KR100243038B1 - Gas-knife alignment apparatus and method for producing alignment layer using thereof - Google Patents

Gas-knife alignment apparatus and method for producing alignment layer using thereof Download PDF

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KR100243038B1
KR100243038B1 KR1019970048000A KR19970048000A KR100243038B1 KR 100243038 B1 KR100243038 B1 KR 100243038B1 KR 1019970048000 A KR1019970048000 A KR 1019970048000A KR 19970048000 A KR19970048000 A KR 19970048000A KR 100243038 B1 KR100243038 B1 KR 100243038B1
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gas
alignment
substrate
knife
gas knife
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KR1019970048000A
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KR19990026048A (en
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도용일
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구본준
엘지.필립스 엘시디주식회사
론 위라하디락사
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1337Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/13378Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
    • G02F1/133784Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by rubbing
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1337Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/133711Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by organic films, e.g. polymeric films
    • G02F1/133723Polyimide, polyamide-imide
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1337Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/133753Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers with different alignment orientations or pretilt angles on a same surface, e.g. for grey scale or improved viewing angle

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Liquid Crystal (AREA)

Abstract

본 발명의 배향막 형성방법은, 기판을 제공하는 단계와, 상기한 기판에 PI(polyimide) 등의 고분자막을 도포하는 단계와, 상기한 기판에 가스나이프 배향장치로 가스를 분사하는 단계로 구성된다.An alignment film forming method of the present invention comprises the steps of providing a substrate, applying a polymer film such as polyimide (PI) to the substrate, and injecting a gas into the substrate using a gas knife alignment apparatus.

본 발명에 따른 가스나이프 배향장치는, 가스나이프와, 상기한 가스나이프에 형성되어 압력조절용 압력센서가 장착되어 있고 가스를 분사하는 가스분사홀과, 상기한 가스나이프에 연결되어 가스를 공급하기 위한 가스주입구로 구성된다.The gas knife alignment apparatus according to the present invention is provided with a gas knife, a gas injection hole formed in the gas knife, and equipped with a pressure sensor for pressure regulation and injecting gas, and connected to the gas knife to supply gas. It consists of a gas inlet.

Description

가스나이프 배향장치 및 그것을 이용한 배향막 형성방법Gas knife alignment device and method for forming alignment film using same

본 발명은 가스나이프 배향장치에 관한 것으로, 특히, 액정배향을 위한 배향막을 형성하는데 있어서 가스를 분사하여 배향막을 배향하는 가스나이프(gas knife) 배향장치 및 배향막 형성방법에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gas knife alignment device, and more particularly, to a gas knife alignment device and a method for forming an alignment film by injecting a gas in order to form an alignment film for liquid crystal alignment.

일반적으로, TN-LCD(Twisted Nematic Liquid Crystal Display device)의 액정배향막은 투명전극의 안쪽에 배치되어, 직접 액정분자와 접하고 있다. 액정배향막과 액정분자의 계면에 있어서, 액정분자의 배향은 액정배향막의 일축연신 방법에 의한 액정분자의 일축배향성과 액정배향막과 액정분자가 이루는 각도(프리틸트각(pretilted angle))로 표현하는 것이 가능하다.In general, a liquid crystal alignment film of a twisted nematic liquid crystal display device (TN-LCD) is disposed inside the transparent electrode and directly contacts liquid crystal molecules. In the interface of the liquid crystal alignment film and the liquid crystal molecules, the alignment of the liquid crystal molecules is expressed by the uniaxial alignment of the liquid crystal molecules by the uniaxial stretching method of the liquid crystal alignment film and the angle (pretilted angle) between the liquid crystal alignment film and the liquid crystal molecules. It is possible.

또한, 액정배향막에 일축연신 처리를 하는 수단으로서는 역학적인 연신, Langmuir-Blodgett법, 러빙법(rubbing) 등이 제안되어 있다. 이 중에서 종래의 러빙법은 고분자를 코팅한 기판을 천으로 문지르는 간단한 방법으로 대면적화와 고속처리가 가능하여 공업적으로 널리 이용되고 있는 방법이다.As a means for uniaxially stretching the liquid crystal alignment film, a mechanical stretching, a Langmuir-Blodgett method, a rubbing method, and the like have been proposed. Among them, the conventional rubbing method is a simple method of rubbing a substrate coated with a polymer with a cloth, which is widely used industrially because of its large area and high-speed processing.

