KR0155721B1 - Metal coating method of video head drum - Google Patents
Metal coating method of video head drum Download PDFInfo
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- KR0155721B1 KR0155721B1 KR1019920026601A KR920026601A KR0155721B1 KR 0155721 B1 KR0155721 B1 KR 0155721B1 KR 1019920026601 A KR1019920026601 A KR 1019920026601A KR 920026601 A KR920026601 A KR 920026601A KR 0155721 B1 KR0155721 B1 KR 0155721B1
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/10—Structure or manufacture of housings or shields for heads
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- Chemical Vapour Deposition (AREA)
- Physical Vapour Deposition (AREA)
Abstract
본 발명은 비디오 헤드드럼의 표면에 금속을 코팅하는 방법에 대해 개시한다. 본 발명 코팅방법은 헤드드럼(1)을 챔버(2)내에 장착하고 배기시키는 배기단계와, 헤드드럼(1)을 가열하는 가열단계와, 챔버(2)내에 Ar을 주입하여 글로우 방전시켜 헤드드럼(1) 표면의 산화막 및 오염물을 제거하는 산화막 제거단계와, 챔버(2)내에 질소를 주입하고 티타늄을 가열하여 헤드드럼(1) 표면에 증착시키는 증착단계를 포함한다. 이러한 본 발명은 표면경도, 내마모성 및 윤활성 높은 금속(질화 티타늄)의 코팅을 양호하게 하는 질화 티타늄 코팅방법을 제공한다.The present invention discloses a method of coating a metal on the surface of a video headdrum. The coating method of the present invention includes an exhausting step of mounting and exhausting the head drum 1 in the chamber 2, a heating step of heating the head drum 1, and injecting Ar into the chamber 2 to glow discharge the head drum. (1) an oxide film removing step of removing the oxide film and contaminants on the surface, and a vapor deposition step of depositing nitrogen on the surface of the head drum 1 by injecting nitrogen into the chamber 2 and heating titanium. The present invention provides a titanium nitride coating method for improving the coating of metal (titanium nitride) having high surface hardness, wear resistance and lubricity.
Description
제1도는 본 발명 코팅방법을 설명하기 위한 개략도이다.1 is a schematic view for explaining the coating method of the present invention.
* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings
1 : 헤드드럼 2 : 챔버1: Head drum 2: Chamber
3 : HCD 4 : 배기구3: HCD 4: exhaust vent
5 : 히터 6 : Ar 주입구5: heater 6: Ar inlet
7 : 질소가스 주입구 9 : JIG7: nitrogen gas injection hole 9: JIG
본 발명은 비디오 헤드드럼의 테이프 주행면에 금속을 코팅하는 방법에 관한 것이다.The present invention relates to a method of coating a metal on a tape running surface of a video head drum.
비디오 테이프 레코더에 채용되는 비디오 헤드드럼은 보통 알루미늄 합금으로 제조되는 데, 이와 같은 헤드드럼은 다이캐스팅(diecasting)으로 제작되어서 그 표면은 인조 다이아몬드로 1차로 가공되고 2차로 천연 다이아몬드로 가공된다.Video head drums used in video tape recorders are usually made of aluminum alloy, which is made by diecasting so that the surface is first processed with artificial diamond and secondly with natural diamond.
이와 같이 1,2차 가공된 헤드드럼의 표면은 0.4㎛정도의 매끄러운면을 가지지만 그 표면경도가 약하기 때문에 작업중에 타부품과 약한 접촉에도 긁힘이 발생될 수 있다. 또한 경도가 약한 이유로 쉽게마모되어 헤드의 손상이 발생되고, 테이프의 수명이 수천시간 정도로 짧다.As described above, the surface of the first and second head drums has a smooth surface of about 0.4 μm, but the surface hardness thereof is weak, so that scratches may occur even in weak contact with other components during operation. In addition, because of its hardness, wear is easily caused by damage to the head, and the life of the tape is as short as thousands of hours.
이를 위해서 최근에는 헤드드럼의 표면에 경도, 내마모성 및 윤활성이 높은 금속으로서 질화 티타늄(TiN)을 코팅하여 사용하고 있는 바, 이는 표면경도를 향상시켜 작업시 타부품과의 접촉으로 발생되는 긁힘을 방지할 수 있고, 표면경도 증가로 헤드를 보호할 수 있을수 있을 뿐만 아니라, 테이프의 수명을 연장할 수 있는 이점이 있다.To this end, recently, titanium nitride (TiN) is coated on the surface of the head drum as a metal having high hardness, abrasion resistance, and lubricity. This improves the surface hardness to prevent scratches caused by contact with other parts during work. Not only can it protect the head with increased surface hardness, but it also has the advantage of extending the life of the tape.
본 발명은 상기 비디오 헤드드럼에 상기 질화 티타늄과 같은 금속을 코팅하는 데 적합한 코팅방법을 제공하는 데 그 목적이 있는 것이다.It is an object of the present invention to provide a coating method suitable for coating a metal such as titanium nitride on the video head drum.
