KR0181760B1 - Metal seat material for shadow mask - Google Patents
Metal seat material for shadow mask Download PDFInfo
- Publication number
- KR0181760B1 KR0181760B1 KR1019960002945A KR19960002945A KR0181760B1 KR 0181760 B1 KR0181760 B1 KR 0181760B1 KR 1019960002945 A KR1019960002945 A KR 1019960002945A KR 19960002945 A KR19960002945 A KR 19960002945A KR 0181760 B1 KR0181760 B1 KR 0181760B1
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- KR
- South Korea
- Prior art keywords
- metal sheet
- surface roughness
- shadow mask
- sheet material
- present
- Prior art date
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/20—Manufacture of screens on or from which an image or pattern is formed, picked up, converted or stored; Applying coatings to the vessel
- H01J9/22—Applying luminescent coatings
- H01J9/227—Applying luminescent coatings with luminescent material discontinuously arranged, e.g. in dots or lines
- H01J9/2271—Applying luminescent coatings with luminescent material discontinuously arranged, e.g. in dots or lines by photographic processes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/02—Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
- H01J29/06—Screens for shielding; Masks interposed in the electron stream
- H01J29/07—Shadow masks for colour television tubes
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- ing And Chemical Polishing (AREA)
- Electrodes For Cathode-Ray Tubes (AREA)
Abstract
본 발명은 섀도우마스크용 금속시트재에 관한 것으로서, 본 발명의 목적은 상기한 표면조도차의 장점을 취하여 균일한 공경이 형성되고 스티킹 현상이 해소되는 섀도우마스크용 금속시트재를 제공하는 데 있다. 이와 같은 목적을 실현하기 위한 본 발명에 의한 섀도우마스크용 금속시트재는 포토에칭시 각 공정에서 감광막등 막 밀착이 향상되도록 하고 브라운관 제조공정시 섀도우마스크간에 스티킹이 방지되도록 공경형성 부위인 중앙부의 표면조도를 미세하게 형성하고, 양측면부의 표면조도를 크게 형성함을 본 발명의 요지로 한다.The present invention relates to a metal sheet material for the shadow mask, and an object of the present invention is to provide a metal sheet material for the shadow mask in which a uniform pore is formed and the sticking phenomenon is eliminated by taking advantage of the surface roughness difference described above. . The shadow sheet metal sheet material according to the present invention for achieving the above object is to improve the adhesion of the photoresist film in each process during photo-etching and to prevent the sticking between the shadow mask during the cathode ray tube manufacturing process, the surface of the central portion which is a pore-forming part It is a summary of the present invention that the roughness is finely formed and the surface roughness of both side portions is largely formed.
Description
제1도는 종래기술에 의한 섀도우마스크용 금속시트재의 표면조도를 나타내기 위한 단면도로서,1 is a cross-sectional view showing the surface roughness of the shadow sheet metal sheet material according to the prior art,
(a)는 표면조도가 0.2㎛ 이하인 경우의 도면.(a) is a figure when surface roughness is 0.2 micrometer or less.
(b)는 표면조도가 0.8㎛ 이상인 경우의 도면.(b) is a figure where surface roughness is 0.8 micrometer or more.
(c)는 표면조도가 0.2∼0.8㎛인 경우의 도면임.(c) is a figure where surface roughness is 0.2-0.8 micrometer.
제2도는 본 발명에 의한 섀도우마스크용 금속시트재의 표면조도의 영역을 나타낸 평면도.2 is a plan view showing the area of the surface roughness of the metal sheet for shadow mask according to the present invention.
제3도는 제2도에 적용된 섀도우마스크용 금속시트재의 표면조도를 나타낸 단면도.3 is a cross-sectional view showing the surface roughness of the metal sheet for shadow mask applied in FIG.
* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings
40 : 금속시트재 50 : 중앙부40: metal sheet material 50: center portion
60 : 양측면부60: both sides
본 발명은 섀도우마스크용 금속시트재에 관한 것으로서, 더욱 상세하게는 포토에칭에 의해 제조되어 칼라텔레비젼의 섀도우마스크 및 반도체의 리드프레임에 사용되는 금속시트재의 표면조도(surface roughness)를 변형시켜 제품의 품질이 향상되는 섀도우마스크용 금속시트재에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a metal sheet material for shadow mask, and more particularly, by surface etching of a metal sheet material manufactured by photoetching and used for a lead mask of a semiconductor and a shadow mask of color television. The present invention relates to a metal sheet material for shadow mask having improved quality.
