KR0145189B1 - Liquid material-vaporizing and supplying apparatus - Google Patents

Liquid material-vaporizing and supplying apparatus

Info

Publication number
KR0145189B1
KR0145189B1 KR98001106A KR19980001106A KR0145189B1 KR 0145189 B1 KR0145189 B1 KR 0145189B1 KR 98001106 A KR98001106 A KR 98001106A KR 19980001106 A KR19980001106 A KR 19980001106A KR 0145189 B1 KR0145189 B1 KR 0145189B1
Authority
KR
South Korea
Prior art keywords
vaporizing
liquid material
supplying apparatus
supplying
liquid
Prior art date
Application number
KR98001106A
Other languages
Korean (ko)
Inventor
Hideaki Miyamoto
Kohichi Ishikawa
Takeshi Kawano
Original Assignee
Stec Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP04499094A external-priority patent/JP3409910B2/en
Priority claimed from JP04499194A external-priority patent/JP3356532B2/en
Priority claimed from JP04499394A external-priority patent/JP3370174B2/en
Priority claimed from JP04499494A external-priority patent/JP3280507B2/en
Priority claimed from KR1019950003218A external-priority patent/KR0140012B1/en
Application filed by Stec Inc filed Critical Stec Inc
Priority to KR98001106A priority Critical patent/KR0145189B1/en
Application granted granted Critical
Publication of KR0145189B1 publication Critical patent/KR0145189B1/en

Links

KR98001106A 1994-02-20 1998-01-16 Liquid material-vaporizing and supplying apparatus KR0145189B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR98001106A KR0145189B1 (en) 1994-02-20 1998-01-16 Liquid material-vaporizing and supplying apparatus

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP04499094A JP3409910B2 (en) 1994-02-20 1994-02-20 Liquid material vaporizer
JP04499194A JP3356532B2 (en) 1994-02-20 1994-02-20 Liquid material vaporizer
JP04499394A JP3370174B2 (en) 1994-02-20 1994-02-20 Liquid material vaporizer
JP04499494A JP3280507B2 (en) 1994-02-20 1994-02-20 Liquid material vaporizer
KR1019950003218A KR0140012B1 (en) 1994-02-20 1995-02-20 Liquid material-vaporizing and supplying apparatus
KR98001106A KR0145189B1 (en) 1994-02-20 1998-01-16 Liquid material-vaporizing and supplying apparatus

Publications (1)

Publication Number Publication Date
KR0145189B1 true KR0145189B1 (en) 1998-07-15

Family

ID=27522440

Family Applications (2)

Application Number Title Priority Date Filing Date
KR98001107A KR0145188B1 (en) 1994-02-20 1998-01-06 Liquid material-vaporizing and supplying apparatus
KR98001106A KR0145189B1 (en) 1994-02-20 1998-01-16 Liquid material-vaporizing and supplying apparatus

Family Applications Before (1)

Application Number Title Priority Date Filing Date
KR98001107A KR0145188B1 (en) 1994-02-20 1998-01-06 Liquid material-vaporizing and supplying apparatus

Country Status (1)

Country Link
KR (2) KR0145188B1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100402678B1 (en) * 2000-12-29 2003-10-22 주식회사 세미텔 A evaporation vapor deposition system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100402678B1 (en) * 2000-12-29 2003-10-22 주식회사 세미텔 A evaporation vapor deposition system

Also Published As

Publication number Publication date
KR0145188B1 (en) 1998-07-15

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Legal Events

Date Code Title Description
A107 Divisional application of patent
A201 Request for examination
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20080411

Year of fee payment: 11

LAPS Lapse due to unpaid annual fee