KR100421783B1 - pressure control valve of pilot poppet - Google Patents
pressure control valve of pilot poppet Download PDFInfo
- Publication number
- KR100421783B1 KR100421783B1 KR10-2000-0076672A KR20000076672A KR100421783B1 KR 100421783 B1 KR100421783 B1 KR 100421783B1 KR 20000076672 A KR20000076672 A KR 20000076672A KR 100421783 B1 KR100421783 B1 KR 100421783B1
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- KR
- South Korea
- Prior art keywords
- pressure chamber
- poppet
- pilot poppet
- high pressure
- pilot
- Prior art date
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K17/00—Safety valves; Equalising valves, e.g. pressure relief valves
- F16K17/02—Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/024—Pressure relief valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/04—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor
- F15B13/0401—Valve members; Fluid interconnections therefor
- F15B13/0405—Valve members; Fluid interconnections therefor for seat valves, i.e. poppet valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B21/00—Common features of fluid actuator systems; Fluid-pressure actuator systems or details thereof, not covered by any other group of this subclass
- F15B21/008—Reduction of noise or vibration
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K47/00—Means in valves for absorbing fluid energy
- F16K47/02—Means in valves for absorbing fluid energy for preventing water-hammer or noise
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/80—Other types of control related to particular problems or conditions
- F15B2211/86—Control during or prevention of abnormal conditions
- F15B2211/8616—Control during or prevention of abnormal conditions the abnormal condition being noise or vibration
Abstract
본 발명은 고압실내의 작동유를 저압실로 릴리프시켜 고압실내의 압력을 일정하게 유지하는 파이로트 포펫형 압력제어밸브의 작동중 발생되는 소음 및 진동을 방지하는 것으로, 고압실과 저압실사이의 유로를 개폐하는 메인포펫과, 메인포펫 내부의 배압실 및 저압실과 연통되는 중간실을 개폐하는 파이로트 포펫을 구비하여, 고압실의 작동유가 저압실으로의 이동에 의해 파이로트 포펫의 쉬프팅이동으로 인해 분리되는 시트부가 개방시 메인포펫이 개방되어 고압실내의 작동유를 저압실로 릴리프시켜 압력을 일정하게 유지하게되는 파이로트 포펫형 압력제어밸브에 있어서, 고압의 작동유가 시트부를 통과시 압력저하로 인해 기포파괴로 인한 소음진동의 발생을 방지할 수 있도록 시트부가 원호형상으로 형성된다.The present invention is to prevent the noise and vibration generated during the operation of the pilot poppet-type pressure control valve that maintains the pressure in the high pressure chamber by relieving the operating oil in the high pressure chamber to the low pressure chamber, opening and closing the flow path between the high pressure chamber and the low pressure chamber A pilot poppet which opens and closes the main poppet and the intermediate chamber communicating with the back pressure chamber and the low pressure chamber inside the main poppet, so that the working oil of the high pressure chamber is separated by the shifting movement of the pilot poppet by moving to the low pressure chamber. In the pilot poppet-type pressure control valve which maintains a constant pressure by opening the main poppet and opening the hydraulic fluid in the high pressure chamber to the low pressure chamber when the additional opening is opened, the high pressure hydraulic fluid passes through the seat portion due to the pressure drop. The seat portion is formed in an arc shape to prevent the occurrence of noise and vibration.
이로 인해, 파이로트 포펫의 시트부를 원호형상으로 형성하여 고압의 작동유가 파이로트 포펫의 쉬프팅이동으로 인해 시트부를 통과시 압력저하로 인해 유속이 증가되어 발생되는 진동소음을 확실하게 방지하여 작업자의 작업환경을 개선하며, 원호형의 시트부를 프로그램화된 NC선반을 이용하여 가공을 한번으로 완료하여 가공부위의 정도가 향상되며 가공비용을 절감할 수 있다.Thus, the sheet portion of the pilot poppet is formed in an arc shape so that the high-pressure hydraulic fluid can reliably prevent vibration noise caused by the flow rate being increased due to the pressure drop when passing the sheet portion due to the shifting movement of the pilot poppet. It improves the environment and improves the accuracy of the machining area by reducing the machining cost by completing the machining in one time by using the NC-shaped programmed lathe.
