KR100325524B1 - Fluid injection device and manufacturing method thereof - Google Patents
Fluid injection device and manufacturing method thereof Download PDFInfo
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- KR100325524B1 KR100325524B1 KR1019980054152A KR19980054152A KR100325524B1 KR 100325524 B1 KR100325524 B1 KR 100325524B1 KR 1019980054152 A KR1019980054152 A KR 1019980054152A KR 19980054152 A KR19980054152 A KR 19980054152A KR 100325524 B1 KR100325524 B1 KR 100325524B1
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- fluid
- driving
- fluid chamber
- forming
- substrate
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- 239000012530 fluid Substances 0.000 title claims abstract description 137
- 238000002347 injection Methods 0.000 title claims abstract description 46
- 239000007924 injection Substances 0.000 title claims abstract description 46
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 19
- 239000012528 membrane Substances 0.000 claims abstract description 37
- 239000000758 substrate Substances 0.000 claims abstract description 33
- 238000000034 method Methods 0.000 claims abstract description 21
- 238000010438 heat treatment Methods 0.000 claims abstract description 13
- 239000004642 Polyimide Substances 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 5
- 229920001721 polyimide Polymers 0.000 claims description 5
- 238000005530 etching Methods 0.000 claims description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- 238000001312 dry etching Methods 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 238000001039 wet etching Methods 0.000 claims description 3
- 230000004888 barrier function Effects 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- RVSGESPTHDDNTH-UHFFFAOYSA-N alumane;tantalum Chemical compound [AlH3].[Ta] RVSGESPTHDDNTH-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14032—Structure of the pressure chamber
- B41J2/14064—Heater chamber separated from ink chamber by a membrane
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14032—Structure of the pressure chamber
- B41J2/14048—Movable member in the chamber
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14072—Electrical connections, e.g. details on electrodes, connecting the chip to the outside...
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1603—Production of bubble jet print heads of the front shooter type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/162—Manufacturing of the nozzle plates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
- B41J2/1634—Manufacturing processes machining laser machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14387—Front shooter
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
유체 분사 장치는 구동 유체가 수용된 구동 유체실이 형성된 기판과, 구동 유체실의 구동 유체를 열팽창시키기 위한 전극 및 발열체를 가지는 구동부; 유체가 분사되는 노즐 및 분사될 유체를 수용하는 분사 유체실을 가지는 노즐부; 및 분사 유체실의 유체가 노즐을 통해 분사되도록 구동 유체의 열팽창에 의해 발생된 구동력을 노즐부로 전달하는 멤브레인을 포함한다. 유체 분사 장치의 제조 방법은 기판에 구동 유체실을 형성하는 단계; 구동 유체실의 하면에 전극 및 발열체를 형성하는 단계; 구동 유체실로 구동 유체를 주입하기 위한 구동 유체 주입로를 형성하는 단계; 기판 상측에 멤브레인을 형성하는 단계; 멤브레인의 상측에 노즐 및 분사 유체실을 가지는 노즐부를 형성하는 단계를 포함한다. 이에 따르면, 구동 유체실이 기판에 형성되므로 유체 분사 장치의 구조 및 제조 공정이 간단해지고, 멤브레인과 구동부의 접착 공정이 생략되어 생산성이 크게 향상된다.The fluid ejection apparatus includes a drive unit having a substrate on which a driving fluid chamber is accommodated, and an electrode and a heating element for thermally expanding the driving fluid of the driving fluid chamber; A nozzle unit having a nozzle to which the fluid is injected and an injection fluid chamber to receive the fluid to be injected; And a membrane for transmitting a driving force generated by thermal expansion of the driving fluid to the nozzle unit such that the fluid in the injection fluid chamber is injected through the nozzle. A method of manufacturing a fluid ejection apparatus includes the steps of forming a driving fluid chamber in a substrate; Forming an electrode and a heating element on a lower surface of the driving fluid chamber; Forming a drive fluid inlet path for injecting a drive fluid into the drive fluid chamber; Forming a membrane over the substrate; Forming a nozzle portion having a nozzle and an injection fluid chamber on top of the membrane. According to this, the driving fluid chamber is formed in the substrate, so that the structure and manufacturing process of the fluid ejection apparatus are simplified, and the adhesion process of the membrane and the driving unit is omitted, thereby greatly improving the productivity.
