KR100203576B1 - Optical modulation system and its fabrication method - Google Patents
Optical modulation system and its fabrication method Download PDFInfo
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- KR100203576B1 KR100203576B1 KR1019940030344A KR19940030344A KR100203576B1 KR 100203576 B1 KR100203576 B1 KR 100203576B1 KR 1019940030344 A KR1019940030344 A KR 1019940030344A KR 19940030344 A KR19940030344 A KR 19940030344A KR 100203576 B1 KR100203576 B1 KR 100203576B1
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- 230000003287 optical effect Effects 0.000 title claims abstract description 38
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 15
- 238000000034 method Methods 0.000 title claims description 8
- 239000000758 substrate Substances 0.000 claims abstract description 31
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 9
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 9
- 239000004020 conductor Substances 0.000 claims abstract description 7
- 239000011159 matrix material Substances 0.000 claims abstract description 7
- 239000000853 adhesive Substances 0.000 claims description 4
- 230000001070 adhesive effect Effects 0.000 claims description 4
- 238000002955 isolation Methods 0.000 claims description 3
- 230000005684 electric field Effects 0.000 description 9
- 239000004973 liquid crystal related substance Substances 0.000 description 4
- 238000010894 electron beam technology Methods 0.000 description 3
- 230000010287 polarization Effects 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 241000953555 Theama Species 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000001186 cumulative effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/34—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 reflector
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/02—Function characteristic reflective
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- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Nonlinear Science (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
본 발명은 광변조장치와 그 제조방법에 관한 것으로, MXN 매트릭스어레이 형태로 배열된 다수의 구동소자를 갖춘 구동기판상에 형성되는 광변조장치에 있어서, 상기 광변조장치는 전왜소자로 구성되고 하부면에 슬럿이 가공 형성된 변형부(42)와, 상기 구동기판내의 대응하는 구동소자의 신호전극패드에 접속되고 상기 슬럿을 포함하는 변형부(42)의 하부면 전체에 도전성 재료로 형성된 하부전극(44)과, 상기 변형부(42)의 상부면에 알루미늄으로 형성되어 반사면으로서도 작용하는 상부전극(46)으로 이루어진 액츄에이터로 구성되고, 전왜소자의 전왜소자를 변형부로 적용하여 그 전왜소자에 전계가 인가되는 경우에 야기되는 전단력 변형을 이용하여 광로조절이 가능한 것이다.The present invention relates to an optical modulation device and a method of manufacturing the same, wherein the optical modulation device is formed on a driving substrate having a plurality of driving elements arranged in the form of an MXN matrix array. A lower electrode 44 formed of a conductive material on the entire lower surface of the deformable portion 42 having a slot formed therein and connected to a signal electrode pad of a corresponding driving element in the driving substrate and including the slot. ) And an actuator made of an upper electrode 46 formed of aluminum on the upper surface of the deformable portion 42 and also acting as a reflective surface. It is possible to control the optical path by using the shear force deformation caused when applied.
Description
제1도는 종래의 일예에 따른 광변조장치의 구조를 나타낸 단면도.1 is a cross-sectional view showing the structure of an optical modulator according to a conventional example.
제2도는 본 발명에 따른 광변조장치의 구조를 나타낸 도면.2 is a view showing the structure of an optical modulator according to the present invention.
제3도는 제2도에 도시된 본 발명에 따른 광변조장치의 작용을 설명하는 공정도.3 is a process diagram illustrating the operation of the optical modulation device according to the present invention shown in FIG.
제 4a도 내지 d도는 본 발명에 따른 광변조장치의 제조방법을 나타낸 공정 단면도이다.4A to 4D are cross-sectional views illustrating a method of manufacturing the optical modulator according to the present invention.
* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings
10 : 광변조장치 11 : 구동기판10: optical modulator 11: driving substrate
13 : 신호전극패드 15, 17 : 제1, 제2변형부13: signal electrode pad 15, 17: first and second deformation parts
19 : 신호전극 21 : 바이어스전극19: signal electrode 21: bias electrode
30 : 구동기판 40 : 액츄에이터30: drive substrate 40: actuator
42 : 변형부 44 : 하부전극42: deformation portion 44: lower electrode
46 : 상부전극46: upper electrode
본 발명은 투사형 화상표시시스템에 적합한 광변조장치와 그 제조방법에 관한 것으로, 보다 상세하게는 전왜소자의 전왜소자를 변형부로 적용하여 그 전왜소자에 전계가 인가되는 경우에 발생되는 전단력변형을 이용하여 광로조절이 가능한 광변조장치와 그 제조방법에 관한 것이다.The present invention relates to an optical modulator suitable for a projection type image display system and a method of manufacturing the same. More particularly, the present invention relates to an optical modulator and a method of manufacturing the same, using a shear force deformation generated when an electric field is applied to the strainer. The present invention relates to an optical modulator capable of controlling an optical path and a method of manufacturing the same.
일반적으로, 컬러화상의 구현에 채용되는 화상표시장치는 직시형 화상표시 장치와 투사형 표시장치로 대별되고, 그 중 직시형 화상표시장치는 R·G·B 전자총으로부터 방사된 전자비임에 대응하여 형광패널상에 R·G·B 형광점이 형성되어, 컬러화상의 R0fG0fB신호에 대응하여 방사되는 전자비임에 의해 R·G·B 광점의 어느 하나가 반응하여 1화소를 표시하는 CRT장치가 대표적이지만, 그 CRT 장치는 1화소에 대해 R·G·B형광점이 형성되어야만 되므로 화면의 대형화가 제한될 수 밖에 없고, 또한 R·G·B전자총으로부터 형광패널로 전자비임이 유동하게 해야하는 절대간격이 확보되어야만 되므로 그 전체적인 치수 및 부피가 증대된다.In general, an image display apparatus employed for implementing a color image is roughly classified into a direct view type image display device and a projection type display device, and the direct view type image display device includes a fluorescent lamp corresponding to an electron beam emitted from an R, G, B electron gun. A CRT apparatus in which one of the R, G, B light spots reacts to display one pixel by forming an R, G, B fluorescent point on the panel, and an electron beam emitted corresponding to the R0fG0fB signal of the color image is typical. Since the CRT device must be formed with R, G, and B fluorescent spots for one pixel, the size of the screen must be limited, and the absolute interval to allow electron beams to flow from the R, G, B electron gun to the fluorescent panel must be secured. This increases the overall dimensions and volume.
이에 대해, 투사형 표시장치는 균일한 액정의 배열상태로부터 컬러화상의 표시를 위한 신호전압이 인가되는 경우 액정의 배열상태가 변경되어 컬러화상의 구현이 가능하도록 된 LCD장치가 대표적이지만, 그러한 LCD장치에서는 액정의 배열상태를 이용하여 컬러화상의 구현이 가능하므로 평판형상으로 제조되고, 그 때문에 경량 박형화가 가능하게 된다.On the other hand, the projection type display device is typically an LCD device in which the arrangement of the liquid crystal is changed to enable the color image when a signal voltage for displaying the color image is applied from the uniform arrangement of the liquid crystal. In the present invention, since a color image can be implemented by using an arrangement of liquid crystals, the plate can be manufactured in a flat plate shape.
그러나, 그 LCD장치에서는 컬러화상의 표시를 위한 신호전압에 반응하여 액정의 배열상태를 변경시키는 편광판의 사용의 의해 광효율이 저하되기 쉽다.However, in the LCD device, the light efficiency tends to be lowered by the use of a polarizing plate that changes the arrangement of liquid crystals in response to signal voltages for displaying color images.
그러한 점을 고려하여, 최근에는 미합중국 Aura상에 의해 AMA(Actuated mirror array)를 사용하는 화상표시장치가 제안되었는 바, 그 AMA에 따르면 MX1/화소를 스캐닝미러에 의해 순차적으로 주사하는 형식의 1차원구조, 및 MXN화소를 스캐닝주사하여 화상표시하는 2차원구조로 구성된다.In view of the above, an image display apparatus using an Actuated mirror array (AMA) has recently been proposed by the US Aura Corporation. According to the AMA, a one-dimensional type of sequentially scanning MX1 / pixel by a scanning mirror Structure and a two-dimensional structure in which the image is scanned and scanned by MXN pixels.
