KR100358513B1 - Method of fabricating electrical contactor for testing electronic device and electrical contactor fabricated thereby - Google Patents
Method of fabricating electrical contactor for testing electronic device and electrical contactor fabricated thereby Download PDFInfo
- Publication number
- KR100358513B1 KR100358513B1 KR1020020006367A KR20020006367A KR100358513B1 KR 100358513 B1 KR100358513 B1 KR 100358513B1 KR 1020020006367 A KR1020020006367 A KR 1020020006367A KR 20020006367 A KR20020006367 A KR 20020006367A KR 100358513 B1 KR100358513 B1 KR 100358513B1
- Authority
- KR
- South Korea
- Prior art keywords
- electrical contactor
- trench
- tip part
- fabricated
- electronic device
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
Priority Applications (9)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020020006367A KR100358513B1 (en) | 2002-02-05 | 2002-02-05 | Method of fabricating electrical contactor for testing electronic device and electrical contactor fabricated thereby |
CN2008101355299A CN101354405B (zh) | 2002-02-05 | 2002-11-08 | 测试电子装置用电接触元件的制造方法及电接触元件 |
JP2003566894A JP2005517192A (ja) | 2002-02-05 | 2002-11-08 | 電子素子検査用の電気的接触体の製造方法及びこれによる電気的接触体 |
DE10297653T DE10297653T5 (de) | 2002-02-05 | 2002-11-08 | Verfahren zum Herstellen eines elektrischen Kontaktbauteils zur Prüfung einer elektrischen Vorrichtung und ein elektrisches Kontaktbauteil |
PCT/KR2002/002073 WO2003067650A1 (en) | 2002-02-05 | 2002-11-08 | Method for manufacturing electric contact element for testing electro device and electric contact element thereby |
CNB028277597A CN100423221C (zh) | 2002-02-05 | 2002-11-08 | 测试电子装置用电接触元件的制造方法及所制得的电接触元件 |
AU2002353582A AU2002353582A1 (en) | 2002-02-05 | 2002-11-08 | Method for manufacturing electric contact element for testing electro device and electric contact element thereby |
US10/350,737 US20040018752A1 (en) | 2002-02-05 | 2003-01-23 | Method for manufacturing electrical contact element for testing electro device and electrical contact element thereby |
US11/352,658 US7579855B2 (en) | 2002-02-05 | 2006-02-13 | Method for manufacturing electrical contact element for testing electronic device and electrical contact element manufactured thereby |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020020006367A KR100358513B1 (en) | 2002-02-05 | 2002-02-05 | Method of fabricating electrical contactor for testing electronic device and electrical contactor fabricated thereby |
Publications (1)
Publication Number | Publication Date |
---|---|
KR100358513B1 true KR100358513B1 (en) | 2002-10-30 |
Family
ID=37490411
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020020006367A KR100358513B1 (en) | 2002-02-05 | 2002-02-05 | Method of fabricating electrical contactor for testing electronic device and electrical contactor fabricated thereby |
Country Status (2)
Country | Link |
---|---|
KR (1) | KR100358513B1 (ko) |
CN (1) | CN101354405B (ko) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007018367A1 (en) * | 2005-08-10 | 2007-02-15 | Phicom Corporation | Cantilever-type probe and method of fabricating the same |
KR100790465B1 (ko) * | 2007-04-04 | 2008-01-03 | 주식회사 아이엠 | 프로브 카드의 니들과 그의 제조 방법 |
KR100814325B1 (ko) | 2007-12-28 | 2008-03-18 | 주식회사 파이컴 | 접속 소자의 접촉 팁 구조 |
WO2009084770A1 (en) * | 2007-12-28 | 2009-07-09 | Phicom Corporation | Contact tip structure of a connecting element |
KR101273970B1 (ko) | 2006-12-11 | 2013-06-12 | (주) 미코에스앤피 | 프로브의 탐침 및 프로브의 제조방법 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU3073797A (en) * | 1996-05-17 | 1997-12-05 | Formfactor, Inc. | Wafer-level burn-in and test |
CN1208624C (zh) * | 1996-05-17 | 2005-06-29 | 福姆法克特公司 | 用于制造互连元件的方法 |
EP1135690B1 (en) * | 1998-12-02 | 2003-06-04 | Formfactor, Inc. | Lithographic contact elements |
-
2002
- 2002-02-05 KR KR1020020006367A patent/KR100358513B1/ko not_active IP Right Cessation
- 2002-11-08 CN CN2008101355299A patent/CN101354405B/zh not_active Expired - Fee Related
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007018367A1 (en) * | 2005-08-10 | 2007-02-15 | Phicom Corporation | Cantilever-type probe and method of fabricating the same |
US7678587B2 (en) | 2005-08-10 | 2010-03-16 | Phicom Corporation | Cantilever-type probe and method of fabricating the same |
KR101273970B1 (ko) | 2006-12-11 | 2013-06-12 | (주) 미코에스앤피 | 프로브의 탐침 및 프로브의 제조방법 |
KR100790465B1 (ko) * | 2007-04-04 | 2008-01-03 | 주식회사 아이엠 | 프로브 카드의 니들과 그의 제조 방법 |
KR100814325B1 (ko) | 2007-12-28 | 2008-03-18 | 주식회사 파이컴 | 접속 소자의 접촉 팁 구조 |
WO2009084770A1 (en) * | 2007-12-28 | 2009-07-09 | Phicom Corporation | Contact tip structure of a connecting element |
Also Published As
Publication number | Publication date |
---|---|
CN101354405A (zh) | 2009-01-28 |
CN101354405B (zh) | 2012-09-19 |
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Payment date: 20110929 Year of fee payment: 10 |
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