KR100407108B1 - gas scrubber device - Google Patents

Abstract

A gas scrubber for releasing clean air into the atmosphere by combining wet and burning gas scrubbers to simultaneously decompose flammable and water-soluble waste gases harmful to the human body generated in the manufacturing process of semiconductor parts or various industrial sites. will be.

According to the present invention, a waste gas supply pipe for supplying to bypass the waste gas flowing through the first duct; A first wet chamber having a plurality of coils formed to generate vortices in the supplied waste gas, and injecting moisture into the vortexed waste gas through an injection nozzle to decompose the water-soluble gas; A supply pipe connected to the first wet chamber through a second duct, the waste gas decomposed and remaining in the first wet chamber is supplied to supply air and nitrogen gas to generate vortices to be mixed well and to be mixed well with the first wet chamber. And a burning chamber having a heater that ignites the mixed gas with an ignition plug to burn combustible gas; A conical tube connected in communication with the burning chamber, the nozzle having a nozzle for cleaning the oxidized gas powder by vortexing the injection water so as not to accumulate the powder of the oxidized gas burnt in the burning chamber; It is connected to the conical tube through a third duct, a plurality of coils are formed to generate a vortex in the water-soluble gas that is not decomposed in the first wet chamber, by spraying the water to the vortex water-soluble gas through the injection nozzle A second wet chamber which decomposes again to decompose the water-soluble gas; And a fourth duct connected to the second wet chamber through a fourth duct, the gas and water passing through the second wet chamber are bypassed, and a double tube is used to supply cold nitrogen gas to an external tube to solidify moisture. And a condensation tube having an outlet formed therein for releasing only the purified air to the atmosphere.

Therefore, by combining the burning type and the wet type gas scrubber, the cost is greatly reduced due to the simplification of the structure, and the combustible gas can be burned by mixing the air and the combustible gas well by generating the vortex, thereby improving the clean effect. . In addition, it is possible to easily remove the powder of the oxidized gas burned in the burning chamber to prevent failure due to clogging.

Description

Gas scrubber device

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gas scrubber device. In particular, the present invention relates to flammable and water-soluble waste gases harmful to the human body generated in the manufacturing process of semiconductor parts or various industrial sites. The present invention relates to a gas scrubber for purifying and releasing to the atmosphere.

In general, when the waste gas generated in the manufacturing process of semiconductor parts and various industrial sites is discharged to the atmosphere without being purified at a predetermined concentration or less, it causes serious air and environmental pollution. Thus, such waste gas uses a gas scrubber method. It washes using.

At this time, the gas scrubber is a wet type gas scrubber that dissolves and processes water-soluble gases in various harmful gases in water, a burning type gas scrubber that burns and combusts flammable gases, and waste gas by a heater. Direct oxidation, wet and burning type to separate powder (power) contained in oxidizing gas by spraying to oxidizing gas, adsorption method to remove harmful gas by the power of VAN DER WAALS using adsorbent, Catalytic methods are used.

However, the above-described burning type oxidizes the flammable waste gas by a heater and purifies the waste gas by a process of combining with powder of oxidizing gas by the injection water sprayed from the sprinkler. At this time, the powder of the oxidizing gas accumulates and hardens, causing clogging of the pipe. Therefore, an apparatus for preventing clogging by preventing the powder of oxidizing gas from accumulating is required. In addition, the wet type dissolves the water-soluble waste gas by the injection water, and since it is not completely dissolved, this causes a problem that harmful pollutants are included in the air discharged into the atmosphere. Therefore, there is a need for a purification system for completely decomposing water-soluble waste gas through complete dissolution by sprayed water.

Accordingly, an object of the present invention is to significantly reduce the cost by simplifying the structure by combining wet and burning type gas scrubbers capable of simultaneously purifying flammable and water-soluble waste gases generated in the manufacturing process of semiconductor components or various manufacturing industries. It is to provide a gas cleaning device to reduce, increase the cleaning effect by generating a vortex in the waste gas and prevent the clogging of the oxidizing gas powder of the burning chamber.

1 is a schematic view showing the overall configuration of a gas cleaning device according to a preferred embodiment of the present invention.