제1도는 종래의 일예에 따른 투사형 화상표시장치로서의 AMA에 사용되는 광로조절장치의 단면도로서, 참조부호 10으로 표시된 광로조절장치는 글래스 또는 A12O3와 같은 절연물질, 또는 실리콘과 같은 반도체로 이루어진 구동기판(11)을 포함하게 되고, 그 구동기판(11)의 내측에는 화소의 구동을 위한 다수의 트랜지스터(도시생략)가 매트릭스어레이형태로 배열형성되며, 그 구동기판(11)의 표면에는 각 트랜지스터와 전기적으로 접속된 다수의 신호전극패드(13)가 형성된다.The cross-sectional views of the optical path control device used in the AMA as the projection type image display apparatus according to the conventional example 1 degrees, the optical path control device indicated by the reference numeral 10 is a semiconductor such as an insulating material, or silicon, such as glass or A1 2 O 3 And a plurality of transistors (not shown) for driving the pixels are arranged in the form of a matrix array on the inside of the driving substrate 11, and the surface of the driving substrate 11 is formed on the surface of the driving substrate 11. A plurality of signal electrode pads 13 electrically connected to each transistor are formed.
또, 광로조절장치(10)에는 제 1 및 제 2 변형부(15,17)와 신호 및 바이어스 전극 (19,21)을 갖춘 액츄에이터(14)도 포함되고, 상기 제 1 및 제 2 변형부(15,17)는 각기 대향하여 배치된 L자 형상으로 이루어져자 형태로 상기 구동기판 (11)상에 실장된다. 또, 상기 제 1 및 제 2 변형부(15,17)사이에 는 상기 신호전극(19)이 상기 구동기판(11)상의 신호전극패드(13)와 접속되도록 형성되고, 그 신호전극(19)의 대향하는 제1 및 제2 변형부(15,17)의 표면측에는 바이어스전극(21)이 형성된다. 바람직하게, 상기 신호전극(19)과 바이어스전극(21)은 금속과 같은 도전성 재질로 형성되는 한편, 상기 제1 및 제2변형부(15,17)는 신호전극(19)과 수직을 이루는 일측 방향으로 분극(polarization)되어져 형성되고, 그 바이어스전극(21)은 외부의 도선패널(도시생략)에 의해 인접하는 광로조절장치의 바이어스전극들과 연결된다.In addition, the optical path control device 10 also includes an actuator 14 having first and second deformable parts 15 and 17 and signal and bias electrodes 19 and 21. 15, 17) is composed of L-shape each disposed opposite It is mounted on the drive substrate 11 in the form of a ruler. In addition, the signal electrode 19 is formed between the first and second deformable portions 15 and 17 so as to be connected to the signal electrode pad 13 on the driving substrate 11. The bias electrode 21 is formed on the surface side of the first and second deformable portions 15 and 17 facing each other. Preferably, the signal electrode 19 and the bias electrode 21 are formed of a conductive material such as metal, while the first and second deformation parts 15 and 17 are one side perpendicular to the signal electrode 19. Direction polarization, and the bias electrode 21 is connected to the bias electrodes of the adjacent optical path control device by an external conductive panel (not shown).