Description
본 발명은 고압실내의 작동유를 저압실로 릴리프시켜 고압실내의 압력을 일정하게 유지하는 파이로트 포펫형 압력제어밸브의 작동중 발생되는 소음 및 진동을 방지할 수 있는 파이로트 포펫형 압력제어밸브에 관한 것이다.The present invention relates to a pilot poppet pressure control valve capable of preventing noise and vibration generated during operation of a pilot poppet pressure control valve that maintains a constant pressure in the high pressure chamber by relieving hydraulic fluid in the high pressure chamber to a low pressure chamber. will be.
특히, 파이로트 포펫의 시트부를 원호형상으로 형성하여 고압의 작동유가 파이로트 포펫의 쉬프팅이동으로 인해 시트부를 통과시 순간적으로 발생하는 압력저하로 인한 유속이 증가되어 발생되는 진동소음을 확실하게 방지할 수 있는 파이로트 포펫형 압력제어밸브에 관한 것이다.In particular, the sheet portion of the pilot poppet is formed in an arc shape to prevent vibration noise caused by the increase in the flow rate due to the pressure drop that occurs momentarily when the high pressure hydraulic fluid passes through the sheet portion due to the shifting movement of the pilot poppet. And a pilot poppet type pressure control valve.
종래 기술에 의한 파이로트 포펫형 압력제어밸브는 도 1에 개략적으로 도시되어 있다.The pilot poppet type pressure control valve according to the prior art is schematically illustrated in FIG. 1.
즉, 고압실(c)과 저압실(d)사이의 유로를 개폐하는 메인포펫(3)과, 메인포펫(3)내부의 배압실(f)과 저압실(d)과 연통되는 중간실(e)을 개폐하는 파이로트 포펫(6)을 구비하여, 고압실(c)의 고압유가 탄성부재(7)의 탄성력을 이길 때 저압실(d)으로의 이동에 의해 파이로트 포펫(6)의 유통로가 개방됨에 따라 메인포펫(3)이 개방되므로 고압실(c)내의 작동유를 저압실(d)로 릴리프시켜 고압실(c)내의 압력을 일정하게 유지할 수 있게된다.That is, the main poppet 3 which opens and closes the flow path between the high pressure chamber c and the low pressure chamber d, and the intermediate chamber communicating with the back pressure chamber f and the low pressure chamber d inside the main poppet 3 ( e) a pilot poppet 6 for opening and closing the pilot poppet 6 by moving to the low pressure chamber d when the high pressure oil of the high pressure chamber c beats the elastic force of the elastic member 7. Since the main poppet 3 is opened as the flow passage is opened, the hydraulic oil in the high pressure chamber c is relieved to the low pressure chamber d so that the pressure in the high pressure chamber c can be kept constant.
미 설명부호 1은 고압실(c)내의 작동유를 저압실(d)으로 릴리프시키도록 메인포펫(3)에 슬라이딩되도록 내설되는 피스톤, 2는 고압의 작동유가 탄성부재(4)의 탄성력을 이길 때 메인포펫(3)이 고압유에 의해 슬라이딩되도록 내설되는 포펫이다.Reference numeral 1 denotes a piston which is installed so as to slide in the main poppet 3 to relief the hydraulic oil in the high pressure chamber c to the low pressure chamber d, and 2, when the high pressure hydraulic oil overcomes the elastic force of the elastic member 4. The main poppet 3 is a poppet which is internally slid so as to be slid by the high pressure oil.
이때, 전술한 파이로트 포펫(6)의 이동에 의해 배압실(f)과 중간실(e)사이의 유로를 개폐하는 시트부(a)는 특수한 폼툴(form tool) 또는 드릴머신에 의해 내부각도를 가공하여 형성하게 된다. 예를들어 180°와 60°또는 60°와 40°등으로서 각 내부각도가 만나는 에지(edge)부에 전술한 파이로트 포펫(6)이 밀착유지하도록 설계된 것이다.At this time, the seat portion (a) for opening and closing the flow path between the back pressure chamber (f) and the intermediate chamber (e) by the movement of the pilot poppet (6) described above is an internal angle by a special form tool (form tool) or drill machine It is formed by processing. For example, the above-described pilot poppet 6 is designed to be in close contact with the edge portion where each internal angle meets, for example, 180 ° and 60 ° or 60 ° and 40 °.
