KR100440469B1 - Recycling method of waste sulfuric acid etching solution, waste chloric acid etching solution and waste nitric acid etching solution - Google Patents

Recycling method of waste sulfuric acid etching solution, waste chloric acid etching solution and waste nitric acid etching solution Download PDF

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KR100440469B1
KR100440469B1 KR10-2001-0083386A KR20010083386A KR100440469B1 KR 100440469 B1 KR100440469 B1 KR 100440469B1 KR 20010083386 A KR20010083386 A KR 20010083386A KR 100440469 B1 KR100440469 B1 KR 100440469B1
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waste
etching solution
sulfuric acid
aluminum
acid etching
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KR20030053228A (en
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박성국
전희동
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삼성전기주식회사
재단법인 포항산업과학연구원
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23FNON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00Etching metallic material by chemical means
    • C23F1/46Regeneration of etching compositions

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Abstract

본 발명은 폐황산에칭액, 폐염산에칭액 및 폐질산에칭액의 재생 방법에 관한 것으로서, 더욱 상세하게는 (a) 알루미늄을 포함하는 폐황산에칭액 및 알루미늄을 포함하는 폐염산에칭액의 혼합액을 진공증발시켜 염산을 회수하는 단계; (b) 진공증발 후 알루미늄을 포함하는 폐황산에칭액에 알루미늄을 더욱 첨가하는 단계; (c) 상기 알루미늄이 첨가된 폐황산에칭액에 폐질산에칭액을 첨가하여 혼합액을 제조하는 단계; 및 (d) 상기 혼합액을 치환, 정류 및 진공증발시켜 질산 및 황산알루미늄 수처리응집제로 분리하는 단계를 포함하는 폐황산에칭액, 폐염산에칭액 및 폐질산에칭액의 재생 방법에 관한 것이다.The present invention relates to a method for regenerating waste sulfuric acid etching liquid, waste hydrochloric acid etching liquid and waste nitric acid etching liquid, and more particularly, (a) hydrochloric acid by vacuum evaporation of a mixed solution of waste sulfuric acid etching liquid containing aluminum and waste acid hydrochloric acid etching liquid containing aluminum. Recovering; (b) further adding aluminum to the spent sulfuric acid etching solution containing aluminum after vacuum evaporation; (c) adding a waste nitric acid etchant to the waste sulfuric acid etchant added with aluminum to prepare a mixed solution; And (d) substituting, rectifying and vacuum evaporating the mixed solution to separate the nitric acid and aluminum sulfate water treatment coagulants.

본 발명의 폐황산에칭액, 폐염산에칭액 및 폐질산에칭액의 재생 방법은 환경친화적이고 폐황산에칭액, 폐염산에칭액 및 폐질산에칭액으로부터 및 황산알루미늄 수처리응집제, 염산 및 질산을 재생할 수 있다.The waste sulfuric acid etchant, waste hydrochloric acid etchant and waste nitric acid etchant solution of the present invention are environmentally friendly and can recycle aluminum sulfate water treatment coagulant, hydrochloric acid and nitric acid from waste sulfuric acid etchant, waste hydrochloric acid etchant and waste nitric acid etchant.

Description

폐황산에칭액, 폐염산에칭액 및 폐질산에칭액의 재생 방법{RECYCLING METHOD OF WASTE SULFURIC ACID ETCHING SOLUTION, WASTE CHLORIC ACID ETCHING SOLUTION AND WASTE NITRIC ACID ETCHING SOLUTION}Recycling method of waste sulfuric acid etching solution, waste hydrochloric acid etching liquid and waste nitric acid etching liquid {RECYCLING METHOD OF WASTE SULFURIC ACID ETCHING SOLUTION, WASTE CHLORIC ACID ETCHING SOLUTION AND WASTE NITRIC ACID ETCHING SOLUTION}

[산업상 이용 분야][Industrial use]

본 발명은 폐황산에칭액, 폐염산에칭액 및 폐질산에칭액의 재생 방법에 관한 것으로서, 더욱 상세하게는 환경친화적이고 폐황산에칭액, 폐염산에칭액 및 폐질산에칭액으로부터 황산알루미늄 수처리응집제, 염산 및 질산을 재생할 수 있는 폐황산에칭액, 폐염산에칭액 및 폐질산에칭액의 재생 방법에 관한 것이다.The present invention relates to a method for regenerating waste sulfuric acid etching solution, waste hydrochloric acid etching liquid and waste nitric acid etching liquid, and more particularly, is environmentally friendly and regenerates aluminum sulfate water treatment coagulant, hydrochloric acid and nitric acid from waste sulfuric acid etching liquid, waste hydrochloric acid etching liquid and waste nitric acid etching liquid. The waste sulfuric acid etching liquid, the waste hydrochloric acid etching liquid, and the waste nitric acid etching liquid which can regenerate this method are related.

