KR100238738B1 - Working management device and method - Google Patents

Abstract

A storage device for storing data on various conditions restricting the work, a work order predicting unit for predicting the flow of work by forming a module of a manufacturing line based on data stored in the storage device, and a work order predicting unit A worker allocating unit for allocating a work resource suitable for the work level based on the result of the prediction and creating a work plan, and a terminal device for giving a work instruction to the worker based on the work plan created by the worker allocating unit, A job management apparatus for predicting a processing sequence for a plurality of processing steps, assigning a job, and instructing a worker according to the assignment result is described.

Description

Work management apparatus and method for performing prediction of processing order and assigning work

In the present invention, when a plurality of processing steps are executed in a predetermined order to manufacture a product, a job management device for predicting the processing order, assigning a job, and instructing a job according to the assignment result, and a management method thereof The present invention relates to a job management apparatus and a management method suitable for managing a manufacturing process that repeatedly executes the same processing process such as a semiconductor device manufacturing process.

In the manufacturing process of the semiconductor device, for example, a film is grown on a wafer by physical or chemical means, the pattern is plated, and the film is etched repeatedly. That is, a semiconductor device is manufactured by repeatedly executing the same processing process. The worker is responsible for investigating the product being processed, the preprocessing product not placed in the facility, and the product being processed in several processes, and working efficiently based on experience and feeling regarding his machine. Determine the order of processing and work on the results.

However, in the above method, there are so many parts that rely on experience and feeling, and it was not possible to judge whether or not the derived work order is effective unless it is actually executed. In addition, even in the production line of today's complicated semiconductor device, even a person skilled in the art has difficulty in determining the processing order and allocating the number of work steps by considering the entire manufacturing line.

Therefore, conventionally, the means which manages a manufacturing line and mechanically performs the determination process of the process order and distribution of the work process number is proposed. As this kind of conventional technology, for example, there is a technique disclosed in Japanese Patent Laid-Open No. 62666, "Production Planning Method". In the above publication, a method of producing a production plan by automatically performing a process number calculation, a personnel calculation, a plan preparation, and other tasks in accordance with a production plan is proposed. As another conventional technique, there is a technique disclosed in Japanese Patent Application Laid-Open No. 2,85958, "Load Adjustment Method." In the same publication, at three levels of the wick center, the worker, and the machine (machine), work allocation is performed regardless of the processing capacity, and the load is distributed, and the method of examining the feasibility of the manufacturing plan in response to the inquiry of the load situation. Is being proposed.

The conventional manufacturing line management technique described in the above publication is a work flow, such as an assembly line, when calculating the equipment and time (hereinafter, referred to as facility capacity) required for work by loading loads. In the (job flow) type, if the working conditions are a constant production line, the facility capacity can be calculated with a certain degree of precision. However, in a job-shop type, such as a manufacturing process of a semiconductor device, in a production line in which work conditions change according to varieties and work processes, it is not possible to accurately calculate the facility capacity by the load of the load. There was a problem.

Moreover, even if it is the same installation, the operation in the manufacturing equipment of a semiconductor device may differ in working conditions. And depending on the working conditions, the capability required of the operator may also be different in the same facility. In addition, since the structure of the installation itself is complicated, the facility which manufactures a semiconductor device does not say that anyone can operate easily. For this reason, there is a problem that the work is concentrated on a specific worker, depending on how the product is moved. In addition, even if the required number of work steps can be calculated, there is a possibility that a situation exists in which there is no worker who can actually work.

In addition, the working conditions which can be worked on the basis of the level of the equipment may be limited, and in reality, even if the desired equipment is empty, the working conditions of the product which are being processed in the process before the equipment can not work. In some cases.

Moreover, in the manufacturing technology of semiconductor devices, since the manufacturing equipment itself of a semiconductor device is comprised of precision machines, after performing work regularly or a fixed number of times, the equipment of a facility is stopped and a regular inspection or maintenance work or other equipment is carried out. It is necessary to perform maintenance. In the above case, the schedule of maintenance of a facility changes with the movement of the manufacturing process of a product. In addition, since the manufacturing facility itself is comprised of precision machines as described above, it is not said that anyone can work because special skills and skills are required for maintenance work. Corresponds. For this reason, the same problem as that of the said product operation | work has arisen.

As described above, in the manufacturing line of the semiconductor device, it is very difficult to perform the work of calculating the facility capacity and determining the necessary work resources by the human hand because of the complicated flow of the product. Moreover, even the method using the load of the load by the conventional management technique which manages a manufacturing line automatically does not reach the conventional problem enough. For this reason, the manufacturing line of a semiconductor device has the drawback that the resource of a manufacturing line and an operator cannot fully be utilized, and the manufacturing capability of a manufacturing line cannot be fully drawn out.

The object of the present invention is to solve the above-mentioned drawbacks and to accurately predict the flow of the product, thereby making it possible to allocate the correct work resources to the work prediction, and to realize the efficient use of the equipment used for the work. It is to provide a task management apparatus and its management method to improve productivity.

Another object of the present invention is to provide a work management apparatus and a method of managing the same, by which work resources are allocated within the scope of the owned work resources, thereby preventing an excessive load on the worker. .

The work management device of the present invention has the following requirements in an apparatus for predicting a processing order for a plurality of processing steps, assigning a job, and giving a work instruction to an operator according to the assignment result.