Description
본 발명은 잉크젯 프린터(Inkjet printer)나 팩시밀리 등의 출력 장치에 관한 것이다. 보다 구체적으로는 출력 장치의 프린터 헤드에 사용되는 유체 분사 장치 및 그 제조 방법에 관한 것이다.The present invention relates to an output device such as an inkjet printer or a facsimile. More specifically, the present invention relates to a fluid ejection apparatus used for a printer head of an output apparatus and a method of manufacturing the same.
잉크젯 프린터(Inkjet printer)나 팩시밀리 등과 같은 출력 장치의 프린터 헤드에 사용되는 유체 분사 장치는 쳄버 내부의 유체에 물리적인 힘을 가하여 소정량의 유체를 외부로 분사시킨다. 이러한 유체 분사 장치는 유체에 물리력을 가하는 방식에 따라 가열 방식, 압전 방식, 및 열압축 방식 등으로 구분된다.The fluid ejection device used for the printer head of an output device such as an inkjet printer or a facsimile injects a predetermined amount of fluid to the outside by applying a physical force to the fluid inside the chamber. The fluid injection device is classified into a heating method, a piezoelectric method, and a thermal compression method according to a method of applying a physical force to the fluid.
도 1은 이러한 유체 분사 장치의 일 예로서 열압축 방식 유체 분사 장치의 구조를 보인 것이다.1 illustrates a structure of a heat compression fluid injection device as an example of such a fluid injection device.
도시된 바와 같이 유체 분사 장치는 구동부(10)와, 멤브레인(20), 및 노즐부(30)를 포함하여 이루어져 있다. 구동부(10)에는 구동 유체가 채워진 구동 유체실(11)이 형성되어 있고, 구동 유체실(11)에는 구동 유체를 가열하는 발열체(13)가 설치되어 있다. 노즐부(30)에는 분사 유체실(31)과 노즐(32)이 형성되어 있다. 그리고, 구동 유체실(11)과 분사 유체실(31) 사이에 멤브레인(20)이 개재되어 있다.As shown, the fluid injection device includes a driving unit 10, a membrane 20, and a nozzle unit 30. A drive fluid chamber 11 filled with a drive fluid is formed in the drive unit 10, and a heat generator 13 for heating the drive fluid is provided in the drive fluid chamber 11. The injection fluid chamber 31 and the nozzle 32 are formed in the nozzle part 30. The membrane 20 is interposed between the driving fluid chamber 11 and the injection fluid chamber 31.
전극(12)에 전원이 인가되면 발열체(13)에서 발생된 열에 의해 구동 유체가 열팽창된다. 구동 유체의 팽창 압력에 의해 멤브레인(20)이 상방으로 변형되고, 분사 유체실(31) 내의 분사 유체가 노즐(32)을 통해 외부로 분사된다. 도면에서 미설명 부호 16은 구동 유체 배리어고, 33은 분사 유체 배리어, 34는 노즐판이다.When power is applied to the electrode 12, the driving fluid is thermally expanded by the heat generated by the heat generator 13. The membrane 20 is deformed upward by the expansion pressure of the driving fluid, and the injection fluid in the injection fluid chamber 31 is injected to the outside through the nozzle 32. In the figure, reference numeral 16 is a driving fluid barrier, 33 is an injection fluid barrier, and 34 is a nozzle plate.
이러한 유체 분사 장치는 구동부(10), 멤브레인(20), 및 노즐부(30)를 각각 별도로 제작한 다음 서로 조립하는 것에 의해 완성된다. 이를 도 2를 참조하여 간략하게 살펴보면 다음과 같다.This fluid injection device is completed by separately manufacturing the drive unit 10, the membrane 20, and the nozzle unit 30, and then assembling each other. This is briefly described with reference to FIG. 2.
우선 구동부(10)는 절연층(14)을 가지는 기판(15) 위에 전극(12) 및 발열체(13)를 형성한 다음 그 위에 구동 유체 배리어(16)를 적층하고 구동 유체실(11)과 구동 유체 주입로(17)를 형성하는 것에 의해 제작한다.First, the driving unit 10 forms the electrode 12 and the heating element 13 on the substrate 15 having the insulating layer 14, and then stacks the driving fluid barrier 16 thereon, and drives the driving fluid chamber 11 and the driving fluid chamber 11. It manufactures by forming the fluid injection path 17.
