KR100265410B1 - Coaxial motion apparatus - Google Patents

Abstract

PURPOSE: A coaxial motion device is provided to effectively seal a relative motion area, in which inner and outer shafts move relatively in contact, from the outside by forming a magnetic fluid chamber between the inner and outer shafts for receiving gel type magnetic fluid to form oil films on an outer diameter part of the inner shaft and an inner diameter part of the outer shaft. CONSTITUTION: A coaxial motion device includes a first bellows chamber(33) coupled between a supporting part and an outer shaft(11) with elasticity along an axial line of the outer shaft, an inner shaft chamber housing(49) coupled with an inner shaft(27) to relatively move along an axial line of the inner shaft, a second bellows chamber(47) coupled between the inner shaft chamber housing with elasticity in an axial line direction, and a magnetic fluid chamber(53) interposed between the inner shaft chamber housing and an inner diameter part of the outer shaft.

Description

Coaxial Motion Device

The present invention relates to a coaxial movement apparatus having a cylindrical outer shaft which is supported to allow a predetermined relative movement with respect to a support portion, and an inner shaft which is coaxially accommodated in the outer shaft and that moves relative to the outer axis. The present invention relates to a coaxial motion device in which a relative motion area is blocked from the outside so that lubricants and the like do not leak from the relative motion area to the outside.

The coaxial motion device is installed on a support that can be linearly moved along the same X and Y planes so that linear movement is possible with respect to the support part in the orthogonal direction of the X and Y planes, that is, the Z direction, and at the same time, rotational movement is possible along the Z direction For example, it is used for the head of an automation facility.

FIG. 6 is a plan view of a head portion of an automated installation for explaining a conventional coaxial motion device, FIG. 7 is a sectional view taken along line III-III of FIG. 6, and FIG. 8 is a sectional view taken along line IV-IV of FIG. As shown in these figures, the support portion 101 provided to linearly move on the base member (not shown) constituting the same plane is formed from the vertical wall portion 103 and one side end of the vertical wall portion 103. The bottom portion 105 is bent to have a substantially "L" shape, and the vertical wall portion 103 stands on the base member. The bottom portion 105 of the support portion 101 is formed with a passage opening 107 penetrating through the plate surface, the tubular outer shaft 111 that is linearly movable in the vertical direction is coupled to the passage opening 105.

The reciprocating drive unit 110 is coupled to the central region of the outer shaft 111 so that the outer axis 111 can be linearly moved along the lateral direction, and a ball screw portion 112 is formed at one side of the reciprocating drive unit 110. The ball screw portion 112 is arranged in parallel with the outer shaft 111, the screw shaft 113 is formed with a ball screw along the outer peripheral surface is coupled. Both ends of the screw shaft 113 are supported to be rotatable by the support piece l15, and a screw shaft driving motor 117 for driving the screw shaft 113 is installed in the front region of the outer shaft 111. .

The inner shaft 127 is supported by a plurality of bearing members 119 so that the inner shaft 127 can rotate and linearly move within the outer shaft 111, and the inner side of the outer shaft 111 has an inner drive for rotating the inner shaft 127. Pulley 121 is rotatably coupled. The inner driving pulley 121 is coupled to the spline boss 122 in which the ball spline shape portion 124 is formed in the inner diameter to rotate the ball spline boss 122. A ball spline shaped portion 128 is formed on the outer diameter surface of the inner shaft 127 corresponding to the ball spline boss 122 so as to be relatively movable with respect to the ball spline boss 122. In addition, an inner shaft driving motor 123 for rotating the inner shaft driving pulley 121 is disposed in one region of the inner shaft driving pulley 121 so that the rotating shaft is arranged in parallel with the axial direction of the inner shaft 127. . A spring 129 that applies an elastic force to the inner shaft 127 is coupled to the upper end region of the inner shaft 127 so that the exposed end of the inner shaft 127 protrudes from the exposed side end of the outer shaft 111.

