KR100484030B1 - Vaporizer with integral diaphragm - Google Patents

Abstract

A vaporizer is provided to reduce the loss of a liquid material by simplifying the structure using a diaphragm instead of a spring. A vaporizer(100) includes a liquid material supply unit and a vaporizing unit. The liquid material supply unit includes a material inlet path(11), an inlet line body(12) with a fine hole(12a), a loading portion(13), a control terminal(14) for controlling the supply of a liquid material from the material inlet path to the inlet line body, and a diaphragm(15) attached to the control terminal as one piece. The vaporizing unit includes a first heater(31), a vaporizing chamber(35), a gas transfer path(37) and an exhaust port(38).

Description

Diaphragm integral vaporizer {VAPORIZER WITH INTEGRAL DIAPHRAGM}

The present invention relates to a vaporizer, and more particularly, to a vaporizer that vaporizes a liquid raw material to produce a gas used in a semiconductor manufacturing process.

In general, in order to manufacture a semiconductor device, a film forming process and a pattern etching process are repeatedly performed on a semiconductor wafer to produce a desired device. Especially, the film-forming technique becomes strict in specification, as a semiconductor device becomes high density and high integration.

For example, very thin oxide films such as an insulating film and a gate insulating film of a capacitor are required in the apparatus. In addition, thinning is also required for electrode films, wiring films, and the like. Taking a wiring film as an example, a method of forming a copper film or an aluminum film by a chemical vapor deposition (CVD) method has been proposed. In this case, the liquid raw material is vaporized and used for the film forming process as a gas for forming the film. The liquid raw material is vaporized by a vaporizer to produce a deposition gas that is the vapor of the liquid raw material. In the usual film forming process, the flow rate of the liquid raw material per unit time is very small.

Therefore, in order to perform a highly accurate film-forming process, the liquid raw material supplied to the vaporizer must be vaporized efficiently and the vaporized raw material must be supplied to the downstream film-forming apparatus.

Here, the structure of the conventional vaporizer is demonstrated with reference to FIG.

As shown in FIG. 1, the vaporizer 200 includes a raw material inflow path 231 for receiving a liquid raw material from the outside, a vaporization chamber 235 provided to vaporize the liquid raw material, and a vaporized liquid raw material. A gas transportation path 232 for receiving a transport gas supplied for transport, an outlet 238 provided for discharging the vaporized liquid raw material accompanying the transport gas from the vaporization chamber 235, and the vaporization chamber A vaporizer 230 including a heater 234 to heat 235; And an adjusting unit 210 positioned at an upper end of the vaporizing unit 230 to adjust a flow rate of the liquid raw material introduced into the vaporizing unit 230; And it is composed of an actuator 250 for controlling the adjusting unit 210.

However, since the body is always heated by the heating heater 234, the vaporizer 200 having the configuration and structure as described above is a raw material because the continuous heat is applied to a part of the area where the liquid raw material is supplied by the conductive heat Is deformed or severely decomposed, and also, the transport gas transported through the gas transport path 232 is introduced into the vaporization chamber 235 without being sufficiently heated to cause a pressure change to the gas transport path 232. There is a serious problem that can be reversed. In addition, since the vaporizer 200 is not configured to intensively heat the vaporization chamber 235, there is a problem in that the liquid raw material cannot be vaporized efficiently.

On the other hand, Figure 2 is a schematic view showing an exploded view of another vaporizer according to the prior art, the vaporizer 300 is a vaporizer 330 for vaporizing the liquid material largely, and receives the liquid material from the outside and adjusts the flow rate of the liquid material It consists of a liquid raw material supply unit 310 to be introduced into the vaporization unit 330 and an actuator 350 for controlling the liquid raw material supply unit 310.

The vaporization unit 330 receives the vaporization chamber 335 for vaporizing the liquid raw material, the heater 331 for heating the vaporization chamber 335, and a transport gas from the outside to the vaporization chamber 335. A gas delivery path 337 for transporting and an outlet 338 for discharging the liquid raw material vaporized together with the transporting gas in the vaporization chamber 335, and the thermal separation of the liquid raw material supply unit and 310 In order to include a groove 332 formed on the outer top surface, and an O-ring 333 corresponding to the groove 332.