Storage means for storing data relating to various conditions for constraining the work; work order predicting means for predicting the flow of work by creating a module of a manufacturing line based on data stored in the storage means; Worker assignment means for allocating a work resource suitable for the job level and creating a work plan based on the prediction result, and instructing means for giving a work instruction to a worker based on the work plan created by the worker assignment means.

According to a preferred aspect, the storage means comprises: product data storage means for storing data relating to a manufacturing operation of the product, facility data storage means for storing data relating to the equipment required for the operation, and data for the worker; A product name database comprising worker data storage means and a production line state storage means for storing data relating to a state of work in the production line, wherein the product data storage means has a list of names of products that can be manufactured; And a production flow working condition database which stores, as one entry, the equipment group to be used for the product workflow and individual work processes, and the working condition to be performed in the equipment group by linking to the product name database. Link, and, for each product name, the schedule of inputting the product into the manufacturing line and Store a manufacturing calendar that remembers the number of products.

According to a preferred aspect, the storage means stores product data storage means for storing data relating to a manufacturing operation of the product, facility data storage means for storing data relating to the equipment required for the work, and data to be viewed by an operator. Worker data storage means and a production line state storage means for storing data relating to the state of work in the production line, wherein the facility data storage means groups equipment existing in the production line by the same function. The equipment group database storing the equipment group name corresponding to the equipment group name and the equipment group name as one entry, and the equipment name and the equipment name constituting the equipment group by linking to the equipment group database. Facility database which stored machine number of facilities corresponding to Linked to the equipment group database, at least, for each of the equipment groups, a work condition code indicating the work content, the work time which is the time to restrain the worker before the start of work, the work time which is the time to restrain the equipment after the work starts, and the work end The work condition database, which stores the post-work time, which is the time to restrain the worker later, the work level indicating the difficulty of the work, and the machine number of the equipment that can work, and the equipment group database, are linked to the same equipment group. For each of the facilities included, a facility that stores the date and time when the facility is stopped for maintenance of the facility, the date and time for starting the facility, and information about the cycle maintenance, maintenance time, and work level as information on facility maintenance. Save your calendar.

According to a preferred aspect, the storage means comprises: product data storage means for storing data relating to a manufacturing operation of the product, facility data storage means for storing data relating to the equipment required for the work, and an operator for storing data relating to an operator. A data storage means and a production line state storage means for storing data relating to the state of work in the production line, wherein the worker data storage means includes a name of a worker operating the equipment in the production line, the worker A worker database for storing a work code for recognizing the work code, a work code for specifying the work time of the worker as one entry, a work calendar for storing the work date and time for each work code, linked to the worker database; Linking to the worker database, the worker code The work is workable level and save the jobs database storage capacity.

According to a preferred aspect, the storage means comprises: product data storage means for storing data relating to a manufacturing operation of the product, facility data storage means for storing data relating to the equipment required for the operation, and data for the worker; Lots for each product name which has worker data storage means and manufacturing-line state storage means which stores data regarding the state of the operation in a manufacturing line, and the said manufacturing-line state storage means is processing in the said manufacturing line. The lot number database which stored the number, and the lot number database which linked to the said lot number database, and stored the work process sequence for each lot number, the start date and time of each operation | work, the end date and time, and the machine number of the facility which carries out work | work. (Iii) Save the history database.

According to another preferred aspect, the work order predicting means creates a facility module corresponding to the facility in a production line module corresponding to the actual production line based on data relating to the facility required for the job. Create a plant running module that shows the operational status of the plant to predict the flow of work.

According to another preferred aspect, further comprising obstacle storage means for storing data relating to the failure of the facility, wherein the work order predicting means corresponds to the manufacturing line of the snowmaking machine based on data relating to the facility required for the job. In the production line module, a facility module corresponding to the facility is created, and a facility operation module indicating an operation state of the facility is created to predict the flow of work, and with reference to the data stored in the obstacle storage means, The repair time for a fault of the facility is searched out, a facility maintenance module corresponding to the repair time of the fault is created, and the operation state module is loaded to predict a work sequence.

According to another preferred aspect, the work order predicting means creates a facility module corresponding to the facility in a production line module corresponding to the actual production line based on data relating to the facility required for the job. A facility start module indicating the operation state of the facility is created to predict the flow of the work, and at the same time, the buffer module of the facility module buffers the data indicating the processing state of the job, and a buffer indicating the processing state of the job. Priority is added to the module, and the processing order is determined according to the added priority.

The work management method of the present invention which achieves the above object comprises: predicting a processing sequence with respect to a plurality of processing steps; The following steps are included in a work management method of assigning a work and instructing a worker according to the assignment result.

Storing data to be browsed under various conditions restricting the work; predicting the work flow by creating a module of the manufacturing line based on the data stored in the storage step; predicting by the work order predicting step Based on a result, allocating a work resource having a matching work level to create a work plan, and giving a work instruction to the worker based on the work plan created by the worker assignment step.

According to a preferred aspect, the work order predicting step includes the steps of creating a facility module corresponding to the facility in a production line module corresponding to the actual production line, based on data relating to the facility required for the job; Creating a facility operating module indicating an operational state of the device and predicting the flow of the job; buffering data indicating the processing status of the job by the buffer module of the facility module; and further buffering the processing status of the job. Adding a priority to the module and sorting the beeper module according to the priority prior to the execution of the step of predicting the flow of work.