[종래 기술][Prior art]

황산, 염산 및 질산은 공업용 금속 에칭액으로 광범위하게 사용되어 오고 있다. 그러나 상기 산은 pH가 매운 낮은 강산이므로 에칭 후 폐황산에칭액, 폐염산에칭액 및 폐질산에칭액은 환경에 매우 유해한 물질이다.Sulfuric acid, hydrochloric acid and nitric acid have been widely used as industrial metal etching solutions. However, since the acid has a very low pH, the sulfuric acid etching solution, the hydrochloric acid etching solution and the waste nitric acid etching solution are very harmful to the environment after etching.

상기 유해성 폐황산에칭액 및 폐질산에칭액을 제거하기 위하여 가성소다, 탄산칼슘 또는 수산화칼슘 등으로 중화시켜 폐기하는 방법이 일반적으로 사용되어 오고 있다. 그러나 폐황산에칭액 및 폐질산에칭액 제거 공정에서 비소, 구리, 철, 아연, 납, 카드뮴 등과 같은 새로운 2차 폐기물이 다량 생성되며, 그 중 비소, 납 등은 인체뿐만 아니라 자연계에 존재하는 모든 생물체에 매우 유해한 물질로서 심각한 환경오염을 유발한다.In order to remove the hazardous waste sulfuric acid etchant and waste nitric acid etchant, a method of neutralizing and disposing with caustic soda, calcium carbonate or calcium hydroxide has been generally used. However, large amounts of new secondary wastes such as arsenic, copper, iron, zinc, lead, and cadmium are generated in the waste sulfuric acid etchant and waste nitric acid etchant removal process. Among them, arsenic, lead, etc. A very harmful substance that causes serious environmental pollution.

따라서 상기 폐황산에칭액을 중화시켜 제거하는 방법 대신 폐황산에칭액을 황산으로 재생하는 방법이 제안되었다. 미국특허 제 4,547,353호에는 폐황산에칭액을 완전히 증발농축시킨 후 열분해하여 아황산가스로 만든 후 다시 촉매로 치환하고 물에 흡수시켜 황산으로 재생시키는 방법에 관하여 기재되어 있다. 그러나 상기 황산의 재생 방법에는 황산의 분해에 다량의 에너지가 필요하고 또한 황산의 금속부식성으로 인하여 고온내식성 설비가 필요하며 대규모의 장치가 필요하다. 따라서 폐황산에칭액 재생시에 효율적으로 폐황산에칭액으로부터 황산을 재생할 수 없다는 문제점이 있었다.Therefore, instead of the method of neutralizing and removing the waste sulfuric acid etching solution, a method of regenerating the waste sulfuric acid etching solution with sulfuric acid has been proposed. U.S. Patent No. 4,547,353 describes a method for completely evaporating a spent sulfuric acid etch solution, pyrolysing to form sulfurous acid gas, replacing it with a catalyst, absorbing it in water and regenerating it with sulfuric acid. However, the regeneration method of sulfuric acid requires a large amount of energy to decompose sulfuric acid, high temperature corrosion resistance facilities due to the metal corrosion of sulfuric acid, and a large-scale device is required. Therefore, there is a problem that sulfuric acid cannot be recovered from the waste sulfuric acid etching solution efficiently during the recovery of the waste sulfuric acid etching solution.

하기 표 1은 알루미늄 호일의 에칭공정 후 발생되는 폐질산에칭액 중의 여러 가지 불순물의 종류와 함량을 나타내었다.Table 1 below shows the types and contents of various impurities in the waste nitric acid etching solution generated after the etching process of aluminum foil.

구분division HNO3(g/ℓ)HNO 3 (g / ℓ) Al(g/ℓ)Al (g / ℓ) Mg(ppm)Mg (ppm) Fe(ppm)Fe (ppm) Ca(ppm)Ca (ppm) P(ppm)P (ppm) Mn(ppm)Mn (ppm) 질산폐에칭액Nitrate Waste Etching Solution 120-160120-160 15-2515-25 0.1-40.1-4 0.5-50.5-5 0.8-70.8-7 1-51-5 2-92-9