그러한 구조의 광로조절장치(10)는 구동기판(11)과 신호전극패드(13)를 통해 화상신호전압이 인가되면 제1 및 제2변형부(15,17)가 변형된다. 즉, 예컨대 제1변형부(15)에서 제2변형부(17)의 방향으로 분극된 상태에서 신호전극(19)에 화상신호전압이 인가되면, 분극방향과 전계방향이 제1변형부(17)에서는 일치되지 않은 대신 제2변형부(19)에서 일치된다. 따라서, 제1변형부(15)는 수평방향으로 수축되는 반면 수직방향으로는 팽창되고, 제2변형부(17)는 수평방향으로 팽창되는 반면 수직방향으로는 수축된다. 따라서, 그 액츄에이터(14)의 상측에 형성된 반사면(23)이 제1변형부(15)로부터 제2변형부(17)의 방향으로 기울어져 일정한 경사각을 갖게 된다.In the optical path control apparatus 10 having such a structure, when the image signal voltage is applied through the driving substrate 11 and the signal electrode pad 13, the first and second deformation parts 15 and 17 are deformed. That is, for example, when an image signal voltage is applied to the signal electrode 19 in a state in which the first deformation unit 15 is polarized in the direction of the second deformation unit 17, the polarization direction and the electric field direction are the first deformation unit 17. ) Does not match but instead matches in the second deformation unit 19. Accordingly, the first deformable portion 15 is contracted in the horizontal direction while expanded in the vertical direction, and the second deformed portion 17 is expanded in the horizontal direction while contracted in the vertical direction. Therefore, the reflecting surface 23 formed on the upper side of the actuator 14 is inclined in the direction of the second deformable portion 17 from the first deformable portion 15 to have a constant inclination angle.
통상적으로, 그러한 AMA장치의 광로조절장치를 제조하는 경우에는 신호전극(19)을 형성하기 위한 금속도전막과 입자세라믹이 교차하는 형태로 다수 층을 적층함에 이어, 일측 방향으로 분극형성한 다음 적층방향에 대해 수직으로 절단하여 구동기판(11)에 실장하게 된다.In general, when manufacturing the optical path control device of such an AMA device, by laminating a plurality of layers in the form of intersecting the metal conductive film and the particle ceramic for forming the signal electrode 19, polarization is formed in one direction, and then laminated It is cut perpendicular to the direction and mounted on the driving substrate 11.
따라서, 그러한 AMA의 광로조절장치의 제조시에 다층 세라믹의 가공성이 난이하기 때문에 400층 이상의 적층시 누적공차가 증대될 뿐만 아니라 각 층의 접합시 가공성이 곤란하게 된다. 또, 각 화소의 전극분리가 실행되어야만 되지만 전극분리를 위한 슬롯(slot)의 가공성이 용이하지 않은 실정이다.Therefore, since the workability of the multilayer ceramic is difficult in manufacturing such an AMA optical path control device, not only the cumulative tolerance is increased when laminating more than 400 layers but also the workability at the time of bonding each layer becomes difficult. In addition, although the electrode separation of each pixel has to be performed, the processability of the slot for electrode separation is not easy.
따라서, 본 발명은 상기한 사정을 감안하여 이루어진 것으로, 그 주 목적은 전왜소자로 형성된 변형부의 상측과 하측에 형성된 상부전극과 하부전극에 전계를 인가하는 경우 그 전왜소자에 의한 변형부의 전단력변형력에 의해 광변조가 가능하도록 된 광변조장치를 제공하는 것이다.Accordingly, the present invention has been made in view of the above circumstances, and its main object is to apply the shear force deformation force of the deformation portion of the deformation portion by the electro-distortion element when an electric field is applied to the upper and lower electrodes formed on the upper side and the lower side of the deformation portion formed of the electro-distortion element. It is to provide an optical modulation device that is capable of optical modulation by.
본 발명의 다른 목적은 변형부를 구성하는 전왜소자의 전단력변형을 이용하여 광변조가 가능한 광변조장치의 제조방법을 제공하는 것이다.Another object of the present invention is to provide a method of manufacturing an optical modulator capable of optical modulation by using the shear force deformation of the electrostrictive element constituting the deformation portion.
