KR100393033B1 - Vacuum evaporator for coating of small lenses - Google Patents

Abstract

The present invention relates to a vacuum evaporator for small lens coating. A circular primary rotary plate 16 is installed at the lower end of the rotary shaft 10 extending from the upper portion of the chamber 12, and a ring-shaped fixed gear 20 around the rotary shaft 10 on the upper side of the primary rotary plate 16. Are fixed, and several shafts 22 are arranged at equal intervals on the primary rotating plate 16, and an electric gear 24 is installed on the upper end of each shaft 22 to be coupled to the ring-shaped fixed gear 20, and each shaft At the lower end of 22, each secondary rotating plate 26 is installed so that the secondary rotating plate 26 can rotate as the primary rotating plate 16 rotates. According to the present invention, each secondary rotary plate 26 is installed so that a plurality of shafts 28 are divided into inner and outer concentric rows so as to penetrate up and down and rotate, and each shaft 28 in the secondary rotary plate 26. Chain gear 30 is installed at the upper end of the) and the third rotary plate 32 is installed at the lower end of the shaft 28, the fixed gear 34 is installed on each shaft 22 of the secondary rotary plate 26 The third rotary plate 32 is rotated against the rotation of the secondary rotary plate 26 so that the third rotary plate 32 is rotated to the chain gear 30 of each shaft 28 of the third rotary plate 32. It is characterized in that the lens carrier 50 in which a plurality of lenses 48 to be coated are arranged is coupled.

Description

Vacuum Evaporator for Small Lens Coating {VACUUM EVAPORATOR FOR COATING OF SMALL LENSES}

The present invention relates to a vacuum evaporator for a small lens coating, and more particularly, to a small lens coating vacuum evaporator which enables the coating compound to be uniformly coated over the entire surface of a small lens having a relatively small radius of curvature.

In general, a lens, which is one of the optical instruments, protects the surface of the lens, adjusts the amount of transmission of the wavelength, and adjusts the characteristics of the color or the degree of noise generation, for example, according to the required conditions of the optical instrument where the lens is used. In order to coat the coating compound is deposited in a vacuum evaporator.

The vacuum evaporator for coating the lens is fixed to the lens carrier and fixed to the rotating plate installed on the upper side of the vacuum depositor to rotate the rotating plate to coat the coating compound on the surface of the lens.

In general, a vacuum evaporator deposits a coating compound on a rotating lens carrier lens by using an electron beam while the inside of the chamber is maintained at about 2.5 × 10 ⁻⁵ torr by a vacuum pump using an electron beam. It is structured.

The rotating device of the rotating plate used at this time is generally dome type (planetary type) and planetary type (planetary type), dome-type rotating device is widely used for the production of mass products such as coating of eyeglass lenses. . In such a dome-type rotating device, a dome-shaped rotating plate is installed on a rotating shaft in which the rotating device extends from the upper side of the chamber, so that the rotating plate can be rotated about the rotating shaft. On the other hand, the planetary device has a structure in which the primary rotating plate rotates by the rotating shaft, the secondary rotating plate rotates by rotating in the primary rotating plate, and the lens carrier is fixed to the secondary rotating plate. It is used for coating of laboratories or products requiring uniform coating uniformity.

The principle of deposition is that the coating compound is evaporated and deposited on the surface of the lens at the bottom of the chamber, and the deposited coating film is formed in a micropillar structure. Therefore, in general, since the micropillar structure is inclined in the direction of incidence of the evaporated particles, the arrangement of the micropillar structure may be changed according to the curved shape of the lens when the product is a lens. In particular, in the case of a lens, the shape of the lens (curvature radius R), size (diameter Φ) and the structure of the rotating device are closely related to the structure of the coating film. Depending on the position of the surface (center, edge), the amount of deposition or the micropillar structure may be different from that deposited on the lens having a surface close to the plane.

Such a shape may be caused by problems such as color characteristics or noise generation characteristics in a system used in matching with a sensor system closely related to an optical system.

In the case of a conventional planetary rotary device, in which four secondary rotating plates rotating on a rotating primary rotating plate are installed, a secondary rotating plate combined with a rotating path of a rotating primary rotating plate and such a rotating revolution of the primary rotating plate is installed. Each lens of the lens carrier fixed to the secondary rotating plate is rotated along a regular and constant spiral path by the rotational path of, so that a relatively uniform coating film is deposited on the lens, but the lens is small and has a small radius of curvature. In the case of the lens, when the curved lens surface is coated, there is a significant difference in the coating distribution in the center portion and the edge portion of the curved surface. For example, the lens disposed at the edge of the lens carrier of the secondary rotating plate has a larger spiral distance or radius of motion than the lens disposed at the center portion, so the lens disposed at the edge is coated at the center and the edge of the curved surface. The quantity distribution shows a big difference.

