KR100306495B1 - Exposure device and method of color crt using electron beam - Google Patents

Abstract

PURPOSE: An exposure device and a method of a color CRT using an electron beam are provided to accurately and easily perform a B, M exposure process and an R, G, B exposure process using a deflected electron beam. CONSTITUTION: A panel(6) coated with a fluorescent layer(22) and having a shadow mask(14) mounted is coupled to an exposure device consisting of an electron gun(18), a deflecting yoke(74), a vacuum chamber(4), a vacuum unit, a controller(22), a deflecting circuit and a high voltage circuit. At this state, vacuum degree of 1/1000-1/100000 torr is maintained to form same environment and vacuum degree as those for a finished color CRT. Then, an deflected electron beam is irradiated to the fluorescent layer and shadow mask of the panel to perform a B, M exposure process and a G, B, R exposure process.

Description

Exposing method of color cathod-ray tube and it's device.

The present invention relates to a method and apparatus for exposing a fluorescent surface of a color cathode ray tube, and more particularly, to a method for accurately and simply performing BM exposure and RGB exposure using a deflection scanning beam (electron beam). And to provide the device.

In general, the exposure of the color cathode ray tube is largely composed of an application process and an exposure cleaning, and the exposure consists of four processes, B.M, G, B, and R. B.M is a black matrix process that electrically connects the parts where G, B, and R phosphors are not deposited and eliminates optical spreads.

In other words, B.M plays a role of making holes for G, B, and R phosphors as well as a part that allows electrical connection without light even when an electron beam is received. Therefore, simultaneous exposure to three locations is required.

In the exposure process, the fluorescent liquid is injected into the color cathode ray tube panel glass and rotated to uniformly coat the fluorescent film, and after drying, the panel is dried and exposed to ultraviolet mercury lamp. When the ultraviolet energy reaches the fluorescent film, it is exposed to light, and the part not exposed to the ultraviolet rays is separated during the next cleaning, leaving only the exposed part on the panel.

On the other hand, the fluorescent surface of the color cathode ray tube is formed by forming a fine stripe, slot, or dot between the G, B, R phosphors between the black matrix as shown in FIG. An optical photolithographic method is used to form a fluorescent film having such a fine structure.

This is done by applying photoresist and graphite suspension or phosphor slurry on the inner surface of the panel and exposing and developing the shadow mask as a disc to sequentially form the necessary stripes.

The black matrix (BM) and G, B, and R stripes of the fluorescent surface are coated with graphite and respective phosphors in the form of slurry on the inner surface of the panel, dried by heating and hot air, and then a shadow mask of the color cathode ray tube. ) As an exposure mask, and the fluorescent surface is sequentially formed, and the inner surface of the panel is washed several times with pure water in the middle of forming the fluorescent surface.

Meanwhile, the conventional exposure apparatus includes a light blocking plate 136, a correction lens 138, and a correction filter that restrict an exposure area of the panel under the fixing member 132 where the panel 130 is placed, as shown in FIG. 1. 140, the shutter 142, the wedge lens 144, the ultraviolet mercury lamp 146, and the reflector 148 are sequentially arranged.

When the fluorescent material is coated on the inner surface of the panel 130, the shadow mask 134 is combined and placed on the fixing member 132, and then the ultraviolet mercury lamp 146 is operated to irradiate from the mercury lamp 146. Ultraviolet light passes through the wedge lens 144 and the shutter 142 and is refracted by the correction filter 140 and the correction lens 138, so that the illuminance ratio of the central and peripheral portions of the panel 130 is uniformly adjusted, and then the shadow mask. Through 134, the fluorescent material on the inner surface of the panel 130 is exposed to a predetermined shape.

The difficult technique at this time is to adapt the diffraction of the light corresponding to the circuit for the deflection yoke coil of the electron beam actually scanned as an optical lens.

That is, the diffraction angle of the beam and the electron beam should be the same at the center portion and the corner portion of the panel 130, but the color, brightness, and focus of the center portion and the corner portion of the cathode ray tube may be the same. The brightness of the center and corners should be uniform, but the optical exposure method will inevitably increase the illuminance of the center of the panel, so that the correction filter 140, the correction lens 138, the wedge lens 144, etc. The light intensity is made uniform.

