KR100403843B1 - Ionizer emitter pin made of ceramic materials - Google Patents

Abstract

An ionizer emitter pin is a pin that emits positive and negative ions that bind to and neutralize electrostatic particles in the air. In the present invention, alumina (Al ₂ O ₃₎ and titanium carbide (TiC) and then mixed in a suitable ratio by sintering this, molding, degreasing, while having excellent wear resistance and corrosion resistance, the advantage of the ceramic conductivity with the conductive properties of the metal at the same time A ceramic material was obtained. In addition, a conductive ceramic composition having high sintered density and excellent wear resistance was obtained by adding a small amount of metal such as iron and nickel to boron titanium (TiB ₂ ), which has conductivity but is known as an ovate aggregate. When these two materials are processed into ionized electrode pins with a diameter of 2 mm and a length of 19 mm and applied to the ion generator for static electricity removal, particle release and corrosion due to abrasion are significantly improved compared to the ionized electrode pins made of tungsten or silicon. As a result, the ion-releasing ability and lifespan are excellent.

Description

IONIZER EMITTER PIN MADE OF CERAMIC MATERIALS}

The present invention is a main component of the ion electrostatic agent which is installed to prevent damage to the components or circuits due to static electricity in the semiconductor or LCD manufacturing process, and has excellent wear resistance and corrosion resistance compared to conventional tungsten and silicon-based composition, which is weak in wear and corrosion The present invention relates to an ionized electrode pin made of a ceramic composition.

Static electricity is generated when certain objects move relative to each other. In the process of contact or separation, one object loses electrons and the other gets electrons, so that they are charged with + and-, respectively. The charged object generates strong polarized current by inductively charging the counterpart not only in contact with another object but also in a non-contact state. Static electricity is always present around our lives and there is no danger in the state of accumulation in the object, but when the battery is discharged, it will shock the human body or cause problems in the electronic circuit.

The damage caused by static electricity has been spread throughout not only real life but also industry. In particular, due to the trend toward miniaturization and integration of electronic devices, they are sensitive to external shocks and are seriously affected by static electricity in the electronics industry. Basically, the problems caused by static electricity are the rupture and deterioration of electronic parts by dust pollution and discharge. Dust pollution means that charged dust floating in the air is attached to the surface of the product by coulomb force generated by electrostatic induction and causes pollution. The damage caused by the discharge is that when the charged object with static electricity is discharged to the electronic part or the workpiece, the electric current is passed through the low resistance part of the electronic part and electric shock is applied, or the heat is increased by the heat energy which increases in proportion to the magnitude of the discharge current. Breakage problems. The breakage of electronic parts is either complete or latent. In the case of complete destruction, it can be detected by inspection before shipment of the product. However, in case of latent destruction that is mainly caused by static electricity, it is difficult to detect by inspection. There is a problem of shipping.

Therefore, the electronic industry is making a lot of efforts to reduce the damage caused by static electricity during the manufacturing process, one of which is using the ionizer (Ionizer). This device is a device that neutralizes and dissipates the positive and negative ions obtained by discharging high voltage to the electric pole and has the opposite polarity of the electric pole. The static electricity is removed without direct contact with the material. In the present electronic industry, ion generators are widely used because they can be used without limitation.

Ion generator consists of ion generator which generates cation and anion and blower that blows it into the air. Double ionizing pin is a core part of ion generator as pin that emits cation and anion by high voltage. The material used for the ionizing electrode pin should be electrically conductive. Initially, stainless steel was used, but there was a problem of deterioration of life due to abrasion of the pin and contamination due to corrosion. It has been spotlighted as a material for fins, and recently, silicon and germanium, semiconductor materials having less particle release and corrosion due to abrasion than tungsten, are used for electrode pins. However, such semiconductor materials also pose a problem of contamination due to wear and corrosion in a semiconductor process with a harsh environment. In order to solve the problems caused by wear and corrosion, it is best to apply ceramics having excellent wear resistance, corrosion resistance, and chemical resistance to ionized electrode pins. However, there are no ionized electrode pins commercialized using ceramics. There is no attempt to manufacture electrode pins. This seems to be because most ceramics are insulators and could not be applied to ionized electrode pins that require electrical conductivity.

An object of the present invention is to provide an ionized electrode pin made of a ceramic composition having excellent wear resistance, corrosion resistance and electrical conductivity. In addition, an object of the present invention is to provide an ionizing electrode pin that can solve the contamination problem caused by wear and corrosion of the existing electrode pins of the present invention and have a stable antistatic operation with a long life.

1 is a photograph showing an ionizing electrode pin manufactured by the ceramic composition according to an embodiment of the present invention.

Titanium carbide (TiC) and boron titanium (TiB ₂ ) are known as conductive ceramics with excellent electrical conductivity. Both materials are sinterable and thus, sintered and fin-shaped products having strengths that can be mechanically processed by conventional methods are obtained. It was difficult. In the present invention, using titanium carbide and boron titanium as castability, using a suitable sintering aid and manufacturing method, a ceramic composition for an ionizing electrode pin and a pin shape manufacturing method having excellent electrical conductivity and strength were developed.

In the following examples, the ceramic composition and the pin-shaped manufacturing method of the present invention were described in detail.

