KR100310035B1 - Microwave dielectric ceramic composition for low temperature firing - Google Patents
Microwave dielectric ceramic composition for low temperature firing Download PDFInfo
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- KR100310035B1 KR100310035B1 KR1019990001054A KR19990001054A KR100310035B1 KR 100310035 B1 KR100310035 B1 KR 100310035B1 KR 1019990001054 A KR1019990001054 A KR 1019990001054A KR 19990001054 A KR19990001054 A KR 19990001054A KR 100310035 B1 KR100310035 B1 KR 100310035B1
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- 239000000919 ceramic Substances 0.000 title claims abstract description 16
- 239000000203 mixture Substances 0.000 title claims abstract description 16
- 238000010304 firing Methods 0.000 title abstract description 11
- 239000000654 additive Substances 0.000 claims abstract description 7
- 238000005245 sintering Methods 0.000 claims description 12
- 230000000996 additive effect Effects 0.000 claims description 3
- 238000009766 low-temperature sintering Methods 0.000 abstract description 2
- 238000004519 manufacturing process Methods 0.000 description 4
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000004597 plastic additive Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B3/00—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties
- H01B3/02—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of inorganic substances
- H01B3/12—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of inorganic substances ceramics
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/46—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates
- C04B35/462—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates
- C04B35/465—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates based on titanates based on alkaline earth metal titanates
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- C—CHEMISTRY; METALLURGY
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3262—Manganese oxides, manganates, rhenium oxides or oxide-forming salts thereof, e.g. MnO
- C04B2235/3267—MnO2
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- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/34—Non-metal oxides, non-metal mixed oxides, or salts thereof that form the non-metal oxides upon heating, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3409—Boron oxide, borates, boric acids, or oxide forming salts thereof, e.g. borax
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Abstract
저온소성이 가능하면서도 우수한 마이크로파 특성을 갖는 유전체 세라믹 조성물이 제공된다. 본 발명의 조성물은 (Mg0.93Ca0.07)TiO3에 B2O3및 MnO2를 첨가제로 사용함으로써 저온 소결이 가능한 한편, 양호한 마이크로파 특성을 갖는다. 1200℃에서 적정량의 B2O3를 첨가한 영역에서는 1350℃에서 소결한 순수한 (Mg0.93Ca0.07)TiO3보다 높은 품질계수 값을 나타내었다.A dielectric ceramic composition is provided that is capable of low temperature firing and has excellent microwave properties. The composition of the present invention is capable of low temperature sintering by using B 2 O 3 and MnO 2 as additives in (Mg 0.93 Ca 0.07 ) TiO 3 , while having good microwave characteristics. In the region in which the appropriate amount of B 2 O 3 was added at 1200 ° C., the quality coefficient value was higher than that of pure (Mg 0.93 Ca 0.07 ) TiO 3 sintered at 1350 ° C.
Description
본 발명은 민생용 및 산업용 전자기기에 사용되는 마이크로파 유전체 세라믹 조성물에 관한 것으로서 특히 저온소성이 가능하면서도 우수한 마이크로파 특성을 갖는 유전체 세라믹 조성물에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to microwave dielectric ceramic compositions for use in consumer and industrial electronic devices, and more particularly to dielectric ceramic compositions having excellent microwave properties while being capable of low temperature firing.
마이크로파 유전체 세라믹 조성물에는 여러 가지가 있으나 (Ma,Ca)TiO3(이하 MCT) 마이크로웨이브 세라믹스는 Ba이나 Pb 계열의 마이크로파 유전체에 비하여 원료의 가격이 저렴하고 소결이 비교적 용이하며 재현성 있는 마이크로파 유전특성을 얻을 수 있다는 장점이 있어서 실제 마이크로파용 디바이스 제조에 널리 사용되고 있다.There are many kinds of microwave dielectric ceramic compositions, but (Ma, Ca) TiO 3 (hereinafter MCT) microwave ceramics have lower cost, easier sintering and reproducible microwave dielectric properties than Ba or Pb series microwave dielectrics. Because of the advantage that can be obtained, it is widely used in the manufacture of actual microwave devices.