Further objects, features and effects of the present invention will become apparent from the following detailed description.

1 is a block diagram showing a configuration of a job management apparatus according to an embodiment of the present invention.

2 is a block diagram showing the data structure of the product data storage section of this embodiment.

FIG. 3A is a diagram showing an example of a data table format of a manufacturing flow / work condition database in the product data storage section of this embodiment.

FIG. 3B is a diagram showing an example of a data table format of a production calendar in the product data storage section of this embodiment.

Fig. 4 is a block diagram showing the data structure of the facility data storage of this embodiment.

5A is a diagram showing an example of a data table format of a facility group database in the facility data storage of this embodiment.

FIG. 5B is a diagram showing an example of the data table format of the facility database in the facility data storage of the embodiment. FIG.

FIG. 5C is a diagram showing an example of a data table format of a work condition database in the facility data storage of the embodiment. FIG.

FIG. 5D is a diagram showing an example of the data table format of the facility calendar in the facility data storage of the embodiment. FIG.

Fig. 6 is a block diagram showing the data structure of the worker data storage of this embodiment.

FIG. 7A is a diagram showing an example of a data table format of a worker database in the worker data storage of this embodiment.

FIG. 7B is a diagram showing an example of the data table format of the work calendar in the worker data storage of this embodiment.

FIG. 7C is a diagram showing an example of the data table format of the work ability database in the worker data storage of the embodiment. FIG.

Fig. 8 is a block diagram showing the data structure of the manufacturing line state storage section of this embodiment.

FIG. 9A shows an example of a data table format of a lot number database in the worker data storage of this embodiment.

Fig. 9B is a diagram showing an example of the data table format of the job history database in the worker data storage unit of the present embodiment.

10 is a flowchart showing a process of the work order predicting unit modularizing a production line according to the present embodiment.

11 is a diagram showing an example of the configuration of a manufacturing line module.

FIG. 12 is a diagram showing an example of the configuration of a facility group module in the manufacturing line module shown in FIG.

13 shows an example of manufacturing group module forming a lot instruction module.

14 shows an example of a manufacturing group buffer module forming a lot instruction module.

Fig. 15 is a diagram showing an example of the configuration of an input module.

FIG. 16A is a diagram showing an example of the configuration of a buffer module before input in the input module of FIG. 15; FIG.

FIG. 16B is a diagram showing an example of the configuration of a buffer for waiting for input in the input module of FIG. 15; FIG.

FIG. 17 is a diagram showing an example of the configuration of a facility operation module. FIG.

18A is a diagram showing an example of the configuration of a facility running module to which a facility maintenance module is attached.

18B is a diagram showing an example of the configuration of a facility running module to which a work module is attached.

19 is a flowchart for explaining a process of the work order predicting unit predicting a work using the manufacturing line module.

20 is a flowchart showing processing of a job start event.

21 is a flowchart showing processing of facility maintenance maintenance event.

22 is a flowchart showing processing of a job end event.

23 is a flowchart showing processing of an input event.

Fig. 24 is a flowchart showing the process of the worker allocating unit in the case of accepting a request of a work resource.

FIG. 25A is a diagram showing an example of the configuration of a data table in a processing sequence storage unit; FIG.

25B is a view showing an example of the configuration of the work module of FIG. 25A.

Fig. 26 is a diagram showing a display example of a display screen of a terminal device;

27 is a diagram showing another example of display of a display screen of a terminal device;

28 is a diagram showing still another example of the configuration of a production line in the present embodiment.

29 is a diagram showing another example of the configuration of the facility data storage unit in the present embodiment.

30 is a diagram showing an example of the data table format of the obstacle database shown in FIG. 29;

FIG. 31 is a diagram showing another configuration example of the lot indicating module present in the equipment group buffer module in the equipment group module. FIG.

FIG. 32 is a flowchart used to explain the processing of a job start event performed in consideration of the priority shown in FIG. 31;

<Explanation of symbols for main parts of drawing>

10: central processing unit 20: storage unit

30: terminal device 40: network

50: manufacturing line

Preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a block diagram showing the configuration of a job management apparatus according to an embodiment of the present invention.

Referring to Fig. 1, the job management apparatus of this embodiment stores a central processing unit 10 that performs prediction of work orders and assigns jobs, and various data used for processing by the central processing unit 10. One storage device 20 and a terminal device 30 for the administrator to operate the central processing unit 10 or output the processing result by the central processing unit 10 are provided. In addition, the central processing unit 10 is connected to the production line 50 via the network 40. In addition, only the characteristic structure in this Example is described in FIG. 1, and description is abbreviate | omitted about another general structure.

The storage device 20 includes a product data storage unit 21 storing a product name, a production flow, a production condition, and a production of a product, a facility data storage unit 22 storing a manufacturing capability of a facility, and a worker's working time. And a worker data storage section 23 that stores work capability, and a manufacturing line state storage section 24 that sequentially stores the state change of a product being processed in the manufacturing line 50. The state change of the product stored in the manufacturing line state storage unit 24 includes the central processing unit (starting time and ending time of the product processing work transmitted from the facility 51 in the manufacturing line 50 via the network 40). Obtained by treatment in 10). The storage device 20 is realized in an external storage device other than the magnetic disk device, and each of the storage units 21 to 24 is controlled by the central processing unit 10.