종래의 롤러를 사용하여 기판을 러빙배향하는 작업을 나타내는 도면을 도 1에 나타내었다. 종래의 러빙법은 우선, 칼라필터 또는 TFT 등이 부착되는 기판(1)을 제공하고, 상기한 기판에 PI(polyimide)나 PVA(polyvinyl alcohol) 등의 고분자막을 도포하여 배향막(10)을 형성한다. 롤러(20)는 원통형의 롤(21)에 나일론이나 폴리에스테르 등의 섬유질로 이루어진 배향포(23)를 감아 부착시킨다. 상기한 기판(1)을 기판반송장치(도면에 나타내지 않음)에 설치하여 기판진행방향(40)으로 이동시키고, 상기한 롤러(20)를 회전시킴으로써, 기판면을 기계적으로 임의의 방향으로 문지르는 방법이다.1 is a view showing the operation of rubbing orientation of the substrate using a conventional roller. The conventional rubbing method first provides a substrate 1 to which a color filter or TFT is attached, and then forms an alignment layer 10 by applying a polymer film such as polyimide (PI) or polyvinyl alcohol (PVA) to the substrate. . The roller 20 winds and attaches the oriented cloth 23 made of fiber, such as nylon and polyester, to the cylindrical roll 21. As shown in FIG. A method of mechanically rubbing the substrate surface in an arbitrary direction by placing the substrate 1 in a substrate transfer device (not shown) to move in the substrate advancing direction 40 and rotating the roller 20. to be.

상기한 방법으로 기판을 러빙하면, 액정배향막과 액정분자 사이의 반데르 발스힘(Van der Waals force)에 의해 액정분자는 PI사슬의 연신방향에 따라 배향하며, 배제체적 효과(excluded volume effect)에 의해 액정분자는 액정배향막 상에서 자신의 배제체적이 최소가 되도록 변화한 PI사슬에 따라 배열한다. 이것으로부터 액정분자는 러빙방향에 따른 배향을 나타내고, 또 액정분자의 프리틸트각은 러빙방향으로 발생한다.When the substrate is rubbed by the above-described method, the liquid crystal molecules are oriented in the stretching direction of the PI chain by Van der Waals force between the liquid crystal alignment layer and the liquid crystal molecules, and the excluded volume effect Thus, the liquid crystal molecules are arranged in accordance with the PI chain changed on the liquid crystal alignment film so that its exclusion volume is minimized. From this, the liquid crystal molecules exhibit orientation along the rubbing direction, and the pretilt angle of the liquid crystal molecules is generated in the rubbing direction.

상기한 러빙공정에 의해 배향막에 균일한 미세홈(micro grooves)이 형성된다. 이 미세홈은 탄성변형에너지(elastic deformation energy)를 최소화시키도록 액정분자(liquid crystal molecules)를 상기한 미세홈과 평행하게 배열한다. 그러나, 상기한 러빙공정에서는 배향포와 배향막의 마찰강도에 따라 배향막에 형성되는 미세홈의 형태가 달라지게 되기 때문에 액정분자의 배열이 불균일하게 되어 위상왜곡(phase distortion)과 광산란(light scattering)이 발생하게 되는데, 이러한 위상왜곡과 광산란은 LCD의 성능에 중대한 영향을 끼칠 수 있다.By the above rubbing process, uniform micro grooves are formed in the alignment layer. The microgrooves arrange liquid crystal molecules in parallel with the microgrooves so as to minimize the elastic deformation energy. However, in the above rubbing process, since the shape of the microgrooves formed in the alignment layer varies according to the frictional strength of the alignment cloth and the alignment layer, the arrangement of liquid crystal molecules becomes non-uniform, resulting in phase distortion and light scattering. These phase distortions and light scattering can have a significant impact on LCD performance.

