical attenuators are used to reduce optical power in short-range optical fiber transmission networks, and variable attenuators are developed to control the size of optical signals for multiple channels in WDM networks.

Optical switch devices including such optical attenuators are currently being developed using devices such as bulk opto-mechanical switches, liquid crystal switches, lithium niobate switches, and thermo-optic switches using waveguides. However, there is a disadvantage in that it does not satisfy the conditions such as low power consumption, ultra-light weight and high mechanical, optical characteristics maintenance.

On the other hand, the existing communication network that transmits and receives electrical signals was able to configure the subscriber data interface inexpensively using integrated circuits such as logic circuits, amplifiers, and switches. On the other hand, in the case of an optical communication network using light as an information transmission signal, the interface connecting the subscriber and the repeater or the communication service provider is composed of an optical connector module composed of an optical switch, an optical diode, and a laser diode, not a logic integrated circuit using an electronic circuit. Should be.

That is, the conventional optical transceiver and the optical attenuator are composed of individual components, and these are connected to each other to form a module. Therefore, the size of the parts is large, there is a disadvantage that the price is expensive due to the precision processing and manufacturing method depending on the assembly of each part.

The present invention has been made to solve the above problems, the variable optical attenuator integrated optical receiver is directly formed integrally, can reduce the size of the optical device, the mass production is possible to reduce the production cost of the variable optical attenuator integrated optical receiver and optical It is an object to provide a transmitter.

In order to achieve the above object, the present invention provides an optical bench including a diode accommodating portion and a light attenuator accommodating portion formed on an upper surface thereof; A light receiving part mounted on the diode receiving part; An optical attenuator mounted on the optical attenuator accommodating part and configured to output output light toward the optical receiver; The optical attenuator is controlled to control the amount of incident light coming from the optical input unit of the commutator and the commutator is fixed to one end of the commutator and the light input end of the optical attenuator formed using MEMS technology An optical attenuator integrated optical receiver comprising a member.

On the other hand, the present invention is an optical bench and the diode receiving portion and the optical attenuator receiving portion formed on the upper surface; An optical transmitter mounted on the diode receiver; An optical attenuator mounted on the optical attenuator accommodating part, the optical attenuator configured to face an optical input part; The optical attenuator includes a comb actuator formed using MEMS technology, and an adjustment member configured to be fixed to one end of the comb actuator and to flow, and to control the amount of light input from the optical input end of the optical attenuator to the output end. It provides an optical attenuator integrated optical transmitter comprising a.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

However, in describing the present invention, a detailed description of known functions or configurations will be omitted in order not to disturb the gist of the present invention.

1 to 6 show the structure of the first embodiment of the present invention, FIG. 1 is a perspective view of a variable optical attenuator integrated optical receiver, FIG. 2 is a plan view of the variable optical attenuator integrated optical receiver of FIG. 2 is a cross-sectional view taken along line III-III of FIG. 2, FIG. 4 is a perspective view of the light receiver of FIG. 1, FIG. 5 is an exploded perspective view of the light attenuator of FIG.

As shown in these figures, the variable optical attenuator integrated optical receiver of the first embodiment of the present invention includes an optical bench 1 and an optical attenuator 2 formed on the upper surface of the optical bench 1 and formed using MEMS technology. ), An optical input end 3 provided on an upper surface of the optical attenuator 2, and an optical receiver 4 provided on an upper surface of the optical bench 1 in a direction in which light input from the optical input end 3 is bent. It is composed.

The optical bench 1 has a flat plate shape, and is formed by recessing the diode receiving part 12 so that the light receiving part 4 can be seated at a predetermined position, and the optical attenuator 2 is positioned at a constant position. The attenuator accommodating part 13 is recessed and formed to be seated, and the light passage 14 is formed in the partition wall 15 between the diode accommodating part 12 and the attenuator accommodating part 13 so that light can pass therethrough. do. Solder 121 is installed on the bottom surface of the diode receiver 12 to fix the optical receiver 4, and the light attenuator 2 may also be fixed to the bottom surface of the attenuator receiver 13. Solder 131 is installed so that.