상기한 목적을 달성하기 위해, 본 발명의 바람직한 양태에 따르면, MXN 매트릭스어레이 형태로 배열된 다수의 구동소자를 갖춘 구동기판상에 형성되는 광변조장치에 있어서, 상기 광변조장치는 전왜소자로 구성되고 하부면에 슬럿이 가공형성된 변형부와 상기 구동기판내의 대응하는 구동소자의 신호전극패드에 접속되고 상기 슬럿을 포함하는 변형부의 하부면 전체에 도전성 재료로 형성된 하부전극과, 상기 변형부의 상부면에 알루미늄으로 형성되어 반사면으로서도 작용하는 상부전극으로 이루어진 액츄에이터로 구성된다.In order to achieve the above object, according to a preferred aspect of the present invention, in the optical modulation device formed on a driving substrate having a plurality of driving elements arranged in the form of an MXN matrix array, the optical modulation device is composed of an electrostrictive element A lower electrode formed of a conductive material on the entire lower surface of the deformable portion including the slot and connected to the deformable portion formed with the slot on the lower surface thereof and the signal electrode pad of the corresponding driving element in the driving substrate; It consists of an actuator made of aluminum and consisting of an upper electrode which also acts as a reflecting surface.
본 발명의 따른 바람직한 양태에 따르면, MXN 매트릭스어레이 형태로 배열된 다수의 구동소자를 갖춘 구동기판상에 형성되는 광변조장치의 제조방법에 있어서, 전왜소자로 형성된 변형부의 하부면에 슬럿을 가공형성하는 단계와, 그 슬럿표면을 포함하는 변형부의 전체 하부면에 하부전극을 도포하는 단계와, 상기 변형부에 형성된 슬럿의 일측상의 하부전극을 상기 구동기판의 신호전극패드와 전도성 접착제를 사용하는 접착하는 단계와, 상기 변형부의 상부면으로부터 소자 분리가공을 행한 다음 알루미늄으로 형성되어 반사면으로 작용하도록 상기 구동기판의 공통전극과 접착되는 상부전극을 도포하여 형성하는 단계로 이루어딘 광변조장치의 제조방법이 제공된다.According to a preferred aspect of the present invention, in the method of manufacturing an optical modulator formed on a drive substrate having a plurality of drive elements arranged in the form of an MXN matrix array, a slot is formed on the bottom surface of the deformation portion formed by the electrostrictive elements. And applying a lower electrode to the entire lower surface of the deformable portion including the slotted surface, and bonding the lower electrode on one side of the slot formed in the deformed portion to the signal electrode pad of the driving substrate using a conductive adhesive. And performing an isolation process from the upper surface of the deformable portion, and then applying and forming an upper electrode formed of aluminum to be bonded to the common electrode of the driving substrate to act as a reflective surface. This is provided.
이러한 본 발명에 따른 광변조장치와 그 제조방법에 의하면, 전왜소자를 이용하여 변형부를 형성하고 그 변형부의 상측과 하측에 공통전극과 신호전극으로서 상부전극과 하부전극을 형성하여 구동기판에서 상기 상부전극과 하부전극에 전계가 인가되는 경우 전왜소자의 전단변형력에 의해 광변조가 행해지게 된다.According to the optical modulator according to the present invention and a method of manufacturing the same, a deformation part is formed by using an electrostrictive element, and an upper electrode and a lower electrode are formed as a common electrode and a signal electrode on the upper side and the lower side of the deformation part, thereby forming the upper part on the driving substrate. When an electric field is applied to the electrode and the lower electrode, light modulation is performed by the shear deformation force of the electro-distortion element.
이하, 본 발명에 대해 첨부도면을 참조하여 상세하게 설명한다.Hereinafter, with reference to the accompanying drawings, the present invention will be described in detail.
제2도는 본 발명에 따른 광변조장치를 나타낸 단면도로서, 참조부호 30은 MXN매트릭스어레이의 구동소자(예컨대 MOS트랜지스터)가 내장됨과 더불어 표면에는 각 구동소자에 전기적으로 접속되는 신호전극패드(32)와 공통전극패드(34)가 갖추어진 구동기판을 나타내고, 참조부호 40은 그 구동기판(30)상에 각 구동소자에 대응하는 형태로 대응하는 구동소자에서 신호전극패드(32)와 공통전극패드(34)을 통해 인가되는 전계에 의해 광변조작용을 행하는 광변조장치의 액츄에이터를 나타낸다.2 is a cross-sectional view showing an optical modulation device according to the present invention, and reference numeral 30 denotes a signal electrode pad 32 which is electrically connected to each driving element on the surface thereof with a built-in driving element (for example, a MOS transistor) of an MXN matrix array. And a driving substrate provided with a common electrode pad 34, reference numeral 40 denotes a signal electrode pad 32 and a common electrode pad in the corresponding driving element in a form corresponding to each driving element on the driving substrate 30. FIG. An actuator of the optical modulation device that performs light modulation by an electric field applied through 34 is shown.
