JPWO2024252879A1 - - Google Patents

Info

Publication number
JPWO2024252879A1
JPWO2024252879A1 JP2025526025A JP2025526025A JPWO2024252879A1 JP WO2024252879 A1 JPWO2024252879 A1 JP WO2024252879A1 JP 2025526025 A JP2025526025 A JP 2025526025A JP 2025526025 A JP2025526025 A JP 2025526025A JP WO2024252879 A1 JPWO2024252879 A1 JP WO2024252879A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2025526025A
Other languages
Japanese (ja)
Other versions
JPWO2024252879A5 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2024252879A1 publication Critical patent/JPWO2024252879A1/ja
Publication of JPWO2024252879A5 publication Critical patent/JPWO2024252879A5/ja
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D45/00—Clamping or other pressure-applying devices for securing or retaining closure members
    • B65D45/02—Clamping or other pressure-applying devices for securing or retaining closure members for applying axial pressure to engage closure with sealing surface
    • B65D45/16—Clips, hooks, or clamps which are removable, or which remain connected either with the closure or with the container when the container is open, e.g. C-shaped
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/38—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for delicate optical, measuring, calculating or control apparatus
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Packaging Frangible Articles (AREA)
  • Packages (AREA)
JP2025526025A 2023-06-09 2024-05-15 Pending JPWO2024252879A1 (enrdf_load_stackoverflow)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2023095898 2023-06-09
PCT/JP2024/018053 WO2024252879A1 (ja) 2023-06-09 2024-05-15 ペリクル収納容器用クリップ、ペリクル収容体及びペリクル

Publications (2)

Publication Number Publication Date
JPWO2024252879A1 true JPWO2024252879A1 (enrdf_load_stackoverflow) 2024-12-12
JPWO2024252879A5 JPWO2024252879A5 (enrdf_load_stackoverflow) 2025-10-31

Family

ID=93795428

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2025526025A Pending JPWO2024252879A1 (enrdf_load_stackoverflow) 2023-06-09 2024-05-15

Country Status (3)

Country Link
JP (1) JPWO2024252879A1 (enrdf_load_stackoverflow)
TW (1) TW202500479A (enrdf_load_stackoverflow)
WO (1) WO2024252879A1 (enrdf_load_stackoverflow)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5209423B2 (ja) * 2008-09-11 2013-06-12 旭化成イーマテリアルズ株式会社 ペリクル梱包構造体
JP2013197513A (ja) * 2012-03-22 2013-09-30 Tosoh Corp 電子材料の保管・運搬用ケース
JP5767730B2 (ja) * 2014-03-20 2015-08-19 旭化成イーマテリアルズ株式会社 収納容器からの大型ペリクルの取出し方法

Also Published As

Publication number Publication date
TW202500479A (zh) 2025-01-01
WO2024252879A1 (ja) 2024-12-12

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Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20250819

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20250819