상기 표 1에 나타난 바와 같이, 폐질산에칭액에는 다량의 알루미늄 성분이 포함되어 있어 상기 폐질산에칭액을 에칭액으로 사용하려면 알루미늄이온을 제거해야 하며, 폐질산에칭액 중 알루미늄 농도는 15-25 g/ℓ로 질산알루미늄 수처리응집제로서 바람직한 알루미늄 농도인 30-50 g/ℓ에 비하여 농도가 매우 낮아 에칭액 또는 수처리응집제로나 어느 용도로도 사용될 수 없다. 또한, 질산알루미늄 폐에칭액은 수처리공정에서 생화학적 산소요구량(COD) 및 총질소의 함량 등의 항목에서 환경적 규제를 받고 있어 질산알루미늄 폐에칭액을 수처리응집제로 사용하기 부적합하다는 문제점이 있다.As shown in Table 1, the waste nitric acid etchant contains a large amount of aluminum components, in order to use the waste nitric acid etchant as an etching solution, aluminum ions must be removed and the aluminum concentration in the waste nitric acid etchant is 15-25 g / l. The concentration is very low compared to 30-50 g / L, which is a preferable aluminum concentration as an aluminum nitrate water treatment coagulant, and cannot be used as an etchant or water treatment coagulant or for any use. In addition, the aluminum nitrate waste etching solution is environmentally regulated in terms of biochemical oxygen demand (COD) and total nitrogen content in the water treatment process, there is a problem that the aluminum nitrate waste etching solution is not suitable for use as a water treatment coagulant.

하기 표 2은 알루미늄 호일의 에칭공정 후 발생되는 폐황산에칭액 중의 여러 가지 불순물의 종류와 함량을 나타내었다.Table 2 below shows the types and contents of various impurities in the waste sulfuric acid etching solution generated after the etching process of aluminum foil.

구분division H2SO4(g/ℓ)H 2 SO 4 (g / ℓ) HCl(g/ℓ)HCl (g / ℓ) Al(g/ℓ)Al (g / ℓ) Na(ppm)Na (ppm) Fe(ppm)Fe (ppm) Ca(ppm)Ca (ppm) Mg(ppm)Mg (ppm) Mn(ppm)Mn (ppm) 폐황산에칭액Waste sulfuric acid etching solution 380-395380-395 12-3412-34 9-119-11 0.2-1.00.2-1.0 3-103-10 2-112-11 1-61-6 2-72-7

상기 표 2에 나타난 바와 같이, 폐황산에칭액은 다량의 염산 및 알루미늄 성분을 포함하고 있으므로 폐황산에칭액을 에칭액으로 재사용하기 위해서는 염산 및 알루미늄 등의 불순물 성분을 제거하여 재생되는 황산의 순도를 높여야 한다.As shown in Table 2, since the waste sulfuric acid etching solution contains a large amount of hydrochloric acid and aluminum components, in order to reuse the waste sulfuric acid etching solution as an etching solution, it is necessary to remove impurities such as hydrochloric acid and aluminum to increase the purity of sulfuric acid to be regenerated.

또한, 하기 표 3에는 일반적으로 사용되는 황산알루미늄 수처리응집제에 관한 내용을 나타내었다.In addition, Table 3 below shows the contents of the aluminum sulfate water treatment coagulant generally used.

구분division Al2O3(Al 농도)(%)Al 2 O 3 (Al concentration) (%) 유효 pHEffective pH 중화용 NaOH사용량(g/kg)Neutralization of NaOH (g / kg) 금속수산화물 발생량(g/kg)Metal hydroxide generation amount (g / kg) 용해성(g/100㎖)Solubility (g / 100ml) 적정영역Proper area 사용영역Area of use 황산알루미늄 수처리응집제Aluminum Sulfate Water Treatment Coagulant 7-8(4-5)7-8 (4-5) 5-7.55-7.5 3.5-8.53.5-8.5 190190 122122 65.365.3

상기 표 3에서 중화용 NaOH 사용량(g/kg)은 황산알루미늄 수처리응집제 1kg을 중화하는데 필요한 NaOH 사용량이고, 금속수산화물 발생량(g/kg)은 황산알루미늄 수처리응집제 1kg에서 발생되는 금속수산화물 슬러지량이고, 용해성(g/100㎖)은 물 100㎖에 용해되는 황산알루미늄 수처리응집제의 량을 나타낸다.In Table 3, the amount of NaOH used for neutralization (g / kg) is the amount of NaOH used to neutralize 1 kg of aluminum sulfate water treatment coagulant, and the amount of metal hydroxide generated (g / kg) is the amount of metal hydroxide sludge generated in 1 kg of aluminum sulfate water treatment coagulant. Solubility (g / 100 mL) refers to the amount of aluminum sulfate water treatment coagulant dissolved in 100 mL of water.