Example 1

20 to 80% by weight of alumina (Al ₂ O ₃ ) and 0.5 to 5% by weight of yttria (Y ₂ O ₃ ) were mixed with titanium carbide (TiC), 1 to 4% by weight of cobalt (Co) or 1-4 weight% of nickel (Ni) was added. The additive cobalt or nickel was added in increments of 1% by weight within 4% by weight. For each 10 kg of the powder thus prepared, 8 liters of ethanol and a dispersant were added, mixed and ground using a ball mill for 20 hours, and again, a binder was added thereto and ball milled for 4 hours. In general, ball mill water is used, but ethanol is used because titanium carbide, cobalt, and nickel are oxidized when they meet water. The mixed slurry was granulated using a powder centrifugal hot air dryer (Spray dryer) and dried to obtain secondary particles having a diameter of 60 to 100 μm. After forming the secondary particles in the form of ionized electrode pins, the temperature was raised to 500 to 800 ° C. at a temperature rising rate of 0.5 ° C./min in a vacuum furnace, and then maintained for 3 hours to be degreased (Binder burn-out). The degreasing body obtained through this process was sintered in a vacuum sintering furnace at 1650 to 1850 ° C. for 2 to 3 hours. The specimens thus obtained showed a high sintered density of 98% or higher relative density, and precisely processed to prepare ionized electrode pins as shown in FIG. 1.

(Example 2)

To borontitanium (TiB ₂ ), one material selected from iron (Fe), nickel (Ni), chromium (Cr), and cobalt (Co) was added in 1 wt% increments in the range of 1 to 5 wt%. Ball milling, granulation, molding, degreasing and sintering were carried out in the same manner as in Example 1. The specimens thus obtained showed a high sintered density of more than 98% relative density and electrical conductivity similar to that of metal.

Comparative Example 1

In general, when ionized electrode pins are manufactured using alumina (Al ₂ O ₃ ), zirconia (ZrO ₂ ), silicon nitride (Si ₃ N ₄ ), etc., which are used for structural materials and mechanical parts, mechanical processing is possible. Although a sintered body having excellent corrosion resistance and abrasion resistance can be obtained, ions are not released even at high voltage due to low electrical conductivity.

Comparative Example 2

Unlike the ceramic composition and manufacturing method presented in the present invention, when the TiC-Al ₂ O ₃ composite material and TiB ₂ were prepared and sintered by a general ceramic manufacturing method, the electrical conductivity values were similar, but the sintered density was 90-95%. In this case, because of low wear resistance and low mechanical toughness, when processed with a sharp pin-shaped ionized electrode pin, many breakages occurred during processing, making it almost impossible to obtain a finished product. In addition, in the case of products processed correctly in shape, as a result of comparison experiments, only 80% of the characteristic values of the products made of semiconductors were obtained in terms of life and contamination by wear.

Comparative Example 3

In order to examine the performance of the ionized electrode pins made by the ceramic composition and the manufacturing method presented in the present invention, the ionized electrode pins prepared in Example 2 and conventional ionized electrode pins made of tungsten and silicon were mounted on the ionizer. Various properties were compared and the measurement results are shown in Table 1. In Table 1, each property value of the ionizing electrode pins of the present invention is an average value.

Table 1. Ion Discharge Characteristics of Ionized Electrode Pins Made of Various Materials

Decay time (sec.) Ion Current (nA) Particle emission amount (/ cm3) Laminated Layer Thickness (㎛) Tungsten pins 0.9 150-250 52 40-50 Silicone pin 0.9 150-250 48 10-20 Ceramic pin 0.7 150-250 7 1-2

Decay time is the time it takes for the voltage of the charging plate located 30 cm away from the ionizing electrode pin to drop to 200 V, which is 10% of the voltage from 2000 V. It indicates the ion generating ability of the ionizing electrode pin. The smaller this value, the better the ion generating ability. In Table 1, it can be seen that the fin made of the conductive ceramic of the present invention has superior characteristics than the semiconductor fin.

The ion current or ion emissivity is the value of the charge measured at 30 cm away from the electrode pin, and all three pins showed the same value. Particle emissions indicate particles that are produced and released by abrasion per unit time. Higher values indicate that contamination is more likely to occur due to abrasion, and ceramic fins are more than five times lower than semiconductor fins.

The thickness of the laminated layer is a coating layer formed on the tip of the electrode pin by corrosion or the like and has a direct relationship with the life and contamination of the electrode pin. The values shown in Table 1 are measured for the electrode pins used for 20 days, and it can be seen that the ceramic pins have a value 10 times smaller than the semiconductor pins. As a result, the ionizing electrode pins made using the ceramic composition developed in the present invention have much superior characteristics in terms of ion generation ability and lifespan than the ionizing electrode pins made of conventional semiconductor and metal materials.

The ceramic composition for ionizing electrode pins proposed in the present invention has excellent sintering properties of 98% or more relative density while maintaining electrical conductivity by using a sintering aid suitable for titanium carbide and boron titanium, which are known as non-sinterable materials. Since the composition has excellent ion generating ability and abrasion resistance compared to the conventional semiconductor material, when applied to the antistatic equipment can increase the life and the static elimination efficiency. In addition, when applied to conductive parts used in a highly corrosive atmosphere, in addition to the ionizing electrode pins, the lifespan and contamination generated in the parts can be greatly reduced.

Claims (3)

15 to 75% by weight of titanium carbide (TiC), 20 to 80% by weight of alumina (Al ₂ O ₃ ) and 0.5 to 5% by weight of yttria (Y ₂ O ₃ ), including cobalt (Co) and nickel (Ni) An ionized electrode pin composed of a material containing 1 to 4% by weight of a single material selected from the group having a pointed pin shape. delete delete