JPWO2024070630A1 - - Google Patents

Info

Publication number
JPWO2024070630A1
JPWO2024070630A1 JP2024550010A JP2024550010A JPWO2024070630A1 JP WO2024070630 A1 JPWO2024070630 A1 JP WO2024070630A1 JP 2024550010 A JP2024550010 A JP 2024550010A JP 2024550010 A JP2024550010 A JP 2024550010A JP WO2024070630 A1 JPWO2024070630 A1 JP WO2024070630A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024550010A
Other languages
Japanese (ja)
Other versions
JPWO2024070630A5 (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2024070630A1 publication Critical patent/JPWO2024070630A1/ja
Publication of JPWO2024070630A5 publication Critical patent/JPWO2024070630A5/ja
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/06—Programme-controlled manipulators characterised by multi-articulated arms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Carriers, Traveling Bodies, And Overhead Traveling Cranes (AREA)
JP2024550010A 2022-09-27 2023-09-11 Pending JPWO2024070630A1 (enrdf_load_html_response)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022153344 2022-09-27
PCT/JP2023/033029 WO2024070630A1 (ja) 2022-09-27 2023-09-11 搬送装置及び保管装置

Publications (2)

Publication Number Publication Date
JPWO2024070630A1 true JPWO2024070630A1 (enrdf_load_html_response) 2024-04-04
JPWO2024070630A5 JPWO2024070630A5 (enrdf_load_html_response) 2025-05-20

Family

ID=90477474

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024550010A Pending JPWO2024070630A1 (enrdf_load_html_response) 2022-09-27 2023-09-11

Country Status (4)

Country Link
JP (1) JPWO2024070630A1 (enrdf_load_html_response)
CN (1) CN119836392A (enrdf_load_html_response)
TW (1) TW202421548A (enrdf_load_html_response)
WO (1) WO2024070630A1 (enrdf_load_html_response)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58188193U (ja) * 1982-06-10 1983-12-14 株式会社シマノ 作業用ロボツト
JPS60238286A (ja) * 1984-05-10 1985-11-27 ダイキン工業株式会社 組立て作業用ロボツト
JPS6464787A (en) * 1987-09-04 1989-03-10 Nippon Seiko Kk Joint type robot
JPH02237783A (ja) * 1989-03-13 1990-09-20 Hitachi Ltd 産業用ロボット
JP2004071925A (ja) * 2002-08-08 2004-03-04 Nikon Corp 基板ローダ及び露光装置
JP6024720B2 (ja) * 2014-09-10 2016-11-16 村田機械株式会社 移載装置

Also Published As

Publication number Publication date
WO2024070630A1 (ja) 2024-04-04
TW202421548A (zh) 2024-06-01
CN119836392A (zh) 2025-04-15

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Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20250304

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20250304