KR100314714B1 - System of manufactured for ultra pure water - Google Patents

Abstract

The present invention relates to an ultrapure water production method for purifying raw water with ultrapure water of high purity, while tap water and groundwater are collected in an underground water storage tank (1) and passed through a pretreatment filtration device (2), while being treated with pretreatment, rivers, lakes, River water, such as dams and rivers, is collected in a stream collection tank (8), and is first purified by supernatant through a pressurized floatation tank (9) and a chemical treatment tank (10), and then pretreated as raw water of the groundwater storage tank (1). A pretreatment step of performing a second purification and pretreatment filtration while passing through the filtration device 2; The filtered water filtered through the pretreatment process is collected by the pretreatment collecting tank 12 and subjected to microfiltration through the microfilter 14 while temperature correction by the heat exchanger 13, followed by an ultraviolet sterilizer 15 to suppress the growth of microorganisms. A deionization process of removing foreign matters including positive and negative ions while passing through the deionization apparatus 32; The treated water that has undergone the deionization process is collected in a deionization tank 23 while temperature is corrected through the heat exchanger 22, and then purified by the heat exchanger 33 while being highly purified through the high purity treatment apparatus 24. The temperature correction is carried out to the ultrapure water collection tank (34), the ultra-pure treatment through ultrafiltration membrane separator (37) installed at the pipe end of the end point of use, while passing through the ultrafiltration membrane separator (35) or polishing reverse osmosis membrane separator (36). Process; In addition, it includes a re-recovery process that the concentrated water not passed through the treatment process and concentrated concentrated water is returned to the pretreatment process.

Description

Ultrapure water manufacturing method {System of manufactured for ultra pure water}

The present invention relates to an ultrapure water production method for separating and collecting river water, lakes, dams, and river water having relatively few suspended substances and relatively high amounts of suspended solids, and filtering them with ultrapure water, in particular, raw water separated and collected according to water quality concentration. After pre-treatment, deionization and high-purity treatment remove the foreign substances and harmful components in raw water without any doubt to purify them with high quality ultra pure water that can be used in pharmaceutical industry, semiconductor industry, and nuclear power plant. It relates to an ultrapure water production method.

The modern high technology industry is a pharmaceutical industry based on the semiconductor industry, the nuclear industry, and the biotechnology industry. The ultrapure water technology used in these industries is soluble silica, gas, and gun in water. The organic carbon compound (TOC) is managed at ppb (parts per billion) or less, and the ionic substance has a water temperature of 18,000,000 Ω-cm (18 MΩ-cm) or more at 25 ° C, and microorganisms are completely removed. In this state, the particle size of the suspended solids should be controlled to 0.01 μm or less.

In Korea, since the semiconductor industry entered the production system in the early 1980s, most manufacturing-related equipment and facilities were imported and installed in foreign countries. Ultrapure water manufacturing facilities have also been used by US water treatment companies since the 1980s. Since it has been monopolizing the domestic market, it has been the reality of ultra pure water technology so far to rely on foreign pure water manufacturing facilities while paying enormous technical fees.

In addition, as the 1990s, domestic water purifiers have developed and localized most of the technologies except for specific core technologies, but they have more than 80% of their own technology, but especially in the semiconductor industry, ultrapure water production due to high integration The level of technology is again widening with developed countries.

therefore. At present, the enormous foreign currency waste caused by the use of foreign ultrapure water technology is required to strengthen the international competitiveness of domestic ultrapure water users and to develop effective ultrapure water manufacturing facilities.

On the other hand, the technology development of ultrapure water was a treatment technology that passed through 0.2μm sized microfilter after pretreatment with activated carbon and ion exchange resin in 1965-1975, and reverse osmosis treatment which separated reverse osmosis membrane after pretreatment until 1980. The technology was introduced, while the ion-exchange resin technology was installed in a small volume, and additional UV sterilizers were used.

