JPWO2024180669A1 - - Google Patents
Info
- Publication number
- JPWO2024180669A1 JPWO2024180669A1 JP2025503301A JP2025503301A JPWO2024180669A1 JP WO2024180669 A1 JPWO2024180669 A1 JP WO2024180669A1 JP 2025503301 A JP2025503301 A JP 2025503301A JP 2025503301 A JP2025503301 A JP 2025503301A JP WO2024180669 A1 JPWO2024180669 A1 JP WO2024180669A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2023/007352 WO2024180669A1 (ja) | 2023-02-28 | 2023-02-28 | 荷電粒子ビーム装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPWO2024180669A1 true JPWO2024180669A1 (enrdf_load_stackoverflow) | 2024-09-06 |
Family
ID=92589577
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2025503301A Pending JPWO2024180669A1 (enrdf_load_stackoverflow) | 2023-02-28 | 2023-02-28 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPWO2024180669A1 (enrdf_load_stackoverflow) |
| WO (1) | WO2024180669A1 (enrdf_load_stackoverflow) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016120971A1 (ja) * | 2015-01-26 | 2016-08-04 | 株式会社日立製作所 | 荷電粒子線装置 |
| WO2016154484A1 (en) * | 2015-03-24 | 2016-09-29 | Kla-Tencor Corporation | Method and system for charged particle microscopy with improved image beam stabilization and interrogation |
| JP2019169406A (ja) * | 2018-03-26 | 2019-10-03 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
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2023
- 2023-02-28 JP JP2025503301A patent/JPWO2024180669A1/ja active Pending
- 2023-02-28 WO PCT/JP2023/007352 patent/WO2024180669A1/ja active Application Filing
Also Published As
| Publication number | Publication date |
|---|---|
| WO2024180669A1 (ja) | 2024-09-06 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20250623 |