The light receiving unit 4 is composed of a diode fixing block 41 seated and fixed to the diode receiving unit 12, and a photodiode 42 fixed to one side of the fixing block 41.

The optical attenuator 2 includes a lower substrate layer 211, a fixed layer 212 stacked on an upper portion of the lower substrate layer 211, and an upper substrate layer 213 stacked on an upper portion of the fixed layer 212. Is formed.

In addition, an optical fiber seating groove 23 is formed on the upper surface of the optical attenuator 2 so that the optical input end 3 is seated at the correct position, and the micro mirror 24 which breaks the path of the light emitted from the end of the optical input end. ), A com actuator 22 driving the micro mirror 24 to move, and an output terminal 226 for outputting light reflected from the mirror 24.

The comb actuator 22 is a comb fixing part 224 of the linear comb-shaped fixed to the lower substrate layer 211 by the fixing layer 212, the micro mirror 24 is fixed, the comb teeth It is installed alternately with the comb teeth of the commutator fixing part 224, the fixing layer 212 is etched in the lower portion is separated from the lower substrate layer 211 and formed in the actuator actuator 225, and one end of the com actuator actuator ( It is connected to the 225 and the other end is configured to include a spring portion 223 fixed to the fixed end (222).

The fixed end 222 is fixed to the lower substrate by the fixed layer 212, and the movable part 225, the spring part 223, and the micro mirror 24 are etched from the lower fixed layer 212. It is spaced apart from the substrate 211.

In the method of manufacturing the optical attenuator, the fixed layer 212 is stacked on the lower substrate 211, and the fixed end 222, the com actuator actuator 224, and the other upper part are stacked on the fixed layer 212. A fixed layer mask is applied to a portion of the substrate 213 fixed to the lower substrate 211 by the fixed layer 212.

 The upper substrate 213 is stacked on the surface coated with the fixed layer mask, and the upper surface of the upper substrate 213 is not etched with the commutator 22 and the upper substrate 213 such as the micro mirror 24. Substrate mask application is carried out.

After applying the upper substrate mask, the upper substrate 213 is etched using an etchant to form the comb actuator 22, the optical fiber mounting groove 23, and the micro mirror 24, and then cleaned.

The fixed layer 212 is etched again with an etchant to remove the actuator movable portion 225, the spring portion 223, and the fixed layer 212 disposed under the micromirror 24 and then cleaned.

The optical input terminal 31 is formed of an optical fiber and is fixed to the optical fiber seating groove 23. In addition, a lens (not shown) may be attached to the end of the optical fiber 31 to increase the parallelism of the light.

On the other hand, a lens may be installed on the light passage 14.

The operation of the first embodiment of the present invention will be described below.

7A and 7B are plan views showing step by step operating principles of the first embodiment of the present invention.

As shown in FIG. 7A, light incident through the optical input terminal 3 is reflected by the micromirror 24 and is incident on the photodiode 42. Therefore, the incident light is all output to the output stage without any attenuation.

However, when the electrodes opposite to the movable part 225 and the fixed part 224 of the comb actuator 22 are attracted to each other, the movable part 225 moves closer to the fixed part 224 as shown in FIG. 7B. In addition, the micro mirror 24 connected to the movable part 225 also moves downward in FIG. 7B.

Therefore, the light incident from the input terminal 3 is reflected by the micromirror 24 and is incident slightly off the photodiode 42. Thus, the amount of light detected by the photodiode 42 is reduced compared to FIG. 7A, so that the light incident at the input terminal 3 is attenuated and output.

Then, when the same electrode is applied or the charge is removed between the movable portion 225 and the fixed portion 224, the movable portion 225 is returned to its original position shown in Fig. 7A.