그 액츄에이터(40)는 인가되는 전계에 의해 변형을 일으키는 변형부(42)를 포함하게 되는데, 본 발명에 따르면 그 변형부(42)는 인가되는 전계에 의해 전단 변형력을 갖는 전왜소자로 형성된다. 그 전왜소자로 형성된 변형부(42)의 하측에는 전도성 접착제에 의해 상기 구동기판(30)의 신호전극패드(32)와 전기적으로 접착되어 신호전극으로서 작용하는 하부전극(44)이 형성된다. 또, 상기 변형부(42)의 상측면에는 상기 구동기판(30)의 공통전극패드(34)에 전기적으로 접속되는 상부전극(46)이 형성되는데, 그 상부전극(46)을 바람직하게 알루미늄과 같은 재료로 형성되어 반사면으로서도 작용하게 된다.The actuator 40 includes a deformable portion 42 which causes deformation by an applied electric field. According to the present invention, the deformable portion 42 is formed of an electrostrictive element having shear deformation force by an applied electric field. A lower electrode 44 is formed below the deformable portion 42 formed of the electrostrictive element, and is electrically bonded to the signal electrode pad 32 of the driving substrate 30 by a conductive adhesive to serve as a signal electrode. In addition, an upper electrode 46 is formed on the upper side of the deformable portion 42 to be electrically connected to the common electrode pad 34 of the driving substrate 30. The upper electrode 46 is preferably made of aluminum. It is formed of the same material to act as a reflecting surface.
따라서, 제2도에 도시된 본 발명에 따른 광변조장치는 구동기판(30)의 신호전극패드(32)와 공통전극패드(34)에서 전계가 인가되면, 전왜소자로 이루어진 변형부(42)가 하부전극(44) 및 상부전극(46)에 의해 구동기판(30)상에 접착된 상태에서 그 전계에 비례하여 제3도에 도시된 형태로 전단변형력이 작용하여 액츄에이터(40)가 일정한 각도로 기울어지게 되어 광변조작용이 행해질 수 있다.Accordingly, in the optical modulation device according to the present invention shown in FIG. 2, when an electric field is applied from the signal electrode pad 32 and the common electrode pad 34 of the driving substrate 30, the deformable portion 42 made of an electrostrictive element may be used. Is bonded to the driving substrate 30 by the lower electrode 44 and the upper electrode 46, the shear deformation force acts in the form shown in FIG. 3 in proportion to the electric field so that the actuator 40 has a constant angle. It can be inclined so that light modulation can be performed.
이어, 제4도(a)내지(b)를 참조하여 본 발명에 따른 광변조장치의 제조방법에 대해 설명한다.Next, a method of manufacturing the optical modulator according to the present invention will be described with reference to FIGS. 4A to 4B.
먼저, 제4도(a)에 도시된 바와 같이 일정한 두께의 전왜소자에 의한 변형부(42)의 하측면에 예컨대 레지스트층을(도시생략) 일정한 간격으로 패터닝한 다음 에칭방법등에 의해 레지스트층이 도포된 부분이 남겨지는 형태로 에칭하여 슬럿(50)을 가공하게 된다. 이어, 그 슬럿(50)의 표면을 포함하는 상기 변형부(42)의 전체 하측면에 예컨대 도전성 재료를 도포하여 하부전극층(44a)을 형성하게 된다.First, as shown in FIG. 4 (a), a resist layer (not shown) is patterned at regular intervals on the lower surface of the deformable portion 42 by the electrostrictive element having a constant thickness, and then the resist layer is formed by an etching method or the like. The slot 50 is processed by etching in a form in which the coated part remains. Subsequently, the lower electrode layer 44a is formed by applying, for example, a conductive material to the entire lower surface of the deformable portion 42 including the surface of the slot 50.