2 is a cross-sectional view A-A of a wet chamber according to a preferred embodiment of the present invention.

Figure 3a is an enlarged view showing the supply pipe at the inlet side of the burning chamber according to a preferred embodiment of the present invention.

Figure 3b is an enlarged cross-sectional view of the burning chamber supply pipe according to a preferred embodiment of the present invention.

Figure 4 is an enlarged cross-sectional view showing a heater in the burning chamber according to a preferred embodiment of the present invention.

Figure 5 is an enlarged cross-sectional view showing a conical tube according to a preferred embodiment of the present invention.

Figure 6 is an enlarged cross-sectional view showing a coagulation tube according to a preferred embodiment of the present invention.

<Description of the code used for the main part of the drawing>

1: first duct 2: waste gas supply pipe

3: 1st wet chamber 4 ', 4 ": nozzle

5: vortex generating means 6: second duct

7: Burning chamber 8: Spark plug

9: supply line 10: heater cover

11: heater 12: heater rod

13: conical tube 14: nozzle

15: third duct 16: second wet chamber

17: nozzle 18: fourth duct

19: condenser tube 20: outlet

21a, 21b, 21c: tank

According to the present invention devised to achieve the above object, a waste gas supply pipe for supplying to bypass the waste gas flowing through the first duct; A first wet chamber having a plurality of coils formed to generate vortices in the supplied waste gas, and injecting moisture into the vortexed waste gas through an injection nozzle to decompose the water-soluble gas; A supply pipe connected to the first wet chamber through a second duct, the waste gas decomposed and remaining in the first wet chamber is supplied to supply air and nitrogen gas to generate vortices to be mixed well and to be mixed well with the first wet chamber. And a burning chamber having a heater that ignites the mixed gas with an ignition plug to burn combustible gas; A conical tube connected in communication with the burning chamber, the nozzle having a nozzle for cleaning the oxidized gas powder by vortexing the injection water so as not to accumulate the powder of the oxidized gas burnt in the burning chamber; It is connected to the conical tube through a third duct, a plurality of coils are formed to generate a vortex in the water-soluble gas that is not decomposed in the first wet chamber, by spraying the water to the vortex water-soluble gas through the injection nozzle A second wet chamber which decomposes again to decompose the water-soluble gas; And a fourth duct connected to the second wet chamber through a fourth duct, the gas and water passing through the second wet chamber are bypassed, and a double tube is used to supply cold nitrogen gas to an external tube to solidify moisture. It is achieved by providing a gas scrubbing device characterized in that it comprises a condensation tube formed with a discharge port for releasing only the purified air to the atmosphere.

In addition, the supply pipe is preferably formed of a double pipe of the inner and outer pipe to supply the nitrogen and air separately so that vortices can be generated.

The burning chamber may include an annular heater cover formed of a double tube of an inner and an outer tube; an annular heater installed between an inner and an outer tube of the heater cover; And a heater rod formed in the center of the heater.

Hereinafter, the configuration and operation of the gas scrubber according to the present invention through a preferred embodiment of the present invention will be described in more detail.

1 is a schematic diagram showing the overall configuration of a gas cleaning device according to a preferred embodiment of the present invention.

As shown, according to a preferred embodiment of the present invention, the gas scrubber comprises a waste gas supply pipe 2, a first wet chamber 3, a burning chamber 7, a second wet chamber 16 and a condensation tube 19. )

The waste gas supply pipe (2) flows the flammable and water-soluble waste gas harmful to the human body through the first duct (1) and supplies it to the first wet chamber (3). At this time, the waste gas is supplied to be bypassed to generate a vortex in the waste gas.

In the first wet chamber 3, the waste gas vortexed in the waste gas supply pipe 2 is introduced. The injected waste gas is injected through the nozzle (4 ', 4 ") installed in the upper, lower portion to dissolve the water-soluble waste gas.

2 is a cross-sectional view A-A of a wet chamber according to a preferred embodiment of the present invention. As shown, inside the first wet chamber 3, a vortex generating means 5 in the form of a plurality of coils is formed. The vortex generating means 5 in the form of a coil vortexs the waste gas introduced from the waste gas supply pipe 2 again, thereby facilitating the coupling with the injection water injected from the nozzle, thereby facilitating the dissolution of the water soluble waste gas.

