KR0145189B1 - Liquid material-vaporizing and supplying apparatus - Google Patents
Liquid material-vaporizing and supplying apparatusInfo
- Publication number
- KR0145189B1 KR0145189B1 KR98001106A KR19980001106A KR0145189B1 KR 0145189 B1 KR0145189 B1 KR 0145189B1 KR 98001106 A KR98001106 A KR 98001106A KR 19980001106 A KR19980001106 A KR 19980001106A KR 0145189 B1 KR0145189 B1 KR 0145189B1
- Authority
- KR
- South Korea
- Prior art keywords
- vaporizing
- liquid material
- supplying apparatus
- supplying
- liquid
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR98001106A KR0145189B1 (en) | 1994-02-20 | 1998-01-16 | Liquid material-vaporizing and supplying apparatus |
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP04499094A JP3409910B2 (en) | 1994-02-20 | 1994-02-20 | Liquid material vaporizer |
JP04499194A JP3356532B2 (en) | 1994-02-20 | 1994-02-20 | Liquid material vaporizer |
JP04499394A JP3370174B2 (en) | 1994-02-20 | 1994-02-20 | Liquid material vaporizer |
JP04499494A JP3280507B2 (en) | 1994-02-20 | 1994-02-20 | Liquid material vaporizer |
KR1019950003218A KR0140012B1 (en) | 1994-02-20 | 1995-02-20 | Liquid material-vaporizing and supplying apparatus |
KR98001106A KR0145189B1 (en) | 1994-02-20 | 1998-01-16 | Liquid material-vaporizing and supplying apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
KR0145189B1 true KR0145189B1 (en) | 1998-07-15 |
Family
ID=27522440
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR98001107A KR0145188B1 (en) | 1994-02-20 | 1998-01-06 | Liquid material-vaporizing and supplying apparatus |
KR98001106A KR0145189B1 (en) | 1994-02-20 | 1998-01-16 | Liquid material-vaporizing and supplying apparatus |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR98001107A KR0145188B1 (en) | 1994-02-20 | 1998-01-06 | Liquid material-vaporizing and supplying apparatus |
Country Status (1)
Country | Link |
---|---|
KR (2) | KR0145188B1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100402678B1 (en) * | 2000-12-29 | 2003-10-22 | 주식회사 세미텔 | A evaporation vapor deposition system |
-
1998
- 1998-01-06 KR KR98001107A patent/KR0145188B1/en not_active IP Right Cessation
- 1998-01-16 KR KR98001106A patent/KR0145189B1/en not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100402678B1 (en) * | 2000-12-29 | 2003-10-22 | 주식회사 세미텔 | A evaporation vapor deposition system |
Also Published As
Publication number | Publication date |
---|---|
KR0145188B1 (en) | 1998-07-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A107 | Divisional application of patent | ||
A201 | Request for examination | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 20080411 Year of fee payment: 11 |
|
LAPS | Lapse due to unpaid annual fee |