However, when the coaxial motion device having such a configuration is applied to a facility under a high clean environment, that is, a so-called clean room automation facility disposed in a work environment classified in the cleanliness class 1-1O, Lubricants and the like from the relative motion zone where the relative motion occurs in contact with the outside leaks to the outside, causing a problem of sealing to seal the relative motion zone from the outside.

In addition, when using such a coaxial motion device for a transfer device such as a semiconductor chip or HDD low bar that requires high precision, a suction hose is added to the inner shaft, and thus the number of parts of the automation equipment is increased. Not only is it increased, there is a problem of increasing the volume which makes the above-mentioned problem of sealing more difficult.

Accordingly, it is an object of the present invention to provide a coaxial motion device capable of effectively sealing a relative motion area that is in mutual contact and relative motion from the outside.

1 is a plan view of the head of the automated equipment equipped with a coaxial motion device according to the present invention.

FIG. 2 is a cross-sectional view taken along line II of FIG. 1. FIG.

3 is a cross-sectional view taken along the line II-II of FIG.

4 is an enlarged view showing the descending partner of the outer shaft of FIG.

FIG. 5 is an enlarged view showing an upward movement state of the inner shaft of FIG. 2; FIG.

Figure 6 is a plan view of the head of the automated equipment for explaining a conventional coaxial motion device.

FIG. 7 is a cross-sectional view taken along line III-III of FIG. 6;

FIG. 8 is a cross-sectional view taken along line IV-IV of FIG. 6.

* Explanation of symbols for main parts of the drawings

1: Supporting part 7: Opening opening

11: outer shaft 13: screw shaft

17: screw drive motor 19: bearing member

21: inner shaft drive pulley 24,28: ball spline shape

27: internal shaft 31,45: bellows flange

33: first bellows chamber 47: second bellows chamber

49: internal storage housing 53: magnetic fluid chamber

According to the present invention, there is provided a coaxial motion device having a cylindrical outer shaft which is supported to enable a predetermined relative movement with respect to a support portion, and an inner shaft that is coaxially accommodated in the outer shaft and that moves relative to the outer axis. A first bellows chamber elastically coupled between the support portion and the outer shaft along an axial direction of the outer shaft, an inner shaft chamber housing coupled to the inner shaft so as to be movable relative to the inner shaft, and the inner shaft housing and the inner shaft; And a second bellows chamber that is elastically coupled along the axial direction between the shafts, and a magnetic fluid chamber interposed between the inner shaft chamber housing and the inner diameter portion of the outer shaft.

Here, it may be preferred that a ball spline mechanism is interposed between the inner shaft housing and the inner shaft.

It may be effective to have a bellows flange extending in the radial direction at the exposed end regions of the outer and inner shafts.

Preferably, at least one zero ring may be interposed between both ends of the first bellows chamber and the outer shaft, and the zero ring may be interposed between the bellows flange end of the second bellows chamber and the inner shaft. to be.

A shaft hole is formed in the inner shaft along the shaft center, and further includes a suction nozzle member coupled to the bellows side end region of the inner shaft and a suction hose coupled to an opposite side end region of the nozzle member of the inner shaft. can do.

Hereinafter, with reference to the accompanying drawings will be described in detail with respect to the present invention.

1 is a plan view of a coaxial motion device according to the present invention, Figure 2 is a cross-sectional view taken along the line II of Figure 1, Figure 3 is a cross-sectional view taken along the line II-II of Figure 1, Figures 4 and 5 This is an enlarged view of the main part. As shown in these figures, the support part 1 which is installed so that linear movement on the base member (not shown) which comprises the same plane is possible from the vertical wall part 3 and one side end part of the vertical wall part 3; The bottom portion 5 is bent to have a substantially "L" shape, and the vertical wall portion 3 stands up on the base member. Passing openings 7 are formed in the bottom portion 5 of the supporting portion 1 through the plate surface, and the tubular outer shaft 11 that is linearly movable in the vertical direction is coupled to the passing openings 5.

