KR100462188B1 - Mass-producible, Multi-perpose Plate-to-Plate Type Plasma Reactor Using Thin Ceramic Plates and Fabricating Method thereof - Google Patents

Abstract

The present invention relates to a plasma reactor which is a key element of a purification device that removes diesel particulate matter and nitrogen oxides or generates ozone for air purification and sterilization. The present invention relates to a ceramic sheet having an effect on ozone generation for air purification and sterilization. The present invention provides a mass-produced versatile plate-to-plate plasma reactor using a ceramic thin plate having easy mass maintenance, easy to maintain and repair, and easy to adjust, assemble and dismantle the ceramic plate electrode to be used, and a method of manufacturing the same.

In the present invention for realizing this, in the flat plate type multi-layer plasma reactor used for plasma generation, a metal paste is coated and fired on one surface to form an electrode 120, and one end of the conductive coupling hole is in contact with the electrode 120. 130, the other end portion is formed by coupling two ceramic thin plate members 110 provided with non-conductive coupling holes 140 not in contact with the electrode 120 so that the electrodes 120 are in contact with each other. A plurality of ceramic plate electrodes 100 which are alternately stacked so as to have a predetermined gap therebetween so that the electrode directions are staggered; A spacer 300 disposed between the alternating ceramic plate electrodes 100 to adjust the gap between the electrodes and to form a passage through which harmful gas flows; An electrode screw rod 500 that assembles the plurality of ceramic plate electrodes 100 and the spacer 300 and has an external electrode function; It is configured to include, characterized in that configured to cause a plasma discharge through the electrode by the power supply.

Description

Mass-producible, Multi-perpose Plate-to-Plate Type Plasma Reactor Using Thin Ceramic Plates and Fabricating Method

The present invention relates to a plasma generating apparatus used for the treatment of vehicle exhaust gas and ozone generation for air purification and sterilization, and more particularly, the core of exhaust gas aftertreatment technology using plasma, and for industrial / home air purifier and The present invention relates to a mass-produced versatile plate-to-plate plasma reactor using a ceramic thin plate which is a main component of a sterilizing ozone generating device, and a manufacturing method thereof.

Plasma, generally called the fourth state of matter, followed by solids, liquids, and gases, can generate a discharge by flowing an electric current across an electrode composed of a cathode and an anode, and is composed of electrons, ions, and radicals. It is used for the decomposition and oxidation of environmental pollutants.

The environmental purification technology using plasma is a means of removing NOx and SOx emitted from the plant. Since the early 1980s, the US, Japan, Russia, Italy, etc. have lower installation costs, lower secondary pollution, Due to the advantages such as the removal of odors and harmful organics, it has been actively studied and is currently in practical use, and it is actually applied to dust collector, deodorizer, surface modification, sewage treatment, air purifier and ozone generator.

Recently, plasma has been actively applied to the pollution emission reduction device of a PDP TV or an automobile based on the above-mentioned advantages.

In order to operate the plasma stably in the above-described applications, the requirements of the plasma reactor as shown in Table 1 must be solved.

TABLE 1

The concept of a plate-to-plate plasma reactor related to the present invention can be derived in various ways according to the known technology or the detailed technology and implementation method for satisfying the above-mentioned requirements.

Looking at the domestic and foreign prior art related to the present invention.

The American company 'Pelphi' applied the plate-type plasma reactor to the exhaust gas post-treatment purification politics for automobiles. However, they still have a lot of homework in terms of energy requirements, durability and performance.

In addition, a 'hazardous gas treatment apparatus using a flat plate multilayer low temperature plasma reactor (Registration No. 20-0274616)' has been disclosed as a prior art purification of engine exhaust gas aftertreatment.