상기한 영향을 줄이기 위한 방법으로서, 배향포의 특성은 단위면적당 식모밀도가 높고, 섬유의 길이가 균일하며, 또한 섬유의 직경이 좁고, 러빙시 정전기의 발생이 적어야 한다. 그리고, 유리전이점이 높고, 불순물의 발생이 적으며, 섬유의 빠짐, 안쪽 풀의 이탈 등이 적어야 한다.As a method for reducing the above effects, the characteristics of the alignment cloth should have a high seeding density per unit area, a uniform fiber length, a narrow fiber diameter, and low generation of static electricity during rubbing. In addition, the glass transition point should be high, the generation of less impurities, less fibers, less of the inner pool, etc. should be.

그러나, 이와 같은 종래의 러빙법은 프리틸트각의 값이 성막조건이나 러빙조건에 의하여 미묘하게 변동하기 때문에, 그 실현성에 있어서는 충분한 고려가 필요하다. 더불어 폴리머막을 배향포로 문지르는 방법이기 때문에, 미세한 먼지의 발생이나 고압의 정전기에 의한 미세 방전(ESD, Electrostatic discharge)의 발생이라는 문제가 있다. 먼지는 고정세 화소전극이나 성막, 노광, 에칭의 반복에 의한 TFT(Thin Film Transistor)의 형성공정에 있어서 큰 장애가 된다. 국부적인 방전은 배향막 자체의 손상이나 투명전극이나 TFT의 단선이나 정전기 파괴의 원인이 된다. 그 밖에 TFT용 배향막에는 충전전하를 장시간 유지 가능할 수 있는 전압 보존율이 높아야 하는 특성도 요구된다.However, in the conventional rubbing method, since the value of the pretilt angle fluctuates slightly depending on the film forming condition or the rubbing condition, sufficient consideration is required in the realization thereof. In addition, since the polymer film is rubbed with an alignment cloth, there is a problem of generation of fine dust or generation of electrostatic discharge (ESD) by high pressure static electricity. Dust is a major obstacle in the process of forming a thin film transistor (TFT) by repeating a high definition pixel electrode, film formation, exposure and etching. Local discharge causes damage to the alignment film itself, disconnection of the transparent electrode or TFT, and electrostatic destruction. In addition, the TFT alignment film is also required to have a property of having a high voltage storage ratio, which can maintain charge charge for a long time.

또한, 동작방식에 있어서, 롤러를 높은 rpm(revolution per minute)으로 회전시키면 그 원심력에 의해 배향포가 떨어져 나간다. 그리고, 배향포의 수명이 짧고 포 자체의 많은 올(pile)들의 불균일을 검사할 수 없을 뿐만 아니라, 칼라필터(color filter) 또는 TFT 기판 형성시에 발생되는 단차에 의한 배향 불균일, 배향 스크래치(scratch)가 발생하여 무배향부가 발생되는 문제점이 있다.In addition, in the operation mode, when the roller is rotated at a high revolution per minute (rpm), the alignment cloth is separated by the centrifugal force. In addition, the lifespan of the alignment cloth is short and the nonuniformity of many tiles of the cloth itself can not be inspected, and the alignment nonuniformity and the orientation scratches due to the step generated during the formation of a color filter or a TFT substrate are not possible. ), There is a problem that the non-orientation unit is generated.

본 발명은 상기한 종래 기술의 문제점을 감안하여 이루어진 것으로서, 특히 가스를 분사하여 배향막을 배향하는 가스나이프 배향장치 및 배향막 형성방법을 제공하는 것을 목적으로 한다.SUMMARY OF THE INVENTION The present invention has been made in view of the above-described problems of the prior art, and an object thereof is to provide a gas knife alignment apparatus and an alignment film forming method, in particular, which inject a gas to orient the alignment film.

상기한 목적을 달성하기 위해 본 발명에 따른 가스나이프 배향장치는, 가스나이프와, 상기한 가스나이프에 형성되어 압력조절용 압력센서가 장착되어 있고 가스를 분사하는 가스분사홀과, 상기한 가스나이프에 가스를 공급하는 가스주입구로 구성된다.In order to achieve the above object, a gas knife alignment apparatus according to the present invention includes a gas knife, a gas injection hole formed in the gas knife, and equipped with a pressure sensor for pressure regulation and injecting gas into the gas knife; It is composed of a gas inlet for supplying gas.