The central processing unit 10 predicts the working order of the product during the processing in the manufacturing line 50 based on various data stored in the storage units 21 to 24 of the storage device 20. A processing sequence memory for storing the page predicting unit 11, the worker allocating unit 12 for allocating individual manufacturing work to the worker, and the processing sequence calculated by the work order predicting unit 11 and the worker allocating unit 12; The part 13 is provided. In the above configuration, the work order predicting unit 11 and the worker assigning unit 12 are realized by a CPU, a RAM, and other internal memory controlled by a computer program. The computer program is stored and provided in a storage medium other than a magnetic disk or a semiconductor memory, and is loaded into an internal memory to realize the work order predicting unit 11 and the worker assigning unit 12. The processing order storage unit 13 is realized by an external storage device other than a RAM or other internal memory or a magnetic disk device.

Next, the data structure of the various data stored in each of the storage units 21 to 24 of the storage device 20 will be described.

FIG. 2 shows a database structure of the product data storage unit 21, and FIGS. 3A and 2B show an example of a data table format. In the product data storage unit, FIG. The manufacturing flow working condition database 212 of a product is linked to the product name database 211 which memorize | stored the list of the names (product name) of the product which can be manufactured in. In addition, for each product in the product name database 211, the production calendar 213 which memorize | stores the number of products put into the manufacturing line 50, and a schedule is linked.

As shown in Fig. 3A, the manufacturing flow working condition database 212 includes a product work flow (work process code, work process name) for each product name, an equipment group (work equipment code) used in individual work processes, and The work conditions (work condition codes) performed in the equipment group are stored as one entry. In addition, as shown in Fig. 3B, the production calendar 213 stores a schedule and a lot number for inserting a product for each product name.

4 shows a database structure of the facility data storage 22, and FIGS. 5A to 5D show an example of a data table format. Referring to FIG. 4, the facility database 222, the working condition database 223, and the facility calendar 224 are linked to the facility group database 221 in which the facilities 51 in the manufacturing line 50 are grouped. Doing.

As shown in Fig. 5A, in the equipment group database 221, the equipment group name (equipment group name) in which the equipment 51 existing in the manufacturing line 50 is grouped by the same function, and the equipment group name The corresponding equipment group code is stored as one entry. In addition, as shown in FIG. 5B, in the facility database 222, the name of the facility constituting the facility group (equipment name) and the machine number of the facility corresponding to the facility name are stored. In addition, as shown in Fig. 5C, the work condition database 223 includes work condition codes indicating work contents for each equipment group, work preliminary time which is a time for restraining an operator before work commence, and equipment constrained after work commencement. The work time which is a time, the post-work time which is a time which restrains an operator after completion | finish of a work, the work level which shows the difficulty of a work, and the machine number of the equipment which can perform the work are memorized, respectively. In addition, as shown in FIG. 5D, the facility calendar 224 includes, for each facility included in the same facility group, a date and time for stopping the facility, a date and time for starting the facility, and facility maintenance and maintenance for facility maintenance and maintenance. The cycle work number, maintenance maintenance time, and work level are stored as information about.

6 shows a database structure of the worker data storage unit 23, and FIGS. 7A to C show an example of a data table format. Referring to FIG. 6, the work calendar 232 and the work ability database 233 are linked to a worker database 231 which stores a worker who operates the facility 51 in the production line 50.

As shown in FIG. 7A, in the operator database 231, the name of the operator operating the facility 51 in the manufacturing line 50, the worker code for recognizing the worker, and the work time for specifying the worker's working time. The code is stored as one entry. As illustrated in FIG. 7B, the work date and time for each work code is stored in the work calendar 232. In addition, as shown in FIG. 7C, a work level capable of working for each worker code is stored in the work capability database 233.

8 shows a database structure of the manufacturing line state storage unit 24, and FIGS. 9A and 9B show an example of a data table format. Referring to FIG. 8, the job history database 242 links to a lot number database 241 that stores a lot number for identifying a product that is being processed in the manufacturing line 50.

As shown in FIG. 9A, the lot number database 241 stores the lot number for each product name currently being processed in the manufacturing line 50. As shown in FIG. In addition, as shown in Fig. 9B, in the work history database 242, the work process sequence expressed by the work process code for each lot number, the start date and time, the end date and time of the individual work, and the machine number of the facility in charge of the work are shown. I remember.

Next, the processing of the work order predicting unit 11 and the worker allocating unit 12 in the present embodiment will be described in detail with reference to the drawings.

10 is a flowchart showing a process in which the work order predicting unit 11 modularizes the production line 50. 11 to 18 are diagrams showing the configuration of the module created by the work order predicting unit 11. 11 and 12 show an example of the configuration of the production line module, FIG. 13 and FIG. 14 show an example of the ready-made of the production line module in which the lot instruction module is created, and FIGS. 15 and 16 show an example of the configuration of the input module. Fig. 17 shows an example of the configuration of the facility operation module, and Fig. 18 is a diagram showing an example of the configuration of the facility maintenance module or the facility operation module with the module in operation.

Referring to the flowchart of FIG. 10, the work order predicting unit 11 requests the storage data stored in the facility data storage unit 22 in accordance with a predetermined start timing and a prediction period (step 1001). The start timing and the preliminary period are set in advance based on the data input from the terminal 50 via the user interface unit 14.