As described above, in the first embodiment of the present invention, the optical attenuator is integrally formed with the optical receiver, so that the volume is significantly reduced as compared with connecting the individual components by the optical connector, and the batch production is possible, thereby reducing the manufacturing cost. .

In addition, by forming the recess in the optical bench, it is possible to mount the photodiode 42 and the attenuator in the correct position.

The optical attenuator can easily adjust the amount of optical attenuation by a voltage applied to the movable part and the fixed part, and can drive the optical attenuator using a small amount of current.

8 and 9 show the structure of the second embodiment of the present invention, FIG. 8 is a perspective view of the optical attenuator, and FIG. 9 is a plan view of the optical attenuator of FIG.

The second embodiment differs from the first embodiment in the optical attenuator, and since the other configurations are the same, the following description will focus on the structure of the optical attenuator.

The optical attenuator 6 according to the second embodiment of the present invention includes a lower substrate layer 611, a fixed layer 612 stacked on the lower substrate layer 611, and a top layer of the fixed layer 612. The upper substrate layer 613 is formed.

In addition, the optical attenuator groove 63 is formed on the upper surface of the optical attenuator 6 so that the optical input terminal 3 is seated at the correct position, and the micro mirror 64 which breaks the path of the light emitted from the end of the optical input terminal. ) And a comb actuator 62 which drives the micro mirror 64 to move.

The comb actuator 62 has an arc comb-shaped comb actuator fixing part 624 fixed to the lower substrate layer 611 by the fixing layer 612, and the micromirror 64 is fixed, and the comb teeth are fixed. It is installed alternately with the comb teeth of the commutator fixing part 624, the fixing layer 612 is etched in the lower portion is formed spaced apart from the lower substrate layer 611 and one end of the com actuator actuator ( It is connected to the 625 and the other end comprises a spring portion 623 fixed to the fixed end 622.

The fixed end 622 is fixed to the lower substrate by the fixed layer 612, and the movable part 625, the spring part 623, and the micro mirror 64 are etched from the lower fixed layer 612. It is spaced apart from the substrate 611.

The operation of the second embodiment of the present invention will be described below.

When the commutator 62 is in the position I of FIG. 9, the light incident through the optical input terminal 3 is reflected by the micromirror 64 and is incident on the photodiode 42. Therefore, the incident light is all output to the output stage without any attenuation.

However, when the electrodes opposite to the movable part 625 and the fixed part 624 of the comb actuator 62 are attracted to each other, the moving part 625 moves closer to the fixed part 624 as shown in FIG. When the rotation is moved, the micro mirror 64 connected to the movable part 625 also rotates.

Therefore, the light incident from the input terminal 3 is reflected by the micromirror 64 and is incident slightly off the photodiode 42. Thus, the amount of light detected by the photodiode 42 is reduced, and as a result, the light incident from the input terminal 3 is attenuated and output.

Then, when the same electrode is applied between the movable portion 625 and the fixed portion 624 or the charge is removed, the movable portion 625 is returned to its original position.

10 to 13 show a structure of a third embodiment of the present invention, FIG. 10 is a perspective view of a variable optical attenuator integrated optical receiver, FIG. 11 is a perspective view of the photodiode of FIG. 10, and FIG. 12 is a variable light of FIG. An exploded perspective view of the attenuator, FIG. 13 is a perspective view of the optical bench.

The third embodiment has the same configuration and operation as the first embodiment and the variable optical attenuator, and thus description thereof will be omitted.

The variable optical attenuator integrated optical receiver of the third embodiment is provided with an optical bench (7), an optical attenuator (2) formed on the upper surface of the optical bench (7) and formed by using MEMS technology, and an upper surface of the optical attenuator (2). And an optical receiving section 4 provided on the upper surface of the optical bench 1 in the direction in which the light input from the optical input terminal 3 is bent.