The prior art, as shown in Figure 5, the square or rectangular duct 40 is configured in the "b" shape of the gas inlet 41 and the upper portion of the duct 40, the gas inlet 41 An air filter (or dust collector) 42 installed at the rear side and filtering the gas introduced therein, and the air filter (or dust collector) 42 installed at the rear side of the air filter (or dust collector) 42. Intake fan or intake port 43 for sucking the gas filtered at the lower end of the intake fan or intake port 43, located in the lower portion of the bent pipe or duct and generates a plasma, the low-temperature plasma attached to the discharge AC power supply A reactor 10, a metal filter 44 formed under the low temperature plasma reactor 10, a plurality of cartridge-shaped catalyst reactors 70 formed below the metal filter 60, and the catalyst reactor 70. Inlet fan formed at the bottom There are noxious gas treatment apparatus using the air supply fan 80 and the inlet fan or the air supply fan (80), one formed on the side of the plate-like multi-layer low temperature plasma reactor consisting of a gas outlet 81 for discharging a gas is disclosed.

The plasma reactor 10 of the related art used in such a noxious gas treatment device is a non-conductive plate 11a of ceramic material having electrical insulation and dielectric properties as shown in FIG. A plurality of ceramic plate electrodes 11 made of a metal thin plate 11b of a conductive material inserted through an insertion hole provided on one side of the nonconductive plate 11a made of ceramic material are arranged.

The ceramic plate electrodes 11 are adjacent to each other and the electrode plate insertion holes are alternately arranged in opposite directions, and the protrusions of the metal thin plates 11b of each conductive material arranged in the same direction are one terminal of the discharge AC power supply 50. The spacers 12 have a structure connected in parallel to each other, and have a space in which noxious gas flows between the ceramic plate electrodes 11 arranged alternately.

However, although the plasma reactor 10 of the related art basically uses a ceramic thin plate, the structure of the plate electrode 11 which is a core part of the reactor 10, the structure of forming a gap between the electrode and the electrode, and the plasma reactor It is merely a conceptual presentation in the driving area of the present invention and does not involve actual concrete embodiments.

In addition, as shown in FIG. 6, the conventional ceramic plate electrode is made by melting the metal plate 11b at a high temperature in the non-conductive ceramic plate 11a having a thickness of 0.1-2 mm to provide a space for harmful gas flow. Since the spacer 12 is formed of a structure in which the ceramic plate electrodes 11 are bonded to each other by additional heat treatment, the manufacturing process is complicated, and the thickness of the gap entirely depends on the efficacy of the plasma reactor. In this case, once the reactor is completed, the thickness of the gap cannot be adjusted later, thereby decreasing the efficiency of the plasma reactor, and there are many difficulties in maintenance and repair.

In addition, in order to meet the above object, the plasma reactor must not only generate a plasma of continuous, stable and desired intensity, but also ensure the durability of the reactor, but the conventional reactor did not.

In order to compensate for the above disadvantages of the prior art, and to combine the ease of manufacture and relatively easy maintenance, the present applicant has described a 'plate-type plasma reactor using a ceramic thin plate and a manufacturing method thereof (application number: 10-2002-0033761). I've filed a petition.

However, the present invention also has a number of problems to be solved in the complexity of the manufacturing process, the processing of the side sliding guide requiring high precision, the precision of the spring processing to support the thin ceramic electrode.

The present invention has been made to solve the above problems of the prior art,

An object of the present invention is to provide a plasma reactor which is a key element of a purification apparatus for removing diesel particulate matter and nitrogen oxides or generating ozone for air purification and sterilization.

It is easy to control the gap of ceramic flat electrode using ceramic thin plate which is effective in ozone generation for air purification and sterilization, and it is easy to assemble and dismantle for easy maintenance and repair management. The present invention provides a plate-to-plate plasma reactor and a method of manufacturing the same.

1 is a conceptual diagram of a plate-to-plate plasma reactor using a ceramic thin plate according to the present invention

Figure 2 is an exploded view showing the configuration of a ceramic plate electrode according to the present invention

Figure 3 is a photograph showing the actual appearance of the plasma formed inside the plasma reactor of an embodiment according to the present invention

4 is a flow chart showing each step of the method of manufacturing a plasma reactor according to the present invention.

