KR100290758B1 - Color filter of liquid crystal display and producing method thereof - Google Patents

Color filter of liquid crystal display and producing method thereof Download PDF

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KR100290758B1
KR100290758B1 KR1019930009843A KR930009843A KR100290758B1 KR 100290758 B1 KR100290758 B1 KR 100290758B1 KR 1019930009843 A KR1019930009843 A KR 1019930009843A KR 930009843 A KR930009843 A KR 930009843A KR 100290758 B1 KR100290758 B1 KR 100290758B1
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South Korea
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color filter
liquid crystal
crystal display
metal
black
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KR1019930009843A
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Korean (ko)
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KR950001353A (en
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강경철
조규철
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구본준
엘지.필립스 엘시디주식회사
론 위라하디락사
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Priority to KR1019930009843A priority Critical patent/KR100290758B1/en
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509—Filters, e.g. light shielding masks
    • G02F1/133514—Colour filters
    • G02F1/133516—Methods for their manufacture, e.g. printing, electro-deposition or photolithography
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509—Filters, e.g. light shielding masks
    • G02F1/133512—Light shielding layers, e.g. black matrix

Abstract

PURPOSE: A method for producing a color filter of a liquid crystal display is provided to prevent resistance of common electrode and to improve quality of an image by preventing reflection of light. CONSTITUTION: A method for manufacturing a color filter of a liquid crystal display comprises a first stage post baking after spin coating black mixture(2a); a second stage forming a black matrix(2) by exposing far-infrared ray through a photo mask; a third stage flatting a base surface by depositioning metal with a sputtering method; a fourth stage forming a color filter layer; and a forming a transparency conductive layer(4) on a base plate having the black matrix and the color filter. The black matrix isolates light by being mounted on a transparent glass base plate. Thereby, the method for manufacturing the color filter of the liquid crystal display prevents resistance of common electrode. Moreover, the method for manufacturing the color filter of the liquid crystal display improves quality of an image by preventing reflection of the light.

Description

액정 표시 소자의 칼라 필터 및 그 제조 방법Color filter of liquid crystal display element and its manufacturing method

제1도는 본 발명 액정 표시 소자의 칼라 필터의 구성도.1 is a block diagram of a color filter of the liquid crystal display device of the present invention.

제2도는 본 발명 액정 표시 소자의 칼라 필터 제조 방법에 따른 순차 공정도.2 is a sequential process chart according to the color filter manufacturing method of the liquid crystal display device of the present invention.

* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings

1 : 투명 유리 기판 2 : 블랙매트릭스1: transparent glass substrate 2: black matrix

2a : 블랙 안료 2b : 금속2a: black pigment 2b: metal

3 : 색재층 4 : 투명 도전막3: color material layer 4: transparent conductive film

본 발명은 액정 표시기용 칼라 필터의 블랙 매트릭스 제조에 관한 것으로, 특히 크롬 금속막을 사용하는 경우의 반사율 문제, 공통 전극인 ITO 투명 도전막 형성시의 칼라 필터 단차로 인한 단선 문제 및 ITO 투명 도전막을 크롬 금속막과 접촉시킴으로서 ITO 투명 도전막의 면저항을 감소시키는 액정 표시 소자의 칼라 필터 및 그 제조 방법에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to the manufacture of a black matrix of color filters for liquid crystal displays, in particular a problem of reflectance when a chromium metal film is used, a disconnection problem due to color filter steps when forming an ITO transparent conductive film as a common electrode, and a chrome of the ITO transparent conductive film. A color filter of a liquid crystal display device which reduces the sheet resistance of an ITO transparent conductive film by contacting with a metal film, and its manufacturing method.

