KR100442148B1 - Apparatus for detecting an electric leakage in semiconductor device - Google Patents
Apparatus for detecting an electric leakage in semiconductor device Download PDFInfo
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- KR100442148B1 KR100442148B1 KR10-2002-0047140A KR20020047140A KR100442148B1 KR 100442148 B1 KR100442148 B1 KR 100442148B1 KR 20020047140 A KR20020047140 A KR 20020047140A KR 100442148 B1 KR100442148 B1 KR 100442148B1
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- leakage
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/50—Testing of electric apparatus, lines, cables or components for short-circuits, continuity, leakage current or incorrect line connections
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
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- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
- Charge And Discharge Circuits For Batteries Or The Like (AREA)
Abstract
본 발명은 반도체 장비에서의 누전 셀 검출장치에 관한 것으로, 배터리 세트(set)에 연동되어 누전 발생 시, 발생된 누전 여부 및 누전 셀에 대응하는 전압을 측정하여 제공하는 누전 축전지 정보 블록; 누전 축전지 정보 블록으로부터 제공되는 누전 여부를 제공받아 누전 사실을 파악하고, 누전 축전지 정보 블록으로부터 제공되는 누전셀에 대응하는 전압을 각 셀의 동작전압으로 나누어 누전 발생된 셀 번호를 파악한 후, 파악된 셀 번호를 페이징하는 감시반; 누전 셀을 교체할 수 있도록 스위칭 제어하는 조작반을 구비한다. 따라서, UPS에 백 업(back-up)을 해주는 배터리 셀(cell)중 누전되는 셀 번호만을 검출함으로써, 누전되어 불량된 배터리 셀을 신속하게 교체할 수 있어 반도체 장비의 손실을 막을 수 있는 효과가 있다.The present invention relates to an apparatus for detecting a leakage cell in semiconductor equipment, comprising: a leakage storage battery information block configured to measure a voltage corresponding to a leakage current and a leakage cell when the leakage occurs in connection with a battery set; After the leakage current is provided from the ground fault battery information block, the ground fault is identified, and the voltage corresponding to the ground fault cell provided from the ground fault battery information block is divided by the operating voltage of each cell to identify a cell number in which the ground fault occurs. A watch panel for paging a cell number; An operation panel for switching control to replace the leakage cell is provided. Therefore, by detecting only the cell number that leaks out of the battery cells backing up to the UPS, it is possible to replace the defective battery cell quickly and prevent the loss of semiconductor equipment. have.
Description
본 발명은 반도체 장비에서의 누전 셀 검출장치에 관한 것으로, 특히, 무 정전 전원을 공급하는 UPS(Uninterruptible Power Supply : USP)를 사용함에 있어서, 정전(또는, 누전) 시, UPS에 백 업(back-up)을 해주는 배터리 셀(cell)중 누전되는 셀 번호만을 검출할 수 있도록 하는 장치에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for detecting a ground fault cell in semiconductor equipment. In particular, in the case of using an uninterruptible power supply (USP) for supplying uninterruptible power, the present invention backs up to a UPS during a power failure (or short circuit). The present invention relates to a device for detecting only a leaking cell number among battery cells.
통상적으로, 반도체 산업에서 정전(또는, 누전)에 따라 순간 전압 강하가 발생하게 되면, 반도체 제어관련 장비에 엄청난 손실을 유발한다.In general, the instantaneous voltage drop caused by a power failure (or a short circuit) in the semiconductor industry causes enormous losses in the semiconductor control equipment.
즉, 반도체 제어관련 장비는 무 정전과 양질의 파워(Power)를 요구하는 것으로, UPS를 사용하여 무 정전 양질의 파워를 제공하며, UPS를 사용하는 중에 정전이 발생할 경우, UPS에 배터리를 이용하여 백 업(back-up)을 수행한다.That is, semiconductor control equipment requires no power outage and high quality power. It provides high quality power outage by using UPS, and if a power failure occurs while using the UPS, Perform a back-up.
