KR100230982B1 - An automatic material flow system for semiconductor device fabrication line - Google Patents

An automatic material flow system for semiconductor device fabrication line Download PDF

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KR100230982B1
KR100230982B1 KR1019960016480A KR19960016480A KR100230982B1 KR 100230982 B1 KR100230982 B1 KR 100230982B1 KR 1019960016480 A KR1019960016480 A KR 1019960016480A KR 19960016480 A KR19960016480 A KR 19960016480A KR 100230982 B1 KR100230982 B1 KR 100230982B1
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space
logistics
manufacturing line
semiconductor manufacturing
water
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KR970077078A (en
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안정삼
박권수
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윤종용
삼성전자주식회사
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    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q10/00—Administration; Management
    • G06Q10/08—Logistics, e.g. warehousing, loading or distribution; Inventory or stock management
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
    • G05B19/4189—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM] characterised by the transport system
    • G05B19/41895—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM] characterised by the transport system using automatic guided vehicles [AGV]

Abstract

반도체 제조라인에서 물(物)동선과 인(人)동선의 전용공간을 확보하여 제조라인에서의 물류자동화를 구현하도록 개선시킨 반도체 제조라인에서의 물류자동화시스템에 관한 것이다.The present invention relates to a logistics automation system in a semiconductor manufacturing line that improves the logistics automation in a manufacturing line by securing a dedicated space for water and human copper lines in a semiconductor manufacturing line.

본 발명은, 작업공간과 서비스공간이 구분확보되어 있는 반도체 제조라인에 있어서, 상기 작업공간은 물류이송을 위한 물(物)동선전용으로서 반송물을 자동으로 적하 . 하역 및 적재하는 무인반송차의 이동전용공간으로 그리고 상기 서비스 공간은 작업자의 이동을 위한 인(人)동선전용으로서 상기 서비스공간의 임의의 영역에 상기 물동선과 상기 인동선의 인터페이스(lnterface) 및 물류의 보관 . 관리 영역인 계측 및 검사실이 구성되어 이루어진다.The present invention is a semiconductor manufacturing line in which the work space and service space are secured, the work space is automatically dropping the conveyed goods as water transport only for logistics transport. As an exclusive space for moving and unloading and loading unmanned carriages, and the service space is dedicated to human traffic for the movement of workers, the interface and logistics of the water line and the copper line in any area of the service space. Storage of. The management area, the measurement and laboratory, is composed.

따라서, 본 발명에 의하여 인 (人)동선과 물(物)동선이 구분되고, 작업자와 무인반송차를 연결할 수 있어 반도체 제조라인에서의 물류자동화를 실현할 수 잇는 효과가 있다Therefore, according to the present invention, a phosphorus copper wire and a water copper wire can be distinguished, and an operator and an unmanned transport vehicle can be connected, so that logistics automation in a semiconductor manufacturing line can be realized.

Description

반도체 제조라인에서의 물류자동화시스템Logistics Automation System in Semiconductor Manufacturing Line

제1도는 종래의 반도체 제조라인을 나타내는 평면구성도이다.1 is a plan view showing a conventional semiconductor manufacturing line.

제2도는 본 발명에 따른 반도체 제조라인에서의 물류자동화시스템의 실시예를 나타내는 평면구성도이다.2 is a plan view showing an embodiment of a logistics automation system in a semiconductor manufacturing line according to the present invention.

* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings

10, 20 : 설비 12, 22 : 이재기10, 20: facilities 12, 22: Lee Jae-gi

14, 24 : 작업공간 16, 26 : 서비스공간14, 24: Work space 16, 26: Service space

28 : 검사 및 계측실 30 : 무인반송차28: inspection and measurement room 30: unmanned carrier

32 : 미케니컬 인터페이스 컨베이어32: mechanical interface conveyor

본 발명은 반도체 제조라인에서의 물류자동화시스템에 관한 것으로서, 보다 상세하게는 반도체 제조라인에서 물(物)동선과 인(人)동선의 전용공간을 확보하여 제조라인에서의 물류자동화를 구현하도록 개선시킨 반도체 제조라인에서의 물류자동화시스템에 관한 것이다.The present invention relates to a logistics automation system in a semiconductor manufacturing line, and more particularly, to improve the logistics automation in a manufacturing line by securing a dedicated space of water and phosphorus copper in a semiconductor manufacturing line. The present invention relates to a logistics automation system in a semiconductor manufacturing line.