상기 표 3에 나타난 바와 같이, 황산알루미늄 수처리응집제 사용시 적정 pH 범위는 3.5-8.5로 거의 중성에 가까우나, 폐황산에칭액에 포함되어 있는 황산의 함량이 지나치게 많고 또한 폐질산에칭액에 포함되어 있는 질산의 함량이 지나치게 많아 폐황산에칭액 및 폐질산에칭액을 황산알루미늄 수처리응집제로 사용하기 위하여 다량의 중화제로 폐황산에칭액 및 폐질산에칭액을 중화하여야 한다는 문제점이 있다.As shown in Table 3, when the aluminum sulfate water treatment coagulant is used, the optimum pH range is 3.5-8.5, which is almost neutral, but the amount of sulfuric acid contained in the spent sulfuric acid etchant is too high and the nitric acid contained in the waste nitric acid etchant is used. In order to use the waste sulfuric acid etchant and the waste nitric acid etchant as an aluminum sulfate water treatment coagulant because the content is too high, there is a problem in that the waste sulfuric acid etchant and the waste nitric acid etchant are neutralized with a large amount of neutralizing agent.

또한, 일반적인 폐황산에칭액 중의 알루미늄 농도는 9-11 g/ℓ로 황산알루미늄 수처리응집제로서 바람직한 알루미늄 농도인 30-50 g/ℓ에 비하여 농도가 매우 낮음을 알 수 있다. 따라서 폐황산에칭액을 황산알루미늄 수처리응집제로 사용하기에 부적합하다는 문제점이 있다.In addition, the aluminum concentration in the general waste sulfuric acid etching solution is 9-11 g / l, it can be seen that the concentration is very low compared to 30-50 g / l, which is a preferable aluminum sulfate water treatment coagulant. Therefore, there is a problem that the waste sulfuric acid etching solution is not suitable for use as the aluminum sulfate water treatment coagulant.

본 발명은 상술한 문제점을 해결하기 위한 것으로서, 본 발명의 목적은 환경친화적이고 폐황산에칭액, 폐염산에칭액 및 폐질산에칭액으로부터 황산알루미늄 수처리응집제, 염산 및 질산을 재생할 수 있는 폐황산에칭액, 폐염산에칭액 및 폐질산에칭액의 재생 방법을 제공하기 위한 것이다.The present invention is to solve the above-mentioned problems, an object of the present invention is an environmentally friendly waste sulfuric acid etching solution, waste hydrochloric acid which can recover aluminum sulfate water treatment coagulant, hydrochloric acid and nitric acid from waste sulfuric acid etching solution, waste hydrochloric acid etching solution and waste nitric acid etching solution. An etching solution and a waste nitric acid etching solution are provided.

도 1은 폐황산에칭액, 폐염산에칭액 및 폐질산에칭액의 재생 방법을 나타내는 도면이다.BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a diagram showing a method for regenerating waste sulfuric acid etching liquid, waste hydrochloric acid etching liquid and waste nitric acid etching liquid.

상기 목적을 달성하기 위하여, 본 발명은 (a) 알루미늄을 포함하는 폐황산에칭액 및 알루미늄을 포함하는 폐염산에칭액의 혼합액을 진공증발시켜 염산을 회수하는 단계; (b) 진공증발 후 알루미늄을 포함하는 폐황산에칭액에 알루미늄을 더욱 첨가하는 단계; (c) 상기 알루미늄이 첨가된 폐황산에칭액에 폐질산에칭액을 첨가하여 혼합액을 제조하는 단계; 및 (d) 상기 혼합액을 치환, 정류 및 진공증발시켜 질산 및 황산알루미늄 수처리응집제로 분리하는 단계를 포함하는 폐황산에칭액, 폐염산에칭액 및 폐질산에칭액의 재생 방법을 제공한다.In order to achieve the above object, the present invention comprises the steps of (a) recovering hydrochloric acid by vacuum evaporation of a mixed solution of waste sulfuric acid etching solution containing aluminum and waste hydrochloric acid etching solution containing aluminum; (b) further adding aluminum to the spent sulfuric acid etching solution containing aluminum after vacuum evaporation; (c) adding a waste nitric acid etchant to the waste sulfuric acid etchant added with aluminum to prepare a mixed solution; And (d) provides a method for regeneration of the waste sulfuric acid etching solution, waste hydrochloric acid etching solution and waste nitric acid etching solution comprising the step of separating, rectifying and vacuum evaporation of the mixed solution to the nitric acid and aluminum sulfate water treatment coagulant.

이하 본 발명을 더욱 상세하게 설명한다.Hereinafter, the present invention will be described in more detail.