이러한, 배터리 세트(set)(S1)는 도 1에 도시된 바와 같이 한 대의 UPS에 192개의 셀(cell)이 2조로 구성되어 총 384개의 셀(cell)로 구성되어 있으며, 한 셀당 전압은 2.25∼2.27V를 제공하도록 구성되어 있는 도면으로서, 도 1을 참조하면, 종래 반도체 장비에서의 누전 셀 검출장치에 대한 것으로서, 변류기(Current Transformer : CT)(10)와, 감시반(20)과, 조작반(30)을 구비한다.As shown in FIG. 1, the battery set S1 is composed of two sets of 192 cells in a single UPS and has a total of 384 cells, and the voltage per cell is 2.25. Referring to FIG. 1, which is configured to provide ˜2.27 V, referring to FIG. 1, a current transformer detecting device in a conventional semiconductor device includes a current transformer (CT) 10, a monitoring panel 20, and an operation panel. 30 is provided.
CT(10)는 배터리 세트(set)(S1)에 연동되어 누전 발생 시, 발생된 누전 여부만을 감시반(20)에 제공한다.The CT 10 is interlocked with the battery set S1 and provides only the generated short circuit to the monitoring panel 20 when a short circuit occurs.
감시반(20)은 모니터링을 수행하는 중에, CT(10)로부터 누전 여부가 제공되면, 제공된 누전 여부를 페이징, 즉 휴대전화로 누전 전압 여부 메시지를 송출한다.When the monitoring panel 20 is provided with a short circuit status from the CT 10 while performing monitoring, the monitoring panel 20 paging the short circuit provided, that is, sending a ground voltage message to the mobile phone.
여기서, 조작반(30)은 불량 셀을 교체하기 위한 스위칭 블록으로서, 총 384개의 셀 중 정전 및 누전에 따른 불량 셀이 발생할 경우, 이 불량 셀을 교체할 수 있도록 스위칭 제어한다.Here, the operation panel 30 is a switching block for replacing defective cells. When a defective cell occurs due to a power failure and a short circuit among a total of 384 cells, the operation panel 30 controls switching to replace the defective cell.
상술한 바와 같이, CT(10) 및 감시반(20)을 통해 누전 여부만을 운용자에게 송출하지만, 현재 누전된 불량 셀의 번호가 몇 번 셀에서 발생됐는지를 알 수 없어누전 발생 시 불량품을 신속하게 교체할 수 없다는 문제점이 있었다.As described above, only the short circuit is transmitted to the operator through the CT 10 and the monitoring panel 20, but it is not known how many times the number of the current faulty cell is generated in the cell. There was a problem that can not.
따라서, 본 발명은 상술한 문제점을 해결하기 위해 안출된 것으로서, 그 목적은 무 정전 전원을 공급하는 UPS(Uninterruptible Power Supply : USP)를 사용함에 있어서, 정전(또는, 누전) 시, UPS에 백 업(back-up)을 해주는 배터리 셀(cell)중 누전되는 셀 번호만을 검출하여 신속하게 불량품을 교체할 수 있도록 하는 반도체 장비에서의 누전 셀 검출장치를 제공함에 있다.Accordingly, the present invention has been made to solve the above-described problems, the object of the present invention is to use a UPS (Uninterruptible Power Supply (USP) for supplying uninterruptible power, in the event of a power failure (or short circuit), backup to the UPS The present invention provides a device for detecting a leaky cell in a semiconductor device, which detects only a cell number that leaks out of a battery cell that provides back-up, so that defective products can be replaced quickly.
상술한 목적을 달성하기 위하여 본 발명에서 반도체 장비에서의 누전 셀 검출장치는 배터리 세트(set)에 연동되어 누전 발생 시, 발생된 누전 여부 및 누전 셀에 대응하는 전압을 측정하여 제공하는 누전 축전지 정보 블록; 누전 축전지 정보 블록으로부터 제공되는 누전 여부를 제공받아 누전 사실을 파악하고, 누전 축전지 정보 블록으로부터 제공되는 누전셀에 대응하는 전압을 각 셀의 동작전압으로 나누어 누전 발생된 셀 번호를 파악한 후, 파악된 셀 번호를 페이징하는 감시반; 누전 셀을 교체할 수 있도록 스위칭 제어하는 조작반을 포함하는 것을 특징으로 한다.In order to achieve the above object, an electrical leak cell detecting apparatus in a semiconductor device according to the present invention interlocks with a battery set, and when the ground fault occurs, the ground fault accumulator battery information is provided by measuring a voltage corresponding to the ground fault and the ground fault cell. block; After the leakage current is provided from the ground fault battery information block, the ground fault is identified, and the voltage corresponding to the ground fault cell provided from the ground fault battery information block is divided by the operating voltage of each cell to identify a cell number in which the ground fault occurs. A watch panel for paging a cell number; It is characterized in that it comprises a control panel for switching control so that the earth leakage cell can be replaced.