5 is a schematic view of a harmful gas treatment apparatus using a plasma reactor of the prior art.

FIG. 6 is a detailed view of the planar multilayer low temperature plasma reactor of FIG. 5. FIG.

** Explanation of symbols for main parts of drawings **

1: plasma reactor according to the present invention

100: ceramic plate electrode 110: ceramic thin plate member

120: electrode 130: energized coupling hole

140: non-electric coupling hole 150: large air

160: small hole 210: wave washer

230: metal bushing 240: ceramic bushing

300: spacer 400: plasma region

500: electrode screw rod 700: ceramic insulator

900: power supply

Mass-produced versatile plate-to-plate plasma reactor using a ceramic thin plate according to the present invention for achieving the above object,

In the planar multilayer plasma reactor used for plasma generation,

Metal paste is coated on one surface to form an electrode, one end of which is in contact with the electrode, and one end of which is in contact with the ceramic thin plate member having two non-conductive joining holes not in contact with the electrode. A plurality of ceramic plate electrodes which are coupled to each other and are adjacently stacked with each other having a predetermined gap and alternately arranged in such a manner that electrode directions are staggered;

A spacer disposed between the alternating ceramic plate electrodes to control a gap between the electrodes and to form a passage through which noxious gas flows;

And a plurality of ceramic plate electrodes and spacers arranged in an array and having an external electrode function. An electrode screw rod may be configured to cause plasma discharge through the electrode by power supply.

Method for producing a mass-produced versatile plate-to-plate plasma reactor using a ceramic thin plate according to the present invention for achieving the above object,

Masking one surface of the ceramic thin plate 110 in which coupling holes are formed at both ends (S1);

Step (S2) of forming a electrode 120 by applying a metal waste yeast so as to contact only one of the coupling holes formed on both sides of the masked surface of the ceramic thin plate, removing the mask and firing at high temperature (S2):

Bonding the ceramic thin plate 110 on which the electrodes are formed in a direction in which the electrode surfaces face each other and bonding the ceramic thin plates 110 with a ceramic paste (S3):

Baking the bonded two sheets of ceramic sheet at high temperature to form a ceramic plate electrode (S4):

Inserting a metal bushing into a conductive coupling hole in contact with an electrode of the ceramic plate electrode and inserting the ceramic bushing into a non-conductive coupling hole not in contact with the electrode (S5);

The electrode direction of the ceramic plate electrode to the two electrode screw rods alternately, sandwiching the spacer made of a heat-resistant mat between the layers and assembling the laminated arrangement (S6) characterized in that it comprises a.

Hereinafter, with reference to the accompanying drawings an embodiment of a mass-produced versatile plate-to-plate plasma reactor using a ceramic thin plate of the present invention will be described in more detail.

1 is a conceptual diagram showing the configuration of a plate-to-plate plasma reactor 1 using a ceramic thin plate according to the present invention.

The plate-type plasma reactor 1 using the ceramic thin plate of the present invention can be used from a low frequency band to a high frequency band according to a use, and as shown in FIG. 1, a metal paste is formed between the ceramic thin plate members 110. A plurality of ceramic plate electrodes 100 formed by coating and firing electrode portions 120, electrode screw rods 500 that connect the plurality of ceramic plate electrodes 100 and serve as electrodes to the outside; In order to maintain a gap between the ceramic plate electrodes 100, a spacer 300 made of a non-combustible mat, a ceramic insulator 700 for insulating fastening, and an electrical close contact and insulating fastening of the electrode 120. A washer, a metal bushing 230), a ceramic bushing 240, and a power supply 900.

FIG. 2 shows a ceramic thin plate member 1 (111) and ceramic in a state in which an electrode 120 is formed by applying and baking a metal paste to the ceramic thin plate member 110 forming the ceramic plate electrode 100 of the present invention. It is a detailed view which shows the structure of the thin plate member 2113.

