KR0148188B1 - Magazine of semiconductor manufacture apparatus - Google Patents

Abstract

The present invention relates to a magazine guide of a semiconductor manufacturing equipment, comprising a means for sliding guides each block of the magazine guide, a means including a power means for driving the drive means using a rack and pinion combination, respectively It is intended to provide a magazine guide of semiconductor manufacturing equipment that has a wide range of applications according to the specification of the magazine by allowing the interval between blocks of the to be adjustable.

Description

Magazine guide of semiconductor manufacturing equipment

1 is a schematic plan view showing the position of a magazine guide

2 is a plan view showing the configuration of a magazine guide according to the present invention (a), (b)

3 is a side view of FIG. 2

4 is a plan view showing another embodiment of the auxiliary block shape according to the present invention

* Explanation of symbols for main parts of the drawings

10: magazine guide 11a, 11b: main block

12a, 12b, 12c, 12d: Support Bracket 13: Guide Block

14a, 14b: rack gear 15: pinion gear

16: Motor drive means 17: Belt drive means

18a, 18b: auxiliary block 19: gradient surface

20: Rack gear through hole 100: Lead frame supply part

110: lift and feed system 120: machining

130: package outlet 140: base plate

150: through hole

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magazine guide of a semiconductor manufacturing equipment. In particular, a magazine guide having a limited guide width as in the past has been configured in connection with a driving means, thereby allowing the allowable guide width of the magazine guide to be adjusted, thereby having various sizes The present invention relates to a magazine guide for semiconductor manufacturing equipment applicable to various types of magazines. In general, in order to manufacture a semiconductor, several processes are required, and in particular, during the assembly process, various operations such as cutting of a dam bar and trimming / forming of a lead are performed. In order to perform this trimming / forming process, material supply must be preceded from the lead frame supply unit (ON LOADER), which is the entire process, and the lead frame supply unit is equipped with a magazine equipped with several lead frames using separate transfer means. The lead frames are sequentially supplied one by one. On the other hand, Figure 1 shows the arrangement of the respective processes described above. That is, the right and upper sides of the drawing lead lead supply unit 100 (ON LOADER) and the lifting and feed system 110 (FLOATER FEEDING SYSTEM) 110, the center of the processing unit 120 including a trimming / forming process (TOOL SET), the left and On the lower side, a package discharge part 130 (OFF LOADER) for discharging the finished lead frame L and inserting the tube into the tube is disposed.

Here, the lead frame supply unit 100 is provided with a magazine guide 10 for guiding the lifting movement of the magazine. At this time, the magazine guide 10 is composed of two main blocks 11a and 11b facing each other, and each of the main blocks 11a and 11b is set to match the set length of the base plate 140. It is fixedly installed on).

However, since the existing magazine guide is fixedly set to fit the length of one magazine, it has a weakness that is not applicable to all kinds of magazines, and accordingly, every time the applied magazine changes. The inconvenience of having to replace the magazine guide.

Accordingly, the present invention has been made in view of the above, and comprises a means for sliding guides of each block of the magazine guide, a power transmission means using a rack and pinion combination, and a means including a power source capable of driving the same. It is an object of the present invention to provide a magazine guide of a semiconductor manufacturing equipment that has a wide range of application according to the specifications of the magazine by adjusting the interval between each block. Hereinafter, the present invention will be described in detail with reference to the accompanying drawings. In the magazine guide (10) of the semiconductor manufacturing equipment, the magazine guide (10) is positioned to face each other with a predetermined distance, the two main having an auxiliary block (18a), (18b) inward Blocks 12a, 11b and support brackets 12a, 12b, 12c, and 12d formed on both sides of the main blocks 11a and 11b, respectively, are supported by these. ), (12b), (12c), (12d) of the main block (11a), (11b) including the guide block 13 for allowing the front and rear slide flow, and the main block (11a), (11b) of Crossed between each one of the support brackets (12a), (12b) while being integrally connected to each one of the support brackets (12a), (12b) to be able to move with this (12a), (12b), a constant up and down interval A pinion gear 15 that can be engaged and engaged between the rack gears 14a and 14b and the rack gears 14a and 14b which are overlapped with each other and have a relative direction of movement while maintaining The pinion gear 15 is composed of a motor drive means 16 and a belt transmission means 17 for forward and reverse rotation. In more detail, the accompanying drawings, Figure 2 is a plan view showing the configuration for the magazine guide of the present invention. Here, reference numeral 140 denotes a base plate on which the components of the magazine guide are installed. The base plate 140 is formed with a through hole 150 serving as a lift passage of the magazine over a predetermined area. In particular, both ends of the hole 150 has a wider width, where the auxiliary blocks 18a and 18b are slid to the inner grooves of the main blocks 11a and 11b. The flow space of the auxiliary blocks 18a and 18b can be secured.