The liquid raw material supply unit 310 includes an inlet pipe 312 including a raw material inflow path 311 that receives a liquid raw material from the outside, and a fine hole 312a that introduces the liquid raw material into the vaporization unit 330. And, the seating portion 313 formed between the raw material inlet passage 311 and the inlet pipe 312, and the control terminal 314 to control the supply of the liquid raw material by repeatedly contacting and floating the seating portion 313 and , A spring 316 coupled with the control terminal 314 to impart an elastic force to the control terminal 314, a support space 317 provided to accommodate the spring 316, and the control terminal ( It is provided on the upper side of the 314, the diaphragm 315 to block the movement of the liquid raw material to the upper side of the control terminal 314.

The vaporizer 300 having the above-described configuration and structure allows the portion in which the liquid raw material moves and the portion in which the vaporization chamber 335 is formed to be in contact with the minimum area to prevent the liquid raw material from being heated while moving.

However, the vaporizer 300 having the above structure is a configuration for adjusting the distance between the control terminal 314 and the seating portion 313, mounted therein elastic means such as a spring 316 and the spring ( The support space 317 for accommodating 316 is provided to be structurally complicated when viewed as a path through which the liquid raw material passes.

In addition, since the liquid raw material is constantly accumulated in the support space 317 provided to accommodate the spring 316, the liquid in the support space 317 when disassembling each component for maintenance of the vaporizer 300. Since raw materials are discarded, there is a problem of causing economic losses.

The present invention has been made to solve the above problems, an object of the present invention is to prevent the deformation of the liquid raw material to prevent the heating of the space in which the liquid raw material is moved in the vaporizer vaporizing the liquid raw material The transport gas supplied through the gas transport path formed in the vaporization unit sufficiently absorbs heat, and prevents the transport gas from flowing back or the liquid material flows into the gas transport path, and further, a path through which the liquid material passes. It is to provide a diaphragm integrated vaporizer is simplified.

Hereinafter, the structure and configuration of the vaporizer according to the present invention for achieving the above object will be described with the accompanying drawings.

3 is a schematic view showing a vaporizer according to the present invention, Figure 4 is a schematic view showing an exploded view of the vaporizer according to the present invention.

As shown, the present invention provides a vaporization unit 30 for vaporizing the liquid raw material largely, and a liquid raw material supply unit for supplying the liquid raw material from the outside and interrupting the flow of the liquid raw material to selectively supply to the vaporization unit (30) 10 and an actuator 50 for controlling the liquid raw material supply unit 10.

The liquid raw material supply unit 10 has a raw material inlet passage 11 for allowing the liquid raw material to be introduced from the outside, and a micro hole for communicating with the raw material inlet passage 11 and supplying the introduced liquid raw material to the vaporization chamber 35 ( 12a) is formed by the operation of the inlet pipe 12, the seating portion 13 provided on the traveling path of the raw material inlet passage 11 and the inlet pipe 12, and the actuator 50 to the The control terminal 14 for controlling supply of the liquid raw material by repeatedly contacting and spacing with the seating part 13 and the control terminal 14 driven by the actuator 50 in the form of approximately vertical vibration The diaphragm 15 which is attached and fixed integrally with the control terminal 14 to impart an elastic force to the control terminal 14 so that the operation and restoration can be repeated, and the liquid raw material on the liquid raw material supply unit 10. A cooling device 18 built in to maintain a low temperature, In order to attenuate the heat transferred from the portion 30 and to block the inside and the outside of the vaporizer 100, the groove 16 is formed on one side in contact with the vaporization portion 30, and corresponds to the groove 16 It consists of an o-ring 17 located.

The lower surface of the diaphragm 15 is made to be one surface of the supply flow path of the liquid raw material of the raw material inlet passage 11, in another embodiment the lower surface of the diaphragm 15 of the raw material inlet passage 11 It is made to operate separately from the feed inlet of the liquid raw material.

 Here, the control terminal 14 takes the shape of a cone, and the seating portion 13 is formed by grooves formed in a shape corresponding substantially to the control terminal 14.

However, the inclination angle constituting the control terminal 14 is preferably smaller than the inclination angle constituting the seating portion 13 so that the flow rate of the liquid raw material can be finely adjusted.

The diaphragm 15 also provides an elastic force to the control terminal 14 and at the same time serves to block the liquid material from flowing back into the liquid raw material supply unit 10, the elastic force to the control terminal 14 In order to provide a separate elastic means such as a spring and there is no need for a space for installing the elastic means.

In addition, in the installation of the cooling device 18, although the cooling device 18 is embedded in the liquid raw material supply unit 10 in the embodiment of the present invention, the liquid based on the gist of cooling the liquid raw material It is possible to change the installation such as to be installed outside the raw material supply unit 10.