As shown in FIG. 2, the ceramic plate electrode 100 has small holes 160 into which the conductive coupling holes 130 and the non-conductive coupling holes 140 provided at left and right sides thereof respectively fit only the electrode screw rod 120. ) And the bushing is fitted into the hole 150, the size is different from each other, and the ceramic plate member 1 (111) and the non-conductive coupling hole 140 is formed with a large hole on the side of the conductive coupling hole 130, the large hole 150 It is composed of a ceramic thin plate member 2 (113) formed of a), may be made by combining the ceramic thin plate member 1 and the ceramic thin plate member 2 so that the electrode 120 is in contact with each other.

The plasma is generated by supplying alternating current or direct current pulse power to the ceramic plate electrode through the power supply device 900. The ceramic plate electrode 100 may be laminated as needed to form a multilayer structure. Can be.

The electrode screw rod 500 is made of a metal conductor to contact the ceramic plate electrode 100 to form an external electrode required for supplying external power to the plasma reactor. In addition, since it is made of a screw rod shape, it is possible to facilitate the stacking of the ceramic plate electrodes 100 and to adjust the number of stacks of the ceramic plate electrodes to determine the size of the entire reactor.

The ceramic plate electrode 100 is provided with a washer and a bushing to the coupling portion for close contact and insulation with the electrode screw rod 120, the hole 150 of the conductive coupling hole 130 is made of brass, etc. The conductive metal bushing 230, the ceramic bushing 240 is inserted into the hole of the non-conductive coupling hole 140, the washer 210 is preferably used to adjust the elastic wave washer.

When power is supplied to the multilayer reactor assembled with multilayers, a plasma phenomenon occurs between the ceramic plate electrodes. The target gas is changed into a desired shape while passing through the plasma region 400, which is a space formed by the spacer 300. do.

In addition, the cathode and the anode are alternately positioned in each layer, and accordingly, the wiring structure of the wire may be slightly changed. The distance between the electrodes 120 facing each other and the thickness of the ceramic thin plate member 110 may vary from 0.1 mm to several mm depending on the stability of the plasma, input power, frequency, and device use. Is maintained by the compression rate of the spacer 300.

The bushing coupling part is provided with a wave washer 210 for close contact and anti-loosening, and a ceramic insulator 700 is fastened to both ends of the electrode screw rod 500 for insulation fastening.

The coupling structure of the ceramic plate electrode 100 with the electrode screw rod 500, that is, the configuration of the coupling holes 130, 140 formed on both sides, the coupling structure of the bushing 230, 240, washer, etc. In addition to the above embodiment may be configured in various ways.

In order to prevent arcs generated inside the plasma reactor during electrode stacking, the area and the coating thickness of the metal paste applied on the ceramic thin plate are important variables, such as the voltage used, the thickness of the ceramic thin plate, the gap between the ceramic thin plates, It can vary depending on the frequency.

3 shows a plasma generated using a plate-type plasma reactor using the ceramic plate electrode 100 of the present invention. The reactor was placed in a cylindrical outer structure, the brighter part being the plasma area and the darker part being the electrode part.

The effects of the present invention will be further clarified by the following examples.

<Example 1>

In one embodiment of the present invention, the exhaust gas of the diesel engine was treated with a plate-type plasma reactor to measure the conversion of NO to NO 2. The significance of the conversion is that when inventing the diesel aftertreatment system using the present invention, the 'soot' component in the PM is actively reacted with NO2 and removed, and the NOx removal catalyst developed by the present applicant also has NO2 activity. to be. Therefore, converting as much of the NO contained in the exhaust gas into NO 2 is an important role of the plasma reactor.

The engine to be tested is Hyundai Motor's 'common-rail' type direct injection diesel (2.0L) engine, which was tested under various operating conditions and the results are shown in Table 2. As the engine speed increases, the flow rate of the exhaust gas increases, and thus, the flow rate to be processed per unit volume of the plasma reactor increases, so that the conversion efficiency to NO2 decreases. That is, the conversion efficiency decreases slightly because the energy density supplied per unit flow rate decreases, but the conversion efficiency is relatively high and even in the entire operating range.