In addition, until 1990, various membrane separation technologies were developed, and ultrafiltration membranes were introduced in the final process to remove organic materials that could not be filtered by precision filtration membranes.In particular, from the mid 1990s, the integration scale of the semiconductor industry was increased. According to the trend, the need for high quality of ultrapure water is further demanded. Accordingly, development of ultrapure water manufacturing technology for removing specific resistance, microorganisms, fine particles, ionic substances such as sodium and chlorine ions and dissolved oxygen, etc. come.

Recently, in the semiconductor industry, which uses ultrapure water, if the management standards for pollutants are not strengthened every year, trade restrictions are followed. The use of chemicals such as hydrochloric acid and sodium hydroxide and the disposal of waste ion exchange resins have emerged as problems.

Therefore, the present invention was invented to solve various problems caused by the use of chemicals in the ultrapure water treatment process and the disposal of waste ion exchange resins, and the rivers with relatively low amounts of suspended solids and groundwater and suspended solids depending on the water quality. High quality ultra pure water that can be used for semiconductor industry that requires ultra-pure by reliably removing foreign substances and harmful components contained in raw water through deionization and high purity treatment after collecting and pretreating sewage, lake, dam and river water. It is an object of the present invention to provide an ultrapure water production method for the purification process.

Figure 1a and 1b is a process chart showing the treatment of the ultrapure water production method according to the present invention.

Explanation of symbols on the main parts of the drawings

1: Groundwater storage tank 2: Pretreatment filtration device

3: multilayer filter 4: activated carbon filter

5: cation exchange resin tower 6; Backwash Precision Filter

7: rotating or vibrating membrane separator 8: river collecting tank

9: pressurized flotation tank 10: chemical treatment tank

11: thickening tank 12: pretreatment collection tank

13,22,33: heat exchanger 14: micro filter

15,31: UV sterilizer 16: cation exchange resin tower

17,21,25,30,37: membrane contactor 18: anion exchange resin tower

19,20: 1st and 2nd reverse osmosis membrane separator 23: deion collection tank

24: high purity treatment apparatus 26; Electrical Deionization Membrane Separator

27,28: mixed bed ion exchange resin 29: pure water storage tank

34: ultrapure water collecting tank 35: ultrafiltration membrane separator

36: polishing reverse osmosis membrane separator 38: dehydrator

In order to achieve the above object, the present invention, while tap water and ground water is collected in the groundwater storage tank (1) and passed through the pretreatment filtration device (2), while the river water, such as rivers, lakes, dams, river water is a river collection tank Collected by (8) and first purified by supernatant through the pressurized flotation tank (9) and the chemical treatment tank (10), and then passed through the pretreatment filtration device (2) as raw water of the groundwater storage tank (1). A pretreatment step of purifying and preliminarily filtering the car; The filtered water filtered through the pretreatment process is collected by the pretreatment collecting tank 12 and subjected to microfiltration through the microfilter 14 while temperature correction by the heat exchanger 13, followed by an ultraviolet sterilizer 15 to suppress the growth of microorganisms. A deionization step of removing foreign substances including positive and negative ions while passing through the deionization unit 32 through; The treated water that has undergone the deionization process is collected in a deionization tank 23 while temperature is corrected through the heat exchanger 22, and then purified again through a high purity treatment device 24, and then returned to the heat exchanger 33. The temperature is corrected by the ultrapure water collection tank (34), the ultra-pure membrane through the membrane contactor (37) installed at the end of the end point of use, while passing through the ultrafiltration membrane separator (35) or polishing reverse osmosis membrane separator (36). Treatment process; In addition, it is possible to purify the raw water with ultrapure water, including a re-recovery process in which the concentrated water that has not been permeated through each treatment process and is returned to the pretreatment process.

The pretreatment filtration device (2) of the pretreatment process includes a pretreatment filtration method in which raw water passes through the multilayer filter (3), the activated carbon filter (4), and the cation exchange resin tower (5) sequentially, and a backwash fine filter (4) or reverse. The foreign matter including ionic substances of the raw water is removed while being selectively passed through any one of the pretreatment filtration method of passing through the Seyong ultrafiltration separator and the pretreatment filtration method passing through the rotary or vibrating membrane separator (7). It is characterized by.

