KR100416772B1 - many kind of metal surface inspection and determination device - Google Patents

Abstract

An apparatus for inspecting and measuring a multi-metallic surface according to the present invention comprises: an illumination unit for irradiating two or more lights of different specific wavelength ranges to an object to be illuminated in at least two or more directions; It is configured to include a linear solid-state image pickup device for imaging the light reflected from the illumination to be irradiated from the illumination unit has an effect that can be inspected and measured on a multi-metal surface in a short time.

Description

Many kind of metal surface inspection and determination device

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to an apparatus for inspecting and measuring a multi-metallic surface, and more particularly, to an apparatus for inspecting and measuring a multi-metallic surface to be inspected and measured at a high speed.

In general, an inspection and measurement apparatus for multi-metal surfaces is used to inspect and measure a variety of metals by allowing light emitted from an illumination device to be incident on the light to be illuminated, and imaging the light reflected from the light to the imaging sensor located above the light. The lighting device includes an array lighting device that arranges a myriad of point lights in a dome shape to be incident on a light object, and a vertical tilt lighting device that irradiates light in vertical and inclined directions of the light object. .

The imaging sensor includes a two-dimensional CCD that acquires an image in an intermittent manner, and a solid-state image pickup device in a line. The processing circuit includes information captured by each device after a short exposure time. A linear solid-state image pickup device (Linear CCD) or the like, which transmits the data and performs high-speed digitization, may be used.

1 is a schematic configuration diagram of a device for inspecting and measuring a metal surface using an array lighting apparatus according to the prior art, and FIG. 2 is an irradiation light according to a local surface inclination of light to be illuminated in the array lighting apparatus according to the prior art. As an exemplary view showing the intensity, the array illumination device is arranged in a dome shape to a myriad of point lights (2) and a uniform light incident in a wide angle range, as shown in Figures 1 and 2, When illuminating a rough metal 1, a relatively smooth image is obtained because the light intensity Q entering the sensor 6 is not significantly affected by the local gradient change q of the metal 1 surface. Lose. In the array illumination method, a light emitting diode (LED) is used as the point light 2.

However, since the amount of light is insufficient when the high-speed digitizing is performed using the linear solid-state image sensor, such an array illumination method requires the use of a halogen lamp or a metal halide as a light source. There is a difficult problem in reality.

3 is a configuration diagram in which light is radiated in the vertical and inclined directions by a vertical gradient lighting apparatus according to the prior art, and FIG. 4 illustrates irradiation light intensity according to the local surface inclination of the light in the vertical gradient lighting apparatus according to the prior art. As an exemplary view shown, the vertical oblique illumination device is a half mirror 12 provided on the upper side of the object to be illuminated 11, and the inclined light 16 for irradiating light obliquely to the object to be illuminated from both sides of the half mirror 12. And a vertical light 12 which irradiates light on the half mirror 12 to irradiate light perpendicularly to the object to be illuminated 11, wherein the imaging sensor 18 is placed above the half mirror 12. Place it.

However, when using such a vertical inclined lighting device for the inspection and measurement of the surface of the multi-metal type, there is a method to distinguish between two materials consisting of metals such as copper and non-metal or when two or more metals are mixed. As shown in FIG. 4, the adjustment range by the inclined light and the vertical light is not sought, and the reason why the continuity of the vertical and inclined irradiation angles and the degree of convergence of the inclined light 16 and the vertical light 14 can not be adjusted. There is a problem that local darkened areas d other than a, b, c are generated.

The present invention has been made to solve the above problems of the prior art, the inspection and measurement results of the multi-metal surface is possible to digitize at a high speed and the light source having a different wavelength range is irradiated in at least two directions to clear the multi-metal surface It is an object of the present invention to provide a device for inspecting and measuring a variety of metal surfaces that can be inspected and measured.

