KR100212166B1 - Coating apparatus for plane substrate with two sputter cathode - Google Patents

Abstract

The targets 7, 8 are arranged side by side in a common coating chamber 6 capable of vacuum and the targets 7, 8 are kept in a plane parallel to the conveying surface 9 of the base layer 3 and are preferably of the planar magnetron type 2 composed of the same material. Gas input irrigators 10 and 11, each having four sputtering cathodes 4 and 5, capable of moving a predetermined process gas within a corresponding target 7 and 8 range, for each cathode 4 and 5, respectively. In the apparatus for coating the provided planar base layer 3 in a continuous process, the spaces or zones 12 and 13 immediately below the targets 7 and 8 are surrounded by cylindrical blinds 14 and 15, respectively. The blinds 14 and 15 have openings 16 and 17 respectively defining flow particles in portions forming the base portions 14 'and 15', and each of the two blinders 14 and 15 has a target. The side walls 14 and 15 extending perpendicular to the face are provided with recesses 18, 19 or a series of bores, the recesses correspondingly. Are aligned toward the outlet openings of the gas pipes 10 and 11, respectively.

Description

Flat base coating system with two sputter cathodes

1 is a side view of the device partially in longitudinal section;

2 is a plan view of the gas irrigation system according to FIG.

3 is a diagram illustrating a two-layer packet.

* Explanation of symbols for main parts of the drawings

1: Base holding part 2: Cap part

3: flat base layer 4, 5: cathode

6: coating chamber 7, 8: target

9: transfer surface 10, 11: gas irrigation

12, 13: space, zone 14, 15: blinder

16, 17: opening 18, 19: recess

21, 22: plate, tab 23: link

24: gas connection portion 25, 25 ', 25, 26, 26', 26: gas outflow nozzle

The present invention comprises two sputter cathodes, preferably of planar magnetron type, arranged side by side in a common vacuum-capable coating chamber, the target being held in a plane parallel to the transport surface of the substrate and made of the same material, each processing gas corresponding to A gas irrigator capable of moving within the target range is provided for each cathode, wherein the process gas consists of a reaction gas, typically oxygen and an inert gas, typically argon, and controlled gas from the gas storage tank to the gas irrigation. An apparatus for coating a flat base layer, for example, a glass sheet for a flat projection film, by a continuous process, comprising a valve of a gas supply pipe enabling flow.

As such an apparatus the following type (EP 0 219 273 B1) is known, in which several sputter cathodes are arranged successively in a vacuum chamber, in which the substrate passes through all the cathodes in turn for the purpose of coating and in multiple layers. I have a structure. Sputter cathodes are of the planar magnetron type, which allows not only the metal layer but also the oxide layer to be formed on the substrate because the coating zone is cleaned by the flowing gas from different sources.

A similar device is also described in US 3 945 903, which allows the flowing gas to enter the process chamber from the source at the beginning and end of the cathode row from above and from the region of the central cathode from below and the target to the blinder case. It is different in that it is surrounded by.

There is also known a facility for measuring the thickness of a thin layer formed on a workpiece or test substrate simultaneously with the coating of the workpiece transported through the process chamber (EP 0 411 359 A2), where the measurement is a projection reaction, reflection By means of detecting reactions or resistance reactions or by understanding mechanical measurements of thin layers, several cathode installations with spray targets are provided in series, each with an additional window beside the central opening for the flow of coating material. Blinders with recesses in the fluidized material area are held between the target and the workpiece, the recesses being arranged opposite each other across the substrate feeder and placed side by side on the workpiece or a particular test substrate conveyed through the cathode installation. A test strip is formed, and the test strip is formed of the layer packet formed on the substrate or the workpiece. It is in correspondence to each of the layers

All of these known installations are equipped with inlets for inert and reactive gases, but this gas is uniformly distributed in the overall process chamber and in the space surrounded by the blinder just before the targets of both cathodes arranged in turn.