For this reason, even when several exposure lenses are used, there is a problem that it is difficult to achieve uniform exposure. In addition, the cost of parts including lenses is expensive and the properties of light and electron beam used at the time of exposure are very different. There is a problem that the exposure cannot be accurately formed.

In addition, in the case of the BM exposure machine, since the light source 146 is moved by a transmission device and a mechanical mechanism to deflect the ultraviolet beam, there is a problem that the precision is inferior, which results in mis-landing of the electron beam in the completed color cathode ray tube. It causes (mislanding), which is a problem that greatly degrades the quality (quality degradation) of the color cathode ray tube such as poor image quality.

Accordingly, an object of the present invention is to provide an exposure method capable of accurately and simply performing B.M exposure and R.G.B exposure using a deflected scanning electron beam.

In addition, a panel coated with a fluorescent surface and a shadow mask is coupled to an exposure apparatus including an electron gun, a deflection yoke coil, a vacuum chamber, a vacuum unit, a control unit, a deflection circuit, and a high pressure generation circuit.^-3To 10^-5An exposure apparatus that maintains the vacuum to torr and creates an environment and vacuum degree like a finished color cathode ray tube, and then deflects the electron beam with the fluorescent film and shadow mask of the panel to perform the BM exposure process and the G, B, R exposure process. The purpose is to provide.

In order to achieve the above object, a support plate having an opening is formed on an upper part of a vacuum chamber having a vacuum device so that a color cathode ray tube panel to be exposed can be placed on it, and an electron gun and a deflection yoke coil are installed inside the vacuum chamber. In addition, by installing a vacuum device, an electron gun, a deflection circuit, a control circuit for controlling the cathode, and a high voltage circuit for applying high pressure to the panel anode, the electron scanning beam is deflected by the shadow mask and the fluorescent film of the panel. The BM exposure and G, B, R exposure are performed accurately in the same or similar environment as the color cathode ray tube installed in the monitor, thereby significantly reducing the exposure failure rate of the color cathode ray tube and the cost according to the exposure.

In addition, the anode of the color cathode ray tube panel should be grounded for safety against short circuit or electric shock and supply the voltage of low potential of -20 ㎸ to -30 자로 to the common terminal of the electron gun. By generating a potential difference of +20 mA to +30 mA in the electron beam, the electron beam is subjected to deflection induction and scanning with a fluorescent film and a shadow mask having a relatively high potential so that exposure is performed.

In addition, the signal is transmitted by using an optical cable that is signal insulated between the image driver and the image amplifier, thereby protecting the low voltage circuit.

In addition, in the case of a color cathode ray tube mounted on a real product such as a TV receiver or a monitor, since the scanning time is very fast, about 60 times per second, the exposure is difficult. Shorten the exposure time.

In addition, in the case of light, it proceeds with optical linearity, but in the case of an electron beam (electron beam), diffraction proceeds by drawing a curve under the influence of the deflection yoke coil. It is very difficult technology to make the curve motion of the electron beam synchronous here, and it is no exaggeration to say that the quality and competitiveness of the color cathode ray tube are determined by this technology. Accordingly, the present invention allows exposure compensation with a synthetic magnet magnet attached to the deflection yoke coil and the electron gun in order to achieve 100% exposure.

In the case of the color monitor panel, dust or foreign matter is inevitably attached to the lens part in the manufacturing process, and defects are quite common, and dust and the like are exposed to the panel, and such defects are difficult to find. Therefore, in the present invention, the exposure is performed in a vacuum state to prevent poor exposure due to the inflow of dust or foreign matter and to prevent mislanding or poor image quality of the electron beam, thereby obtaining a high quality color cathode ray tube.

1-a cross-sectional configuration of a conventional invention.

2-cross-sectional configuration of the present invention.

3-a plan view of the invention.

4-A partial cross sectional view of an electron gun of the present invention.

Figure 5-A partial cross-sectional view of the ground terminal of the present invention.

6-a circuit block diagram of the present invention.

7-a plan view of one embodiment of the present invention.

8-Fluorescent surface view of a typical colored cathode ray tube.