In addition, the groove 16 and the O-ring 17 formed in the liquid raw material supply unit 10 also reduce the thermal contact area between the liquid raw material supply unit 10 and the vaporization unit 30 and reduce the inside and outside of the vaporizer 100. Of course, it can be configured on the vaporization unit 30 side without departing from the gist of blocking. That is, according to the above, any one selected from the liquid raw material supply unit 10 and the vaporization unit 30 A groove 16 is formed to minimize the mutual thermal contact area, and an o-ring 17 is coupled to the groove 16.

On the other hand, the vaporization unit 30 and the vaporization chamber 35 to form a space further extended downward to vaporize the liquid raw material ejected through the micro-hole 12a of the liquid raw material supply unit 10, and the vapor A gas transportation path 37 for supplying a transport gas for transporting the vaporized liquid raw material in the fire chamber 35 to the vaporization chamber 35, and a discharge port provided to discharge the vaporized liquid raw material together with the transport gas to the outside ( 38) is installed at the point where the gas transportation path 37 and the discharge port 38 are formed, and heats the body of the vaporization unit 30 so that the liquid raw material can be vaporized and discharged together with the transport gas and the transport gas. The first heater 31 for heating together with the gas transportation path 37 and the discharge port 38 so that the vaporized liquid raw material can be maintained in a stable state, and the vaporization chamber 35 for intensively heating the vaporization chamber 35. Second provided in the form which protrudes into the fire chamber 35 It consists of a heater 32 and a temperature sensor 33 integrally incorporated in the first and second heaters 31 and 32.

Here, the gas transportation path 37 is configured to be inclined in order to increase the thermal contact area so that the gas to be transported sufficiently absorbs the vaporization portion 30 heat. In addition, when the gas transportation path 37 communicates with the vaporization chamber 35, the gas transportation path 37 is an inlet pipe 12 of the liquid raw material supply unit 10 at the upper end of the vaporization chamber 35. Is projected to communicate with the gap space 36 formed on both sides of the inlet pipe 12 so that the transport gas supplied from the gas transportation path 37 sufficiently absorbs heat in the gap space 36. As gas flows into the vaporization chamber 35, a pressure higher than that of the vaporization zone can be maintained to prevent the back gas from flowing back from the vaporization chamber 35, and the micropores 12a of the inlet pipe 12 are closed. The liquid raw material supplied to the vaporization chamber 35 is prevented from entering the gas transportation path 37.

The actuator 50 has a housing 51 for supporting and casing each component therein, and has a shape of a cross projecting up, down, left, and right inside the housing 51 and adjusting terminals of the liquid raw material supply unit 10. The operator 53 is in contact with the 14, the O-ring 52 is installed between the operator 53 and the housing 51, the left and right protrusions of the operator 53 and the upper end of the housing 51 And a spring 54 which connects to impart an elastic force to the operator 53 and injects compressed air into a lower space partitioned by the operator 53 in the housing 51. Compressed air inlet (55) formed in the) and the vent hole formed in the upper space so that the lower space and the upper space in the upper space partitioned by the operator 53 in the housing (51) ( 56).

Although the embodiment of the present invention shows a pneumatic actuator 50 having the above structure, of course, the present invention may include other actuators, such as a manual actuator and a piezo actuator.

Hereinafter will be described the operation and principle of the present invention by the above structure and configuration.

3 and 4, after the external liquid raw material is introduced through the raw material inflow path 11, the external liquid raw material moves to the seating part 13. The moved liquid raw material is interrupted by the control terminal 14 selectively contacting the seating part 13 at the seating part 13.

The principle that the control terminal 14 operated by the actuator 50 controls the liquid raw material in the seating portion 13 is as follows.

When the actuator 50 is driven by the compressed air (the actuator using the compressed air is a known technique, description thereof will be omitted). The liquid in contact with the operator 53 of the actuator 50 The control terminal 14 of the raw material supplier 10 is also operated.

The control terminal 14 is lowered by the lowering force of the operator 53 when descending and ascended by the restoring force of the diaphragm 15 when rising, and in actual operation, the control terminal 14 is raised. It will be repeatedly performed and descending, which is made possible by the elastic force of the diaphragm (15).

That is, the diaphragm 15 is to act as an elastic means for the repeated implementation of the rising and falling of the control terminal (14).

Furthermore, the diaphragm 15 also serves to block liquid material from flowing back to the upper side of the diaphragm 15.