그러나, 고압유의 유량이 전술한 파이로트 포펫(6)의 시트부(a)를 통과시 단면적의 확대로 인한 순간적인 압력저하로 유속이 극격하게 증가됨에 따라 잠재된 기포를 파괴시켜 진동 소음을 발생시켜 작업자의 작업환경 및 소음공해를 초래하는 문제점을 갖게된다. 이때 전술한 시트부(a)를 통과시 유량의 압력저하는 시트부(a)의 모서리부위에서 쉽게 발생하게 된다.However, when the flow rate of the high pressure oil passes through the seat portion (a) of the pilot poppet 6 described above, the flow rate is dramatically increased due to the instantaneous pressure drop due to the enlargement of the cross-sectional area. It causes the worker's working environment and noise pollution. At this time, the pressure drop of the flow rate when passing through the above-described sheet portion (a) is easily generated at the corner of the sheet portion (a).
또한, 전술한 파이로트 포펫(6)이 밀착되는 시트부(a)를 여러 가지의 각도를 갖는 특수공구를 이용하여 수차례에 걸쳐 가공함에 따라 작업성이 현저하게 떨어지며, 가공부위의 정밀한 가공시 작업시간 증가로 인해 가공비용이 상승되는 문제점을 갖게된다.In addition, workability is remarkably degraded as the sheet portion (a) to which the above-described pilot poppet 6 is closely attached is processed several times using a special tool having various angles. Due to the increase in working time, there is a problem that the processing cost is increased.
따라서, 본 발명의 목적은 파이로트 포펫의 시트부를 원호형상으로 형성하여고압의 작동유가 파이로트 포펫의 쉬프팅이동으로 인해 시트부를 통과시 순간적인 압력저하로 인해 유속이 증가되어 발생되는 진동소음을 확실하게 방지하여 작업자의 작업환경을 개선할 수 있는 파이로트 포펫형 압력제어밸브를 제공함에 있다.Therefore, an object of the present invention is to form the sheet portion of the pilot poppet in an arc shape so that the high-pressure hydraulic fluid is vibrated by the increase in the flow rate due to the instantaneous pressure drop when passing the sheet portion due to the shifting movement of the pilot poppet. It is to provide a pilot poppet-type pressure control valve that can be prevented to improve the working environment of the operator.
본 발명의 다른 목적은 원호형의 시트부를 프로그램화된 NC선반을 이용하여 가공을 한번으로 완료하여 가공부위의 정도가 향상되며 가공비용을 절감할 수 있는 파이로트 포펫형 압력제어밸브를 제공함에 있다.Another object of the present invention is to provide a pilot poppet-type pressure control valve which can improve the accuracy of the machining part and reduce the machining cost by completing the machining once using the NC-shaped programmed lathe. .
도 1은 본 발명에 의한 파이로트 포펫형 압력제어밸브의 단면도,1 is a cross-sectional view of a pilot poppet pressure control valve according to the present invention;
도 2는 도 1의 "A"부위의 확대도,2 is an enlarged view of a portion “A” of FIG. 1;
도 3은 도 1의 시트부의 릴리프시 작동유의 흐름상태의 개략도,Figure 3 is a schematic diagram of the flow state of the hydraulic fluid at the time of relief of the seat of Figure 1,
도 4는 종래 기술에 의한 파이로트 포펫형 압력제어밸브의 단면도,4 is a cross-sectional view of a pilot poppet-type pressure control valve according to the prior art,
도 5는 종래 기술에 의한 파이로트 포펫형 압력제어밸브에서 시트부의 개략도,Figure 5 is a schematic view of the seat portion in the pilot poppet pressure control valve according to the prior art,
도 6은 다른 종래 기술에 의한 파이로트 포펫형 압력제어밸브에서 시트부의 개략도,Figure 6 is a schematic view of the seat portion in a pilot poppet pressure control valve according to another prior art,
도 7은 도 6의 시트부의 릴리프시 작동유의 흐름상태의 개략도이다.FIG. 7 is a schematic diagram of a flow state of the working oil at the relief of the seat part of FIG. 6.