도 1은 종래 반도체 장비에서의 누전 셀 검출장치에 대한 도면이며,1 is a diagram of an earth leakage cell detection apparatus in a conventional semiconductor device.
도 2는 본 발명에 따른 반도체 장비에서의 누전 셀 검출장치에 대한 도면이다.2 is a diagram illustrating an apparatus for detecting a leakage cell in semiconductor equipment according to the present invention.
<도면의 주요부분에 대한 부호의 설명><Description of the symbols for the main parts of the drawings>
5 : 누전 축전지 정보 블록 10 : 변류기5: earth leakage battery information block 10: current transformer
15 : DC 전압계 20 : 감시반15 DC voltmeter 20: monitoring board
25 : 연산부 30 : 조작반25: calculation unit 30: operation panel
S1 : 배터리 세트(set)S1: battery set
이하, 첨부된 도면을 참조하여 본 발명에 따른 실시 예를 상세하게 설명하기로 한다.Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.
도 2는 본 발명에 따른 반도체 장비에서의 누전 셀 검출장치에 대한 도면으로서, 누전 축전지 정보 블록(5)과, 감시반(20)과, 조작반(30)을 포함한다.FIG. 2 is a diagram of an electrical leak cell detecting apparatus in a semiconductor device according to the present invention, and includes an electrical leak storage battery information block 5, a monitoring panel 20, and an operation panel 30.
먼저, 도 2에 도시된 배터리 세트(set)(S1)에 대하여 설명하면, 한 대의 UPS에 192개의 셀(cell)이 2조로 구성되어 총 384개의 셀(cell)로 구성되어 있으며, 한 셀당 전압은 2.25∼2.27V를 제공하도록 구성되어 있는 것으로, 이 배터리 세트(set)(S1)의 출력 전압 단은 조작반(30)에 연동되어 있으며, 배터리 세트(S1)의 일 측면이 누전 축전지 정보 블록(5)에 연동되어 있으며, 누전 축전지 정보 블록(5)내 변류기(Current Transformer : CT)(10) 및 DC 전압계(15)의 다른 측면은 접지선(GND)에 연결되어 있다.First, referring to the battery set S1 illustrated in FIG. 2, two sets of 192 cells are configured in one UPS, which is composed of a total of 384 cells, and a voltage per cell. Is configured to provide 2.25 to 2.27V, and the output voltage stage of the battery set S1 is linked to the operation panel 30, and one side of the battery set S1 is a grounded battery information block ( 5), the other side of the current transformer (CT) 10 and the DC voltmeter 15 in the ground fault battery information block 5 is connected to the ground line (GND).
배터리 세트(set)(S1)에 연동된 누전 축전지 정보 블록(5)은 변류기(Current Transformer : CT)(10)와, DC 전압계(15)를 구비하는 것으로, DC 전압계(15)는 배터리 세트(set)(S1)에 연동되어 누전 발생 시, 발생된 누전 셀에 대응하는 전압(예로, 10번 셀에서 누전이 발생될 경우, 셀들이 직렬로 연결되어 있으므로, 1번 셀이 2.27V이면, 10번 셀은 22.7V의 전압)을 측정하여 감시반(20)에 제공한다.The earth leakage storage battery information block 5 linked to the battery set S1 includes a current transformer 10 and a DC voltmeter 15, and the DC voltmeter 15 includes a battery set ( When a short circuit occurs in connection with the set S1, a voltage corresponding to the generated short circuit (for example, when a short circuit occurs in the 10th cell, the cells are connected in series. Burn cell measures the voltage of 22.7V) and provides it to the monitor panel 20.