As described above, the rising and falling of the control terminal 14 is formed between the control terminal 14 and the seating portion 13 to determine whether to allow the gap in which the liquid raw material can move, the rising and falling Through the implementation of the valve will act.

Here, in the method in which the control terminal 14 is in contact with the seating portion 13 and lifted by the operator 53, the control terminal 14 maintains a gap with the seating portion 13. Lowered with the operator 53 of the actuator 50 to contact the seating portion 13, when the operator 53 is raised by the restoring force of the diaphragm 15 and again the seating portion 13 And the way in which the control terminal 14 is in contact with the seating portion 13 and when the operator 53 of the actuator 50 is raised by the restoring force of the diaphragm 15. Include.

In addition, the inclination angle of the control terminal 14 is provided to be smaller than the inclination angle of the seating portion 13 to have a different inclination angle by the liquid terminal when the control terminal 14 is lowered in contact with the seating portion 13 The supply of is completely blocked.

In addition, while the liquid raw material stays in the liquid raw material supply part 10, the cooling device 18 is sufficiently cooled to prevent chemical reaction and deformation due to heat conducted from the vaporization part 30.

On the other hand, the liquid raw material in the seating portion 13 is a fine hole (12a) formed inside the inlet pipe 12 protruding into the vaporization chamber 35 by the operation of the control terminal (14). The liquid raw material is ejected into the vaporization chamber 35 through the micropores 12a, and is sufficiently heated and vaporized by the second heater 32 formed to protrude into the vaporization chamber 35.

In addition, the transport gas supplied to transport the liquid raw material is introduced into the vaporization chamber 35 through a gas transport path 37, the gas transport path 37 is configured to be inclined so that the gas transport path 37 The transport gas moving through) is sufficiently heated by the first heater 31.

In addition, the gas transportation path 37 communicates with the gap space 36 formed between the inner wall of the upper end of the vaporization chamber 35 and the inflow pipe 12 of the liquid raw material supply unit 10, thereby leaving the gas transportation path 37. The outgoing transport gas sufficiently absorbs heat from the gap space 36 and flows into the vaporization chamber 35 without being flowed back.

The liquid raw material vaporized in the vaporization chamber 35 through the above process is discharged to the discharge port 38 by the transport gas, in the process by the first heater 31 formed in the body of the vaporization unit 30 The carrier gas and the vaporized liquid raw material are constantly heated.

In addition, the first and second heaters 31 and 32 include a temperature sensor 33 for real-time sensing the temperature of the region in which the heaters 31 and 32 are installed, thereby further improving the thermal response to temperature change. .

Therefore, each region in the vaporization unit 30 can maintain the appropriate temperature.

FIG. 5 is a schematic view showing a carburetor equipped with a heater block at a lower end of the present invention, wherein the first and second heaters 31 and 32 are not separated separately by means of applying heat to the vaporizer 30. Produced by the heater block 57 is made to attach to the lower end of the vaporization unit (30). At this time, the heater block 57 has a shape in which a cylinder rises on the cylinder flat plate so as to faithfully perform the role of the second heater 32 provided to protrude into the vaporization chamber 35. . Furthermore, a cylinder may be additionally provided to faithfully perform the role of the first heater 31.

As described above, in the present invention, the vaporization portion including the vaporization chamber heated by the heater and the liquid raw material supply to move the liquid raw material is thermally separated from each other to prevent deformation of the liquid raw material by heating of the vaporization space, Providing a gap space to induce a pressure difference in the passage through which gas is introduced, thereby preventing the liquid material from entering the transport gas, and the liquid material introduced into the vaporization chamber is heated by a heater protruding from the center of the vaporization chamber. Therefore, vaporization is rapidly performed, and the transport gas absorbs heat sufficiently on the gas transport path, thereby preventing the backflow of the transport gas.

In addition, since the control terminal and the diaphragm are integrally formed, the diaphragm can act as an elastic means, simplifying the structure, and reducing the internal space of the liquid raw material path, thereby reducing the loss of the liquid raw material. .

1 is a schematic view showing a vaporizer in the prior art,

2 is a schematic view showing an exploded view of another conventional vaporizer;

3 is a schematic view showing a vaporizer according to the present invention;

4 is a schematic view showing an exploded view of a vaporizer according to the present invention.

5 is a schematic view showing a carburetor equipped with a heater block at the lower end of the present invention.