When the data concerning the facility is transmitted, the work order predicting unit 11 creates the manufacturing line module 71 (step 1002). The production line module 71 refers to a module for virtually representing the actual production line 50. An example of a manufacturing line module is shown in FIG.

In the production line module 71, the equipment group module 72 is created based on the equipment group data read from the equipment group database 221 (see FIG. 4). Referring to Fig. 11, E01, E02, etc. of the facility group module 72 correspond to the facility group code of each facility group name stored in the facility group database 221 (see Fig. 5A).

Next, as shown in FIG. 12, the work order predicting unit 11 includes a facility group buffer module 73 in which a lot before work is collected in the facility group module 72, and a facility database 222 (FIG. The equipment module 74 based on the machine number data of the equipment memorize | stored in (4) is created (step 1003 of FIG. 10). In the installation group module 72 shown in FIG. 12, the numbers "001", "002", and "003" attached to the installation module 74 represent machine numbers of the installation.

Next, the work order predicting unit 11 requests the stored data stored in the manufacturing line state storage unit 24 (step 1004). And based on the data transmitted from manufacturing line state data, the lot instruction module 81 which instructs the installation module 74 and the installation group buffer module 73 by the said installation instructing the lot in process and the lot before a work. 13 and 14 (step 1005). Referring to Fig. 13, the lot indicating module 81 of lot number N0000001 exists in the facility of machine number "002", and the lot indicating module of lot number N0000006 exists in the facility of machine number "004". When the lot instruction module 81 is created in the equipment group module, the equipment group buffer module 73 is first created in the equipment group buffer module 73, since the end time of all the processes stored in the work history database 502 (see FIG. 10) is early. Regarding the process at which the work end time to be performed is the same time, for example, the lot instruction module 81 having a small lot number is first created in the facility group buffer module 73.

After creating the lot instruction module 81, the work order predicting unit 11 requests manufacturing data from the product data storage unit 21 (step 1006). Then, when the data is received from the product data storage 21, in order to create the input lot corresponding to the production calendar database 213 and the number of inputs up to the preset prediction period, in the production line module 71, The injection module 91 (refer FIG. 15) is created in the manufacturing line module 71 (step 1007). At this time, the data (product name, input water, input date) in the introduced manufacturing calendar 213 (see Fig. 2) is stored in the buffer module 92 (see Figs. 15 and 16A) before input. Then, the stored data is passed through a filter of the counter 903 (see FIG. 15), a lot number is added, and stored in the input standby buffer module 94 (see FIG. 15 and FIG. 16B) to be used for input. The lot instruction module is created (step 1007 of FIG. 10).

Next, the facility start module 101 (refer FIG. 17) for expressing the operation situation within the forecast period of each facility is created (step 1008). And based on the data of the facility calendar database 304, the facility maintenance module 111 (refer FIG. 18A) is created in the facility operation module 101 (step 1009).

Finally, in the facility start module 101 corresponding to the facility module 74 in which the lot instruction module 81 is present, the job start time in the job history database 242 and the manufacturing flow job condition database 212. The remaining work time is calculated on the basis of the work condition code in the work time and the work time in the work condition database 223, thereby creating a working module 112 (see FIG. 18B) (step 1010).

By the above steps, the state in the manufacturing line 50 is represented in the manufacturing line module 71 shown in FIG.

Next, the operation prediction of the product based on the manufacturing line module 71 created at the said process is demonstrated. 19 is a flowchart for describing a process of the work order predicting unit 11 predicting work using the production line module 71.

Referring to FIG. 19, first, the time in the manufacturing line module 71 is advanced in unit time (step 1901). Next, the unit time progresses to see if there is any event. If no event occurs, the time in the manufacturing line module 71 is also advanced in unit time (step 1902). If an event has occurred, the corresponding event processing is executed (step 1903).

It is checked whether a work resource is required for the event processing to be executed next (step 1904), and if the work resource is needed, the time in the manufacturing line module 71 is further advanced in unit time. On the other hand, when a work resource is needed, the work order predicting unit 11 requests the work allocating unit 12 for the work resource (step 1905).

The job allocating unit 12 satisfies the condition requested by the work order predicting unit 11 and searches for a worker whose resources are empty. The search result is returned to the work order predicting unit 11. At that time, if there is no work resource, the work order predicting unit 11 returns the event-processed information to its original state and advances the time in the manufacturing line module by unit time (steps 1906 and 1908). If there is a work resource, the information is stored in the processing order storage unit 13 (step 1907).

The above processing is repeated until the time in the manufacturing line module 701 reaches a predetermined time (step 1909).

Next, individual events will be described with reference to the drawings.

20 is a flowchart illustrating processing of a job start event. Referring to FIG. 20, first, each facility group module 72 checks the presence or absence of a facility in which the lot instruction module 81 does not exist in the facility module 74 in the facility group module 72, that is, a facility that does not perform a manufacturing operation. Check each time (step 2001).