In the present invention, based on the rotary device being a planetary type, the third rotating plate rotating by the rotating rotating plate in the rotating primary rotating plate is installed on the secondary rotating plate to fix the lens carrier on which a plurality of small lenses are arranged. The rotation paths of the lenses of the rotating plate were approximately equal on average so that uniform coating of the lenses could be achieved.

To this end, in the present invention, a circular primary rotary plate is installed at the lower end of the rotary shaft extending from the upper part of the chamber, and a ring-shaped fixed gear is fixed around the rotary shaft on the upper side of the primary rotary plate, The shaft is arranged and the electric gear is installed at the upper end of each shaft and coupled to the ring-type fixed gear, and each secondary rotating plate is installed at the lower end of each shaft so that each secondary rotating plate can rotate according to the rotation of the primary rotating plate. A vacuum vapor deposition machine is provided. According to the present invention, each secondary rotating plate is installed so that a plurality of shafts are divided into concentric rows of inner and outer sides and rotated up and down, and a chain gear is installed at the upper end of each shaft in the secondary rotating plate and 3 at the bottom of the shaft. The secondary rotating plate is installed, and fixed gears are installed on each axis of the secondary rotating plate so that the third rotating plate rotates against the rotation of the secondary rotating plate, and is coated on the third rotating plate. It is characterized in that the lens carrier is arranged a plurality of lenses to be combined.

Referring to the present invention in more detail based on the accompanying drawings as follows.

1 is a cross-sectional view showing a schematic configuration of the present invention.

2 is a cross-sectional view taken along the line A-A of FIG.

3 is a cross-sectional view taken along the line B-B in FIG.

Figure 4 is a bottom view showing the arrangement of the lens carrier rotating plate viewed in the arrow C direction of FIG.

5 is a partial cross-sectional view showing that the lens carrier is coupled to the lens carrier rotating plate of FIG.

6 is an explanatory diagram showing that the deposition chemical is deposited on the lens fixed to the lens carrier.

<Explanation of Signs of Major Parts of Drawings>

10 ... rotating shaft 16 ... 1st rotating plate

20 ... ring fixed gear 22 ... shaft

24 ... Electric gear 26 ... Secondary turn plate

28 ... shaft 30 ... chain gear

48 ... lens 50 ... lens carrier

Figure 1 shows a vacuum evaporator for a small lens coating according to the present invention. It consists of a chamber 12 from which the rotating shaft 10 extends from the top, and a coating compound source 14 is disposed below the chamber 12. A circular primary rotary plate 16 is installed at the lower end of the rotary shaft 10, and a ring-shaped fixed gear 20 is fixed to the upper side of the primary rotary plate 16 by a support rod 18 around the rotary shaft 10. Four shafts 22 are arranged on the primary rotating plate 16 at equal intervals, and an electric gear 24 is installed on the upper end of each shaft 22 to be coupled to the ring-shaped fixed gear 20. In addition, four secondary rotary plates 26 are installed at the lower ends of the respective shafts 22 so that the secondary rotary plates 26 rotate (rotate) in accordance with the rotation (idle) of the primary rotary plates 16.

According to the present invention, each secondary rotating plate 26 is installed so that a plurality (for example, 12) of the shafts 28 can be rotated by penetrating up and down. These axes 28 are arranged by dividing the inner and outer concentric rows. Therefore, in the embodiment of the present invention, nine axes 28 are arranged in the outer circular row and three axes 28 are arranged in the inner circular row. In the secondary rotary plate 26, a chain gear 30 is installed at the upper end of each shaft 28, and a third rotary plate 32 is installed at the lower end of the shaft 28. A fixed gear 34 is mounted on each shaft 22 of the secondary rotating plate 26 above the secondary rotating plate 26. On the other hand, the idle shaft 36 is placed adjacent to the shaft 28 forming an inner circular row on the upper side of the secondary rotating plate 26, and the electric gear 38 and the chain gear 40 are installed on the electric gear 38. ) Is coupled to the fixed gear 34 mounted on the shaft 22 of the secondary rotating plate 26. One of the shafts 28 constituting the outer circular row is extended to the upper side so that the electric gear 42 is mounted on the upper end thereof and is coupled to the electric gear 38 of the idle shaft 36.

The shaft 28 on which the tertiary rotating plate 32 is mounted at the lower end of the shaft 28 is connected to the chain 44 together with the chain gear 40 of the idle shaft 36 by the chain gears 30 mounted on the shaft 28 of the inner circular row. The shaft 28 of the outer circular row is electrically connected to each chain gear 30 is electrically connected to the chain 46.

A lens carrier 50 having a plurality of lenses 48 to be coated is coupled to the lower side of each tertiary rotating plate 32.

