KR0129428B1 - Semiconductor device for element isolation and manufacturing method thereof - Google Patents
Semiconductor device for element isolation and manufacturing method thereofInfo
- Publication number
- KR0129428B1 KR0129428B1 KR93026507A KR930026507A KR0129428B1 KR 0129428 B1 KR0129428 B1 KR 0129428B1 KR 93026507 A KR93026507 A KR 93026507A KR 930026507 A KR930026507 A KR 930026507A KR 0129428 B1 KR0129428 B1 KR 0129428B1
- Authority
- KR
- South Korea
- Prior art keywords
- manufacturing
- semiconductor device
- element isolation
- isolation
- semiconductor
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/763—Polycrystalline semiconductor regions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Element Separation (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP656792 | 1992-01-17 | ||
| JP92-326457 | 1992-12-07 | ||
| JP04326457A JP3092834B2 (en) | 1992-01-17 | 1992-12-07 | Semiconductor device for element isolation and method of manufacturing the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR940016812A KR940016812A (en) | 1994-07-25 |
| KR0129428B1 true KR0129428B1 (en) | 1998-04-06 |
Family
ID=11641917
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019920025292A KR960013780B1 (en) | 1992-01-17 | 1992-12-23 | Semiconductor device and the manufacturing method of device isolation |
| KR93026507A KR0129428B1 (en) | 1992-01-17 | 1993-12-04 | Semiconductor device for element isolation and manufacturing method thereof |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019920025292A KR960013780B1 (en) | 1992-01-17 | 1992-12-23 | Semiconductor device and the manufacturing method of device isolation |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP3092834B2 (en) |
| KR (2) | KR960013780B1 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100474591B1 (en) * | 2002-04-23 | 2005-03-08 | 주식회사 하이닉스반도체 | Method for fabricating dram cell transistor having trench isolation structure |
| JP5616720B2 (en) | 2010-08-30 | 2014-10-29 | セイコーインスツル株式会社 | Semiconductor device and manufacturing method thereof |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05144933A (en) * | 1991-11-19 | 1993-06-11 | Hitachi Ltd | Semiconductor device and its manufacture |
-
1992
- 1992-12-07 JP JP04326457A patent/JP3092834B2/en not_active Expired - Fee Related
- 1992-12-23 KR KR1019920025292A patent/KR960013780B1/en not_active IP Right Cessation
-
1993
- 1993-12-04 KR KR93026507A patent/KR0129428B1/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| KR930017147A (en) | 1993-08-30 |
| JPH05259270A (en) | 1993-10-08 |
| JP3092834B2 (en) | 2000-09-25 |
| KR960013780B1 (en) | 1996-10-10 |
| KR940016812A (en) | 1994-07-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A201 | Request for examination | ||
| E902 | Notification of reason for refusal | ||
| E701 | Decision to grant or registration of patent right | ||
| GRNT | Written decision to grant | ||
| FPAY | Annual fee payment |
Payment date: 20071026 Year of fee payment: 11 |
|
| LAPS | Lapse due to unpaid annual fee |