The optical bench 1 has a flat plate shape, and an attenuator accommodating portion 73 is recessed and formed so that the optical attenuator 2 can be seated at a predetermined position. A wave hole 75 is formed, and a reflective mirror 76 is formed to be inclined on the side of the optical wave hole 75.

In addition, a solder 71 is installed on the upper surface to which the light receiver is fixed so as to fix the light receiver 4, and to fix the light attenuator 2 to the bottom of the attenuator receiver 73. Solder 71 is installed.

The light receiving unit 4 is composed of a fixed photodiode 42 and is installed on the upper surface of the optical waveguide 75 so that the reflective hole reflected by the reflective mirror 76 is incident on the photodiode 42. do.

The configuration other than the above-described configuration is the same as that of the first embodiment and the operation is also the same.

14 to 19 show the structure of a fourth embodiment of the present invention, FIG. 14 is a perspective view of a variable optical attenuator integrated optical receiver, FIG. 15 is a plan view of the variable optical attenuator integrated optical receiver of FIG. FIG. 15 is a sectional view taken along the cutting line VI-VI of FIG. 15, FIG. 17 is an exploded perspective view of the light attenuator of FIG. 14, FIG. 18 is an exploded perspective view of the light attenuator of FIG.

The variable optical attenuator integrated optical receiver of the fourth embodiment of the present invention is provided with an optical bench (1), an optical attenuator (8) formed on the upper surface of the optical bench (1) and formed by using MEMS technology, and the optical attenuator (8). And an optical receiver 3 provided on the upper surface of the optical bench 1 in the direction in which the light incident from the optical input terminal 3 is irradiated.

The fourth embodiment differs from the first embodiment in terms of the position of the optical input terminal 3 and the configuration of the optical attenuator 8, which will be described below.

The optical attenuator 8 includes a lower substrate layer 211, a fixed layer 212 stacked on the lower substrate layer 211, and an upper substrate layer 213 stacked on the fixed layer 212. Is formed.

In addition, an optical fiber seating groove 83 is formed on the upper surface of the optical attenuator 8 so that the optical input terminal 3 is seated at the correct position, and a blocking film 84 for blocking a path of light emitted from the end of the optical input terminal. And a comb actuator 22 which drives the blocking film 84 to move. The mounting groove 83 is formed to face the optical diode 42 when the optical input terminal 31 is seated in the mounting groove 83.

The comb actuator 22 is configured similarly to the first embodiment or the second embodiment.

The operation of the fourth embodiment of the present invention will be described below.

20A and 20B are plan views showing step by step principles of operation of the fourth embodiment of the present invention.

As shown in FIG. 20A, light incident through the light input terminal 3 is blocked by the blocking film 84 and does not enter the photodiode 42.

However, when the electrodes opposite to the movable part 225 and the fixed part 224 of the comb actuator 22 are attracted to each other, the movable part 225 moves closer to the fixed part 224 as shown in FIG. 19B. In addition, the blocking film 84 connected to the movable part 225 also moves downward in FIG. 20B.

Accordingly, the light incident from the input terminal 3 is partially blocked by the blocking film 84, and the unblocked light is incident on the photodiode 42.

Then, when the same electrode is applied or the charge is removed between the movable portion 225 and the fixed portion 224, the movable portion 225 returns to its original position shown in Fig. 20A.

Therefore, the optical attenuator can easily adjust the light attenuation amount by the voltage applied to the movable part and the fixed part easily, and can drive the optical attenuator using a small amount of current.

Meanwhile, in the first to fourth embodiments of the present invention, an optical receiver is implemented by mounting an optical diode. However, by installing an optical transmitter such as a laser diode at a position of the optical diode, a variable optical attenuator integrated optical transmitter may be implemented. In addition, since the structure and operation | movement except having changed the position of the output terminal and input terminal of an optical attenuator are the same as that of an optical receiver, the description is abbreviate | omitted.

Although the preferred embodiments of the present invention have been described above by way of example, the scope of the present invention is not limited to these specific embodiments, and may be appropriately changed within the scope described in the claims.