본 발명의 폐황산에칭액, 폐염산에칭액 및 폐질산에칭액의 재생 방법은 (a) 알루미늄을 포함하는 폐황산에칭액 및 알루미늄을 포함하는 폐염산에칭액의 혼합액을 진공증발시켜 염산을 회수하는 단계; (b) 진공증발 후 알루미늄을 포함하는 폐황산에칭액에 알루미늄을 더욱 첨가하는 단계; (c) 상기 알루미늄이 첨가된 폐황산에칭액에 폐질산에칭액을 첨가하여 혼합액을 제조하는 단계; 및 (d) 상기 혼합액을 치환, 정류 및 진공증발시켜 질산 및 황산알루미늄 수처리응집제로 분리하는 단계를 포함한다.The method for regenerating waste sulfuric acid etchant, waste hydrochloric acid etchant and waste nitric acid etchant comprises: (a) recovering hydrochloric acid by vacuum evaporation of a mixed solution of waste sulfuric acid etchant including aluminum and waste hydrochloric acid etchant containing aluminum; (b) further adding aluminum to the spent sulfuric acid etching solution containing aluminum after vacuum evaporation; (c) adding a waste nitric acid etchant to the waste sulfuric acid etchant added with aluminum to prepare a mixed solution; And (d) separating the mixed solution into a nitric acid and aluminum sulfate water treatment coagulant by substitution, rectification, and vacuum evaporation.

본 발명의 폐황산에칭액 및 폐질산에칭액의 재생 방법은 먼저 (a) 알루미늄을 포함하는 폐황산에칭액 및 알루미늄을 포함하는 폐염산에칭액의 혼합액을 진공증발시켜 염산을 회수한다. 폐황산에칭액 및 폐질산에칭액을 진공에서 가열하면 염산수용액을 회수할 수 있다. 이는 황산은 비휘발성이나 염산은 휘발성이 강한 점을 이용한 것이다. 폐황산에칭액을 가열하여 폐황산에칭액에 포함되어 있는 염산을 미리 증발시키면 잔류하는 폐황산에칭액은 증발된 염산의 함량만큼 더 고농도의 폐황산에칭액이 된다.In the method for regenerating the waste sulfuric acid etchant and waste nitric acid etchant of the present invention, (a) hydrochloric acid is recovered by vacuum evaporation of a mixed solution of the waste sulfuric acid etchant containing aluminum and the waste hydrochloric acid etching solution containing aluminum. The aqueous hydrochloric acid solution can be recovered by heating the spent sulfuric acid etchant and the spent nitric acid etchant in vacuo. This is because sulfuric acid is nonvolatile but hydrochloric acid is highly volatile. When the spent sulfuric acid etching solution is heated to evaporate the hydrochloric acid contained in the spent sulfuric acid etching solution in advance, the remaining waste sulfuric acid etching solution becomes a higher concentration of waste sulfuric acid etching solution as much as the amount of evaporated hydrochloric acid.

폐황산에칭액을 진공증발시킨 후 (b) 진공증발 후 알루미늄을 포함하는 폐황산에칭액에 알루미늄을 더욱 첨가한다. 즉, 잔류 폐황산에칭액에서 염산을 증발시키고 알루미늄을 첨가하여 황산알루미늄 수처리응집제로 사용하기 위함이다. 상기 알루미늄의 첨가량은 최종 생성되는 황산알루미늄 수처리응집제의 농도가 30-50g/ℓ가 되도록 첨가하는 것이 바람직하다. 또한 상기 폐황산에칭액 중 알루미늄의 농도를 황산알루미늄 수처리응집제로 사용하기 위해 요구되는 황산알루미늄 농도 이상으로 높인 다음 잔류 고형분을 여과시킨다.After evaporating the waste sulfuric acid etching solution (b), the aluminum is further added to the waste sulfuric acid etching solution containing aluminum after vacuum evaporation. That is, to evaporate hydrochloric acid from the residual spent sulfuric acid etching solution and to add aluminum to be used as an aluminum sulfate water treatment coagulant. The addition amount of the aluminum is preferably added so that the concentration of the final produced aluminum sulfate water treatment coagulant is 30-50 g / l. In addition, the concentration of aluminum in the spent sulfuric acid etching solution is raised to the aluminum sulfate concentration required for use as the aluminum sulfate water treatment coagulant, and the residual solids are filtered.

일반적인 폐황산에칭액 중의 알루미늄의 농도는 약 9-11g/ℓ에 불과하므로 알루미늄의 농도를 황산알루미늄 수처리응집제로 사용가능한 농도인 30-50g/ℓ가 되도록 확산투석 전에 미리 폐황산에칭액에 알루미늄을 첨가하여 가열·용해시켜 폐황산에칭액 중의 알루미늄의 농도를 높이는 것이 바람직하다.In general, the concentration of aluminum in waste sulfuric acid etchant is only about 9-11 g / l, so that aluminum is added to the waste sulfuric acid etchant before diffusion dialysis so that the concentration of aluminum is 30-50g / l, which can be used as aluminum sulfate water treatment coagulant. It is preferable to heat and melt | dissolve and to raise the density | concentration of aluminum in waste sulfuric acid etching liquid.