Under the first wet chamber 3, an aqueous solution of a water-soluble gas passes through the filter to the tank 21a.

The burning chamber 7 is connected in communication with the first wet chamber 3 through a second duct 6, and simultaneously burns flammable waste gas and air and nitrogen gas which are decomposed in the first wet chamber 3. It is supplied and oxidized by ignition of the spark plug 8.

Figure 3a is an enlarged view showing the supply pipe of the burning chamber inlet side according to a preferred embodiment of the present invention, Figure 3b is an enlarged cross-sectional view of the burning chamber supply pipe according to a preferred embodiment of the present invention. As shown, the waste gas inlet (9a), nitrogen inlet (9b) and the air inlet (9c) is provided respectively to show that the respective gases are formed to generate the vortex while inflow and mixing. This vortexed mixed gas can perform complete combustion because the air is well mixed. In addition, since flammable waste gas contains hydrogen, there is a risk of explosion when hydrogen meets air. Therefore, the combustion of nitrogen gas that does not burn well serves to prevent explosion.

4 is an enlarged cross-sectional view illustrating a heater in a burning chamber according to a preferred embodiment of the present invention. As shown, the burning chamber 7 has an annular heater cover 10 formed between the inner and outer tubes of the annular heater cover 10 and the inner and outer tubes of the heater cover 10 formed in a double tube of the inner and outer tubes. And it is preferable to have a heater rod 12 is formed in the center inside the heater 11 so that heat is transferred well.

5 is an enlarged cross-sectional view showing a conical tube according to a preferred embodiment of the present invention. As shown, the outlet side of the burning chamber 7 is formed of a conical tube 13 and is connected to the "T" shaped duct. In addition, the nozzle 14 is located below the conical tube 13, and is installed obliquely upward. The nozzle 14 vortex and spray water, and serves to allow the powder of the oxidizing gas to be washed by the sprayed water without accumulation. In addition, the water injected from the nozzle 14 serves to cool the water-soluble waste gas that is not decomposed in the first wet chamber 3.

The second wet chamber 16 is connected in communication with the conical tube 13 through a third duct 15. The second wet chamber 16 is decomposed in the first wet chamber 3 at a high temperature (about 1000 ° C.) remaining after the powder of the oxidizing gas is combined with the jetted water vortexed at the outlet of the burning chamber 7. Unused aqueous waste gas is introduced. The injected waste gas is injected through the nozzle 15 provided in the upper portion, and is injected with the sprayed water and discharged while being cooled. At this time, similarly to the first wet chamber 3, a vortex generating means (see Fig. 2) in the form of a coil is provided therein. In addition, below the second wet chamber 16, an aqueous solution of a byproduct combined with water in the conical tube 13 and a water-soluble waste gas decomposed in the second wet chamber is dropped through the filter into the tank 21b.

The condenser tube 19 is connected in communication with the second wet chamber 16 via a fourth duct 18. The condensation tube 19 is formed so as to bypass the mixture of the purified gas and water droplets discharged from the second wet chamber 16.

6 is an enlarged cross-sectional view of a coagulation tube according to a preferred embodiment of the present invention. As shown, there is a double tube. The inner tube 19a of the condensation tube is supplied with a mixture of purified gas and water droplets discharged from the second wet chamber, and the outer tube 19b is a mixture discharged from the second wet chamber 14 while cold nitrogen gas is vortexed. It is designed to cool. In this configuration, the mixture is cooled, and the water droplets are condensed to drop in the tank 21c provided at the lower part of the condensation tube 19, and the purified gas is cooled to a predetermined temperature (about 50 DEG C) to provide a It is to be discharged by a fan (not shown) installed in the discharge port 20 provided on the outlet side.

Referring to the operation of the gas cleaning apparatus according to a preferred embodiment of the present invention configured as described above are as follows.