Finally, a device for reactive coating with electrically insulating materials such as silicon dioxide has already been proposed (US-PS 5,169,509), which consists of an alternating current source connected to a cathode surrounding a magnet disposed in a vacuumable coating chamber, The cathode works together with the target to be sprayed and the spray particles of the target are coated on the substrate, and the processing chamber and the reactant gases, such as argon and oxygen, can be introduced into the coating chamber, the source of the alternating current, preferably 2 Two ungrounded outlets of the secondary coil are connected to the cathode supporting the target, preferably the magnetron cathode, and both cathodes placed side by side in the coating chamber are provided in the plasma chamber with approximately equal spacing to the oppositely placed substrate.

Since the common blinder surrounding the target of both cathodes has a recess on its side wall, both cathodes work with each gas irrigation through which the process gas can enter the area enclosed by the blinder or blind case.

A significant disadvantage of the known apparatus is that mixing of the flowing gas cannot be avoided so that bed quality and bed thickness cannot be maintained in a narrow boundary.

SUMMARY OF THE INVENTION An object of the present invention is to solve the above problems by providing an apparatus adapted to form a plurality of layers consisting of a metal layer and a metal oxide layer and an intermediate layer or a transition layer composed of two materials on a base layer, wherein the layer thickness, The bed synthesis and bed homogeneity should be able to be controlled as far as possible within the narrow boundary, in particular through the flowing gas.

This object is solved in accordance with the invention by the zone immediately below the target being respectively partitioned by a cylindrical blind or a blinder case, where the blinder penetrates the fluid particles from the target, respectively, in the portion forming its base portion. And two openings each having recesses or contiguous holes in the sidewalls extending perpendicular to the target surface, the recesses or contiguous holes having an outlet for the corresponding gas irrigation. Aligned toward the nozzle.

Preferably the gas irrigation is formed by a tube at least partially surrounding the tubular blinder, the tube having an outlet nozzle on a section of the tube placed opposite the recess in the side wall of the blinder, the outlet nozzle being a blinder. It allows the flowing gas to flow directly into the space surrounded by the furnace.

Advantageously each gas irrigation system consists of three tubes, these tubes being arranged in a substantially U-shape and the central tube of the three tubes is provided with an outlet nozzle for the process gas, and both gas pipelines with an outlet nozzle. The central tube of is disposed on the side facing each other of the cylindrical both blinds.

In a preferred embodiment a recess provided in the side wall of the cylindrical blinder is covered by a tabbed plate which is firmly engaged with the side wall at the end and protrudes obliquely into the blinder space from the end.

The invention allows for the best of the different embodiments, one of which is described in more detail by the accompanying drawings.

As shown in FIG. 1, both sputter cathodes 4 and 5, together with the base 3 placed thereon just above the base carrier 1 moving in the direction of the arrow A, targets 7 and 8; This is installed in the cap part 2 of the vacuum chamber, which is no longer shown in detail so that it is aligned. The lower surface of both cathodes 4, 5 is firmly screwed into the cylindrical blinds 14, 15 having a rectangular plane. The blinds 14, 15 have openings 16, 17 in their base portions 14 ′, 15 ′, which are planar bases 3 which move fluid particles from the targets 7, 8 in the direction of the arrows. Allow it to penetrate toward Both blinders 14 and 15 are each surrounded by gas irrigation units 10 and 11 each consisting of a tube section bent in a U-shape, and each central tube 10 (and 11, not shown in more detail) in the direction of substrate movement. It is arranged in parallel with the first and last sidewall portions 14 and 15 provided with (A). Each of the central tubes 10, 11 of the two gas irrigation pipes (FIG. 2) has several outlet nozzles 25, 25 ', 25 and 26, 26', 26, ... in zone B and All of the outflow nozzles are arranged inside the central pipe 10 of the U-shaped pipe. Outlet nozzles 25, 25 ′, 25,... Are aligned toward holes or recesses 18, 19, which recess in side wall portions 14, 15 of cylindrical blinders 14, 15. Both spaces or zones 12 underneath the targets 7, 8, which are incised so that the gas flowing out of the nozzles 25, 25 ′, 25 and 26, 26 ′, 26 is surrounded by the double blinds 14, 15. , 13) directly.