통상 MCT계의 마이크로파 세라믹스는 1350℃의 높은 온도에서 소성이 이루어지고 있는데 높은 소성온도로 인해 양산과정에서 소성열처리를 위해 많은 에너지 소모가 있게 된다. 또한 이러한 높은 소성온도로 인해서 향후 전극과 동시소성이 요구되어지는 적층형 마이크로파 세라믹스 디바이스에는 적용이 어렵게 되는 문제가 있다.In general, MCT-based microwave ceramics are fired at a high temperature of 1350 ° C. Due to the high firing temperature, a large amount of energy is consumed for the heat treatment of the firing in mass production. In addition, due to such a high firing temperature, there is a problem in that it is difficult to apply to a multilayer microwave ceramic device that requires simultaneous firing with electrodes.
따라서 본 발명의 목적은 MCT계 마이크로파 유전체 세라믹스의 제조시 적절한 소성첨가제를 첨가함으로써 1200℃ 정도의 저온에서도 소성이 잘 이루어지고 마이크로파 특성도 우수한 저온소결용 마이크로파 세라믹스 조성물을 제공하는 데 있다.Accordingly, an object of the present invention is to provide a microwave ceramic composition for low temperature sintering that is well baked at a low temperature of about 1200 ° C. and has excellent microwave characteristics by adding an appropriate plastic additive in the manufacture of MCT-based microwave dielectric ceramics.
본 발명자들은 상기한 종래기술의 문제를 해결하고자 집중적으로 연구한 결과 MCT계에 B2O3와 MnO2를 첨가하면 소결온도를 낮추면서 동시에 양호한 마이크로파 특성이 얻어지는 조성물을 얻을 수 있음을 발견하여 본 발명을 완성하기에 이르렀다. 이하, 본 발명을 다음에 실시예를 들어 구체적으로 설명한다.The present inventors have intensively studied to solve the above-mentioned problems of the prior art and found that when B 2 O 3 and MnO 2 are added to the MCT system, the composition can be obtained while lowering the sintering temperature and at the same time obtaining good microwave characteristics. The invention has been completed. Hereinafter, the present invention will be described in detail with reference to the following Examples.
실시예Example
MCT의 제조를 위한 출발원료로는 MgO, CaCO3, TiO2를 사용하였다. 예비 실험을 통해 CaTiO3가 7몰% 첨가되었을 때 공진주파수의 온도계수가 0에 가까운 값을 가지는 것을 확인하였으므로 최종적인 조성이 (Mg0.93Ca0.07)TiO3가 되도록 원료를 칭량하였다. 이를 탈이온수와 지르코니아 볼을 이용하여 24시간 혼합하였으며, 이를 건조한 뒤 5℃/min의 승온속도로 1200℃에서 2시간 동안 공기중에서 하소하였다. 그 후 하소한 분말에 소결 첨가제로 택한 B2O3및 MnO2를 0∼2.0 wt% 범위로 첨가하여 다시 볼밀을 이용하여 24시간 동안 혼합, 분쇄하였다. 분쇄한 후 1000 Kg/cm2의 압력으로 직경 10 mm의 몰두에 일축가압성형하여 유전특성 측정을 위한 시편을 만들었으며 이 시편은 5℃/min의 승온속도로 1100∼1350℃의 온도에서 2시간 동안 소결한 후로냉하였다. 소결체의 마이크로파 유전특성을 측정하기 위해서 Hakki-Coleman 방법을 측정치구와 금속 공진기를 사용하여 회로망분석기로 품질계수 (Qxf, Q: 무부하 품질계수, f: 측정주파수), 공진주파수의 온도계수를 측정하였다.MgO, CaCO 3 and TiO 2 were used as starting materials for the preparation of MCT. When preliminary experiments confirmed that 7 mol% of CaTiO 3 was added, the temperature coefficient of the resonant frequency had a value close to zero. Thus, the raw material was weighed to have a final composition of (Mg 0.93 Ca 0.07 ) TiO 3 . The mixture was mixed with deionized water and zirconia balls for 24 hours, and dried and calcined in air at 1200 ° C. for 2 hours at a temperature rising rate of 5 ° C./min. Thereafter, B 2 O 3 and MnO 2 selected as sintering additives were added to the calcined powder in the range of 0 to 2.0 wt%, and then mixed and ground for 24 hours using a ball mill. After crushing, uniaxial pressure molding was performed on a 10 mm diameter immersion at a pressure of 1000 Kg / cm 2 to make a specimen for measuring dielectric properties. This specimen was heated for 2 hours at a temperature of 1100 to 1350 ℃ at a heating rate of 5 ℃ / min. After sintering and then cooled. In order to measure the microwave dielectric properties of the sintered body, the quality factor (Qxf, Q: no load quality factor, f: measurement frequency) and the temperature coefficient of the resonance frequency were measured by a network analyzer using a measuring tool and a metal resonator.
