KR0171176B1 - Cathode device for apparatus for sputtering target - Google Patents

Abstract

The magnet yokes 22, 23, permanent magnets 33, 34, 53, 54 and 35, 36, 55, 56 disposed between the target and the magnet yoke, and the magnet yokes 22 and 23 are vacuum chambers 6 In the cathodic installation for spraying targets 49 and 50 with fixings A and B for fixing to the bulkhead part 5 of the apparatus, a gap is formed by screws or spring bolts 67, 67 '. Targets 49 and 50 to a cam or cam pair 43, 44 and 43 ', 44' whose side is supported by a top plate 41 and 42 having a) coupled to the magnet yokes 22 and 23; The magnet yokes 22 and 23 are firmly fixed to the sides of the magnet yokes 22 and 23, and the rake-shaped beads or clamp beads 37, 38 and 39, 40 formed in a U shape are provided on both sides of the magnet yokes 22 and 23. Leg or rake edge portions 59 to 66, which are provided and separated to the side thereof, respectively have upper plates 41 and 42 on one side and magnet yokes 22 and 23 and / or target vessel on one side. The face plates 51 and 52 are overlapped.

Description

Cathode Equipment for Target Sprayer

1 is a cross-sectional view of two cathode apparatuses according to the present invention.

2 is a longitudinal sectional view of the cathode equipment of FIG.

3 is a plan view partially showing two cathode apparatuses of FIGS. 1 and 2;

Figure 4 is an enlarged view of the cross section of the cathode.

5 is a cross-sectional view of the cathode equipment of FIG. 1 in which the cathode is separated from the central plate.

* Explanation of symbols for main parts of the drawings

3,4 cathode 5: upper partition wall portion

6: vacuum chamber 7,8,9,10: screw

11,12: bracket 13,14: bearing frame

15,16: insulator 17,18,19: screw

20,21: stud bolt 22,23: magnet yoke

24,25 Stud bolt 26,27 Side plate

28: intermediate plate 29, 30, 31, 32: cooling pipe

33,34,35,36: Permanent magnet 37,38,39,40: Clamp bead

41,42: upper plate 43,43 ',... , 44,44 ': Cam, eccentric

45,45 ': Camshaft, Eccentric shaft 49,50: Target

51,52: Back plate 53,54,55,56: Permanent magnet

57,58: Thin film 59,60,61,62,63,64,65,66: Edge part

67,67 ': Screw, spring bolt 75,76,77,78: Pore bead

79: cap plate, base plate

80: front plate 81,81 ',... 82: insulator

83: Clear 89,89 ': Spring

90,91,97,97 ': opening, gap

The present invention relates to a cathode apparatus for a target spraying device having a magnet yoke, a permanent magnet disposed between the target and the magnet yoke, and a fixing part for fixing the magnet yoke to the partition portion of the vacuum chamber.

The present invention is based on the ability to sputter from certain highly insulating materials that do not have uneven portions, such as screw heads or bores and gaps, on their surface to make a cathode. In particular, the exchange of targets can be carried out in a simple manner and in a manner particularly quickly and without specific tools.

This function is achieved by installing a magnet yoke firmly fixed to a side of the cam or cam pair whose side is supported on the upper plate, which has a gap by a screw or a spring bolt, coupled to the magnet yoke, the side facing the target. Here, both sides of the magnet yoke are provided with a U-shaped rake bead or clamp bead, and the leg or rake-shaped edge portion separated from the side thereof has an upper plate on one side, and a magnet yoke and the other side. And / or overlap the target backplate.

Additional details and features of the invention are set forth in more detail in the claims.

The invention is best described in the attached drawings, one of which allows the possibility of different embodiments to the greatest extent.

As shown in FIG. 1, the cathodes 3, 4 are fixed to the upper wall 5 of the vacuum chamber 6 with screws 7, 8 and 9, 10, and the cathodes 3, 4 themselves The insulator, in which the bearing frame 13 and the insulator 15 are directly coupled with the bearing frame 14 by the chain linkage bracket pairs 11 and 12 by screws 17 and 18 or by the screw 10, respectively. Connected by 16. The insulators 15 and 16 are screwed into the magnet yokes 22 and 23 by stud bolts 20, 21 and 24 and 25 at their sides (FIG. 2), and the cathodes 3 and 4 are at the sides surrounding them. Plates 26, 27, 28, magnet yokes 22, 23, cooling tubes 29, 30 and 30, 31, permanent magnets 33, 34 and 35, 36 and 53, 54 and 55, 56, clamping Beads 37, 38 and 39, 40, top plates 41 and 42, cams 45 and 44 with camshaft 45 and spring bolts 67, 67 ', and back plates 51 and 52 Suspended to the upper partition wall portion 5 with the targets (49 and 50) having a.