여기서, CT(10)는 배터리 세트(set)(S1)에 연동되어 누전 발생 시, 발생된 누전 여부만을 감시반(20)에 제공한다.Here, the CT 10 is interlocked with the battery set S1 to provide the monitoring panel 20 with only a short circuit occurring when a short circuit occurs.
감시반(20)은 내부적으로 연산부(25)를 구비하면서 모니터링을 수행하는 중에, CT(10)로부터 누전 여부를 제공받아 누전 사실을 파악하고, 이어서, DC 전압계(15)로부터 제공되는 전압, 즉 10번 셀에 대응하는 22.7V의 전압을 연산부(25)에 제공한다.The monitoring panel 20 is provided with the calculation unit 25 internally while performing monitoring, and is provided with the presence or absence of a short circuit from the CT 10 to detect the short circuit, and then, the voltage provided from the DC voltmeter 15, that is, 10 A voltage of 22.7 V corresponding to the first cell is provided to the calculation unit 25.
연산부(25)는 10번 셀에 대응하는 22.7V의 전압을 각 셀의 동작전압(2.27V)으로 나누어 누전 발생된 셀 번호(10번 셀)를 파악할 수 있으며, 파악된 셀번호(10번 셀)를 페이징, 즉 운용자가 사용하는 휴대전화로 송출한다.The calculation unit 25 may identify a cell number (cell 10) generated by a short circuit by dividing the voltage of 22.7V corresponding to cell 10 by the operating voltage (2.27V) of each cell. ) Is sent to the mobile phone used by the operator.
여기서, 조작반(30)은 불량 셀을 교체하기 위한 스위칭 블록으로서, 총 384개의 셀 중 정전 및 누전에 따른 불량 셀이 발생될 경우, 이 불량 셀을 교체할 수 있도록 스위칭 제어한다.Here, the operation panel 30 is a switching block for replacing defective cells, and when a defective cell due to a power failure and a short circuit among a total of 384 cells is generated, switching control is performed so that the defective cell can be replaced.
그러므로, 본 발명은 무 정전 전원을 공급하는 UPS(Uninterruptible Power Supply)를 사용함에 있어서, 정전(또는, 누전) 시, UPS에 백 업(back-up)을 해주는 배터리 셀(cell)중 누전되는 셀 번호만을 검출함으로써, 누전되어 불량된 배터리 셀을 신속하게 교체할 수 있어 반도체 장비의 손실을 막을 수 있는 효과가 있다.Therefore, in the present invention, when using an uninterruptible power supply (UPS) for supplying uninterruptible power, a cell that is shorted out of a battery cell that backs up to the UPS in case of power failure (or short circuit) By detecting only the number, it is possible to replace the short-circuited and defective battery cells quickly, thereby preventing the loss of semiconductor equipment.
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| Application Number | Priority Date | Filing Date | Title |
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| KR10-2002-0047140A KR100442148B1 (en) | 2002-08-09 | 2002-08-09 | Apparatus for detecting an electric leakage in semiconductor device |
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| KR10-2002-0047140A KR100442148B1 (en) | 2002-08-09 | 2002-08-09 | Apparatus for detecting an electric leakage in semiconductor device |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0888941A (en) * | 1994-09-16 | 1996-04-02 | Fuji Electric Co Ltd | Determining device of quality of storage battery for uninterruptible power supply unit |
| JP2000329834A (en) * | 1999-05-20 | 2000-11-30 | Hitachi Shonan Denshi Co Ltd | Battery deterioration detection method and device thereof |
| KR20010070239A (en) * | 1999-11-25 | 2001-07-25 | 니시무로 타이죠 | Semiconductor memory device |
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2002
- 2002-08-09 KR KR10-2002-0047140A patent/KR100442148B1/en not_active IP Right Cessation
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0888941A (en) * | 1994-09-16 | 1996-04-02 | Fuji Electric Co Ltd | Determining device of quality of storage battery for uninterruptible power supply unit |
| JP2000329834A (en) * | 1999-05-20 | 2000-11-30 | Hitachi Shonan Denshi Co Ltd | Battery deterioration detection method and device thereof |
| KR20010070239A (en) * | 1999-11-25 | 2001-07-25 | 니시무로 타이죠 | Semiconductor memory device |
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