If the space facility module 74 exists, it is checked whether the lot instruction module 81 exists in the facility group buffer module 73 in the facility group module 72 in which the facility module 74 is present (step 2002). ). And when the lot instruction module 81 exists in the equipment group buffer module 78, from the lot instruction module (refer FIG. 13 and FIG. 14) which exists in the OUT side of the equipment group buffer module 78, product data is carried out. Based on the storage unit 21 and the production line state storage unit 24, the working conditions to be performed are checked, and the facility data storage unit 22 confirms whether or not work can be performed on the facility (step 2003). ).

If the work can be executed in the facility, the lot indicating module 81 in the facility group buffer module 73 is moved to the facility module 74 (step 2004). In response, a module under operation is created in the facility operation module (step 2005).

In the determination of step 2003, when the lot instruction module 81 existing on the OUT side in the equipment group buffer module 78 cannot work with the equipment due to the working condition, the operation of the other lot instruction module 81 is performed. Check for presence (step 2006). If there is another lot instruction module 81, the next lot instruction module 81 in the facility group buffer module 73 determines whether work is allowed (step 2007).

21 is a flowchart illustrating the processing of a facility maintenance event. First, when the lot instruction module 81 exists in the facility module 74 in the manufacturing line module 71, in the facility operation module 101 of the facility, the module 112 and facility maintenance during operation are performed. It is checked whether the modules 111 overlap with each other (step 2101). If there is overlap, the equipment maintenance module 111 is moved behind the module 112 during operation (step 2102).

Next, the production line state storage unit 24 and the work order predicting unit 111 determine the number of operations of each facility, and the maintenance items stored in the facility calendar 224 in the facility data storage unit 22. It is checked whether or not it matches the number of operations of (step 2103). If there is a match, the facility maintenance module 111 is added after the operation module 112 in the facility operation module 101 of the facility (step 2104). If the facility maintenance module 111 is continuous, the logic without insertion can also be applied.

22 is a flowchart illustrating processing of a job end event. First, whether or not the end time of the module 112 in operation on the facility operation module 101 in the facility module 74 in which the lot instruction module 81 is present and the time in the manufacturing line module 71 are the same. Check (step 2201). If the time is the same, the lot instruction module 81 is removed from the equipment module 74, outputted from the OUT side of the equipment group module, and the following equipment group is followed in accordance with the manufacturing flow stored in the product data storage 21. Move to buffer module 73 (step 2202). The moved lot indicating module 81 sorts so as to stand side by side on the OUT side from the product having the quick end time, with the key work end time of the other lot indicating module 81 present in the facility group buffer module 78 as a key.

23 is a flowchart illustrating processing of an input event. First, it is checked whether or not the input date stored in the input module 91 in the input module 91 and the year and month date in the manufacturing line module 71 are the same (step 2301). The lot instruction module 81 is created from the module 92, and the lot instruction module 81 is moved to the corresponding facility group buffer module 73 according to the manufacturing flow stored in the product data storage 21. (Step 2302).

Next, the assignment of work resources will be described.

Event conditions that require a worker's resources are processing before the start of the facility work, processing after the end, and processing at the time of maintenance of the facility. That is, if an event of start of work, end of work, or start of facility maintenance has occurred, the work order predicting unit 11 requests a work resource from the worker assignment unit 12. 24 is a flowchart showing the process of the worker allocating unit 12 in the case of accepting a request for a work resource.

First, a worker on duty is retrieved from the data stored in the worker data storage unit 23 using the date and time of occurrence of the event (step 2401). If a worker on the job is detected, a worker capable of working at the job level of the event is searched among the detected workers (step 2402). When the worker who can perform the work is detected, the worker who has a free time for executing the event among the detected workers is searched from the processing order storage unit 13 (step 2403). Next, the number of workers corresponding to the condition detected in step 2403 is checked (step 2404), and when a plurality of workers corresponds, for example, based on the data stored in the processing sequence storage unit 13. Then, the minimum worker of the workload is selected (step 2405).

Next, the method of storing the information of the work resource determined for every event by the process mentioned above is demonstrated.

When the worker assignment unit 12 determines the worker resource for the event, the worker assignment unit 12 stores the information in the processing order storage unit 13. 25 shows an example of a data table in the processing sequence storage unit 13. The worker code stored in the worker data storage unit 23 is stored in the processing sequence storage unit 13. When the work assigned to the worker is determined, the work condition database stored in the facility data storage 22 is based on the work contents corresponding to the event for which the work resource is requested for the table 121 for the worker. 223 (see FIG. 4), the pre-work time or the post-work time, or the work module 122 of the time corresponding to the maintenance item time of the facility calendar 224 (see FIG. 4) is created and stored. The work content, the lot number, and the work process code are stored in the work module 122 for work start and work end. In addition, in the work module 122 for facility maintenance, the facility content and facility code of the facility for performing maintenance are stored.

By the above process, the operation which predicts the event which generate | occur | produces by the manufacturing line 50, allocates and stores the work resource which the event requires is completed.

Next, the means for transmitting the data obtained as described above to the worker in the production line 50 will be described.

26 and 27 show examples of display screens of the terminal device 30. Referring to Fig. 26, by inputting a facility code as a retrieval key, the data of the processing sequence storage unit 13 is retrieved and based on the detected data, the product data storage unit 21 and the worker data storage unit 23 are displayed. Link with the data stored in. Then, entries consisting of the fields of the job, the lot number, the scheduled work time, the work content, and the worker's name are displayed in the time series of the scheduled date and time for each work content such as work start, work, work end, and equipment maintenance. In addition, in the display screen shown in FIG. 27, by inputting an operator code as a search key, the data of the processing sequence storage unit 13 is searched for and based on the detected data, the product data storage unit 21 and the facility data storage. It links with the data stored in the section 22. Then, entries consisting of the fields of the job, the lot number, the scheduled work date and time, the work facility name, and the work content are displayed in the time series of the scheduled date and time for each work content. According to the above display, the operator can be instructed after the next work.