상기 목적을 달성하기 위하여 본 발명은 헤드드럼에 금속을 코팅하는 방법에 있어서, 헤드드럼을 챔버내에 장착하고 배기시키는 배기단계와, 헤드드럼을 가열하는 가열단계와, 챔버내에 Ar을 주입하여 글로우 방전시켜 드럼 표면의 산화막 및 오염물을 제거하는 산화막 제거단계와, 챔버내에 질소를 주입하고 티타늄을 헤드드럼 표면에 증착시키는 증착단계를 포함하여 된 것을 특징으로 한다.In order to achieve the above object, the present invention provides a method for coating a metal on the head drum, the exhaust step of mounting and exhausting the head drum in the chamber, the heating step of heating the head drum, and glow discharge by injecting Ar into the chamber And an oxide film removing step of removing the oxide film and contaminants on the drum surface, and a vapor deposition step of injecting nitrogen into the chamber and depositing titanium on the head drum surface.
이하 첨부된 도면을 참조하면서 본 발명에 따른 일 실시예를 상세히 설명한다.Hereinafter, an embodiment according to the present invention will be described in detail with reference to the accompanying drawings.
제1도는 헤드드럼 표면에 금속으로서 질화 티타늄을 코팅하기위한 코팅장치를 개략적으로 나타낸다. 먼저 챔버(chamber;2)에 헤드드럼(1)을 채용되기 전에 전처리(前處理)공정으로서 TCE(trichloro ethylene)욕조에서 초음파로 가열하고, 이어서 TEC(trichloro ethylene)욕조에서 냉각시킨 다음, TEC(trichloro ethylene)욕조에서 증발시키고, 건조시켜서 헤드드럼에 묻은 이물질을 제거시킨다.1 schematically shows a coating apparatus for coating titanium nitride as a metal on the head drum surface. First, before the head drum 1 is employed in the chamber 2, it is ultrasonically heated in a trichloro ethylene (TCE) bath as a pretreatment process, followed by cooling in a trichloro ethylene (TEC) bath, and then TEC ( trichloro ethylene) evaporate in the bath and dry to remove any foreign matter from the head drum.
그리고 배기단계로 헤드드럼(1)을 챔버(2)내로 장착하고 3×10-6torr 까지 배기구(4)를 통해 배기(排氣)시켜서 챔버(2)내의 H2O, H2, O2등의 오염가스를 제거시킨다. 이와같이 H2O, H2, O2등의 오염가스를 제거시키기 위해서는 진공도가 높을수록 좋지만, 3×10-6torr 이상의 진공도를 위해서는 배기시간이 길게되고 초고진공펌프가 필요하게 되므로 경제적인 측면에서 불리하게 되므로 3×10-6torr 정도가 적당하다.In the exhaust stage, the head drum 1 is mounted into the chamber 2 and exhausted through the exhaust port 4 up to 3 × 10 −6 torr. H 2 O, H 2 , O 2 in the chamber 2 Remove contaminant gas such as In this way, the higher the vacuum degree is better to remove the contaminated gases such as H 2 O, H 2 , O 2 , but for the vacuum degree of 3 × 10 -6 torr or more, the exhaust time is long and an ultra-high vacuum pump is required. It is disadvantageous, so 3 × 10 -6 torr is suitable.
그리고 가열단계로 챔버(2)내부에 장착된 헤드드럼(1)을 270도 내지 280도 까지 히터(5)로 가열한다. 이는 이후 증착단계의 티타늄 증착시 증착분자가 헤드드럼(1)의 표면에 잘 붙을수 있도록 하기위한 단계이다. 통상 순수 알루미늄의 경우 용융점이 660도 정도이지만 다른 금속과 합금을 이룰때 용융점이 낮아져 550도 정도가 되며, 헤드드럼(1)은 400도 정도에서 산화막이 극심하여 표면조도가 나빠지고 장시간 방치시에는 370도 내지 380도에서 표면이 변하게 된다. 그런데 이후의 단계인 티타늄 증착시 이온의 충돌로 국부적인 온도상승이 따르게 되므로 300도 이하인 270도 내지 280도 정도에서 헤드드럼(1)을 가열하는 것이 적당하다.In the heating step, the head drum 1 mounted in the chamber 2 is heated by the heater 5 to 270 degrees to 280 degrees. This is a step for allowing the deposition molecules to adhere to the surface of the head drum (1) during the deposition of titanium during the deposition step. In the case of pure aluminum, the melting point is about 660 degrees, but when it forms an alloy with other metals, the melting point is lowered to about 550 degrees. The surface is changed in FIGS. However, since the local temperature rise is caused by the collision of ions during the subsequent deposition of titanium, it is appropriate to heat the head drum 1 at about 270 to 280 degrees which is 300 degrees or less.
