KR0183891B1 - Halftone phase shifting mask and the manufacturing method - Google Patents

Halftone phase shifting mask and the manufacturing method Download PDF

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Publication number
KR0183891B1
KR0183891B1 KR1019960023682A KR19960023682A KR0183891B1 KR 0183891 B1 KR0183891 B1 KR 0183891B1 KR 1019960023682 A KR1019960023682 A KR 1019960023682A KR 19960023682 A KR19960023682 A KR 19960023682A KR 0183891 B1 KR0183891 B1 KR 0183891B1
Authority
KR
South Korea
Prior art keywords
manufacturing
phase shifting
halftone phase
shifting mask
mask
Prior art date
Application number
KR1019960023682A
Other languages
English (en)
Other versions
KR980003812A (ko
Inventor
Sang-Kyun Woo
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Priority to KR1019960023682A priority Critical patent/KR0183891B1/ko
Publication of KR980003812A publication Critical patent/KR980003812A/ko
Application granted granted Critical
Publication of KR0183891B1 publication Critical patent/KR0183891B1/ko

Links

KR1019960023682A 1996-06-25 1996-06-25 Halftone phase shifting mask and the manufacturing method KR0183891B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019960023682A KR0183891B1 (en) 1996-06-25 1996-06-25 Halftone phase shifting mask and the manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019960023682A KR0183891B1 (en) 1996-06-25 1996-06-25 Halftone phase shifting mask and the manufacturing method

Publications (2)

Publication Number Publication Date
KR980003812A KR980003812A (ko) 1998-03-30
KR0183891B1 true KR0183891B1 (en) 1999-04-01

Family

ID=19463395

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960023682A KR0183891B1 (en) 1996-06-25 1996-06-25 Halftone phase shifting mask and the manufacturing method

Country Status (1)

Country Link
KR (1) KR0183891B1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10396096B2 (en) 2016-12-19 2019-08-27 Samsung Display Co., Ltd. Transistor array panel and manufacturing method thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10396096B2 (en) 2016-12-19 2019-08-27 Samsung Display Co., Ltd. Transistor array panel and manufacturing method thereof
US10741586B2 (en) 2016-12-19 2020-08-11 Samsung Display Co., Ltd. Transistor array panel and manufacturing method thereof

Also Published As

Publication number Publication date
KR980003812A (ko) 1998-03-30

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