이 때, 첨가되는 알루미늄으로는 폐자원인 알루미늄 폐칩를 사용하는 것이 환경친화적인 면에서나 경제적인 면에서나 바람직하다. 알루미늄 폐칩은 알카리탈지액으로 완전히 탈지하여 불순물을 제거하여 사용하는 것이 바람직하다.At this time, it is preferable to use aluminum waste chips as waste resources in terms of environment friendliness and economics. Aluminum waste chips are preferably used by completely degreasing with alkaline degreasing solution to remove impurities.

잔류 폐황산에칭액에 알루미늄을 첨가한 후 (c) 상기 알루미늄이 첨가된 폐황산에칭액에 폐질산에칭액을 첨가하여 혼합액을 제조한다.After adding aluminum to the residual waste sulfuric acid etching solution, (c) the waste nitric acid etching solution is added to the waste sulfuric acid etching solution to which the aluminum is added to prepare a mixed solution.

그 다음 (d) 상기 혼합액을 치환, 정류 및 진공증발시켜 질산 및 황산알루미늄 수처리응집제로 분리한다.(D) Subsequently, the mixed solution is substituted, rectified and vacuum evaporated to separate the nitric acid and aluminum sulfate water treatment coagulants.

상기 알루미늄이 첨가된 잔류 폐황산에칭액에 폐질산에칭액을 첨가하고 가열한다. 즉, 황산알루미늄용액에 폐질산에칭액을 첨가하여 가열하면 폐질산에칭액에 포함되어 있는 질산알루미늄이 황산알루미늄으로 치환된다.The waste nitric acid etching solution is added to the residual waste sulfuric acid etching solution to which the aluminum is added and heated. That is, when the waste nitric acid etching solution is added to the aluminum sulfate solution and heated, the aluminum nitrate contained in the waste nitric acid etching solution is replaced with aluminum sulfate.

알루미늄은 전기화학적으로 질산보다 황산과 착제를 형성하기가 용이하므로 폐질산에칭액에 포함되어 있는 알루미늄은 폐황산에칭액에 포함되어 있는 황산과 용이하게 착제를 형성한다. 따라서 폐질산에칭액을 폐황산에칭액과 혼합하여 폐질산에칭액에 포함되어 있는 질산알루미늄이 질산과 알루미늄으로 분리되고 분리된 알루미늄은 폐황산에칭액의 황산과 착제를 형성하여 황산알루미늄이 되고 질산은 다시 에칭액으로 재사용할 수가 있다.Since aluminum is easier to form a complex with sulfuric acid than with nitric acid, aluminum contained in the spent nitric acid etchant easily forms a complex with sulfuric acid contained in the spent sulfuric acid etchant. Therefore, the waste nitric acid etchant is mixed with the waste sulfuric acid etchant and the aluminum nitrate contained in the waste nitric acid etchant is separated into nitric acid and aluminum. You can do it.

또한, 재생되는 질산 및 황산알루미늄의 순도를 높이기 위하여 정류공정을 더욱 실시할 수 있다.In addition, in order to increase the purity of the regenerated nitric acid and aluminum sulfate can be further carried out a rectification process.

또한 상기 폐황산에칭액에 폐질산에칭액의 혼합액을 진공증발시킨다. 이는 황산이 비휘발성이나 질산은 휘발성이 강한 성질을 이용하여 질산을 진공에서 가열하여 분리해낼 수 있다. 진공증발로 분리된 질산은 다시 금속에칭액으로 재사용할 수 있다.Further, the mixed solution of the waste nitric acid etchant is evaporated in the waste sulfuric acid etchant. This is because sulfuric acid is non-volatile, but nitric acid is highly volatile, and nitric acid can be separated by heating in vacuum. The nitric acid separated by vacuum evaporation can be reused as a metal etchant.

상기 치환, 정류된 폐황산에칭액 중 황산알루미늄용액에 포함되어 있는 알루미늄 농도는 4%(42g/ℓ) 내외가 가장 바람직하다.In the substituted and rectified waste sulfuric acid etching solution, the aluminum concentration contained in the aluminum sulfate solution is most preferably about 4% (42 g / L).