그리고 산화막 제거단계로 챔버(2)내에 Ar 가스를 주입구(6)를 통해 주입하여 글로우 방전(glow discharge) 시켜 헤드드럼(1) 표면의 산화막을 제거시킨다. 이어서 증착단계로 챔버(2)내에 질소(N2)를 주입구(7)를 통해 주입하여 5×10-2torr 까지 진공도를 낮추고 티타늄(Ti)을 열원으로서 HCD(hollow cathod discharger; 3)로 가열하여 헤드드럼(2) 표면에 증착시킨다. 여기서 질소가스는 질화 티타늄막의 색상을 조절하는 기능을하는 것으로서 질소가스가 적으면 막의 경도, 윤활성, 광택등이 우수하나 흰색에 가까운 색을 띠게되며, 질소가스가 많으면 무광택의 짙은 황색을 띠게되므로 황금색의 광택막을 형성하기 위해서는 질소압은 5×10-2torr 정도가 적당하다.In the oxide film removing step, Ar gas is injected into the chamber 2 through the injection port 6 to be glow discharged to remove the oxide film on the surface of the head drum 1. Subsequently, nitrogen (N 2 ) is injected into the chamber 2 through the inlet 7 in the deposition step to lower the vacuum degree to 5 × 10 −2 torr and heat titanium (Ti) as a heat source with a hollow cathod discharger (3). To be deposited on the surface of the head drum 2. Nitrogen gas is a function to control the color of titanium nitride film. When there is little nitrogen gas, the film is excellent in hardness, lubricity, gloss, etc., but it has a color close to white. In order to form a glossy film of N, the nitrogen pressure is preferably about 5 x 10 -2 torr.
그리고 마지막으로 헤드드럼(1)을 자연냉각시키거나 질소가스 분위기에서 냉각시킨다.Finally, the head drum 1 is naturally cooled or cooled in a nitrogen gas atmosphere.
한편, 티타늄(Ti)이 증착될 때 헤드드럼(1)의 회전속도는 60rpm이 적당하며, 증착된 질화 티타늄의 두께는 0.2∼0.3㎛ 정도가 적당하다.On the other hand, when titanium (Ti) is deposited, the rotational speed of the head drum 1 is appropriately 60 rpm, and the thickness of the deposited titanium nitride is about 0.2 to 0.3 μm.
이상에서 설명한 질화 티타늄 코팅방법에 있어서, 배기 및 가열 단계에서 챔버(2)내부를 진공으로 하고 가열시킴으로써, 증착단계에서 티타늄을 증착할시에 확산이 잘 이루어지게 되며, 산화막 제거단계에서 챔버(2)내에 아르곤(Ar)가스를 주입하여 글로우 방전(glow discharge)시켜서 헤드드럼(1)표면의 산화막을 제거함으로써 티타늄(Ti) 증착(蒸着)이 원할하게 이루어질 수 있게 된다.In the titanium nitride coating method described above, the inside of the chamber 2 is evacuated and heated in the evacuation and heating step, so that the diffusion is performed well when the titanium is deposited in the deposition step, and the chamber 2 in the oxide film removal step. By argon (Ar) gas inject into the glow discharge (Glow discharge) to remove the oxide film on the surface of the head drum (1) it is possible to facilitate the deposition of titanium (Ti).
따라서 본 발명에 따른 질화 티타늄 코팅방법을 사용함으로써 헤드드럼(1)의 표면에 경도, 내마모성(耐磨耗性) 및 윤활성(潤滑性)이 높은 질화 티타늄(TiN)의 코팅을 양호하게 하고, 또 질화 티타늄을 코팅함으로써 표면경도(表面硬度)를 향상시켜 작업시 타부품과의 접촉으로 발생되는 긁힘을 방지하고 그리고 표면경도 증가로 테이프의 수명을 연장할 수 있는 이점을 양호하게 할 수 있다.Therefore, by using the titanium nitride coating method according to the present invention, the surface of the head drum 1 is coated with titanium nitride (TiN) having high hardness, high wear resistance and high lubricity, and By coating titanium nitride, it is possible to improve the surface hardness, to prevent scratches caused by contact with other parts during work, and to increase the surface hardness by increasing the surface hardness.
상술한 바와 같이 본 발명은 표면경도, 내마모성 및 윤활성이 높은 질화 티타늄의 코팅을 양호하게 하는 비디오 헤드드럼의 금속 코팅방법을 제공한다.As described above, the present invention provides a metal coating method of a video head drum which makes the coating of titanium nitride having high surface hardness, wear resistance and lubricity good.
Claims (6)
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019920026601A KR0155721B1 (en) | 1992-12-30 | 1992-12-30 | Metal coating method of video head drum |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019920026601A KR0155721B1 (en) | 1992-12-30 | 1992-12-30 | Metal coating method of video head drum |
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| Publication Number | Publication Date |
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| KR940015985A KR940015985A (en) | 1994-07-22 |
| KR0155721B1 true KR0155721B1 (en) | 1998-12-15 |
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| KR1019920026601A KR0155721B1 (en) | 1992-12-30 | 1992-12-30 | Metal coating method of video head drum |
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