JPWO2024038538A5 - - Google Patents

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Publication number
JPWO2024038538A5
JPWO2024038538A5 JP2024541344A JP2024541344A JPWO2024038538A5 JP WO2024038538 A5 JPWO2024038538 A5 JP WO2024038538A5 JP 2024541344 A JP2024541344 A JP 2024541344A JP 2024541344 A JP2024541344 A JP 2024541344A JP WO2024038538 A5 JPWO2024038538 A5 JP WO2024038538A5
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JP
Japan
Prior art keywords
light source
unit according
source unit
light
elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024541344A
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English (en)
Japanese (ja)
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JPWO2024038538A1 (cg-RX-API-DMAC7.html
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Publication date
Application filed filed Critical
Priority claimed from PCT/JP2022/031214 external-priority patent/WO2024038538A1/ja
Publication of JPWO2024038538A1 publication Critical patent/JPWO2024038538A1/ja
Publication of JPWO2024038538A5 publication Critical patent/JPWO2024038538A5/ja
Pending legal-status Critical Current

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JP2024541344A 2022-08-18 2022-08-18 Pending JPWO2024038538A1 (cg-RX-API-DMAC7.html)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2022/031214 WO2024038538A1 (ja) 2022-08-18 2022-08-18 光源ユニット、照明ユニット、露光装置、及び露光方法

Publications (2)

Publication Number Publication Date
JPWO2024038538A1 JPWO2024038538A1 (cg-RX-API-DMAC7.html) 2024-02-22
JPWO2024038538A5 true JPWO2024038538A5 (cg-RX-API-DMAC7.html) 2025-06-09

Family

ID=89941582

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024541344A Pending JPWO2024038538A1 (cg-RX-API-DMAC7.html) 2022-08-18 2022-08-18

Country Status (4)

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JP (1) JPWO2024038538A1 (cg-RX-API-DMAC7.html)
KR (1) KR20250036877A (cg-RX-API-DMAC7.html)
CN (1) CN119678106A (cg-RX-API-DMAC7.html)
WO (1) WO2024038538A1 (cg-RX-API-DMAC7.html)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3950553B2 (ja) 1998-06-30 2007-08-01 キヤノン株式会社 照明光学系及びそれを有する露光装置
JP4678493B2 (ja) * 2005-05-23 2011-04-27 株式会社ニコン 光源ユニット、照明光学装置、露光装置、および露光方法
JP6654956B2 (ja) * 2016-04-01 2020-02-26 シーシーエス株式会社 光照射装置
JP2021117326A (ja) * 2020-01-24 2021-08-10 株式会社ブイ・テクノロジー レンズアレイ、ｌｅｄ照明ユニット、露光装置、及び露光方法
JP2021193429A (ja) * 2020-06-08 2021-12-23 株式会社ブイ・テクノロジー 露光用の光源装置、照明装置、露光装置、及び露光方法
JP2022090891A (ja) * 2020-12-08 2022-06-20 キヤノン株式会社 光源装置、冷却方法、及び物品の製造方法

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