The pressure flotation tank (9) and the chemical treatment tank (10) are characterized in that inorganic coagulants such as lactic acid alumina and polymer coagulants are used.

The cation exchange resin tower 5 of the pretreatment filtration device 2 is characterized in that sodium chloride is used as a regenerant.

The backwash precision filter 6 of the pretreatment filtration device 2 is a membrane material such as polysulfone, polypropylene, polyethylene, polyacrylonitrile and polyamide. While formed as a filtration membrane or an ultrafiltration membrane, each membrane is formed of a donut-shaped shape of 1-2 mm thickness or a maze of 1-40 μm formed on the front and back of a petal shape, and formed into a candle shape inserted into a rod. .

The deionization apparatus (2) of the deionization process includes a deionization treatment method in which treated water passes sequentially through a cation exchange resin tower (16), a membrane contactor (17), and an anion exchange resin tower (18); As the deionization treatment method passes through the secondary reverse osmosis membrane separator (19) (20) and the membrane contactor (21) sequentially, any foreign substances including positive and negative ions of the treated water are removed. It is characterized by.

The membrane contactors 17 and 21 of the deionization apparatus 2 are characterized in that the hollow gas polyethylene or teflon material is configured to remove dissolved gas through a membrane having a pore size of 0,01 μm.

The first and second reverse osmosis membrane separators 19 and 20 of the deionization apparatus 2 adjust the waste concentration (pH) of the treated water passed to 7 or more to suppress the generation of dissolved CO ₂ gas. It is characterized by being installed in two stages in series.

The high purity treatment apparatus 24 of the high purity treatment process includes a high purity treatment method in which treated water sequentially passes through the membrane contactor 25, the electrical deionization membrane separator 26, and the mixed-phase ion resin 27. It is finally passed through the deionization treatment method of any one of the high purity treatment methods of sequentially passing the common ion exchange resin 28, the pure water storage tank 29, the membrane contactor 30, and the ultraviolet sterilizer 31. Characterized in that it is purified to ultra pure water.

The mixed phase ion exchange resins 27 and 28 of the high purity treatment apparatus 24 have a cation resin and an anion resin of 1: 2.25 or 1: 1.5 so that foreign substances including ionic silica and bicarbonate ions can be removed. It is characterized in that the mixture at the filling ratio.

The ultrapure water collection tank 34 of the high purity treatment process is configured to be removed by a filter having pores of 0.01 μm or less so that it can be removed when N _{2 is} supplied from the outside, and the ultrapure water is sealed with nitrogen gas so that ultrapure water does not come into contact with the atmosphere. It is characterized by.

Ultrafiltration membrane separator 35 of the high purity treatment process is characterized in that it is formed of Teflon or polynitroacryl material to withstand hot water of 60 ℃ or more.

Hereinafter, a preferred embodiment of collecting tap water and ground water, rivers, lakes, dams and river water according to the ultrapure water production method of the present invention and filtering the ultrapure water will be described in detail.

1A and 1B illustrate pre-treatment and de-ionization of river water such as rivers, lakes, dams, rivers, etc., in which rivers, lakes, dams, and rivers are relatively rich, in addition to tap water and groundwater, which are relatively less suspended. The ultrapure water production process of the present invention is shown by filtering the ultra-pure water through a high purity treatment process and retreating the filtered water through the reclamation process.

As shown in the figure, tap water and groundwater with relatively low suspended solids are collected in the groundwater storage tank (1), while river water such as rivers, lakes, dams, and rivers having relatively large amounts of suspended solids are collected in the river collection tank (8). Separated from the raw water of the groundwater storage tank (1) and sent to the pressurized flotation tank (9) to stay for a certain time, the contaminants, including the contaminant suspended solids floating on the surface layer is separated and removed, and neutralized through the chemical treatment tank (10) While agglomerated or precipitated, it is first purified by supernatant and sent to a pretreatment filtration device 2 such as groundwater collected in the underground storage tank 1 to be pretreated and filtered.