According to the embodiment of the present invention as described above, various effects including the following matters can be expected. However, the present invention is not achieved by exerting all of the following effects.

First, the present invention by forming the optical attenuator integrally to the optical receiver and the optical transmitter, the volume is significantly reduced compared to connecting the individual parts by the optical connector, the batch production is possible to reduce the manufacturing cost.

In addition, by forming the recess in the optical bench, it is possible to mount the photodiode and the attenuator in the correct position.

The optical attenuator can easily adjust the amount of optical attenuation by a voltage applied to the movable part and the fixed part, and can drive the optical attenuator using a small amount of current.

1 to 6 show the structure of the first embodiment of the present invention.

1 is a perspective view of a variable optical attenuator integrated optical receiver

FIG. 2 is a plan view of the variable optical attenuator integrated optical receiver of FIG.

3 is a cross-sectional view taken along line III-III of FIG.

4 is a perspective view of the light receiver of FIG.

5 is an exploded perspective view of the optical attenuator of FIG.

Figure 6 is a perspective view of the light bench of Figure 1

7A and 7B are plan views showing step by step operating principles of the first embodiment of the present invention.

8 and 9 are views showing the structure of the second embodiment of the present invention.

8 is a perspective view of the optical attenuator

9 is a plan view of the optical attenuator of FIG.

10 to 13 show the structure of a third embodiment of the present invention.

10 is a perspective view of a variable optical attenuator integrated optical receiver.

11 is a perspective view of the photodiode of FIG.

12 is an exploded perspective view of the variable optical attenuator of FIG.

Figure 13 is a perspective view of the light bench of Figure 10

14 to 19 show the structure of the fourth embodiment of the present invention.

14 is a perspective view of a variable optical attenuator integrated optical receiver;

15 is a plan view of the variable optical attenuator integrated optical receiver of FIG.

FIG. 16 is a cross-sectional view taken along the cutting line VI-VI of FIG. 15

17 is a perspective view of the light receiver of FIG.

18 is an exploded perspective view of the optical attenuator of FIG.

19 is a perspective view of the light bench of FIG.

20A and 20B are plan views showing step by step principles of operation of the fourth embodiment of the present invention.

** Description of the symbols for the main parts of the drawings **

1: light bench 2: light attenuator

3: optical input stage 4: optical receiver

12: diode accommodating part 13: optical attenuator accommodating part

22, 62: comm actuator 23: seating groove

24, 64: micromirror 41: diode fixing block

84: blocking films 223, 623: spring portion

224, 624: commutator fixing part

225, 625: commutator moving part

Claims (22)