본 발명의 배향막 형성방법은, 기판을 제공하는 단계와, 상기한 기판에 PI 등의 고분자막을 도포하는 단계와, 상기한 기판에 가스나이프 배향장치로 가스를 분사하는 단계로 구성된다.The method for forming an alignment film of the present invention includes providing a substrate, applying a polymer film such as PI to the substrate, and injecting a gas into the substrate using a gas knife alignment device.

도 1은, 종래의 롤러를 사용하여 기판을 러빙배향하는 작업을 나타내는 단면도.BRIEF DESCRIPTION OF THE DRAWINGS Sectional drawing which shows the operation | work rubbing orientation of a board | substrate using the conventional roller.

도 2는, 본 발명의 가스를 분사하는 가스나이프 배향장치를 사용하여 배향막을 형성하는 작업을 나타내는 단면도.Fig. 2 is a cross-sectional view showing an operation of forming an alignment film using a gas knife alignment device for injecting the gas of the present invention.

도 3은, 본 발명의 가스나이프 배향장치를 나타내는 정면도.3 is a front view showing a gas knife alignment device of the present invention.

* 도면의 주요부분에 대한 부호의 설명 *Explanation of symbols on the main parts of the drawings

1, 100 : 기판 10, 110 : 배향막1, 100: substrate 10, 110: alignment film

20 : 롤러 21 : 롤20: roller 21: roll

23 : 배향포 40 : 기판의 진행방향23: alignment cloth 40: direction of travel of the substrate

70 : 롤러의 회전방향 200 : 가스나이프 배향장치70: rotation direction of the roller 200: gas knife alignment device

210 : 가스나이프 240 : 가스분사홀210: gas knife 240: gas injection hole

270 : 가스주입구 300 : 가스의 분사방향270 gas injection port 300 gas injection direction

이하, 첨부한 도면을 참조하여 본 발명에 따른 가스나이프 배향장치 및 배향막 형성방법을 상세하게 설명한다.Hereinafter, with reference to the accompanying drawings will be described in detail a gas knife alignment apparatus and an alignment film forming method according to the present invention.

도 2는, 본 발명의 가스를 분사하는 가스나이프 배향장치를 사용하여 배향막을 형성하는 작업을 나타내는 도면이고, 도 3은, 상기한 가스나이프 배향장치의 정면도이다.FIG. 2 is a view showing an operation of forming an alignment film using a gas knife alignment device for injecting the gas of the present invention, and FIG. 3 is a front view of the above-described gas knife alignment device.

동일 도면에 있어서, 본 발명의 가스나이프 배향장치(200)는, 가스나이프(210)와, 상기한 가스나이프에 형성되어 가스를 분사하는 가스분사홀(240)과, 상기한 가스나이프에 연결되어 가스를 공급하는 가스주입구(270)로 구성된다. 가스분사홀(240)에는 압력센서(도면에 나타내지 않음)가 장착되어 있어 가스의 압력을 광범위하게 압력조절이 가능하며, 분사되는 가스의 방향을 자유롭게 0°∼ 360°로 각도조절 할 수 있다. 가스는 보통의 공기를 사용해도 무방하다.In the same figure, the gas knife alignment apparatus 200 of the present invention is connected to the gas knife 210, the gas injection hole 240 formed in the gas knife to inject the gas, and the gas knife It is composed of a gas inlet 270 for supplying gas. The gas injection hole 240 is equipped with a pressure sensor (not shown), it is possible to adjust the pressure of the gas extensively, and the direction of the injected gas can be freely adjusted from 0 ° to 360 °. The gas may be ordinary air.

그리고, 본 발명의 가스나이프 배향장치를 이용하여 배향막을 형성하는 방법은, 우선 칼라필터 또는 TFT 등이 부착되는 기판(100)을 제공하는 단계와, 상기한 기판에 PI 등의 고분자막을 도포하는 단계와, 상기한 기판에 가스나이프 배향장치(200)로 가스를 분사 하므로써 배향막(110)을 형성하는 단계로 구성된다.In addition, a method of forming an alignment layer using the gas knife alignment apparatus of the present invention may include providing a substrate 100 to which a color filter or a TFT is attached, and applying a polymer film such as PI to the substrate. And forming an alignment layer 110 by injecting a gas into the gas knife alignment apparatus 200 on the substrate.