At this time, the auxiliary blocks (18a, 18b) is equipped with its own elevating drive means (not shown), by using this can be raised and lowered in contact with the block surface, the role of replacing the magazine, for example, lead frame By wrapping both ends of the support will be able to take the place. In particular, the auxiliary blocks 18a, 18b are substantially elements that support the magazine, and have a c-shape so as to be partly enclosed at both ends of the magazine formed in a rectangular box shape.

On the other hand, as another embodiment of the present invention, in Figure 4 of the accompanying drawings, the left and right symmetrical gradient surfaces 19 having a shape in which inner side surfaces of both side walls of the auxiliary blocks 18a and 18b extend outwards. You can see that it consists of.

Since the auxiliary blocks 18a and 18b having such a gradient surface 19 can accommodate even the widthwise size change of the magazine, the magazines guided up and down by this 18a and 18b are provided. This has the advantage of allowing a wider selection of applications.

In addition, reference numerals 11a and 11b denote main blocks including auxiliary blocks.

The main blocks 11a and 11b are positioned at both ends of the through-hole 150 in a manner of facing each other with the inner recesses having the respective inner blocks 11a and 11b. The support brackets 12 are integrally coupled to both side portions of the support brackets 12 and are mounted on the guide blocks 13 arranged side by side on both sides of the through-holes 150 by using them. Therefore, the auxiliary blocks 18a, 18b and the main blocks 11a, 11b are slidably movable in the front-rear direction while receiving the motion guide by the guide block 13, and each block 11a at this time. , 18a, 11b, and 18b have a direction of movement relative to each other. That is, the blocks 11a, 18a, 11b, and 18b on both sides can be moved inward or outward at the same time.

Reference numerals 14a and 14b indicate a pair of rack gears. The rack gears 14a and 14b have a structure in which gears are formed along the longitudinal direction on the outer circumferential surface of the circular rod, and are disposed at upper and lower sides at predetermined intervals while facing the gear forming surfaces of each other.

The overlap arrangement structure at this time is specifically shown in FIG. 3 of the accompanying drawings, in which two rack gears are well-fitted in the upper and lower portions with the pinion gear 15 in the middle. The rack gears 14a and 14b are installed to span between the support brackets 12a and 12b on each side of each of the main blocks 11a and 11b.

That is, vertical subsidiary materials 12a 'and 12b' are formed on the outer side portions of the support brackets 12a and 12b, and the rack gears 14a and 14b are penetrated therethrough. Both ends are supported, but one end of the rack gear 14a disposed at the upper end thereof has a support bracket 12a formed at the main block 11a on the left side of the drawing, and one end of the rack gear 14b disposed at the lower end thereof. The rack bracket through holes of the rack gears 14a and 14b are fixed to each other, and each end of each rack gear 14a and 14b is formed to have a diameter larger than that of the rack gears in the support brackets 12b and 12a. It is slidably supported within 20.

Accordingly, the rack gears 14a and 14b are linearly moved in opposite directions by the rotation of the pinion gear 15 to be described later, and each of the main blocks 11a and 11b) also moves relative to each other.

At this time, each of the rack gear (14a, 14b) is to move at the same ratio, so that each of the main blocks (11a, 11b) can be narrowed inward by the same distance or widen outward.

Reference numeral 15 denotes a pinion gear, 16 a motor drive means, 17 a belt transmission means. The pinion gear 15 is engaged between the rack gears 14a and 14b while being supported by the shaft 21 on the bracket provided on one side of the rack gears 14a and 14b, and the shaft It rotates with the belt pulley 22a attached to the rear end of the shaft 21 and the shaft 21, and enables engagement transmission to the rack gears 14a and 14b.