치환, 정류된 폐황산에칭액의 농도를 측정한 후, 수처리응집제로 사용하기에 적합한 알루미늄 농도인 35-45g/ℓ로 조절하여 수처리응집제로 재사용하고, 치환,정류공정에서 회수된 질산은 에칭액으로 사용가능한 질산농도인 130-150g/ℓ로 조절하여 에칭액으로 재사용한다.After measuring the concentration of the substituted and rectified waste sulfuric acid etching solution, it was adjusted to 35-45 g / l, which is suitable for use as a water treatment coagulant, and reused as a water treatment coagulant. The nitric acid recovered in the substitution and rectification process can be used as an etching solution. The nitric acid concentration is adjusted to 130-150 g / l and reused as an etchant.

상기에서 살펴본 바와 같이, 본 발명의 폐황산에칭액, 폐염산에칭액 및 폐질산에칭액의 재생 방법은 환경친화적이고 폐황산에칭액, 폐염산에칭액 및 폐질산에칭액으로부터 황산알루미늄 수처리응집제, 염산 및 질산을 재생할 수 있다.As described above, the recycling method of waste sulfuric acid etching solution, waste hydrochloric acid etching solution and waste nitric acid etching solution of the present invention is environmentally friendly and can recover aluminum sulfate water treatment coagulant, hydrochloric acid and nitric acid from waste sulfuric acid etching solution, waste hydrochloric acid etching solution and waste nitric acid etching solution. have.

이하, 본 발명의 바람직한 실시예 및 비교예를 기재한다. 하기 실시예 및 비교예는 본 발명을 보다 명확히 표현하기 위한 것으로서 본 발명의 내용이 하기 실시예에 한정되는 것은 아니다.Hereinafter, preferred examples and comparative examples of the present invention are described. The following examples and comparative examples are intended to express the present invention more clearly, and the content of the present invention is not limited to the following examples.

[실시예 1-3 및 비교예][Example 1-3 and Comparative Example]

폐황산에칭액을 진공에서 가열하여 염산을 분리 및 회수하여 500g/ℓ의 고농도의 폐황산에칭액을 제조하였다. 그 다음 알루미늄 선반 가공공정에서 생성된 두께 0.1 ㎜의 얇은 나선형 알루미늄 폐칩을 잘게 잘라 에틸알코올에 담근 후 10 분간 초음파로 탈지한 다음 잔류 폐황산에칭액에 용해시켰다.The waste sulfuric acid etching solution was heated in vacuo to separate and recover hydrochloric acid, thereby preparing a high concentration of waste sulfuric acid etching solution of 500 g / L. Then, a thin spiral aluminum waste chip having a thickness of 0.1 mm produced in an aluminum lathe processing process was finely chopped, soaked in ethyl alcohol, degreased by ultrasonic wave for 10 minutes, and then dissolved in the residual waste sulfuric acid etching solution.

그 다음 실험용 카트리지 필터를 사용하여 상기 알루미늄이 첨가된 잔류 폐황산에칭액에서 잔류 고형물을 여과하였다.A residual solid was then filtered from the aluminum spent sulfuric acid etchant using an experimental cartridge filter.

알루미늄이 용해된 폐황산에칭액에 폐질산에칭액을 서서히 투입하며 진공에서 가열하여 질산을 회수하고 질산알루미늄을 황산알루미늄으로 치환하였다.The waste nitric acid etchant was slowly added to the waste sulfuric acid etchant in which aluminum was dissolved, and heated in vacuo to recover nitric acid and replace aluminum nitrate with aluminum sulfate.

또한, 일반적으로 사용되는 수처리응집제를 비교예로 하였다. 하기 표 4에는 상기 실시예를 통하여 제조된 수처리응집제의 성분을 분석한 결과이다.Moreover, the water treatment coagulant generally used was made into the comparative example. Table 4 shows the results of analyzing the components of the water treatment coagulant prepared through the above examples.

구분division pHpH 비중importance Al(g/ℓ)Al (g / ℓ) Fe(mg/ℓ)Fe (mg / L) NO3 -(g/ℓ)NO 3 - (g / ℓ) Cl-(g/ℓ)Cl - (g / ℓ) SO4 2-(g/ℓ)SO 4 2- (g / ℓ) 실시예 1Example 1 1.11.1 1.One. 48.248.2 26.326.3 -- 0.20.2 331.7331.7 실시예 2Example 2 1.91.9 1.31.3 43.943.9 16.516.5 -- 0.40.4 235.6235.6 실시예 3Example 3 2.02.0 1.31.3 47.347.3 59.159.1 -- 0.20.2 228.7228.7 비교예 1Comparative Example 1 3.03.0 1.31.3 46.446.4 9.79.7 -- 278.4278.4

상기 표 4에 나타난 바와 같이, 본 발명의 실시예에 의하여 재생된 수처리응집제는 일반적으로 사용되는 수처리응집제와 유사한 성분을 포함하고 있다.As shown in Table 4, the water treatment coagulant recycled according to the embodiment of the present invention includes a component similar to the water treatment coagulant generally used.