28 is a diagram showing another example of the configuration of the production line 50 in the present embodiment.

Referring to FIG. 28, in the production line 50, a radio transmitter 52 is connected to a network 40 connected to the central processing unit 10. When the date and time indicated by the clock function of the central processing unit 10 coincides with the scheduled time stored in the processing sequence storage unit 13, or when the time becomes earlier than the predetermined time by a preset time, the processing sequence Based on the data in the storage unit 13, an instruction is given from the central processing unit 10 to the radio transmitter 52 via the network 40. The radio transmitter 52 wirelessly transfers an instruction to a radio terminal device (pager or the like) owned by an operator corresponding to the transmitted data, and displays the work content on the display unit of the radio terminal device to perform an operation instruction.

FIG. 29 is a diagram showing another example of the configuration of the facility data storage 22 in the present embodiment.

Referring to FIG. 29, the failure database 225 is linked to the facility group database 221 in the facility data storage 22. As shown in Fig. 30, the failure database 225 stores a trouble code for distinguishing the type of failure, the contents of the failure, the repair time required for handling the failure, and a work level as one entry. It is.

The operation at the time of occurrence of failure in the case where the failure database 225 is provided will be described. When a trouble occurs in the facility 51 in the production line 50, the worker in charge of the facility 51 or the production line 50 transmits a trouble signal to the central processing unit 10 via the network 40. When the central processing unit 10 receives the trouble signal sent from the manufacturing line 50, the central processing unit 10 instructs the work order predicting unit 11 to execute the prediction processing. The work order predicting unit 11 transfers the trouble code from the trouble database 225 stored in the facility data storage unit 22 based on the trouble code extracted from the trouble signal sent from the manufacturing line 50. Search for the corresponding repair time. Then, the facility maintenance module 111 corresponding to the repair time is created in the facility operation module 101, and the work order is predicted. Further, based on the prediction result, the trouble-operated work instruction is given to the worker who has transmitted the trouble signal.

FIG. 31 shows another configuration example of the lot indicating module 81 present in the facility group buffer module 73 in the facility group module 72 shown in FIG.

Referring to FIG. 31, the priority instruction flag is added to the lot instruction module 81, respectively. The priority key flag is a flag indicating the priority at the start of the work in each lot instruction module 81. If the space facility module 74 is present, prior to determining which lot command module 81 in the facility buffer module 73 to undertake, the priority key flag added to the lot command module 81 is determined. On the basis of this, the lot instruction module 81 is sorted in order of high priority. Therefore, it always becomes a work start object in order from high priority. The priority key flag can be set for each product to be manufactured arbitrarily, according to the production delivery date, automatically set in consideration of the remaining working time and manufacturing delivery time, and other methods. Any method can be used.

32 is a flowchart for describing processing of a job start event when priority is added. In Fig. 32, the decision processing of steps 3201 and 3202 is the same as the decision processing of steps 2001 and 2002 shown in FIG.

If the lot instruction module 81 exists in the equipment group buffer module 78 in step 3202, the lot instruction module 81 is sorted according to the priority (step 3202), and then the equipment group buffer module 78 From the lot instruction module (refer to FIG. 13 and FIG. 14) which exists in the OUT side, based on the product data memory | storage part 21 and the manufacturing line state memory | storage part 24, the working conditions which should be performed are confirmed, and a facility data storage part is carried out. In step 22, it is checked whether or not work can be performed with the facility (step 3204). After this, the operations of steps 3205 and 3206 are the same as the operations of steps 2004 and 2005 shown in FIG. 20, and the operations of steps 3207 and 3208 are the same as the operations of steps 2006 and 2007 shown in FIG.

As described above, according to the present invention, the manufacturing line is modularized for a work type like a manufacturing operation of a semiconductor device and with various working conditions and constraints, thereby creating a situation like an actual manufacturing line, It is possible to accurately predict the flow of the product. Therefore, it is possible to allocate accurate work resources to the work prediction, and the efficient use of the equipment used for the work can be achieved, which has the effect of dramatically improving productivity.

In addition, in the prior art, while assigning numerically suitable work resources on the basis of the calculated facility capability, in the present invention, the overload was applied to the worker because it was made to cope with the owned work resources. It has the effect of preventing jamming in advance.