<Description of Symbols for Major Parts of Drawings>

10,310: liquid raw material supply unit 11,231,311: raw material inlet

12,312: inlet tube 12a, 312a: micropores

13,313: seat 14,314: control terminal

15,315: Diaphragm 16,332: Groove

17,333: O-ring 18: chiller

30,230,330: Carburetor 31: First heater

32: second heater 33: temperature sensor

35,235,335: Vaporizer 36: Niche Space

37,232,337: gas passage 38,238,338: outlet

50, 250, 350: actuator 51: housing

52: O-ring 53: Operator

54: spring 55: compressed air inlet

56: vent 57: heater block

100: diaphragm integrated vaporizer

200,300: carburetor 210: control unit

234,331: heater 316: spring

317: support space

Claims (14)

In the vaporizer vaporizing the liquid raw material, A raw material inflow passage 11 into which a liquid raw material flows, an inflow tube 12 communicating with the raw material inflow passage 11 and having a fine hole 12a, and the raw material inflow passage 11 and an inflow tube 12 And a seating portion 13 provided on the advancing path, a control terminal 14 for intermittently supplying the liquid raw material from the raw material inlet passage 11 to the inlet pipe 12, and the control terminal 14 integrally. A liquid raw material supply part 10 composed of a diaphragm 15 attached and fixed; A first heater 31 mounted on the body of the vaporization unit 30 to apply heat, a vaporization chamber 35 provided to vaporize the liquid raw material, a gas transportation path 37 for supplying a transport gas, The vaporized liquid raw material is discharged to the outside of the vaporization chamber (35) together with the transport gas is configured to include a vaporization section (30) consisting of an outlet 38 formed in communication with the vaporization chamber (35), The groove 16 is formed in any one selected from the liquid raw material supply unit 10 and the vaporization unit 30 to minimize the mutual thermal contact area, and the groove 16 is coupled to the O-ring 17. A diaphragm integrated vaporizer. delete   The method of claim 1, The diaphragm integrated vaporizer, characterized in that the lower surface of the diaphragm 15 is made to be one surface of the supply inlet of the liquid raw material of the raw material inlet (11).    The method of claim 1,  The diaphragm integrated vaporizer, characterized in that the bottom surface of the diaphragm 15 is separated from the supply inlet of the liquid raw material of the raw material inlet (11). The method of claim 1, The control terminal 14 is a diaphragm integrated vaporizer, characterized in that driven by an actuator 50 adjacent to the upper portion. delete The method of claim 1, The vaporization unit 30 further comprises a second heater (32) formed to protrude in the vaporization chamber (35). The method of claim 1, The control terminal 14 is a diaphragm integrated vaporizer, characterized in that the inclination angle of the control terminal 14 is provided to be smaller than the inclination angle of the seating portion (13). The method of claim 1, The gas delivery path (37) is a diaphragm integrated vaporizer, characterized in that in communication with the gap space (36) formed between the inner wall of the upper end of the vaporization chamber (35) and the inlet pipe (12) of the liquid raw material supply (10). The method of claim 7, wherein The first heater (31) and the second heater (32) further comprises a temperature sensor (33) so as to detect the temperature of the region in which the heater (31, 32) is installed in real time. The method of claim 7, wherein The first heater (31) and the second heater (32) is a diaphragm integrated vaporizer, characterized in that configured integrally with the heater block (57) mounted on the lower end of the vaporization unit (30). The method of claim 1, The liquid raw material supply unit 10 further comprises a cooling device (18) so as to sufficiently cool the heat transferred from the vaporization unit (30). The method of claim 5, The actuator 50 has a housing 51 for supporting and casing each component therein, and has a shape of a cross projecting up, down, left, and right inside the housing 51 and adjusting terminals of the liquid raw material supply unit 10. The operator 53 is in contact with the 14, the O-ring 52 is installed between the operator 53 and the housing 51, the left and right protrusions of the operator 53 and the upper end of the housing 51 And a spring 54 which connects to impart an elastic force to the operator 53 and injects compressed air into a lower space partitioned by the operator 53 in the housing 51. Compressed air inlet (55) formed in the) and the vent hole formed in the upper space so that the lower space and the upper space in the upper space partitioned by the operator 53 in the housing (51) ( 56) diaphragm integrated vaporizer, characterized in that consisting of. The diaphragm integrated vaporizer according to claim 1, wherein the gas transportation path (37) is configured to be inclined so as to increase the thermal contact area so that the gas to be transported sufficiently absorbs the vaporization portion (30).