For example, both cathodes 4 and 5 are provided with targets 7 and 8 made of chromium, inert gas is introduced through the gas irrigation 11, and reactant gas is introduced through the other gas irrigation 10. When both cathodes 4 and 5 are exceeded in this arrow direction A, for example, a Cr / CrOxNy layer structure is formed in the base layer 3. In addition, the reaction gas may be introduced into the spaces 13 and 12 through the gas irrigation 11 and the inert gas through the gas irrigation 10, for example, a layer structure CrOxNy / CrNx or CrOxNy / Cr may be formed.

Also, as shown in FIG. 2, both outer tubes 10 ', 10' and 11 ', 11' are coupled to each other by a link 23 used to better maintain the gas irrigation in the area of the blinder case. Is shown. The process gas itself is introduced by the connection part 24 in the first tube of three tubes, respectively.

3 shows a diagram of an embodiment of a layer packet actually formed.

Claims (7)

It is arranged side by side in a common vacuum-capable coating chamber 6 and the targets 7, 8 are kept in a plane parallel to the conveying surface 9 of the planar base layer 3 and made of the same material, preferably of the planar magnetron type. A gas irrigation device having two sputter cathodes 4 and 5 and capable of moving a process gas consisting of a reaction gas, typically oxygen and an inert gas, generally argon, within the range of the assigned targets 7 and 8, respectively. A flat base layer 3, having 10, 11 provided for each cathode 4, 5 and having a valve of a gas supply pipe enabling controlled gas flow from the gas supply container to the gas pipe 10, 11, In a device for continuously coating a glass sheet for a planar projection film, for example, the spaces or zones 12 and 13 immediately below the targets 7 and 8 are surrounded by cylindrical blinds 14 and 15, respectively. , Blinds 14 and 15 have a base Openings 16 and 17 are provided in the portions forming the powders 14 'and 15', respectively, and are moved to the planar base layer 3 through which the moving particles penetrate from the target. Each has recesses 18, 19 or continuous holes in the sidewalls 14 and 15 extending perpendicular to the target surface and these recesses are provided with outlet nozzles 25, corresponding to the corresponding gas irrigation 10 and 11). 25 ',... 26, 26'). The gas irrigation systems 10 and 11 are formed of tubes at least partially surrounding the tubular blinds 14 and 15, which are the side walls 14 and 15 of the blinds 14 and 15. And outlet nozzles 25, 25 ′, 25 and 26, 26 ′, 26,... On the section of the tube placed opposite the recesses 18 and 19 in the chamber, which are provided with blinds 14. Coating device, characterized in that to flow the gas directly into the space (12, 13) enclosed by 15). 3. Each of the gas irrigation groups 10 and 11 consists of three tubes 10 ′, 10, 10 ′ and 11 ′, 11, 11 ′ and each of these tubes is approximately U shaped. In the form of a central tube of the three tubes 10 ', 10', 10 ', 11', 11 and 11 ', respectively, with outlet nozzles 25, 25', 25 ... and 26, 26 for process gas, respectively. ', 26 ...) is provided with a coating apparatus. 4. Each of the tubes 10 and 11 of the gas irrigation systems 10 and 11, having the outlet nozzles 25, 25 ', 25 ..., has a cylindrical tubular blinder 14, 15 of each other. Coating device, characterized in that disposed on the side facing away. The recesses 18 and 19 provided in the side walls 14 and 15 of the cylindrical blinders 14 and 15 are covered by tab-shaped plates 21 and 22, respectively. And the plate is firmly engaged with the side walls (14 and 15) at its ends, respectively, and protrudes obliquely into the blinder space (12 and 13) at its free ends. 4. The recesses 18 and 19 provided in the side walls 14 and 15 of the cylindrical blinders 14 and 15 are covered by tab-shaped plates 21 and 22, respectively. Is respectively firmly coupled to the side walls (14 and 15) at their ends and protrudes obliquely into the blinder space (12 and 13) at their free ends. 5. The recesses 18 and 19 provided in the side walls 14 and 15 of the cylindrical blinders 14, 15 are covered by tab-shaped plates 21 and 22, respectively. Is respectively firmly coupled to the side walls (14 and 15) at their ends and protrudes obliquely into the blinder space (12 and 13) at their free ends.