*도면중 주요 부분에 사용된 부호의 설명* Explanation of symbols used in the main part of the drawing
1; 피스톤One; piston
3; 메인포펫3; Main poppet
6; 파이로트 포펫6; Pilot Poppet
a; 시트부a; Seat part
c; 고압실c; High pressure room
d; 저압실d; Low pressure chamber
e; 중간실e; Middle room
f; 배압실f; Back pressure chamber
전술한 본 발명의 목적은, 고압실과 저압실사이의 유로를 개폐하는 메인포펫과, 메인포펫 내부의 배압실 및 저압실과 연통되는 중간실을 개폐하는 파이로트 포펫을 구비하여, 고압실내의 작동유가 저압실으로의 이동에 의해 파이로트 포펫의 쉬프팅이동으로 인해 분리되는 시트부가 개방시 메인포펫이 개방되어 고압실내의 작동유를 저압실로 릴리프시켜 압력을 일정하게 유지하게되는 파이로트 포펫형 압력제어밸브에 있어서, 고압의 작동유가 파이로트 포펫의 쉬프팅이동으로 인해 시트부를 통과시 순간적인 압력저하로 인해 기포파괴로 인한 소음진동의 발생을 방지할 수 있도록 시트부가 원호형상으로 형성된 것을 특징으로 하는 파이로트 포펫형 압력제어밸브를 제공함에 의해 달성된다.The above object of the present invention is to provide a main poppet for opening and closing the flow path between the high pressure chamber and the low pressure chamber, and a pilot poppet for opening and closing the intermediate chamber communicating with the back pressure chamber and the low pressure chamber inside the main poppet, so that the hydraulic oil in the high pressure chamber In the pilot poppet type pressure control valve, the main poppet is opened when the seat part separated by the shifting movement of the pilot poppet by the movement to the seal is released, and the hydraulic oil in the high pressure chamber is released to the low pressure chamber to maintain a constant pressure. The pilot poppet type is characterized in that the sheet portion is formed in an arc shape so as to prevent the occurrence of noise vibration due to bubble breakage due to the instantaneous pressure drop when the high pressure hydraulic fluid passes through the seat portion due to the shifting movement of the pilot poppet. By providing a pressure control valve.
이하, 본 발명의 바람직한 실시예를 첨부도면에 따라 상세하게 설명한다.Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.
도 1 내지 도 3에 도시된 바와 같이, 고압실(c)과 저압실(d)사이의 유로를 개폐하는 메인포펫(3)과, 메인포펫(3)내부의 배압실(f) 및 저압실(d)과 연통되는 중간실을 개폐하는 파이로트 포펫(6)을 구비하여, 고압실(c)의 작동유가 저압실(d)으로의 이동에 의해 파이로트 포펫(6)의 쉬프팅이동으로 인해 분리되는 시트부(a)가 개방시 메인포펫(3)이 개방되어 고압실(c)내의 작동유(c)를 저압실(d)으로 릴리프시켜 고압실(c)내의 압력을 일정하게 유지하게되는 파이로트 포펫형 압력제어밸브에 적용되며, 도 4에 도시된 것과 실질적으로 동일하게 적용되는 부위는 상세한 설명은 생략하며 중복되는 도면부호는 동일하게 표기하였다.1 to 3, the main poppet 3 for opening and closing the flow path between the high pressure chamber (c) and the low pressure chamber (d), the back pressure chamber (f) and the low pressure chamber inside the main poppet (3) Pilot poppet (6) for opening and closing the intermediate chamber in communication with (d), the hydraulic fluid of the high pressure chamber (c) due to the shifting movement of the pilot poppet (6) by moving to the low pressure chamber (d) The main poppet (3) is opened when the seat portion (a) to be separated is opened to relieve the hydraulic oil (c) in the high pressure chamber (c) to the low pressure chamber (d) to maintain a constant pressure in the high pressure chamber (c). Applied to the pilot poppet-type pressure control valve, the portion that is applied substantially the same as shown in Figure 4 is omitted the detailed description and the same reference numerals are denoted the same.
따라서, 본 발명의 바람직한 실시예에 의하면, 전술한 고압의 작동유가 파이로트 포펫(6)의 쉬프팅(shifting)이동으로 인해 시트부(a)를 통과시 순간적인 압력저하로 인해 기포파괴로 인한 소음진동의 발생을 방지할 수 있도록 시트부(a)가 원호형상으로 형성된 것이다.Therefore, according to a preferred embodiment of the present invention, the noise due to the bubble breakage due to the instantaneous pressure drop when passing the seat portion (a) due to the shifting movement of the pilot poppet (6) Sheet portion (a) is formed in an arc shape to prevent the occurrence of vibration.