Claims (12)

A work management device for predicting a processing sequence for a plurality of processing steps, assigning a job, and instructing a worker based on the assignment result, comprising: storage means for storing data relating to various conditions for restricting work; Task sequence predicting means for predicting the flow of work by forming a module of a manufacturing line based on the data stored in the means, and assigning a resource suitable for the task level based on the prediction result by the task order predicting means. And worker assignment means for creating a work plan, and instructing means for giving a work instruction to a worker based on the work plan created by the worker assignment means. The storage device according to claim 1, wherein the storage means includes: product data storage means for storing data relating to a manufacturing operation of a product, facility data storage means for storing data relating to equipment used for the work, and data relating to an operator And worker line storage means for storing the data relating to the work state in the production line. The storage device according to claim 1, wherein the storage means includes: product data storage means for storing data relating to a manufacturing operation of a product, facility data storage means for storing data relating to equipment used for the work, and data relating to an operator Worker data storage means, and manufacturing line state storage means for storing data relating to the state of work in the production line, wherein the product data storage means includes a product name database for storing a list of names of products that can be manufactured. And manufacturing flow / work condition data, which are linked to the product name database, and store, as one entry, a product work flow, equipment groups used in individual work processes, and conditions of work performed in the equipment group. Link to the base and the product name database to create a product for each product name. A work management device, characterized by storing a production calendar for storing schedules and number of products to be put into a choline. The storage device according to claim 1, wherein the storage means includes: product data storage means for storing data relating to a manufacturing operation of a product, facility data storage means for storing data relating to equipment used for the work, and data relating to an operator Worker data storage means, and manufacturing line state storage means for storing data relating to the state of work in the production line, wherein the facility data storage means groups equipment existing in the production line by the same function. A facility group database that stores a name of a facility group composed of facilities and a facility group code corresponding to the facility group name as one entry, and the facility group database linked to the facility group database. Data bay which stores name and machine number of facilities corresponding to the facilities name concerned Su, linking to the facility group database, a work condition code indicating at least work content for each of the facility groups, a pre-work time that is a time of restraining an operator before the start of work, a work time of time of restraining a facility after the start of work, The work condition database which stores the post-work time, which is the time to restrain the worker after the end of the work, the work level indicating the difficulty of the work, and the machine number of the equipment that can work, and the equipment group database, are linked to the same work condition database. For each of the facilities included in the facility group, a facility calendar for storing the number of cycles and maintenance time, and the work level as information on the date and time of stopping the facility for facility maintenance, the date and time of starting the facility, and facility maintenance. Job management apparatus, characterized in that for storing. The storage device according to claim 1, wherein the storage means includes: product data storage means for storing data relating to a manufacturing operation of a product, facility data storage means for storing data relating to equipment used for the work, and data relating to an operator Worker data storage means, and manufacturing line state storage means for storing data relating to the state of work in the production line, wherein the worker data storage means includes a name of a worker operating the facility in the production line; A worker database for storing a worker code for recognizing the worker and a work code for designating a working time of the worker as one entry, and a work date and time for each work code, linked to the worker database. The worker's nose is linked to a work calendar and the worker database. Each work storage device stores a work capability database for storing a work level at which a worker can work. The storage device according to claim 1, wherein the storage means includes: product data storage means for storing data relating to a manufacturing operation of a product, facility data storage means for storing data relating to equipment used for the work, and data relating to an operator Worker data storage means, and production line state storage means for storing data relating to the state of work in the production line, wherein the production line state storage means is a lot of each product name being processed in the production line. Lot number database which stores a lot number, and it links to the said lot number database, and for every said lot number, a work process sequence, the start date and time of each operation | work, and the machine of the facility which carries out work | work And a job history database storing a number. 2. The work order predicting means according to claim 1, wherein the work order predicting means forms a facility module corresponding to the facility in a production line module corresponding to the actual production line based on data relating to the facility used for the job, and operates the facility. A job management apparatus for forming a facility operation module indicating a status to predict the flow of work. The apparatus according to claim 1, further comprising obstacle storage means for storing data relating to a failure of the facility, wherein the work order predicting means corresponds to an actual production line based on data relating to the facility used for the job. A facility module corresponding to the facility is formed in the production line module, and a facility running module indicating the operational state of the facility is formed to predict the flow of work, and with reference to the data stored in the obstacle storage means, And a facility maintenance module corresponding to the maintenance time for the failure, and attaching the equipment maintenance module to the operation state module to predict a work sequence. The said work order prediction means forms the installation module corresponding to the said installation in the manufacturing line module corresponding to an actual manufacturing line based on the data regarding the installation used for a job, A facility running module indicating an operational state is formed to predict the flow of the job, and buffering data indicating the processing state of the job is performed by the buffer module of the facility module, and priority is given to the buffer module indicating the processing state of the job. Attaching, and determining a processing order according to the added priority. A work management method of predicting a processing sequence with respect to a plurality of processing steps, assigning a job, and instructing a worker according to a result of the assignment, the method comprising: storing data regarding various conditions restricting a job; Predicting the work flow by forming a module of a manufacturing line based on the data stored in the step, and assigning a work resource suitable for the work level based on the prediction result by the work order predicting step to create a work plan. And giving a work instruction to a worker based on the work plan created by the worker assignment step. The method according to claim 10, wherein the work order predicting step comprises the steps of: forming a facility module corresponding to the facility in a production line module corresponding to an actual production line based on data relating to the facility used in the job; And forming a facility operation module indicating an operation state of the device and predicting the flow of the job. The method according to claim 10, wherein the work order predicting step comprises: forming a facility module corresponding to the facility in a production line module corresponding to an actual production line based on data relating to the facility used for the job; Forming a facility running module indicating the operational status of the facility to predict the flow of the job, buffering data indicating the processing status of the job by the buffer module of the facility module, and a buffer indicating the processing status of the job Adding priority to the module, and classifying the buffer module according to the priority prior to executing the workflow prediction step.

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