In addition, the sediment which is not separated from the flotation through the pressure flotation tank (9) and the chemical treatment tank (10) is precipitated is transferred to the concentration tank (11), and then the solids are dehydrated through the dehydrator (38), Pressurized flotation tanks (9) and chemical treatment tanks (10) and inorganic coagulants such as aluminum sulfate {Al ₂ (SO ₄ ) ₃ } to accelerate the flocculation reaction with the raw water to sedimentation sediment while floating and separating the foreign matter; Polymeric coagulants are mainly used.

Therefore, the groundwater from the underground storage tank (1) is first filtered directly through the pretreatment filtration device (2), while the river water from the river collection tank (8) is primarily a pressurized floatation tank (9) and The pretreatment filtration device (2) is sent through the chemical treatment tank (10) to be subjected to secondary filtration. In some cases, the stream water is directly filtered to the pretreatment filtration device (2), which is a pretreatment process, such as groundwater. It may be.

In addition, the raw water, which is a river water together with the groundwater transferred to the pretreatment filtration device 2, is first pretreated while sequentially passing through the multilayer filter 3, the activated carbon filter 4, and the cation exchange resin tower 5, or backwash precision. In addition to the pretreatment filtration through the filter (6) or backwash ultrafiltration separator, three pretreatment filtration methods, such as the pretreatment through the rotary or vibrating membrane separator (7), are selectively used to provide overall foreign substances, including ionic substances from raw water. Can be removed.

That is, the first filtration structure of the pretreatment filtration device (2) is a multi-layer filter (3), which is a primary filter in which sand, anthracite and gravel are mixed as a filter material, and a secondary filter using a mixture of sand, anthracite and activated carbon alone or in combination. After the raw water passes through the activated carbon filter 4, the raw water is passed through a cation exchange resin tower 3 using sodium chloride (NaCl) as a regenerant when the hardness component of the raw water is 50 ppm or more.

In addition, the backwash precision filter 6 or the backwash ultrafiltration separator used as the second filtration structure of the pretreatment filtration device 2 can remove foreign matters of about 0.01-1 μm of organic matter contained in raw water. Membranes such as polysulfone, polypropylene, polyethylene, polyacrylonitrile and polyamide, which are hollow fiber, tubular or plate and frame, and raw water passes through or inside the membrane. The foreign matter can be removed by the microfiltration membrane of these 1-5㎛ pores or the ultrafiltration membrane of 0.01-0.1㎛ pores, and the permeated permeate is sent to the pretreatment collection tank 12, and the foreign matter that adheres to the membrane surface is supplied. It can be used semi-permanently by back flushing with water and compressed air in the opposite direction.

In addition, the backwash precision filter (6) is a donut-like shape of 1-2 mm thick, such as polypropylene or polyethylene, or a maze of 1-40㎛ size formed on the front and back of the petal-shaped candle sandwiched in the rod In this case, by dissolving the diatomaceous earth, which is a porous filter medium, in a candle-like surface in water and using a coating treatment, the treatment efficiency may be increased to obtain a cleaner and higher quality water.

And, the raw water can be directly filtered through the rotary or vibrating membrane separator 7 used as the third filtration structure of the pretreatment filtration device 2, wherein the rotary or vibrating membrane separator 7 is As the disc type, microorganisms, microparticles, organic materials, ionic materials, and turbidity components can be removed according to the removal range of the membrane used. That is, when a microfiltration membrane is used as a vibrating membrane, Although microorganisms can be removed, organic membranes can be removed when using ultrafiltration membranes, and in addition, when using reverse osmosis membranes, overall foreign substances including ionic substances can be removed, but the vibrating membrane separator of the pretreatment filtration process of the present invention ( 7) it is preferable to use a microfiltration membrane or an ultrafiltration membrane.

In addition, the river water collected in the river collection tank (8) is subjected to the primary filtration treatment with the supernatant water through the pressurized flotation tank (9) or chemical treatment tank (10) because the constricted material fluctuates depending on the season, and then What is necessary is just to select suitably from 3 filtration treatment structures of the pretreatment filtration apparatus 2, and to carry out a secondary filtration process.