상기한 방법으로 배향막을 형성하면, 종래의 배향포를 이용한 러빙법에서의 문제점을 다양한 각도에서 해소할 수 있다. 첫째, 러빙포와 배향막이 형성된 기판이 직접 접촉하지 않으므로 배향불량이 감소하고, 둘째, 사용하는 가스가 특별히 한정된 것이 아니므로 배향포를 제조하여 사용하는 경우보다 원가를 절감할 수 있으며, 셋째, 가스분사홀의 압력센서로서 가스의 압력을 자유롭게 조절하여 배향막의 배향정도를 적절하게 할 수 있으며, 넷째, 분사시간을 조절하므로써 배향막의 배향각도를 조정할 수 있다.When the alignment film is formed by the above method, the problem in the rubbing method using a conventional alignment cloth can be solved at various angles. First, since the rubbing cloth and the substrate on which the alignment layer is formed are not in direct contact with each other, the alignment defect is reduced. Second, since the gas used is not particularly limited, the cost can be reduced compared to the case of manufacturing and using the alignment cloth. Third, gas injection As the pressure sensor of the hole, the pressure of the gas can be freely adjusted to appropriately adjust the alignment degree of the alignment film. Fourth, the alignment angle of the alignment film can be adjusted by adjusting the injection time.

본 발명은 상기한 바와 같이, 가스를 분사하는 가스나이프 배향장치를 사용하여 배향막을 형성 하므로써, 배향포 불균일로 인한 결함을 감소시킬 수 있을 뿐 아니라 원가 또한 절감시킬 수 있다. 그리고, 배향포를 사용하지 않음으로써 배향포 자체의 불량 이외에 기판에 생기는 먼지, 정전기 등으로 인한 문제가 없고, 기판 돌출부에 의한 스크래치 및 무배향부의 발생을 완전히 제거하게 되므로 액정표시소자의 배향불량을 최소화할 수 있다. 따라서 액정분자의 불균일로 인한 위상왜곡 및 광산란 등의 원론적인 문제점을 해결할 수 있는 효과가 있다.The present invention, as described above, by forming the alignment film using a gas knife alignment apparatus for injecting gas, not only can reduce defects due to non-uniform alignment cloth, but also can reduce the cost. By not using the alignment cloth, there is no problem caused by dust, static electricity, etc. generated on the substrate other than the defect of the alignment cloth itself, and the occurrence of scratches and non-orientation parts caused by the protrusions of the substrate are completely eliminated. It can be minimized. Therefore, there is an effect that can solve the fundamental problems such as phase distortion and light scattering due to non-uniformity of the liquid crystal molecules.

Claims (5)

가스나이프와,Gas knife, 상기한 가스나이프에 형성되어 가스를 분사하는 가스분사홀과,A gas injection hole formed in the gas knife to inject gas; 상기한 가스나이프에 연결되어 가스를 공급하는 가스주입구로 구성된 가스나이프 배향장치.A gas knife alignment device comprising a gas injection port connected to the gas knife to supply gas. 제1항에 있어서, 상기한 가스분사홀에 압력조절용 압력센서가 장착되어 있는 것을 특징으로 하는 가스나이프 배향장치.2. The gas knife alignment device according to claim 1, wherein a pressure sensor for pressure adjustment is mounted in the gas injection hole. 제1항에 있어서, 상기한 가스가 공기인 것을 특징으로 하는 가스나이프 배향장치.The gas knife alignment apparatus according to claim 1, wherein said gas is air. 기판을 제공하는 단계와,Providing a substrate, 상기한 기판에 고분자막을 도포하는 단계와,Applying a polymer film to the substrate; 상기한 기판에 가스나이프 배향장치로 가스를 분사하는 단계로 구성된 배향막 형성방법.And injecting gas into the substrate with a gas knife aligning device. 제4항에 있어서, 상기한 고분자막이 PI(polyimide)인 것을 특징으로 하는 배향막 형성방법.The method of claim 4, wherein the polymer film is PI (polyimide).
KR1019970048000A 1997-09-22 1997-09-22 Gas-knife alignment apparatus and method for producing alignment layer using thereof KR100243038B1 (en)

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