An output end of the motor drive means 16, for example, a motor shaft, is equipped with another belt pulley 22b that can correspond to the belt pulley 22a, so that power can be output through it.

The belt transmission means 17 means a timing belt, and is interposed between the belt pulleys 22a and 22b on both sides so that the power of the motor driving means 16 can be transmitted to the pinion gear 15. have.

Therefore, the operational effects of the present invention configured as described above are as follows.

2A shows a setting state of the main blocks 11a and 11b applicable to any one magazine M set.

At this time, the magazine (M) having a length corresponding to the interval between the two side auxiliary blocks (18a, 18b) is located here and can receive the lifting guide from it.

On the other hand, (b) of FIG. 2 of the accompanying drawings shows the position movement state of the main blocks 11a and 11b including the auxiliary blocks 18a and 18b. When the motor drive means 16 rotates in the direction of the arrow shown in the drawing, the rotational force at this time is transmitted to the pinion gear 15 via the belt transmission means 17, and at the same time, the upper and lower rack gears 14a, 14b is a distance proportional to the amount of rotation of the pinion gear 15. For example, the upper rack gear 14a is in the right direction of the drawing, and the lower rack gear 14b is in the left direction. The main blocks 11a and 11b of both sides interlocked with each other may be narrowed inward.

That is, the setting positions of the main blocks 11a and 11b can be changed from the same position as (a) of FIG. 2 to the same position as (b).

At this time, the lifting guide of the magazine M 'having a shorter length becomes possible. In addition, since the motor driving means 16 of the present invention can be rotated forward and reverse, it can be seen that it is also possible to widen the interval between the main blocks 11a and 11b on both sides as opposed to the above. Further, it can be seen that it is possible to widen the interval between the main blocks 11a and 11b. In addition, the position at which the main blocks 11a and 11b can be fixed is not limited to several steps, and can be variously adjusted through the rotation amount control of the motor driving means 16, and the application target ( For example, it is possible to widen the width of the magazine).

As described above, the present invention makes it possible to use all the magazines having various sizes by adjusting the distance between the guides of lifting and lowering the guides on both sides of the magazine, thereby completely eliminating the unnecessary time required for replacing the block when changing the applied magazine. It is possible to do this, and there is an advantage that can achieve the efficiency of the process.

Claims (4)

In the magazine guide 10 of the semiconductor manufacturing equipment, the magazine guides 10 are positioned to face each other while maintaining a predetermined distance, and two main blocks 11a having the auxiliary blocks 18a and 18b inward. ), (11b) and support brackets (12a), (12b), (12c), (12d) formed on both sides of the main blocks (11a), (11b), respectively, while supporting these (12a), ( 12b), a guide block 13 for allowing the main blocks 11a and 11b including the 12b, 12c, and 12d to slide back and forth, and one side of the main blocks 11a and 11b. While intersecting between the brackets 12a and 12b, the support brackets 12a and 12b are integrally connected to each other so as to be movable together with the support brackets 12a and 12b, while maintaining a constant vertical distance. A pair of rack gears 14a and 14b which overlap each other and have a relative direction of movement, and a pinion gear 15 which can be engaged and vibrated between the rack gears 14a and 14b, and the pinion gear ( Magazine guide of the semiconductor manufacturing equipment, characterized in that consisting of a motor drive means (16) and belt transmission means (17) for forward and reverse rotation. The semiconductor manufacturing apparatus according to claim 1, wherein the inner side surfaces of both side walls of the auxiliary blocks 18a and 18b are formed of a left and right symmetrical gradient surface 19 having a shape extending outwardly. Magazine guide 2. The rack member through holes 20 are formed in the vertical members 12a 'and 12b' of the support brackets 12a and 12b, respectively, and any one of them is a rack. Magazine guide of semiconductor manufacturing equipment characterized by having a diameter slightly larger than the diameters of the gears 14a and 14b. The magazine guide of the semiconductor manufacturing equipment according to claim 1, wherein the belt transmission means (17) is a timing belt having timing belt pulleys (22a) and (22b).