And, the raw water passed through the pretreatment filtration device 2 of the pretreatment process is collected in the pretreatment collection tank 12 and maintained at a temperature correction of 20-25 ° C. by the heat exchanger 13, and more precisely through the microfilter 14. Is filtered.

Then, the raw water passing through the micro filter 14 is passed through a 254 nm ultraviolet sterilizer 15 so that contamination by microbial propagation, and then deionized to remove foreign substances including heavy metals while passing through the deionization unit 38. An ion treatment process takes place.

The deionization apparatus 32 is the first deionized to sequentially pass through the membrane contactor 17 and the anion exchange resin tower 18 through the cation exchange resin tower 16 according to the specific resistance and capacity of the treated water. As a second deionization treatment method which passes through the membrane contactor 21 through the first and second reverse osmosis separators 19 and 20 according to the treatment method and the water purity of the treated water and the ion exchange resin regeneration. Can be.

That is, when the specific resistance value of the treated water passed through the ultraviolet sterilizer 15 is 15,000,000 kPa-cm, when applied in a large capacity, the treated water first passed through the cation exchange exchange resin tower 16 is a hollow fiber-type polyethylene material, which is a hydrophobic film. Only the gas flow is passed through the membrane contactor 17 by diffusion, and deionized while passing through the anion exchange resin tower 18. Then, the temperature is lowered to 10-15 ° C. through the heat exchanger 22. Temperature control so that the propagation of the microorganisms can be suppressed and maintained in the deionization tank 23 or may not be transferred to the heat exchanger 22 and may be directly used as a general washing water such as a boiler or a plating industry.

In addition, when the treated water passing through the ultraviolet sterilizer 15 is applied for the prevention of wastewater generation due to high purity water quality requirements and ion exchange resin regeneration, the treated water passed through the cation exchange exchange resin tower 16 has a plurality of reverse osmosis membranes. Gas generation of dissolved CO ₂ is suppressed through the two-stage serially arranged first and second reverse osmosis membrane separators (19, 20) and is transferred to the heat exchanger (22) through the membrane contactor (21), which is a dissolved gas removal membrane separator. .

In addition, the membrane contactors 17 and 21 are formed of polyethylene or Teflon (PVDF) of hollow fiber type so that only gas flows through the 0.01 μm pore membrane by the diffusion principle to remove dissolved gases. However, the reverse osmosis membrane separators 19 and 20 installed in series may adjust the pH to 7-8 or more in the secondary reverse osmosis membrane separator 20 to prevent contamination of the membrane or gas generation of bicarbonate ions and dissolved CO ₂ contained in raw water. The non-permeable concentrated water is returned to the groundwater storage tank (1), which is a raw water storage tank, to be reused.

Then, the permeated water that has passed through the deionization apparatus 32 of the deionization process described above is temperature-corrected through the heat exchanger 22 and collected in the deionization tank 23, and then the corresponding high purity treatment of the high purity treatment process. Transferred to device 24.

The high purity treatment device (24) is the first to pass the deionized treated water sequentially through the electrical deionization membrane separator (26) and the non-regeneration hybrid phase ion exchange resin (27) through the membrane contactor (21). Ultraviolet sterilizer (31) for removal of membrane contactor (30) and total organic carbon compound (TOC) after being gathered into pure water storage tank (29) through non-regeneration type mixed phase ion exchange resin (28) with high purity treatment structure Through the second high purity treatment structure which passes through sequentially, a high purity treatment process capable of high quality ultrapure is achieved.

That is, in the first high-purification process, dissolved oxygen (DO) and carbon dioxide (CO ₂ ), etc. are removed by the membrane contactor 21, and a cation exchange membrane and an anion exchange membrane are used as an electrical deionization apparatus without using a chemical. After passing through a direct current between the electrical deionization membrane separator (26) to remove the positive and negative ions contained in the water, and then a non-regenerated hybrid type mixture of cation resin and anion exchange resin at a filling ratio of about 1: 2.25 The ion exchange resin 27 removes the ionic silica and the like and finally becomes high purity.