종래의 섀도우마스크용 금속시트재는 철광석을 용융시켜 불순물을 걸러내는 전로공정과, 가스성분을 제거하는 탈가스공정과, 연속주조공정, 열간압연공정, 산세척공정, 냉간압연공정, 조도부여공정과 원하는 폭과 길이로 절단하는 절단공정을 순차 거쳐 이루어진다. 이후 금속시트재는 포토에칭방법에 의해 섀도우마스크 및 리드프레임이 최종 제조된다.Conventional shadow mask metal sheet materials include a converter process for melting iron ore to filter out impurities, a degassing process for removing gaseous components, a continuous casting process, a hot rolling process, an pickling process, a cold rolling process, a roughening process, It is made through the cutting process to cut to the desired width and length. After that, the metal sheet material is finally manufactured by the shadow mask and the lead frame by a photo etching method.
상기 제조단계에서 조도부여 공정은 금속시트재의 포토에칭에 따른 도포공정 및 노광공정시 막 밀착성 향상과, 브라운관 제조공정시 섀도우마스크간에 고착되는 스티킹(sticking) 현상을 방지하기 위한 것으로서, 제1도에서와 같이 종래의 금속시트재(10)(20)(30)는 0.2㎛ 이하 또는 0.8㎛ 이상 또는 0.2∼0.8㎛의 표면조도를 부여했다.The roughness imparting step in the manufacturing step is to improve the film adhesion during the coating process and the exposure process according to the photoetching of the metal sheet material, and to prevent sticking phenomenon that is fixed between the shadow mask during the CRT manufacturing process. As in the conventional metal sheet materials 10, 20 and 30, 0.2 m or less or 0.8 m or more or 0.2 to 0.8 m surface roughness.
그러나 상기 0.2㎛ 이하의 표면조도를 갖는 종래의 금속시트재(10)는 표면조도가 미세하여 포토에칭에서 균일한 공경이 형성되나 스티킹을 유발하여 제품의 품질 저하를 초래한다.However, the conventional metal sheet member 10 having a surface roughness of 0.2 μm or less has a fine surface roughness to form a uniform pore size in photoetching, but causes sticking, resulting in deterioration of product quality.
0.8㎛ 이상의 표면조도를 갖는 종래의 금속시트재(20)는 표면조도가 커 스티킹 현상이 줄어드나 공경이 불균일해져 제품의 품질저하를 초래한다.The conventional metal sheet member 20 having a surface roughness of 0.8 μm or more has a large surface roughness, resulting in a reduced sticking phenomenon, but uneven pore size, resulting in deterioration of product quality.
0.2∼0.8㎛ 사이의 불균일한 표면조도를 갖는 종래의 금속시트재(30)는 금속시트재(30)의 표면부분별로 표면조도가 다르므로 포토에칭에 따른 에칭공정에서 에칭액의 도달거리 및 도달각도가 달라져서 불균일하고 거친 공경이 형성된다.Conventional metal sheet material 30 having a non-uniform surface roughness of 0.2 ~ 0.8㎛ has a different surface roughness for each surface portion of the metal sheet material 30, so the etching distance and the reaching angle of the etching solution in the etching process according to the photo etching Is changed to form a non-uniform and rough pore.
따라서 본 발명의 목적은 상기한 표면조도차의 장점을 취하여 균일한 공경이 형성되고 스티킹 현상이 해소되는 섀도우마스크용 금속시트재를 제공하는데 있다.Accordingly, an object of the present invention is to provide a shadow mask metal sheet material in which a uniform pore is formed and a sticking phenomenon is eliminated by taking advantage of the surface roughness difference described above.