1 is a schematic configuration diagram of a device for inspecting and measuring a metal surface using an array lighting apparatus according to the prior art,

Figure 2 is an exemplary view showing the irradiation light intensity according to the local surface slope of the lighting object in the array illumination device according to the prior art,

3 is a configuration diagram in which light is irradiated in the vertical and inclined directions by a vertical inclined illumination device according to the prior art,

Figure 4 is an exemplary view showing the irradiation light intensity according to the local surface tilt of the lighting object in the vertical oblique illumination device according to the prior art,

5 is a schematic configuration diagram showing an apparatus for inspecting and measuring a multi-metallic surface according to the present invention.

6 is an exemplary view showing reflection characteristics of wavelengths of copper and nickel;

FIG. 7A is an image obtained by irradiating light of the same wavelength in vertical and inclined directions on a nickel-plated object on a lead frame made of copper;

FIG. 7B is an image in which a light of a band lower than 400 nm is strongly irradiated in the oblique direction while irradiating uniform light of 300 to 800 nm in a vertical direction to a nickel-plated light fixture in a lead frame made of copper;

8 is a configuration of the main part of the oblique light and vertical light according to the present invention,

9 is an exemplary view showing the irradiation light intensity according to the local surface slope of the light to be illuminated when the light irradiated from the lighting unit according to the invention is reflected from the light to be illuminated.

<Explanation of symbols on main parts of the drawings>

50: light 52: half mirror

54: first inclined light 56: second inclined light

58: vertical illumination 62: first scattering device

64: second scatterer 66: converging lens

68: filter

In order to solve the above problems, an apparatus for inspecting and measuring a multi-metallic surface according to the present invention is an apparatus for inspecting and measuring a multi-metallic surface, wherein two or more lights having different specific wavelength ranges are irradiated in at least two or more directions. A plurality of lighting units comprising a plurality of lighting units for irradiating the light source, a scattering unit for scattering light emitted from the light sources, and when one or more light sources are irradiated with light having the same wavelength from each of the plurality of lighting units. And a linear solid-state image pickup device for imaging light reflected from the light source irradiated by the plurality of illumination units, and a converging lens for converging light of a specific wavelength modulated by the filter to the object to be illuminated. In addition, the inspection and measurement field of the multi-metal surface according to the present invention. A plurality of lighting units for irradiating the objects to be illuminated in at least two directions with two or more lights having different specific wavelength ranges; In the inspection and measurement apparatus of a multi-metallic surface comprising a linear solid-state imaging device for imaging the light reflected from the object to be irradiated from the plurality of illumination unit, each of the plurality of illumination unit is a light source for irradiating light of different wavelengths And a scattering device for scattering the light irradiated from the light source; And a converging lens for converging the scattered light to the object to be illuminated.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

5 is a schematic configuration diagram showing an apparatus for inspecting and measuring a multi-metallic surface according to the present invention.

As shown in FIG. 5, an apparatus for inspecting and measuring a multi-metallic surface according to the present invention includes: an illumination unit for irradiating the object 50 to at least two directions of two or more lights having different specific wavelength ranges; And a linear solid-state imaging device 70 for imaging the light emitted from the illumination unit and reflected from the light to be illuminated 50.

The lighting unit includes a half mirror 52 provided above the light to be illuminated 50, a vertical light 58 to irradiate light to the half mirror 52 so that light is perpendicular to the light to be illuminated 50, and The illumination object 50 is composed of first and second inclined lights 54 and 56 for irradiating light in an inclined direction.

The vertical light 58 allows light to enter the material surface at a convergence angle of p1 (rad) about a direction perpendicular to the surface of the light 50, and the first inclined light 54 is the light 50 The light is incident on the surface of the material at a convergence angle of p2 (rad) while inclined by an irradiation angle of q2 (rad) in a direction perpendicular to the surface, and the second inclined light 56 is perpendicular to the surface of the object 50 to be illuminated. Light is incident on the material surface at a convergence angle of p3 (rad) while being inclined by q3 (rad) in one direction.

Here, the irradiation angles q2 and q3 are angles formed by the optical axis of the inclined light and the direction perpendicular to the surface of the object to be illuminated. When the irradiation angles q2 and q3 are narrowed, the overlapping area between the lights increases, and when the irradiation angle is increased, the overlapping areas between the lights Becomes smaller.