<Explanation of symbols for the main parts of the drawings>

(2)-case (4)-vacuum room

(6)-cathode ray panel (8)-support plate

(10)-Rubber Edition (12)-Open Department

(14)-Shadow Mask (16)-Ground Terminal

(18)-electron gun (20)-common gun

(22)-fluorescent membrane (24)-control unit

(26) (28) (30) (32)-Solenoids (34) (36) (38) (40) (94)-Operating

(42) (44) (46) (48)-Push (49) (51) (53)-Path

(50) (62)-Through Hole (52)-Joining Ring

(54)-Screw Groove (56)-Protection

(57)-Secondary vacuum chamber (60)-High pressure packing

(64)-Bolt (66)-Magnet Gun Cathode

(68)-Terminal of Electron Gun (70)-Image Drive Section

(72)-deflection circuit (74)-deflection yoke coil

(76) (86) (98) (108)-Suction pipe (78) (82) (88) (100) (104) (110)-Open valve

(80) (102)-Vacuum Pump (84) (106)-Exhaust Pipe

(90) (112)-Turbo Vacuum Pump (92)-Shutter

(96)-Shutter Motor (114)-Video Amplifier

(115)-Operator Unit (116)-High Pressure Generator

(118)-photodiode (120)-phototransistor

(122)-Optical Cable

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 is a cross-sectional configuration of the present invention, in which a vacuum chamber 4 is formed inside a case 2 having a wide upper and narrow bottom with a non-magnetic metal, and a color cathode ray tube panel 6 to be exposed on the upper portion of the vacuum chamber 4. ), And the airtightness between the panel 6 and the support plate 8 when vacuuming is carried out by installing a rubber plate 10, which is a flat packing, on the top of the support plate 8, To be maintained. In the centers of the support plate 8 and the rubber plate 10, openings 12 having a size smaller than or equal to the inner plane of the panel 6 are formed, respectively, so that the scanning beam is directed to the panel 6 and the shadow mask 14, respectively. It is possible to proceed, and also to achieve the vacuum of the vacuum chamber 4 and the panel 6.

In the present invention, the case 2 constituting the vacuum chamber 4 is formed of a nonmagnetic material capable of transmitting a magnetic field and withstanding vacuum pressure, for example, preferably formed of nonmagnetic stainless steel, and contacting one side of an edge portion of the through hole 12. The ground terminal 16 having an elastic force is fixed to the shadow mask 14 to be electrically connected so that the shadow mask 14 and the case 2 are electrically connected and grounded.

The common terminal of the electron gun 18 even though the anode mask 14, which is an anode, is grounded to the case 2 of the exposure apparatus by the ground terminal 16 for electrical safety (electrical shock or short circuit). Alternatively, when the grid ground terminal 20 is supplied with a voltage of -20 kV to -30 kV, the potential difference of 20 kV to +30 kV between the grid ground terminal 20 and the shadow mask 14 ( By generating HV), the electron beam is guided and deflected to the fluorescent film 22 and the shadow mask 14 having a relatively high potential.

Meanwhile, the upper surface of the support plate 8 simultaneously pushes the four surfaces of the panel 6 so that the panel 6 is accurately centered on the opening 12 formed on the support plate 8 and the rubber plate 10. Install the device.

The centering device is installed so that the solenoids 26, 28, 30 and 32 connected to the control unit 24 face each other on the upper, lower and left and right sides of the support plate 8 as shown in FIG. (26) (28) (30) (32) Between the operation (34) (36) (38) (40) should face the solenoid located on the opposite side to push the outer side of panel (6) 6) At the ends of the actuating sections 34, 36, 38 and 40, soft pushes 42, 44, 46 and 48 are respectively provided to prevent the panel 6 from being damaged. When the panel 6 is moved to the fixed position and stopped, the push 42, 44, 46, 48 may be configured to move backward.

In the above, the push 42, 44, 46, 48 may press the sides of the panel 6 during the period in which the vacuum of the panel 6 is maintained or until the end of the BM exposure and the RGB exposure, Instead of solenoids 26, 28, 30 and 32, an air cylinder may also be used, the effect of which is of course identified.

In addition, the centering device for determining the centering of the panel 6 secures a soft guide piece projecting upwardly to the four portions of the opening 12 instead of the solenoid or air cylinder, so that the inner side of the panel 6 is fixed. Centering of the panel 6 may also be achieved by being guided and seated.