통상, 기계 자체에서 대부분의 작업공정이 자동적으로 처리되는 자동제조방식을 가리키는 것을 자동화(Automation)라 하고, 이와 같은 자동화에는 제조라인에서 가공물이나 부품의 치수, 형상, 품질 등을 자동적으로 계측하는 자동계측시스템, 제조라인의 시스템을 자동화·무인화하는 공장자동화(Factory Automation : FA) 또는 제조라인의 반송물을 자동으로 이송시키는 물류자동화 등이 있다.In general, the term "automation" refers to an automatic manufacturing method in which most work processes are automatically processed on the machine itself. Such automation includes automatic measurement of the dimensions, shapes, and quality of a workpiece or a part in a manufacturing line. There are factory automation (FA) for automating and unmanned measuring system, system for manufacturing line, and logistics automation for automatic transfer of goods in manufacturing line.

그리고 이러한 자동화시스템은 모든 산업분야에서 적용되고 있으며 또한 적용시키기 위해 연구개발에 부단한 노력을 기울이고 있고, 특히 반도체 제조라인의 자동화시스템은 필수적이라 할 수 있다.In addition, such automation systems are applied in all industrial sectors and are making constant efforts in R & D to apply them. Especially, automation systems of semiconductor manufacturing lines are essential.

제1도는 종래의 반도체 제조라인을 나타내는 평면구성도이다.1 is a plan view showing a conventional semiconductor manufacturing line.

먼저, 제조라인에 각 설비(10)들이 배치되어 있고, 각 설비(10)에서 사용 및 가공하는 물품들을 보관 및 관리하는 이재기(Stocker)(12)가 각 설비(10)들이 배치되어 계측 및 검사 등의 작업이 수행되는 공간, 즉 작업공간(Process Area)(14)과 작업공간(14) 사이의 설비(10)들이 차지하고 있는 공간인 서비스(Service)공간(16)에 설치되어 있다.First, each facility 10 is arranged in a manufacturing line, and a stocker 12 which stores and manages the goods used and processed at each facility 10 is arranged and measured and inspected. It is installed in the service space 16, which is a space occupied by the facilities 10 between the work space (Process Area) 14 and the work space (14).

여기서 종래에는 전술한 구성으로 이루어진 작업공간(14)에서 작업자들이 작업을 수행하였다.Here, in the prior art, workers performed the work in the workspace 14 having the above-described configuration.

그러나 종래의 구성으로는 반도체 제조라인에서의 자동화의 실현에 장애가 되었으며, 특히 물류자동화의 실현은 많은 문제점들이 노출되고 있었다.However, the conventional configuration has hindered the realization of automation in the semiconductor manufacturing line, and in particular, the realization of logistics automation has exposed many problems.

즉, 각 설비(10)들의 반송물을 자동으로 적하·하역 및 적재하여 제조라인에 구비되어 있는 설비(10)에서 설비(10)로 이동하는 무인반송차(Auto Guide Vehicle)의 개발로 사람의 동선인 인(人)동선과 무인반송차 등의 물류이송경로인 물(物)동선이 서로 구별이 되어 있지 않은 종래의 반도체 제조라인에서는 안전사고의 위험성을 항상 내포하고 있어 물류자동화의 실현에 문제가 많았다.In other words, human transportation is carried out by the development of an auto guide vehicle that automatically unloads, unloads, and loads the cargo of each facility 10 and moves from the facility 10 provided in the manufacturing line to the facility 10. Conventional semiconductor manufacturing lines that do not distinguish between water transport lines, such as human traffic lines and unmanned transport vehicles, always involve risks of safety accidents. Many.

또 물류자동화를 실현하기 위해서는 상기 무인반송차와 작업자를 연결시키는 방법이 문제로 대두되었다.In addition, in order to realize logistics automation, a method of connecting the unmanned vehicle and the worker has emerged as a problem.