The targets 49 and 50 and their back plates 51 and 52 are pressed against the thin films 57 and 58 by clamping beads 37 to 40, respectively, which are edge portions 59 to 62 oriented in the base layer. This covers the back plates 51 and 52 and this is because they are in close contact with the magnet yokes 22 and 23 respectively, and for this the edge portions 63 and 66 oriented on the back plate are furthermore screwed 67 and 67 respectively. The upper plates 41 and 42 coupled to the magnet yokes 22 and 23 are superimposed on each other by ').

The camshafts 45, 45 'are rotated to rigidly connect the targets 49, 50 with the magnet yokes 22, 23, so that the upper plates 41, 42 on one side have the upper edge portions 63-66. ) And on the other side, the lower edge portions 59 to 62 are firmly installed on the void beads 75 to 78 and all the portions surrounded by the clamping beads 37 to 40 are firmly coupled to each other.

Since the bearing frames 13, 14 are firmly engaged with the magnet yoke by screws 20, 21 and 24, 25, they are held in the upper partition 5 of the vacuum chamber 6. At the same time the cam plate 79 is supported on the insulators 81, 82 whose sides are held by screws 20, 21 and 24, 25. Since the gap 83 is provided between the bearing frame 13 on one side and the insulator 15 on the other side, the cathodes 3 and 4 perform a predetermined movement in the horizontal plane as opposed to the embodiment shown on the right side in FIG. (Because the insulators 15 and 16 and the bearing frame 13 on one side are elastically coupled by the brackets 11 and 12 and the screws 17 and 18 and operate in a chain link manner). . The cathodes 3 and 4 are formed very long, each of the two long cathodes 3 and 4 having several A-type suspensions (shown on the left in FIG. 2) and subdivided respectively over their lengths. It is provided with a type B suspension (shown on the right side of FIG. 2) and fixed to the upper partition 5.

Due to the enclosed installation structure, the cathode body is protected from sputtering of the layers.

The rake beads and clamping beads 37 to 40 fix the targets 49 and 50 and formally depress the thin films 57 and 58. The clamping bead row consists of several parts and the adjustable length extension is made possible by the smallest gaps 90 and 91 by individual fixing.

The side surface of the substrate is smooth to prevent local process instability.

It is possible to quickly change targets by omitting many screws and simply releasing them by rotation of the shafts 45, 45 'by the hexagon socket screws.

The fastening and pressurization are made by shafts 45, 45 ', which are rotatably installed on the upper plates 41, 42, which have cams or eccentrics supported on the upper sides of the magnet yokes 22, 23 ( 43,43 '…) are fixed. The cam height or eccentricity is at least corresponding to the gap a (see FIG. 4). The shafts 45, 45 'correspond to the clamping beads 37, 38 and 39, 40 so that a tool suitable for rotation of the shafts 45, 45' ... can be inserted at the front side of the shafts 45, 45 '... ... and parallel bores 97, 97 '... are provided.

At the time of release, the sealing plates or the upper plates 41 and 42 are raised by the spring force and the clamping beads 37 to 40 are freed. The use of screws is advantageously done on the outside side of the cathode. Thus, the risk of target damage during target exchange is reduced. The possibility of screw coating is minimized and simple target exchange is ensured.

Claims (4)

The magnet yokes 22 and 23, the permanent magnets 33, 34, 53, 54 and 35, 36, 55, 56 and the magnet yokes 22 and 23 disposed between the target and the magnet yoke are placed in the vacuum chamber 6; In the cathode arrangement for targets 49 and 50 spraying apparatus having fixing parts A and B for fixing to the partition 5, the magnet yoke 22 is firmly attached to the side facing the targets 49 and 50. And 23) a cam whose side is supported by the upper plates 41 and 42 having a gap a by screws or spring bolts 67, 67 '... And engaging the magnet yokes 22 and 23. Installed on the cam pairs 43, 44 and 43 ', 44', and on both sides of the magnet yokes 22 and 23 are provided with U-shaped rake bead or clamp beads 37, 38 and 39, 40 and their The laterally separated leg or rake edge portions 59 to 66 respectively have the upper plates 41 and 42 on one side and the magnet yokes 22 and 23 and / or the target backplate 51 on the other side. And 52) overlapping each other. 2. A magnet yoke secured on a side oriented with a substrate is placed on or supported by an upper rake edge portion of the rake bead or clamping bead formed in a U-shape and a cam or cam pair acting on the side thereof. And a clamping bead having a rake-shaped edge portion at the bottom thereof and disposed on both sides of the magnet yoke to surround the surface of the magnet yoke, the back plate, or the target oriented on the base layer. The camshaft or eccentric shaft or bearing journal thereof is mounted on a magnet yoke and the cam or eccentric is mounted on the upper plate in the pressurized position or on the edge of the rake bead directly oriented with the target. Cathode equipment, characterized in that supported. The camshaft or eccentric shaft or bearing journal thereof is mounted on the upper plate and the cam or eccentric is supported on the surface of the magnet yoke oriented with the target in the press position or on the back plate. Cathode equipment, characterized in that.