그리고나서, 제4도(b)에 도시된 바와 같이 신호전극패드(32)와 공통전극패드(34)가 갖추어진 구동기판(30; 제2도 참조)과 제4도(a)에 도시한 구조를 갖춘 변형부(42)를 접착하게 되는데, 그 접착의 경우에는 상기 변형부(42)의 슬럿(50)의 일측 모서리가 전도성 접착제(52)에 의해 상기 구동기판(30)의 신호전극패드(32)에 접착되도록 실행된다.Then, as shown in FIG. 4 (b), the driving substrate 30 (see FIG. 2) equipped with the signal electrode pad 32 and the common electrode pad 34 and the fourth electrode shown in FIG. The deformable part 42 having the structure is bonded to each other. In this case, one side edge of the slot 50 of the deforming part 42 is connected to the signal electrode pad of the driving substrate 30 by the conductive adhesive 52. It is executed to adhere to 32.
그후, 제4도(c)에 도시된 바와 같이 상기 구동기판(30)상에 접착된 변형부(42)의 상부에서 상기 슬럿(50)의 부분이 관통되는 형태로 소자분리를 수행하여 인접한 액츄에이터와 분리시키게 된다.Subsequently, as shown in FIG. 4 (c), the device is separated in a form in which a portion of the slot 50 penetrates on the upper part of the deformable part 42 adhered to the driving substrate 30, thereby adjoining the adjacent actuator. Separated from.
이어, 제4도(d)에 도시된 바와 같이 상기 변형부(42)상에 예컨대 알루미늄과 같은 양호한 도전성 재질을 도포하여 상기 공통전극패드(34)와 전기적으로 접속되는 형태로 상부전극(46)을 형성하게 된다. 본 발명에 따르면, 그 상부전극(46)은 알루미늄과 같은 양호한 전도성 재질, 즉 금속재로서 형성하여 반사미러면으로서 작용하도록 형성된다.Subsequently, as illustrated in FIG. 4D, the upper electrode 46 may be electrically connected to the common electrode pad 34 by applying a good conductive material such as aluminum to the deformable portion 42. Will form. According to the present invention, the upper electrode 46 is formed as a good conductive material such as aluminum, that is, a metal material, so as to act as a reflecting mirror surface.
그리고, 이상에서는 상부전극(46)은 상기 제4도(c)에서 설명한 공정, 즉 변형부(42)의 하측면에 형성된 슬럿(50)의 다른측의 부분에서 소자분리를 수행하고나서 형성되는 예가 설명되었지만, 우선적으로 상부전극(46)의 형성을 위한 알루미늄층(도시생략)을 전체면에 도포한 다음 상기 슬럿(50)의 다른단측에 위치하는 그 상부전극(46)과 변형부(42) 및 하부전극(42)의 부분을 제거함으로써 소자 분리공정과정에서 정의 형성되도록 해도 좋다.In the above, the upper electrode 46 is formed after the device separation is performed in the process described in FIG. 4C, that is, the other side of the slot 50 formed on the lower surface of the deformable portion 42. Although the example has been described, first, an aluminum layer (not shown) for forming the upper electrode 46 is first applied to the entire surface, and then the upper electrode 46 and the deformable portion 42 located at the other end side of the slot 50. ) And the lower electrode 42 may be removed so as to be positively formed during the device isolation process.
이상에서 설명한 바와 같이, 본 발명에 따른 광변조장치와 그 제조방법에 의하면 전왜소자를 변형부로 이용하여 액츄에이터를 제조하여 신호전계 인가시 그 변형부의 전단변형력을 이용하여 광변조를 수행하게 되므로 광변조장치의 구조가 간단하게 됨과 더불어 그 제조공정수도 저감된다.As described above, according to the optical modulation device and the method of manufacturing the same according to the present invention, since the actuator is manufactured using the electrostrictive element as the deformation part, the optical modulation is performed using the shear deformation force of the deformation part when the signal field is applied. The structure of the apparatus is simplified, and the number of manufacturing steps thereof is also reduced.
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