Meanwhile, a differential vacuum plate is formed in the bottom case 2 of the vacuum chamber 4 as shown in FIG. 4 and has passages 49, 51 and 53 through which RGB electron beams can pass. (55) is inserted and fixed to the lower part of the differential vacuum plate 55, the auxiliary vacuum chamber (57) connected with the intake pipe (98) is formed, and the through hole (50) is formed in the lower part of the auxiliary vacuum chamber (57), and the through hole Welding the fixing ring 52 of the inner diameter larger than the through-hole 50 in the lower portion of the lower part 50 to protrude downward, and then form a screw groove 54 around the outer circumferential surface.

On the outer surface of the electron gun 18 protected by the protective tube 56, a plurality of high pressure-resistant packings 60 formed of rubber or synthetic resin are forcibly fixed, and then inserted into the screw grooves 54 for inserting the electron gun 18. The electron gun 18 is fixed to the bottom of the case 2 by fastening with the nut 64 having the opening 62 formed therein, and the cathode 66 of the electron gun 18 is divided into the center portion of the opening 12. The terminal 68 of the electron gun 18 is exposed to the outside of the case 2 so that the image driver 70 can be connected.

A deflection yoke coil 74 connected to the deflection circuit 72 is provided on the outer surface of the protective tube 56 of the electron gun 18, and the ground terminal 16 is connected to a high voltage circuit, such as a one-color cathode ray tube completed. By creating the environment, the electron beam generated from the electron gun 18 is deflected and scanned into the shadow mask 14 and the fluorescent film 22.

In the above, the differential vacuum plate 55 in which the passages 49, 51, 53 are formed is fixed to the bottom case 2 of the vacuum chamber 4 so that the differential vacuum (the vacuum of the auxiliary vacuum chamber is 10 ^-6 torr or more, The vacuum in the vacuum chamber will achieve 10 ^-4 to 10 ^-5 torr).

That is, by forming the passages 49, 51 and 53 having a small diameter at the bottom of the case 2, the resistance to the air flow increases, so even if the vacuum of the vacuum chamber 4 is released, the passages 49 and 51 are released. Through 53, the vacuum in the auxiliary vacuum chamber 57 is slowly released.

In the above, the vacuum resistance in the differential vacuum is proportional to the third power of the radius of the passages 49, 51 and 53 (since it is molecular flow above 10 ^-4 torr). That is, since the exhaust pump diameter of the auxiliary vacuum chamber 57 is much larger than the passages 49, 51 and 53 of the vacuum chamber 4, differential vacuum becomes possible.

On the other hand, the side of the vacuum chamber 4 is connected to the intake pipe 76, the on-off valve 78 and the vacuum pump 80 in order to increase the internal vacuum degree of the vacuum chamber 4 by 10^-3To 10^-5The exhaust pipe 84 having the on-off valve 82 is provided in front of the intake pipe 76, and the vacuum is released after the BM exposure and the RGB exposure of the panel 6 are completed. By making it detachable, it is possible to replace it with a new panel 6 so as to perform repeated exposure work.

When one main vacuum pump 80 takes a long time to achieve a sufficient vacuum or cannot achieve a sufficient vacuum, as shown in FIG. 2, the auxiliary intake pipe 86 is opened and closed between the on / off valves 78. A valve 88 and a turbo vacuum pump 90 are installed to achieve a vacuum of 10 ^-3 torr with the main vacuum pump 80 and then a final of 10 ^-3 to 10 ^-5 torr with the turbo vacuum pump 90. To achieve vacuum.

On the other hand, the surface of the cathode 66 of the electron gun 18 is coated with carbonate, which is an oxide vapor deposition agent, and evaporation occurs well in a general atmosphere, so the life of the electron gun 18 is drastically shortened. Therefore, in the present invention, since the vacuum is temporarily released when the panel 6 is replaced, it is necessary to isolate the electron gun 18 from the vacuum chamber 4 to maintain the vacuum continuously.