이하에서, 본 발명에 의한 파이로트 포펫형 압력제어밸브의 작동을 첨부도면을 참조하여 상세하게 설명한다.Hereinafter, the operation of the pilot poppet pressure control valve according to the present invention will be described in detail with reference to the accompanying drawings.
도 2 및 도 3에 도시된 바와 같이, 전술한 고압실(c)내의 작동유가 저압실(d)으로 이동시 쉬프팅이동하는 파이로트 포펫(6)의 유로가 개방되어 전술한 메인포펫(3)이 개방됨에 따라, 전술한 고압실(c)내의 작동유를 저압실(d)으로 릴리프시켜 고압실(c)내의 압력을 일정하게 유지할 수 있는 것이다.As shown in Fig. 2 and 3, the flow of the pilot poppet (6), which shifts when the hydraulic fluid in the high pressure chamber (c) moves to the low pressure chamber (d) is opened to open the main poppet (3). As it opens, the hydraulic oil in the high pressure chamber (c) described above is relieved to the low pressure chamber (d) to maintain a constant pressure in the high pressure chamber (c).
이때, 고압의 작동유가 전술한 파이로트 포펫(6)의 쉬프팅이동시 개방되는 시트부(a)를 통과시 유속이 순간적인 압력저하로 인해 급격하게 증가하는 경우에도 시트부(a)의 원호형상에 의해 기포를 파괴하는 것을 방지하여 진동소음 발생을 방지할 수 있게된다.At this time, even when the high-pressure hydraulic fluid passes through the seat portion (a) opened during the shifting movement of the pilot poppet (6) described above, the flow rate rapidly increases due to the instantaneous pressure drop. This prevents the bubbles from being destroyed, thereby preventing the occurrence of vibration noise.
이상에서와 같이 바람직한 실시예에 의하면 아래와 같은 이점을 갖는다.According to the preferred embodiment as described above has the following advantages.
파이로트 포펫의 시트부를 원호형상으로 형성하여 고압의 작동유가 시트부를 통과시 순간적인 압력저하로 인해 유속이 증가되어 발생되는 진동소음을 확실하게 방지하여 작업자의 작업환경을 개선할 수 있다.By forming the seat portion of the pilot poppet in an arc shape, it is possible to reliably prevent vibration noise generated by the flow rate being increased due to the instantaneous pressure drop when the high pressure hydraulic fluid passes through the seat portion, thereby improving the working environment of the worker.
또한, 원호형의 시트부를 프로그램화된 NC선반을 이용하여 가공을 한번으로 완료하여 가공부위의 정도가 향상되며 가공비용을 절감할 수 있다.In addition, by using the NC lathe programmed NC lathe to complete the machining once, the degree of the machining portion is improved and the machining cost can be reduced.
전술한 바와 같은 실시예는 중장비 관련분야에서 통상의 지식을 가진 자가 용이하게 실시할 수 있을 정도로 상세하게 설명하기 위한 것이며 이로 인해 본 발명의 기술적인 사상을 벗어나지않는 범위내에서 기술내용 일부를 변형실시할 수 있을 것이다.The embodiments as described above are intended to be described in detail so that those skilled in the art of heavy equipment can be easily carried out, and thus, a part of the technical contents are modified within the scope without departing from the technical spirit of the present invention. You can do it.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2000-0076672A KR100421783B1 (en) | 2000-12-14 | 2000-12-14 | pressure control valve of pilot poppet |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2000-0076672A KR100421783B1 (en) | 2000-12-14 | 2000-12-14 | pressure control valve of pilot poppet |
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| Publication Number | Publication Date |
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| KR20020046476A KR20020046476A (en) | 2002-06-21 |
| KR100421783B1 true KR100421783B1 (en) | 2004-03-10 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| KR100909499B1 (en) * | 2005-09-30 | 2009-07-27 | 도쿄엘렉트론가부시키가이샤 | Substrate loading mechanism and substrate processing apparatus |
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2000
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100909499B1 (en) * | 2005-09-30 | 2009-07-27 | 도쿄엘렉트론가부시키가이샤 | Substrate loading mechanism and substrate processing apparatus |
| KR100951148B1 (en) * | 2005-09-30 | 2010-04-07 | 도쿄엘렉트론가부시키가이샤 | Substrate loading mechanism and substrate processing apparatus |
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