종래 액정 표시 소자의 칼라 필터 제조 방법은 일반적으로 크롬(Cr)을 진공 증착 또는 스퍼터링(spurttering)기술로 데포지션(Deposition)한 후, 사진식각 기술로 패터닝(patterning)하는 방법이 있으나 크롬은 표면 반사율이 약 50% 정도로 높기 때문에 유리기판의 외측인 액정 표시부 정면에서는 반사로 인해 화질이 떨어지고, 후면광원(Back Light)의 빛이 크롬 블랙매트릭스 표면에서 반사되어 박막 트랜지스터(TFT) 어레이 기판의 박막 트랜지스터 오프 전류를 증가시켜 박막 트랜지스터의 특성을 저하시키는 문제점이 있으며, 이러한 문제점을 해결하기 위하여 크롬 단위막 대신에 CrxOy/Cr/CrxOy와 같이 3층 구조의 블랙 매트릭스도 사용되고 있으나 가격이 비싸므로 포토마스크와 같이 특수한 용도에만 사용되고 있다. 또 다른 방법으로는 반사율이 높은 금속 대신에 감광성 블랙 안료를 스핀 코팅한 후, 사진식각 기술로 노광 및 현상한 후 포스트 베이킹(Post Baking)함으로써 반사율이 낮은 블랙 유기막을 쉽게 제작하는 것이 가능하지만 광차단율이 크롬에 비해서 상당히 떨어지며, 블랙 매트릭스로서 요구되는 광차단율을 얻기 위해서는 막 두께가 3㎛ 이상이 필요하므로 칼라필터 기판의 표면 단차가 크게 되어 공통 전극으로 ITO 투명도전막을 데포지션할 경우 표면 단차로 인해 ITO 막의 단선 또는 크랙(Crack)등이 발생하는 문제점이 있었다.Conventionally, a color filter manufacturing method of a liquid crystal display device has a method of depositing chromium (Cr) by vacuum deposition or sputtering technique and then patterning by photolithography technique, but chromium has a surface reflectance Since this is about 50%, the image quality is degraded due to reflection in front of the liquid crystal display outside the glass substrate, and the light of the back light is reflected from the surface of the chrome black matrix so that the thin film transistor of the TFT array substrate There is a problem of decreasing the characteristics of the thin film transistor by increasing the current, and to solve this problem, instead of the chromium unit layer, a three-layer black matrix such as Cr x O y / Cr / Cr x O y is used, but the price is As it is expensive, it is used only for special purposes such as photomask. Alternatively, it is possible to easily produce a low reflectance black organic film by spin coating a photosensitive black pigment instead of a metal with high reflectivity, exposing and developing by photolithography, and then post baking. It is considerably inferior to this chromium, and in order to obtain the light blocking rate required as the black matrix, the film thickness is required to be 3 μm or more, so that the surface step of the color filter substrate becomes large. There was a problem that disconnection or crack of the ITO membrane occurs.

본 발명의 목적은 상기와 같은 종래의 문제점을 해결하기 위한 것으로, 크롬금속막을 사용하는 경우의 반사율이 높은 것과, 공통전극인 ITO 투명 도전막 형성시의 칼라 필터 단차로 인해 단선되는 문제를 개선하고, ITO 투명 도전막을 크롬금속막과 접촉시킴으로서 ITO 투명 도전막의 면저항을 감소시키는 액정 표시 소자의 칼라 필터 및 그 제조 방법을 제공하는 데 있다.An object of the present invention is to solve the conventional problems as described above, and to improve the problem of disconnection due to the high reflectance when using a chromium metal film and the color filter step when forming an ITO transparent conductive film as a common electrode, And a color filter of a liquid crystal display device which reduces the sheet resistance of an ITO transparent conductive film by making an ITO transparent conductive film contact with a chromium metal film, and its manufacturing method.

이하 본 발명의 기술적 구성 및 제조방법을 상세히 설명하면 다음과 같다.Hereinafter, the technical configuration and manufacturing method of the present invention will be described in detail.

본 발명 액정 표시 소자의 칼라 필터는 제1도에 도시되는 바와 같이, 투명 유리 기판(1) 위에 화소간의 광을 차단하는 블랙 매트릭스(2)와, 색재층(3) 및 투명 도전막(4)으로 구성된 칼라 필터에 있어서, 상기 블랙 매트릭스(2)가 블랙 안료(2a)와 금속(2b)의 이중 구조로 구성함을 그 기술적 구성상의 특징으로 한다.As shown in FIG. 1, the color filter of the liquid crystal display device of the present invention has a black matrix 2 that blocks light between pixels on the transparent glass substrate 1, a color material layer 3, and a transparent conductive film 4 In the color filter constituted of the above, the technical characteristics of the black matrix 2 are composed of a dual structure of the black pigment 2a and the metal 2b.