An optical bench having a diode accommodating part and an optical attenuator accommodating part formed on an upper surface thereof; A light receiving part mounted on the diode receiving part; An optical attenuator mounted on the optical attenuator accommodating part and configured to output output light toward the optical receiver; Including, The optical attenuator includes a comb actuator formed by using MEMS technology, and a control member which is fixed to one end of the comb actuator and flowable and adjusts the amount of light input from the optical input end of the optical attenuator to the light receiving unit An optical attenuator integrated light receiver. The method of claim 1, wherein the adjustment member And a micromirror for reflecting light incident from the optical input terminal to the optical receiver. The method of claim 1, The optical input terminal is disposed to face the optical receiver, the control member is a light attenuator integrated optical receiver, characterized in that the blocking film for blocking the light incident from the optical input terminal. The method of claim 1, wherein the optical input terminal A variable optical attenuator integrated optical receiver, characterized in that consisting of optical fibers. The method of claim 4, wherein the optical fiber A variable optical attenuator integrated optical receiver, characterized in that the lens is attached to the end. The light attenuator of claim 4, wherein the optical attenuator And an optical fiber receiving groove formed to allow the optical fiber to be seated at the correct position. The method of claim 1, wherein the light bench A variable optical attenuator-integrated optical receiver, characterized in that the diode receiving portion is concave and formed so that the optical receiver is fixed at a predetermined position. The method of claim 7, wherein The optical receiver further includes a photodiode for receiving light and a diode fixing block to which the photodiode is fixed, wherein the diode receiving part is recessed and formed to insert and fix the diode fixing block. Attenuator integrated optical receiver. The method of claim 1, And a lens is further provided on an optical path of the photodiode and the optical attenuator. 10. The comb actuator according to any one of claims 1 to 9, wherein A comb actuator fixing part fixed to the optical bench and having a straight comb shape; A comb actuator movable portion to which the adjustment member is fixed and comb teeth are alternately installed on the comb teeth of the comb actuator fixing portion and formed to be movable; One end is connected to the commutator moving part, and the other end is a spring part fixed to the optical attenuator; Variable optical attenuator integrated optical receiver, characterized in that configured to include. 10. The comb actuator according to any one of claims 1 to 9, wherein A comb actuator fixing part fixed to the optical bench and having an arc-shaped comb; A comb actuator movable portion to which the adjustment member is fixed and comb teeth are alternately installed on the comb teeth of the comb actuator fixing portion and formed to be movable; One end is connected to the commutator moving part, and the other end is a spring part fixed to the optical attenuator; Variable optical attenuator integrated optical receiver, characterized in that configured to include. An optical bench having a diode accommodating part and an optical attenuator accommodating part formed on an upper surface thereof; An optical transmitter mounted on the diode receiver; An optical attenuator mounted on the optical attenuator accommodating part, the optical attenuator configured to face an optical input part; Including, The optical attenuator includes a comb actuator formed by using MEMS technology, and a control member fixed to one end of the comb actuator and movable to adjust the amount of light input from the optical input end of the optical attenuator to the output end. Optical attenuator integrated optical transmitter. The method of claim 12, wherein the adjustment member And a micromirror for reflecting the light incident from the optical transmitter to the output terminal. The method of claim 12, The optical output terminal is disposed to face the optical transmitter, the control member is an optical attenuator integrated optical transmitter, characterized in that the blocking film for blocking the light incident from the transmitter. The optical output terminal of claim 12, A variable optical attenuator integrated optical transmitter, characterized in that consisting of optical fibers. The optical fiber of claim 15, wherein the optical fiber is A variable optical attenuator integrated optical transmitter, characterized in that the lens is attached to the end. The optical attenuator of claim 15, And an optical fiber seating groove formed so that the optical fiber can be seated at the correct position. The method of claim 12, wherein the light bench A variable optical attenuator-integrated optical transmitter, characterized in that the diode receiving portion is recessed so that the optical transmitter is fixed at a predetermined position. The method of claim 18, The optical transmitter further comprises a laser diode for emitting light and a diode fixing block to which the laser diode is fixed, wherein the diode accommodating part is recessed to be inserted into and fixed to the diode fixing block. Optical transmitter. The method of claim 12, And a lens is further provided on the optical path of the optical transmitter and the optical attenuator. 21. The comb actuator according to any one of claims 12 to 20, wherein A comb actuator fixing part fixed to the optical attenuator and having a straight comb shape; A comb actuator movable portion to which the adjustment member is fixed and comb teeth are alternately installed on the comb teeth of the comb actuator fixing portion and formed to be movable; One end is connected to the commutator moving part, and the other end is a spring part fixed to the optical attenuator; Variable optical attenuator integrated optical transmitter, characterized in that configured to include. 21. The comb actuator according to any one of claims 12 to 20, wherein A comb actuator fixing part fixed to the optical attenuator and having an arc-shaped comb; A comb actuator movable portion to which the adjustment member is fixed and comb teeth are alternately installed on the comb teeth of the comb actuator fixing portion and formed to be movable; One end is connected to the commutator moving part, and the other end is a spring part fixed to the optical attenuator; Variable optical attenuator integrated optical transmitter, characterized in that configured to include.