이와 같은 목적을 실현하기 위한 본 발명에 의한 섀도우마스크용 금속시트재는 포토에칭시 각 공정에서 감광막등 막 밀착이 향상되도록 하고 브라운관 제조공정시 섀도우마스크간에 스티킹이 방지되도록 공경형성 부위인 중앙부의 표면조도를 미세하게 형성하고, 양측면부의 표면조도를 크게 형성함을 특징으로 한다.The shadow sheet metal sheet material according to the present invention for achieving the above object is to improve the adhesion of the photoresist film in each process during photo-etching and to prevent the sticking between the shadow mask during the cathode ray tube manufacturing process, the surface of the central portion which is a pore-forming part It is characterized in that the roughness is finely formed and the surface roughness of both side portions is largely formed.
이하, 첨부한 도면 제3도와 제4도를 참조하여 본 발명의 바람직한 실시예를 상세히 설명한다.Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to FIGS. 3 and 4.
제3도와 제4도에서 부호 40은 본 발명의 표면조도가 적용된 금속시트재로서, 상기 금속시트재(40)는 본 발명에서 공경형성부위, 즉 감광막 도포부위인 중앙부(50)와, 비도포부위인 양측면부(60)로 구분하고, 중앙부(50)의 표면조도를 0.2㎛ 이하를 갖도록 하며, 양측면부(60)의 표면조도는 0.5㎛ 이상을 갖도록 구성한다.In FIG. 3 and FIG. 4, reference numeral 40 denotes a metal sheet material to which the surface roughness of the present invention is applied, and the metal sheet material 40 is a central portion 50 which is a pore forming portion, that is, a photoresist coating portion in the present invention, and a non-coating portion. The upper surface roughness of the side portion 60 is divided into 0.2 μm or less, and the surface roughness of both side parts 60 is configured to have 0.5 μm or more.
상기와 같이 표면조도를 갖는 본 발명의 섀도우마스크용 금속시트재(40)의 작용 및 효과를 설명한다.The operation and effects of the shadow mask metal sheet material 40 of the present invention having the surface roughness as described above will be described.
우선, 공경형성부위인 중앙부(50)의 표면조도가 0.2㎛ 이하로 미세함으로 감광막등 막 밀착이 향상되며, 현상공정후 에칭공정에서 에칭액의 도달거리 및 도달각도차가 줄어들고 이에 균일한 공경이 형성되어 섀도우마스크의 품질이 향상된다.First, the surface roughness of the central portion 50, which is the pore forming portion, is fine to 0.2 μm or less, thereby improving the adhesion of the film to the photoresist film. The quality of the shadow mask is improved.
그리고 양측면부(60)의 표면조도가 0.5㎛ 이상으로 크게 형성함으로서 섀도우마스크간의 스티킹 현상이 해소되어 브라운관 제조공정시 불량이 방지되는 것이다.In addition, the surface roughness of both side portions 60 is formed to be larger than 0.5 μm, so that the sticking phenomenon between the shadow masks is eliminated and defects are prevented during the CRT manufacturing process.
상술한 바와 같이 본 발명에 의한 섀도우마스크용 금속시트재는 공경형성부위의 표면조도를 미세하게 형성하고 양측면부위의 표면조도를 크게 형성하여 포토에칭시 균일한 공경이 형성되고 브라운관 제조공정시 스티킹이 방지되는 유용한 발명이다.As described above, the shadow sheet metal sheet material according to the present invention forms a fine surface roughness of the pore forming portion and a large surface roughness of both side portions to form a uniform pore when photoetching and sticking during the manufacturing process of the CRT. It is a useful invention to be avoided.
Claims (3)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019960002945A KR0181760B1 (en) | 1996-02-07 | 1996-02-07 | Metal seat material for shadow mask |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019960002945A KR0181760B1 (en) | 1996-02-07 | 1996-02-07 | Metal seat material for shadow mask |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR970063361A KR970063361A (en) | 1997-09-12 |
| KR0181760B1 true KR0181760B1 (en) | 1999-03-20 |
Family
ID=19450885
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019960002945A KR0181760B1 (en) | 1996-02-07 | 1996-02-07 | Metal seat material for shadow mask |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR0181760B1 (en) |
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1996
- 1996-02-07 KR KR1019960002945A patent/KR0181760B1/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| KR970063361A (en) | 1997-09-12 |
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