상기 블랙 안료(2a)와 금속(2b)의 두께가 색재층(3)의 두께와 동일한 두께로 형성하도록 한다.The black pigment 2a and the metal 2b are formed to have the same thickness as that of the color material layer 3.

상기 블랙 안료(2a)의 상부에 금속(2b)을 형성하도록 한다.The metal 2b is formed on the black pigment 2a.

상기 금속(2b)이 블랙 안료(2a)보다 적게 형성되도록 한다.The metal 2b is made to form less than the black pigment 2a.

이러한 액정 표시 소자의 칼라 필터의 제조 방법은 제2도에 도시되는 바와 같이, 투명 유리 기판(1) 위에 블랙 안료(2a)를 스핀 코팅한 후 포스트 베이킹하는 단계(제2(a)도)와, 소정의 포토마스크를 사용하여 자외선에 노광한 후 현상 공정을 거쳐 블랙 안료(2a)인 블랙 매트릭스(2)를 나중에 형성할 칼라 필터층 두께보다 얇게 형성하는 단계(제2(b)도)와, 상기 블랙 매트릭스(2) 위에 진공 증착 및 스퍼터링 방식으로 금속(2b)인 크롬을 데포지션한후(제2(c)도), 사진식각 기술을 사용하여 크롬을 블랙 안료(2a) 패턴보다 작게하고 두께는 블랙 안료(2a)와 나중에 형성할 칼라 필터층의 두께 차이 만큼 데포지션하여 기판 표면에 평탄화 시키는 단계(제2(d)도)와, 칼라 필터층을 형성하기 위해 칼라 안료를 스핀 코팅하고 자외선 노광 및 현상 공정을 3회 반복하여 R,G,B 칼라 필터를 형성하는 단계(제2(e)도, 제2(f)도, 제2(g)도)와, 블랙 매트릭스(2)와 칼라 필터가 형성된 기판위에 공통 전극으로서 ITO 투명 도전막(4)을 스퍼터링 방법으로 형성하는 단계(제2(g)도)로 구성함을 그 기술적 방법상의 특징으로 한다.As shown in FIG. 2, the method for manufacturing a color filter of the liquid crystal display device includes a step of spin coating the black pigment 2a on the transparent glass substrate 1 and then post-baking (FIG. 2 (a)) and Forming a black matrix 2, which is a black pigment 2a, thinner than the thickness of the color filter layer to be formed later, after exposure to ultraviolet rays using a predetermined photomask, followed by a development process (FIG. 2 (b)); After depositing chromium, which is the metal (2b), on the black matrix (2) by vacuum deposition and sputtering (second (c)), the chromium is made smaller than the black pigment (2a) pattern using a photolithography technique. The thickness is deposited by the difference between the thickness of the black pigment 2a and the color filter layer to be formed later to planarize the surface of the substrate (second (d)), spin coating the color pigment to form the color filter layer, and exposing to ultraviolet rays. And repeat the development process three times R, G, B Forming a filter (second (e), second (f), second (g)), and an ITO transparent conductive film as a common electrode on the substrate on which the black matrix 2 and the color filter are formed ( 4) is formed by the sputtering method (second (g)) is characterized by the technical method.