In addition, in the case of the second high-purification process, ionic silica and bicarbonate ion, etc., are introduced through the non-regeneration type interphase ion exchange resin 28 in which the cation resin and the anion resin are mixed at a packing ratio of 1:15. This is removed, and dissolved gas of the treated water generated during pump operation while passing through the membrane contactor 30 after flowing into the pure water storage tank 29 sealed with nitrogen gas in order to prevent inflow of pollutants such as external carbon dioxide into nitrogen gas. When the microorganisms in the water are irradiated, 185 nm of total organic carbon compounds are removed through the ultraviolet sterilizer 31 for removing carbon compounds in which CO ₂ is changed to HCO ₃ ^- and the like.

Then, the treated water passed through the high purity treatment apparatus 24 of the high purity treatment process described above is sealed with nitrogen gas to prevent contact with the atmosphere while maintaining a constant water temperature. Ultra-pure water is collected in the ultra-pure water collection tank 34 by passing through a filter composed of pores of 0.01 μm or less when injected into the ultra-pure water collection tank 34, thereby managing the best water quality.

In addition, the ultrapure water filtered through the ultrapure water collection tank 34 is selectively passed through the ultrafiltration membrane separator 35 or the polishing reverse osmosis membrane separator 36 according to the importance of water quality, wherein the ultrafiltration membrane separator 35 used is It is formed of a material such as Teflon (PVDF) or polynitroacrylic acid (PAN) to withstand hot water of 60 ° C. or higher. In addition, the polishing reverse osmosis membrane separator 36 is a total organic carbon compound (TOC) and an ionic material as well as fine particles and microorganisms. Finally complete processing.

The ultrapure water, which has passed through the ultrafiltration membrane separator 35 or the polishing reverse osmosis membrane separator 36, is supplied through a membrane contactor 37 connected to the pipe end at the end point of use, so that foreign substances and harmful components contained in the original raw water are supplied. It can be reliably removed and finally purified with high quality ultrapure water that can be used in the semiconductor industry where ultrapure is required. In particular, the membrane contactor 37 has a long pipe length through which ultrapure water is supplied. Prevent your back from growing.

According to the ultrapure water production method of the present invention as described above, according to the water quality concentration, deionization and treatment after tapping and pretreatment by separately collecting streams, lakes, dams and rivers with a relatively large amount of tap water and groundwater and floating materials Through the high purity treatment, the foreign substances and harmful components contained in raw water are reliably removed so that they can be purified with high quality ultra pure water which can be used for the semiconductor industry which requires ultra high purity. Of various wastes and waste-ion exchange resins resulting from the use of chemicals such as hydrochloric acid and sodium hydroxide in the regeneration of ion exchange resins generated during the ultrapure water manufacturing process. Provides the effect of eliminating structural problems such as disposal It is expected.

Claims (12)