The specifications of the plasma reactor used in this experiment are as follows. The ceramic thin plate had a size of 34x170mm, a thickness of 1mm, and an electrode gap of 1.5mm, and was laminated in 25 layers. The power supply is 4kV AC, the current is 150mA, so the power supply is 600W and the frequency is 250Hz.

Table 2 shows the results of treating the diesel exhaust gas in the low frequency region using the plate-type plasma generator of the present invention.

TABLE 2

<Example 2>

As another embodiment of the present invention, the experiment was performed in the high frequency region of the same operating conditions or plasma reactor as in Example 1 and the results are shown in Table 3. The experimental results are generally similar to those of Example 1, but tend to decrease the conversion efficiency slightly. However, when operating the high frequency system, the reactor has the advantage that there is no contamination by diesel particulate matter.

Specifications of the plasma reactor used in the experiment are as follows. The ceramic thin plate was 34x170mm, the thickness was 1mm, the gap between electrodes was 1.5mm, and 25 layers were laminated. The operating voltage is 4kV AC and the current is 150mA. Therefore, the power supply is 600W and the operating frequency is 10kHz.

The result is a diesel exhaust gas treatment in the high frequency region using the plate-type plasma generator of the present invention.

TABLE 3

<Example 3>

As another embodiment of the present invention, an ozone generating apparatus was implemented in a low frequency region using a plate-type plasma reactor. Oxygen gas was used as the treatment gas in the experiment, and compressed air (5 bar, 200 LPM) was injected to cool the reactor. Experiments were performed for two cases and the results are shown in Table 4. Compared with the existing ozone generator, it was possible to generate a large amount of ozone with minimum energy consumption, and the concentration of the generated ozone could be easily controlled from a small amount to a large amount. Similar to the automobile exhaust gas treatment, the amount of ozone generated decreases slightly as the flow rate of oxygen to be treated increases.

Table 4 shows the experimental results of the ozone generator using the plate-type low frequency plasma generator.

TABLE 4

Therefore, by using the plasma apparatus of more stable and excellent efficiency as suggested in the present invention, it is possible to remove diesel particulate matter and nitrogen oxide or to generate air purification and ozone for sterilization more effectively.

Now, an embodiment of the above-described method of manufacturing a plasma reactor will be described with reference to the flowchart of FIG. 4.

First, the surface of the ceramic thin plate is washed with alcohol and then subjected to a masking step (S1) of covering one surface of the ceramic thin plate member 110 having the coupling holes 130 and 140 formed at both ends thereof with a mask. Coating and dry firing to form the electrode 120 (S2).

At this time, the metal paste is applied to contact only one side of the coupling holes of the both ends is formed by the conductive coupling hole 130 through which the electrode is communicated and the non-conductive coupling hole 140 does not contact the electrode.

Two sheets of the ceramic thin plate member 110, on which the electrode 120 is fired, are bonded (S3) using a ceramic paste so that different hole portions overlap each other, and then the bonded ceramic thin plate is fired at a high temperature to provide a ceramic flat electrode. To form 100 (S4).

The wave washer 210 is inserted into a portion of the conductive coupling hole contacting the electrode 120 of the ceramic plate electrode 100, the metal bushing 230 is placed thereon, and the non-electric coupling hole 140 is disposed on the side. The wave washer and the ceramic bushing 240 are inserted (S5).

After inserting the ceramic plate electrode 100 into the two electrode screw rods 500, the spacer 300 made of a heat-resistant mat is placed thereon, and the ceramic plate electrode 100 is alternately placed so that the electrode directions are alternately placed thereon. Repeated lamination (S6) to prepare a plasma reactor having a predetermined size of capacity.

The present invention manufactured by the above method makes it easy to control the gap of the ceramic flat electrode 100 by using the spacer 300, and to facilitate mass production and easy maintenance and maintenance by assembling and disassembling.

