JPWO2025094282A1 - - Google Patents

Info

Publication number
JPWO2025094282A1
JPWO2025094282A1 JP2025554397A JP2025554397A JPWO2025094282A1 JP WO2025094282 A1 JPWO2025094282 A1 JP WO2025094282A1 JP 2025554397 A JP2025554397 A JP 2025554397A JP 2025554397 A JP2025554397 A JP 2025554397A JP WO2025094282 A1 JPWO2025094282 A1 JP WO2025094282A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2025554397A
Other languages
Japanese (ja)
Other versions
JPWO2025094282A5 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2025094282A1 publication Critical patent/JPWO2025094282A1/ja
Publication of JPWO2025094282A5 publication Critical patent/JPWO2025094282A5/ja
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • G03F7/033Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20Exposure; Apparatus therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials For Photolithography (AREA)
JP2025554397A 2023-10-31 2023-10-31 Pending JPWO2025094282A1 (https=)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2023/039303 WO2025094282A1 (ja) 2023-10-31 2023-10-31 感光性エレメント、レジストパターンの形成方法、及びプリント配線板の製造方法

Publications (2)

Publication Number Publication Date
JPWO2025094282A1 true JPWO2025094282A1 (https=) 2025-05-08
JPWO2025094282A5 JPWO2025094282A5 (https=) 2026-03-16

Family

ID=95582518

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2025554397A Pending JPWO2025094282A1 (https=) 2023-10-31 2023-10-31

Country Status (5)

Country Link
EP (1) EP4675350A1 (https=)
JP (1) JPWO2025094282A1 (https=)
KR (1) KR20260011754A (https=)
CN (1) CN120981769A (https=)
WO (1) WO2025094282A1 (https=)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013195712A (ja) 2012-03-19 2013-09-30 Hitachi Chemical Co Ltd 感光性樹脂組成物、感光性エレメント、レジストパターンの形成方法及びプリント配線板の製造方法
JP5904890B2 (ja) * 2012-07-02 2016-04-20 富士フイルム株式会社 感光性転写材料、硬化膜の製造方法、有機el表示装置の製造方法、液晶表示装置の製造方法および静電容量型入力装置の製造方法
WO2021221025A1 (ja) * 2020-04-30 2021-11-04 富士フイルム株式会社 構造体の製造方法、及び、構造体
JP7743301B2 (ja) * 2021-12-27 2025-09-24 富士フイルム株式会社 蒸着マスク製造用感光性転写材料、及び、蒸着マスクの製造方法
JP2023097347A (ja) * 2021-12-27 2023-07-07 富士フイルム株式会社 蒸着マスクの製造方法

Also Published As

Publication number Publication date
WO2025094282A1 (ja) 2025-05-08
EP4675350A1 (en) 2026-01-07
KR20260011754A (ko) 2026-01-23
CN120981769A (zh) 2025-11-18

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Legal Events

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Effective date: 20251211

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Effective date: 20251211