이와 같은 본 발명 액정 표시 소자의 칼라 필터 및 그 제조 방법은 블랙 매트릭스를 블랙 안료와 크롬의 2중 구조막으로 함으로서 액정 표시부 정면에서 외부 주위광에 의한 반사를 방지하여 화질이 향상되며 액정 표시기 내부에서는 후광원에 의한 블랙 매트릭스로부터 반사를 방지하여 박막 트랜지스터 어레이의 특성 저하를 방지할 수 있으며, 칼라 필터층이 평탄화 됨으로서 공통 전극인 ITO 투명 도전막의 단선의 우려가 제거되고, 블랙 매트릭스인 크롬과 공통 전극인 ITO 투명 도전막이 접촉되어 있으므로 공통 전극의 저항을 줄일 수 있는 유용한 것이다.Such a color filter and a method of manufacturing the liquid crystal display device of the present invention uses a black matrix as a double structure film of black pigment and chromium to prevent reflection by external ambient light in front of the liquid crystal display, thereby improving image quality. It is possible to prevent reflection from the black matrix by the back light source, thereby preventing the deterioration of the characteristics of the thin film transistor array, and by flattening the color filter layer, the possibility of disconnection of the ITO transparent conductive film, which is a common electrode, is eliminated. Since the ITO transparent conductive film is in contact, it is useful to reduce the resistance of the common electrode.

Claims (4)

투명 유리 기판 위에 화소간의 광을 차단하는 블랙매트릭스와, 색재층 및 투명 도전 막으로 구성된 칼라 필터에 있어서, 상기 블랙매트릭스가 블랙 안료와 금속의 이중 구조로 구성되고, 블랙 안료와 금속으로 구성된 상기 블랙매트릭스의 두께가 색재층의 두께와 동일한 두께로 형성됨을 특징으로 하는 액정 표시 소자의 칼라 필터.A color filter composed of a black matrix that blocks light between pixels on a transparent glass substrate, and a color material layer and a transparent conductive film, wherein the black matrix is formed of a double structure of black pigment and metal, and the black is composed of black pigment and metal. The color filter of the liquid crystal display element characterized in that the thickness of the matrix is formed to the same thickness as the color material layer. 제1항에 있어서, 블랙 안료 상부에 금속을 형성함을 특징으로 하는 액정 표시 소자의 칼라 필터.The color filter of claim 1, wherein a metal is formed on the black pigment. 제2항에 있어서, 금속이 블랙 안료보다 작게 형성함을 특징으로 하는 액정 표시 소자의 칼라 필터.The color filter of a liquid crystal display device according to claim 2, wherein the metal is formed smaller than the black pigment. 투명 유리 기판 위에 블랙 안료를 스핀 코팅한 후 포스트 베이킹하는 단계와, 소정의 포토마스크를 사용하여 자외선에 노광한 후 현상 공정을 거쳐 블랙안료인 블랙매트릭스를 칼라 필터층 두께보다 얇게 형성하는 단계와, 상기 블랙 매트릭스 위에 진공 증착 및 스퍼터링 방식으로 금속을 데포지션한 후 사진식각 기술을 사용하여 금속을 블랙 안료 패턴보다 작게하고 두께는 블랙 안료와 칼라 필터층의 두께차이 만큼 데포지션 하여 기판 표면에 평탄화 시키는 단계와, 칼라 필터층을 형성하기 위해 색재 안료를 스핀 코팅하고 자외성 노광 및 현상 공정을 3회 반복하여 칼라 필터를 형성하는 단계와, 블랙 매트릭스와 칼라 필터가 형성된 기판위에 공통 전극으로서 투명 도전막을 스퍼터링 방법으로 형성하는 단계로 구성함을 특징으로 하는 액정 표시 소자의 칼라 필터제조 방법.Spin-coating a black pigment on the transparent glass substrate and then post-baking, exposing to a UV light using a predetermined photomask, and then developing a black matrix, which is a black pigment, to be thinner than the thickness of the color filter layer through the development process; Depositing the metal on the black matrix by vacuum deposition and sputtering, and then using a photolithography technique to make the metal smaller than the black pigment pattern, and depositing the metal by the thickness difference between the black pigment and the color filter layer to planarize the surface of the substrate; Spin coating the colorant pigment to form a color filter layer and repeating the ultraviolet exposure and development processes three times to form a color filter, and sputtering a transparent conductive film as a common electrode on the substrate on which the black matrix and the color filter are formed. Forming a liquid crystal display Method for manufacturing color filter of device.
KR1019930009843A 1993-06-02 1993-06-02 Color filter of liquid crystal display and producing method thereof KR100290758B1 (en)

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