A reciprocating drive unit 10 is coupled to the central region of the outer shaft 11 so that the outer axis 11 can be linearly moved along the axial direction, and a ball screw unit 12 is formed at one side of the reciprocating drive unit 10. The ball screw portion 12 is arranged in parallel with the outer shaft 11, the screw shaft 13 is formed with a ball screw along the outer peripheral surface is coupled. Both ends of the screw shaft 13 are rotatably supported by the support pieces 15, and a screw shaft driving motor 17 for driving the screw shaft 13 is installed in the front region of the outer shaft 11. .

The inner shaft 27 is supported by a plurality of bearing members 19 so that the inner shaft 27 can rotate and linearly move, and the upper shaft of the outer shaft 11 has an inner shaft for rotational driving of the inner shaft 27. The copper pulley 21 is rotatably coupled. The inner shaft drive pulley 21 is coupled to the spline boss 22 in which the ball spline portion 24 is formed in the inner diameter to rotate the ball spline boss 22. The ball spline portion 28 is formed on the outer diameter surface of the inner shaft 27 corresponding to the ball spline boss 22 so as to be relatively movable with respect to the ball spline boss 22. In addition, an inner shaft driving motor 23 for rotation of the inner shaft driving pulley 21 is installed in one region of the inner shaft driving pulley 21 so that the rotating shaft is arranged in parallel with the axial direction of the inner shaft 27. have. A spring 29 for applying an elastic force to the inner side 27 is coupled to the upper end region of the inner shaft 27 so that the exposed end of the inner shaft 27 protrudes from the exposed side end of the outer shaft 11.

On the other hand, at the exposed end of the outer shaft 11, a bellows flange 31 extending outward in the radial direction is formed, the bellows flange 31, the first bellows extendable along the axial direction of the outer shaft 11 One end of the seal 33 is coupled. The other end portion of the first bellows chamber 33 is formed with a flange portion 34 extending radially, and the flange portion 34 is accommodated in the opening opening of the bottom portion 5 of the support portion 1. The planner accommodating part 9 recessed from the plate surface is formed so that it may be made. The 0 rings 41 are coupled to both end portions of the first bellows chamber 33 so as to maintain airtightness.

The inner shaft 27 has a multi-stage structure that is radially reduced from the upper region toward the exposed side end region, and a suction hole 43 is formed along the shaft center. An adsorption nozzle member (not shown) is coupled to an exposed side end of the inner shaft 43 so as to adsorb a transfer object (not shown), and an suction air hose (not shown) is coupled to the other end.

In addition, a bellows flange 45 is formed on the inner shaft 27 and is radially spaced apart from the exposed side end by a predetermined length section. From the bellows flange 45, a second bellows chamber 47 is provided over a predetermined length section. It is elastically coupled along this axial direction. The inner shaft chamber housing 49 is coupled to the upper end of the second bellows chamber 47 so as to be movable relative to the inner shaft 27, and the inner diameter of the inner shaft chamber housing 49 and the outer side of the inner shaft 27 corresponding thereto. Ball spline-shaped portions 51 are respectively formed on the neck to allow relative movement, and the inner shaft chamber housing 49 has an upper end contacting the bearing member 19 to restrict upward movement.

The magnetic fluid chamber 53 is coupled between the inner shaft chamber housing 49 and the inner diameter portion of the outer shaft 11, and the magnetic fluid in the gel state is accommodated in the magnetic fluid chamber 53 to accommodate the inner diameter surface of the outer shaft 11. By forming oil films on the outer diameter surfaces of the inner and inner shaft chamber housings 49, the area between the outer shaft 11 and the inner shaft 27 can be blocked from the outside.

With this configuration, when the screw shaft drive motor 17 rotates to rotate the screw shaft 13, the outer shaft 11 coupled to the screw shaft 13 by the screw shaft 13 is moved downward from the support 1 to be transported. It will protrude toward you. At this time, the first bellows chamber 33 coupled to the exposed side end of the outer shaft 11 extends along the axial direction to block an area between the outer opening 11 of the outer opening 11 and the support portion 1 from the outside. do. When the suction nozzle coupled to the exposed end of the inner shaft 27 contacts the object to be conveyed, the suction hose coupled to the upper end of the inner shaft allows the object to be sucked to the suction nozzle, and the object to be sucked to the suction nozzle. When adsorbed, the outer shaft 11 moves upward as the screw shaft 13 rotates.