In the present invention as described above, the rotary shaft 10 extending from the upper side of the chamber 12 rotates so that the primary rotary plate 16 rotates and is rotated on the upper end of the shaft 22 installed thereon. As the installed electric gear 24 is rotated while being coupled to the ring-shaped fixed gear 20, the shaft 22 rotates by rotation, so that the secondary rotating plate 16 installed at the lower end of the shaft 22 is the primary rotating plate ( Rotate against the static in 16).

On the other hand, the rotational movement of the shaft 22 and the secondary rotating plate 26 rotates the tertiary rotating plate 32 disposed below the secondary rotating plate 26. The rotational movement of the tertiary rotating plate 32 becomes a rotational movement of the rotation when the rotational movement of the secondary rotating plate 26 is viewed as the rotational rotation of the revolution. In FIG. 1, only the two sides of the tertiary rotating plate 32 are illustrated in order to clarify the drawings, and the rest of the drawings are omitted. However, those skilled in the art will readily understand the arrangement of this tertiary rotating plate 32 from the remaining figures attached in addition to FIG.

The rotation of the tertiary rotating plate 32 is made through the following path. That is, the fixed gear 34 installed thereon is rotated by the rotation of the shaft 22 for rotating the secondary rotary plate 26, and the electric gear 38 and the third rotary plate 32 of the idle shaft 36 are sequentially coupled thereto. ), The electric gear 42 mounted on the upper end of one shaft 28 of the outer circular row rotates. The idle shaft 36 is connected to the chain gear 40 installed in the middle and the chain gear 30 mounted on the shaft 28 of the inner circular row by the chain 44 to rotate the shaft 28 of the inner circular row. By rotating the third rotary plate 32 of the inner circular row installed in this. The rotational force transmitted from the electric gear 42 rotates the chain gear 30 mounted on one of the shafts 28 of the outer circular row, so that the chain 46 connected to the chain gears 30 of all the shafts 28 of the outer circular row. ) Rotates the tertiary rotating plate 32 of the outer circular row. Therefore, all the tertiary rotating plates 32 rotate.

The third rotary plate 32 is rotated by rotating the secondary rotary plate 26 with respect to the orbital rotation of the primary rotary plate 16 and again the rotational movement of the secondary rotary plate 26 to the idle rotation rotation speed is very A fast and rotational motion path is made along the rotational motion path of the edge close to the center portion of the chamber 12, and each lens 48 of the lens carrier 50, which is fixed to the tertiary rotating plate 32, is the lens 48 The central part and the edge of the surface are uniformly faced to the coating compound incident upon evaporation, so that the curved surface of each lens can be uniformly coated.

As described above, the present invention is to install a tertiary rotating plate rotating on the secondary rotating plate rotating in the rotating primary rotating plate based on the planetary type of the rotating device to fix the lens carrier on which a plurality of small lenses are disposed. The rotation path of each lens of the tertiary rotating plate is made almost identical on average so that uniform coating of the lens can be achieved.

In the present invention, as a result of coating the lens of 4.5mm diameter using the apparatus of the present invention, in terms of productivity improvement, there was no significant difference compared to the conventional apparatus, but the lens with a small radius of curvature due to the structural change of the rotating apparatus The deposition effect of resulted in a uniform coating over the entire lens and improved coating properties.

product name Size (Φ) Radius of curvature Coating characteristics (coating type; IR coating) Remarks L02-5001 # 2 LENS Φ4.5 R1 = 3.226 420 ~ 650nm: 90% T or more 31 layers coating time 2 hours 30 minutes 660 ± 5nm: 50% T 680 ~ 1100nm: 1% T or less

Claims (1)

A circular primary rotary plate 16 is installed at the lower end of the rotary shaft 10 extending from the upper portion of the chamber 12, and a ring-shaped fixed gear 20 around the rotary shaft 10 on the upper side of the primary rotary plate 16. Are fixed, and several shafts 22 are arranged at equal intervals on the primary rotating plate 16, and an electric gear 24 is installed on the upper end of each shaft 22 to be coupled to the ring-shaped fixed gear 20, and each shaft In the small lens coating vacuum evaporator in which each secondary rotary plate 26 is installed at the lower end of the 22 to allow each secondary rotary plate 26 to rotate as the primary rotary plate 16 rotates. A plurality of shafts 28 are installed in the secondary rotating plate 26 so as to be divided into inner and outer concentric rows so as to be penetrated up and down and rotated. 30 is installed and the tertiary rotating plate 32 is installed at the lower end of the shaft 28, and the fixed gear 34 is installed on each shaft 22 of the secondary rotating plate 26 of the tertiary rotating plate 32A plurality of lenses 48 to be rotated to the chain gear 30 of the shaft 28 so that the tertiary rotating plate 32 rotates against the rotation of the secondary rotating plate 26 and to be coated on the tertiary rotating plate 32. The small lens coating vacuum evaporator, characterized in that the lens carrier 50 is disposed.