그리고 종래의 제조라인의 작업공간(14)에는 설비(10)들이 여러 대가 하나의 라인에 일렬로 설치되어 있어 불필요하게 많은 사람들이 한 곳에 운집되도록 구성되어 있었다. 따라서, 종래의 반도체 제조라인의 구성으로서는 인동선과 물동선의 명확한 구분 및 작업자와 무인반송차의 연결시스템이 해결되지 않아 반도체 제조라인에서의 물류자동화를 구현하기에는 많은 문제점들이 있었다.In the work space 14 of the conventional manufacturing line, the facilities 10 are arranged in a line, so that many people gather in one place. Therefore, as the configuration of the conventional semiconductor manufacturing line, there is a lot of problems in realizing the logistics automation in the semiconductor manufacturing line, because the clear division of the copper and water lines and the connection system of the worker and the unmanned vehicle are not solved.

본 발명의 목적은, 인(人)동선과 물(物)동선을 구분하고 작업자와 무인 반송차를 연결하여 물류자동화를 이루기 위한 반도체 제조라인에서의 물류자동화시스템을 제공하는 데 있다.Disclosure of Invention An object of the present invention is to provide a logistics automation system in a semiconductor manufacturing line for distinguishing phosphorus copper and water copper and connecting workers and unmanned transport vehicles to achieve logistics automation.

상기 목적을 달성하기 위한 본 발명에 다른 반도체 제조라인에서의 물류자동화시스템은, 작업공간과 서비스공간이 구분확보되어 있는 반도체 제조라인에 있어서, 상기 작업공간은 물류이송을 위한 물(物)동선전용으로서 반송물을 자동으로 적하·하역 및 적제하는 무인반송차의 이동전용공간으로 그리고 상기 서비스공간은 작업자의 이동을 위한 인(人)동선전용으로서 상기 서비스공간의 임의의 영역에 상기 물동선과 상기 인동선의 인터페이스(lnterface) 및 물류의 보관 . 관리 영역인 계측 및 검사실이 구성되어 이루어진다.Logistics automation system in the semiconductor manufacturing line according to the present invention for achieving the above object, in the semiconductor manufacturing line where the work space and the service space is secured, the work space is dedicated to water transport for logistics transport As a transfer-only space for an unmanned transport vehicle that automatically loads, unloads and loads a cargo, and the service space is dedicated to human traffic for the movement of workers. Line interface and storage of logistics. The management area, the measurement and laboratory, is composed.

그리고, 상기 계측 및 검사실에는 인터페이스수단이 구비되고, 상기 인터페이스수단은 자동으로 구동되는 미케니컬 인터페이스 컨베이어(Mechanical lnterface Conveyor)로 이루어지는 것이 바람직하다.In addition, the measurement and inspection room is provided with an interface means, the interface means is preferably made of a mechanical interface conveyor (Mechanical lnterface Conveyor) is automatically driven.

또한, 상기 계측 및 검사실에는 물류를 보관 및 관리할 수 있는 이재기(Stocker)가 구비되는 것이 바람직하다.In addition, the measurement and inspection room is preferably provided with a stocker (Stocker) that can store and manage logistics.

이하, 본 발명의 구체적인 실시예를 첨부한 도면을 참조하여 상세히 설명한다.Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

제2도는 본 발명에 따른 반도체 제조라인에서의 물류자동화시스템의 실시예를 나타내는 평면구성도이다.2 is a plan view showing an embodiment of a logistics automation system in a semiconductor manufacturing line according to the present invention.

실시예는 먼저, 제조라인에 각 설비(20)들이 배치되어 있고, 각 설비(20)에서 사용 및 가공하는 물품들을 보관 및 관리하는 이재기(Stocker)(22)가 각 설비(20)들이 있는 공간, 즉 작업공간(24)과 작업공간(24)사이에 확보되어 설비들이 차지하고 있는 공간인 서비스공간(26)에 설치되어 있다.In an embodiment, each facility 20 is arranged in a manufacturing line, and a stocker 22 storing and managing items used and processed at each facility 20 has a space where each facility 20 is located. That is, it is secured between the workspace 24 and the workspace 24 is installed in the service space 26 which is the space occupied by the facilities.