First, various waste gases such as explosive, corrosive, and asphyxiating gases discharged from a manufacturing process of semiconductor parts or various industrial sites are bypassed through the waste gas supply pipe 2 along the first duct 1, and the first wet chamber 3 is discharged. The water-soluble waste gas is dissolved by the sprayed water and dropped into the tank 21a through the tank. At this time, the waste gas is bypassed and vortices are generated, so that the waste gas is easily combined with the sprayed water. In addition, the waste gas is vortexed again by the vortex generating means 5 in the form of a coil provided inside the first wet chamber 3 to promote the coupling with the sprayed water. Next, the combustible waste gas from which the water-soluble waste gas is decomposed through the first wet chamber 3 is oxidized and burned by ignition of the spark plug 8 through the burning chamber 6 along the second duct 5 so that the oxidizing gas and powder Is generated. At this time, the combustible waste gas supplied to the burning chamber is mixed with nitrogen and air by generating a vortex by the supply pipe 9 installed at the inlet side of the burning chamber 7. The powder of the oxidized gas is combined with the water injected to vortex through the nozzle 14 in the conical tube 13 installed in the lower portion of the burning chamber (7). At this time, the nozzle 14 installed in the lower portion of the conical tube 13 is sprayed to vortex water to prevent the accumulation of oxidized gas powder and serves to wash. Next, in the third duct 15, the powder of the oxidized gas combined with water in the conical tube 13 is dropped into the tank 21b and decomposed in the remaining first wet chamber 3 and the remaining water-soluble waste gas is the second wet chamber. In 16, it is secondary-bonded with the sprayed water so as to fall to the tank 21b. At this time, inside the second wet chamber 16, as in the first wet chamber 3, it is vortexed by the vortex generating means (see FIG. 2) in the form of a coil to promote the coupling with the sprayed water. Next, the mixture of the purified gas and water discharged from the second wet chamber 16 passes through the condensation tube 19 through the fourth duct 18, where the moisture condenses and cools the purified gas. . Accordingly, the condensed water falls into the tank 21c, and the cooled purge gas is discharged into the atmosphere by a fan provided at the outlet 20 of the condensation tube. The wastewater collected in the tank is discharged to the wastewater treatment plant.

Combination of burning type and wet type gas scrubber to purify the waste gas harmful to human body generated in the manufacturing process of semiconductor parts or various manufacturing industries greatly reduces the cost cost due to the simplification of structure and generates vortices to produce air and combustible gas By mixing the combustion well and combustible gas can be completely burned to increase the clean effect, it is possible to easily remove the powder of the oxidized gas burned in the burning chamber to prevent failure due to clogging.

Claims (3)

A waste gas supply pipe for supplying bypass of the waste gas introduced through the first duct; A first wet chamber having a plurality of coils formed to generate vortices in the supplied waste gas, and injecting moisture into the vortexed waste gas through an injection nozzle to decompose the water-soluble gas; A supply pipe connected to the first wet chamber through a second duct, the waste gas decomposed and remaining in the first wet chamber is supplied to supply air and nitrogen gas to generate vortices to be mixed well and to be mixed well with the first wet chamber. And a burning chamber having a heater that ignites the mixed gas with an ignition plug to burn combustible gas; A conical tube connected in communication with the burning chamber, the nozzle having a nozzle for cleaning the oxidized gas powder by vortexing the injection water so as not to accumulate the powder of the oxidized gas burnt in the burning chamber; It is connected to the conical tube through a third duct, a plurality of coils are formed to generate a vortex in the supplied waste gas, water is injected into the water-soluble gas that is not decomposed in the first wet chamber through the injection nozzle water-soluble A second wet chamber for decomposing the gas again; And It is connected to the second wet chamber through a fourth duct, the gas and the water passing through the second wet chamber is supplied to bypass, and it is a double pipe to supply a cold nitrogen gas to the outer tube to solidify the water And a condensation tube having a discharge port for discharging only the purified air into the atmosphere. The method of claim 1, The supply pipe is a gas cleaning device, characterized in that formed by a double pipe of the inner, outer pipe to supply the nitrogen and air separately so that the vortex can occur. The method of claim 1, The burning chamber, An annular heater cover formed of a double tube of an inner and an outer tube; An annular heater built between the inner and outer tubes of the heater cover; And And a heater rod formed in the center of the heater.