멤브레인(20)은 도 3에 도시된 바와 같이 스핀 코팅 등의 방법으로 기판(22) 위에 도포하여 제작된다. 이렇게 제작된 멤브레인(20)은 그 위에 링 형상의 쿼츠 글래스(24; Quartz glass)를 접착하고 기판(22)을 분리한 다음, 이를 뒤집어서 구동부(10)의 상측에 접착한다. 그리고 나서 쿼츠 글래스(24)를 제거하면, 구동부-멤브레인 조립체가 형성된다.The membrane 20 is fabricated by applying it onto the substrate 22 by spin coating or the like as shown in FIG. 3. The membrane 20 manufactured as described above is bonded to a quartz glass 24 having a ring shape thereon, and the substrate 22 is separated, and then, the membrane 20 is inverted and adhered to the upper side of the driving unit 10. Then, removing the quartz glass 24, the drive-membrane assembly is formed.
노즐부(30)는 기판(35) 위에 노즐판(34)을 적층하고 노즐(32)을 형성한 다음, 노즐판(34) 상측에 분사 유체 배리어(33)를 적층하고 분사 유체실(31)을 형성하여 제작한다(도 2 참조). 이때, 노즐(32) 및 분사 유체실(31)은 리소그래피(Lithography) 및 식각 공정에 의해 형성된다.The nozzle unit 30 stacks the nozzle plate 34 on the substrate 35, forms the nozzle 32, and then stacks the injection fluid barrier 33 on the nozzle plate 34 and the injection fluid chamber 31. It is produced by forming (see Fig. 2). At this time, the nozzle 32 and the injection fluid chamber 31 are formed by lithography and etching processes.
그리고 나서, 노즐부(30)의 기판(35)을 분리하여 구동부-멤브레인 조립체의 상측에 접착하는 것에 의해 유체 분사 장치가 완성된다.Then, the fluid ejection apparatus is completed by detaching the substrate 35 of the nozzle portion 30 and adhering to the upper side of the drive-membrane assembly.
그러나, 상기와 같은 종래의 유체 분사 장치는 다음과 같은 단점이 있었다.However, the conventional fluid injection device as described above has the following disadvantages.
즉, 구동부에 구동 유체실 및 구동 유체 주입 경로를 형성하는 제조 공정 및 멤브레인의 제조 공정이 복잡하고 난해하여 생산성이 낮다는 단점이 있었다. 또한, 멤브레인과 구동부가 접착에 의해 조립되는 바, 이 접착 공정도 난해하여 구동부와 멤브레인이 제대로 접착되지 않는 경우가 종종 발생되었다. 그 결과 구동 유체가 누설되므로 제품의 신뢰성이 떨어지는 단점이 있었다.In other words, the manufacturing process of forming the driving fluid chamber and the driving fluid injection path and the manufacturing process of the membrane are complicated and difficult, and thus the productivity is low. In addition, since the membrane and the driving unit are assembled by adhesion, this bonding process is also difficult and often the driving unit and the membrane are not properly bonded. As a result, the driving fluid is leaked, and thus the reliability of the product is lowered.
본 발명은 상기와 같은 단점을 해소하기 위해 안출된 것으로, 구조가 간단하여 생산성이 향상될 수 있는 유체 분사 장치를 제공하는데 그 목적이 있다.The present invention has been made to solve the above disadvantages, the object of the present invention is to provide a fluid injection device that can be improved in productivity with a simple structure.
본 발명의 다른 목적은 상기의 유체 분사 장치를 제조하는 방법을 제공하는데 있다.Another object of the present invention is to provide a method of manufacturing the fluid injection device.
본 발명의 또다른 목적은 멤브레인과 구동부의 접착 공정이 필요없는 유체 분사 장치의 제조 방법을 제공하는데 있다.It is another object of the present invention to provide a method for manufacturing a fluid ejection apparatus which does not require a bonding process of a membrane and a driving part.
도 1은 종래의 유체 분사 장치를 보인 단면도.1 is a cross-sectional view showing a conventional fluid injection device.