Accordingly, as shown in FIGS. 1 and 3, the shutter 92 is installed on the upper portion of the electron gun protection tube 56 to prevent opening and closing of the electron gun 18. The 94 is connected to the shutter motor 96 installed in the vacuum chamber 4 to isolate the protective tube 56 from the vacuum chamber 4 when the vacuum of the vacuum chamber 4 is released by the valve 82. By blocking the air, it is possible to prevent the life of the electron gun 18 from being shortened.

When the electron beam is scanned for exposure in the above, the shutter 92 is completely lifted by the shutter motor 96 to prevent path interruption of the electron beam.

In addition, by connecting the intake pipe 98 and the on-off valve 100 and the vacuum pump 102 connected to the protective tube 56 in order to maintain the internal vacuum degree of the electron gun 18 to 10 ^-6 torr, An exhaust pipe 106 having an on / off valve 104 in front of the engine 98 is installed to replace or repair the electron gun 18 and to release the vacuum of the protective tube 56 if necessary.

In the case where it takes a long time to achieve a sufficient vacuum with one vacuum pump 102 or can not achieve a sufficient vacuum as shown in Figure 1 between the auxiliary intake pipe 108 and the opening and closing valve between the opening and closing valve 100 10 and a turbo vacuum pump 112 can be installed to achieve a vacuum of 10 ^-3 torr with the vacuum pump 102 and then a final vacuum of 10 ^-6 torr with the turbo vacuum pump 112. Air filters are installed at the ends of the exhaust pipes 84 and 106 to prevent foreign substances or dust from entering the vacuum chamber 4 from entering the vacuum chamber 4 when the vacuum of the vacuum chamber 4 is released.

5 is a circuit block diagram of the present invention, in which an image amplifier 114, an image driver 70, and an electron gun 18 are sequentially connected to the output of the control unit 24, and a deflection circuit is connected to the output of the control unit 24. 72 and the deflection yoke coil 74 are connected in sequence, and the high pressure generator 116 and the cathode 66 of the electron gun are connected to the ground terminal 16 at the output of the control unit 24, and the control unit 24 is connected. The solenoids 26, 28, 30, 32, the vacuum pumps 80, 102, and the turbo vacuum pumps 90, 112 are respectively connected to the output of the.

In the present invention, since the shadow mask 14 is grounded and the ground portion of the electron gun 18 is applied with a voltage of -20 kV to -30 kV, signal isolation between the image amplifying unit 114 and the image driver unit 70 is prevented. In order to connect a photo LED (photo LED) 118 to the output of the image amplifier 114, a photo transistor 120 is connected to the input of the image driver unit 70, the photo LED 118 and the photo transistor By connecting the optical cable 122 between the 120 to transmit a signal, electrical insulation is achieved to protect the low voltage circuit.

On the other hand, the current of the electron gun cathode 66 decreases when the deflection scanning beam scans the center portion of the panel 6, and the current of the electron gun cathode 66 when the deflection scanning beam scans the corner portion of the panel 6. Is increased to compensate for exposure of the corner portion of the panel 6.

In addition, in the case of a color cathode ray tube mounted on a real product such as a TV receiver or a monitor, the scanning time is very fast, about 60 times per second, so that the exposure is difficult because the sensitivity of the phosphor is low. Scanning about twice, the powerful beam to shorten the exposure time.

Unexplained reference numeral 124 is a washer.

According to the present invention configured as described above, a fluorescent film 22 is coated on the rubber plate 10 of the exposure apparatus as shown in FIG. 2 and the exposure target panel 6 to which the shadow mask 14 is coupled is placed, and then the operation unit 115 is mounted. When the solenoids 26, 28, 30, 32 are operated using the control unit, the solenoids 26, 28, 30, 32 are operated by the controller 24, and the push 42 is operated as shown in FIG. As the (44), (46), (48) is advanced, the panel (6) moves to a fixed position and is seated. When the mounting of the panel (6) is completed, a vacuum operation is performed.

In addition, when the on-off valve 78 is opened and the vacuum pump 80 is operated, the intake pipe 76 is sucked in. When the internal vacuum degree of the vacuum chamber 4 is achieved to 10 ^-3 torr, the on-off valve 78 is closed. By operating the turbo vacuum pump 90 while opening or opening the other on / off valve 88, it is possible to achieve a sufficient degree of vacuum up to 10 ⁻⁶ torr inside the vacuum chamber 4.