In addition, in the first and second inclined lights 54 and 56 and the vertical light 58, light having different wavelengths is irradiated or irradiated with light from a light source having the same or adjacent wavelengths, and then modulates one or more wavelengths of light. Allow other light to enter the illuminated object 50.

6 is an exemplary view showing reflection characteristics of copper and nickel for each wavelength, and FIG. 7A is an image obtained by irradiating light of the same wavelength in a nickel-plated object on a copper lead frame in vertical and oblique directions. It is an image that irradiates light of a band lower than 400 nm in the oblique direction while irradiating uniform light of 300-800 nm in the vertical direction to a nickel-plated object on a copper lead frame.

As shown in FIGS. 6 and 7A and 7B, in the wavelength band lower than 400 nm, the reflectivity of nickel is higher than that of copper, and the reflectivity of copper is very low. Intensive light irradiation can further emphasize the nickel region without significantly affecting the reflective properties of copper.

FIG. 8 is a schematic view of a main part of the inclined light and the vertical light according to the present invention. The first and second inclined lights 54 and 56 and the vertical light 58 have a predetermined wavelength range as shown in FIG. 7. And a line light source (not shown) for irradiating light, at least one scatterer (62, 64) for scattering light emitted from the line light source, and a converging lens (66) for converging the scattered light.

Here, in the case of using the scatterers 62 and 64 in duplicate, the light irradiated from the ray light source causes weak scattering through the scatterer 1 (62), and scatters again while passing through the scatterer 2 (64). The convergence angle p of the light flowing into the converging lens 66 and converging to the light object 50 is the distance x between the converging lens 66 and the light object 50 and the scatterers 62 and 64. Adjustment is made possible by differently adjusting the relative position y of the converging lens 66.

In addition, all or part of the first and second inclined lights 54 and 56 and the vertical light 58 may use a filter 68 that modulates the wavelength of incident light to emphasize a specific wavelength band.

Referring to the operation of the present invention configured as described above are as follows.

First, the light 68 having different wavelength characteristics in the first and second inclined lights 54 and 56 and the vertical light 58 is irradiated to the object 50, or the filter 68 is used while irradiating light having the same wavelength. When some of the light is modulated with light having a different wavelength band and irradiated to the illuminated object 50, the inspection and measurement of multiple metals can be quickly digitized.

As described above, when irradiating light having a different wavelength range and adjusting at least one of the irradiation angles q2, q3 and the convergence angles p1, p2, and p3, as shown in FIG. This will enhance or soften the rough image on the surface. That is, when irradiating the illumination object 50 by adjusting the irradiation angle, the convergence angle, and the wavelength of light, an image can be obtained smoothly without a dark area, and the irradiation angle q2 having a fixed light intensity d 'in the illumination object is fixed. It becomes larger than the light intensity (a ', b', c ') at the time of irradiating light with q3 and convergence angle p1, p2, p3, and it becomes possible to test | inspect and measure the surface of a to-be-illuminated object more clearly.

The inspection and measurement apparatus of the multi-metallic surface of the present invention configured as described above is irradiated to the object to be illuminated in at least two or more directions of two or more lights of different specific wavelength range in the illumination unit, and the light reflected from the object to be illuminated By imaging with a linear solid-state imaging device, there is an effect that inspection and measurement of multiple metal surfaces are made at high speed.

In addition, by adjusting the convergence angle and the irradiation angle, the roughness of the target surface may be emphasized or offset in the digitized result, and thus the inspection and measurement may be more clearly performed.

And, by modulating the wavelength range of the light using the filter there is an effect that can be conveniently used.

Claims (3)

An apparatus for inspecting and measuring a multi-metal surface, comprising: a plurality of lighting units each of which is configured to emit light of two or more lights of different specific wavelength ranges to at least two directions of the light to be illuminated, and the light emitted from the light sources; A scattering device for scattering, a pulser for modulating any one or more light sources into a light source having a specific wavelength when light of the same wavelength is emitted from each light source of the plurality of lighting units, and light having a specific wavelength modulated through the filter And a linear solid-state image pickup device for imaging the light reflected by the plurality of illumination units and reflected from the light to be illuminated by the plurality of illumination units. delete delete