도 2는 종래의 유체 분사 장치의 제조 방법을 나타낸 도면.2 is a view showing a manufacturing method of a conventional fluid injection device.
도 3은 종래의 멤브레인 제조 방법을 보인 도면.3 is a view showing a conventional membrane manufacturing method.
도 4는 본 발명에 따른 유체 분사 장치를 보인 단면도.Figure 4 is a cross-sectional view showing a fluid injection device according to the present invention.
도 5는 본 발명에 따른 유체 분사 장치의 제조 방법을 나타낸 도면5 is a view showing a method of manufacturing a fluid injection device according to the present invention.
* 도면의 주요 부분에 대한 부호의 설명 *Explanation of symbols on the main parts of the drawings
110 ; 구동부 111 ; 구동 유체실110; Drive section 111; Driving fluid chamber
117 ; 구동 유체 주입로 120 ; 멤브레인117; Drive fluid injection furnace 120; Membrane
130 ; 노즐부130; Nozzle part
상기와 같은 목적은, 구동 유체가 수용된 구동 유체실이 형성된 기판과, 구동 유체실의 구동 유체를 열팽창시키기 위한 전극 및 발열체를 가지는 구동부; 유체가 분사되는 노즐 및 분사될 유체를 수용하는 분사 유체실을 가지는 노즐부; 및 분사 유체실의 유체가 노즐을 통해 분사되도록 구동 유체의 열팽창에 의해 발생된 구동력을 노즐부로 전달하는 멤브레인을 포함하는 본 발명에 따른 유체 분사 장치에 의해 달성된다.The above object is a drive unit having a substrate having a drive fluid chamber in which a drive fluid is accommodated, an electrode and a heating element for thermally expanding the drive fluid of the drive fluid chamber; A nozzle unit having a nozzle to which the fluid is injected and an injection fluid chamber to receive the fluid to be injected; And a membrane for transmitting the driving force generated by the thermal expansion of the driving fluid to the nozzle portion such that the fluid in the injection fluid chamber is injected through the nozzle.
그리고, 구동 유체실로 구동 유체를 주입하기 위한 구동 유체 주입로가 구동 유체실의 하면으로부터 기판을 하방으로 관통하여 형성된다.A driving fluid injection path for injecting driving fluid into the driving fluid chamber is formed by penetrating downwardly from the lower surface of the driving fluid chamber.
상기의 다른 목적들은, 기판에 구동 유체실을 형성하는 단계; 구동 유체실의 하면에 전극 및 발열체를 형성하는 단계; 구동 유체실로 구동 유체를 주입하기 위한 구동 유체 주입로를 형성하는 단계; 기판 상측에 멤브레인을 형성하는 단계; 멤브레인의 상측에 노즐 및 분사 유체실을 가지는 노즐부를 형성하는 단계를 포함하는 본 발명에 따른 유체 분사 장치의 제조 방법에 의해 달성된다.Another object of the above is to form a driving fluid chamber in a substrate; Forming an electrode and a heating element on a lower surface of the driving fluid chamber; Forming a drive fluid inlet path for injecting a drive fluid into the drive fluid chamber; Forming a membrane over the substrate; It is achieved by a method of manufacturing a fluid ejection device according to the present invention comprising forming a nozzle portion having a nozzle and an ejection fluid chamber above the membrane.
기판에 구동 유체실을 형성하는 단계는 습식 식각 공정에 의해 이루어지며, 구동 유체실이 경사지게 식각될 수 있도록 기판의 재질은 대략 방향성 95 내지 105의 실리콘 웨이퍼를 사용한다.The forming of the driving fluid chamber on the substrate is performed by a wet etching process, and the material of the substrate uses a silicon wafer having a direction of about 95 to 105 so that the driving fluid chamber can be etched obliquely.
구동 유체 주입로를 형성하는 단계는 식각 공정 또는 레이저 빔 가공에 의해 이루어진다.The forming of the driving fluid injection path is performed by an etching process or laser beam processing.
기판 상측에 멤브레인을 형성하는 단계는 필름 형태의 폴리이미드를 기판 상측에 부착하고 이를 소정의 두께로 건식 식각하는 것에 의해 이루어진다.Forming a membrane on top of the substrate is accomplished by attaching a polyimide in the form of a film on top of the substrate and dry etching it to a predetermined thickness.