발명의 폐황산에칭액, 폐염산에칭액 및 폐질산에칭액의 재생 방법은 환경친화적이고 폐황산에칭액, 폐염산에칭액 및 폐질산에칭액으로부터 황산알루미늄 수처리응집제, 염산 및 질산을 재생할 수 있다.The waste sulfuric acid etching solution, waste hydrochloric acid etching solution and waste nitric acid etching solution recycling method of the present invention is environmentally friendly and can recover aluminum sulfate water treatment coagulant, hydrochloric acid and nitric acid from waste sulfuric acid etching liquid, waste hydrochloric acid etching liquid and waste nitric acid etching liquid.

Claims (2)

(a) 알루미늄을 포함하는 폐황산에칭액 및 알루미늄을 포함하는 폐염산에칭액의 혼합액을 진공증발시켜 염산을 회수하는 단계;(a) recovering hydrochloric acid by vacuum evaporating a mixed solution of waste sulfuric acid etching solution containing aluminum and waste hydrochloric acid etching solution containing aluminum; (b) 진공증발 후 알루미늄을 포함하는 폐황산에칭액에 알루미늄을 더욱 첨가하는 단계;(b) further adding aluminum to the spent sulfuric acid etching solution containing aluminum after vacuum evaporation; (c) 상기 알루미늄이 첨가된 폐황산에칭액에 폐질산에칭액을 첨가하여 혼합액을 제조하는 단계; 및(c) adding a waste nitric acid etchant to the waste sulfuric acid etchant added with aluminum to prepare a mixed solution; And (d) 상기 혼합액을 치환, 정류 및 진공증발시켜 질산 및 황산알루미늄 수처리응집제로 분리하는 단계(d) separating the mixed solution into a nitric acid and aluminum sulfate water treatment coagulant by substitution, rectification and vacuum evaporation; 를 포함하는 폐황산에칭액, 폐염산에칭액 및 폐질산에칭액의 재생 방법.Waste sulfuric acid etchant, waste hydrochloric acid etchant and waste nitric acid etchant solution comprising a. 제 1항에 있어서, (b) 단계의 알루미늄은 폐알루미늄칩인 폐황산에칭액, 폐염산에칭액 및 폐질산에칭액의 재생 방법.The method of regenerating waste sulfuric acid etchant, waste hydrochloric acid etchant and waste nitric acid etchant according to claim 1, wherein the aluminum of step (b) is waste aluminum chip.
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KR20180109380A (en) 2017-03-28 2018-10-08 주식회사 삼광 Method for producing a mixed salt of ammonium nitrate and calcium nitrate using mixed waste liquid from semiconductor manufacturer

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JPH0517160A (en) * 1991-07-08 1993-01-26 Asaka Riken Kogyo Kk Recovery of hydrochloric acid and iron sulfate from waste liquor of ferrous chloride
JPH0533168A (en) * 1991-06-29 1993-02-09 Asaka Riken Kogyo Kk Method for recovering hydrochloric acid and copper sulfate from waste copper chloride solution
KR20020051204A (en) * 2000-12-22 2002-06-28 신현준 A reusing method of waste nitric acid by etching process as etching solution and aluminum sulfate coagulant
KR20030053247A (en) * 2001-12-22 2003-06-28 재단법인 포항산업과학연구원 Recycling method of waste sulfuric acid etching solution and waste chloric acid etching solution

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JPH0533168A (en) * 1991-06-29 1993-02-09 Asaka Riken Kogyo Kk Method for recovering hydrochloric acid and copper sulfate from waste copper chloride solution
JPH0517160A (en) * 1991-07-08 1993-01-26 Asaka Riken Kogyo Kk Recovery of hydrochloric acid and iron sulfate from waste liquor of ferrous chloride
KR20020051204A (en) * 2000-12-22 2002-06-28 신현준 A reusing method of waste nitric acid by etching process as etching solution and aluminum sulfate coagulant
KR20030053247A (en) * 2001-12-22 2003-06-28 재단법인 포항산업과학연구원 Recycling method of waste sulfuric acid etching solution and waste chloric acid etching solution

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180109380A (en) 2017-03-28 2018-10-08 주식회사 삼광 Method for producing a mixed salt of ammonium nitrate and calcium nitrate using mixed waste liquid from semiconductor manufacturer

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