이상의 방법으로 제조된 세라믹 시편의 물리적 특성 및 마이크로파 특성의 결과를 다음 표 1 및 표 2에 나타내었다.The physical and microwave properties of the ceramic specimens prepared by the above method are shown in Tables 1 and 2 below.
표 1로부터 알 수 있는 바와 같이 소결온도 1200℃에서의 수축율에 있어서 B2O3의 첨가량이 0.2 wt% 이상인 경우에는 거의 15%에 가까운 수축율을 나타내었다. B2O3첨가량의 변화에 따른 품질계수의 변화를 보면 1350℃에서 소결한 겨우 소결첨가제의 양이 증가함에 따라 품질계수가 조금씩 감소함을 볼 수 있으며 소결온도가 1200℃인 경우는 소결첨가제의 양이 적정범위에 이를때까지는 품질계수가 급격히 증가하다가 0.3 wt% 이상으로 과잉첨가되면 품질계수값이 하강하였다. 1200℃에서 적정량의 B2O3를 첨가한 영역에서는 1350℃에서 소결한 순수한 (Mg0.93Ca0.07)TiO3보다 높은 품질계수 값을 나타내었다.As can be seen from Table 1, when the amount of B 2 O 3 added was 0.2 wt% or more, the shrinkage at the sintering temperature of 1200 ° C. was nearly 15%. The change in the quality coefficient according to the amount of B 2 O 3 addition shows that the quality coefficient gradually decreases as the amount of sintering additives sintered at 1350 ° C increases and the sintering temperature is 1200 ° C. The quality factor rapidly increased until the quantity reached the appropriate range, and the value of the quality factor decreased when it was over-added to more than 0.3 wt%. In the region in which the appropriate amount of B 2 O 3 was added at 1200 ° C., the quality coefficient value was higher than that of pure (Mg 0.93 Ca 0.07 ) TiO 3 sintered at 1350 ° C.
1200℃와 1350℃의 소결온도에서 모두 0ppm/℃에 가까운 값을 보이며 1200℃에서는 미량의 소결첨가제를 첨가하여도 안정된 온도계수를 나타내었다. 즉 (Mg0.93Ca0.07)TiO3에 첨가된 B2O3는 마이크로파 특성에 품질계수는 향상시키며 공진주파수의 온도계수와 유전율에는 영향을 주지않는 소결첨가제임을 알 수 있었다.Both the sintering temperature of 1200 ℃ and 1350 ℃ showed a value close to 0ppm / ℃, and at 1200 ℃ showed a stable temperature coefficient even if a small amount of sintering additive is added. In other words, B 2 O 3 added to (Mg 0.93 Ca 0.07 ) TiO 3 was found to be a sintering additive that did not affect the temperature coefficient and dielectric constant of the resonant frequency.
이와 같은 결과로부터 B2O3의 첨가량의 최적량은 0.2∼0.4임을 알 수 있었다. 따라서 B2O3의 첨가량을 0.3 wt%로 고정하고 MnO2를 추가로 첨가하여 1200℃에서 소성시험하고 그 결과를 다음 표 3에 나타내었다.From these results, it was found that the optimum amount of the amount of B 2 O 3 added was 0.2 to 0.4. Therefore, the addition amount of B 2 O 3 is fixed to 0.3 wt% and MnO 2 is further added to the plastic test at 1200 ℃ and the results are shown in Table 3 below.
상기 표 3으로부터 B2O3의 첨가량을 0.3 wt%로 고정하였을 때, MnO2의 첨가량이 0.4∼1.2 wt%인 경우 품질계수가 증가함을 알 수 있다.From Table 3, when the amount of B 2 O 3 is fixed to 0.3 wt%, it can be seen that the quality factor increases when the amount of MnO 2 is 0.4 to 1.2 wt%.
(Mg0.93Ca0.07)TiO3계 마이크로파 유전체 세라믹스 조성물에 있어서 소결첨가제로서 B2O3와 MnO2를 사용함으로써 1200℃의 비교적 저온에서 소성하는 것이 가능할 뿐 아니라 마이크로파 유전 특성 역시 우수하게 유지할 수 있다.By using B 2 O 3 and MnO 2 as sintering additives in the (Mg 0.93 Ca 0.07 ) TiO 3 -based microwave dielectric ceramic composition, not only the baking at a relatively low temperature of 1200 ° C. can be maintained but also the microwave dielectric properties are excellent.
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