그리고 서비스공간(26)의 임의의 영역에 작업자가 검사, 계측 및 가공등의 작업을 수행하고 제조라인에서의 물류들을 보관 및 관리할 수 있는 영역인 검사 및 계측실(28)이 확보되어 있고, 작업공간(24)에는 반송물을 자동으로 적하 . 하역 및 적재하여 각 설비(20)에서 설비(20)로 이동하는 무인반송차(30)가 구비되어 있다.In addition, an inspection and measurement room 28 is secured in an arbitrary area of the service space 26, in which an operator can perform inspection, measurement and processing, and store and manage logistics in a manufacturing line. The workspace (24) automatically loads cargo. There is provided an unmanned carrier 30 for loading and unloading and moving from each facility 20 to the facility 20.

또한 무인반송차(30)와 작업자를 연결하도록 미케니컬 인터페이스 컨베이어(Mechanical lnterface Conveyor)(32)가 검사 및 계측실(28)에 설치되어 있다.In addition, a mechanical interface conveyor 32 is installed in the inspection and measurement room 28 to connect the driverless vehicle 30 with the operator.

여기서 본 발명은 서비스공간(26)에 확보된 검사 및 계측실(28)에 이재수단 및 인터페이스수단을 설치하는 것이 바람직하다.In the present invention, it is preferable to install the transfer means and the interface means in the inspection and measurement room 28 secured in the service space 26.

그래서 실시예는 종래에 이재기가 설치되어 있는 공간을 활용하는 것이다.Thus, the embodiment utilizes a space in which a transfer machine is conventionally installed.

전술한 구성은 반도체 제조라인에서 물류자동화를 위한 시스템으로서, 실시예는 작업자가 특별한 사유가 없는 한 검사 및 계측실(26)에서 작업을 수행하고, 무인반송차(30) 또한 특별한 사유가 없는 한 작업공간(24)에서만 이동되도록 구성되는 것이다.The above-described configuration is a system for automated logistics in a semiconductor manufacturing line, the embodiment of the operation is performed in the inspection and measurement room 26 unless the operator has a special reason, and the unmanned vehicle 30 also has no special reason It is configured to move only in the workspace 24.

그리고 작업자가 각 설비(20)에 반송물을 보내거나 각 설비(20)로부터 반송물을 받을 때에는, 검사 및 계측실(28)에 설치되어 있는 미케니컬 인터페이스 컨베이어(32)를 이용하도록 구성되어 있다.And when an operator sends a conveyed object to each installation 20 or receives a conveyed object from each installation 20, it is comprised so that the mechanical interface conveyor 32 installed in the inspection and measurement room 28 may be used.

즉, 각 설비(20)에서 적재한 반송물을 무인반송차(30)가 자동으로 미케니컬 인터페이스 컨베이어(32)의 방향으로 이동하여 반송물을 적하하면, 작업자가 대기하였다가 하역하면 되는 것이다.That is, when the unmanned vehicle 30 automatically moves in the direction of the mechanical interface conveyor 32 and drops the conveyed object, the worker waits and unloads.

반대로 작업자가 각 설비(20)로 반송물을 이송하려고 할 때에는 작업자가 반송물을 미케니컬 인터페이스 컨베이어(32)에 적하시키면, 무인반송차(28)는 대기하였다가 반송물을 적재시켜 각 설비(20)로 이동하여 하역하면 되는 것이다.On the contrary, when the worker intends to transfer the conveyed goods to each facility 20, when the worker drops the conveyed goods to the mechanical interface conveyor 32, the unmanned transport vehicle 28 waits and loads the conveyed goods to each facility 20. Go to and unload.

여기서 실시예는, 인터페이스수단으로 자동으로 구동되는 미케니컬 인터페이스 컨베이어(32)를 이용하지만, 다른 인터페이스수단으로 자동으로 구동되는 펠릿(Pallet) 등이 이용될 수 있다.Here, the embodiment uses a mechanical interface conveyor 32 that is automatically driven as the interface means, but pellets and the like that are automatically driven by other interface means may be used.