In addition, the protection tube 56 of the electron gun 18 is opened in the same manner as described above, and then the vacuum pump 102 is operated to intake through the intake pipe 98 and the protection tube 56 of the When the internal vacuum degree is achieved up to 10 ^-3 torr, by operating the turbo vacuum pump 112 while closing the on-off valve 100 and opening or opening the other on-off valve 110, the internal vacuum degree of the protective tube 56 is normal Sufficient vacuum is achieved up to about 10 ^-6 torr, like colored cathode ray tubes.

When sufficient vacuum is achieved, a reverse polarity high voltage (HV) of about 20 kV to 30 kV is applied to the ground terminal 16 and the common terminal 20 of the electron gun, and a deflection voltage is applied to the deflection yoke coil 74. When the shutter 92 is opened by the shutter motor 96 and the electron beam signal is input to the cathode 66 of the electron gun 18, the electron beam emitted from the electron gun is transferred to the fluorescent film 22 like the conventional color cathode ray tube. Since the scanning is deflected by the mask 14, the fluorescent film 22 is subjected to BM exposure and G, B, R exposure in a situation similar to the actual environment, and the exposure operation is performed in a vacuum state, so exposure by dust or foreign matter inflow. Defects are also prevented.

In addition, even if foreign matter or fine dust flows into the fluorescent film 22, it may be detected in advance at the same time as the exposure. When the exposure is completed, the vacuum of the exposure apparatus is released, and then the panel 6 is to be exposed. New panels can be replaced and exposed.

When the panel 6 is separated, the shutter motor 96 is operated in a state in which the high voltage HV is not blocked or blocked, thereby closing the opening of the protective tube 56 by the shutter 92 to protect the protective tube 56. Maintaining the internal vacuum of up to about 10 ⁻⁶ torr protects the carbonate of the strong electron gun 18 from evaporation in the atmosphere.

Once the isolation of the electron gun 18 is achieved, the on-off valve 82 is opened to release the vacuum in the vacuum chamber 4 and the new panel 6 with the fluorescent film 22 applied and the shadow mask 14 attached thereto is seated. By adjusting the position, maintaining the vacuum of the vacuum chamber 4, opening the shutter 92, and applying a high voltage (HV) to achieve BM exposure and RGB exposure of the fluorescent film 22 with a deflection scanning beam. .

In the present invention, a photo LED (118 LED) is connected to the output of the image amplification unit 114, a photo transistor (120) is connected to the input of the image driver unit 70, the photo LED 118 and The phototransistor 120 is connected to the optical cable 122 to achieve isolation of the electron beam signal, thereby protecting the low voltage circuit.

In addition, even if the shadow mask 14 is grounded and a potential difference of 20 kV to 30 kV is generated between the common terminal of the electron gun 18 or the ground, the support plate 8 and the case 2 are grounded. This is avoided.

In addition, by placing a plurality of exposure apparatuses of the present invention arranged in a straight line or arranged in a circle on a turn table as shown in FIG. 7 to install a plurality of the exposure apparatus of the panel 6 and the rubber plate ( The centering process of pushing the panel 6 mounted on the top 10 to the push 42, 44, 46 and 48 of the solenoids 26, 28, 30 and 32, and the vacuum chamber 4 ) And the process of achieving the vacuum of the protective tube 56, the process of opening the shutter 92, the process of applying a high voltage (HV) and a deflection voltage, and the exposure of BM and RGB exposure while deflecting the electron beam. The process, the shutter 92 closing process, the vacuum releasing process, the panel 6 replacing process, and the like are successively performed, and thus the exposure work efficiency is improved.

In the present invention, if a sensor for detecting mounting of the panel 6 is installed on the support plate 8 or the rubber plate 10, and the seating of the panel 6 is detected, the solenoid 26 as illustrated in FIG. 2 by the control unit 24 ( Pushes 42, 44, 46, and 48 of 28, 30 and 32 may be advanced to allow the panel 6 to sit in place, and may be evacuated when the centering of the panel 6 is complete. It is preferable that a series of work processes such as a work and an opening operation of the shutter 92 and an electron beam scanning work be performed automatically.