As those skilled in the art to which the present invention pertains, various permutations, modifications, and changes are possible without departing from the spirit of the present invention. .

As described in detail above, the mass-produced versatile plate-type plasma reactor using the ceramic thin plate according to the present invention and a manufacturing method thereof are characterized by using a ceramic thin plate having an effect on ozone generation for the treatment of vehicle exhaust gas and air purification and sterilization. In the plasma reactor, it is easy to control the gap of the ceramic plate electrode, and easy to assemble and dismantle, so that mass production is possible and easy to maintain and repair.

In addition, from the aspect of removing particulate matter, the present invention can oxidize 'soot' by converting NO into NO2 in the vehicle exhaust gas NOx component, and also obtain a DeNOx effect when a catalyst having activity in NO2 is installed. .

In addition, in view of ozone generation for air purification and sterilization, the present invention not only generates plasma with less energy, but also can easily control ozone to generate ozone stably and continuously to protect the environment at low cost. Has the advantage.

Claims (4)

In the planar multilayer plasma reactor used for plasma generation, The metal paste is coated on one surface to form the electrode 120, one end of the conductive coupling hole 130 contacting the electrode 120, and the other end of the non-electric coupling hole not contacting the electrode 120 ( Two ceramic thin plate members 110 provided with 140 are coupled to face each other so that the electrode 120 is in contact with each other, and a plurality of ceramics are alternately stacked so that adjacent ones have a predetermined gap and the electrode directions are staggered. Plate electrode 100; A spacer 300 disposed between the alternating ceramic plate electrodes 100 to adjust the gap between the electrodes and to form a passage through which harmful gas flows; An electrode screw rod 500 that assembles the plurality of ceramic plate electrodes 100 and the spacer 300 and has an external electrode function; And a mass-produced versatile plate-to-plate plasma reactor using ceramic thin plates, characterized in that configured to cause plasma discharge through the electrodes by power supply. The method of claim 1, The ceramic plate electrode 100, The conductive coupling holes 130 and the non-electric coupling holes 140 provided on the left and right sides are respectively configured to have different sizes from the small holes 160 into which only the electrode screw rods 120 are fitted and the large holes 150 into which the bushings are fitted. It consists of a ceramic thin plate member 1 (111) is formed of a large hole through the side of the coupling hole 130, the ceramic plate member 2 (113) is formed of a large hole 150, The wave washer 210 and the conductive metal bushing 230 are formed in the hole 150 of the energization coupling hole 130, and the wave washer 210 and the ceramic bushing 240 are formed in the hole of the non-electric coupling hole 140. Mass-produced versatile plate-to-plate plasma reactor using ceramic thin plate, characterized in that the assembly. The method of claim 1, The electrode screw rod 500 is a mass-produced versatile plate-type plasma reactor using a ceramic thin plate, characterized in that each of the ceramic insulator 700 is fastened to the end to fasten the ceramic plate electrode 100. Masking one surface of the ceramic thin plate 110 having coupling holes formed at both ends (S1); Step (S2) of applying a metal waste yeast so as to contact only one side of the coupling hole formed on both sides of the masked surface of the ceramic thin plate, removing the mask and firing at high temperature (S2): Bonding the ceramic thin plate 110 on which the electrodes are formed in a direction in which the electrode surfaces face each other and bonding the ceramic thin plates 110 with a ceramic paste (S3): Forming a ceramic plate electrode 100 by high temperature baking the bonded two sheets of ceramic thin plates (S4): Inserting the metal bushing 230 into the conductive coupling hole 130 in contact with the electrode of the ceramic plate electrode 100, and inserting the ceramic bushing 240 into the non-conductive coupling hole 140 in contact with the electrode (S5). ; Comprising the electrode direction of the ceramic plate electrode 100 to the two electrode screw rods 500 alternately, sandwiching the spacer 300 made of a heat-resistant mat between the layers and assembling the laminated arrangement (S6): made of A method for producing a mass-produced versatile plate-to-plate plasma reactor using a ceramic thin plate characterized in that.