Tap water and ground water are collected by the groundwater storage tank (1) and passed through the pretreatment filtration system (2), and the pretreatment is filtered while river water, such as rivers, lakes, dams, and river water, is collected by the river water collection tank (8) and pressurized flotation (9). And a pretreatment step of preliminary filtration through the pretreatment filtration device (2) as the raw water of the groundwater storage tank (1) after the primary purification treatment with supernatant water through the chemical treatment tank (10); The filtered water filtered through the pretreatment process is collected by the pretreatment collecting tank 12 and subjected to microfiltration through the microfilter 14 while temperature correction by the heat exchanger 13, followed by an ultraviolet sterilizer 15 to suppress the growth of microorganisms. A deionization step of removing foreign substances including positive and negative ions while passing through the deionization unit 32 through; The treated water that has undergone the deionization process is collected in the deionization tank 23 while temperature is corrected through the heat exchanger 22, and then is purified again through the high purity treatment device 24, and then returned to the heat exchanger 33. The temperature is corrected by the ultrapure water collection tank (34), the ultra-pure membrane through the membrane contactor (37) installed at the end of the end point of use, while passing through the ultrafiltration membrane separator (35) or polishing reverse osmosis membrane separator (36). Treatment process; In addition, the ultra-pure water production method characterized in that the raw water can be purified by ultrapure water, including a re-recovery process in which the concentrated water that has not been permeated through each treatment step is returned to the pretreatment step. The pretreatment filtration device (2) according to claim 1, wherein the pretreatment filtration device (2) of the pretreatment step includes a pretreatment filtration method in which raw water passes sequentially through a multilayer filter (3), an activated carbon filter (4), and a cation exchange resin tower (5). The pretreatment filtration method which passes through the filter (4) or the backwash ultrafiltration separator sequentially, and the pretreatment filtration method which passes through the rotary or diaphragm separator (7), passes through the pretreatment filtration method, and contains ionic substance of raw water. Ultra-pure water production method characterized in that the foreign matter is removed by. The ultrapure water production method according to claim 1, wherein the pressure flotation tank (9) and the chemical treatment tank (10) use inorganic coagulants such as lactic acid alumina and polymer coagulants. The ultrapure water production method according to claim 1 or 2, wherein the cation exchange resin tower (5) of the pretreatment filtration device (2) uses sodium chloride as a regenerant. 3. The backwash fine filter (6) of the pretreatment filtration device (2) according to claim 1 or 2 is a hollow fiber, tubular or flat plate made of polysulfone, polypropylene, polyethylene, polyacrylonitrile and polyamide. Shaped as 0.01-1㎛ pores of precision filtration membrane or ultrafiltration membrane, each of which has a donut-shaped shape of 1-2 mm or a maze of 1-40㎛ size is formed on the front and back of petal shape, respectively Ultra-pure water production method characterized in the form of a candle. The deionization apparatus (2) of the deionization process according to claim 1, wherein the deionization apparatus (2) of the deionization process passes through the cation exchange resin tower (16), the membrane contactor (17), and the anion exchange resin tower (18). The positive and negative ions of the treated water are selectively passed through the deionization treatment method of any one of the treatment method and the deionization treatment method of sequentially passing the first and second reverse osmosis membrane separators 19, 20 and the membrane contactor 21. Ultrapure water production method, characterized in that the foreign matter including. The membrane contactor (17) (21) of the deionization apparatus (2) is a hollow fiber polyethylene or teflon material, and dissolved gas is removed through a membrane having a pore size of 0,01 mu m. Ultrapure water treatment method characterized in that configured to be. The first and second reverse osmosis membrane separators (19, 20) of the deionization apparatus (2) are dissolved by adjusting the waste concentration (pH) of the treated water to be 7 or more. Ultrapure water treatment method characterized in that the two-stage installation in order to suppress the generation of CO ₂ gas. The high purity treatment device (24) of the high purity treatment process has a high purity in which the treated water passes through the membrane contactor (25), the electrical deionization membrane separator (26), and the mixed-phase ionizer (27). Selected as either deionization method or high purity treatment method of sequentially passing mixed phase ion exchange resin (28), pure water storage tank (29), membrane contactor (30) and ultraviolet sterilizer (31). Ultra-pure water production method characterized in that it is finally purified to be purified with high purity ultra pure water. 10. The mixed phase ion exchange resins 27 and 28 of the high purity treatment apparatus 24 are cationic resins and anions to remove foreign substances including ionic silica and bicarbonate ions. Ultra-pure water production method characterized in that the resin is mixed at a filling ratio of 1: 2.25 or 1: 1.5. The ultrapure water collection tank 34 of the high purity treatment process is configured to be removed by a filter having a pore size of 0.01 μm or less so that the ultrapure water collection tank 34 can be removed when N _{2 is} supplied from the outside, and the ultrapure water does not come into contact with the atmosphere. Ultrapure water production method characterized in that the sealing treatment with nitrogen gas. The ultrapure membrane production method according to claim 1, wherein the ultrafiltration membrane separator (35) of the high purity treatment step is formed of Teflon or polynitroacryl material to withstand hot water of 60 ° C or higher.