As described above, the present invention enables the panel to be installed on the upper part of the vacuum chamber having the same degree of vacuum as the actual color cathode ray tube, and the actual color cathode ray tube is installed at the bottom of the vacuum chamber by installing an electron gun, a deflection yoke coil, a vacuum device, and an electron gun control device. BM exposure and GBR exposure are carried out by deflecting the electron beam in the same atmosphere, so that accurate exposure as desired can be achieved, thus preventing mislanding or poor image quality of the electron beam and drastically reducing the exposure failure rate and cost. It is effective to obtain high quality colored cathode ray tube.

In addition, since the deflection angle and the intensity of the scanning beam may be adjusted according to the size of the color cathode ray tube, it is possible to quickly respond to the size of the color cathode ray tube, so that the exposure of the large color cathode ray tube can be easily achieved.

In addition, since the exposure operation is performed in the vacuum chamber, dust or foreign matter is prevented from entering, thereby preventing the exposure failure caused by these.

In addition, the infrared exposure method during the exposure is a very useful invention in which the panel part appears white but the electron beam exposure appears in the R.G.B color of the phosphor, so that the defect inspection of the fluorescent film can be performed immediately during the exposure.

Claims (6)

A method of exposing an object to be exposed by deflecting an electron beam emitted from an electron gun, comprising: a support plate on which a panel of an exposed color cathode ray tube is placed on an upper part of a vacuum chamber, and an electron gun, a deflection yoke coil, a vacuum device, an electron gun, The control circuit for controlling the deflection circuit and cathode and the high voltage circuit for guiding the electron beam to the fluorescent film and the shadow mask are installed so that the accelerated electron beam is deflected and injected into the shadow mask and the fluorescent film of the panel. A method of exposing a color cathode ray tube using a scanning beam, characterized by performing BM exposure and G, B, R exposure. An apparatus for exposing an object to be exposed by deflecting an electron beam emitted from an electron gun, comprising: an electron beam emitting electron gun, a deflection yoke coil and a deflection circuit for deflecting and scanning an electron beam emitted from an electron gun to an exposed object panel, and an exposed object color; A vacuum chamber and a vacuum device formed by a vacuum atmosphere such as a cathode ray, a high pressure generating unit for applying high pressure to the anode of the panel, and an exposure device composed of a control unit are coated with a fluorescent surface and a shadow mask is installed. Next, while maintaining the vacuum of 10-3 to 10-5 torr, the color cathode ray tube using the scanning beam deflected by the fluorescent film and the shadow mask of the exposed panel to perform the BM exposure and the G, B, R exposure Exposure apparatus. 3. The exposure panel 6 is installed to be hermetically installed by installing a support plate 8 and a rubber plate 10 having an opening 12 formed thereon in the upper part of the vacuum chamber 4 where the vacuum is maintained by the vacuum pump. A ground terminal 16 on one side of the opening 12, an electron gun 18 and a deflection yoke coil 74 in the vacuum chamber 4, and a common terminal of the electron gun 18. By applying a low potential of 20 kV to -30 kV, the accelerated electron beam is deflected and scanned by the fluorescent film 22 and the shadow mask 14 of the panel 6 to perform BM exposure and G, B, R exposure. An exposure apparatus of a color cathode ray tube using a scanning beam, characterized by the above-mentioned. The method of claim 2 or 3, wherein a photo LED (118) is connected to the output of the image amplification unit 114, and a photo transistor (120) is connected to the input of the image driver unit (70). The photo LED 118 and the phototransistor 120 connect the optical cable 122 to insulate the transmitted signal so that the low voltage circuit can be protected to expose the color cathode ray tube using the scanning beam. Device. The method of claim 2 or 3, wherein the shutter 92 is installed on the upper portion of the electron gun protective tube 56 so as to be opened and closed, and the operation period 94 of the shutter 92 is inside the vacuum chamber 4. When the vacuum of the vacuum chamber 4 is released by the valve 82 by connecting to the shutter motor 96 to be installed, the protective tube 56 is isolated from the vacuum chamber 4 to be isolated from the air so as to keep the life of the electron gun 18. An exposure apparatus of a color cathode ray tube using a scanning beam, characterized in that to prevent shortening. 4. An exposure apparatus for a color cathode ray tube using a scanning beam according to claim 2 or 3, wherein the exposure scanning time is performed once to 10 times per second.