이에 따르면, 구동 유체실이 기판에 형성되므로 유체 분사 장치의 구조 및 제조 공정이 간단해지고, 멤브레인과 구동부의 접착 공정이 생략되어 생산성이 크게 향상된다.According to this, the driving fluid chamber is formed in the substrate, so that the structure and manufacturing process of the fluid ejection apparatus are simplified, and the adhesion process of the membrane and the driving unit is omitted, thereby greatly improving the productivity.
이하, 첨부된 도면을 참조하여 본 발명의 바람직한 일 실시예를 보다 상세하게 설명한다.Hereinafter, with reference to the accompanying drawings will be described in detail a preferred embodiment of the present invention.
본 발명의 일 실시예에 따른 유체 분사 장치가 도 4에 도시되어 있다.A fluid injector according to one embodiment of the invention is shown in FIG. 4.
도시된 바와 같이, 본 발명의 일 실시예에 따른 유체 분사 장치는 구동부(110), 멤브레인(120), 및 노즐부(130)를 포함한다. 구동부(110)는 구동 유체실(111)이 기판(115) 상부에 형성되어 있으며, 구동 유체 주입로(117)는 구동 유체실(111)의 하면 일측으로부터 기판(115)을 하방으로 관통하여 형성되어 있다. 또한, 구동 유체실(111)의 하면 일측에 발열체(113)와 발열체(113)에 구동 신호를 인가하는 전극(112)이 설치되어 있다. 멤브레인(120)은 기판(115)의 상측에 설치되어 구동 유체실(111)을 밀폐하고 있으며, 멤브레인(120)의 상측에 분사 유체실(131)과 노즐(132)을 가지는 노즐부(130)가 설치되어 있다. 도면에서 미설명 부호 133은 분사 유체 배리어고, 134는 노즐판이다.As shown, the fluid injection device according to an embodiment of the present invention includes a drive unit 110, a membrane 120, and a nozzle unit 130. The driving unit 110 has a driving fluid chamber 111 formed on the substrate 115, and the driving fluid injection passage 117 penetrates the substrate 115 downward from one side of the lower surface of the driving fluid chamber 111. It is. In addition, an electrode 112 for applying a driving signal to the heating element 113 and the heating element 113 is provided on one side of the lower surface of the driving fluid chamber 111. The membrane 120 is installed above the substrate 115 to seal the driving fluid chamber 111 and the nozzle unit 130 having the injection fluid chamber 131 and the nozzle 132 above the membrane 120. Is installed. In the figure, reference numeral 133 denotes an injection fluid barrier, and 134 denotes a nozzle plate.
이러한 유체 분사 장치는 본 발명에 따른 유체 분사 장치의 제조 방법에 의해 제조된다. 이를 도 5를 참조하여 상세하게 설명하면 다음과 같다.Such a fluid injector is manufactured by the method for producing a fluid injector according to the present invention. This will be described in detail with reference to FIG. 5 as follows.
우선 기판(115)을 식각하여 구동 유체실(111)을 형성한다. 이때, 대략 방향성이 95 내지 105, 바람직하게는 100인 실리콘 웨이퍼를 기판(115)의 재질로 사용하여 습식 식각을 행한다. 이에 따라 기판(115)은 수평면에 대하여 대략 54.5 내지 55°, 바람직하게는 54.74°의 경사를 가지고 식각된다.First, the substrate 115 is etched to form the driving fluid chamber 111. At this time, wet etching is performed using a silicon wafer having a substantially directionality of 95 to 105, preferably 100, as the material of the substrate 115. Accordingly, the substrate 115 is etched with an inclination of approximately 54.5 to 55 degrees, preferably 54.74 degrees with respect to the horizontal plane.