On the other hand, the base member for conveying the support 1 along the X and Y planes moves so that the outer shaft 11 exists on the mounting position of the object to be conveyed, and the inner shaft 27 moves back and forth before and after the movement of the base member. A predetermined angular rotation is made with respect to the outer shaft 11 to match the relative assembly position with respect to the mounting position. At this time, the magnetic fluid chamber 53 coupled between the inner diameter portion of the outer shaft 11 and the inner shaft chamber housing 49 has an oil film formed between the outer diameter portion of the inner shaft chamber housing 49 and the inner diameter portion of the outer shaft 11. By doing so, the area between the outer shaft 11 and the inner shaft chamber housing 49 is blocked to the outside.

When the predetermined angular rotation of the inner shaft 27 is completed, the outer shaft 11 is lowered to the mounting position of the object to be transported in conjunction with the rotation of the screw shaft 13. The downward movement amount of the outer shaft 11 is set to exceed the mounting position of the object to be pressurized, and when a predetermined pressure is applied to the object to be conveyed, the spring 29 coupled to the upper end of the inner shaft 27. This compression causes the inner shaft 27 to move relative to the outer shaft 11. At this time, the second bellows chamber 47 is compressed along the longitudinal direction by the inner shaft chamber housing 49 and the bellows flange 45 coupled to the upper end, and the area between the inner shaft chamber housing 49 and the inner shaft 27 is separated. It is blocked against the outside. The inner shaft housing 49 is fixed by the bearing member 19 so that the oil film formed by the magnetic fluid chamber 53 is not destroyed.

As such, the first bellows chamber is elastically coupled between the support and the outer shaft along the axial direction of the outer shaft, the inner shaft chamber housing coupled to the inner shaft so as to be relatively movable along the axial direction, and the axial direction between the inner shaft housing and the inner shaft. The second bellows chamber is elastically coupled along the magnetic fluid chamber interposed between the inner shaft housing and the inner diameter of the outer shaft to be coupled to each other, thereby effectively blocking the relative movement area that is in contact with each other relative to the outside. Can be.

In addition, the suction hole is formed along the axis of the inner shaft, and the suction nozzle for adsorption of the conveyed object is coupled to the exposed side end of the inner shaft, and the suction hose is coupled to the other end, so that the volume of the coaxial motion device is increased. It is possible to transfer the object to be conveyed without being increased, and to block the relative movement area from the outside.

As described above, according to the present invention, there is provided a coaxial movement apparatus capable of effectively sealing the relative movement region which is in contact with each other relative movement from the outside.

Claims (6)

A coaxial motion device having a cylindrical outer shaft which is supported to allow a predetermined relative movement with respect to a support portion, and an inner shaft that is coaxially accommodated within the outer shaft and that moves relative to the outer axis, wherein the support portion is disposed between the outer shaft and the support shaft. A first bellows seal that is elastically coupled along the axial direction of the outer axis; An inner shaft chamber housing coupled to the inner shaft so as to be movable relative to the inner shaft in an axial direction; A second bellows chamber elastically coupled between the inner shaft housing and the inner shaft along an axial direction; And a magnetic fluid chamber interposed between the inner shaft housing and the inner diameter of the outer shaft. The coaxial motion device according to claim 1, wherein a ball spline mechanism is interposed between the inner shaft housing and the inner shaft. The coaxial motion device according to claim 1, wherein a bellows flange extending in a radial direction is formed in the exposed end regions of the outer shaft and the inner shaft. The coaxial movement apparatus as claimed in claim 3, wherein at least one zero ring is interposed between both ends of the first bellows chamber and the outer shaft. The coaxial movement apparatus according to claim 3, wherein a zero ring is interposed between the bellows flange side end portion of the second bellows chamber and the inner shaft. According to claim 4 or 5, wherein the inner shaft is formed with a shaft hole along the shaft center, the suction nozzle member coupled to the bellows shaft end region of the inner shaft and the opposite side end region of the nozzle member of the inner shaft Coaxial movement device characterized in that it further comprises a suction hose.

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