본 발명은 작업공간에 작업자가 없어도 작업수행이 가능하도록 하여 작업자의 동선인 인동선과 무인반송차의 동선인 물동선을 명확히 구분하였고, 또한 미케니컬 인터페이스 컨베이어로 작업자와 무인반송차를 연결하도록 하였다.The present invention enables the work to be performed even if there is no worker in the work space, thereby clearly distinguishing the copper wire which is the copper wire of the worker and the copper wire which is the copper of the unmanned vehicle, and also connects the driver and the unmanned van by the mechanical interface conveyor. .

따라서, 본 발명에 의하면 인(人)동선과 물(物)동선이 구분되고, 작업자와 무인반송차를 연결할 수 있어 반도체 제조라인에서의 물류자동화를 실현할 수 있는 효과가 있다.Therefore, according to the present invention, a phosphorus copper wire and a water copper wire are distinguished, and an operator and an unmanned transport vehicle can be connected to each other, thereby realizing logistics automation in a semiconductor manufacturing line.

이상에서 본 발명은 기재된 구체예에 대해서만 상세히 설명되었지만 본 발명의 기술사상 범위 내에서 다양한 변형 및 수정이 가능함은 당업자에게 있어서 명백한 것이며, 이러한 변형 및 수정이 첨부된 특허청구범 위에 속함은 당연하다.Although the present invention has been described in detail only with respect to the described embodiments, it will be apparent to those skilled in the art that various modifications and variations are possible within the technical scope of the present invention, and such modifications and modifications belong to the appended claims.

Claims (2)

물류이송을 위한 물동선전용으로서 반송물을 자동으로 적하 . 하역 및 적재하는 무인반송차의 이동전용공간인 작업공간과, 상기 작업공간과 작업공간사이에 설비들이 구비되는 공간으로써 작업자의 이동을 위한 인동선전용공간인 서비스공간이 구분확보되어 있는 반도체 제조라라인에 있어서, 상기 서비스공간의 임의의 영역에 상기 물동선과 인동선의 인터페이스를 위한 인터페이스수단을 구비시키고, 상기 물류를 보관 및 관리 할 수 있는 스톡커(Stocker)를 구비시켜 상기 물류이송시 상기 물류를 보관 및 관리하는 계측 및 검사실을 구성시킴을 특징으로 하는 반도체 제조라인에서의 물류자동화시스템.Automatically unload cargo as a water carrier for logistics transportation. A semiconductor manufacturing line that has a working space, which is a dedicated space for moving and unloading and loading unmanned transport vehicles, and a service space, which is a dedicated space for moving workers, as a space provided with facilities between the working space and the working space. In the area of the service space provided with an interface means for the interface of the water line and the copper wire, and equipped with a stocker (Stocker) that can store and manage the logistics to the logistics during the logistics transfer Logistics automation system in a semiconductor manufacturing line, characterized by the construction of a measurement and inspection room for storage and management. 제1항에 있어서, 상기 인터페이스수단은 자동으로 구동되는 미케니컬 인터페이스 컨베이어로 이루어짐을 특징으로 하는 상기 반도체 제조라인에서의 물류자동화시스템.The system of claim 1, wherein the interface means comprises a mechanical interface conveyor driven automatically.
KR1019960016480A 1996-05-16 1996-05-16 An automatic material flow system for semiconductor device fabrication line KR100230982B1 (en)

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04115512A (en) * 1990-09-05 1992-04-16 Hitachi Ltd Method for constituting semiconductor manufacturing line
JPH06236914A (en) * 1993-02-09 1994-08-23 Mitsubishi Electric Corp Semiconductor manufacture equipment

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04115512A (en) * 1990-09-05 1992-04-16 Hitachi Ltd Method for constituting semiconductor manufacturing line
JPH06236914A (en) * 1993-02-09 1994-08-23 Mitsubishi Electric Corp Semiconductor manufacture equipment

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