구동 유체실(111)이 형성된 다음, 구동 유체실(111)의 하면에 금속층을 증착하고 리소그래피 공정을 통해 전극(112) 및 발열체(113)를 형성한다. 전극(112)의 재질로는 알루미늄이 적당하며, 발열체(113)의 재질로는 약간의 저항(대략 수십Ω)을 가지는 탄탄알루미늄이 적당하다. 이때, 구동 유체실(111)의 벽면이 수평면에 대하여 경사지게 식각되어 있기 때문에 전극(112) 및 발열체(113)의 형성을 위한 금속층의 증착시 양호한 스텝 커버리지(step coverage)가 얻어진다.After the driving fluid chamber 111 is formed, a metal layer is deposited on the lower surface of the driving fluid chamber 111 and the electrode 112 and the heating element 113 are formed through a lithography process. Aluminum is suitable for the material of the electrode 112, and tantalum aluminum having some resistance (approximately several tens of microwatts) is suitable for the material of the heat generating element 113. At this time, since the wall surface of the driving fluid chamber 111 is etched inclined with respect to the horizontal plane, good step coverage is obtained when the metal layer for forming the electrode 112 and the heating element 113 is deposited.
그리고 나서, 레이저 빔 가공 또는 식각 공정을 이용하여 구동 유체실(111)의 일측 하면으로부터 하방으로 기판(115)을 관통하는 구동 유체 주입로(117)를 형성한다.Then, the driving fluid injection path 117 penetrates the substrate 115 downward from one lower surface of the driving fluid chamber 111 by using a laser beam machining or an etching process.
다음으로, 필름 형태의 폴리이미드(120'; polyimide)를 롤러 등을 이용해 기판 상에 부착한다. 이에 따라 구동 유체실(111)이 완성된다. 그런데, 이 필름 형태의 폴리이미드(120')는 그 두께가 대략 수십㎛이며, 이를 그대로 멤브레인(120)으로 사용하기에는 무리가 있다. 따라서, 건식 식각을 통해 두께를 대략 수㎛으로 줄인다. 이렇게 형성된 얇은 두께의 멤브레인(120)은 낮은 전압에서도 용이하게 구동될 수 있다.Next, polyimide (120 ') in the form of a film is attached onto the substrate using a roller or the like. Thereby, the drive fluid chamber 111 is completed. However, the film-form polyimide 120 'has a thickness of about several tens of micrometers, and it is unreasonable to use it as the membrane 120 as it is. Thus, through dry etching, the thickness is reduced to approximately several micrometers. The thin membrane 120 thus formed may be easily driven even at low voltage.
멤브레인(120)이 완성되고 나면 그 상측에 노즐부(130)를 별도로 제작하여 접착하거나, 일체로 형성하는 것에 의해 유체 분사 장치가 완성된다. 여기서, 노즐부(130)는 상술한 바와 같은 통상의 제조 방법에 의해 제조된다.After the membrane 120 is completed, the fluid injection device is completed by separately manufacturing and adhering the nozzle unit 130 on the upper side thereof, or by forming the membrane 120. Here, the nozzle part 130 is manufactured by the conventional manufacturing method as mentioned above.
상기된 바와 같은 본 발명에 따르면, 구동 유체실이 기판에 형성되므로 유체 분사 장치의 구조 및 제조 공정이 간단해지고, 멤브레인과 구동부의 접착 공정이 생략되어 생산성이 크게 향상되는 장점이 있다. 또한, 멤브레인이 구동부에 대하여 확고하게 부착되므로 구동 유체가 누설된 우려가 없다. 따라서, 제품의 신뢰성이 향상되는 장점도 얻을 수 있다.According to the present invention as described above, since the drive fluid chamber is formed on the substrate, the structure and manufacturing process of the fluid ejection apparatus is simplified, and the adhesion process of the membrane and the driving unit is omitted, thereby greatly improving productivity. In addition, since the membrane is firmly attached to the driving part, there is no fear of the driving fluid leaking out. Therefore, the advantage that the reliability of a product is improved can also be acquired.
이상에서는 본 발명의 특정의 바람직한 실시예에 대하여 도시하고 또한 설명하였다. 그러나, 본 발명은 상술한 실시예에 한정되지 아니하며, 특허청구의 범위에서 청구하는 본 발명의 요지를 벗어남이 없이 당해 발명이 속하는 분야에서 통상의 지식을 가진 자라면 누구든지 다양한 변형실시가 가능할 것이다.In the above, certain preferred embodiments of the present invention have been illustrated and described. However, the present invention is not limited to the above-described embodiments, and various modifications can be made by those skilled in the art without departing from the gist of the present invention as claimed in the claims. .
Claims (7)
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